A vacuum leakage troubleshooting device and a vacuum leakage troubleshooting method

Abstract

The application provides a vacuum leakage checking device and a vacuum leakage checking method, the device comprising: a tee pipe having a first interface, a second interface and a third interface, the first interface being used for connecting with a measured vacuum pipe; a vacuum pressure gauge connected to the second interface and used for monitoring the vacuum pressure in the tee pipe; and a pressure relief end cover connected to the third interface and used for controlling the opening or closing of the third interface. The internal pressure of the pipe is detected by the vacuum pressure gauge to determine whether there is pressure relief, thereby realizing rapid checking of vacuum leakage. After detection, the pressure relief end cover is opened to release the internal pressure of the pipe, thereby avoiding the problem that the vacuum leakage checking device is difficult to disassemble due to internal negative pressure. The vacuum leakage checking device of the present scheme is only composed of a tee pipe, a vacuum pressure gauge and a pressure relief end cover, has a simple structure, a small size and is convenient to use, and only needs to be simply connected to the end of the measured pipe.

Description

Technical Field

[0001] This application relates to the technical field of vacuum equipment troubleshooting, and in particular to a vacuum leak detection device and a vacuum leak detection method. Background Technology

[0002] The plasma cleaning stage in semiconductor manufacturing requires a vacuum environment. This is achieved by providing a sealed chamber for cleaning the semiconductors, with vacuum equipment connected to this chamber via vacuum pipes. The vacuum equipment evacuates air to create a vacuum environment for the semiconductors. Depending on the factory layout, the vacuum equipment is typically connected to the sealed chamber via multiple interconnected vacuum pipes, sealed together with flanges and sealing rings. When a vacuum abnormality occurs (usually due to leakage causing excessive vacuum pressure), the specific fault must be identified and repaired. Typical semiconductor factories lack dedicated testing equipment. When a vacuum leak occurs, troubleshooting is time-consuming, sometimes requiring the manufacturer to come to the factory for repairs, resulting in high repair costs, low efficiency, and time consumption, impacting the progress of subsequent processes. Summary of the Invention

[0003] The purpose of this invention is to provide a vacuum leak detection device and a vacuum leak detection method, which can solve the above-mentioned problems existing in the prior art.

[0004] To achieve the above objectives, this application adopts the following technical solution:

[0005] A vacuum leak detection device, comprising:

[0006] The three-way tube has a first interface, a second interface and a third interface, wherein the first interface is used to connect to the vacuum tube under test;

[0007] A vacuum pressure gauge, connected to the second interface, is used to monitor the vacuum pressure inside the three-way tube;

[0008] A pressure relief cap, connected to the third interface, is used to control the opening or closing of the third interface.

[0009] Optionally, the pressure relief end cap includes an end cap base and an end cap plate. The end cap base is fixedly installed on the third interface. The end cap base has a pressure relief port. The opening and closing of the pressure relief port is controlled by opening and closing the end cap plate, thereby controlling the opening and closing of the third interface.

[0010] Optionally, the end cap seat includes a connecting cylinder and an end plate fixedly connected to one end of the connecting cylinder. The connecting cylinder is sleeved with the third interface. The pressure relief port is disposed on the end plate, and the diameter of the pressure relief port is smaller than the diameter of the third interface.

[0011] Optionally, the end plate is provided with a connecting nozzle that surrounds the pressure relief port.

[0012] Optionally, one side of the end cover is hinged to the end plate, and the opening and closing of the pressure relief port can be controlled by flipping the end cover.

[0013] Optionally, a latch is provided between the end cover plates to lock most of the end cover plates in a closed state of the pressure relief port.

[0014] Optionally, a sealing ring is provided on the inner side of the end cover plate to abut against the connecting nozzle to enhance the seal.

[0015] On the other hand, a method for troubleshooting vacuum leaks is provided, used to locate leaks in the piping of a vacuum pumping device. The vacuum pumping device includes a vacuum machine and several vacuum tubes connected end-to-end, and includes the following steps:

[0016] Disconnect the tubing at the rear end of the vacuum tube to be tested;

[0017] Connect the first port of the T-connector to the rear end of the vacuum tube under test;

[0018] Connect the vacuum pressure gauge to the vacuum electromechanical system;

[0019] Start the vacuum machine and determine whether there is a leak at the front end of the vacuum tube based on the pressure display value of the vacuum machine;

[0020] Open the pressure relief cap to release the pressure, then remove the tee pipe.

[0021] Optionally, a compromise method can be used to check all the vacuum tubes, specifically as follows:

[0022] S1. Select the middle vacuum tube as the vacuum tube to be tested for inspection. If no leakage is found, it indicates that the leakage location is behind the vacuum tube. Proceed to step S2. If a leakage is found, it indicates that the leakage location is in front of the vacuum tube. Proceed to step S3.

[0023] S2. Remove the T-connector, reconnect half of the vacuum tubes behind it, and then reconnect the T-connector for testing;

[0024] S3. Remove the T-connector, remove half of the vacuum tubes in front of the T-connector, and then reconnect the T-connector for testing;

[0025] Repeat the above steps until the exact location of the leak is found.

[0026] Optionally, when determining whether there is a leak at the front end of the vacuum tube based on the pressure display value of the vacuum machine, if the pressure display value is less than 50% of the vacuum setting value, it indicates that there is no leak; if the pressure display value is greater than 50% of the vacuum setting value, it indicates that there is a leak.

[0027] The beneficial effects of this application are as follows: This invention provides a vacuum leak detection device and a vacuum leak detection method. The device includes a vacuum pressure gauge and a pressure relief end cap installed on a three-way pipe. By detecting the internal pressure of the pipeline through the vacuum pressure gauge, it is possible to determine whether there is a pressure leak, thereby achieving rapid detection of vacuum leaks. After detection, the pressure relief end cap can be opened to release pressure into the pipeline, avoiding the problem of difficult disassembly of the vacuum leak detection device due to internal negative pressure.

[0028] In the method of this invention, the vacuum leak detection device of this solution is used to detect leaks in the pipeline. It only requires simple pipe disassembly, installation of the vacuum leak detection device, and wiring of the vacuum pressure gauge. The vacuum leak detection device of this solution is small in size, which facilitates the inspection of various parts of the pipeline. At the same time, it is easy to install. The vacuum pressure gauge is directly wired to the vacuum machine, and the vacuum machine displays the measured pressure. That is, this solution makes full use of existing equipment to achieve the detection purpose, simplifies the structure of the vacuum leak detection device, and reduces the manufacturing cost of the detection device. Attached Figure Description

[0029] The present application will now be described in further detail with reference to the accompanying drawings and embodiments.

[0030] Figure 1 This is a schematic diagram of the vacuum leak detection device described in the embodiments of this application;

[0031] Figure 2 This is one of the structural schematic diagrams of the pressure relief end cap described in the embodiments of this application;

[0032] Figure 3 This is a second schematic diagram of the structure of the pressure relief end cap described in the embodiments of this application;

[0033] Figure 4 This is a schematic diagram illustrating the principle of leak detection in the vacuum equipment described in this application embodiment.

[0034] In the picture:

[0035] 1. T-connector; 11. First interface; 12. Second interface; 13. Third interface; 2. Vacuum gauge; 3. Pressure relief end cap; 31. End cap seat; 311. Connecting cylinder; 312. End plate; 313. Connecting nozzle; 32. End cap plate; 321. Sealing ring; 33. Pressure relief port; 34. Lock; 35. Handle; 4. Vacuum machine; 5. Vacuum tube; 6. Sealed chamber. Detailed Implementation

[0036] To make the technical problems solved by this application, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of this application are further described in detail below. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0037] In the description of this application, unless otherwise expressly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0038] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0039] Reference Figure 1-3 This embodiment provides a vacuum leak detection device, including:

[0040] The three-way tube 1 has a first interface 11, a second interface 12 and a third interface 13, wherein the first interface 11 is used to connect to the vacuum tube 5 under test;

[0041] Vacuum pressure gauge 2, connected to the second interface 12, is used to monitor the vacuum pressure inside the three-way tube 1;

[0042] The pressure relief end cap 3 is connected to the third interface 13 and is used to control the opening or closing of the third interface 13.

[0043] In application, the vacuum leak detection device of this scheme is installed at the port of the pipeline under test using the first interface 11. Since the second interface 12 and the third interface 13 of the tee pipe 1 are sealed by the vacuum pressure gauge 2 and the pressure relief cap 3 respectively, the vacuum leak detection device and the pipeline under test form a sealed space. The vacuum pressure gauge 2 measures the vacuum pressure in the tee pipe 1, which represents the vacuum pressure in the pipeline under test. Therefore, based on the measured vacuum pressure value, it can be directly determined whether there is a leak in the pipeline under test. Specifically, under normal conditions, the vacuum pressure value that can be reached in the pipeline when there is no leak can be measured according to the actual capacity of the vacuum machine 4. During the leak detection process, after the measurement data stabilizes, if the actual value measured by the vacuum pressure gauge 2 is greater than the vacuum pressure value, it indicates that there is a leak in the pipeline under test.

[0044] In summary, the vacuum leak detection device based on this embodiment can determine whether there is a pressure leak by detecting the internal pressure of the pipeline using the vacuum pressure gauge 2, thus enabling rapid detection of vacuum leaks. After detection, the pressure can be released into the pipeline by opening the pressure relief cap 3, avoiding the problem of difficult disassembly of the vacuum leak detection device due to internal negative pressure. The vacuum leak detection device of this solution consists only of a three-way pipe 1, a vacuum pressure gauge 2, and a pressure relief cap 3. Its structure is simple, its size is small, and it is easy to use, requiring only a simple connection to the end of the pipeline being tested.

[0045] Regarding the structure of the pressure relief end cap 3, refer to... Figure 2 The pressure relief end cap 3 includes an end cap seat 31 and an end cap plate 32. The end cap seat 31 is fixedly installed on the third interface 13. The end cap seat 31 has a pressure relief port 33. The opening and closing of the pressure relief port 33 is controlled by the opening and closing of the end cap plate 32, thereby controlling the opening and closing of the third interface 13.

[0046] The pressure relief end cap 3 consists of an end cap seat 31 and an end cap plate 32. During installation, the end cap seat 31 can always remain connected and fixed to the tee pipe 1. Therefore, the end cap seat 31 can be directly welded to the tee pipe 1. This connection method is simple and has good sealing performance. However, the connection between the end cap plate 32 and the end cap seat 31 needs to ensure that the end cap plate 32 can be opened and closed, and that there is sufficient airtightness between the two. In the parts processing stage, it is more difficult to improve the fitting accuracy of the end cap plate 32 and the end cap seat 31 to ensure airtightness. Compared with the processing difficulty of improving the fitting accuracy of the pressure relief end cap 3 and the tee pipe 1, the former is obviously simpler. Therefore, the structure of the pressure relief end cap 3 in this solution is conducive to the processing of parts.

[0047] Furthermore, the end cap seat 31 includes a connecting cylinder 311 and an end plate 312 fixedly connected to one end of the connecting cylinder 311. The connecting cylinder 311 is sleeved and connected to the third interface 13. The pressure relief port 33 is disposed on the end plate 312, and the diameter of the pressure relief port 33 is smaller than the diameter of the third interface 13.

[0048] Specifically, the end cap seat 31 is provided with a connecting sleeve 311 that fits onto the third interface 13 of the tee pipe 1, which can significantly increase the area of ​​the end cap seat 31 and the tee pipe 1, thus improving the tightness and airtightness of their connection. Preferably, the third interface 13 of the tee pipe 1 is fitted onto the outside of the connecting sleeve 311, and a weld is made between the third interface 13 and the connecting sleeve 311 to ensure its airtightness. On the other hand, the diameter of the pressure relief port 33 provided on the end plate 312 is smaller than that of the third interface 13. The smaller diameter makes it easier to apply an effective sealing method. That is, this structure is beneficial to improving the airtightness of the pressure relief port 33 during sealing, thereby improving the accuracy of internal vacuum pressure measurement.

[0049] Furthermore, the end plate 312 is provided with a connecting nozzle 313 that surrounds the pressure relief port 33.

[0050] Specifically, the end face area of ​​the connector 313 is much smaller than that of the end face area of ​​the end plate 312, which makes it easier to improve the surface precision of the connector 313 and improve the sealing performance.

[0051] In some embodiments, one side of the end cover plate 32 is hinged to the end plate 312, and the opening and closing of the pressure relief port 33 is controlled by flipping the end cover plate 32.

[0052] The end cover 32 is installed in a flip-top form, which is simple to open and close and facilitates quick operation by workers. At the same time, opening the rear end cover 32 and connecting it to the end cover base 31 can prevent the end cover 32 from falling off and being lost.

[0053] To facilitate opening the end cover plate 32, a handle 35 is provided on the outer wall of the end cover plate 32.

[0054] Furthermore, to ensure the stability of the end cover plate 32 in the closed state, a latch 34 is provided between the end cover plates 32 to lock the majority of the end cover plates 32 in the closed state of the pressure relief port 33.

[0055] This solution uses a latch 34 to lock the end cover plate 32, which can prevent the end cover plate 32 from loosening and causing air leakage, ensuring airtightness and guaranteeing the accuracy of pressure detection.

[0056] In another implementation, the end cover plate 32 is provided with internal threads, and the connecting nozzle 313 is provided with external threads. The end cover plate 32 is threadedly installed on the connecting nozzle 313 to achieve a seal on the pressure relief port 33.

[0057] To ensure sealing performance, a sealing ring 321 is provided on the inner side of the end cover plate 32 to abut against the connecting nozzle 313 to enhance the seal.

[0058] Specifically, after the cover is closed, the sealing ring 321 is pressed tightly between the end cover plate 32 and the connecting nozzle 313, which can effectively improve the sealing performance. The sealing ring 321 is preferably a silicone ring or a rubber ring.

[0059] Reference Figure 4 The existing vacuum equipment includes a vacuum machine 4 and several vacuum tubes 5 connected end-to-end. These multiple vacuum tubes 5 form a vacuum pipeline. The end of the vacuum pipeline furthest from the vacuum machine 4 is connected to a sealed chamber 6. The vacuum machine 4 evacuates the sealed chamber 6, creating a vacuum environment for the workpiece inside. A vacuum pressure monitor is installed in the vacuum pipeline, and this monitor is electrically connected to the control center of the vacuum machine 4. When an abnormal vacuum pressure is detected, it indicates a possible leak in the vacuum pipeline. In this case, all vacuum tubes 5 need to be inspected to find the leak and repair it.

[0060] Therefore, this embodiment also provides a vacuum leak detection method. This method uses the aforementioned vacuum leak detection device to detect the location of leaks in the pipelines of the aforementioned vacuum equipment, and includes the following steps:

[0061] 1. Disconnect the pipeline at the rear end of the vacuum tube 5 to be tested; Specifically, before the investigation, the staff can select the priority investigation point based on their work experience, and then designate the vacuum tube 5 corresponding to the investigation point as the vacuum tube 5 to be tested.

[0062] 2. Connect the first port 11 of the three-way pipe 1 to the rear end of the vacuum tube 5 to be tested; specifically, the first port 11 of the three-way pipe 1 is provided with a flange that matches the flange at the end of the vacuum tube 5. When connecting, simply align the flange with the end of the vacuum tube 5 to be tested and then clamp it with a fixing clamp.

[0063] 3. Connect vacuum pressure gauge 2 to vacuum machine 4 electrically; specifically, the principle of vacuum pressure gauge 2 is the same as that of vacuum pressure monitoring gauge in the original vacuum equipment. Connect vacuum pressure gauge 2 to the control center of vacuum machine 4. After starting vacuum machine 4, the actual measured pressure value of vacuum pressure gauge 2 can be read through the control panel of vacuum machine 4.

[0064] 4. Start the vacuum machine 4 and determine whether there is a leak at the front end of the vacuum tube 5 based on the pressure display value of the vacuum machine 4;

[0065] 5. Open the pressure relief cap 3 to release pressure, then remove the tee pipe 1. Specifically, first open the pressure relief cap 3 to release pressure into the tee pipe 1, which can avoid the problem of difficulty in removing the tee pipe 1 due to the pressure difference between the inside and outside. Once the specific leak point is determined, the troubleshooting work can be completed. However, if the specific leak point cannot be determined, other vacuum tubes 5 need to be tested.

[0066] It should be noted that in this scheme, for any vacuum tube 5, the front end of the vacuum tube 5 is the end closer to the vacuum machine 4, and the rear end is the end farther away from the vacuum machine 4.

[0067] To expedite the investigation, this plan employs a compromise approach to investigate all vacuum tubes 5, specifically as follows:

[0068] S1. Select the middle vacuum tube 5 as the vacuum tube to be tested for inspection. If no leakage is found, it indicates that the leakage location is behind the vacuum tube 5. Proceed to step S2. If a leakage is found, it indicates that the leakage location is in front of the vacuum tube 5. Proceed to step S3.

[0069] S2. Remove the three-way tube 1, reconnect half of the vacuum tubes 5 behind the tube 5, and then reconnect the three-way tube 1 for testing;

[0070] S3. Remove the three-way tube 1, remove half of the vacuum tubes 5 in front of the vacuum tube 5, and then reconnect the three-way tube 1 for testing;

[0071] Repeat the above steps until the exact location of the leak is found.

[0072] Specifically, by adopting a compromise method, half of the test points can be eliminated directly after one test. This method can reach the leak point as quickly as possible, which can effectively speed up the investigation and reduce maintenance time.

[0073] In some embodiments, when determining whether there is a leak at the front end of the vacuum tube 5 based on the pressure display value of the vacuum machine 4, if the pressure display value is less than 50% of the vacuum setting value, it indicates that there is no leak; if the pressure display value is greater than 50% of the vacuum setting value, it indicates that there is a leak.

[0074] Specifically, the vacuum setting on the control panel of vacuum machine 4 is the vacuum pressure value required inside the sealed chamber 6 during normal operation. Because the sealed chamber 6 has a large internal space, the entire system (including vacuum machine 4, all vacuum tubes 5, and sealed chamber 6) has a large internal space. Furthermore, the capacity of vacuum machine 4 is designed based on the space of sealed chamber 6 and the required vacuum pressure during production. After disconnecting sealed chamber 6 and connecting the vacuum leak detection device, the internal space being tested only includes vacuum machine 4 and the vacuum tubes 5 connected to it. This significantly reduces the internal space. Therefore, when vacuum machine 4 is operating at its rated power, the vacuum pressure obtainable after disconnecting sealed chamber 6 will inevitably be less than the vacuum pressure obtainable after connecting it. Thus, in this detection method, if the pressure display value is less than 50% of the vacuum setting value, it indicates no leak; if the pressure display value is greater than 50% of the vacuum setting value, it indicates a leak. For example, when the vacuum setting is 200, if the pressure display value is less than 100, it indicates no leakage; if the pressure display value is greater than 100, it indicates leakage.

[0075] In summary, the troubleshooting method of this embodiment uses the vacuum leak detection device of this solution to check for leaks in the pipeline. It only requires simple pipe disassembly, installation of the vacuum leak detection device, and wiring of the vacuum pressure gauge 2. The vacuum leak detection device of this solution is small in size, which facilitates the inspection of various parts of the pipeline. At the same time, it is easy to install. The vacuum pressure gauge 2 is directly connected to the vacuum machine 4, and the vacuum machine 4 displays the measured pressure. That is, this solution makes full use of existing equipment to achieve the detection purpose, simplifies the structure of the vacuum leak detection device, and reduces the manufacturing cost of the detection device.

[0076] In the description herein, it should be understood that the terms "upper," "lower," "left," "right," and other orientations or positional relationships are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, the terms "first" and "second" are used merely for descriptive distinction and have no special meaning.

[0077] In the description of this specification, references to terms such as "an embodiment," "example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example.

[0078] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style of the specification is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0079] The technical principles of this application have been described above with reference to specific embodiments. These descriptions are merely for explaining the principles of this application and should not be construed as limiting the scope of protection of this application in any way. Based on this explanation, those skilled in the art can readily conceive of other specific embodiments of this application without inventive effort, and these embodiments will all fall within the scope of protection of this application.

Claims

1. A vacuum leak detection device, characterized in that, include: The three-way tube (1) has a first interface (11), a second interface (12) and a third interface (13), wherein the first interface (11) is used to connect to the vacuum tube (5) under test; A vacuum pressure gauge (2) is connected to the second interface (12) and is used to monitor the vacuum pressure inside the three-way tube (1); The pressure relief end cap (3) is connected to the third interface (13) and is used to control the opening or closing of the third interface (13); The pressure relief end cap (3) includes an end cap seat (31) and an end cap plate (32). The end cap seat (31) is fixedly installed on the third interface (13). The end cap seat (31) has a pressure relief port (33). The opening and closing of the pressure relief port (33) is controlled by the opening and closing of the end cap plate (32), thereby controlling the opening and closing of the third interface (13). The end cap seat (31) includes a connecting cylinder (311) and an end plate (312) fixedly connected to one end of the connecting cylinder (311). The connecting cylinder (311) is sleeved and connected to the third interface (13). The pressure relief port (33) is provided on the end plate (312), and the diameter of the pressure relief port (33) is smaller than the diameter of the third interface (13). Welding is performed between the third interface (13) and the connecting cylinder (311) to ensure its airtightness. The end plate (312) is provided with a connecting nozzle (313) that surrounds the pressure relief port (33); the end face area of ​​the connecting nozzle (313) is much smaller than the end face area of ​​the end plate (312).

2. The vacuum leak detection device according to claim 1, characterized in that, The end cover plate (32) is hinged to the end plate (312) on one side, and the opening and closing of the pressure relief port (33) can be controlled by flipping the end cover plate (32).

3. The vacuum leak detection device according to claim 2, characterized in that, A latch (34) is provided between the end cover plate (32) and the end cover seat (31) for locking the end cover plate (32) in a closed state of the pressure relief port (33).

4. The vacuum leak detection device according to claim 1, characterized in that, The end cap (32) is provided with a sealing ring (321) on the inner side for abutting against the connecting nozzle (313) to enhance the seal.

5. A vacuum leak detection method based on the vacuum leak detection device according to any one of claims 1-4, used to detect the location of leaks in the pipeline of a vacuum pumping equipment, the vacuum pumping equipment comprising a vacuum machine and a plurality of vacuum tubes connected end to end, characterized in that, Including the following steps: Disconnect the tubing at the rear end of the vacuum tube to be tested; Connect the first port of the T-connector to the rear end of the vacuum tube under test; Connect the vacuum pressure gauge to the vacuum electromechanical system; Start the vacuum machine and determine whether there is a leak at the front end of the vacuum tube based on the pressure display value of the vacuum machine; Open the pressure relief cap to release the pressure, then remove the tee pipe.

6. The vacuum leak detection method according to claim 5, characterized in that, A compromise method was used to inspect all the aforementioned vacuum tubes, specifically as follows: S1. Select the middle vacuum tube as the vacuum tube to be tested for inspection. If no leakage is found, it indicates that the leakage location is behind the vacuum tube. Proceed to step S2. If a leakage is found, it indicates that the leakage location is in front of the vacuum tube. Proceed to step S3. S2. Remove the T-connector, reconnect half of the vacuum tubes behind it, and then reconnect the T-connector for testing; S3. Remove the T-connector, remove half of the vacuum tubes in front of the T-connector, and then reconnect the T-connector for testing; Repeat the above steps until the exact location of the leak is found.

7. The vacuum leak detection method according to claim 5, characterized in that, When determining whether there is a leak at the front end of the vacuum tube based on the pressure display value of the vacuum machine, if the pressure display value is less than 50% of the vacuum setting value, it indicates that there is no leak; if the pressure display value is greater than 50% of the vacuum setting value, it indicates that there is a leak.

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