Reticle pod opener

Abstract

A pod opener adapted to open a pod having a reticle contained therein includes a flow plate, a plurality of positioning guides on the flow plate adapted to mate with guides on a base of the pod, a plurality of vacuum ports on the plurality of positioning guides capable of holding the guides on the base, a lid opening arm having a suction cup at one end capable of grasping a lid of the pod and opening the lid by actuation of the lid opening arm, a rotary actuation arm raised to perform an initial actuation above an edge of the pod within a drawer and when actuated, the rotary actuation arm rotates a jaw at an end of each rotary actuation arm inwardly over the edge and downwardly to a height below a lower plane of the reticle, and at least one angled notch in each jaw adapted to grip a rounded edge of the reticle. Once the rounded edge of the reticle is gripped by the inward movement of the jaws, the jaws are raised while the reticle remains gripped until the reticle is at a second height fully above the edge.

Description

Technical Field

[0001] This disclosure generally relates to photolithography processes, and more specifically, to apparatus, systems, and methods for providing a reticle compact box opener. Background Technology

[0002] A photomask (also called a reticle or photomask sheet) is a pattern built into, for example, a photolithographic lens to provide reference marks. Semiconductor lithography requires processing these photomasks, which are typically made of glass, to produce the nanoscale patterns upon which the patterns for semiconductor chips are based.

[0003] The safe storage and handling of photomasks typically involves a "powder cartridge" (CB) transport container, which holds one photomask. While manual handling of the CB within the cleanroom is generally safe when using cleanroom specifications and methods, opening the CB to remove or replace the photomask is best performed within a robotic work cell inside the cleanroom itself, preferably under individual control within the cleanroom environment. Automated handling of photomasks keeps contamination to an absolute minimum, essential for efficient semiconductor manufacturing. However, industry-standard CB transport and storage containers were not designed with automation as a primary consideration in photomask handling; therefore, very few features suitable for automation exist regarding CBs or photomasks.

[0004] Despite the lack of automation features, using CBs for storing and simplifying mask handling is effective and economical, at least because this use of CBs avoids the additional, separate, and unnecessary transfer of masks to the work cell environment. Therefore, an automatic or semi-automatic CB opener and mask clamping enabling system is needed. Summary of the Invention

[0005] The embodiments provide an apparatus, system, and method for a toner cartridge opener adapted to be associated with a drawer in a work unit and capable of opening a toner cartridge containing a mask. The embodiment provides: a flow plate; a plurality of positioning guides on the flow plate, the plurality of positioning guides being adapted to engage with guides on the base of the powder cartridge; a plurality of vacuum ports on the plurality of positioning guides, capable of holding the guides on the base; a lid-opening arm having a suction cup at one end, wherein the suction cup is capable of gripping the lid of the powder cartridge and opening the lid by actuation of the lid-opening arm; a rotary actuating arm, the rotary actuating arm being raised to initially actuate within the drawer above the edge of the powder cartridge, and when actuated, the rotary actuating arm causes the grippers at the end of each of the rotary actuating arms to rotate inward over the edge and downward to a height below the lower plane of the mask; and at least one angled notch in each of the grippers, the at least one angled notch being adapted to grip the rounded edge of the mask. Once the rounded edge of the mask is gripped by the inward movement of the jaws, the jaws are raised while the mask remains gripped until the mask is at a second height completely above the edge.

[0006] Therefore, the implementation provides an automatic or semi-automatic toner cartridge opener and a mask clamping enabling system. Attached Figure Description

[0007] This disclosure is illustrated in the accompanying drawings by way of example rather than limitation. The drawings may illustrate one or more embodiments of this disclosure individually or in combination. Elements shown in the drawings are not necessarily drawn to scale. Reference numerals may be repeated in the drawings to indicate corresponding or similar elements.

[0008] Figure 1 Exemplary embodiments of this disclosure are illustrated;

[0009] Figure 2 Exemplary embodiments of this disclosure are illustrated;

[0010] Figure 3 Various aspects of the implementation method are shown;

[0011] Figure 4A , Figure 4B and Figure 4C Various aspects of the implementation method are shown;

[0012] Figure 5 Various aspects of the implementation method are shown;

[0013] Figure 6 Various aspects of the implementation method are shown;

[0014] Figure 7 Various aspects of the implementation method are shown;

[0015] Figure 8 Various aspects of the implementation method are shown;

[0016] Figure 9 Various aspects of the implementation method are shown;

[0017] Figure 10A and Figure 10B Various aspects of the implementation method are shown;

[0018] Figure 11 Various aspects of the implementation method are shown;

[0019] Figure 12 Various aspects of the implementation method are shown; and

[0020] Figure 13A and Figure 13B Various aspects of the implementation method are shown. Detailed Implementation

[0021] The accompanying drawings and descriptions provided herein may have been simplified to illustrate aspects relevant to a clear understanding of the devices, systems, and methods described herein, while other aspects that may be found in typical similar devices, systems, and methods have been omitted for clarity. Those skilled in the art will recognize that other elements and / or operations may be desired and / or necessary for implementing the devices, systems, and methods described herein. However, because such elements and operations are well known in the art and do not contribute to a better understanding of this disclosure, a discussion of such elements and operations may not be provided herein. Nevertheless, this disclosure is intended to inherently include all such elements, variations, and modifications to the described aspects that will be known to those skilled in the art.

[0022] The terminology used herein is for the purpose of describing particular exemplary embodiments only and is not intended to be limiting. For example, the singular forms “a” and “the” as used herein may also be intended to include the plural forms unless the context clearly indicates otherwise. The terms “comprising,” “including,” “containing,” and “having” are inclusive and thus specify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof. Unless expressly determined as the order of execution, the method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown. It should also be understood that additional or alternative steps may be employed.

[0023] When an element or layer is referred to as being “on,” “joined to,” “connected to,” or “linked to” another element or layer, it may be directly on, directly joined to, directly connected to, or directly linked to the other element or layer, or there may be intermediate elements or layers present. Conversely, when an element is referred to as being “directly on,” “directly joined to,” “directly connected to,” or “directly linked to” another element or layer, there may be no intermediate elements or layers present. Other terms used to describe relationships between elements should be interpreted in a similar manner (e.g., “between” versus “directly between,” “adjacent” versus “directly adjacent,” etc.). As used herein, the term “and / or” includes any and all combinations of one or more of the associated listed items.

[0024] Although the terms first, second, third, etc., may be used herein to describe various elements, components, regions, layers, and / or portions, these elements, components, regions, layers, and / or portions should not be limited by these terms. These terms are used only to distinguish one element, component, region, layer, or portion from another. That is, unless the context clearly indicates otherwise, terms such as “first,” “second,” and other numerical terms do not imply order or sequence when used herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or portion discussed below may be referred to as the second element, component, region, layer, or portion.

[0025] As mentioned above, photomasks typically involved in semiconductor processing are usually transported in a powder cartridge. At the top and bottom covers of the powder cartridge (CB), the exterior of the CB usually has molded corner guides near the outer corners of the CB. These molded guides can be, for example, about 2 mm high and are configured to allow one CB to be stacked on top of another CB. That is, the lower corner guide of one CB can be nested within the upper corner guide of an adjacent CB, allowing the CBs to be easily stacked.

[0026] These provided corner guides are well-suited for repeatedly evaluating the position of the CB, for example, on a dedicated support tool, because the corner guides are molded uniformly to the CB. In implementation, position repeatability is critical because the proper picking and placing of the mask repeatedly depends on the repeatability of evaluating the position of the mask in the CB when the mask is removed from the CB, which in turn depends on the repeatability of the CB position.

[0027] Inside the CB, the mask is typically positioned on kinematic positioning posts at the four corners of the CB, thus "recessed" within the lower part of the CB. That is, these posts support the mask below the level of the edge of the lower CB portion. Therefore, in known techniques, it is difficult to effectively lift the mask from the CB, at least because the tool must be perpendicular to the surface plane of the mask and pass over the edge of the lower CB, but then must be parallel to the surface plane of the mask and reach below the edge of the mask to support it from below, allowing the mask to be lifted from the CB.

[0028] Furthermore, preferably, when the mask is lifted and removed from the CB, the mask holder only supports the edge radius of the mask. This edge contact limits the transfer of particles, damage, and / or chemical components to the portion of the mask that will be involved in subsequent processing.

[0029] Furthermore, the CB typically includes two forward-facing latches that can slide in opposite or unidirectional directions to allow manual opening of the CB, enabling the loading or unloading of the mask. In embodiments, the orientation requirements of these latches can be "learned," and thus the CB can be opened automatically, such as using actuators or fixed cams. Additionally, to allow automatic opening of the CB, embodiments provide an arm to grasp and rotate the top cover of the CB to open it.

[0030] Furthermore, as mentioned above, the edge of the mask that must typically be gripped for automated processing is located below the edge of the lower CB portion. Therefore, the embodiment supports the mask and raises its edge above the edge of the lower CB portion, allowing the mask to be easily gripped by the robot's end effector.

[0031] More specifically, the disclosed CB opener and processor can provide a processing bridge for introducing and withdrawing a mask into a robotic work cell. The disclosed CB opener may include: an access drawer for the work cell with CB nesting features; a detection sensor for the mask, such as a pass / fail sensor for positioning a film on the underside of the mask; a CB top cover opener / closer; and a mask clamping and lifting arm / gripper assembly for lifting and withdrawing the mask from the CB.

[0032] In short, first, open the CB drawer on the work unit. Then, manually or automatically place the CB onto the tools bonded at the four corners. The drawer can then be manually or automatically closed to the forward position. The airflow on the drawer panel can be a targeted ventilation / vacuum design to reduce particle backflow into the open powder cartridge. The drawer can be equipped with locks for opening and closing to ensure repeatable robotic pick-up positioning.

[0033] The CB "nest" may include a vacuum disc, for example at the four corner keys, to ensure the CB features are properly secured, thereby sensing the appropriate vacuum pressure. The latch on the front of the CB can then be opened manually or automatically, and / or a sensor can confirm that the latch has been released, thus preparing the box for opening.

[0034] Once the CB is in place and its position is confirmed, the opening arm can rotate to allow the cover to open and the vacuum disc to contact the top cover of the CB. As the opening arm retracts, the vacuum disc holds the cover in place, thereby opening the top cover of the CB.

[0035] Mask and film position detection sensors can confirm the presence of a mask, for example, by assessing that the film is correctly aligned. The film is used to indicate whether the mask has been incorrectly rotated 90 degrees. Avoiding this 90-degree rotation is crucial for the downstream processing of the mask.

[0036] The mask can then be retrieved by the lifting actuator assembly. During this process, the lifting plate can be raised so that the support arm and the mask gripper at its end are positioned above the lower edge of the CB. The lifting arm is rotated inward to a vertical position while the lateral slider continues to extend outward. The lifting actuator assembly is lowered so that the mask gripper descends to the edge of the CB and below the mask. The mask gripper at the end of the lifting arm may include a tilted / notched end and a predetermined interval, such as 110 degrees, adapted to provide substantially or only edge contact with the rounded lower edge of the mask.

[0037] Then the lateral mask arm slider extends inward. The mask jaws are now located below the side of the mask. Then, the mask lifting assembly extends upward, causing the rotating arm and slider to lift the mask jaws and center the mask (only the edges of the mask, not the bottom or sides, are in contact).

[0038] The mask is then raised above the edge of the CB. During the raising, the mask is re-centered in the jaws above the CB. During loading, this centering guides the mask into the moving pin (with a small gap, and the pin is tapered to guide the mask into it).

[0039] The mask is raised high enough that the robot's end effector grasps its edge, engaging only at the edge. The end effector then sends a signal to the unit controller to control the mask, and the CB opener lift assembly's mask gripper retracts laterally, releasing the mask's support.

[0040] Therefore, the disclosed gripper insertion and lifting motion is capable of automatically unloading and loading the mask. Crucially, it reaches above the CB edge, downwards and upwards from each side, and in a very tight area, only contacts the rounded edges of the mask.

[0041] Of course, various other mask safety features for the handling mechanism can be included in the implementation. For example, a twin-spindle center-locking valve ensures that the actuator position is maintained during emergency stops or power outages. The grippers / jaws can also be spring-assisted to remain closed in the event of a power failure, rather than allowing the mask to fall.

[0042] Figure 1 The toner cartridge opener unit 10 is shown. At the lower left of the unit are a drawer 12 and a port 14, adapted to house the toner cartridge 16. As described above, the drawer 12 can be opened manually or automatically, and the toner cartridge 16 is positioned on a positioning guide in the drawer base.

[0043] Therefore, in order to access the toner cartridge 16 shown inside the drawer 12, the port / port opener 14 is lifted upward to allow a gap for the toner cartridge 16, and the drawer 12 is pulled outward.

[0044] In this illustration, an additional opener / closer door port 20 and drawer 22 are shown on the right side of the working unit. Furthermore, it should be noted that the CB drawer 12 in the figure is in the open position, with the powder cartridge 16 positioned on top of the CB positioning guide, which is referenced throughout the text.

[0045] Figure 2 A positioning guide 102 is shown, which may have one or more vacuum discs 104 associated thereto to help hold the CB on the flow plate 106 of the toner cartridge opener within the drawer 12. In this illustration, multiple corner positioning guides 102 are physically mounted on the topmost surface of the flow plate 106, or may be integral thereto. The flow plate 106 can provide, for example, targeted airflow and / or vacuum flow through it to reduce particles or other contaminants present in the mask during toner cartridge opening.

[0046] Figure 2 yes Figure 1 A more detailed illustration of the work unit drawer 12 is provided, in which the disclosed toner cartridge opener 100 resides within the drawer 12. When gripped by the vacuum disc 104, the CB opener is capable of receiving the toner cartridge and guiding it to a position for opening. In the illustration, the vacuum disc 104 may be located at the base of the guide locator 102, at a small angular distance from the positioning guide 102. Although a single vacuum disc is shown for each angled positioning guide, one or more vacuum discs may be provided at each positioning guide to positionally hold the toner cartridge when it is placed within the guide.

[0047] The figure also shows a mask support arm 202 and a gripper 204 at its end, which, once engaged (arm / gripper shown in the open / disengaged position), can lift the mask. A toner cartridge opener 100 in the disengaged / open position is shown. The figure also includes a cover arm 210 with a vacuum disc 212 at its end adapted to grip the toner cartridge cover to open it.

[0048] Figure 2 The document also shows multiple indicators and sensors 220 that can be determined by manual or automatic operator notification. For example, a status light 220a indicating the status of the toner cartridge opener and an illumination on switch 220b are shown on the front of drawer 12, indicating when drawer 12 is fully open and thus when the toner cartridge opener is activated and can be operated.

[0049] More specifically, the corner guide 102 and vacuum disc 104 shown may have grooves / angles particularly adapted to mate with stacking guides at or near the corners of a typical toner cartridge base. These bases are positioned at the typical toner cartridge base to allow several toner cartridges to be stacked one on top of another. In this figure, if the toner cartridge base guide does not properly mate with the corner guide 102 on the flow plate 106 of the toner cartridge opener, the sensor 220 can detect an open circuit, and a manual or automatic operator becomes aware of the lack of proper toner cartridge retention.

[0050] like Figure 2 As shown, two gripping arms 202 can be positioned on either side of the toner cartridge opener 100, and each gripping arm is preferably mounted on a rotary actuator 230. The rotary actuator 230 itself can be associated with a linear actuator (not shown), and the entire assembly can rest on a vertical actuator. Thus, upward actuation of the vertical actuator can realize or support the movement of the gripping arms into position, and can also facilitate the rotational closure of the gripping arms 202 on the mask, as the arms 202 are also lifted upward in response to the vertical actuator. Once the mask is positioned above the uppermost edge of the lower part of the toner cartridge, it can be grasped by, for example, a robotic end effector for further processing. This is quite different from the current manual operation method used for toner cartridges, in which a manual operator manually empties the mask from the toner cartridge into open cassettes and retrieves the mask from these cassettes and clamps it for further processing.

[0051] Figure 3 Toner cartridge 16 is shown. Toner cartridge 16 includes a lower part / base 302 having an edge 304 that mates with an upper part / cap 306. Inside toner cartridge 16, below the cap and resting on a corner guide on the base, is a single mask (not shown).

[0052] Figure 3Also shown on top of cover 306 is a corner stacking guide 310, which is referenced throughout the document. This allows for the sensing of position and position alignment via sensor 220, which is employed throughout the process discussed in the disclosure.

[0053] Figure 3 A plurality of thumb latches 320 are also shown at the lower part of the base portion of the toner cartridge. These thumb latches 320 can slide to one side to unlock the lid portion 306 of the toner cartridge. The thumb latches 320 can slide in a consistent direction, towards each other, or away from each other to actuate the lid. In one aspect of the implementation, a cam may be provided to push the thumb latches to automatically open the lid of the toner cartridge, as discussed further below. Alternatively, the thumb latches may be opened by a manual operator.

[0054] Figure 4A , Figure 4B and Figure 4C A series of views are shown of the powder cartridge opener 100 located within the work unit drawer 12 in the drawer open and drawer closed positions. For example, in Figure 4A In the middle, drawer 12 is shown as closed, while... Figure 4C In this configuration, the release cam 402 for drawer 12 is actuated, and the powder box opener 100 extends outward from the drawer profile / rear portion 405, connecting with the outward extension portion at the front of drawer 12. It is worth noting that a support roller / slider 410 may be used in place of or in combination with the extension cam 402 for opening the drawer.

[0055] Figure 5 A side sectional view of the disclosed powder cartridge opener 100 is shown. A cover-opening arm 210 with a rotary actuation 502 is shown on top of the flow plate 106, which has a suction cup 212 adapted to hold the cover 306 at its end.

[0056] Also shown is a lock cylinder 506 capable of locking the drawer and other components disclosed herein, such as the mask clamp arm 202, in a known position. For example, in the event of a power outage or a significant gyroscopic change in the position of the working unit, the lock cylinder 506 and the corresponding safety lock system can be actuated, for example, by a safety interlock switch 510.

[0057] A lifting plate 520 may be disposed below and associated with the transverse slider 522. The lifting plate may be a rotary actuator located on each side, which actuates the mask clamping arm 202. A vertical back plate 530 is associated with one or more vertical actuators 532 and is capable of at least lifting the clamping arm 202, and thus, once the mask is associated with the clamping arm 202, it is capable of lifting the mask upward to a height at least above the top edge 304 of the lower portion 302 of the share 16.

[0058] The lateral slider 522 allows for variations in the toner cartridge size. That is, the lateral slider 522 allows for lateral movement so that the gripper 202 can move across the edge of the toner cartridge in a single motion. Therefore, although the lateral slider 522 can be omitted in some embodiments, encountering toner cartridges of different sizes without the lateral slider may result in insufficient clearance for the gripper 204 of the clamping arm 202, rendering the system inoperable for clamping and lifting the mask.

[0059] Figure 5 The diagram also shows a cable management system 538 located at the lower left of the toner cartridge opener. This cable management system 530 allows the cable line to be moved as needed when the drawer and actuator of the toner cartridge opener are moved.

[0060] Figure 6 A glass mask 600 is shown, and a thin film 602 suitable for evaluating the alignment of the glass mask, which rests on a moving pin 606 on the base 302 of the powder box 16 before being lifted. Figure 6 The clamping and lifting arm 202 of the powder cartridge opener 100 in the open position before alignment with the lower edge of the mask plate 600 is also shown. The lid 306 of the powder cartridge is shown open, with the rotating opening arm 210 in the fully upward position, and the suction cup thus fully engaged with the upper part of the lid 306.

[0061] In the illustration, a cross-mask sensor 620 may be provided to detect the position and elevation of the mask 600. Sensor 620 may also detect the position of a thin film 602, which is typically mounted below or above the mask 600. The mask 600 is typically square-shaped and therefore can be offset by 90 degrees. While this 90-degree offset could be disastrous for downstream processes where the mask 600 is bonded, the only way to assess the occurrence of this offset is through process monitoring of the position of the thin film 602. That is, if the mask is timed to be offset by 90 degrees, only the thin film 602 will provide an alarm.

[0062] Figure 7 A view of the disclosed toner cartridge opener 100 is shown, in which the cover opening actuator arm 210 has opened the cover 306. Also shown, the gripper arm 202 and gripper 204 have been raised to a height above the edge 304 of the lower cartridge portion, so that the gripper 204 can now be inserted into the toner cartridge and below the mask by rotating the actuator.

[0063] Figure 8 It shows Figure 7 The second step of the embodiment shown. In this figure, the rotary actuator 230 of the clamping arm 210 has rotated the arm 210 inward toward the toner cartridge base, and the toner cartridge base has inserted the clamping jaw 204 onto the edge of the lower toner cartridge portion, and thus inserted it into the toner cartridge.

[0064] Figure 9 This shows the effect achieved by a vertical actuator (see...) Figure 5 Lowering the clamping arm 202 lowers the gripper 204 at the end of the clamping arm 202 to a height below the edge 304 of the powder cartridge. Furthermore, the rotational actuation 230 of the clamping arm 202 toward the center of the cartridge causes the gripper 204 to now be positioned below the mask plate 600, for example, when the vertical actuator is actuated (see...). Figure 5 ).

[0065] Figure 10A and Figure 10B Specifically shown in the execution Figure 9 The step involves the relationship between the gripper 204 and the mask 600. As shown in the figure, the size and shape of the groove edge 204a of each gripper 204 are set to mate with the rounded edge of the mask 600 and extend to a minimum below the mask, so that the mask can be lifted when the gripper moves inward.

[0066] Figure 11 More specifically shown Figure 9 and 10A The implementation of / 10B. In... Figure 11 In the illustration, the lateral slider has been actuated, and the gripper 204 at the end of the gripper arm 202 has been moved inward toward the mask 600 by the arm 202. Because the groove portion 204a of the gripper 204 has been lowered to a height below the bottom rounded edge 600a of the mask 600, the actuation of the lateral slider places a portion of the gripper 204a below each side of the bottom rounded edge 600a of the mask, and causes another portion of the groove 204a of the gripper to abut against the side rounded edge 600a of the mask.

[0067] It is worth noting that minimal contact between the grippers and the mask reduces contaminants and particles that could damage the mask's functionality during downstream processing. Furthermore, the angled grooves 204a shown in the grippers can be formed at angles greater than 90 degrees. This obtuse angle allows the rounded edges of the mask to rest almost entirely against the corners of the grooves 204a in the grippers, thereby minimizing contact between the grippers and the mask.

[0068] Figure 12 The fully engaged gripper 204 is shown, which may include actuation of a vertical lifting plate slider, and which lifts the entire mask 600 above the powder cartridge edge 304, as illustrated. This positions the mask 600 in a ready position for gripping by, for example, an end effector that will transport the mask to its next stage of processing.

[0069] Figure 13A and Figure 13BSpecific features of a toner cartridge opener for alternative and additional embodiments are shown. In the illustrated embodiment, an automatic opener 702 is provided for the aforementioned toner cartridge front latch 320. In this illustration, an automatic cam system 702 is provided to open the toner cartridge. Those skilled in the art will understand that although the cam system in the illustrated embodiment requires manual latch release in the same direction, multiple cams may be employed in embodiments where the two front latches move in different directions.

[0070] As shown in the figure, when the toner cartridge is placed on the flow plate of the entire discussion, the latch opener 702 contacts the manual latch 320 of the toner cartridge. Once in place, the finger 702a at the end of the cam 702 contacts the protrusion at the edge of each latch 320 and moves in a manner that opens the latch.

[0071] Then, sensors on the opener, such as reflective sensors 710 under each latch 320, can confirm that each latch is open. This is done so that if the latch is still closed, the lid opener discussed herein will not attempt to open the lid, as this would pull the box away from the flow plate 106, which would be disastrous for the disclosed process. If the latch is confirmed to be open, the process can proceed as described above. If neither of the latches is confirmed to be open, the process will stop, and the disclosed locking mechanism (see [link to documentation]) will activate. Figure 5 This will lock the powder cartridge in place, and thus lock the mask in place as well.

[0072] Furthermore, a vacuum can be provided differently throughout the disclosure to provide enhanced security for the toner cartridge. For example, the vacuum pull provided by the drawer vacuum at the flow plate can preferably be greater than the vacuum and total pull applied to the toner cartridge lid by the lid opener. Therefore, erroneous actuation of the lid opener will not pull the entire cartridge away from the flow plate and unnecessarily move the mask plate within the toner cartridge.

[0073] As can be seen from the above detailed description, various features have been grouped together in a single embodiment for the sake of clarity and brevity. This approach of the present disclosure should not be construed as reflecting an intention that an embodiment requires more features than explicitly described herein. Rather, this disclosure will cover all variations and modifications to the disclosed embodiments that will be understood by those skilled in the art based on this disclosure.

Claims

1. A toner cartridge opener adapted to be associated with a drawer in a work unit and capable of opening a toner cartridge containing a mask therein, the toner cartridge opener comprising: Circulation board; Multiple positioning guides are provided on the flow plate and are adapted to cooperate with guides on the base of the powder cartridge. Multiple vacuum ports on multiple positioning guides are provided to hold the guides on the base. The lid opening arm has a suction cup at one end, wherein the suction cup is capable of gripping the lid of the powder box and opening the lid by actuation of the lid opening arm; A rotary actuator arm is raised to initially actuate within the drawer above the edge of the powder box, and when actuated, the rotary actuator arm causes the grippers at the end of each of the rotary actuator arms to rotate inward past the edge and downward to a height below the lower plane of the mask; and At least one angled notch, said at least one angled notch in each of said grippers, adapted to grip the rounded edge of said mask; Wherein, once the rounded edge of the mask is clamped by the inward movement of the gripper, the gripper is raised while the mask remains clamped until the mask is at a second height completely above the edge.

2. The powder box opener according to claim 1, wherein, The flow plate provides a vacuum flow through it to reduce particles near the mask.

3. The powder box opener according to claim 1, wherein, The vacuum port is located at the base of the positioning guide.

4. The powder cartridge opener according to claim 1, wherein, The positioning guide uses a matching angle to engage with the guide on the base.

5. The powder box opener according to claim 1, wherein, Each of the vacuum ports corresponds to one of the positioning guides.

6. The powder box opener according to claim 1, wherein, Each of the vacuum ports corresponds to one of the positioning guides.

7. The powder cartridge opener according to claim 1 further includes at least one sensor on the drawer, the at least one sensor being capable of sensing the powder cartridge to notify the work unit operator of a decision.

8. The powder box opener according to claim 7, wherein, The work unit operator is manual.

9. The powder box opener according to claim 7, wherein, The at least one sensor includes an opening switch for indicating when the drawer is fully open.

10. The powder box opener according to claim 7, wherein, The at least one sensor includes an open-circuit sensor that indicates when the powder cartridge is not clamped by the vacuum port.

11. The powder cartridge opener according to claim 1 further includes a status light on the drawer for indicating the status of the powder cartridge opener.

12. The powder box opener according to claim 1, wherein, There are two of the aforementioned rotary actuator arms.

13. The powder box opener according to claim 1, further comprising a vertical actuator, the vertical actuator being at least partially capable of raising the rotary actuator arm.

14. The powder cartridge opener according to claim 1, wherein, The number of the plurality of positioning guides is four, and they are located near the corners of the flow plate.

15. The powder cartridge opener according to claim 1 further includes a cam latch opener, the cam latch opener being capable of opening a manual latch at the front of the powder cartridge.

16. The powder box opener according to claim 1, further comprising a lock cylinder capable of locking at least the drawer and the rotary actuator arm.

17. The powder box opener according to claim 16 further includes a safety interlock switch, the safety interlock switch being capable of actuating the lock cylinder when power is off or when a significant gyroscopic change occurs in the position of the working unit.

18. The powder box opener according to claim 1, further comprising a lateral slider capable of changing the distance between the arms when the arms are raised.

19. The powder box opener according to claim 13, wherein the vertical actuator comprises a vertical back plate and one or more actuators.

20. The powder cartridge opener according to claim 19, wherein, The actuator includes either a cam or a piston.

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