A method for the preparation of a polymer surface modification based on a sander
By performing surface modification on polytetrafluoroethylene (PTFE) material, and using a grinding machine for multi-process processing and carbon film deposition, the problems of insufficient load-bearing capacity and hydrophobicity of PTFE material are solved, improving the mechanical properties and hydrophobicity of the material, making it suitable for cleaning wafers.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- XIAMEN LAIMAN NEW MATERIAL TECH CO LTD
- Filing Date
- 2023-12-29
- Publication Date
- 2026-07-21
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Figure CN118123645B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of polymer modification technology, and more specifically to a method for preparing polymer surface modification based on a grinding machine. Background Technology
[0002] With the booming development of the integrated circuit industry, the amount of wafers used is also increasing dramatically. Chemical cleaning of wafers is a crucial step in the entire chip manufacturing process. Because the wafer processing process requires extremely high cleanliness, all media that come into contact with the wafer can potentially contaminate it. The quality of wafer cleaning has a direct impact on device performance, which greatly affects the timeliness of integrated circuit manufacturing. Ideally, the cleaning carrier for wafers should not have wetting or hydrophilic properties, as this would affect the water stain problem on the wafers. In addition, the carrier should have wear resistance, high mechanical strength, etc., to ensure better durability without affecting the wafer's load-bearing capacity. As a result, materials such as polytetrafluoroethylene (PTFE) have been developed as cleaning materials.
[0003] Polytetrafluoroethylene (PTFE) exhibits excellent corrosion resistance and is chemically inert. It can withstand the erosion of most corrosive chemicals, acids, alkalis, and organic solvents, such as concentrated nitric acid, concentrated hydrochloric acid, concentrated sulfuric acid, concentrated phosphoric acid, concentrated hydrofluoric acid, and any concentrated alkali. Furthermore, it maintains its stability and excellent corrosion resistance even at high temperatures. However, it is not easily melted, and when melted, it does not flow, exhibiting a "rubber-like" state. Traditional PTFE materials also have some shortcomings: low load-bearing capacity, poor durability, and poor hydrophobicity. Therefore, improvements are needed to address these issues with PTFE materials. Summary of the Invention
[0004] This invention selects polytetrafluoroethylene (PTFE) as the material and uses multiple processes such as cutting, milling, and deposition techniques to achieve effective surface modification of PTFE.
[0005] A method for preparing polymer surface modification based on a grinding machine, wherein the grinding machine includes a controller, a frame, a main grinding head, an auxiliary grinding head, a loading tray, and a lifting device. The main grinding head, auxiliary grinding head, and lifting device are all mounted on the frame, and the loading tray is mounted on the lifting device. The lifting device is used to raise and lower the loading tray. The main grinding head and auxiliary grinding head are positioned above the loading tray, and the center lines of the main grinding head and auxiliary grinding head and the center line of the loading tray are both located on a plane perpendicular to the surface of the loading tray. High-precision positioning sensors are installed on both the main grinding head and auxiliary grinding head. The signal terminals of the positioning sensors are electrically connected to the signal acquisition terminals of the controller, and the control terminals of the controller are electrically connected to the control terminals of the main grinding head, auxiliary grinding head, and lifting device. For polymer surface modification, the preparation method includes the following steps: Step 1: Selecting raw materials Select polytetrafluoroethylene (PTFE) cylindrical materials, use a cutting machine tool to process the PTFE cylindrical materials to the specified dimensions, and process the corresponding PTFE blanks. Step 2: Quick Positioning Select the PTFE blank and the grinding machine from step 1. Place the PTFE blank stably on the loading tray of the grinding machine. Control the lifting device to raise the loading tray to the working position. The controller controls the positioning sensors of the main grinding machine and the auxiliary grinding machine to collect the position information of the PTFE blank and feed it back to the controller for processing and to control the positioning of the main grinding machine and the auxiliary grinding machine for grinding the PTFE blank. Step 3: Coarse grinding Select the PTFE blank and grinding machine from step 2. First, start the coarse grinding head on the main grinding machine to perform rough grinding on the surface of the PTFE blank. The main grinding machine performs spiral grinding on the surface of the circular PTFE blank, that is, grinding the circular shape from the edge of the PTFE blank first, then grinding spirally to the center of the PTFE blank, and then grinding spirally from the center back to the edge of the PTFE blank. Repeat this process to complete the rough grinding of the surface of the PTFE blank. First, turn off and retract the coarse grinding head on the main grinding machine, and then start the coarse grinding head on the auxiliary grinding machine to perform rough grinding on the chamfered edge of the PTFE blank. The auxiliary grinding machine performs circular grinding on the chamfered edge of the circular PTFE blank to complete the rough grinding on the chamfered edge of the PTFE blank, and finally prepare the rough ground PTFE blank. Step 4: Fine grinding Select the coarsely ground PTFE blank from step 3 and the grinding machine. First, start the fine grinding head on the main grinding machine to perform fine grinding on the surface of the PTFE blank. The main grinding machine performs spiral grinding on the surface of the circular PTFE blank, that is, grinding the circular shape from the edge of the PTFE blank and then spiral grinding to the center of the PTFE blank, and then spiral grinding from the center back to the edge of the PTFE blank. Repeat this process to complete the fine grinding of the surface of the PTFE blank. First, turn off and retract the fine grinding head on the main grinding machine, and then start the fine grinding head on the auxiliary grinding machine to perform fine grinding on the chamfered edge of the PTFE blank. The auxiliary grinding machine performs circular grinding on the chamfered edge of the circular PTFE blank to complete the fine grinding on the chamfered edge of the PTFE blank, and finally prepare the finely ground PTFE blank. Step 5: Cleaning Select the finely ground polytetrafluoroethylene blank from step 4, put it into acetone cleaning solution to clean surface oil stains and other organic matter, then put it into anhydrous ethanol to clean its surface with acetone, and finally rinse its surface with pure water to prepare a clean polytetrafluoroethylene blank. Step 6: Drying Select the clean polytetrafluoroethylene blank from step 5, place it in an air-isolated clean room for uniform cooling and drying, and store it at room temperature to prepare a dried polytetrafluoroethylene blank. Step 7: Carbon vapor environment Select the dried polytetrafluoroethylene blank from step 6, place it in an environment filled with carbon vapor, and let it stand for a period of time to obtain a carbon-infiltrated polytetrafluoroethylene blank. Step 8: Evenly increase temperature Select the carbon-invaded polytetrafluoroethylene (PTFE) preform and carbon vapor environment from step 7, and heat the PTFE preform evenly. As the PTFE preform gradually heats up, carbon vapor will be deposited on the surface of the PTFE preform. Once the PTFE preform reaches the reaction high temperature, the uniform heating of the PTFE preform is completed. Step 9: Isothermal film formation Select the constant temperature environment with carbon vapor and the polytetrafluoroethylene blank in step 8. Under constant temperature conditions, the polytetrafluoroethylene blank and carbon vapor are reacted at a constant temperature for a period of time. During this period, carbon vapor will gradually deposit a carbon film on the surface of the polytetrafluoroethylene blank, and finally prepare carbon-coated polytetrafluoroethylene blank. Step 10: Cooling in the absence of air Select the carbon-coated polytetrafluoroethylene blank from step 9, quickly place it into an air-isolated cooling chamber, cool it down at a certain cooling rate, and cool it down to a low temperature to prepare a cooled carbon-coated polytetrafluoroethylene blank. Step 11: Rapid cooling Select the cooled carbon-coated polytetrafluoroethylene blank from step 10 and place it in air to cool naturally to room temperature to prepare a surface-modified polytetrafluoroethylene material.
[0006] Step 12: Quality Inspection The surface-modified polytetrafluoroethylene material from step 11 was selected and tested for hydrophilicity, mechanical properties, and surface morphology.
[0007] Furthermore, in step 10, the temperature range of the low temperature is 60℃~80℃.
[0008] Furthermore, in step 8, the heating rate of the uniform heating is in the range of 7℃ / min to 10℃ / min.
[0009] Furthermore, in step 10, the cooling rate ranges from 15°C / min to 20°C / min.
[0010] Furthermore, in step 9, the time range of the isothermal reaction period is 30 min to 50 min.
[0011] Furthermore, in step 9, the isothermal reaction time is 45 minutes.
[0012] Furthermore, in step 8, the temperature range of the high-temperature reaction is selected as 360℃~375℃.
[0013] Furthermore, in step 8, the high temperature of the reaction is 370°C.
[0014] Furthermore, in step 7, the carbon vapor environment is selected as a saturated carbon vapor environment.
[0015] Furthermore, in step 6, the cooling rate of the balanced cooling process ranges from 10℃ / min to 15℃ / min.
[0016] Beneficial Effects: This invention selects polytetrafluoroethylene (PTFE) as the material and, through multiple processes such as cutting, milling, and deposition, achieves effective surface modification of PTFE. It overcomes existing technical challenges related to PTFE's surface, such as easy damage, poor durability, and inadequate hydrophobicity. By coarsely and finely grinding the PTFE surface, uniform microparticles are formed, which facilitates the uniform accumulation of heat and its integration into the carbon particle layer. High-temperature deposition of carbon particles at 370°C on PTFE further improves the PTFE surface. The PTFE deposited using this process also exhibits hydrophobic properties, achieving a hydrophobic angle of 137°. Attached Figure Description
[0017] Figure 1 This is a schematic diagram of the grinding machine in this invention.
[0018] Figure 2 This is a flowchart illustrating a polymer surface modification process based on a grinding machine according to the present invention.
[0019] Figure 3 This is a CCD camera image of a polymer surface modification product based on a grinding machine according to the present invention.
[0020] Figure 4 This is a graph showing the relationship between the impact strength of PTFE and PTFE+C based on a grinding machine-modified polymer surface according to the present invention.
[0021] Figure 5 This is a hardness relationship diagram of PTFE and PTFE+C based on a grinding machine according to the present invention.
[0022] Figure 6 This is a SEM image of PTFE and PTFE+C based on a grinding machine according to the present invention.
[0023] Figure 7 This is a cross-sectional SEM image of PTFE+C based on a grinding machine according to the present invention.
[0024] Figure 8 This is a schematic diagram of the contact angle of PTFE+C based on polymer surface modification using a polishing machine according to the present invention. Figure descriptions: 01, frame; 02, main polisher; 03, auxiliary polisher; 04, tray; 05, lifting device. Detailed Implementation
[0025] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0026] In this invention, "multiple" refers to two or more. "And / or": describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, or B alone. The character " / " generally indicates that the preceding and following related objects have an "or" relationship.
[0027] A method for preparing polymer surface modification based on a grinding machine, see [reference]. Figure 1 As shown, the grinder includes a controller (not shown), a frame 01, a main grinder 02, an auxiliary grinder 03, a tray 04, and a lifter 05. The main grinder 02, auxiliary grinder 03, and lifter 05 are all mounted on the frame 01. The tray 04 is mounted on the lifter 05, which is used to lift the tray 04. The main grinder 02 and auxiliary grinder 03 are positioned above the tray 04, and the center lines of the main grinder 02 and auxiliary grinder 03 are both located on a plane perpendicular to the surface of the tray 04. High-precision positioning sensors are installed on both the main grinder 02 and auxiliary grinder 03. The signal terminals of the positioning sensors are electrically connected to the signal acquisition terminals of the controller, and the control terminals of the controller are electrically connected to the control terminals of the main grinder 02, the auxiliary grinder 03, and the lifter 05. See Figure 2 As shown, the preparation method for polymer surface modification includes the following steps: Step 1: Selecting raw materials Select polytetrafluoroethylene (PTFE) cylindrical materials, use a cutting machine tool to process the PTFE cylindrical materials to the specified dimensions, and process the corresponding PTFE blanks. Step 2: Quick Positioning Select the polytetrafluoroethylene (PTFE) blank and the grinding machine from step 1. Place the PTFE blank stably on the loading tray 04 on the grinding machine. Control the lifting device 05 to rise through the controller, which will drive the loading tray 04 to the working position. The controller controls the positioning sensors of the main grinding device 02 and the auxiliary grinding device 03 to collect the position information of the PTFE blank and feed it back to the controller for processing and to control the positioning of the main grinding device 02 and the auxiliary grinding device 03 for grinding the PTFE blank. Step 3: Coarse grinding Select the PTFE blank and grinding machine from step 2. First, start the coarse grinding head on the main grinding machine 02 to perform coarse grinding on the surface of the PTFE blank. The main grinding machine 02 performs spiral grinding on the surface of the circular PTFE blank, that is, it first grinds the circular shape from the edge of the PTFE blank, then grinds spirally to the center of the PTFE blank, and then grinds spirally from the center back to the edge of the PTFE blank. Repeat this process to complete the coarse grinding of the surface of the PTFE blank. First, turn off and retract the coarse grinding head on the main grinding machine 02, and then start the coarse grinding head on the auxiliary grinding machine 03 to perform coarse grinding on the chamfered edge of the PTFE blank. The auxiliary grinding machine 03 performs circular grinding on the chamfered edge of the circular PTFE blank to complete the coarse grinding on the chamfered edge of the PTFE blank, and finally prepares the coarsely ground PTFE blank. Step 4: Fine grinding Select the coarsely ground PTFE blank from step 3 and the grinding machine. First, start the fine grinding head on the main grinding machine 02 to perform fine grinding on the surface of the PTFE blank. The main grinding machine 02 performs spiral grinding on the surface of the circular PTFE blank, that is, first grinding the edge of the PTFE blank in a ring, then grinding spirally to the center of the PTFE blank, and then grinding spirally from the center back to the edge of the PTFE blank. Repeat this process to complete the fine grinding of the surface of the PTFE blank. First, turn off and retract the fine grinding head on the main grinding machine 02, and then start the fine grinding head on the auxiliary grinding machine 03 to perform fine grinding on the chamfered edge of the PTFE blank. The auxiliary grinding machine 03 performs ring grinding on the chamfered edge of the circular PTFE blank to complete the fine grinding on the chamfered edge of the PTFE blank, and finally prepare the finely ground PTFE blank. Step 5: Cleaning Select the finely ground polytetrafluoroethylene blank from step 4, put it into acetone cleaning solution to clean surface oil stains and other organic matter, then put it into anhydrous ethanol to clean its surface with acetone, and finally rinse its surface with pure water to prepare a clean polytetrafluoroethylene blank. Step 6: Drying Select the clean polytetrafluoroethylene blank from step 5, place it in an air-isolated clean room for uniform cooling and drying at a rate of 10℃ / min, and cool it to room temperature for storage to prepare a dried polytetrafluoroethylene blank. Step 7: Carbon vapor environment Select the dried polytetrafluoroethylene blank from step 6, place it in an environment filled with carbon vapor, and let it stand for 2 hours. The carbon vapor environment is always saturated with carbon vapor to obtain a carbon-infiltrated polytetrafluoroethylene blank. Step 8: Evenly increase temperature Select the carbon-invaded polytetrafluoroethylene (PTFE) preform and carbon vapor environment from step 7, and heat the PTFE preform evenly. The heating rate of this even heating is 8℃ / min. During the gradual heating of the PTFE preform, carbon vapor will be deposited on the surface of the PTFE preform. When the temperature of the PTFE preform reaches 370℃, the even heating of the PTFE preform is completed. Step 9: Isothermal film formation Select the constant temperature environment of 370℃ and carbon vapor environment and polytetrafluoroethylene blank in step 8. Under constant temperature conditions, the polytetrafluoroethylene blank and carbon vapor are reacted at a constant temperature for 45 minutes. During this period, carbon vapor will gradually deposit a carbon film on the surface of the polytetrafluoroethylene blank, and finally prepare carbon-coated polytetrafluoroethylene blank. Step 10: Cooling in the absence of air Select the carbon-coated polytetrafluoroethylene blank from step 9, quickly place it into an air-isolated cooling chamber, cool it at 20℃ / min, and cool it to 60℃~80℃ to prepare a cooled carbon-coated polytetrafluoroethylene blank. Step 11: Rapid cooling The cooled carbon-coated PTFE preform from step 10 is selected and allowed to cool naturally to room temperature in air to prepare a surface-modified PTFE material. (See [reference needed]). Figure 3 As shown; Step 12: Quality Inspection The surface-modified polytetrafluoroethylene material from step 11 was selected and tested for hydrophilicity, mechanical properties, and surface morphology.
[0028] Figure 4 The graph shows the impact strength relationship between virgin PTFE and carbon-modified PTFE+C. It can be seen that the impact strength of virgin PTFE is around 14 KJ / m. 2 The impact strength of carbon-modified PTFE+C is around 3 KJ / m. 2 Around 100 mm, the PTFE surface modified with carbon film has higher impact strength.
[0029] Figure 5The graph shows the hardness relationship between virgin PTFE and carbon-modified PTFE+C. It can be seen that the hardness of virgin PTFE is around 52 HD, while the hardness of carbon-modified PTFE+C is around 65 HD. PTFE with carbon film modification has a higher surface hardness.
[0030] Figure 6 The SEM images of virgin PTFE and carbon-modified PTFE+C show that, under the polishing test, virgin PTFE exhibits severe surface damage and uneven polishing morphology, making it prone to surface damage. In contrast, carbon-modified PTFE+C shows only slight surface damage under the same polishing test, with a more uniform polishing morphology and less likelihood of surface damage.
[0031] Figure 7 The cross-sectional SEM image of carbon-modified PTFE+C shows that the carbon film layer of carbon-modified PTFE+C is dense and uniform, and is well integrated with the PTFE surface, with each layer penetrating the other.
[0032] Figure 8 The diagram shows the contact angle of carbon-modified PTFE+C. It can be seen that the surface of carbon-modified PTFE (polytetrafluoroethylene) processed by this process has hydrophobic properties, and its test contact angle can reach 137°.
[0033] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A method for preparing polymer surface modification based on a grinding machine, characterized in that, The grinding machine includes a controller, a frame, a main grinding head, an auxiliary grinding head, a loading tray, and a lifting device. The main grinding head, auxiliary grinding head, and lifting device are all mounted on the frame. The loading tray is mounted on the lifting device, which is used to raise and lower the loading tray. The main grinding head and auxiliary grinding head are positioned above the loading tray, and the center lines of the main grinding head and auxiliary grinding head and the center line of the loading tray are both located on a plane perpendicular to the surface of the loading tray. High-precision positioning sensors are installed on both the main grinding head and auxiliary grinding head. The signal terminals of the positioning sensors are electrically connected to the signal acquisition terminals of the controller. The control terminals of the controller are electrically connected to the control terminals of the main grinding head, auxiliary grinding head, and lifting device. For polymer surface modification, the preparation method includes the following steps: Step 1: Selecting raw materials Select polytetrafluoroethylene (PTFE) cylindrical materials, use a cutting machine tool to process the PTFE cylindrical materials to the specified dimensions, and process the corresponding PTFE blanks. Step 2: Quick Positioning Select a grinding machine and the PTFE blank from step 1. Place the PTFE blank stably on the loading tray of the grinding machine. Control the lifting device to raise the loading tray to the working position. The controller controls the positioning sensors of the main grinding machine and the auxiliary grinding machine to collect the position information of the PTFE blank and feed it back to the controller for processing and to control the positioning of the main grinding machine and the auxiliary grinding machine for grinding the PTFE blank. Step 3: Coarse grinding Select a grinding machine and the PTFE blank from step 2. First, start the coarse grinding head on the main grinding machine to perform rough grinding on the surface of the PTFE blank. The main grinding machine performs spiral grinding on the surface of the circular PTFE blank, that is, grinding the circular shape from the edge of the PTFE blank first, then grinding spirally to the center of the PTFE blank, and then grinding spirally from the center back to the edge of the PTFE blank. Repeat this process to complete the rough grinding of the surface of the PTFE blank. First, turn off and retract the coarse grinding head on the main grinding machine, and then start the coarse grinding head on the auxiliary grinding machine to perform rough grinding on the chamfered edge of the PTFE blank. The auxiliary grinding machine performs circular grinding on the chamfered edge of the circular PTFE blank to complete the rough grinding on the chamfered edge of the PTFE blank, and finally prepares the rough ground PTFE blank. Step 4: Fine grinding Select the grinding machine and the coarsely ground PTFE blank from step 3. First, start the fine grinding head on the main grinding machine to perform fine grinding on the surface of the PTFE blank. The main grinding machine performs spiral grinding on the surface of the circular PTFE blank, that is, grinding the circular shape from the edge of the PTFE blank and then spiral grinding to the center of the PTFE blank, and then spiral grinding from the center back to the edge of the PTFE blank. Repeat this process to complete the fine grinding of the surface of the PTFE blank. First, turn off and retract the fine grinding head on the main grinding machine, and then start the fine grinding head on the auxiliary grinding machine to perform fine grinding on the chamfered edge of the PTFE blank. The auxiliary grinding machine performs circular grinding on the chamfered edge of the circular PTFE blank to complete the fine grinding on the chamfered edge of the PTFE blank, and finally prepare the finely ground PTFE blank. Step 5: Cleaning Select the finely ground polytetrafluoroethylene blank from step 4, put it into acetone cleaning solution to clean surface oil stains and other organic matter, then put it into anhydrous ethanol to clean its surface with acetone, and finally rinse its surface with pure water to prepare a clean polytetrafluoroethylene blank. Step 6: Drying Select the clean polytetrafluoroethylene blank from step 5, place it in an air-isolated clean room for uniform cooling and drying, and store it at room temperature to prepare a dried polytetrafluoroethylene blank. Step 7: Carbon vapor environment Select the dried polytetrafluoroethylene blank from step 6, place it in an environment filled with carbon vapor, and let it stand for a period of time to obtain a carbon-infiltrated polytetrafluoroethylene blank. The carbon vapor environment is selected as a saturated carbon vapor environment; Step 8: Evenly increase temperature Select the carbon-invaded polytetrafluoroethylene (PTFE) preform and carbon vapor environment from step 7, and heat the PTFE preform evenly. As the PTFE preform gradually heats up, carbon vapor will be deposited on the surface of the PTFE preform. Once the PTFE preform reaches the reaction high temperature, the uniform heating of the PTFE preform is completed. Step 9: Isothermal film formation Select the constant temperature environment with carbon vapor and the polytetrafluoroethylene blank in step 8. Under constant temperature conditions, the polytetrafluoroethylene blank and carbon vapor are reacted at a constant temperature for a period of time. During this period, carbon vapor will gradually deposit a carbon film on the surface of the polytetrafluoroethylene blank, and finally prepare carbon-coated polytetrafluoroethylene blank. Step 10: Cooling in the absence of air Select the carbon-coated polytetrafluoroethylene blank from step 9, quickly place it into an air-isolated cooling chamber, cool it down at a certain cooling rate, and cool it down to a low temperature to prepare a cooled carbon-coated polytetrafluoroethylene blank. Step 11: Rapid cooling Select the cooled carbon-coated polytetrafluoroethylene blank from step 10 and place it in air to cool naturally to room temperature to prepare a surface-modified polytetrafluoroethylene material.
2. The preparation method of polymer surface modification based on a grinding machine according to claim 1, characterized in that, In step 10, the temperature range of the low temperature is 60℃~80℃.
3. The method for preparing polymer surface modification based on a grinding machine according to claim 1, characterized in that, In step 8, the heating rate of the uniform heating is in the range of 7℃ / min to 10℃ / min.
4. The preparation method of polymer surface modification based on a grinding machine according to claim 2, characterized in that, In step 10, the cooling rate ranges from 15℃ / min to 20℃ / min.
5. The preparation method of polymer surface modification based on a grinding machine according to claim 1, characterized in that, In step 9, the time range of the isothermal reaction is 30 min to 50 min.
6. The method for preparing polymer surface modification based on a grinding machine according to claim 5, characterized in that, In step 9, the isothermal reaction time is 45 minutes.
7. The preparation method of polymer surface modification based on a grinding machine according to claim 1, characterized in that, In step 8, the temperature range of the high-temperature reaction is selected as 360℃~375℃.
8. The preparation method of polymer surface modification based on a grinding machine according to claim 7, characterized in that, In step 8, the high temperature of the reaction is 370°C.
9. The method for preparing polymer surface modification based on a grinding machine according to claim 1, characterized in that, In step 6, the cooling rate of the equalization cooling is in the range of 10℃ / min to 15℃ / min.