Melted quartz micro- gyroscope with flexible electrode configuration and preparation method thereof

Abstract

The application relates to a fused quartz microgyroscope with flexible electrode configuration and a preparation method thereof. The gyroscope comprises a substrate, a permanent magnet arranged on the substrate, a magnetic conducting component covering two ends of the permanent magnet, and a resonator arranged on the top of the substrate and sleeved on the permanent magnet, wherein the resonator is a double-sided resonator, and a double-sided conductive loop is made on the double-sided resonator. Through different connection modes of the electrodes in the double-sided conductive loop, the sensitivity of detection can be improved, the generation of overturning moments can be avoided, the coupling problem of a driving signal and a detection signal can be eliminated, or the modal matching adjustment of the gyroscope is used to improve the adjustment capacity, so that the differentiated functional requirements are met.

Description

Technical Field

[0001] This application relates to the field of microelectromechanical systems (MEMS) technology, and in particular to a fused silica microgyroscope with flexibly configurable electrodes and its preparation method. Background Technology

[0002] A gyroscope is an inertial sensor used to measure the angle or angular velocity of a moving vehicle in inertial space, and is a core component of inertial navigation systems. It plays a crucial role in modern industrial control, aerospace, and consumer electronics. Microelectromechanical systems (MEMS) gyroscopes, since their introduction in the 1980s, have demonstrated advantages over optical gyroscopes and traditional mechanical rotor gyroscopes, including smaller size, lower power consumption, mass production capability, and ease of integration. This aligns with the trends of product miniaturization, integration, and informatization, thus showcasing broad application prospects in consumer electronics and other fields, making it a focus of attention.

[0003] Traditional high-precision MEMS gyroscopes mostly employ electrostatic actuation and detect angular velocity by utilizing changes in capacitance caused by vibration. The capacitor spacing is typically on the order of micrometers. Under overload conditions, this type of gyroscope is prone to changes in capacitor spacing, leading to measurement errors. Improvements have led to the development of electromagnetically driven MEMS gyroscopes. However, because the conductive circuit of an electromagnetically driven MEMS gyroscope is only on the upper surface of the resonant structure, when the gyroscope is operating, the resonant structure experiences a slight deformation due to an overturning moment under the Ampere force. This causes a change in the moment of inertia of the resonant ring, affecting the mode shape of the structure. Furthermore, it suffers from low sensitivity and coupling issues between the driving and detection modes, impacting the gyroscope's performance and accuracy. Summary of the Invention

[0004] Therefore, it is necessary to address the above-mentioned technical problems by providing a fused silica micro-gyroscope with flexibly configurable electrodes and its preparation method, which can improve sensitivity, eliminate the coupling problem between the driving mode and the detection mode signals, and improve detection accuracy.

[0005] A fused silica micro gyroscope with flexibly configurable electrodes includes a substrate, a permanent magnet disposed on the substrate, magnetic conductive components covering both ends of the permanent magnet, and a resonator disposed on the top of the substrate and sleeved on the permanent magnet. The resonator is a double-sided resonator, and a double-sided conductive circuit is fabricated on the double-sided resonator.

[0006] Different connection methods are used for the electrodes in the double-sided conductive circuit to meet differentiated functional requirements.

[0007] A method for fabricating a fused silica microgyroscope with flexibly configurable electrodes, the method comprising:

[0008] Step 1: Select a fused silica sheet and use a laser to irradiate the resonator contour on the fused silica sheet to obtain a laser-irradiated fused silica sheet;

[0009] Step 2: Cover the fused silica sheet irradiated by the laser with a mask containing a conductive circuit pattern.

[0010] Step 3: Using a vapor deposition method, chromium of appropriate thickness is deposited onto a fused silica sheet covered with a mask, and then gold of appropriate thickness is deposited onto the first surface of the fused silica sheet covered with a mask. The mask is then removed to obtain the first conductive circuit.

[0011] Step 4: Using the methods in steps 2 and 3, chromium and gold are deposited onto the second surface sequentially to obtain the second conductive circuit;

[0012] Step 5: Use AR adhesive to fully cover the first and second surfaces of the fused silica wafer treated in step 4. Then, the photoresist is homogenized, photolithographically etched, and developed, and finally patterned into the outline of a ring resonator, covering the outside of the AR adhesive on the first and second surfaces.

[0013] Step 6: The first and second surfaces covered by AR adhesive in Step 5 are processed by dry etching until the contour surface of the fused silica sheet irradiated by the laser is exposed, and the remaining conductive circuit surface covered by AR adhesive is exposed.

[0014] Step 7: Wet etching is used to process the fused silica sheet to obtain the etched fused silica sheet;

[0015] Step 8: Remove the AR adhesive from the corroded fused silica disc surface with a cleaning solution to obtain a fused silica disc with a double-sided electrode ring resonator.

[0016] Step 9: Take another thicker fused silica sheet to be prepared as a substrate, process a groove in the center, and deposit several conductive electrodes on the surface of the substrate.

[0017] Step 10: After installing a magnetically conductive component in the groove, the electrode of the second electrode surface of the fused silica disc obtained in step 8 is connected to several conductive electrodes in step 9 by bonding. Then, one end of the permanent magnet is passed through the resonator and installed in the magnetically conductive component. Another magnetically conductive component is then installed at the other end of the permanent magnet to obtain a fused silica micro-gyroscope with flexibly configurable electrodes.

[0018] Compared with existing technologies, the fused silica micro-gyroscope with flexibly configurable electrodes and its preparation method provided by this invention have the following advantages:

[0019] 1. By employing a double-sided conductive circuit and using different connection methods for the electrodes of the double-sided conductive circuit, the detection sensitivity can be improved, the generation of overturning torque of the resonant structure can be avoided, and the performance level of the gyroscope can be improved; or the coupling problem between the driving signal and the detection signal can be eliminated, thereby improving the detection accuracy of the gyroscope; or it can be used for mode matching and tuning of the gyroscope to improve the tuning capability; thus meeting the needs of differentiated functions.

[0020] 2. Small size and low power consumption. Attached Figure Description

[0021] Figure 1 This is an isometric view of the gyroscope provided in Embodiment 1 of the present invention;

[0022] Figure 2 This is the axonometric view of the base provided in Embodiment 1 of the present invention;

[0023] Figure 3 This is a cross-sectional view of the gyroscope shaft provided in Embodiment 1 of the present invention;

[0024] Figure 4 This is a schematic diagram of the first electrode connection method provided in Embodiment 1 of the present invention;

[0025] Figure 5 This is a schematic diagram of the second electrode connection method provided in Embodiment 1 of the present invention;

[0026] Figure 6 This is a schematic diagram of the third electrode connection method provided in Embodiment 1 of the present invention.

[0027] Explanation of reference numerals in the attached figures:

[0028] The components include: a substrate 1, a groove 101, a conductive electrode 102, a permanent magnet 2, a magnetically conductive component 3, a double-sided resonator 4, a resonant ring 41, a support beam 42, an electrode area 43, a first electrode surface 44, a first electrode 442, a second electrode 443, an intermediate loop segment 444, an arc-shaped loop segment 445, a second electrode surface 45, a third electrode 451, and a fourth electrode 452. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0030] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indication will also change accordingly.

[0031] Furthermore, in this invention, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly and specifically defined.

[0032] In this invention, unless otherwise explicitly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection, an electrical connection, a physical connection, or a wireless communication connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two elements or the interaction between two elements, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0033] The embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

[0034] Example 1

[0035] See Figures 1 to 6 The fused silica microgyroscope structure with flexibly configurable electrodes provided in this embodiment includes a substrate 1, a permanent magnet 2 disposed on the substrate 1, magnetically conductive components 3 covering both ends of the permanent magnet 2, and a resonator disposed on the top of the substrate 1 and sleeved on the permanent magnet 2. The resonator is a double-sided resonator 4, and a double-sided conductive circuit is fabricated on the double-sided resonator 4. Different connection methods are used for the double-sided conductive circuit to meet differentiated functional requirements.

[0036] Specifically, the substrate 1 and the double-sided resonator 4 are made of fused silica materials of different thicknesses. The purpose of using fused silica materials of the same material is to ensure that the thermal expansion coefficients are equal to those of the double-sided resonator 4, thereby reducing energy loss during vibration and improving the quality factor of the double-sided resonator 4.

[0037] like Figure 2 As shown, the substrate 1 is made of a relatively thick fused silica disc, with a cylindrical groove 101 machined at the center for embedding the magnetically conductive component 3. Several conductive electrodes 102 are deposited near the circumference for connection with the double-sided resonator 4 and signal transmission.

[0038] Combination Figure 3The magnetic conductive component 3 consists of two identical cylindrical groove structures, the outer diameter of which matches the inner diameter of the groove 101 in the base 1. During connection, the two magnetic conductive components 3 are fastened to both ends of the permanent magnet 2 as end caps, with one of the magnetic conductive components 3 embedded within the groove 101 of the base 1. It can be understood that the magnetic conductive component 3 is used to construct a magnetic field perpendicular to the vibration plane of the resonant ring 41. The closer the magnetic conductive component 3 is to the resonant ring 41, the stronger the magnetic field at the resonant ring 41. The higher the permeability of the material of the magnetic conductive component 3, the stronger the magnetic field at the resonant ring 41, which helps to reduce the driving force, lower power consumption, and improve the sensitivity of the gyroscope. The permanent magnet 2 is preferably a high-temperature resistant samarium cobalt permanent magnet, thus ensuring the high-temperature resistance of the micro-gyroscope. The material of the magnetic conductive component 3 is preferably permalloy.

[0039] The double-sided resonator 4 is a ring resonator with a resonant ring 41 at its center and an electrode region 43 near the circumference. Several double L-shaped support beams 42 are arranged circumferentially between the resonant ring 41 and the electrode region 43 for connection. Since the fused silica material itself is non-conductive, conductive circuits are added to the first electrode surface 44 and the second electrode surface 45 of the double-sided resonator 4. The conductive circuit patterns on the two electrode surfaces can be identical for direct connection or functionally differentiated connection for signal transmission; they can also be different for upper surface adjustment. The resonant ring 41 is positioned between the two magnetically conductive components 3, and the distances from both ends of the resonant ring 41 to the end faces of the two magnetically conductive components 3 are completely equal and symmetrical, ensuring the uniformity of the magnetic field within the range of motion of the two ends of the resonant ring 41, thereby ensuring the linear relationship between the input / output electrical signal and the vibration signal. The preferred materials for the conductive circuit are chromium and gold. The processing technology is as follows: first, a thin chromium film is deposited on the surface of the fused silica disc to enhance the adsorption force between the metal layer and the fused silica; then, a gold film of appropriate thickness is deposited on the chromium film.

[0040] Among them, such as Figure 4 As shown, a first electrode connection method, referred to as the direct connection method, is provided. The electrode patterns of the first electrode surface 44 and the second electrode surface 45 are the same, the difference being that the first electrode surface 44 is located on the upper surface and the second electrode surface 45 is located on the lower surface. Taking the first electrode surface 44 as an example, the first electrode surface 44 includes eight circumferentially spaced conductive loops. The conductive loops include an intermediate loop segment 444 deposited on the support beam 42, an arc-shaped loop segment 445 deposited on the resonant ring 41, and a first electrode 442 and a second electrode 443 disposed at both ends of the conductive loops. The first electrode 442 and the second electrode 443 are disposed on the electrode region 43 and are spaced apart circumferentially along the electrode region 43, or distributed according to a specific pattern depending on the situation. During connection, conductive loops in the same orientation are connected, and one of the connected loops is used as the input of the driving signal, and the other connected loop is used as the output of the detection signal.

[0041] Specifically, if the first electrode surface 44 has one conductive loop with the first electrode 442 and the second electrode 443 at both ends, then the second electrode surface 45, in the same orientation, has a conductive loop with the third electrode 452 and the fourth electrode 453 at both ends. The first electrode 442 and the third electrode 452 are connected by a lead wire as the input terminal for the drive signal, and the second electrode 443 and the fourth electrode 453 are connected by a lead wire as the ground terminal. Similarly, the other conductive loop is connected in the same manner, with one connected loop serving as the output terminal for the detection signal and the other as the ground terminal. By directly connecting the first electrode surface 44 and the second electrode surface 45, which have the same function, and allowing both electrode surfaces to simultaneously input or output the same signal, the sensitivity of the gyroscope can be improved, while avoiding the effect of overturning torque, thus enhancing the performance level of the gyroscope.

[0042] like Figure 5 As shown, a second electrode connection method is provided, called the functionalized differential connection method, in which the electrode patterns of the first electrode surface 44 and the second electrode surface 45 are set in the same way as... Figure 4 The same applies here, so it will not be repeated. In terms of connection method, the same orientation is selected, with one of the conductive loops of the first electrode surface 44 used as the input of the driving signal, and one of the conductive loops of the second electrode surface 45 used as the output of the detection signal.

[0043] Specifically, the first electrode 442 is used as the input terminal of the drive signal, the third electrode 452 is used as the output terminal of the detection signal, and the second electrode 443 and the fourth electrode 453 are connected as ground terminals and grounded simultaneously. The first electrode surface 44 and the second electrode surface 45 have different functions. Through this connection method, the coupling problem between the gyroscope drive signal and the detection signal can be eliminated, thereby improving the detection accuracy of the gyroscope.

[0044] like Figure 6As shown, a third electrode connection method is provided, mainly used for mode matching and adjustment of the gyroscope. In this connection method, the electrode patterns of the first electrode surface 44 and the second electrode surface 45 are different. The pattern of the second electrode surface 45 remains unchanged, while the first electrode surface 44 includes four conductive loops for electrothermal frequency adjustment and four conductive loops for mechanical adjustment, which are arranged alternately in pairs. The conductive loops for electrothermal frequency adjustment have the same structure as the conductive loops of the second electrode surface 45; the mechanical adjustment conductive loops only have an intermediate loop segment 444 deposited on the support beam, and the intermediate loop segment 444 is continuous. During connection, one of the conductive loops of the second electrode surface 45 is used as the input of the drive signal, and the other conductive loop is used as the output of the detection signal. Mechanical adjustment or electrothermal frequency adjustment is applied to the conductive loop of the first electrode surface 44 for mode matching and adjustment of the gyroscope. It is worth noting that the first electrode surface 44 can also adopt other conductive circuit settings. For example, the resonant ring 41 and the support beam 42 are fully covered by a metal layer, which is only used for mechanical adjustment; or 8 sets of conductive circuits are set for electrothermal frequency adjustment, all of which are used for electrothermal adjustment.

[0045] Specifically, in one of the conductive loops of the second electrode surface 45, the third electrode 451 serves as the input terminal of the drive signal, and the fourth electrode 452 serves as the ground terminal. In the adjacent conductive loop, it is arranged in the same way, with one electrode serving as the output terminal of the detection signal and the other electrode serving as the ground terminal.

[0046] It is worth noting that during assembly, the electrodes at both ends of each conductive circuit in the second electrode surface 45 are aligned one-to-one with the conductive electrode 102 on the top of the substrate, and then connected by gold-to-gold bonding. In use, the first conductive circuit is simply connected to the conductive electrode 102 in the same position.

[0047] The working principle of the MEMS gyroscope in this embodiment is as follows:

[0048] In this embodiment, the MEMS gyroscope operates in a second-order in-plane vibration mode. This mode has an elliptical shape with two antinodes and a degenerate mode at a 45° angle to each other. By applying a voltage to one of the conductive loops on the first electrode surface 44 of the double-sided resonator 4 and the corresponding conductive loop on the second electrode surface 45, current flows through the resonant ring 41. The current on the upper and lower surfaces of the resonant ring 41 is subjected to Ampere force in the magnetic field, causing the resonant ring 41 to move. When the applied voltage is an AC signal and its frequency is equal to the natural frequency of the second-order mode of the gyroscope, the first mode of the gyroscope is excited and oscillates. When the gyroscope rotates relative to inertial space, due to the Coriolis force, the degenerate mode at a 45° angle to the first mode will be excited and oscillate, which is called the second mode. When the second mode vibrates, the wires on the resonant ring 41 move in the magnetic field. According to Faraday's law of electromagnetic induction, the double-sided conductive circuit on the resonant ring 41 will generate an induced electromotive force. By measuring and calculating the induced electromotive force signal, the angular velocity of the gyroscope's rotation relative to inertial space can be obtained.

[0049] Example 2

[0050] This embodiment provides a method for fabricating a fused silica micro-gyroscope with flexibly configurable electrodes, the method comprising:

[0051] Step 1: Select a fused silica sheet and irradiate the resonator contour on the fused silica sheet with a laser to obtain a laser-irradiated fused silica sheet. It can be understood that by irradiating the contour position with a laser, the internal properties of the material change, facilitating subsequent processing. A fused silica disc is preferred.

[0052] Step 2: A mask with a conductive circuit pattern is placed over the fused silica disc after laser irradiation. It is worth noting that the mask and the fused silica disc are the same size, and the mask has a cutout pattern of conductive circuits. The relative positioning of the mask and the fused silica disc is achieved through alignment marks.

[0053] Step 3: Using a vapor deposition method, chromium of appropriate thickness is deposited onto a fused silica sheet covered with a mask, and then gold of appropriate thickness is deposited onto the first surface of the fused silica sheet covered with a mask. The mask is then removed to obtain the first conductive circuit.

[0054] Step 4: Using the methods in steps 2 and 3, chromium and gold are sequentially deposited onto the second surface to obtain the second conductive circuit. It can be understood that when processing the second surface, the pattern on the first surface is used for positioning to ensure that the conductive circuits on both surfaces are aligned. Then, chromium and gold are sequentially deposited onto the second surface using a vapor deposition method to obtain the conductive circuit.

[0055] Step 5: The first and second surfaces of the fused silica wafer treated in Step 4 are fully covered with AR adhesive. Then, the photoresist is homogenized, photolithographically etched, and developed, finally patterned into the outline of a ring resonator, and applied to the outside of the AR adhesive on the first and second surfaces. It is worth noting that AR adhesive is used because it is resistant to hydrofluoric acid corrosion during the treatment in Step 7.

[0056] Step 6 involves dry etching of the first and second surfaces covered with AR adhesive from Step 5 until the contoured surface of the fused silica sheet irradiated by the laser is exposed, leaving the remaining conductive circuit surface covered by AR adhesive. It can be understood that after Step 6, a certain thickness of AR adhesive remains covering the electrodes, and the covered area matches the contour of the ring resonator, thus providing good protection for the metal electrodes.

[0057] Step 7 involves processing the fused silica sheet using wet etching to obtain the etched fused silica sheet. It can be understood that since the fused silica sheet covered by the mask was processed by laser in step 2, the resonant structure can be obtained in step 7 by using hydrofluoric acid (HF) to etch the fused silica sheet in the laser-irradiated area.

[0058] Step 8: Remove the AR adhesive from the corroded fused silica disc surface with a cleaning solution to obtain a fused silica disc with a double-sided electrode ring resonator.

[0059] Step 9: Take another thicker fused silica sheet to be prepared as a substrate, process a groove in the center, and deposit several conductive electrodes on the surface of the substrate.

[0060] Step 10: After installing a magnetically conductive component in the groove, the electrode of the second electrode surface of the fused silica disc obtained in step 8 is connected to several conductive electrodes in step 9 by bonding. Then, one end of the permanent magnet is passed through the resonator and installed in the magnetically conductive component. Another magnetically conductive component is then installed at the other end of the permanent magnet to obtain a fused silica micro-gyroscope with flexibly configurable electrodes.

[0061] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0062] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A fused silica micro-gyroscope with flexibly configurable electrodes, comprising a substrate, a permanent magnet disposed on the substrate, magnetically conductive components covering both ends of the permanent magnet, and a resonator disposed on top of the substrate and sleeved on the permanent magnet, characterized in that: The resonator is a double-sided resonator, and a double-sided conductive circuit is fabricated on the double-sided resonator. Different connection methods are used for the electrodes in the double-sided conductive circuit to meet differentiated functional requirements. The connection methods include: In the direct connection method, the conductive loops of the two electrode surfaces of the double-sided resonator in the same position are connected together, and they are used together as the input of the driving signal or the output of the detection signal. The functionally differentiated connection method sets up the conductive circuits of the two electrode surfaces of the double-sided resonator in the same position independently, which are used as the input of the driving signal and the output of the detection signal, respectively. In the mode matching and adjustment connection method, different conductive circuit patterns are used on the two electrode surfaces of the double-sided resonator. One electrode surface serves as the input of the driving signal and the output of the detection signal, while the other electrode surface is used for the mode matching and adjustment of the gyroscope.

2. The fused silica micro-gyroscope with flexibly configurable electrodes according to claim 1, characterized in that, In the direct connection method, the double-sided resonator includes a first electrode surface and a second electrode surface with the same electrode pattern, and a plurality of conductive circuits are provided at intervals on both the first electrode surface and the second electrode surface. Connect the conductive loops in the same position of the first electrode surface and the second electrode surface, then use one of the connected loops as the input of the driving signal and the other connected loop as the output of the detection signal.

3. The fused silica micro-gyroscope with flexibly configurable electrodes according to claim 2, characterized in that, Each conductive loop on the first electrode surface is provided with a first electrode and a second electrode at both ends, and each conductive loop on the second electrode surface is provided with a third electrode and a fourth electrode at both ends. The first electrode is connected to the third electrode and serves as the input terminal of the driving signal or the output terminal of the detection signal; the second electrode is connected to the fourth electrode and serves as the ground terminal.

4. The fused silica micro-gyroscope with flexibly configurable electrodes according to claim 1, characterized in that, In the functionally differentiated connection method, the double-sided resonator includes a first electrode surface and a second electrode surface with the same electrode pattern, and a plurality of conductive circuits are provided at intervals on both the first electrode surface and the second electrode surface. One of the conductive loops on the first electrode surface is used as the input of the driving signal; and one of the conductive loops on the second electrode surface is used as the output of the detection signal. The conductive circuit that serves as the input of the driving signal and the conductive circuit that serves as the output of the detection signal are located in the same position.

5. The fused silica micro-gyroscope with flexibly configurable electrodes according to claim 4, characterized in that, Each conductive loop on the first electrode surface is provided with a first electrode and a second electrode at both ends, and each conductive loop on the second electrode surface is provided with a third electrode and a fourth electrode at both ends. The first electrode is used as the input terminal of the driving signal, the third electrode is used as the output terminal of the detection signal, and the second electrode is connected to the fourth electrode as the ground terminal.

6. The fused silica micro-gyroscope with flexibly configurable electrodes according to claim 1, characterized in that, In the modal matching and tuning connection method, the two-sided resonator includes a first electrode surface and a second electrode surface with different electrode patterns. The first electrode surface is provided with a plurality of conductive loops, and the second electrode surface is provided with a different number of conductive loops than the first electrode surface. One of the conductive loops on the second electrode surface is used as the input of the driving signal, and the other conductive loop on the second electrode surface is used as the output of the detection signal; The conductive circuit of the first electrode surface is mechanically or electrically and thermally frequency-adjusted for modal matching adjustment of the gyroscope.

7. The fused silica microgyroscope with flexibly configurable electrodes according to claim 6, characterized in that, Each conductive loop on the second electrode surface is provided with a third electrode and a fourth electrode at both ends; the third electrode is used as the input terminal of the driving signal or the output terminal of the detection signal, and the fourth electrode is used as the ground terminal.

8. The fused silica microgyroscope with flexibly configurable electrodes according to any one of claims 2 to 7, characterized in that, A plurality of conductive electrodes are provided on the top of the substrate, and the electrodes of each conductive circuit on the second electrode surface are connected one-to-one with the conductive electrodes on the top of the substrate.

9. The fused silica microgyroscope with flexibly configurable electrodes according to claim 8, characterized in that, The electrodes of each conductive circuit on the second electrode surface are connected to the conductive electrode on the top of the substrate by gold-gold bonding.

10. A method for fabricating a fused silica micro-gyroscope with flexibly configurable electrodes, characterized in that, The method using the fused silica micro-gyroscope with flexibly configurable electrodes as described in claim 1 includes: Step 1: Select a fused silica sheet and use a laser to irradiate the resonator contour on the fused silica sheet to obtain a laser-irradiated fused silica sheet; Step 2: Cover the fused silica sheet irradiated by the laser with a mask containing a conductive circuit pattern. Step 3: Using a vapor deposition method, chromium of appropriate thickness is deposited onto a fused silica sheet covered with a mask, and then gold of appropriate thickness is deposited onto the first surface of the fused silica sheet covered with a mask. The mask is then removed to obtain the first conductive circuit. Step 4: Using the methods in steps 2 and 3, chromium and gold are deposited onto the second surface sequentially to obtain the second conductive circuit; Step 5: Use AR adhesive to fully cover the first and second surfaces of the fused silica wafer treated in step 4. Then, the photoresist is homogenized, photolithographically etched, and developed, and finally patterned into the outline of a ring resonator, covering the outside of the AR adhesive on the first and second surfaces. Step 6: The first and second surfaces covered by AR adhesive in Step 5 are processed by dry etching until the contour surface of the fused silica sheet irradiated by the laser is exposed, and the remaining conductive circuit surface covered by AR adhesive is exposed. Step 7: Wet etching is used to process the fused silica sheet to obtain the etched fused silica sheet; Step 8: Remove the AR adhesive from the corroded fused silica disc surface with a cleaning solution to obtain a fused silica disc with a double-sided electrode ring resonator. Step 9: Take another thicker fused silica sheet to be prepared as a substrate, process a groove in the center, and deposit several conductive electrodes on the surface of the substrate. Step 10: After installing a magnetically conductive component in the groove, the electrode of the second electrode surface of the fused silica disc obtained in step 8 is connected to several conductive electrodes in step 9 by bonding. Then, one end of the permanent magnet is passed through the resonator and installed in the magnetically conductive component. Another magnetically conductive component is then installed at the other end of the permanent magnet to obtain a fused silica micro-gyroscope with flexibly configurable electrodes.

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