Noise reduction device and wafer sawing machine

Abstract

The present application relates to the technical field of scriber, especially relates to a noise reduction device and scriber. The noise reduction device comprises a sound attenuation box and sound attenuation sponges, and the sound attenuation box is provided with an air inlet and an air outlet. The upper surface of the sound attenuation sponge is staggered with first wave crests and first wave troughs along the length direction, and the upper surface of the sound attenuation sponge is staggered with second wave crests and second wave troughs along the width direction, the first wave crest and the second wave crest intersect to form a plurality of wave crest structures, and the first wave trough and the second wave trough intersect to form a plurality of wave trough structures. Two sound attenuation sponges are oppositely arranged in the sound attenuation box along the height direction, and the wave crest structure of one sound attenuation sponge extends into the wave trough structure of the other sound attenuation sponge, so as to form a wave-shaped sound attenuation channel between the two sound attenuation sponges, the inlet of the sound attenuation channel is communicated with the air inlet, and the outlet of the sound attenuation channel is communicated with the air outlet. The scriber comprises the above noise reduction device, and the wave-shaped sound attenuation channel is formed in the sound attenuation box, so that the sound attenuation and noise reduction effect is realized.

Description

Technical Field

[0001] This invention relates to the field of dicing machine technology, and more particularly to a noise reduction device and a dicing machine. Background Technology

[0002] Dicing machines are essential equipment in the solar panel and semiconductor manufacturing industries. The vacuum adsorption device is a crucial component of these machines, primarily used to fix the material to be processed. Failure to effectively fix the material will severely impact processing quality.

[0003] In a dicing machine, a vacuum adsorption device creates a negative pressure environment by drawing in air, and then discharges the drawn-in air through an air source. When the dicing machine is working, the air discharged from the air source has high vibration energy, resulting in significant vibration noise and increasing the overall noise level of the dicing machine during operation. Summary of the Invention

[0004] The purpose of this invention is to provide a noise reduction device and a dicing machine to solve the technical problem of excessive noise during operation of the dicing machine in the prior art, and to improve the noise reduction effect of the dicing machine.

[0005] To achieve this objective, the technical solution adopted by the present invention is as follows:

[0006] Noise reduction device, including:

[0007] A silencer box, wherein an air inlet and an air outlet are provided inside the silencer box;

[0008] The sound-absorbing sponge has a first peak and a first trough alternately arranged on its upper surface along the length direction, and a second peak and a second trough alternately arranged on its upper surface along the width direction. Multiple peak structures are formed at the intersection of the first peak and the second peak, and multiple trough structures are formed at the intersection of the first trough and the second trough.

[0009] Two sound-absorbing sponges are arranged vertically opposite each other in the sound-absorbing box along the height direction, and the crest structure of one sound-absorbing sponge extends into the trough structure of the other sound-absorbing sponge to form a wave-shaped sound-absorbing channel between the two sound-absorbing sponges. The inlet of the sound-absorbing channel is connected to the air inlet, and the outlet of the sound-absorbing channel is connected to the air outlet.

[0010] As a preferred embodiment, the spacing of the noise reduction channels along the height direction is 2mm to 8mm.

[0011] As a preferred embodiment, the height of the crest structure is 10mm to 20mm, and the depth of the trough structure is 10mm to 20mm.

[0012] As a preferred embodiment, the silencing box includes an upper cover and a lower housing with a top opening. The two opposite outer side walls of the lower housing are respectively provided with the air inlet and the air outlet. The upper cover is fastened to the opening end of the lower housing. One of the sound-absorbing sponges is disposed on the inner bottom wall of the lower housing, and the other sound-absorbing sponge is disposed on the inner top wall of the upper cover.

[0013] As a preferred embodiment, one of the sound-absorbing sponges is adhered to the inner bottom wall of the lower housing, and the other sound-absorbing sponge is adhered to the inner top wall of the upper cover.

[0014] As a preferred embodiment, the two sound-absorbing sponges divide the interior of the sound-absorbing box into a first cavity and a second cavity. The air inlet, the first cavity, and the inlet of the sound-absorbing channel are sequentially connected, and the outlet of the sound-absorbing channel, the second cavity, and the air outlet are sequentially connected.

[0015] As a preferred embodiment, a rubber pad is sandwiched between the opening end of the upper cover and the lower housing.

[0016] As a preferred embodiment, the outer wall of the silencer box is fitted with a connector, and the air inlet and the air outlet are respectively connected to one of the connectors.

[0017] As a preferred embodiment, the silencer box is provided with a drain outlet that communicates with the interior of the silencer box.

[0018] The dicing machine includes the aforementioned noise reduction device.

[0019] The beneficial effects of this invention are as follows:

[0020] The noise reduction device proposed in this invention includes a silencing box and two silencing sponges. The upper surface of the silencing sponges forms a wave-like structure to create a wave-shaped silencing channel between the two sponges. When air from the air source enters the silencing box through the air inlet, part of the air enters the silencing sponges, converting the air's vibrational energy into heat, thus weakening the air's vibrational energy. Simultaneously, another part of the air enters the wave-shaped silencing channel. The wave-shaped silencing channel extends the air's path, making it easier for the air to collide with the wave crests, further weakening the air's vibrational energy and reducing air noise, achieving a good noise reduction effect.

[0021] The dicing machine proposed in this invention includes the aforementioned noise reduction device. By forming a wave-shaped silencing channel within the silencing box, a portion of the air enters the silencing sponge, converting the air's vibrational energy into heat, thus weakening the air's vibrational energy. Simultaneously, another portion of the air enters the wave-shaped silencing channel. The wave-shaped silencing channel extends the air's path length, making it easier for the air to collide with the wave crest structure, thereby weakening the air's vibrational energy and reducing air noise, achieving a good noise reduction effect. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the noise reduction device provided in an embodiment of the present invention;

[0023] Figure 2 This is an exploded view of the structure of the noise reduction device provided in the embodiment of the present invention;

[0024] Figure 3 This is a schematic diagram of the structure of the sound-absorbing sponge provided in an embodiment of the present invention;

[0025] Figure 4 This is a schematic diagram of the assembly structure of two sound-absorbing sponges provided in an embodiment of the present invention;

[0026] Figure 5 This is a longitudinal cross-sectional view of the noise reduction channel provided in an embodiment of the present invention;

[0027] Figure 6 This is an exploded view of the structure of the silencer box provided in an embodiment of the present invention.

[0028] The component names and labels in the diagram are as follows:

[0029] 1. Silencer box; 11. Top cover; 12. Lower shell; 121. Air inlet; 122. Air outlet; 123. Drain outlet; 13. Connector; 14. Rubber pad; 15. First cavity; 16. Second cavity; 2. Silencer sponge; 20. Silencer channel; 21. Crest structure; 211. First crest; 212. Second crest; 22. Valley structure; 221. First valley; 222. Second valley. Detailed Implementation

[0030] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely for explaining the present invention and are not intended to limit the present invention. Furthermore, it should be noted that, for ease of description, only the parts related to the present invention are shown in the accompanying drawings, not all of them.

[0031] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0032] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0033] In the description of this embodiment, the terms "upper," "lower," "right," and "left," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0034] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0035] This embodiment proposes a dicing machine, which includes a vacuum adsorption device that fixes the material to be processed by vacuum adsorption. Since the dicing machine is a mature processing device, its other structures and operating processes will not be described in detail.

[0036] In a dicing machine, a vacuum adsorption device creates a negative pressure environment by drawing in air, and then discharges the drawn-in air through an air source. When the dicing machine is working, the air discharged from the air source has high vibration energy, resulting in significant vibration noise and increasing the overall noise level of the dicing machine during operation.

[0037] To solve the above problems, such as Figures 1-5As shown, this embodiment also proposes a noise reduction device that can be used in the aforementioned dicing machine to reduce the noise of the air discharged from the vacuum adsorption device of the dicing machine. Of course, the noise reduction device of this embodiment can also be used in other noise reduction scenarios, which will not be listed here.

[0038] Specifically, the noise reduction device includes a sound-absorbing box 1 and a sound-absorbing sponge 2. The sound-absorbing box 1 is provided with an air inlet 121 and an air outlet 122. The upper surface of the sound-absorbing sponge 2 extends along its length ( Figure 3 The upper surface of the sound-absorbing sponge 2 is staggered with first peaks 211 and first troughs 221 in the left and right directions. Figure 3 The first wave 211 and the second wave 222 are staggered in the front and back direction. Multiple wave crest structures 21 are formed at the intersection of the first wave 211 and the second wave 212, and multiple wave trough structures 22 are formed at the intersection of the first wave trough 221 and the second wave trough 222. Two sound-absorbing sponges 2 are arranged vertically opposite each other in the sound-absorbing box 1, and the wave crest structure 21 of one sound-absorbing sponge 2 extends into the wave trough structure 22 of the other sound-absorbing sponge 2 to form a wave-shaped sound-absorbing channel 20 between the two sound-absorbing sponges 2. The inlet of the sound-absorbing channel 20 is connected to the air inlet 121, and the outlet of the sound-absorbing channel 20 is connected to the air outlet 122.

[0039] In this embodiment, the upper surface of the sound-absorbing sponge 2 is formed with a wave structure to form a wave-shaped sound-absorbing channel 20 between the two sound-absorbing sponges 2 (e.g., Figure 5 (As shown). When the air discharged from the air source enters the silencer box 1 through the air inlet 121, part of the air enters the silencer sponge 2, causing the vibration energy of the air to be converted into heat in the silencer sponge 2, thus weakening the vibration energy of the air. At the same time, another part of the air enters the wave-shaped silencer channel 20. The wave-shaped silencer channel 20 extends the path length of the air, making it easier for the air to collide with the wave crest structure 21, thereby weakening the vibration energy of the air and reducing air noise, achieving a good noise reduction effect.

[0040] Specifically, such as Figure 3 As shown, the sound-absorbing sponge 2 has a loose, porous structure, which facilitates the entry of some air into the interior of the sponge 2. This allows some of the vibrational energy of the air to be quickly converted into heat in the sponge 2, thereby consuming most of the vibrational energy of the air. Figure 4 and Figure 5As shown, the crest structures 21 and trough structures 22 on the upper surface of the sound-absorbing sponge 2 are arrayed along the length and width directions of the sound-absorbing sponge 2, forming a wave structure on the upper surface of the sound-absorbing sponge 2. Two sound-absorbing sponges 2 are arranged vertically opposite each other and spaced apart, so that there is a wave-shaped sound-absorbing channel 20 between the two sound-absorbing sponges 2. The remaining air that does not enter the interior of the sound-absorbing sponge 2 enters through the inlet of the sound-absorbing channel 20, causing the air to collide with the crest structures 21 to dissipate the vibration energy of the air.

[0041] It is important to note that, such as Figure 5 As shown, the silencing channel 20 is along the height direction ( Figure 3 The vertical spacing H in the waveguide 20 is 2mm to 8mm. For example, H can be 2mm, 4mm, 5mm, 6mm, or 8mm. When the spacing H is too small, the silencing channel 20 is narrow, resulting in a more significant throttling effect and reducing the airflow velocity. When the spacing H is too large, the silencing channel 20 is wide, reducing the probability of air colliding with the wave crest structure 21 and thus reducing the silencing effect.

[0042] Furthermore, such as Figure 5 As shown, the height 'a' of the crest structure 21 is 10mm to 20mm, and the depth 'b' of the trough structure 22 is 10mm to 20mm. In this embodiment, the height 'a' of the crest structure 21 and the depth 'b' of the trough structure 22 are equal. For example, 'a' can be 10mm, 12mm, 15mm, 18mm, or 20mm, and 'b' can be 10mm, 12mm, 15mm, 18mm, or 20mm, etc. When the height of the crest structure 21 and the depth of the trough structure 22 are too small, the undulation of the wave structure of the silencing channel 20 is small, the increase in the path length of the air is not significant, reducing the probability of air colliding with the crest structure 21 and reducing the noise reduction effect. When the height of the crest structure 21 and the depth of the trough structure 22 are too large, the undulation of the wave structure of the silencing channel 20 is large, increasing the throttling effect on the air and slowing down the airflow.

[0043] like Figure 2 and Figure 6 As shown, the silencer box 1 includes an upper cover 11 and a lower housing 12 with an opening at the top. The two opposite outer walls of the lower housing 12 are respectively provided with an air inlet 121 and an air outlet 122. The upper cover 11 is fastened to the opening end of the lower housing 12. One sound-absorbing sponge 2 is disposed on the inner bottom wall of the lower housing 12, and the other sound-absorbing sponge 2 is disposed on the inner top wall of the upper cover 11. By setting the silencer box 1 as a split structure, it is convenient to install and replace the sound-absorbing sponges 2. After one sound-absorbing sponge 2 is installed on the inner bottom wall of the lower housing 12, the other sound-absorbing sponge 2 is installed on the inner top wall of the upper cover 11. When the upper cover 11 is fastened to the opening end at the top of the lower housing 12, the two sound-absorbing sponges 2 are arranged vertically opposite each other and form a sound-absorbing channel 20.

[0044] It should be noted that the width of the sound-absorbing sponge 2 is basically equal to the internal width of the lower housing 12, so that the front and rear sides of the sound-absorbing sponge 2 abut or press against the two inner sidewalls of the lower housing 12 in the width direction. All the air entering the lower housing 12 through the air inlet 121 can only be discharged through the air outlet 122 after passing through the sound-absorbing sponge 2 itself or the sound-absorbing channel 20, so as to ensure a better sound absorption and noise reduction effect.

[0045] Specifically, one sound-absorbing sponge 2 is bonded to the inner bottom wall of the lower housing 12, and the other sound-absorbing sponge 2 is bonded to the inner top wall of the upper cover 11. This bonding method not only improves the stability of the sound-absorbing sponge 2 within the sound-absorbing box 1, but also simplifies the bonding operation, making disassembly and replacement easier and increasing the efficiency of the sound-absorbing sponge 2's installation and removal.

[0046] like Figure 2 As shown, two sound-absorbing sponges 2 divide the interior of the muffler box 1 into a first cavity 15 and a second cavity 16. The air inlet 121, the first cavity 15, and the inlet of the muffler channel 20 are sequentially connected, and the outlet of the muffler channel 20, the second cavity 16, and the air outlet 122 are sequentially connected. By setting the first cavity 15 and the second cavity 16, the air entering the muffler box 1 through the air inlet 121 first passes through the first cavity 15, and then flows evenly to the inlet of the muffler channel 20. Then it flows out from the outlet of the muffler channel 20 and enters the second cavity 16. Finally, the air in the second cavity 16 flows evenly out of the muffler box 1 from the air outlet 122, achieving uniform airflow inside the muffler box 1 and within the muffler channel 20.

[0047] like Figure 6 As shown, a rubber gasket 14 is sandwiched between the open ends of the upper cover 11 and the lower housing 12. The rubber gasket 14 is used to fill the tiny gaps between the upper cover 11 and the lower housing 12, thereby improving the sealing performance of the silencer box 1.

[0048] like Figure 2 and Figure 6 As shown, a connector 13 is installed on the outer wall of the silencer box 1, with the air inlet 121 and air outlet 122 each connected to a connector 13. By providing the connector 13, the air outlet pipe of the vacuum adsorption device can be quickly connected and assembled with the connector 13, and the connector 13 at the air outlet 122 can also be quickly connected and assembled with an external exhaust pipe. Specifically, the silencer box 1 has multiple air outlets 122 and air inlets 121 to increase airflow or flexibly select the number of air inlets 121 and air outlets 122 used.

[0049] It is important to note that a drain outlet 123 is provided through the sound-absorbing box 1, communicating with the interior of the sound-absorbing box 1. The drain outlet 123 is used to drain moisture from inside the sound-absorbing box 1, preventing moisture carried in the air from filling the interior of the sound-absorbing sponge 2, thus maintaining a dry environment inside the sound-absorbing box 1 and ensuring the sound-absorbing sponge 2's noise reduction effect. Of course, the drain outlet 123 can also be quickly connected to an external drain pipe via connector 13 to discharge moisture from inside the sound-absorbing box 1 to a designated container or area.

[0050] The above embodiments merely illustrate the basic principles and characteristics of the present invention. The present invention is not limited to the above embodiments. Various changes and modifications can be made to the present invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A noise reduction device, characterized in that, include: A silencer box (1) is provided with an air inlet (121) and an air outlet (122). The sound-absorbing sponge (2) has a first wave crest (211) and a first wave trough (221) alternately arranged along the length direction on its upper surface. The sound-absorbing sponge (2) also has a second wave crest (212) and a second wave trough (222) alternately arranged along the width direction on its upper surface. Multiple wave crest structures (21) are formed at the intersection of the first wave crest (211) and the second wave crest (212). Multiple wave trough structures (22) are formed at the intersection of the first wave trough (221) and the second wave trough (222). Two sound-absorbing sponges (2) are arranged vertically opposite each other in the sound-absorbing box (1) along the height direction, and the crest structure (21) of one sound-absorbing sponge (2) extends into the trough structure (22) of the other sound-absorbing sponge (2) to form a wave-shaped sound-absorbing channel (20) between the two sound-absorbing sponges (2). The inlet of the sound-absorbing channel (20) is connected to the air inlet (121), and the outlet of the sound-absorbing channel (20) is connected to the air outlet (122). The silencing box (1) includes an upper cover (11) and a lower housing (12) with an opening at the top. The two opposite outer walls of the lower housing (12) are respectively provided with an air inlet (121) and an air outlet (122). The upper cover (11) is fastened to the opening end of the lower housing (12). One of the silencing sponges (2) is provided on the inner bottom wall of the lower housing (12), and the other silencing sponge (2) is provided on the inner top wall of the upper cover (11). The two sound-absorbing sponges (2) divide the interior of the sound-absorbing box (1) into a first cavity (15) and a second cavity (16). The air inlet (121), the first cavity (15) and the inlet of the sound-absorbing channel (20) are connected in sequence. The outlet of the sound-absorbing channel (20), the second cavity (16) and the air outlet (122) are connected in sequence. The silencing box (1) is provided with a drain outlet (123) that communicates with the interior of the silencing box (1).

2. The noise reduction device according to claim 1, characterized in that, The spacing of the silencing channels (20) along the height direction is 2mm to 8mm.

3. The noise reduction device according to claim 1, characterized in that, The height of the crest structure (21) is 10mm to 20mm, and the depth of the trough structure (22) is 10mm to 20mm.

4. The noise reduction device according to claim 1, characterized in that, One of the sound-absorbing sponges (2) is bonded to the inner bottom wall of the lower housing (12), and the other of the sound-absorbing sponges (2) is bonded to the inner top wall of the upper cover (11).

5. The noise reduction device according to claim 1, characterized in that, A rubber pad (14) is sandwiched between the opening end of the upper cover (11) and the lower shell (12).

6. The noise reduction device according to any one of claims 1 to 5, characterized in that, The outer wall of the silencer box (1) is fitted with a connector (13), and the air inlet (121) and the air outlet (122) are respectively connected to one of the connectors (13).

7. A dicing machine, characterized in that, The noise reduction device includes any one of claims 1 to 6.

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