Transmission roller for vacuum coating and vacuum coating apparatus
Patent Information
- Application Number
- CN202211600656.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-12-12
- Publication Date
- 2026-10-30
- Estimated Expiration
- 2042-12-12
AI Technical Summary
[0002]相关技术中,对于高温真空镀膜工艺通常采用在传动辊的辊轴主体内部开设有中心冷却孔,并且将该中心冷却孔分别与冷却水管和回水管相通,从而通过冷却水管向中心冷却孔内注入冷却水,进而实现对辊轴主体的冷却降温,但是,此种冷却降温方式,将会使高温环境传动过程中与传动辊相接触的基底材料被动降温,严重影响镀膜工艺,适用性较差
[0020]通过上述技术方案,即本公开提供的真空镀膜用传动辊,该传动辊的主辊辊体的两端分别通过连接法兰固定连接有转轴,并且该连接法兰上形成有沿法兰盘体的轴向方向延伸的隔热腔,从而能够实现有效地阻隔传动辊轴向传热,使得传动辊轴向温度均匀分布且具有较高的耐热性,这样,将该传动辊应用于例如高温真空镀膜工艺中时,能够使得与传动辊相接触的镀膜基底温度均匀性有效地提高,避免出现例如相关技术中通过冷却水使得与传动辊接触的镀膜基底被动降温的问题,以利于保证较高的成膜质量。另外,传动辊整体隔热结构设计是基于传动辊自身结构进行优化,无需增加而外的装置,整体结构较为简单且制造成本较低。
Smart Images

Figure CN118186357B_ABST
Abstract
Description
Technical Field
[0001] This disclosure relates to the field of high-temperature coating, specifically to a transmission roller for vacuum coating and a vacuum coating device. Background Technology
[0002] In related technologies, high-temperature vacuum coating processes typically involve creating a central cooling hole inside the main body of the drive roller, connecting this central cooling hole to both a cooling water pipe and a return water pipe. Cooling water is then injected into the central cooling hole through the cooling water pipe to cool the main body of the roller. However, this cooling method passively cools the substrate material that comes into contact with the drive roller during high-temperature transmission, severely affecting the coating process and resulting in poor applicability. Summary of the Invention
[0003] The purpose of this disclosure is to provide a drive roller for vacuum coating and a vacuum coating equipment. The drive roller can effectively block axial heat transfer, achieve uniform axial temperature distribution of the drive roller, and result in high film quality.
[0004] To achieve the above objectives, a first aspect of this disclosure provides a drive roller for vacuum coating, the drive roller including a tubular main roller body, with a rotating shaft fixedly connected to both ends of the main roller body via connecting flanges; the connecting flange includes a flange body, with a mounting hole formed at the center of the flange body for fitting onto the rotating shaft, and a heat insulation cavity extending along the axial direction of the flange body is also formed on the flange body.
[0005] Optionally, the insulation cavity includes a cavity penetrating the flange body;
[0006] The number of cavities is multiple, and they are all provided on the flange body along the circumference of the flange body.
[0007] Optionally, the cavity is constructed in an arc shape, and the center of the arc-shaped cavity is concentric with the center of the mounting hole.
[0008] Optionally, the heat insulation cavity further includes a groove formed on the outer periphery of the flange body;
[0009] The number of slots is multiple, and they are all arranged on the flange body along the circumference of the flange body.
[0010] Optionally, the plurality of grooves and the plurality of holes are arranged alternately in the circumferential direction.
[0011] Optionally, the number of flange bodies is multiple, and every two adjacent flange bodies are fixedly connected by a connecting part;
[0012] The connecting part is provided with a first clearance hole communicating with the mounting hole and for the rotating shaft to pass through, and a second clearance hole communicating with the cavity.
[0013] Optionally, the connecting part is configured as a connecting disc, and the connecting disc is integrally formed with the flange body.
[0014] Optionally, the main roller body, the connecting flange, and the rotating shaft are arranged coaxially.
[0015] Optionally, the main roller body, the connecting flange, and the rotating shaft are all made of stainless steel.
[0016] Optionally, the transmission roller further includes a bearing housing, the number of which is two, and the ends of the two rotating shafts away from the connecting flange are respectively rotatably connected to the bearings in the corresponding bearing housings. The outer wall surface of the bearing housing is used to fit and connect with a cavity containing cooling water inside, so as to indirectly cool and reduce the temperature of the bearings in the bearing housings through the cooling water in the cavity.
[0017] Optionally, a protective cover is also installed on the outside of the bearing housing, and the bearing housing includes an upper housing and a lower housing that are detachably connected and located inside the protective cover, which together form a receiving groove for accommodating the bearing.
[0018] Optionally, the bearing housing is further provided with a connecting plate, the connecting plate being provided with a first fastener and a first through hole, the first fastener passing through the first through hole and being used to connect to the cavity, so as to detachably connect the bearing housing to the cavity.
[0019] A second aspect of this disclosure also provides a vacuum coating apparatus, comprising a plurality of drive rollers for vacuum coating as described above.
[0020] Through the above-described technical solution, namely the vacuum coating drive roller provided in this disclosure, the two ends of the main roller body of the drive roller are respectively fixedly connected to rotating shafts via connecting flanges, and a heat insulation cavity extending along the axial direction of the flange body is formed on the connecting flange. This effectively blocks axial heat transfer from the drive roller, resulting in a uniform axial temperature distribution and high heat resistance. Thus, when this drive roller is applied to processes such as high-temperature vacuum coating, the temperature uniformity of the coating substrate in contact with the drive roller can be effectively improved, avoiding the problem of passive cooling of the coating substrate in contact with the drive roller by cooling water, as in related technologies, thereby ensuring high film quality. In addition, the overall heat insulation structure design of the drive roller is based on the optimization of the drive roller's own structure, without the need for additional devices, resulting in a simpler overall structure and lower manufacturing cost.
[0021] Other features and advantages of this disclosure will be described in detail in the following detailed description section. Attached Figure Description
[0022] The accompanying drawings are provided to further illustrate the present disclosure and form part of the specification. They are used together with the following detailed description to explain the present disclosure, but do not constitute a limitation thereof. In the drawings:
[0023] Figure 1 This is a schematic diagram of the overall structure of the drive roller for vacuum coating provided in an exemplary embodiment of this disclosure;
[0024] Figure 2 This is an exploded view of the drive roller for vacuum coating provided in an exemplary embodiment of this disclosure;
[0025] Figure 3 This is a schematic diagram of the structure of the vacuum coating transmission roller after removing the bearing seat, provided in an exemplary embodiment of this disclosure;
[0026] Figure 4 This is a schematic diagram of the connection flange of the vacuum coating drive roller provided in an exemplary embodiment of this disclosure;
[0027] Figure 5 This is a schematic diagram of the connection flange of the vacuum coating drive roller provided in an exemplary embodiment of this disclosure from another angle;
[0028] Figure 6 This is a simulation diagram of the connection flange of the optimized transmission roller;
[0029] Figure 7 This is a simulation diagram of the connection flange of a typical transmission roller.
[0030] Figure 8 This is a simulation diagram of the bearings of the optimized transmission roller;
[0031] Figure 9 This is a simulated diagram of a bearing for a typical transmission roller.
[0032] Explanation of reference numerals in the attached figures
[0033] 1-Main roller body; 2-Rotating shaft; 3-Connecting flange; 310-Flange body; 320-Mounting hole; 330-Insulation cavity; 331-Hole cavity; 332-Groove cavity; 340-Connecting part; 341-First clearance hole; 4-Bearing seat; 410-Upper shell; 420-Lower shell; 430-Receiving groove; 440-Connecting plate; 441-First through hole; 5-Bearing; 6-Protective cover; 610-Upper cover body; 611-Second through hole; 620-Lower cover body; 621-Third through hole; 630-Clearing groove; 7-Bearing gasket; 8-Bearing retaining ring. Detailed Implementation
[0034] The specific embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit this disclosure.
[0035] In this disclosure, unless otherwise stated, "inner" and "outer" refer to the inner and outer contours relative to the outline of the component or structure itself. Furthermore, it should be noted that terms such as "first" and "second" are used to distinguish one element from another and do not indicate sequence or importance. Additionally, in the description with reference to the accompanying drawings, the same reference numerals in different drawings denote the same elements.
[0036] According to a first aspect of this disclosure, a drive roller for vacuum coating is provided, with reference to... Figures 1 to 9 As shown, the transmission roller includes a tubular main roller body 1, and two ends of the main roller body 1 are fixedly connected to a rotating shaft 2 via connecting flanges 3. The connecting flange 3 includes a flange body 310, and a mounting hole 320 for fitting onto the rotating shaft 2 is formed in the center of the flange body 310. A heat insulation cavity 330 extending along the axial direction of the flange body 310 is also formed on the flange body 310.
[0037] Through the above-described technical solution, namely the vacuum coating drive roller provided in this disclosure, the two ends of the main roller body 1 of the drive roller are respectively fixedly connected to the rotating shaft 2 via connecting flanges 3, and the connecting flange 3 has a heat insulation cavity 330 extending along the axial direction of the flange body 310, thereby effectively blocking axial heat transfer of the drive roller, making the axial temperature of the drive roller uniformly distributed and having high heat resistance. Thus, when this drive roller is applied to, for example, a high-temperature vacuum coating process, the temperature uniformity of the coating substrate in contact with the drive roller can be effectively improved, avoiding the problem of passive cooling of the coating substrate in contact with the drive roller by cooling water, as in related technologies, thereby ensuring high film quality. In addition, the overall heat insulation structure design of the drive roller is based on the optimization of the drive roller's own structure, without the need for additional devices, and the overall structure is relatively simple and the manufacturing cost is low.
[0038] Furthermore, such as Figure 3 As shown, the main roller body 1, the connecting flange 3, and the rotating shaft 2 can be arranged coaxially, which can further ensure the uniform axial temperature distribution of the transmission roller. At the same time, the coaxial arrangement of the three can also ensure the overall structural strength of the transmission roller.
[0039] In some implementations, reference Figures 1 to 5As shown, the heat insulation cavity 330 may include a cavity 331 that penetrates the flange body 310, that is, the flange body 310 is hollowed out, which can reduce the volume of the heat transfer conductor, improve the heat insulation effect of the transmission roller shaft end, and make the transmission roller as a whole have high heat resistance.
[0040] Further, refer to Figures 3 to 5 As shown, the number of cavities 331 can be multiple and they are all arranged on the flange body 310 along the circumference of the flange body 310, thereby further ensuring the uniform axial temperature distribution of the transmission roller.
[0041] The external structure of the cavity 331 can be constructed in any suitable manner, for example, as shown in the figure. Figure 5 As shown, the cavity 331 can be constructed in an arc shape, and the center of the arc-shaped cavity 331 is concentric with the center of the mounting hole 320. This makes the processing simple and convenient and can ensure the overall high structural strength of the flange body 310. At the same time, the arc shape can fit the flange body 310, making the heat distribution on the flange body 310 uniform, thereby further improving the uniformity of the axial temperature of the transmission roller.
[0042] Furthermore, the number of cavities 331 can be adaptively designed according to actual needs. Figure 5 An exemplary embodiment is shown in which four cavities 331 are arranged at equal intervals along the circumference of the flange body 310. Furthermore, it should be noted that in some embodiments not shown, the external structure of the cavities 331 can also be constructed as, for example, a circular hole or a regular hexagon, or any other suitable shape; this disclosure does not specifically limit such variations.
[0043] In some implementations, reference Figures 1 to 5 As shown, the heat insulation cavity 330 may also include a groove 332 formed on the outer periphery of the flange body 310. This can further reduce the volume of the heat transfer conductor, improve the heat insulation effect of the drive roller shaft end, and further enhance the heat resistance of the drive roller. At the same time, by forming the groove 332, it is also convenient for the operator to fix the flange body 310 to the inner wall of the main roller body 1 by means of welding, for example, which improves the operability.
[0044] It should be noted that by using a welding connection, not only can the flange body 310 be stably connected to the main roller body 1, but the welding material also provides a certain degree of heat insulation after welding due to its strong heat resistance. Furthermore, the rotating shaft 2 can also be fixedly fitted into the mounting hole 320 of the flange body 310 by welding, for example, providing good heat insulation and high reliability, thus ensuring the safe and stable operation of the drive roller over a long period. In addition, the welding material can be, for example, welding rods, welding wires, metal powders, fluxes, gases, etc., and this disclosure does not specifically limit its application.
[0045] Furthermore, in some implementations, reference is made to... Figure 4 and Figure 5 As shown, the number of slots 332 can be multiple and they are all arranged on the flange body 310 along the circumference of the flange body 310, so that the heat distribution on the flange body 310 is uniform.
[0046] in addition, Figure 4 and Figure 5 The example shown is that the external shape of the cavity 332 can be constructed as, for example, an inwardly bent arc groove, which is simple and convenient to process and can ensure the overall high structural strength of the flange body 310.
[0047] also, Figure 4 and Figure 5 It is also exemplarily shown that the number of slots 332 can correspond to the number of holes 331, and the multiple slots 332 and the multiple holes 331 are arranged alternately in the circumferential direction to enhance the structural strength of the flange body 310.
[0048] In some implementations, reference Figure 4 As shown, the flange bodies 310 can be multiple, and every two adjacent flange bodies 310 are fixedly connected by a connecting part 340 to ensure a stable connection of the rotating shaft 2, while also giving the flange bodies 310 as a whole a strong structural strength. The number of flange bodies 310 and the thickness of each flange body 310 can be adaptively designed by those skilled in the art according to actual needs, with the aim of ensuring that the connecting flange as a whole has a strong structural strength; this disclosure does not impose specific limitations here.
[0049] Furthermore, such as Figure 4 As shown, the connecting part 340 may be provided with a first clearance hole 341 that communicates with the mounting hole 320 and is used for the rotating shaft 2 to pass through, and a second clearance hole that communicates with the cavity 331. In this way, the rotating shaft 2 can be avoided through the first clearance hole 341, so that the rotating shaft 2 can be stably connected to multiple flange bodies 310 with high stability. At the same time, the second clearance hole that communicates with the cavity 331 can effectively reduce the volume of the heat transfer conductor, improve the heat insulation effect of the drive roller shaft end, and make the drive roller as a whole have high heat resistance.
[0050] Furthermore, the connecting portion 340 can be constructed in any suitable manner; for example, the connecting portion 340 can be constructed as follows: Figure 4 The connecting plate shown is integrally formed with the flange body 310, which is simple and convenient to process and can ensure the high overall structural strength of the flange body 310.
[0051] In order to ensure that the transmission roller has good high temperature resistance, in some embodiments, the main roller body 1, the connecting flange 3 and the rotating shaft 2 can be made of stainless steel to improve the overall high temperature resistance and effectively avoid deformation or burning when the transmission roller is used in processes such as high temperature vacuum coating.
[0052] In some implementations, reference Figure 1 and Figure 2 As shown, the transmission roller may also include bearing housings 4. There are two bearing housings 4, and the ends of the two rotating shafts 2 away from the connecting flange 3 are respectively rotatably connected to the bearings 5 in the corresponding bearing housings 4. Thus, the main roller body 1 can be stably rotated through the bearing housings 4. At the same time, since a heat insulation cavity 330 is formed on the flange body 310, the heat insulation effect of the transmission roller shaft end is improved. That is, the temperature of the main roller body 1 transmitted to the bearing 5 on the rotating shaft 2 through the flange body 310 can be effectively reduced. Thus, the working temperature of the bearings 5 at both ends of the transmission roller can also be effectively reduced, and the service life of ordinary metal high-temperature bearings in high-temperature environments is improved.
[0053] Furthermore, in some embodiments, the outer wall of the bearing housing 4 can also be used to fit and connect with a cavity (not shown in the figure) containing cooling water inside, so as to indirectly cool and reduce the temperature of the bearing 5 inside the bearing housing 4 through the cooling water in the cavity. In this way, by cooperating with the flange body 310 with the heat insulation cavity 330 and the cooling bearing housing 4, the temperature at both ends of the main roller body 1 bearing 5 can be further reduced, which is conducive to ensuring the safe and reliable operation of the transmission roller for a long time. At the same time, since the service life of the bearing 5 in high temperature environment is increased, it also provides an alternative to high temperature bearings made of special materials such as high temperature resistant ceramic bearings in related technologies, thereby reducing costs.
[0054] The specific outline, size, and material of the cavity can be adaptively designed according to actual needs, and this disclosure does not impose specific limitations. Furthermore, the cooling water can be, for example, municipal water or tap water with a lower temperature, or other coolants that can achieve cooling through heat exchange, thereby ensuring a good cooling effect; this disclosure does not impose specific limitations in this regard.
[0055] also, Figure 2 The example shows that while the rotating shaft 2 and the bearing 5 are rotatably connected, the end of the rotating shaft 2 is also provided with a bearing washer 7 and a bearing retainer 8, so that the bearing retainer 8 is sleeved on the rotating shaft 2 and the bearing washer 7 is pressed against the end face of the bearing 5, thereby achieving a stable rotatable connection between the rotating shaft 2 and the bearing 5 with high reliability.
[0056] Furthermore, in some implementations, reference is made to... Figure 1 and Figure 2As shown, a protective cover 6 can also be installed on the outside of the bearing housing 4. This protective cover 6 can provide a certain degree of protection when the transmission roller is working in an environment containing selenium, for example. Since selenium is highly corrosive, installing a protective cover 6 on the outside of the bearing housing 4 can shield against selenium corrosion, ensuring that the bearing 5 can work safely and stably for a long time. Furthermore, the bearing housing 4 can include an upper housing 410 and a lower housing 420 that are detachably connected and located inside the protective cover 6, which together form a receiving groove 430 for accommodating the bearing 5. The structure is simple and easy to disassemble and assemble.
[0057] Additionally, in some implementations, references Figure 1 and Figure 2 As shown, the bearing housing 4 is also provided with a connecting plate 440, which has a first fastener (not shown) and a first through hole 441. The first fastener passes through the first through hole 441 and is used to connect to the cavity, so that the bearing housing 4 can be detachably connected to the cavity. The first fastener can be constructed in any suitable manner, such as a bolt or screw, and this disclosure does not specifically limit its use. Furthermore, Figure 2 An exemplary embodiment is shown in which the connecting plate 440 and the upper housing 410 are integrally formed, which facilitates manufacturing and ensures good structural strength.
[0058] In some implementations, reference Figure 2 As shown, the protective cover 6 may include an upper cover 610 and a lower cover 620. The upper cover 610 is provided with a second fastener (not shown) and a second through hole 611. The second fastener passes through the second through hole 611 and is used to connect to the upper housing 410. The lower cover 620 is provided with a third fastener (not shown) and a third through hole 621. The third fastener passes through the third through hole 621 and is used to connect to the lower housing 420, so that the protective cover 6 can be stably installed outside the bearing seat 4 and is easy to disassemble and assemble. In addition, both the upper cover 610 and the lower cover 620 have clearance grooves 630 on the end faces of the side near the flange body 310 to allow the rotating shaft 2 to pass through and rotate to connect with the bearing 5 in the bearing seat 4. The second and third fasteners can be constructed in any suitable manner, such as bolts or screws, and this disclosure does not specifically limit them. In addition, the specific external structure of the upper housing 410, lower housing 420, upper cover 610 and lower cover 620 can be adapted to actual needs, with the aim of ensuring the safe and stable operation of the internal bearing 5. This disclosure does not make specific limitations in this regard.
[0059] It should be noted that, because the heat insulation cavity 330 effectively blocks axial heat transfer from the drive roller, resulting in a uniform axial temperature distribution and high heat resistance, in some specific embodiments, the main roller body 1 is made of 316L stainless steel, with a length of 600mm, a diameter of 80mm, a wall thickness of 10mm, and a surface roughness of Ra≤0.1. The flange body 310 has a total thickness of 10mm, and the mounting hole 320 has a diameter of... The flange body 310 and the shaft 2 are both made of stainless steel, with a diameter of 30mm. Based on this, a model was created using the ANSYS software platform. The model was set according to the actual working environment temperature (690℃) of the high-temperature vacuum coating process. This allowed for the simulation of the thermal field distribution of the optimized transmission roller (flange body 310 has a heat insulation cavity 330, and the bearing seat 4 is connected to the cavity with cooling water) and the ordinary transmission roller (flange body 310 has no heat insulation cavity, and the bearing seat 4 is not equipped with a cooling device).
[0060] Specifically, the simulation results are as follows: Figures 6 to 9 As shown, thus, after Figure 6 and Figure 7 A comparison of the two simulation diagrams shows that, under the same process conditions, the inner ring temperature of the flange body 310 with the optimized structure is approximately 470℃, while the inner ring temperature of the flange body 310 with the ordinary structure is approximately 570℃. Therefore, the optimized transmission roller reduces the inner ring temperature of the flange body 310 by approximately 100℃. Furthermore, after... Figure 8 and Figure 9 A comparison of the two simulation diagrams shows that the maximum temperature of bearing 5 in the optimized transmission roller is about 180℃, while the maximum temperature of bearing 5 in the ordinary transmission roller is about 230℃. Therefore, the optimized transmission roller reduces the maximum temperature of bearing 5 by about 50℃, and at the same time ensures that the maximum temperature of bearing 5 is controlled below 200℃, which is more conducive to the long-term stable operation of bearing 5 and lubricant.
[0061] According to a second aspect of this disclosure, a vacuum coating apparatus is also provided, comprising a plurality of the aforementioned vacuum coating drive rollers, which can avoid the problem of passive cooling of the coating substrate in contact with the drive rollers by cooling water, as in related technologies, thereby ensuring higher film quality and having all the beneficial effects of the aforementioned vacuum coating drive rollers, which will not be elaborated further in this disclosure.
[0062] Furthermore, it should be noted that the vacuum coating transmission roller provided in the first aspect of this disclosure can also be used in other high-temperature transmission equipment, such as high-temperature rolling mills, high-temperature conveyor belts, or the printing industry. This disclosure is not limited thereto.
[0063] The preferred embodiments of this disclosure have been described in detail above with reference to the accompanying drawings. However, this disclosure is not limited to the specific details of the above embodiments. Within the scope of the technical concept of this disclosure, various simple modifications can be made to the technical solutions of this disclosure, and these simple modifications all fall within the protection scope of this disclosure.
[0064] It should also be noted that the various specific technical features described in the above embodiments can be combined in any suitable manner without contradiction. To avoid unnecessary repetition, this disclosure will not describe the various possible combinations separately.
[0065] Furthermore, various different embodiments of this disclosure can be combined in any way, as long as they do not violate the spirit of this disclosure, they should also be regarded as the content disclosed in this disclosure.
Claims
1. A drive roller for vacuum coating, characterized in that, The transmission roller includes a tubular main roller body, and the two ends of the main roller body are respectively fixedly connected to rotating shafts via connecting flanges; The connecting flange includes a flange body, the center of which is formed with a mounting hole for fitting onto the rotating shaft, and a heat insulation cavity extending along the axial direction of the flange body is also formed on the flange body. The heat insulation cavity includes a cavity that penetrates the flange body; The number of cavities is multiple and they are all provided on the flange body along the circumference of the flange body; The cavity is constructed in an arc shape, and the center of the arc-shaped cavity is concentric with the center of the mounting hole.
2. The drive roller for vacuum coating according to claim 1, characterized in that, The heat insulation cavity also includes a groove cavity formed on the outer periphery of the flange body; The number of slots is multiple, and they are all arranged on the flange body along the circumference of the flange body.
3. The drive roller for vacuum coating according to claim 2, characterized in that, The plurality of grooves and the plurality of holes are arranged alternately along the circumferential direction.
4. The transmission roller for vacuum coating according to claim 2, characterized in that, The flange body is multiple, and every two adjacent flange bodies are fixedly connected by a connecting part. The connecting part is provided with a first clearance hole communicating with the mounting hole and for the rotating shaft to pass through, and a second clearance hole communicating with the cavity.
5. The drive roller for vacuum coating according to claim 4, characterized in that, The connecting part is constructed as a connecting plate, and the connecting plate is integrally formed with the flange body.
6. The drive roller for vacuum coating according to claim 1, characterized in that, The main roller body, the connecting flange, and the rotating shaft are arranged coaxially.
7. The drive roller for vacuum coating according to any one of claims 1-6, characterized in that, The main roller body, the connecting flange, and the rotating shaft are all made of stainless steel.
8. The drive roller for vacuum coating according to claim 1, characterized in that, The transmission roller also includes a bearing housing, and there are two bearing housings. The ends of the two rotating shafts away from the connecting flange are respectively rotatably connected to the bearings in the corresponding bearing housings. The outer wall of the bearing housing is used to fit and connect with a cavity containing cooling water, so as to indirectly cool and reduce the temperature of the bearings in the bearing housings through the cooling water in the cavity.
9. The drive roller for vacuum coating according to claim 8, characterized in that, A protective cover is also installed on the outside of the bearing housing, and the bearing housing includes an upper shell and a lower shell that are detachably connected and located inside the protective cover, which together form a receiving groove for accommodating the bearing.
10. The drive roller for vacuum coating according to claim 8, characterized in that, The bearing housing is also provided with a connecting plate, which is provided with a first fastener and a first through hole. The first fastener passes through the first through hole and is used to connect to the cavity so that the bearing housing can be unlockably connected to the cavity.
11. A vacuum coating apparatus, characterized in that, It includes multiple drive rollers for vacuum coating as described in any one of claims 1-10.
Citation Information
Patent Citations
Structure of roll flange for clamping of spindle in rubbing apparatus
KR1020090099970A
