Automatic assembly system and method for hemispherical resonator gyro

Abstract

The application discloses a kind of hemispherical resonator gyro automatic assembly system and method, it is related to the technical field of hemispherical resonator gyro of inertial measurement system, wherein, hemispherical resonator gyro automatic assembly system includes: support structure, for fixed electrode pedestal to be assembled;Six degrees of freedom platform, it is fixed on the support structure, and for fixed resonator to be assembled;Capacitance detection module, for measuring the capacitance signal between the resonator and discrete electrode on electrode pedestal, and according to the capacitance signal, the pose error of current resonator relative to electrode pedestal is calculated, to judge whether to meet assembly requirement;Signal acquisition and servo control module, for obtaining the real-time pose information of the six degrees of freedom platform and the pose error and judgment result calculated by capacitance detection module, and when not meeting assembly requirement, according to the pose error, the six degrees of freedom platform is driven to carry out corresponding linear displacement and angular motion.The application can improve the assembly precision and automation level of two-piece structure hemispherical resonator gyro watch.

Description

Technical Field

[0001] This application relates to the field of hemispherical resonant gyroscope technology in inertial measurement systems, and specifically to an automated assembly system and method for hemispherical resonant gyroscopes. Background Technology

[0002] Inertial measurement systems (IMS) are the foundation of control systems. Unaffected by external interference, they autonomously and continuously measure the attitude information of equipment. The hemispherical resonator (HNR) gyroscope is a core component of the IMS sensor, directly impacting the attitude measurement and navigation accuracy of the equipment. The HNR gyroscope is currently the most promising next-generation solid-state wave gyroscope in the world, offering superior performance, smaller size, and lower manufacturing costs compared to existing flexible and optical gyroscopes. The large-scale application of HNR gyroscopes can directly improve equipment performance indicators, significantly enhance its adaptability to extreme conditions, and greatly reduce manufacturing and maintenance costs.

[0003] Currently, hemispherical resonator gyroscopes are still in the prototype development stage, and many key technologies still need to be studied in depth. Among them, the level of automated assembly technology for hemispherical resonator gyroscopes is not yet perfect, and the corresponding assembly errors limit the mass production and application of high-precision hemispherical resonator gyroscopes. Therefore, developing automated assembly technology for hemispherical resonator gyroscopes is of great significance for their mass production and application.

[0004] Hemispherical resonator gyroscopes currently consist of a two-piece structure: a hemispherical resonator and an electrode base. The hemispherical resonator is the core component for sensing the external rotation angle, while the electrode base is mainly used for exciting the natural mode shape of the hemispherical resonator and extracting the vibration signal. The electrode base has 8 or 16 discrete metal electrodes, which form uniformly spaced capacitive electrodes with the hemispherical resonator. This precisely applies electrostatic force to the resonator, causing it to maintain stable vibration in a four-antinode mode. Simultaneously, the azimuth angle of the resonator's mode shape is calculated in real time using the capacitive signals collected from different electrodes, thus obtaining the externally input rotation angle. To improve the performance of the hemispherical resonator gyroscope, it is necessary to accurately acquire the capacitive signal of the resonator's vibration, which places extremely stringent requirements on the assembly precision of the hemispherical resonator and the electrode base. Summary of the Invention

[0005] This application provides an automated assembly system and method for hemispherical resonant gyroscopes, which can improve the assembly accuracy and automation level of two-piece hemispherical resonant gyroscope heads.

[0006] In a first aspect, embodiments of this application provide an automated assembly system for a hemispherical resonant gyroscope, the automated assembly system for the hemispherical resonant gyroscope comprising:

[0007] A support structure for fixing the electrode base to be assembled;

[0008] A six-degree-of-freedom platform, which is fixed to the support structure and used to fix the resonator to be assembled;

[0009] The capacitance detection module is used to measure the capacitance signal between the resonator and the discrete electrodes on the electrode base, and to calculate the pose error of the current resonator relative to the electrode base based on the capacitance signal, so as to determine whether the assembly requirements are met.

[0010] The signal acquisition and servo control module is used to acquire the real-time pose information of the six-degree-of-freedom platform and the pose error and judgment result calculated by the capacitance detection module, and drive the six-degree-of-freedom platform to perform corresponding linear displacement and angular motion according to the pose error when the assembly requirements are not met.

[0011] In conjunction with the first aspect, in one embodiment, the six-degree-of-freedom platform is further provided with a clamp, one end of which is fixed to the six-degree-of-freedom platform, and the other end is fixed to the support rod of the resonator through the central hole of the electrode base. The surface of the clamp has an electrical path to connect the surface metal conductive film layer of the resonator to the capacitance detection module.

[0012] In conjunction with the first aspect, in one embodiment, the support structure is further provided with a locking mechanism for locking the electrode base and the resonator.

[0013] In conjunction with the first aspect, in one embodiment, the support structure is further provided with a welding device for welding the locked electrode base and the resonator.

[0014] In conjunction with the first aspect, in one embodiment, the support structure is further provided with an adjustment mechanism for coarsely adjusting the electrode base.

[0015] Secondly, embodiments of this application provide an automated assembly method for a hemispherical resonant gyroscope, the automated assembly method for the hemispherical resonant gyroscope comprising:

[0016] The electrode base is fixed to the support structure, and the resonator is fixed to the six-degree-of-freedom platform;

[0017] The capacitance signal between the resonator and the discrete electrodes on the electrode base is measured using a capacitance detection module, and the pose error of the resonator relative to the electrode base is calculated based on the capacitance signal to determine whether the assembly requirements are met.

[0018] The signal acquisition and servo control module acquires the real-time pose information of the six-degree-of-freedom platform, as well as the pose error and judgment result calculated by the capacitance detection module. If the assembly requirements are not met, the six-degree-of-freedom platform is driven to perform corresponding linear displacement and angular motion based on the pose error until the assembly requirements are met.

[0019] In conjunction with the second aspect, in one embodiment, the step of measuring the capacitance signal between the resonator and the discrete electrodes on the electrode base using a capacitance detection module, and calculating the pose error of the current resonator relative to the electrode base based on the capacitance signal, includes:

[0020] The capacitance detection module is used to detect the capacitance formed by the position of the resonator lip and the discrete electrodes on the upper surface of the electrode base, and the capacitance value is converted into the actual capacitance gap distance.

[0021] The position and orientation of the resonator relative to the electrode base are determined by comparing the distances detected by the eight discrete electrodes and the average distance.

[0022] In conjunction with the second aspect, in one implementation, it further includes:

[0023] Using a fixture fixed to a six-degree-of-freedom platform, the electrode base is fixed to the support rod of the resonator through the central hole. Based on the electrical path on the surface of the fixture, the surface metal conductive film layer of the resonator is connected to the capacitance detection module.

[0024] In conjunction with the second aspect, in one implementation, it further includes:

[0025] The electrode base and resonator, which meet the assembly requirements, are locked using a locking mechanism on the support structure.

[0026] In conjunction with the second aspect, in one implementation, it further includes:

[0027] The electrode base and the resonator are welded together after being locked using a welding device on the support structure.

[0028] The beneficial effects of the technical solutions provided in this application include at least the following:

[0029] The automated assembly system for hemispherical resonant gyroscopes in this application can achieve precise assembly and welding of two sets of hemispherical resonant gyroscopes. Compared with the existing assembly method that relies on visual positioning, this application controls and adjusts the assembly gap by monitoring the electrode capacitance signal, which results in higher assembly accuracy, controllable error, and higher reliability.

[0030] The signal acquisition and servo control module compares the relative position between the resonator and the electrode base with the theoretical value, outputs the position error, and controls the six-degree-of-freedom platform to adjust the position and attitude of the resonator, further comparing it with the theoretical value until the error requirement is met. The overall assembly process achieves closed-loop error control, ensuring uniform gaps between the resonator and the multiple discrete electrodes on the base, thus improving assembly accuracy and product reliability.

[0031] The six-degree-of-freedom motion platform enables the hemispherical resonator to perform linear and angular displacements during assembly, thereby aligning the resonator with the discrete electrodes on the base and adjusting the electrode gap to the theoretical set value to ensure assembly accuracy requirements.

[0032] Furthermore, the design of the welding device enables in-situ welding between the resonator and the electrode base. After the relative positions of the resonator and the electrode base are adjusted, they are fixed by a locking mechanism on the support structure. Then, welding between the resonator and the electrode base can be performed directly without secondary adjustments. This ensures that the adjustment accuracy is the final assembly accuracy, further reducing assembly errors. Attached Figure Description

[0033] Figure 1 This is a structural block diagram of an embodiment of the automated assembly system for hemispherical resonant gyroscopes of this application;

[0034] Figure 2 This is a schematic diagram of the hemispherical harmonic oscillator of this application;

[0035] Figure 3 This is a schematic diagram of the electrode base structure of this application;

[0036] Figure 4 This is a schematic diagram of the hemispherical resonator and electrode base assembled in this application.

[0037] Figure 5 This is a flowchart illustrating an embodiment of the automated assembly method for a hemispherical resonant gyroscope according to this application;

[0038] Figure 6 This is a flowchart illustrating the automated assembly method for the hemispherical resonant gyroscope described in this application. Detailed Implementation

[0039] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present application.

[0040] The terms "comprising" and "having," and any variations thereof, in the specification, claims, and accompanying drawings of this application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to such process, method, product, or apparatus. The terms "first," "second," and "third," etc., are used to distinguish different objects, etc., and do not indicate a sequence, nor do they limit "first," "second," and "third" to different types.

[0041] In the description of the embodiments of this application, terms such as "exemplary," "for example," or "for instance" are used to indicate examples, illustrations, or explanations. Any embodiment or design described as "exemplary," "for example," or "for instance" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or designs. Specifically, the use of terms such as "exemplary," "for example," or "for instance" is intended to present the relevant concepts in a concrete manner.

[0042] In the description of the embodiments of this application, unless otherwise stated, " / " means "or". For example, A / B can mean A or B. The "and / or" in the text is merely a description of the relationship between related objects, indicating that there can be three relationships. For example, A and / or B can mean: A exists alone, A and B exist simultaneously, and B exists alone. In addition, in the description of the embodiments of this application, "multiple" means two or more.

[0043] In some processes described in the embodiments of this application, multiple operations or steps are included in a specific order. However, it should be understood that these operations or steps may not be executed in the order they appear in the embodiments of this application, or they may be executed in parallel. The sequence number of the operation is only used to distinguish different operations, and the sequence number itself does not represent any execution order. In addition, these processes may include more or fewer operations, and these operations or steps may be executed sequentially or in parallel, and these operations or steps may be combined.

[0044] To make the objectives, technical solutions, and advantages of this application clearer, the embodiments of this application will be described in further detail below with reference to the accompanying drawings.

[0045] In a first aspect, embodiments of this application provide an automated assembly system for a hemispherical resonant gyroscope.

[0046] In one embodiment, reference is made to Figure 1 , Figure 1 This is a structural block diagram of an embodiment of the automated assembly system for a hemispherical resonant gyroscope according to this application. Figure 1As shown, the automated assembly system for hemispherical resonant gyroscopes includes:

[0047] A support structure for fixing the electrode base to be assembled; a six-degree-of-freedom platform fixed to the support structure and for fixing the resonator to be assembled.

[0048] The capacitance detection module is used to measure the capacitance signal between the resonator and the discrete electrodes on the electrode base, and to calculate the pose error of the resonator relative to the electrode base based on the capacitance signal, so as to determine whether the assembly requirements are met.

[0049] The signal acquisition and servo control module is used to acquire the real-time pose information of the six-degree-of-freedom platform and the pose error and judgment result calculated by the capacitance detection module, and drive the six-degree-of-freedom platform to perform corresponding linear displacement and angular motion according to the pose error when the assembly requirements are not met.

[0050] In this embodiment, the support structure is used to fix the electrode base and the six-degree-of-freedom platform; eight annular discrete electrodes are distributed on the upper surface of the electrode base; the capacitance detection module is used to measure the capacitance between the resonator lip and the discrete electrodes; the signal acquisition and servo control module is used to acquire and analyze the capacitance of the capacitance detection module and the position and orientation of the six-degree-of-freedom platform; based on the relative error between the capacitance of the eight discrete electrodes and the preset value, the six-degree-of-freedom platform is controlled by software to adjust the orientation of the resonator, thereby changing the size of the electrode formed by the resonator and the electrode base; after the six-degree-of-freedom platform has adjusted the relative position of the resonator and the electrode base, the electrode base and the resonator are fixed by brazing.

[0051] Compared to existing assembly methods that rely on visual positioning, the automated assembly system for hemispherical resonant gyroscopes in this embodiment controls and adjusts the assembly gap by monitoring electrode capacitance signals, resulting in higher assembly accuracy, controllable errors, and higher reliability.

[0052] Specifically, the structure and principle of the automated assembly system for hemispherical resonant gyroscopes are described below:

[0053] See Figure 2 As shown, the resonator is a hemispherical thin shell with a diameter of 20mm or 30mm. A cylindrical support rod is connected to the axis of symmetry on one side of the shell for fixing it to the electrode base. The hemispherical resonator is usually made of quartz glass through precision machining, and a thin metal conductive film is deposited on the support rod, the inner spherical surface, and the lip of the hemispherical resonator. The film thickness is generally 20nm to 100nm.

[0054] See Figure 3As shown, the electrode base is a cylindrical substrate with a circular through hole in the middle, which is usually made of quartz glass. Eight annular discrete metal electrodes are evenly distributed on the upper surface of the electrode substrate. The size of the annular electrodes is comparable to the diameter of the lip of the hemispherical harmonic oscillator.

[0055] The support structure mainly includes a base, adjustment mechanism, locking mechanism, and welding device. The support structure is a frame type and mounted on a vibration isolation platform, providing high-precision positioning and installation for the electrode base and welding device. It also features coarse adjustment and locking functions for fixing the electrode base's position, and the electrode base can rotate 360° on the support structure. The support structure has corresponding electrical pathways to connect the discrete electrodes on the upper surface of the electrode base to the capacitance detection module.

[0056] The base is used for mounting and fixing the adjustment mechanism, locking mechanism, six-degree-of-freedom platform, capacitance detection module, and signal acquisition and servo control module. The adjustment mechanism is used to adjust the position and orientation of the electrode base and the welding device, completing the coarse adjustment of the electrode base. The locking structure is used to fix the electrode base after the position and orientation are adjusted. The welding device is used to weld the locked electrode base and resonator. Preferably, the welding device welds and fixes the hemispherical resonator to the electrode base after the position and orientation are adjusted by brazing.

[0057] The six-degree-of-freedom platform also includes a fixture. One end of the fixture is fixed to the six-degree-of-freedom platform, and the other end is fixed to the support rod of the resonator through the central hole of the electrode base, allowing the hemispherical resonator to perform linear and angular displacement with the six-degree-of-freedom platform. The fixture and the hemispherical resonator can be fixed together using low-temperature soldering or adhesive bonding. The surface of the fixture has electrical pathways to connect the conductive metal film layer on the surface of the hemispherical resonator to the capacitance detection module.

[0058] The six-degree-of-freedom platform can achieve displacement motion in the X, Y, and Z directions and rotational motion in the θx, θy, and θz directions. Through a clamp fixed to the platform, it drives a hemispherical resonator to perform precise spatial position and attitude movements. The displacement resolution of the six-degree-of-freedom platform in the X and Y directions should be better than 0.5 μm, the displacement resolution in the Z direction better than 0.01 μm, the angular displacement resolution in the θx and θy directions better than 0.3', and the angular displacement resolution in the θz direction better than 0.5'. In the initial stage, it is necessary to initially adjust the Z-axis and θz-axis of the six-degree-of-freedom platform, adjust the distance between the resonator and the electrode base, and adjust the relative circumferential orientation to generate an effective capacitance detection signal and adjust the relative orientation of the resonator's modal axis and the electrode.

[0059] The capacitance detection module is used to measure the capacitance signal between the resonator and different electrodes on the electrode base, and convert it into distance information. It monitors the distance gap information between the lip of the hemispherical resonator and multiple discrete electrodes on the electrode base in real time, calculates the spacing and skew error between the electrodes and the resonator based on the capacitance signal magnitude, and sends the results to the signal acquisition and servo control module.

[0060] The detection accuracy of the capacitance detection module should be better than 0.01μm. By comparing the distances detected by the eight discrete electrodes and the average distance, the position and orientation of the resonator relative to the electrode base are determined. If the requirements are not met, the measurement comparison results are sent to the signal acquisition and servo control module.

[0061] The signal acquisition and servo control module is used to obtain the real-time pose information of the six-degree-of-freedom platform and the pose error and judgment result calculated by the capacitance detection module. When assembly requirements are not met, the module drives the six-degree-of-freedom platform to perform corresponding linear and angular displacements based on the pose error until the distance between the resonator and the electrode base meets the target requirements. The distance between the hemispherical resonator lip plane and the planar electrode is controlled between 50μm and 60μm, with a parallelism better than 2'.

[0062] After the relative positions of the hemispherical resonator and the electrode base are adjusted, the welding device welds the resonator and the electrode base together using brazing. During welding, the six-degree-of-freedom platform rotates around the axis of symmetry of the electrode base to ensure that the solder is evenly distributed in the circumferential direction of the center hole of the electrode base and the resonator support rod. After the hemispherical resonator and the electrode base are assembled, as shown... Figure 4 As shown.

[0063] Based on the above design, it can be understood that the automated assembly system for hemispherical resonant gyroscopes in this application can achieve precise assembly and welding of two sets of hemispherical resonant gyroscopes. Compared with the existing assembly method that relies on visual positioning, this application controls and adjusts the assembly gap by monitoring the electrode capacitance signal, resulting in higher assembly accuracy, controllable error, and higher reliability.

[0064] The signal acquisition and servo control module compares the relative position between the resonator and the electrode base with the theoretical value, outputs the position error, and controls the six-degree-of-freedom platform to adjust the position and attitude of the resonator, further comparing it with the theoretical value until the error requirement is met. The overall assembly process achieves closed-loop error control, ensuring uniform gaps between the resonator and the multiple discrete electrodes on the base, thus improving assembly accuracy and product reliability.

[0065] The six-degree-of-freedom motion platform enables the hemispherical resonator to perform linear and angular displacements during assembly, thereby aligning the resonator with the discrete electrodes on the base and adjusting the electrode gap to the theoretical set value to ensure assembly accuracy requirements.

[0066] Furthermore, the design of the welding device enables in-situ welding between the resonator and the electrode base. After the relative positions of the resonator and the electrode base are adjusted, they are fixed by a locking mechanism on the support structure. Then, welding between the resonator and the electrode base can be performed directly without secondary adjustments. This ensures that the adjustment accuracy is the final assembly accuracy, further reducing assembly errors.

[0067] Secondly, embodiments of this application also provide an automated assembly method for a hemispherical resonant gyroscope.

[0068] In one embodiment, reference is made to Figure 5 and Figure 6 As shown, Figure 5 This is a flowchart of an embodiment of the automated assembly method for a hemispherical resonant gyroscope according to this application. Figure 5 As shown, the automated assembly method for a hemispherical resonant gyroscope includes:

[0069] S1. Fix the electrode base to the support structure and fix the resonator to the six-degree-of-freedom platform;

[0070] S2. Measure the capacitance signal between the resonator and the discrete electrodes on the electrode base using the capacitance detection module, and calculate the pose error of the current resonator relative to the electrode base based on the capacitance signal to determine whether the assembly requirements are met.

[0071] S3. The signal acquisition and servo control module acquires the real-time pose information of the six-degree-of-freedom platform and the pose error and judgment result calculated by the capacitance detection module. If the assembly requirements are not met, the six-degree-of-freedom platform is driven to perform corresponding linear displacement and angular motion according to the pose error until the assembly requirements are met.

[0072] Further, in one embodiment, the step of measuring the capacitance signal between the resonator and the discrete electrodes on the electrode base using a capacitance detection module, and calculating the pose error of the current resonator relative to the electrode base based on the capacitance signal, includes:

[0073] The capacitance detection module is used to detect the capacitance formed by the position of the resonator lip and the discrete electrodes on the upper surface of the electrode base, and the capacitance value is converted into the actual capacitance gap distance.

[0074] The position and orientation of the resonator relative to the electrode base are determined by comparing the distances detected by the eight discrete electrodes and the average distance.

[0075] Furthermore, in one embodiment, it also includes:

[0076] Using a fixture fixed to a six-degree-of-freedom platform, the electrode base is fixed to the support rod of the resonator through the central hole. Based on the electrical path on the surface of the fixture, the surface metal conductive film layer of the resonator is connected to the capacitance detection module.

[0077] Furthermore, in one embodiment, it also includes:

[0078] The electrode base and resonator, which meet the assembly requirements, are locked using a locking mechanism on the support structure.

[0079] Furthermore, in one embodiment, it also includes:

[0080] The electrode base and the resonator are welded together after being locked using a welding device on the support structure.

[0081] The above are merely preferred embodiments of this application and do not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. An automated assembly system for a hemispherical resonant gyroscope, characterized in that, The automated assembly system for the hemispherical resonant gyroscope includes: A support structure for fixing the electrode base to be assembled; A six-degree-of-freedom platform, which is fixed to the support structure and used to fix the resonator to be assembled; The capacitance detection module is used to measure the capacitance signal between the resonator and the discrete electrodes on the electrode base, and to calculate the pose error of the current resonator relative to the electrode base based on the capacitance signal, so as to determine whether the assembly requirements are met. The signal acquisition and servo control module is used to acquire the real-time pose information of the six-degree-of-freedom platform and the pose error and judgment result calculated by the capacitance detection module, and drive the six-degree-of-freedom platform to perform corresponding linear displacement and angular motion according to the pose error when the assembly requirements are not met. The six-degree-of-freedom platform is also equipped with a clamp. One end of the clamp is fixed to the six-degree-of-freedom platform, and the other end is fixed to the support rod of the resonator through the central hole of the electrode base. The surface of the clamp has an electrical path to connect the surface metal conductive film layer of the resonator to the capacitance detection module. The support structure is also provided with a locking mechanism, which is used to lock the electrode base and the resonator; The capacitance detection module measures the capacitance signal between the resonator and the discrete electrodes on the electrode base, and calculates the pose error of the resonator relative to the electrode base based on the capacitance signal, including: The capacitance detection module is used to detect the capacitance formed by the position of the resonator lip and the discrete electrodes on the upper surface of the electrode base, and the capacitance value is converted into the actual capacitance gap distance. The position and orientation of the resonator relative to the electrode base are determined by comparing the distances detected by the eight discrete electrodes and the average distance. The support structure is also equipped with a welding device, which is used to weld the locked electrode base and the resonator by brazing. During welding, the six-degree-of-freedom platform rotates around the symmetry axis of the electrode base to make the solder evenly distributed.

2. The automated assembly system for a hemispherical resonant gyroscope as described in claim 1, characterized in that: The support structure is also provided with an adjustment mechanism, which is used to coarsely adjust the electrode base.

3. An automated assembly method for a hemispherical resonant gyroscope using the automated assembly system for hemispherical resonant gyroscopes as described in claim 1, characterized in that, The automated assembly method for the hemispherical resonant gyroscope includes: The electrode base is fixed to the support structure, and the resonator is fixed to the six-degree-of-freedom platform; The capacitance signal between the resonator and the discrete electrodes on the electrode base is measured using a capacitance detection module, and the pose error of the resonator relative to the electrode base is calculated based on the capacitance signal to determine whether the assembly requirements are met. The signal acquisition and servo control module acquires the real-time pose information of the six-degree-of-freedom platform and the pose error and judgment result calculated by the capacitance detection module. When the assembly requirements are not met, the six-degree-of-freedom platform is driven to perform corresponding linear displacement and angular motion according to the pose error until the assembly requirements are met. The step of measuring the capacitance signal between the resonator and the discrete electrodes on the electrode base using a capacitance detection module, and calculating the pose error of the resonator relative to the electrode base based on the capacitance signal, includes: The capacitance detection module is used to detect the capacitance formed by the position of the resonator lip and the discrete electrodes on the upper surface of the electrode base, and the capacitance value is converted into the actual capacitance gap distance. The position and orientation of the resonator relative to the electrode base are determined by comparing the distances detected by the eight discrete electrodes and the average distance. Using a fixture fixed to a six-degree-of-freedom platform, the electrode base is fixed to the support rod of the resonator through the central hole. Based on the electrical path on the surface of the fixture, the surface metal conductive film layer of the resonator is connected to the capacitance detection module. The electrode base and resonator, which meet the assembly requirements, are locked using a locking mechanism on the support structure. The electrode base and the resonator are welded together using a welding device on the support structure after being locked. During welding, the six-degree-of-freedom platform rotates around the axis of symmetry of the electrode base to ensure uniform distribution of the solder.

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