Cvd backsheet surface treatment apparatus and method of treatment

Abstract

The application discloses a CVD backboard surface treatment device and a treatment method thereof, which comprises a workbench, a transmission assembly, a cross rod, an extension assembly, a fixing assembly, a laser polisher, a support assembly, a chamfering cutter, an edge grinding roller, a clamping assembly and a wiping sponge, wherein the transmission assembly is fixedly installed on the two sides of the workbench, and the two ends of the cross rod are fixedly installed on the transmission assembly. The application effectively treats the surface of the CVD backboard, chamfers the edges and corners of the CVD backboard, avoids the edges and corners of the CVD backboard from being easily knocked and appearing notches, causes the CVD backboard to have defects, and reduces the qualified rate of finished products. The clamping assembly clamps the CVD backboard placed in the placing through groove, avoids the surface of the CVD backboard from being curved when the chamfering cutter turns the CVD backboard, and avoids the edges and corners of the CVD backboard from being inconsistent. The clamping assembly is used for fixing the CVD backboard, avoids the CVD backboard from shaking left and right in the placing through groove, and avoids the symmetry line of the CVD backboard from deviating from the symmetry line of the placing through groove.

Description

Technical Field

[0001] This invention relates to the field of technology, and more particularly to a CVD backplane surface treatment apparatus and method. Background Technology

[0002] CVD equipment is a specialized device used for CVD processes, and CVD backsheets are components within the CVD equipment. During the processing of CVD backsheets, the surface of the sheet needs to be treated, which affects the use of the CVD equipment. When processing the surface of the CVD backsheet, the edges and corners of the CVD backsheet are easily bumped and dented, resulting in defects in the CVD backsheet and reducing the yield of finished products.

[0003] Therefore, how to provide a CVD backplane surface treatment device and its treatment method is a problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0004] One objective of this invention is to provide a CVD backplane surface treatment device and method. This invention effectively treats the surface of CVD backplanes by chamfering the edges and corners to prevent dents from easily occurring and causing defects, thus reducing the yield rate of finished products. A clamping assembly holds the CVD backplane placed in the placement slot, preventing uneven edges and corners when the chamfering tool is used to turn the CVD backplane, as the surface is curved. The clamping assembly also secures the CVD backplane, preventing it from wobbling left and right in the placement slot and preventing the symmetrical line of the CVD backplane from shifting away from the symmetrical line of the placement slot.

[0005] A CVD backplane surface treatment apparatus and method according to an embodiment of the present invention includes a worktable, a transmission assembly, a crossbar, a telescopic assembly, a fixing assembly, a laser polisher, a support assembly, a chamfering cutter, an edge grinding roller, a clamping assembly, and a wiping sponge. The transmission assembly is fixedly installed on both sides of the worktable, both ends of the crossbar are fixedly installed on the transmission assembly, the telescopic assembly is fixedly installed in the middle of the crossbar, one end of the fixing assembly is fixedly installed on the crossbar, the laser polisher is fixedly installed on the fixing assembly, the support assembly is installed on the telescopic assembly, the chamfering cutter is fixedly installed on the support assembly, both ends of the edge grinding roller are rotatably installed on the support assembly, the clamping assembly is installed inside the worktable, and the top of the wiping sponge is installed at the bottom of the crossbar.

[0006] Furthermore, a support frame is provided at the bottom of the workbench, a working frame is provided at the top of the workbench, a placement slot is provided inside the working frame, a sliding groove is provided at the top of the workbench, and the clamping assembly is installed inside the working frame.

[0007] Furthermore, the transmission assembly includes a transmission motor, a lead screw, a transmission bracket, a displacement box, and a slider. The base of the transmission motor is fixedly installed on both sides of the worktable. The lead screw is fixedly installed on the shaft end of the transmission motor. The transmission bracket is rotatably installed on both ends of the lead screw, and the bottom of the transmission bracket is fixedly installed on the worktable. The displacement box is slidably installed on both sides of the worktable. Both ends of the lead screw pass through the displacement box, and the displacement box and the lead screw are threaded together. The top of the slider is fixedly installed on the bottom of the displacement box, and the slider is located in a sliding groove, and the slider and the sliding groove are in sliding fit.

[0008] Furthermore, both ends of the crossbar are fixedly mounted on the displacement box; The telescopic assembly includes a telescopic bracket, a telescopic motor, a gear set, a telescopic rod, a locking tooth, a first toothed plate, a first displacement rod, a second toothed plate, and a second displacement rod. The telescopic bracket is fixedly installed in the middle of the crossbar. The base of the telescopic motor is fixedly installed on the telescopic bracket, and the motor's shaft extends into the telescopic bracket. All gear sets are rotatably installed within the telescopic bracket, with the input gear of each gear set fixedly installed on the motor's shaft. The telescopic rod is fixedly installed on the telescopic bracket. The end of the locking tooth furthest from the teeth is fixedly installed on the telescopic end of the telescopic rod. The first toothed plate is installed on one side of the output gear of the gear set and meshes with it. The first displacement rod is fixedly installed at both ends of the first toothed plate. The second toothed plate is installed on the other side of the output gear of the gear set and meshes with it. The second displacement rod is fixedly installed at both ends of the first toothed plate.

[0009] Furthermore, the fixing assembly includes a support rod and a sleeve plate, wherein one end of the support rod is fixedly installed on the crossbar, one end of the sleeve plate is fixedly installed on the other end of the support rod, and the other end of the sleeve plate is fixedly connected to the laser polisher.

[0010] Furthermore, the support assembly includes a first slide plate, a first right-angle plate, a second slide plate, and a second right-angle plate, wherein the first slide plate is fixedly mounted on a first displacement rod, the first slide plate is slidably mounted on a second displacement rod, the top of the first right-angle plate is fixedly mounted on the bottom of the first slide plate, the second slide plate is slidably mounted on the first displacement rod, the second slide plate is fixedly mounted on the second displacement rod, and the top of the second right-angle plate is fixedly mounted on the bottom of the second slide plate.

[0011] Furthermore, the chamfering cutter is fixedly installed inside the first right-angle plate, the chamfering cutter is fixedly installed inside the second right-angle plate, and both ends of the edge grinding roller are rotatably installed on the first right-angle plate and both ends of the edge grinding roller are rotatably installed on the second right-angle plate.

[0012] Furthermore, the clamping assembly includes a travel groove, a swing arm, a locking hole, a frame plate, a locking rod, a return spring, a swing plate, and a rotating rod. The travel groove is formed on the working frame, the swing arm is located within the travel groove, the locking hole is formed on the swing arm, the bottom of the frame plate is mounted on the working frame, the locking rod is slidably mounted on the frame plate, the return spring is mounted on the locking rod, the swing plate is located within the working frame, the swing arm is fixedly mounted on the swing plate, and the rotating rod is rotatably mounted on the swing plate.

[0013] Furthermore, the clamping assembly also includes a cam, a curved plate, an opening slot, a top hole, a stop post, a connecting block, a pressure plate, and a compression spring. The cam is fixedly mounted on the rotating rod, the curved plate is fixedly disposed within the working frame, the opening slot is formed on the curved plate, the top hole is formed on the working frame, the curved plate is located on both sides of the top hole, the stop post is slidably mounted on the curved plate, the connecting block is fixedly mounted on the stop post, the pressure plate is fixedly mounted on the connecting block, one end of the compression spring is fixedly mounted within the working frame, and the other end of the compression spring is fixedly mounted on the pressure plate.

[0014] Further processing steps are as follows; Step 1: Place the untreated CVD backplate into the placement slot in the working frame, rotate the swing arm, and the locking hole on the swing arm engages with the locking rod, so that the abutment extends out of the top hole and the abutment presses against both sides of the CVD backplate. Step 2: Turn on the drive motor. The drive motor drives the lead screw. The lead screw rotates and causes the displacement box to slide on the working frame. Then the displacement box drives the crossbar to move. Then the crossbar drives the telescopic component, the fixing component, the laser polisher, the bracket component, the chamfering tool, the grinding roller and the wiping sponge to move. Step 3: During displacement, the surface of the CVD backplate is polished with a laser polisher, then the edges on both sides of the CVD backplate are chamfered with a chamfering tool, then the edges on both sides of the CVD backplate are ground with a grinding roller to remove burrs, and finally the surface of the CVD backplate is wiped with a wiping sponge. Step 4: After one side of the CVD backplate is processed, pull the lever to disengage it from the locking hole of the swing arm. Then rotate the swing arm to retract the abutment into the top hole. The abutment will no longer press against the two sides of the CVD backplate. After turning the CVD backplate over, process the surface of the CVD backplate again. Step 5: After treating both sides of the CVD backplate, replace it with the next batch of CVD backplates for surface treatment.

[0015] The beneficial effects of this invention are: This invention effectively treats the surface of CVD backsheets by chamfering the edges and corners to prevent dents from easily appearing on the edges and corners, which would result in defects in the CVD backsheets and reduce the yield of finished products.

[0016] The clamping assembly of this invention clamps the CVD backplate placed in the placement slot, avoiding the surface of the CVD backplate being curved and the edges and corners of the CVD backplate being inconsistent when the chamfering tool is used to turn the CVD backplate. The clamping assembly is used to fix the CVD backplate, preventing the CVD backplate from wobbling left and right in the placement slot and preventing the symmetry line of the CVD backplate from deviating from the symmetry line of the placement slot. Attached Figure Description

[0017] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings: Figure 1 This is a first-view overall structural schematic diagram of a CVD backplane surface treatment device and its treatment method proposed in this invention. Figure 2 This invention provides a CVD backplane surface treatment apparatus and method. Figure 1 Enlarged view of point A; Figure 3 This invention provides a CVD backplane surface treatment apparatus and method. Figure 1 Enlarged view of point B; Figure 4 This invention provides a CVD backplane surface treatment apparatus and method. Figure 1 Enlarged view of point C; Figure 5 This invention provides a CVD backplane surface treatment apparatus and method. Figure 1 Enlarged view of point D; Figure 6 This is a second-view overall structural schematic diagram of a CVD backplane surface treatment device and its treatment method proposed in this invention. Figure 7 This invention provides a CVD backplane surface treatment apparatus and method. Figure 6 Enlarged view of point E; Figure 8 This invention provides a CVD backplane surface treatment apparatus and method. Figure 6 Enlarged view at point F; Figure 9 This is a partial structural diagram of the card hole in a CVD backplane surface treatment device and treatment method proposed in this invention. Figure 10 This is a third-view overall structural schematic diagram of a CVD backplane surface treatment device and its treatment method proposed in this invention. Figure 11This invention provides a CVD backplane surface treatment apparatus and method. Figure 10 Enlarged view of point G; Figure 12 This is a partial structural schematic diagram of the support column of the CVD backplane surface treatment device and treatment method proposed in this invention; Figure 13 This is a schematic diagram of the structure of the first right-angled plate in the CVD backplane surface treatment device and treatment method proposed in this invention.

[0018] In the diagram: 1. Workbench; 1.1. Support frame; 1.2. Working frame; 1.3. Placement slot; 1.4. Slide groove; 2. Transmission assembly; 2.1. Transmission motor; 2.2. Lead screw; 2.3. Transmission bracket; 2.4. Displacement box; 2.5. Slider; 3. Crossbar; 4. Telescopic assembly; 4.1. Telescopic bracket; 4.2. Telescopic motor; 4.3. Gear assembly; 4.4. Telescopic rod; 4.5. Clamping tooth; 4.6. First gear plate; 4.7. First displacement rod; 4.8. Second gear plate; 4.9. Second displacement rod; 5. Fixing assembly; 5.1. Support rod; 5.2. Sleeve plate; 6. Laser polisher; 7. Bracket Components; 7.1 First sliding plate; 7.2 First right-angle plate; 7.3 Second sliding plate; 7.4 Second right-angle plate; 8. Chamfering cutter; 9. Grinding roller; 10. Clamping assembly; 10.1 Stroke groove; 10.2 Swing rod; 10.3 Clamping hole; 10.4 Frame plate; 10.5 Clamping rod; 10.6 Return spring; 10.7 Swing plate; 10.8 Rotating rod; 10.9 Cam; 10.10 Curved plate; 10.11 Opening groove; 10.12 Top hole; 10.13 Abutment; 10.14 Connecting block; 10.15 Pressure plate; 10.16 Compression spring; 11. Wiping sponge. Detailed Implementation

[0019] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the invention, and therefore only show the components relevant to the invention.

[0020] Please refer to Figures 1 to 13This invention provides a CVD backplane surface treatment device and method, comprising a worktable 1, a transmission assembly 2, a crossbar 3, a telescopic assembly 4, a fixing assembly 5, a laser polisher 6, a support assembly 7, a chamfering cutter 8, a grinding roller 9, a clamping assembly 10, and a wiping sponge 11. The transmission assembly 2 is fixedly installed on both sides of the worktable 1, both ends of the crossbar 3 are fixedly installed on the transmission assembly 2, the telescopic assembly 4 is fixedly installed in the middle of the crossbar 3, one end of the fixing assembly 5 is fixedly installed on the crossbar 3, the laser polisher 6 is fixedly installed on the fixing assembly 5, the laser polisher 6 includes a laser emitting part and a laser glass, the support assembly 7 is installed on the telescopic assembly 4, the chamfering cutter 8 is fixedly installed on the support assembly 7, the chamfering cutter 8 turns the edges of the CVD backplane, both ends of the grinding roller 9 are rotatably installed on the support assembly 7, the grinding roller 9 rolls, the clamping assembly 10 is installed inside the worktable 1, and the top of the wiping sponge 11 is installed on the bottom of the crossbar 3, the wiping sponge 11 is in close contact with the surface of the CVD backplane, and wipes the surface of the CVD backplane.

[0021] Specifically, a support frame 1.1 is provided at the bottom of the worktable 1, a working frame 1.2 is provided at the top of the worktable 1, a placement slot 1.3 is provided inside the working frame 1.2 for placing the CVD backplate, a sliding groove 1.4 is provided at the top of the worktable 1, and the clamping assembly 10 is installed inside the working frame 1.2.

[0022] Furthermore, multiple CVD backplates are placed in the placement slot 1.3. The transmission component 2 drives the crossbar 3, which in turn drives the telescopic component 4, the fixing component 5, the laser polisher 6, the bracket component 7, the chamfering cutter 8, the edge grinding roller 9, and the wiping sponge 11. The chamfering cutter 8 turns the edges and corners of the CVD backplates, and the edge grinding roller 9 grinds the turned surfaces and removes protruding edges and corners. The surface of the wiping sponge 11 is then wiped, and the laser polisher 6 is used to polish the surface of the CVD backplates.

[0023] When the CVD backplate is placed in the placement slot 1.3, the clamping assembly 10 is fixed to prevent the CVD backplate from wobbling left and right in the placement slot 1.3, which would cause the chamfering tool 8 to turn the edges and corners of the CVD backplate inconsistently.

[0024] More specifically, the transmission assembly 2 includes a transmission motor 2.1, a lead screw 2.2, a transmission bracket 2.3, a displacement box 2.4, and a slider 2.5. The base of the transmission motor 2.1 is fixedly installed on both sides of the worktable 1. The lead screw 2.2 is fixedly installed on the shaft end of the transmission motor 2.1. The transmission bracket 2.3 is rotatably installed on both ends of the lead screw 2.2, and the bottom of the transmission bracket 2.3 is fixedly installed on the worktable 1. The displacement box 2.4 is slidably installed on both sides of the worktable 1. Both ends of the lead screw 2.2 pass through the displacement box 2.4, and the displacement box 2.4 and the lead screw 2.2 are threadedly fitted. The top of the slider 2.5 is fixedly installed on the bottom of the displacement box 2.4, and the slider 2.5 is located in the slide groove 1.4, and the slider 2.5 and the slide groove 1.4 are slidably fitted.

[0025] Furthermore, by starting the drive motor 2.1, the shaft of the drive motor 2.1 drives the lead screw 2.2. The displacement box 2.4 is threadedly engaged with the lead screw 2.2. The rotation of the lead screw 2.2 drives the displacement box 2.4 to move. The slider 2.5 of the displacement box 2.4 moves along the groove 1.4 on the top of the worktable 1. Then, the displacement box 2.4 drives the crossbar 3 to move.

[0026] More specifically, both ends of the crossbar 3 are fixedly mounted on the displacement box 2.4; the telescopic assembly 4 includes a telescopic bracket 4.1, a telescopic motor 4.2, a gear set 4.3, a telescopic rod 4.4, a locking tooth 4.5, a first toothed plate 4.6, a first displacement rod 4.7, a second toothed plate 4.8, and a second displacement rod 4.9. The telescopic bracket 4.1 is fixedly mounted in the middle of the crossbar 3, the base of the telescopic motor 4.2 is fixedly mounted on the telescopic bracket 4.1, and the shaft of the telescopic motor 4.2 extends into the telescopic bracket 4.1. All gear sets 4.3 are rotatably mounted within the telescopic bracket 4.1, and the input gear of the gear set 4.3 is fixedly mounted on the shaft of the telescopic motor 4.2. Rod 4.4 is fixedly installed on telescopic bracket 4.1. The end of the locking tooth 4.5 away from the teeth is fixedly installed on the telescopic end of telescopic rod 4.4. There is a sliding block at the bottom of locking tooth 4.5 that slides within the block below locking tooth 4.5. First tooth plate 4.6 is installed on one side of the output gear of gear set 4.3 and meshes with the output gear of gear set 4.3. First displacement rod 4.7 is fixedly installed on both ends of first tooth plate 4.6. Second tooth plate 4.8 is installed on the other side of the output gear of gear set 4.3 and meshes with the output gear of gear set 4.3. Second displacement rod 4.9 is fixedly installed on both ends of first tooth plate 4.6.

[0027] Furthermore, the telescopic motor 4.2 is started and drives the gear set 4.3 to rotate. The rotation of the gear set 4.3 causes the first gear plate 4.6 and the second gear plate 4.8 to move in opposite directions. The first gear plate 4.6 and the second gear plate 4.8 drive the corresponding first displacement rod 4.7 and the second displacement rod 4.9 to move, adjusting the position of the first right-angle plate 7.2 and the second right-angle plate 7.4 on the edge of the CVD back plate.

[0028] Start the telescopic rod 4.4, which in turn drives the locking tooth 4.5 to move, so that the locking tooth 4.5 locks onto the teeth of the gear assembly 4.3 and keeps it in place.

[0029] The crossbar 3 drives the telescopic bracket 4.1, the first displacement rod 4.7, and the second displacement rod 4.9 to move.

[0030] More specifically, the fixing component 5 includes a support rod 5.1 and a sleeve plate 5.2, wherein one end of the support rod 5.1 is fixedly installed on the crossbar 3, one end of the sleeve plate 5.2 is fixedly installed on the other end of the support rod 5.1, and the other end of the sleeve plate 5.2 is fixedly connected to the laser polisher 6.

[0031] More specifically, the displacement of the crossbar 3 causes the support rod 5.1 and the sleeve plate 5.2 to move, and then the laser polisher 6 on the sleeve plate 5.2 polishes the surface of the CVD back plate.

[0032] More specifically, the support assembly 7 includes a first sliding plate 7.1, a first right-angle plate 7.2, a second sliding plate 7.3, and a second right-angle plate 7.4. The first sliding plate 7.1 is fixedly mounted on the first displacement rod 4.7 and slidably mounted on the second displacement rod 4.9. The top of the first right-angle plate 7.2 is fixedly mounted on the bottom of the first sliding plate 7.1. The second sliding plate 7.3 is slidably mounted on the first displacement rod 4.7 and fixedly mounted on the second displacement rod 4.9. The top of the second right-angle plate 7.4 is fixedly mounted on the bottom of the second sliding plate 7.3. A chamfering cutter 8 is fixedly mounted inside the first right-angle plate 7.2 and the chamfering cutter 8 is fixedly mounted inside the second right-angle plate 7.4. Both ends of the edge grinding roller 9 are rotatably mounted on the first right-angle plate 7.2 and both ends of the edge grinding roller 9 are rotatably mounted on the second right-angle plate 7.4.

[0033] More specifically, the movement of the first displacement rod 4.7 and the second displacement rod 4.9 causes the first slide plate 7.1 and the second slide plate 7.3 to move, which in turn causes the first right-angle plate 7.2 and the second right-angle plate 7.4 to move. The first right-angle plate 7.2 and the second right-angle plate 7.4 then cause their respective chamfering tools 8 to turn the CVD backplate. The grinding roller 9 grinds the surface of the edges and corners of the turned CVD backplate to smooth out burrs.

[0034] More specifically, the clamping assembly 10 includes a travel groove 10.1, a rocker arm 10.2, a locking hole 10.3, a frame plate 10.4, a locking rod 10.5, a return spring 10.6, a rocker plate 10.7, and a rotating rod 10.8. The travel groove 10.1 is formed on the working frame 1.2, the rocker arm 10.2 is located in the travel groove 10.1, the locking hole 10.3 is formed on the rocker arm 10.2, the bottom of the frame plate 10.4 is mounted on the working frame 1.2, the locking rod 10.5 is slidably mounted on the frame plate 10.4, the return spring 10.6 is mounted on the locking rod 10.5, the rocker plate 10.7 is located in the working frame 1.2, the rocker arm 10.2 is fixedly mounted on the rocker plate 10.7, and the rotating rod 10.8 is rotatably mounted on the rocker plate 10.7.

[0035] The clamping assembly 10 also includes a cam 10.9, a curved plate 10.10, an opening slot 10.11, a top hole 10.12, a stop post 10.13, a connecting block 10.14, a pressure plate 10.15, and a compression spring 10.16. The cam 10.9 is fixedly mounted on the rotating rod 10.8, the curved plate 10.10 is fixedly set in the working frame 1.2, the opening slot 10.11 is opened on the curved plate 10.10, the top hole 10.12 is opened on the working frame 1.2, the curved plate 10.10 is located on both sides of the top hole 10.12, the stop post 10.13 is slidably mounted on the curved plate 10.10, the connecting block 10.14 is fixedly mounted on the stop post 10.13, the pressure plate 10.15 is fixedly mounted on the connecting block 10.14, one end of the compression spring 10.16 is fixedly mounted in the working frame 1.2, and the other end of the compression spring 10.16 is fixedly mounted on the pressure plate 10.15.

[0036] More specifically, when the CVD backplate is placed in the placement slot 1.3, it is not easy to remove the CVD backplate from the placement slot 1.3 when the size of the placement slot 1.3 matches the size of the CVD backplate. When the size of the placement slot 1.3 is larger than the size of the CVD backplate, the surface of the CVD backplate is curved when the chamfering tool 8 turns the CVD backplate, and the edges and corners of the CVD backplate are inconsistent.

[0037] With the CVD backplate placed in the placement slot 1.3, the swing rod 10.2 rotates toward the clamping rod 10.5. The swing rod 10.2 first pushes against the clamping rod 10.5, and the clamping rod 10.5 moves. At the same time as the clamping rod 10.5 moves, the return spring 10.6 is compressed until the clamping hole 10.3 of the swing rod 10.2 faces the clamping rod 10.5. The clamping rod 10.5 enters the clamping hole 10.3 due to the rebound force of the return spring 10.6, and the swing rod 10.2 is fixed in place.

[0038] During the swing of the swing arm 10.2, the swing arm 10.2 drives the swing plate 10.7, which in turn drives the rotating rod 10.8 to rotate. The rotation of the rotating rod 10.8 drives the rotation of the cam 10.9. The protruding part of the cam 10.9 rotates towards the abutment 10.13 and slides within the curved plate 10.10 against the abutment 10.13. The abutment 10.13 drives the connecting block 10.14 to slide within the opening slot 10.11 of the curved plate 10.10. At the same time, the abutment 10.13 drives the pressure plate 10.15 to compress the compression spring 10.16, causing the abutment 10.13 to extend out of the top hole 10.12. The head of the abutment 10.13 presses against both sides of the CVD backplate, preventing the CVD backplate from swaying left and right in the placement slot 1.3 and preventing the symmetry line of the CVD backplate from deviating from the symmetry line of the placement slot 1.3.

[0039] When the CVD backplate is removed from the placement slot 1.3, the locking rod 10.5 is pulled out of the locking hole 10.3, the swing rod 10.2 is reset, the cam 10.9 is reset, and the compression spring 10.16 drives the abutment 10.13 to reset, so that the abutment 10.13 is no longer pressed against the two sides of the CVD backplate.

[0040] The processing steps are as follows; Step 1: Place the untreated CVD backplate in the placement slot 1.3 in the working frame 1.2, rotate the swing rod 10.2, and the locking hole 10.3 on the swing rod 10.2 is locked with the locking rod 10.5, so that the abutment 10.13 extends out of the top hole 10.12 and the abutment 10.13 presses against both sides of the CVD backplate; Step 2: Turn on the drive motor 2.1. The drive motor 2.1 drives the lead screw 2.2. The lead screw 2.2 rotates and drives the displacement box 2.4 to slide on the working frame 1.2. Then the displacement box 2.4 drives the crossbar 3 to move. Then the crossbar 3 drives the telescopic component 4, the fixing component 5, the laser polisher 6, the bracket component 7, the chamfering tool 8, the edge grinding roller 9, and the wiping sponge 11 to move. Step 3: During displacement, the surface of the CVD backplate is polished by the laser polisher 6, then the chamfering cutter 8 is used to chamfer the edges on both sides of the CVD backplate, then the grinding roller 9 is used to grind the edges on both sides of the CVD backplate to remove burrs, and then the surface of the CVD backplate is wiped by the wiping sponge 11. Step 4: After one side of the CVD backplate is processed, pull the lever 10.5. The lever 10.5 will disengage from the locking hole 10.3 of the swing arm 10.2. Then rotate the swing arm 10.2 so that the abutment post 10.13 retracts into the top hole 10.12. The abutment post 10.13 will no longer press against the two sides of the CVD backplate. After turning the CVD backplate over, process the surface of the CVD backplate again. Step 5: After treating both sides of the CVD backplate, replace it with the next batch of CVD backplates for surface treatment.

[0041] The above are merely preferred embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A CVD backplane surface treatment apparatus, characterized in that, The assembly includes a worktable (1), a transmission component (2), a crossbar (3), a telescopic component (4), a fixing component (5), a laser polisher (6), a support component (7), a chamfering tool (8), a grinding roller (9), a clamping component (10), and a wiping sponge (11). The two transmission components (2) are fixedly installed on both sides of the worktable (1). The two ends of the crossbar (3) are fixedly installed to the two transmission components (2). The telescopic component (4) is fixedly installed in the middle of the crossbar (3). One end of the fixing component (5) is fixedly installed on the crossbar (3). The laser polisher (6) is fixedly installed on the fixing component (5). The support component (7) is installed on the telescopic component (4). The chamfering tool (8) is fixedly installed on the support component (7). The two ends of the grinding roller (9) are rotatably installed on the support component (7). The clamping component (10) is installed inside the worktable (1). The top of the wiping sponge (11) is installed on the bottom of the crossbar (3). The bottom of the workbench (1) is provided with a support frame (1.1), the top of the workbench (1) is provided with a working frame (1.2), the inside of the working frame (1.2) is provided with a placement slot (1.3), the top of the workbench (1) is provided with a sliding groove (1.4), and the clamping assembly (10) is installed inside the working frame (1.2). The transmission assembly (2) includes a transmission motor (2.1), a lead screw (2.2), a transmission bracket (2.3), a displacement box (2.4), and a slider (2.5). The base of the transmission motor (2.1) is fixedly mounted on one side of the worktable (1). The lead screw (2.2) is fixedly mounted on the shaft end of the transmission motor (2.1). The lead screw (2.2) is rotatably mounted on the transmission bracket (2.3), and the bottom of the transmission bracket (2.3) is fixedly mounted on the worktable (1). The displacement box (2.4) is slidably mounted on one side of the worktable (1). Both ends of the lead screw (2.2) pass through the displacement box (2.4), and the displacement box (2.4) and the lead screw (2.2) are threaded together. The top of the slider (2.5) is fixedly mounted on the bottom of the displacement box (2.4), and the slider (2.5) is located within the slide groove (1.4). The slider (2.5) and the slide groove (1.4) are connected. .4) It is a sliding fit; The two ends of the crossbar (3) are respectively fixedly installed on the corresponding displacement box (2.4); The telescopic assembly (4) includes a telescopic bracket (4.1), a telescopic motor (4.2), a gear set (4.3), a telescopic rod (4.4), a locking tooth (4.5), a first toothed plate (4.6), a first displacement rod (4.7), a second toothed plate (4.8), and a second displacement rod (4.9). The telescopic bracket (4.1) is fixedly installed in the middle of the crossbar (3). The base of the telescopic motor (4.2) is fixedly installed on the telescopic bracket (4.1), and the shaft of the telescopic motor (4.2) extends into the telescopic bracket (4.1). The gear set (4.3) is rotatably installed within the telescopic bracket (4.1), and the input gear of the gear set (4.3) is fixedly installed on the shaft of the telescopic motor (4.2). The telescopic rod (4.4) is fixedly installed on the telescopic bracket (4.1). The end of the locking tooth (4.5) away from the teeth is fixedly installed on the telescopic rod (4.9). On the telescopic end of .4), the first toothed plate (4 .6) is installed on one side of the output gear of the gear set (4 .3), and the first toothed plate (4 .6) meshes with the output gear of the gear set (4 .3). The first displacement rods (4 .7) located at both ends of the first toothed plate (4 .6) are fixedly connected to the end of the first toothed plate (4 .6). The second toothed plate (4 .8) is installed on the other side of the output gear of the gear set (4 .3), and the second toothed plate (4 .8) meshes with the output gear of the gear set (4 .3). The second displacement rods (4 .9) located at both ends of the second toothed plate (4 .8) are fixedly connected to the end of the second toothed plate (4 .8).

2. The CVD backplane surface treatment apparatus according to claim 1, characterized in that, The fixing component (5) includes a support rod (5.1) and a sleeve plate (5.2). One end of the support rod (5.1) is fixedly installed on the crossbar (3), and one end of the sleeve plate (5.2) is fixedly installed on the other end of the support rod (5.1). The other end of the sleeve plate (5.2) is fixedly connected to the laser polisher (6).

3. The CVD backplane surface treatment apparatus according to claim 2, characterized in that, The support assembly (7) includes a first sliding plate (7.1), a first right-angle plate (7.2), a second sliding plate (7.3), and a second right-angle plate (7.4). The first sliding plate (7.1) is fixedly mounted on a first displacement rod (4.7) and slidably mounted on a second displacement rod (4.9). The top of the first right-angle plate (7.2) is fixedly mounted on the bottom of the first sliding plate (7.1). The second sliding plate (7.3) is slidably mounted on the first displacement rod (4.7) and fixedly mounted on the second displacement rod (4.9). The top of the second right-angle plate (7.4) is fixedly mounted on the bottom of the second sliding plate (7.3).

4. The CVD backplane surface treatment apparatus according to claim 3, characterized in that, The chamfering cutter (8) located on one side of the first right angle plate (7.2) is fixedly installed inside the first right angle plate (7.2), and the chamfering cutter (8) located on one side of the second right angle plate (7.4) is fixedly installed inside the second right angle plate (7.4). Both ends of the edge grinding roller (9) located on one side of the first right angle plate (7.2) are rotatably installed on the first right angle plate (7.2), and both ends of the edge grinding roller (9) located on one side of the second right angle plate (7.4) are rotatably installed on the second right angle plate (7.4).

5. The CVD backplane surface treatment apparatus according to claim 4, characterized in that, The clamping assembly (10) includes a travel groove (10.1), a swing rod (10.2), a locking hole (10.3), a support plate (10.4), a locking rod (10.5), a return spring (10.6), a swing plate (10.7), and a rotating rod (10.8). The travel groove (10.1) is formed on the working frame (10.2), the swing rod (10.2) is located within the travel groove (10.1), the locking hole (10.3) is formed on the swing rod (10.2), the bottom of the support plate (10.4) is mounted on the working frame (10.2), the locking rod (10.5) is slidably mounted on the support plate (10.4), the return spring (10.6) is mounted on the locking rod (10.5), and the swing plate (10.7) is located on the working frame (10.8). .2) Inside, the swing rod (10.2) is fixedly installed on the swing plate (10.7), and the rotating rod (10.8) is rotatably installed on the swing plate (10.7).

6. The CVD backplane surface treatment apparatus according to claim 5, characterized in that, The clamping assembly (10) further includes a cam (10.9), a curved plate (10.10), an opening slot (10.11), a top hole (10.12), a stop post (10.13), a connecting block (10.14), a pressure plate (10.15), and a compression spring (10.16). The cam (10.9) is fixedly mounted on the rotating rod (10.8), the curved plate (10.10) is fixedly disposed within the working frame (10.2), the opening slot (10.11) is formed on the curved plate (10.10), the top hole (10.12) is formed on the working frame (10.2), the curved plate (10.10) is located on both sides of the top hole (10.12), the stop post (10.13) is slidably mounted on the curved plate (10.10), and the connecting block (10.14) is fixedly mounted on the stop post (10.16). On the .13), the pressure plate (10.15) is fixedly installed on the connecting block (10.14), one end of the compression spring (10.16) is fixedly installed inside the working frame (1.2), and the other end of the compression spring (10.16) is fixedly installed on the pressure plate (10.15).

7. The processing method of the CVD backplane surface treatment apparatus according to claim 6, characterized in that, The processing steps are as follows; Step 1: Place the untreated CVD backplate in the placement slot (1.3) in the working frame (1.2), rotate the swing arm (10.2), and the locking hole (10.3) on the swing arm (10.2) engages with the locking rod (10.5), so that the abutment (10.13) extends out of the top hole (10.12) and the abutment (10.13) presses against both sides of the CVD backplate; Step 2: Turn on the drive motor (2.1). The drive motor (2.1) drives the lead screw (2.2) to rotate. The rotation of the lead screw (2.2) drives the displacement box (2.4) to slide on the working frame (1.2). Then the displacement box (2.4) drives the crossbar (3) to move. Then the crossbar (3) drives the telescopic component (4), the fixing component (5), the laser polisher (6), the bracket component (7), the chamfering tool (8), the edge grinding roller (9), and the wiping sponge (11) to move. Step 3: During displacement, the surface of the CVD backplate is polished by a laser polisher (6), the edges on both sides of the CVD backplate are chamfered by a chamfering tool (8), the edges on both sides of the CVD backplate are ground by a grinding roller (9) to remove burrs, and the surface of the CVD backplate is wiped by a wiping sponge (11). Step 4: After one side of the CVD backplate is treated, pull the lever (10.5). The lever (10.5) will disengage from the locking hole (10.3) of the swing arm (10.2). Then rotate the swing arm (10.2) so that the abutment (10.13) retracts into the top hole (10.12). The abutment (10.13) will no longer press against the two sides of the CVD backplate. After flipping the CVD backplate over, treat the surface of the CVD backplate again. Step 5: After treating both sides of the CVD backplate, replace it with the next batch of CVD backplates for surface treatment.

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