Powder coating apparatus and method of coating

Abstract

The application belongs to the technical field of magnetron sputtering powder coating, and discloses a powder coating device and a coating method thereof. The coating method comprises the following steps: in response to a starting instruction input by a worker, the powder coating device drives a rotating table to rotate around the center of the rotating table, drives an inclined sample table to rotate around the center of the inclined sample table, and drives a magnetron target to sputter a coating raw material, so that the coating raw material is uniformly attached to the surface of the powder flowing in the inclined sample table; after a preset period, the powder coating device drives all components to stop running, and the powder with a uniform surface coating is obtained; the powder is coated through the powder coating device and the corresponding coating method, and the efficiency of powder coating is improved.

Description

Technical Field

[0001] This application relates to the technical field of magnetron sputtering powder coating, and more specifically, to a powder coating apparatus and a coating method thereof. Background Technology

[0002] Powder coating is a widely used technique for surface modification and enhanced adhesion of various materials. Its main goal is to improve the physical and chemical properties of material surfaces to increase their adhesion strength to other materials, enhance wear resistance, improve corrosion resistance, and improve electrical properties. Currently, the main powder coating processes include atomic layer deposition (ALD) and chemical vapor deposition (CVD). These processes require precursors as coating gases, and the types of coatings are limited, resulting in higher costs. However, these processes still hold an irreplaceable position in certain specific applications, such as semiconductor manufacturing and optoelectronic device manufacturing.

[0003] Magnetron sputtering is a commonly used thin film deposition technique that generates high-energy electrons on the surface of a solid target, exciting target atoms and depositing them onto the substrate to form a thin film. Compared to traditional gas-based methods such as ALD (Atomic Layer Deposition) and CVD (Chemical Vapor Deposition), magnetron sputtering offers advantages such as ease of operation, low equipment cost, good film thickness uniformity, and high deposition rate. Despite these advantages, magnetron sputtering cannot be used with traditional sample stages for powder coating. To address these issues, researchers have proposed many new sample stage designs and control strategies, such as using columnar targets combined with rolling to improve sample coverage and film thickness uniformity. However, columnar targets for some materials have high synthesis costs and require large amounts of powder, resulting in high costs during process development. Other researchers have designed a vibrating sample stage, but this suffers from problems such as limited sample volume, restricted film uniformity, and susceptibility to sputtering.

[0004] Therefore, in order to solve the technical problem that magnetron sputtering technology cannot use traditional sample stages, a powder coating device is urgently needed. Summary of the Invention

[0005] The purpose of this application is to provide a powder coating apparatus and a coating method thereof, which solves the problem that magnetron sputtering technology cannot use a traditional sample stage, and can achieve high-quality and uniform powder coating, reduce production costs, and improve powder coating efficiency.

[0006] In a first aspect, this application provides a powder coating apparatus for coating powder, comprising a magnetron chamber, an inclined sample stage and a magnetron target disposed inside the magnetron chamber; the inclined sample stage is a grooved disk; the inclined sample stage is placed at an angle to a horizontal plane; the inclined sample stage is capable of rotating around its midpoint; The inclined sample stage is used to store powder; The inclined sample stage is provided with multiple torsion ribs; the torsion ribs are used to stir the powder when the inclined sample stage rotates around the midpoint, so as to improve the powder's fluidity and thus achieve uniform powder coating. The magnetron chamber is used to provide the necessary sealed environment for the powder coating process; The magnetron target is used to deliver coating raw materials for the powder coating process.

[0007] The powder coating apparatus provided in this application can coat powder. Through the cooperation of the various components of the powder coating apparatus, including the magnetron sputtering cavity, the inclined sample stage, and the magnetron target, the powder can be coated. This solves the problem that magnetron sputtering technology cannot use a traditional sample stage, and can achieve high-quality and uniform powder coating, reduce production costs, and improve powder coating efficiency.

[0008] Optionally, the plurality of the torsion ribs are radially and uniformly distributed within the inclined sample stage.

[0009] Optionally, the height of the torsion rib is less than the cavity depth of the inclined sample stage, and the length of the torsion rib is less than the radius of the inclined sample stage; the lower edge of the torsion rib is in contact with the bottom wall of the inclined sample stage, the first end of the torsion rib is perpendicular to the inner peripheral wall of the inclined sample stage, and the torsion rib gradually twists from the first end to the second end.

[0010] Optionally, a channel hole is provided at the angle between the inclined sample stage and the torsion rib; The channel hole penetrates the torsion rib and allows powder at the angle between the torsion rib and the inner peripheral wall of the inclined sample stage to pass through.

[0011] The powder coating apparatus provided in this application can coat powder. The powder at the angle between any torsion rib and the inner peripheral wall of the inclined sample stage is transported to the next torsion rib through the channel hole, so that the powder flows and uniform coating is achieved, which is beneficial to achieving high-quality and uniform powder coating.

[0012] Optionally, the powder coating apparatus further includes a linkage mechanism and a turntable located inside the magnetron chamber; the inclined sample stage, the linkage mechanism, and the turntable are connected in sequence; the turntable is placed horizontally on the bottom surface inside the magnetron chamber; The linkage mechanism is used to fix the relative position of the inclined sample stage and the turntable; The turntable is used to drive the linkage mechanism to rotate, thereby causing the inclined sample stage to rotate.

[0013] The powder coating apparatus provided in this application can coat powder. Through the linkage mechanism and turntable, the inclined sample stage is rotated so that the powder in the inclined sample stage can fully contact the coating raw materials distributed in various positions of the magnetron cavity, which is conducive to achieving high-quality and uniform powder coating and improving the powder coating efficiency.

[0014] Optionally, the linkage mechanism includes a steering linkage and a fixed linkage; one end of the steering linkage is hinged to one end of the fixed linkage, and the other end of the steering linkage is connected to the inclined sample stage; the other end of the fixed linkage is fixedly connected to the turntable. The steering linkage is used to drive the inclined sample stage to rotate, thereby adjusting the tilt angle of the inclined sample stage.

[0015] Optionally, the powder coating apparatus further includes a drive motor assembly; The drive motor assembly is used to drive the inclined sample stage, the turntable, and the magnetron target.

[0016] Optionally, the drive motor assembly includes a first drive motor, a second drive motor, and a third drive motor; The first drive motor is used to drive the inclined sample stage to rotate around the center of the inclined sample stage; The second drive motor is used to drive the turntable to rotate around the center of the turntable, so as to drive the inclined sample stage to rotate through the linkage mechanism; The third drive motor is used to drive the magnetron target to sputter the coating raw material.

[0017] Secondly, this application provides a powder coating method, applied to the powder coating apparatus described above to coat powder, comprising the following steps: In response to the start command input by the operator, the powder coating device drives the turntable to rotate around the center of the turntable, drives the inclined sample stage to rotate around the center of the inclined sample stage, and drives the magnetron target to sputter the coating raw material, so that the coating raw material is uniformly attached to the surface of the powder flowing in the inclined sample stage. After a preset cycle, the powder coating device drives all components to stop operating, resulting in powder with a uniform surface coating.

[0018] The powder coating apparatus provided in this application can coat powder. By using the powder coating apparatus and the corresponding coating method to coat powder, the problem that magnetron sputtering technology cannot use a traditional sample stage can be solved. It can achieve high-quality and uniform powder coating, reduce production costs, and improve powder coating efficiency.

[0019] Optionally, in response to a start command input by the operator, before the powder coating apparatus drives the turntable to rotate around the center of the turntable, drives the inclined sample stage to rotate around the center of the inclined sample stage, and drives the magnetron target to sputter the coating raw material, the apparatus further includes: The powder is placed in the inclined sample stage using an external robotic arm.

[0020] Beneficial effects: The powder coating apparatus and coating method provided in this application can coat powder by means of the powder coating apparatus and the corresponding coating method, which solves the problem that magnetron sputtering technology cannot use a traditional sample stage, realizes the automated production of metal powder, and improves the efficiency of powder coating. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the powder coating apparatus provided in the embodiments of this application.

[0022] Figure 2 A flowchart of a powder coating method provided in an embodiment of this application.

[0023] Figure 3 This is a schematic diagram of the inclined sample stage.

[0024] Figure 4 This is a partial front view of the disk on the inclined sample stage.

[0025] Labeling explanations: 1. Inclined sample stage; 11. Torsional rib; 12. Disc; 13. Channel hole; 2. Linkage mechanism; 21. Steering linkage; 22. Fixed linkage; 3. Turntable; 4. Magnetically controlled target; 5. Magnetically controlled cavity. Detailed Implementation

[0026] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0027] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the description of this application, terms such as "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0028] Please refer to Figure 1 , Figure 1 This is a schematic diagram of a powder coating apparatus according to some embodiments of this application. The powder coating apparatus is used to coat powder and includes a magnetron cavity 5, and an inclined sample stage 1 and a magnetron target 4 disposed inside the magnetron cavity 5. The inclined sample stage 1 is a groove-shaped disk. The inclined sample stage 1 is placed at an inclination to the horizontal plane. The inclined sample stage 1 can rotate around its midpoint. The inclined sample stage 1 is used to store powder; Multiple torsion ribs 11 are provided inside the inclined sample stage 1; the torsion ribs 11 are used to stir the powder when the inclined sample stage 1 rotates around the midpoint, so as to improve the flowability of the powder and thus achieve uniform coating of the powder. The magnetron chamber 5 is used to provide the necessary sealed environment for the powder coating process; The magnetron target 4 is used to deliver coating raw materials for the powder coating process.

[0029] In practical applications, the powder coating device uses an inclined sample stage 1, a magnetron target 4, and a magnetron cavity 5 to coat powder through the cooperation of its various components. This solves the problem that magnetron sputtering technology cannot use a traditional sample stage, enabling high-quality and uniform powder coating, reducing production costs, and improving powder coating efficiency.

[0030] Specifically, the depth of the inclined sample stage 1 is 2~12cm; the radius of the inclined sample stage 1 is 5~30cm; and the tilt angle of the inclined sample stage 1 relative to the horizontal plane is 10~60°.

[0031] In specific applications, the inclined sample stage 1 is placed at an angle to the horizontal plane inside the magnetron cavity 5. When the powder coating device is working, the inclined sample stage 1 will rotate around the center. Driven by the inclined sample stage 1, the powder placed in the inclined sample stage 1 will flow from high to low along the torsional rib 11 (that is, driven by the inclined sample stage 1, the torsional rib 11 stirs the powder). The flowing powder can fully contact the coating raw material, so that the coating raw material can be evenly attached to the surface of the powder, thereby achieving uniform powder coating.

[0032] Specifically, multiple torsion ribs 11 are radially and evenly distributed within the inclined sample stage 1. Generally, the number of torsion ribs 11 is 6 to 8, which can be set according to actual needs.

[0033] Specifically, the height of the torsion rib 11 is less than the depth of the cavity of the inclined sample stage 1, the length of the torsion rib 11 is less than the radius of the inclined sample stage 1, and the width of the torsion rib 11 is generally set to 1~3mm. The lower edge of the torsion rib 11 is in contact with the bottom wall of the inclined sample stage 1. The first end of the torsion rib 11 (the first end is the end of the torsion rib 11 close to the inner peripheral wall of the inclined sample stage 1, and the second end is the end of the torsion rib 11 away from the inner peripheral wall of the inclined sample stage 1) is perpendicular to the inner peripheral wall of the inclined sample stage 1. From the first end to the second end, the torsion rib 11 gradually twists. The torsion angle formed by one end of the torsion rib 11 and the other end is 10~60°, which can be set according to actual needs. The difference between the torsion angle of the torsion rib 11 and the tilt angle of the inclined sample stage 1 is less than a preset angle difference (which can be set according to actual needs).

[0034] A torsion angle is set at one end of the torsion rib 11 away from the inner peripheral wall of the inclined sample stage 1, so that the effective area of ​​the powder facing the target (magnetic target 4) is increased, thereby improving the production efficiency of the coating powder, shortening the production cycle of the coating powder, and increasing the production capacity of the coating powder.

[0035] In specific applications, such as Figure 3 As shown, Figure 3 The diagram shows the structure of the inclined sample stage 1. The inner peripheral wall of the inclined sample stage 1 is provided with multiple torsion ribs 11. When the powder coating device is working, the inclined sample stage 1 rotates around the center, and the multiple torsion ribs 11 rotate with the rotation of the inclined sample stage 1, thereby driving the powder to flow in the inclined sample stage 1, so that the powder can achieve uniform coating.

[0036] Specifically, a channel hole 13 is provided at the angle between the inclined sample stage 1 and the torsion rib plate 11; The channel hole 13 passes through the torsion rib 11 and is used to allow powder at the angle between the corresponding torsion rib 11 and the inner peripheral wall of the inclined sample stage 1 to pass through.

[0037] In specific applications, such as Figure 4 As shown, Figure 4This is a partial front view of the disk 12 of the inclined sample stage 1, where a is the bottom of the disk 12 and b is the peripheral wall of the disk 12. When the powder coating device is working, the inclined sample stage 1 will rotate. The powder located at the angle between the torsion rib 11 and the inner peripheral wall of the inclined sample stage 1 is prone to stagnation and lack of fluidity, thus failing to make sufficient contact with the coating raw material, resulting in uneven coating. Therefore, a channel hole 13 is provided at the angle between the torsion rib 11 and the inner peripheral wall of the inclined sample stage 1, so that the powder at the angle can be transported to the next torsion rib 11, so as to ensure that the powder in the inclined sample stage 1 can flow smoothly and make sufficient contact with the coating raw material, thereby achieving uniform powder coating.

[0038] Specifically, such as Figure 1 As shown, the powder coating apparatus also includes a linkage mechanism 2 and a turntable 3 located inside the magnetron cavity 5; the inclined sample stage 1, the linkage mechanism 2, and the turntable 3 are connected in sequence; the turntable 3 is placed horizontally on the bottom surface inside the magnetron cavity 5. The linkage mechanism 2 is used to fix the relative position of the inclined sample stage 1 and the turntable; The turntable 3 is used to drive the linkage mechanism 2 to rotate, thereby driving the inclined sample stage 1 to rotate.

[0039] In practical applications, the rotation of the turntable 3 drives the linkage mechanism 2 to rotate, thereby causing the inclined sample stage 1 to rotate. This allows the powder to fully contact the coating raw materials located in various positions inside the magnetron cavity 5, so as to make full use of the coating raw materials for powder coating.

[0040] Specifically, the linkage mechanism 2 includes a steering linkage 21 and a fixed linkage 22; one end of the steering linkage 21 is hinged to one end of the fixed linkage 22, and the other end of the steering linkage 21 is connected to the inclined sample stage 1; the other end of the fixed linkage 22 is fixedly connected to the turntable 3. The steering linkage 21 is used to drive the inclined sample stage 1 to rotate, thereby adjusting the tilt angle of the inclined sample stage 1.

[0041] In practical applications, the tilt angle of the inclined sample stage 1 relative to the horizontal plane can be adjusted by adjusting the relative angle between the steering linkage 21 and the fixed linkage 22.

[0042] When the powder coating apparatus is working, the magnetron target 4 sputters the coating material, and the turntable 3 rotates around its center. The rotation of the turntable 3 drives the linkage mechanism 2 to rotate, which in turn drives the inclined sample stage 1 connected to the linkage mechanism 2 to rotate (the inclined sample stage 1 rotates around its center while simultaneously rotating with the linkage mechanism 2). This ensures that the coating material remaining in various positions within the magnetron cavity 5 is fully utilized. The rotation direction of the turntable 3 is not the same as the rotation direction of the inclined sample stage 1 (i.e., when the turntable 3 rotates counterclockwise, the inclined sample stage 1 rotates clockwise, or vice versa), to improve powder flowability, making the powder flow more smoothly and allowing the coating material to adhere more evenly to the powder surface, thus achieving uniform powder coating.

[0043] Specifically, the powder coating apparatus also includes a drive motor assembly; The drive motor assembly is used to drive the inclined sample stage 1, the turntable 3, and the magnetic target 4.

[0044] Specifically, the drive motor assembly includes a first drive motor, a second drive motor, and a third drive motor; The first drive motor is used to drive the inclined sample stage 1 to rotate around the center of the inclined sample stage 1; The second drive motor is used to drive the turntable 3 to rotate around the center of the turntable 3, so as to drive the inclined sample stage 1 to rotate through the linkage mechanism 2; The third drive motor is used to drive the magnetron target 4 to sputter coating raw materials.

[0045] In specific applications, when the powder coating device is working, the first drive motor and the second drive motor drive the inclined sample stage 1 and the turntable 3 to rotate, so that the powder flows in the inclined sample stage 1. The third drive motor drives the magnetron sputtering target 4 to sputter the coating raw material, so that the coating raw material can be uniformly attached to the surface of the powder to achieve uniform powder coating.

[0046] refer to Figure 2 , Figure 2 This is a flowchart of a powder coating method provided in an embodiment of this application. The powder coating method is applied to the powder coating apparatus described above and includes: In step S101, in response to the start command input by the operator, the powder coating device drives the turntable 3 to rotate around the center of the turntable 3, drives the inclined sample stage 1 to rotate around the center of the inclined sample stage 1, and drives the magnetron target 4 to sputter the coating material so that the coating material is uniformly attached to the surface of the powder flowing in the inclined sample stage 1. In step S102, after a preset cycle, the powder coating device drives all components to stop running, resulting in powder with a uniform surface coating.

[0047] In practical applications, after the operator inputs a start command, the powder coating device responds by driving the turntable 3 to rotate around its center, driving the inclined sample stage 1 to rotate around its center, and driving the magnetron sputtering target 4 to sputter the coating material. Under the rotation of the turntable 3 and the inclined sample stage 1, the powder flows within the inclined sample stage 1, ensuring that the coating material adheres evenly to the powder surface. After a preset cycle, the powder coating device stops all components, and a uniformly adhered coating forms on the surface of the powder in the inclined sample stage 1, resulting in a powder with a uniformly coated surface. The preset cycle can be set according to actual needs.

[0048] Specifically, before step S101, the method further includes: The powder is placed in an inclined sample stage using an external robotic arm.

[0049] Before coating the powder, an external robotic arm can place the powder in an inclined sample stage 1. The powder can be placed in a container according to a preset weight (which can be set according to actual needs), and the external robotic arm can pour the powder from the container directly into the inclined sample stage 1 during operation.

[0050] In some embodiments, the powder in the container can also be placed in the inclined sample stage 1 manually.

[0051] As can be seen from the above, this powder coating apparatus, in response to the start command input by the operator, drives the turntable 3 to rotate around the center of the turntable 3, drives the inclined sample stage 1 to rotate around the center of the inclined sample stage 1, and drives the magnetron target 4 to sputter the coating raw material, so that the coating raw material is uniformly attached to the surface of the powder flowing in the inclined sample stage 1. After a preset cycle, the powder coating apparatus drives all components to stop running, resulting in powder with a uniform surface coating. Thus, by using the powder coating apparatus and the corresponding coating method to coat powder, the problem that magnetron sputtering technology cannot use a traditional sample stage is solved, and the efficiency of powder coating is improved.

[0052] In the embodiments provided in this application, it should be understood that the disclosed apparatus and methods can be implemented in other ways. The apparatus embodiments described above are merely illustrative. For example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Additionally, the displayed or discussed mutual couplings, direct couplings, or communication connections may be through some communication interfaces; indirect couplings or communication connections between devices or units may be electrical, mechanical, or other forms.

[0053] Furthermore, the units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment, depending on actual needs.

[0054] Furthermore, the functional modules in the various embodiments of this application can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.

[0055] In this document, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, without necessarily requiring or implying any such actual relationship or order between these entities or operations.

[0056] The above description is merely an embodiment of this application and is not intended to limit the scope of protection of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. A powder coating apparatus for coating powder, characterized in that, It includes a magnetron cavity (5), and an inclined sample stage (1) and a magnetron target (4) disposed inside the magnetron cavity (5); the inclined sample stage (1) is a grooved disk; the inclined sample stage (1) is placed at an inclination to the horizontal plane; the inclined sample stage (1) is capable of rotating around the midpoint; The inclined sample stage (1) is used to store powder; The inclined sample stage (1) is provided with a plurality of torsion ribs (11); the torsion ribs (11) are used to stir the powder when the inclined sample stage (1) rotates around the midpoint, so as to improve the flowability of the powder and thus achieve uniform coating of the powder. The magnetron chamber (5) is used to provide the necessary sealed environment for the powder coating process; The magnetron target (4) is used to deliver coating raw materials for the powder coating process; The height of the torsion rib (11) is less than the cavity depth of the inclined sample stage (1), and the length of the torsion rib (11) is less than the radius of the inclined sample stage (1). The lower edge of the torsion rib (11) is in contact with the bottom wall of the inclined sample stage (1). The first end of the torsion rib (11) is perpendicular to the inner peripheral wall of the inclined sample stage (1). From the first end to the second end, the torsion rib (11) gradually twists. The powder coating device also includes a linkage mechanism (2) and a turntable (3) located inside the magnetron cavity (5); the inclined sample stage (1), the linkage mechanism (2), and the turntable (3) are connected in sequence; the turntable (3) is placed horizontally on the bottom surface inside the magnetron cavity (5); The linkage mechanism (2) is used to fix the relative position of the inclined sample stage (1) and the turntable (3); The turntable (3) is used to drive the linkage mechanism (2) to rotate, so as to drive the inclined sample stage (1) to rotate; The linkage mechanism (2) includes a steering linkage (21) and a fixed linkage (22); one end of the steering linkage (21) is hinged to one end of the fixed linkage (22), and the other end of the steering linkage (21) is connected to the inclined sample stage (1); the other end of the fixed linkage (22) is fixedly connected to the turntable (3). The steering linkage (21) is used to drive the inclined sample stage (1) to rotate, thereby adjusting the tilt angle of the inclined sample stage (1).

2. The powder coating apparatus according to claim 1, characterized in that, Multiple torsion ribs (11) are radially and uniformly distributed within the inclined sample stage (1).

3. The powder coating apparatus according to claim 1, characterized in that, A channel hole (13) is provided at the angle between the inclined sample stage (1) and the torsion rib (11). The channel hole (13) passes through the torsion rib (11) and is used to allow powder at the angle between the torsion rib (11) and the inner peripheral wall of the inclined sample stage (1) to pass through.

4. The powder coating apparatus according to claim 1, characterized in that, The powder coating device also includes a drive motor assembly; The drive motor assembly is used to drive the inclined sample stage (1), the turntable (3) and the magnetron target (4).

5. The powder coating apparatus according to claim 4, characterized in that, The drive motor assembly includes a first drive motor, a second drive motor, and a third drive motor; The first drive motor is used to drive the inclined sample stage (1) to rotate around the center of the inclined sample stage (1); The second drive motor is used to drive the turntable (3) to rotate around the center of the turntable (3), so as to drive the inclined sample stage (1) to rotate through the linkage mechanism (2); The third drive motor is used to drive the magnetron target (4) to sputter the coating raw material.

6. A powder coating method, applied to the powder coating apparatus of claim 5 to coat powder, characterized in that, Including the following steps: In response to the start command input by the staff, the powder coating device drives the turntable (3) to rotate around the center of the turntable (3), drives the inclined sample stage (1) to rotate around the center of the inclined sample stage (1), and drives the magnetron target (4) to sputter the coating raw material so that the coating raw material is uniformly attached to the surface of the powder flowing in the inclined sample stage (1). After a preset cycle, the powder coating device drives all components to stop operating, resulting in powder with a uniform surface coating.

7. The powder coating method according to claim 6, characterized in that, In response to a start command input by the operator, before the powder coating apparatus drives the turntable to rotate around the center of the turntable, drives the inclined sample stage (1) to rotate around the center of the inclined sample stage (1), and drives the magnetron target (4) to sputter the coating raw material, it further includes: The powder is placed in the inclined sample stage (1) by an external robotic arm.

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