一种移动副驱动的四支链空间六自由度并联机构
By using a four-branch, six-degree-of-freedom parallel mechanism, combined with PPPS drive branches and ball joints, the shortcomings of existing positioning platforms in terms of motion range and accuracy are solved, realizing high-precision and flexible micro-assembly and three-dimensional topography scanning, which is suitable for applications such as SEM and AFM.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SOUTH CHINA UNIV OF TECH
- Filing Date
- 2024-03-26
- Publication Date
- 2026-07-17
AI Technical Summary
Existing spatial multi-degree-of-freedom positioning platforms suffer from poor overall capabilities in terms of motion range and accuracy, especially in the three-dimensional topography measurement of micro-assemblies and micro-parts, where it is difficult to achieve high-precision attitude adjustment and large-range motion.
The four-branch spatial six-degree-of-freedom parallel mechanism with prismatic drive achieves six-degree-of-freedom motion of the stage through the combination of PPPS drive branches and ball joints. Combined with stick-slip actuators and motor drives, the motion accuracy and range are improved.
It achieves high-precision and flexible micro-assembly and 3D topography scanning, has a wide range of motion capabilities, a compact structure, and strong load capacity, and is suitable for applications such as SEM and AFM.
Smart Images
Figure CN118163077B_ABST