Processing machine and method for manufacturing a workpiece

Abstract

In the processing machine (1), the Z-axis motor (39) moves the spindle (37) in the Z direction. The Z-axis position sensor (69) detects the position of the spindle (37) in the Z direction. The rotation sensor (71) detects the rotation of the spindle (37). The control section (5) controls the Z-axis motor (39) in accordance with the detection value of the Z-axis position sensor (69) in such a manner that the spindle (37) is moved in the Z direction to a relative position set with respect to a prescribed reference position when the workpiece (103) is processed by the tool (101) in a state in which the spindle (37) is rotating. The control section (5) detects the rotation of the spindle (37) by the rotation sensor (71), and acquires the position detected by the Z-axis position sensor (69) as the aforementioned reference position when a prescribed signal is input in a state in which the spindle (37) is moved in the Z direction so that the tool (101) contacts the reference member in the Z direction.

Description

Technical Field

[0001] This invention relates to a processing machine and a method for manufacturing a workpiece. Background Technology

[0002] Processing machines that use tools to process workpieces (e.g., cutting) are known (e.g., Patent Documents 1 and 2 below). Patent Documents 1 and 2 disclose a cutting device (processing machine) that uses a cutting edge (tool) with a cutting edge on its outer periphery to slit a wafer (workpiece). Such processing machines achieve a desired depth of cut, for example, by moving the cutting edge to a relative position set relative to a predetermined reference position.

[0003] Information about the position of the reference position is obtained by, for example, by bringing the cutting edge close to the workpiece or by using a worktable that holds the workpiece, and detecting the position of the cutting edge when contact is detected. In the prior art of Patent Documents 1 and 2, a technique is disclosed that uses conductive components for both the cutting edge and the worktable, and detects contact by utilizing the current flowing between them when they are in contact.

[0004] When the cutting edge comes into contact with the worktable, there is a possibility that either of them may deteriorate. Therefore, Patent Document 1 proposes applying a high-frequency voltage to both the cutting edge and the worktable, and detecting their proximity based on the change in their electrostatic capacitance. Patent Document 2 proposes a technique to obtain positional information that serves as a reference position by replacing the cutting edge with an approximate one that simulates the cutting edge.

[0005] Existing technical documents

[0006] Patent documents

[0007] Patent Document 1: Japanese Patent Application Publication No. 61-071967.

[0008] Patent Document 2: Japanese Patent Application Publication No. 2015-103693. Summary of the Invention

[0009] The technical problem that the invention aims to solve

[0010] In the technology of Patent Document 1, a conductive component must be used as the cutting edge. This reduces the freedom of choice in selecting the cutting edge. In the technology of Patent Document 2, a near-cutting edge is required in addition to the cutting edge. Furthermore, errors may occur due to the difference between the cutting edge and the near-cutting edge. Therefore, a machining machine and a method for manufacturing the workpiece that can perfectly obtain positional information serving as a reference position are desired.

[0011] Technical solutions for solving technical problems

[0012] A machining machine according to one embodiment of the present invention includes: a spindle that holds one of a tool and a workpiece; a holding part that holds the other of the tool and the workpiece; a drive unit that moves one of the spindle and the holding part, i.e., a movable part, in a predetermined first direction; a position sensor that detects the position of the movable part in the first direction; a rotation sensor that detects the rotation of the spindle; and a control unit that, when machining the workpiece by the tool while the spindle is rotating, controls the drive unit to move the movable part in the first direction to a relative position set to a predetermined reference position, based on the detection value of the position sensor. When the workpiece or a component that is stationary relative to the workpiece is used as a reference component, the control unit detects the rotation of the spindle by the rotation sensor, and when a predetermined signal is input while the movable part moves in the first direction and the tool contacts the reference component in the first direction, the control unit obtains the position detected by the position sensor as the reference position.

[0013] A method for manufacturing a workpiece according to one embodiment of the present invention uses the above-described processing machine to process the workpiece by means of the tool to obtain the workpiece.

[0014] A method for manufacturing a workpiece according to an embodiment of the present invention uses a machining machine having: a spindle that holds one of a tool and a workpiece; a holding portion that holds the other of the tool and the workpiece; a drive portion that moves either the spindle or the holding portion, i.e., a movable portion, in a predetermined first direction; a position sensor that detects the position of the movable portion in the first direction; and a rotation sensor that detects the rotation of the spindle. The method for manufacturing a workpiece by machining the workpiece with the tool includes: a step of moving the movable portion in the first direction so that the tool contacts the reference portion when the workpiece or a component stationary relative to the workpiece is used as a reference component, while the spindle is rotating; a step of detecting a deceleration of the spindle rotation caused by the contact between the tool and the reference component based on a detection result from the rotation sensor; and a step of obtaining the position of the movable portion in the first direction when the deceleration is detected using the position sensor.

[0015] The effects of the invention

[0016] Based on the above structure or sequence, information on the reference position when the workpiece and tool move relative to each other can be perfectly obtained. Attached Figure Description

[0017] Figure 1 A schematic perspective view showing the main parts of the processing machine according to an embodiment of the present invention.

[0018] Figure 2 To enlarge the display Figure 1 A schematic perspective view of a part of the processing machine.

[0019] Figure 3 It is shown schematically. Figure 1 A cross-sectional view of the bearing of the spindle of the machining center.

[0020] Figure 4 It is shown schematically. Figure 1 A block diagram of the structure of the signal processing system of the machining machine.

[0021] Figure 5 (a) and Figure 5 (b) is used to explain through Figure 1 A schematic diagram of the action of obtaining the reference position information of the machining machine.

[0022] Figure 6 It is displayed Figure 1 A flowchart illustrating the sequence in which a machining machine acquires reference position information.

[0023] Figure 7 (a) Figure 7 (b) and Figure 7 (c) is a schematic diagram showing various variations of the deceleration of the rotation of the display tool.

[0024] Figure 8 (a) Figure 8 (b) and Figure 8 (c) is a schematic diagram of various variations of the rotation method of the display tool. Detailed Implementation

[0025] First, an overview of the processing machine according to one embodiment of the present invention will be given, and then the detailed structure of the processing machine will be described.

[0026] (Overview of the processing machine)

[0027] Figure 1 This is a schematic perspective view showing the main parts of a processing machine 1 according to an embodiment of the present invention. Figure 2 It is a magnified display. Figure 1 A schematic perspective view of a portion of the processing machine 1.

[0028] The orientation of the various components in the diagram is arbitrary relative to the vertical direction. However, in the following explanation, for convenience, the relationship between the orientation of the various components and the vertical direction is sometimes presented based on the relationship shown in the diagram. In the diagram, for convenience, an orthogonal coordinate system XYZ is labeled. The Z direction is, for example, a direction parallel to the vertical direction, and the +Z side is, for example, above.

[0029] The machining machine 1 processes (e.g., cuts) the workpiece 103 using a tool 101. The tool 101 and the workpiece 103 are supported and driven by... Figure 1 The mechanical body 3 shown is used for this purpose. The mechanical body 3 is controlled by the control unit 5 (see reference). Figure 4 Controlled by the tool. In the illustrated example, tool 101 is a grinding stone used for grooving or cutting (or cutting) using its outer periphery. Tool 101 is controlled by a spindle 37 (symbol in Y direction) parallel to the Y direction. Figure 2 (as shown in the image). Furthermore, the spindle 37 rotates about an axis parallel to the Y direction and moves towards the -Z side to cut the workpiece 103. In the area where machining is performed, machining fluid (not shown, e.g., cutting fluid) is supplied from nozzle 7.

[0030] The control unit 5 acquires, for example, the Z-direction position of the spindle 37 when the tool 101 is moved towards the -Z side and abuts against the workpiece 103 (or other components, as described later) and uses this position as a reference position. Furthermore, the spindle 37 is moved to a position relative to the reference position in the Z direction. Therefore, for example, the depth of the groove formed on the upper surface of the workpiece 103 can be set to a desired size (the relative distance between the reference position and the relative position).

[0031] Figure 5 (a) and Figure 5 (b) is a schematic diagram illustrating the method for obtaining information about the location that becomes the reference location. Figure 6 This is a flowchart illustrating an example of the sequence of methods for obtaining information about the location that becomes the reference position. It should be noted that... Figure 6 This is a flowchart that can be seen as an example of the sequence of processes performed by the display control unit 5.

[0032] It should be noted that, for convenience, in the following explanations, the information about the reference position will sometimes be referred to simply as the reference position. Furthermore, there are cases where the acquisition of information about the location that will become the reference position is simply referred to as the acquisition of the reference position.

[0033] First, as based on Figure 5 (a) arrow a1 and Figure 6 As shown in ST1, with the tool 101 separated from the workpiece 103 towards the +Z side, the tool 101 (from another viewpoint, the main axis 37) is rotated about the rotation axis CL. Furthermore, according to... Figure 5 (a) Arrow a2 and Figure 6 As shown in step ST2, while the tool 101 is rotating, the tool 101 is gradually moved closer to the workpiece 103.

[0034] The rotational speed of tool 101 at this time is lower than that of tool 101 when cutting workpiece 103. At other points, the torque driving tool 101 at this time (external torque and / or inertial torque, the same below) is smaller than the torque driving tool 101 during machining.

[0035] Various methods can be used to rotate tool 101. In the illustrated example, tool 101 is rotated by supplying fluid from nozzle 7 to the outer periphery of tool 101 in a tangential direction to that outer periphery.

[0036] Then, as Figure 5 As shown in (b), if tool 101 abuts against workpiece 103, the rotation of tool 101 is slowed down by the frictional force received by tool 101 from workpiece 103. Figure 6 As shown in step ST3, the control unit 5 detects the deceleration of this rotation. Furthermore, when the deceleration of rotation is detected (when it is determined to be positive in step ST3), as shown in step ST4, the control unit 5 detects the position of the spindle 37 in the Z direction at this time, and uses the detected position in the Z direction as the reference position.

[0037] It should be noted that in the description of this invention, "deceleration" is sometimes used in a broad sense that includes stopping and in a narrow sense that does not include stopping. Unless otherwise specified, deceleration is considered to include stopping, provided that there is no contradiction.

[0038] As described above, in this embodiment, the contact between the tool 101 and the workpiece 103 is detected based on the phenomenon that the rotating tool 101 decelerates upon contact with the workpiece 103. Therefore, the tool 101 or the reference member (in this case, the workpiece 103) in contact with the tool 101 may not be conductive. Furthermore, it is not necessary to use a blade-like material. Moreover, if the rotational speed of the tool 101 is reduced (the torque is decreased), the possibility of deterioration of the tool 101 and / or the reference member can be reduced.

[0039] (Details about the processing machine)

[0040] As described above, the processing machine 1 includes, for example, a mechanical body 3 including a spindle 37 and a control unit 5 for controlling the mechanical body 3. Furthermore, the processing machine 1 includes a fluid supply unit 9 including a nozzle 7 (see reference). Figure 4 The control unit 5 is used to control the fluid supply unit 9. Furthermore, the fluid supply unit 9 may differ from the described device and may be a different device from the processing machine 1.

[0041] In the following description, the components of the processing machine 1 will be explained in a general order of listing shown below.

[0042] •Tool 101 ( Figure 1 and Figure 2 )

[0043] • Workpiece 103 ( Figure 1 and Figure 2 )

[0044] •Mechanical Body 3 ( Figure 1 , Figure 2 and Figure 3 )

[0045] • Fluid supply unit 9 ( Figure 2 and Figure 4 )

[0046] • Control Unit 5 ( Figure 4 )

[0047] • The order in which information about the location that becomes the reference position is obtained ( Figure 5 (a) Figure 5 (b) and Figure 6 )

[0048] • Summary of implementation methods

[0049] • Variations ( Figure 7 (a) ~ Figure 8 (c)

[0050] (tool)

[0051] Tool 101 can be used as various tools for various machining processes. For example, tool 101 can be a cutting tool for cutting, a grinding tool for grinding, or a polishing tool for lapping. Cutting tools, for example, can be rotary tools (rotary tools) that cut workpiece 103 by rotating themselves (example shown in the figure), or turning tools that cut a rotating workpiece 103. Examples of rotary tools include milling cutters, drills, and reamers. Grinding or polishing tools can use fixed abrasive grains fixed to the tool, or can use free abrasive grains contained in slurry.

[0052] In an embodiment where tool 101 is a turning tool, different from the example shown in the figure, when obtaining a reference position, for example, the turning tool is brought close to the workpiece 103 while the spindle holding the workpiece 103 is rotating. Furthermore, due to the contact between the two, it is detected that the rotation of the workpiece 103 has stopped, and the position of the tool 101 or the workpiece 103 detected at this time is obtained and used as the reference position. Moreover, in the description of this embodiment, unless otherwise specified, the example shown in the figure is presented with tool 101 as a turning tool.

[0053] Consider the situation where tool 101 or workpiece 103 (tool 101 in the illustrated example) is moved in a first direction (Z direction in the illustrated example) for machining, and / or the situation where a reference position in the first direction is obtained. In this case, the portion of tool 101 that contacts workpiece 103 in the first direction is arbitrary. In other words, the relationship between the direction of tool 101 and the first direction is arbitrary. For example, in an embodiment where tool 101 is a rotary tool, the contact portion may be the outer periphery (the portion outside the axis of rotation) (illustrated example) or the front end.

[0054] As shown in the example, in an embodiment where the outer periphery of the turning tool contacts the workpiece 103 in a first direction, for example, when a reference position is obtained, the rotation of the tool 101 is easily stopped by contacting the workpiece 103 with the tool 101. This effect becomes better, for example, with a larger diameter. From this point of view, the diameter of the tool 101, for example, the maximum length (or maximum thickness in other views) relative to the rotation axis direction of the tool 101, can be more than 1, more than 2, or more than 5 times.

[0055] exist Figure 1 and Figure 2 As an example of tool 101, consider a turning tool. More specifically, the tool 101 in the figure example, as previously described, is a grinding stone used for grinding using its outer periphery. In another viewpoint, tool 101 may have a cutting edge 101a (indicated by the symbol) on its outer periphery. Figure 5 (a) and Figure 5 (b) The cutting edge. The outer edge of the cutting edge is generally circular and plate-shaped (disc-shaped or annular). The cutting edge is used to form grooves in the workpiece 103 and / or to cut (divide) the workpiece 103 by rotating about this axis (in the example shown). The processing machine 1 may be equipped with a single cutting edge (as shown in the figure) or with multiple cutting edges spaced apart from each other in a direction parallel to the axis of rotation. It should be noted that in the following description, as shown in the example, the embodiment with a single cutting edge is sometimes presented.

[0056] (Workpiece)

[0057] As described above, the types of processing performed by tool 101 are diverse, and so are the types of workpieces 103. For example, the material of workpiece 103 can be various materials, such as metal, ceramic, resin, wood, chemical wood pulp, or composite materials (e.g., carbon fiber reinforced plastic). The shape and size of workpiece 103 before and / or after processing are arbitrary. The required dimensional accuracy of the processed workpiece 103 is also arbitrary. For example, in the case where high accuracy is required, the accuracy (tolerance) is below 10 μm, below 1 μm, or below 100 nm.

[0058] The consideration is given to a situation where machining is performed by moving tool 101 or workpiece 103 (tool 101 in the illustrated example) in a first direction (Z direction in the illustrated example), and / or a situation where a reference position in the first direction is obtained. In this case, the portion of workpiece 103 that contacts tool 101 in the first direction is arbitrary. From another perspective, the relationship between the orientation of the component holding workpiece 103 (worktable 25 described later in the illustrated example) and the first direction is arbitrary.

[0059] For example, in an embodiment where tool 101 is a turning tool (illustrated example), the contact point may be the upper surface of workpiece 103 (the surface opposite to the worktable 25) (illustrated example), or, unlike the illustrated example, the side surface of workpiece 103 (the side facing the worktable 25). Furthermore, although not specifically illustrated, in an embodiment where tool 101 is a turning tool, the contact point may be the outer peripheral surface of workpiece 103 (the surface outside the axis of rotation), or the end face (the surface facing a direction parallel to the axis of rotation).

[0060] exist Figure 1 and Figure 2 As an example of workpiece 103, there is a plate-shaped workpiece 103 (substrate). The planar shape of the plate-shaped workpiece 103 before processing is arbitrary, such as rectangular (example in the figure) or circular. As mentioned above, in the embodiment where the tool 101 is a disc-shaped cutting edge with a cutting edge 101a on its outer periphery, the cutting edge helps to form, for example, a groove extending in a direction orthogonal to the rotation axis of the tool 101 (X direction) on the upper surface (+Z side) of the plate-shaped workpiece 103, or to divide the workpiece 103 in the Y direction.

[0061] (Main body of the machine)

[0062] In the description of the mechanical body 3, it will be described in a general order of listing as shown below.

[0063] • The mechanical body 3 of this embodiment can be used as a whole

[0064] • Figure 1 The mechanical body 3 shown

[0065] • An example of the structure of the bearing for spindle 37

[0066] (The main body of the machine)

[0067] The machine body 3 supports and drives the tool 101 and the workpiece 103. That is, the machine body 3 is the main part that undertakes the processing. The structure of the machine body 3 can be of various forms, such as a known structure.

[0068] For example, the machinery used for processing is sometimes distinguished from machine tools and industrial robots (the boundary between them is not clearly defined). In cases where such a distinction is made, the machine body 3 (or processing machine 1) can be classified as either. It should be noted that, in the description of this embodiment, an embodiment generally classified as machine tools is used as an example.

[0069] Furthermore, as can be seen from the description of tool 101, the machining of the machine body 3 (or processing machine 1) as an object can be cutting, grinding, and / or lapping. Moreover, the machine body 3 performing cutting, etc., can be used to rotate tool 101 or to rotate workpiece 103.

[0070] The machine body 3 may or may not be a composite machine. The machine body 3 may drive one tool 101 (as shown in the figure) or it may be a multi-axis or multi-head machine that drives multiple tools 101 simultaneously. The machine body 3 (machine 1) that rotates the tool 101 (rotary tool) may be, for example, a milling machine, drilling machine, boring machine or machining center.

[0071] The machine body 3 moves the tool 101 relative to the workpiece 103 along mutually orthogonal X, Y, and Z axes, for example. The machine body 3 may move the tool 101 relative to the workpiece 103 along axes other than the three axes described above. For example, the machine body 3 (machine 1) may be rotatable about at least one axis parallel to any of the three axes (e.g., a five-axis machining center). The relative movement of the tool 101 and the workpiece 103 along each axis, as is known from known machine tools, can be achieved by moving the tool 101 or by moving the workpiece 103.

[0072] It should be noted that the description of this embodiment is based primarily on the premise that the orientations of various components such as the spindle 37 and the worktable 25 remain unchanged, and the description focuses on the orientations of these components. This description is applicable to embodiments where the orientation of components can be changed; for example, it can be applied to the standard orientation of the components, or to specific orientations different from the standard orientation. The standard orientation can be reasonably determined by referring to common technical knowledge.

[0073] In the embodiment where tool 101 is a turning tool, the relative relationships between the spindle 37 direction, the worktable 25 direction, the vertical direction, and the first direction for obtaining the reference position (in the illustrated example, the Z direction) are arbitrary. Similarly, in the embodiment where tool 101 is a turning tool, the relative relationships between the spindle 37 direction, the tool table direction, the vertical direction, and the first direction are arbitrary.

[0074] For example, the spindle 37 (its axis of rotation) may be parallel (as shown in the figure) or intersecting (e.g., orthogonal) with respect to the upper surface of the worktable 25. Furthermore, the first direction may be intersecting (e.g., orthogonal) or parallel with respect to the spindle 37 (as shown in the figure).

[0075] (The mechanical body shown in the figure)

[0076] exist Figure 1 In the example of the mechanical body 3, a slicer is shown that can rotate a disc-shaped tool 101 with a cutting edge 101a on its outer periphery to perform cutting.

[0077] Specifically, for example Figure 1 The machine body 3 shown, as a component supporting the workpiece 103, has the following components: a base 21 installed on the factory floor or the like; an X-axis bed 23 fixed to the base 21; a worktable 25 supported on the X-axis bed 23 and movable in the X direction (horizontal direction); and a clamp 27 fixed to the worktable 25 for detachably holding the workpiece 103. Although not shown, the machine body 3 may be configured to allow the worktable 25 to rotate about an axis parallel to the Z-axis.

[0078] And, for example Figure 1 The machine body 3 shown, as a component for supporting and driving the tool 101, has the following components: the aforementioned base 21; a Y-axis bed 29 fixed to the base 21; a Y-axis moving part 31 supported on the Y-axis bed 29 and movable in the Y direction (horizontal direction); a Z-axis moving part 33 supported on the Y-axis moving part 31 and movable in the Z direction (vertical direction); a spindle head 35 (excluding the spindle 37) fixed to the Z-axis moving part 33; and a spindle 37 (denoted by a reference numeral) supported on the spindle head 35 in a manner rotatable about a rotation axis parallel to the Y direction, detachably holding the tool 101. Figure 2 ).

[0079] By transmitting driving force from a drive source (e.g., an electric motor) not shown to the worktable 25, the worktable 25 is moved in the X direction, causing the workpiece 103 supported on the worktable 25 to move relative to the tool 101 in the X direction. By transmitting driving force from a drive source (e.g., an electric motor) not shown to the Y-axis moving part 31, the Y-axis moving part 31 is moved in the Y direction, causing the tool 101 supported on the Y-axis moving part 31 to move relative to the workpiece 103 in the Y direction. By transmitting driving force from a predetermined drive source (e.g., described later)... Figure 4The driving force of the Z-axis motor 39 (shown) is transmitted to the Z-axis moving part 33, causing the Z-axis moving part 33 to move in the Z direction, thereby moving the tool 101 supported on the Z-axis moving part 33 relative to the workpiece 103 in the Z direction. This is achieved by transmitting the driving force from a predetermined drive source (e.g., Figure 4 The driving force of the spindle motor 41 shown is transmitted to the spindle 37, causing the spindle 37 to rotate around the axis, and the tool 101 held on the spindle 37 rotates around the axis.

[0080] Figure 1 and Figure 2 For illustrative purposes only, the shapes of the components (21, 23, 25, 27, 29, 31, 33, 35, and 37) shown in the figures are merely schematic. The actual shapes of the components may differ significantly from those shown. Furthermore, the materials of the components are arbitrary. Additionally, the guides (labels omitted) that guide the moving parts (25, 31, or 33) that move parallel to the support (23, 29, or 31) are also shown schematically and may differ from the shapes shown in the figures.

[0081] The guide member for guiding the moving part (25, 31, or 33) that moves parallel to the support part (23, 29, or 31) can be a suitable component. For example, the guide member can be a sliding guide member for sliding between the support part and the moving part, a rotating guide member for rotating parts to rotate between the support part and the moving part, a hydrostatic guide member for allowing air or oil to pass between the support part and the moving part, and can be a combination of two or more of these guide members. Similarly, the bearing of the main shaft 37 can be a sliding bearing, a rotating bearing, a hydrostatic bearing, or a combination of two or more of these bearings.

[0082] The drive source for parallel movement is, for example, an electric motor. This electric motor can be a rotary motor or a linear motor. The rotational motion of a rotary motor can be converted into linear motion by a suitable mechanism such as a screw mechanism (e.g., a ball screw mechanism). Furthermore, the drive source for parallel movement can be hydraulic (oil pressure) or pneumatic. Similarly, the drive source for the rotation of the spindle 37 can be, for example, a rotary electric motor (spindle motor 41). However, the drive source for the rotation of the spindle 37 can be hydraulic (oil pressure) or pneumatic. The specific structure of the various electric motors can be various. The electric motor can be a DC motor or an AC motor. The AC motor can be a synchronous motor or an induction motor.

[0083] The rotor (not shown) of the spindle motor 41 and the spindle 37 are fixed to each other, for example, in a manner that allows them to rotate together (including embodiments where some parts are shared). However, a clutch and / or a speed changer may be present between the rotor (part or all of it) and the spindle 37. When a clutch is present, the connection between the rotor and the spindle 37 can be disengaged during the operation of obtaining the reference position, thereby reducing the inertial torque. It should be noted that, unless otherwise specified, this embodiment is described and presented under the premise that the rotor and the spindle 37 rotate as a single unit.

[0084] In an embodiment where the spindle motor 41 is a synchronous motor containing a permanent magnet, for example, when no power is supplied and torque is zero, an attractive force is generated that stops the rotation of the spindle 37. Therefore, for example, when a reference position is achieved, the probability of unintentional rotation can be reduced. Furthermore, from another perspective, rotation generated by supplying fluid to the tool 101 is effective. On the other hand, in an embodiment where the spindle motor 41 is an induction motor, for example, when no power is supplied and torque is zero, no attractive force is generated that stops the rotation of the spindle 37. Therefore, for example, even if the force applied to the tool 101 by the fluid is reduced, the spindle 37 can still rotate.

[0085] The fixture 27 is constructed using, for example, a vacuum fixture or an electrostatic fixture, and is mounted on the worktable 25 using a suitable tool such as a machine vise (not shown). It should be noted that the fixture 27 may differ from the description above and may be configured to be integral and inseparable from the worktable 25. Furthermore, the fixture 27 may be omitted, and the workpiece 103 may be fixed to the worktable 25 using other suitable clamps (e.g., machine vises) different from the fixture 27.

[0086] Unlike the description in this embodiment, the combination of the worktable 25 and the fixture 27 may be considered as a worktable. When referring to the holding surface of the worktable that holds the workpiece 103, the holding surface may be the holding surface 25a of the worktable 25 that indirectly holds the workpiece 103 through the holding fixture 27 (symbol indicated in...). Figure 2 ), which can be the holding surface 27a (symbol indicated in) of the fixture 27 that directly holds the workpiece 103. Figure 2 ).

[0087] The spindle 37 can hold the tool 101 through its own mechanism (e.g., a clamping mechanism), and the tool 101 can be mounted through a tool including a screw. The cutting edge (tool 101), although not specifically illustrated, can be fixed to the spindle 37 by, for example, a component having a shaft portion having a hole formed at the center of the cutting edge, a component overlapping the cutting edge in the axial direction of the spindle 37, and a screw that passes through these components and is screwed onto the spindle 37. In such an embodiment, the cutting edge can be considered as the tool 101, or the entirety of the cutting edge and the tool for mounting the cutting edge to the spindle 37 can be considered as the tool 101.

[0088] The spindle 37 is located on the side facing the holding surface 27a of the worktable 25, and its rotation axis is along the holding surface 27a (e.g., parallel). Furthermore, by moving the spindle 37 in the Z direction, which is the first direction, the outer periphery of the cutting edge of the tool 101 contacts the upper surface of the workpiece 103 for machining or obtaining a reference position.

[0089] (An example of the structure of a spindle bearing)

[0090] As mentioned earlier, the bearing of spindle 37 has an arbitrary structure. Here, the structure of a hydrostatic bearing, which serves as an example of a bearing for spindle 37, will be described.

[0091] Figure 3 This is a schematic cross-sectional view showing an example of the structure of the bearing 43 of the spindle 37, corresponding to... Figure 2 Line III-III.

[0092] A gap is formed between the outer peripheral surface of the spindle 37 and the inner peripheral surface of the spindle head 35. Gas (e.g., air) or liquid (e.g., oil or water) is supplied to this gap at a predetermined pressure via a pump 45 or the like. It should be noted that in the former embodiment, the bearing 43 is an air bearing. It should also be noted that in the case where the fluid is gas, the compressor is configured as a pump in one embodiment.

[0093] (Fluid Supply Department)

[0094] Figure 4 This is a block diagram showing the structure of the processing machine 1 with the structure of the signal processing system as the center.

[0095] The fluid supply unit 9 includes a nozzle 7 and a supply unit body 47 for supplying fluid to the nozzle 7. As described above, when the workpiece 103 is machined by the tool 101, the fluid supply unit 9 supplies machining fluid from the nozzle 7 to the area being machined (hereinafter referred to as the machining area). Furthermore, when a reference position is obtained, the fluid supply unit 9 rotates the tool 101 by supplying fluid from the nozzle 7 to the tool 101.

[0096] The following is a brief description in the following order.

[0097] • Processing fluid

[0098] • Fluid supplied when the reference position is obtained

[0099] • Components that experience fluid collisions when obtaining a reference position

[0100] • Nozzle 7

[0101] • Supply Department Main Body 47

[0102] (Processing fluid)

[0103] As can be seen from the description of tool 101 above, the machining fluid (not shown) can be any type of machining fluid used in various machining processes. For example, in an embodiment where the machining is cutting, the machining fluid can be a cutting fluid (or cutting oil in other cases). The main component of the cutting fluid can be oil or water. Furthermore, the machining fluid can be, for example, a grinding fluid used for lapping or a polishing fluid used for grinding. The grinding fluid or polishing fluid (slurry) may or may not contain free abrasive particles. Regardless of the machining process, the machining fluid can be water only. Furthermore, the machining fluid can be a coolant used solely for cooling or primarily for cooling.

[0104] (The fluid supplied when the reference position is obtained)

[0105] In the operation of obtaining the reference position, the type (composition) of the fluid supplied to the tool 101 to rotate the tool 101 is arbitrary. For example, the fluid may be a processing fluid, a liquid different from a processing fluid, or a gas. Examples of gases include air and inert gases (e.g., nitrogen). In this embodiment, the description will basically take the embodiment of supplying a processing fluid as an example.

[0106] (Components impacted by fluid when the reference position is obtained)

[0107] In the description to date, during the action of obtaining the reference position, the component that the fluid impacts in order to rotate the spindle 37 is the tool 101. However, in the embodiment where the workpiece 103 is held on the spindle 37, the component that the fluid impacts can be the workpiece 103. It should be noted that, regardless of the embodiment, the component that the fluid impacts can be referred to as the rotating object held on the spindle 37.

[0108] Furthermore, regardless of whether the rotating object is either tool 101 or workpiece 103, the fluid can collide with or replace the rotating object in the collision with the rotating object and the spindle 37. A component (e.g., a blade) used to increase the torque generated by the fluid collision can be mounted on the spindle 37, the rotating object (101 or 103), or a device for mounting the rotating object. Such a component can be considered part of the spindle 37 or part of the rotating object. Depending on the shape of the blade, the direction of fluid impact may not include a tangential component (described later), for example, it may be the axial direction. It should be noted that, for ease of explanation in this confirmed embodiment, there are cases where such a component (blade, etc.) is not provided.

[0109] The fluid collides with the outer surface of the rotating object (tool 101 or workpiece 103) or the outer surface exposed outside the spindle 37. The aforementioned outer surface exposed outside the spindle 37 is to distinguish it from the technique of applying torque to the spindle 37 by passing fluid through the spindle head 35 for machining (the technique of using fluid instead of spindle motor 41).

[0110] It should be noted that in the description of this embodiment, the present invention is based on the premise that the tool 101 is a component that causes the spindle 37 to rotate and impact the fluid during the operation of obtaining the reference position. The tool 101, which is the component that causes the fluid impact, can be appropriately replaced by the workpiece 103 or the spindle 37, as long as no contradictions are caused.

[0111] (nozzle)

[0112] like Figure 2 The nozzle 7 shown supplies machining fluid to the machining area when the workpiece 103 is machined by the tool 101. In other words, the machining area is the region of the workpiece 103 that is machined by the tool 101. For example, in an embodiment where the tool 101 performs cutting, the machining area is the position where the cutting edge abuts against the workpiece 103 and its adjacent area. In an embodiment where the tool 101 performs grinding or lapping, for example, the machining area is the position where the tool 101 abuts against the workpiece 103 and its adjacent area or the abutting area, and the abutment may be an indirect abutment with free abrasive grains intervening.

[0113] The supply of machining fluid to the machining area can be carried out in various ways. For example, nozzle 7 can cause the machining fluid to flow into the machining area, or it can cause the machining fluid to flow into a location in tool 101 or workpiece 103 that is separate from the machining area, allowing the machining fluid to reach the machining area along tool 101 or workpiece 103. Nozzle 7 can spray the machining fluid, and the flow rate can be less than a spray. Nozzle 7 can cause the machining fluid to flow out as a stream of water with a suitable profile (e.g., spray), or it can cause the machining fluid to flow out in a shower-like manner (e.g., spray), or it can cause the machining fluid to spray out in a mist.

[0114] Furthermore, when a reference position is achieved, the nozzle 7, relative to the outer surface of the tool 101, causes the fluid to impact in the direction of the torque applied by the spindle 37 about the axis of rotation. When the spindle 37 is rotated in this way, the location (area) where the tool 101 is impacted by the fluid can be various, and the direction in which the fluid impacts said location (or, from another perspective, the direction of fluid ejection) can be various. Conceptually, for example, the tool 101 can rotate as long as an imaginary line extending from the point of application of the resultant force of the forces applied to the tool 101 by the fluid, in the direction of said resultant force, separates from the axis of rotation. In other words, the tool 101 can rotate if the fluid deflects and impacts the outer surface of the tool 101 relative to its axis of rotation.

[0115] Specifically, for example, when the tool 101 is observed parallel to its axis of rotation, the direction of fluid impact can be the direction in which an imaginary line extending from the location (or area, or the center of that area) of fluid impact separates from the axis of rotation of the main shaft 37. It should be noted that this direction can be considered as the tangent direction of a circle with an arbitrary radius centered on the axis of rotation. Furthermore, for example, when the tool 101 is observed parallel to its axis of rotation, the direction of fluid impact can be the tangent direction of a circle passing through the location of fluid impact. It should be noted that a relatively large tolerance can be included for the tangent direction associated with the direction of fluid impact (and / or the direction of fluid ejection), for example, within a range of 60° or 30° centered on a precise tangent direction.

[0116] Furthermore, for example, the direction of fluid impact can be orthogonal to the rotation axis of tool 101 in a torsional position, or it can be inclined in a direction parallel to the rotation axis (in the illustrated example, the Y direction). Also, for example, the location of fluid impact can be the outer periphery of tool 101 (the portion outside the rotation axis), or a surface facing the direction along the rotation axis of tool 101 (in the illustrated example, the +Y side and / or -Y side), or both.

[0117] When the fluid impacting the tool 101 to rotate the spindle 37 is liquid, the method of ejecting the fluid from the nozzle 7 can be varied. For example, the description of the supply method for the machining fluid (such as the method of ejecting as a stream of water or the method of ejecting as a shower) can be applied to the method of supplying the fluid used for rotation. Furthermore, when the fluid is liquid, the liquid can be supplied to the tool 101 in a method that cannot be called ejection, and the tool 101 can be rotated by the force of the liquid falling.

[0118] The nozzle 7 can have various structures, such as those known to exist. The structure of the nozzle used to implement the implementation of liquid flow (such as an embodiment spraying out a stream of water or an embodiment spraying out in a shower-like manner) is known. Furthermore, the nozzle 7 can be configured to switch between different liquid flow implementations or it can be configured not to switch. In the former case, the switching state of the nozzle 7 can be the same or different depending on whether it is supplying processing fluid or supplying fluid to rotate the spindle 37.

[0119] The structure for mounting and positioning the nozzle 7 can be various, for example, it can be the same as a known structure. Specifically, for example, the nozzle 7 can be detached from the machine body 3. It should be noted that in this case, the nozzle 7 can be regarded as a different component from the machining machine 1, just like the tool 101 and the workpiece 103. The nozzle 7 can move during processing and can be positioned in a certain position. The positioning of the nozzle 7 relative to a specified component (e.g., the spindle 37) can be performed manually or by a robot. In the latter case, positioning can be performed automatically by the control unit 5 or by operation relative to an operating unit (not shown) of the machining machine 1. In an embodiment where the position of the nozzle 7 can be changed, the position of the nozzle 7 can be the same or different when supplying processing fluid and when supplying fluid to rotate the spindle 37 during the operation obtained at the reference position.

[0120] In such Figure 2 In the example shown, nozzle 7 is located at the front end of a bellows-shaped (notation omitted) structure that maintains its shape. The end opposite to the bellows-shaped nozzle 7 is connected to a block (notation omitted) with a flow path. The block can be fixed to the spindle head 35 using a suitable tool. Therefore, nozzle 7 is movable relative to workpiece 103 and tool 101 (excluding rotation about the axis of tool 101), and its specific position and orientation can be determined by manually deforming the bellows. Figure 2 In this process, the nozzle 7 is positioned such that the machining fluid and the fluid used to rotate the spindle 37 are impacted in the tangential direction of the cutting edge 101a relative to the cutting edge 101a, which is the cutting edge of the tool 101.

[0121] (Main body of the supply department)

[0122] The structure of the supply unit body 47 can be suitably configured according to the type of processing fluid. For example, in embodiments where the processing fluid is a cutting fluid, grinding fluid, or polishing fluid, the supply unit body 47 can be the same as or use the structure of a device that supplies these processing fluids in general machine tools. Furthermore, in embodiments where the processing fluid is water, the supply unit body 47 can be configured to supply water from the factory equipment and has a valve that allows and prevents the supply of water to the nozzle 7.

[0123] In the example shown, the main body 47 of the supply section is, for example, a processing fluid supply source 49 for supplying processing fluid and a control valve 53 for controlling the flow of processing fluid.

[0124] In embodiments where the processing fluid is a cutting fluid, grinding fluid, polishing fluid, or similar fluid, the processing fluid supply source 49, for example (not specifically illustrated), includes a tank for storing the processing fluid and a pump for discharging the processing fluid from the tank. The control valve 53 may only allow or prevent the flow of the processing fluid, or it may be capable of controlling the flow rate and / or pressure. Furthermore, the control valve 53 may be configured by combining multiple valves. Based on instructions from the control unit 5, the pump (processing fluid supply source 49) and / or the control valve 53 operate to control the supply, flow rate, and / or pressure of the processing fluid.

[0125] Although not specifically illustrated, the supply unit body 47 may have a compressed air supply source, which can mix the processing fluid with compressed air to spray out a spray of processing fluid. The fluid flowing out of the nozzle 7 to obtain a reference position may be compressed air supplied from such a supply source.

[0126] In this embodiment, the fluid supply unit 9 is considered part of the processing machine 1. In such cases, the fluid supply unit 9 can be provided in an embodiment where it appears to be part of the processing machine 1, or it can be provided in an embodiment where it cannot be considered part of the processing machine 1. For example, part or all of the fluid supply unit 9 may be integrated with... Figure 1 The mechanical body 3 shown is housed together with a frame (not shown), or it may be housed separately from the mechanical body 3 in a different frame. Part or all of the fluid supply unit 9 may be disposed within or on the base 21 of the mechanical body 3.

[0127] (Control Department)

[0128] like Figure 4 The control unit 5 shown may include, for example, a computer and be constituted therefrom. Although not specifically illustrated, the computer may include a CPU (central processing unit), ROM (read-only memory), RAM (random access memory), and external storage, and constitute a device therefrom. Figure 4 In this text, RAM and / or external storage devices are represented as storage unit 67. Various functional units (59, 61, 63, and 65) for control and other functions are constructed by the CPU executing programs stored in ROM and / or external storage devices. It should be noted that control unit 5 may include logic circuitry that performs only certain processing.

[0129] Control unit 5 is a conceptual unit that controls the entire processing machine 1. Control unit 5 can be centralized in one location using hardware, or it can be distributed across multiple locations. In the latter example, separate hardware units are provided for controlling the main machine body 3 and for controlling the fluid supply unit 9. Both can be controlled synchronously, or they can be controlled independently. Synchronization can be achieved by one component acting based on a signal from the other, or it can be achieved by providing a higher-level control unit for both components.

[0130] The control unit 5, as a functional unit for control, includes functional units (59, 61, and 63) for controlling the main machine body 3 and a fluid control unit 65 for controlling the fluid supply unit 9. More specifically, the former includes a movement control unit 59 for controlling the relative movement of the spindle 37 and the worktable 25 during machining, a rotation control unit 61 for controlling the rotation of the spindle 37 during machining, and a reference position acquisition unit 63 for controlling the action when a reference position is acquired. It should be noted that some of these various functional units can be shared.

[0131] The motion control unit 59 controls the drive source that drives the moving parts, for example, based on the detection values ​​of position sensors that detect the positions of the moving parts (25, 31, or 33) on each axis (e.g., the X-axis, Y-axis, or Z-axis). It should be noted that for axes other than the axis in the first direction where the reference position is obtained (in the illustrated example, the Z-axis), position sensors may not be required. Alternatively, for other axes, open-loop control may be performed without feedback control based on position sensors.

[0132] exist Figure 4 In the example of a three-axis structure, the Z-axis motor 39 is controlled based on the Z-axis position sensor 69 that detects the Z-axis position of the Z-axis moving part 33 in the Z direction. The Z-axis position of the Z-axis moving part 33 referred to here is, for example, the Z-axis position in an absolute coordinate system (or, in other view, a mechanical coordinate system), or more precisely, the Z-axis position relative to a component that is intentionally stationary in the Z direction (e.g., the Y-axis moving part 31).

[0133] The aforementioned position sensor can be a sensor that directly detects the position of the moving part (as shown in the illustration), or a sensor that detects the amount of motion of the drive source that drives the moving part (e.g., the rotation of a rotary electric motor). From another perspective, feedback control based on the position sensor's detected value can be a fully closed-loop feedback control (as shown in the illustration) or a semi-closed-loop feedback control. The specific structure of the position sensor can be various, such as a linear encoder (as shown in the illustration) or a laser length measuring device. The linear encoder can be optical or magnetic, and can be absolute or incremental.

[0134] The rotation control unit 61 controls the spindle motor 41 that drives the spindle 37 based on the detection value of the rotation sensor 71 that detects the rotation (more specifically, the rotational speed) of the spindle 37. The rotation sensor 71 may directly detect the rotation of the spindle 37, or it may detect the rotation of the spindle motor 41 (as shown in the figure). Alternatively, the rotation sensor 71 may be located on the spindle motor 41 (as shown in the figure), or it may not be located there. Furthermore, since the spindle 37 and the spindle motor 41 share a portion of each other, the aforementioned distinction may not apply. The specific structure of the rotation sensor 71 can be various, such as an encoder or a decoder. The encoder may be optical or magnetic, and may be absolute or incremental.

[0135] Controlled by the motion control unit 59 and the rotation control unit 61, for example, it can be performed according to the NC program D1 stored in the storage unit 67 (RAM and / or external storage device). The NC program D1 defines one or more values ​​for at least one of the following: the absolute coordinates (mechanical coordinates) of the target position, the relative coordinates of the target position, the target movement amount, and the target rotation speed. Furthermore, the motion control unit 59 and the rotation control unit 61 control the drive source (39 and 41, etc.) to achieve the various target values ​​based on the detection values ​​of the position sensor (69, etc.) and the rotation sensor 71.

[0136] The obtained reference position information D3 is stored in the storage unit 67 (RAM and / or external storage device). In the control performed according to the NC program D1, the information D3 is appropriately utilized. Various implementation methods are possible for its utilization.

[0137] For example, NC program D1 contains a program (one or more blocks) that moves the spindle 37 (tool 101) in the Z-axis direction to a relative position (target position) set relative to a reference position. Thus, the reference position can be utilized.

[0138] The relative position to the reference position, within one or more blocks, can be defined based on the relative coordinates to the reference position, or based on the amount of movement from the reference position. Furthermore, the movement of the relative position in the Z-axis direction may or may not be accompanied by movement on other axes.

[0139] In this usage method, the relationship between the movement of the reference position and the machining content can be arbitrary. For example, a groove can be formed to a predetermined depth by moving the cutting edge (tool 101) from a reference position or a position set further +Z than the reference position to a position set further -Z than the reference position towards the -Z side. That is, the reference position can be used as a position to define the cutting depth from the upper surface of the workpiece 103.

[0140] Unlike the embodiments described above, a reference position can be used in embodiments where no reference position is specified in the NC program. For example, the reference position can be used to correct the position detected by the NC program in the mechanical coordinates or by the position detected by the position sensor, based on either the actual position of the detection tool 101 and / or workpiece 103 or the position of the tool 101 and / or workpiece 103 assumed in the machine coordinates. It should be noted that such a use can also be regarded as moving the spindle 37 to a relative position set with respect to the reference position.

[0141] The reference position acquisition unit 63 controls the mechanical main body 3 (more specifically, the Z-axis motor 39) and the fluid supply unit 9 in a manner that enables the operation of acquiring a reference position. Figure 4 The arrow representing this control is omitted in the diagram. The reference position acquisition unit 63 can be controlled by the Z-axis motor 39, and the fluid control unit 65 can be controlled by the fluid supply unit 9 via the movement control unit 59. Alternatively, the reference position acquisition unit 63 may be partially shared with the movement control unit 59 and the fluid control unit 65.

[0142] The reference position acquisition unit 63 acquires the Z-axis position of the spindle 37 when the spindle 37 decelerates due to rotational slowdown and uses it as a reference position. At this time, the sensor for detecting the position of the spindle 37 is, for example, the Z-axis position sensor 69 used by the movement control unit 59 for feedback control. Therefore, since a specific reference position is determined based on the detection value from the same sensor and a relative position set relative to that reference position, machining accuracy can be improved.

[0143] Although not illustrated, the sequence of actions used to obtain the reference position may differ from the sequence of actions during machining, and is defined by a program different from the NC program. This other program includes, for example, a program executed by the CPU to construct the reference position acquisition unit 63. The program used to construct the reference position acquisition unit 63 may be pre-stored in the storage unit 67 by the manufacturer of the machining machine 1, or it may be installed into an existing machining machine 1 by the operator. Unlike the foregoing description, a portion of the sequence of actions used to obtain the reference position is defined by a program created in the same manner as the NC program.

[0144] The sensor that detects the deceleration of rotation for obtaining a reference position can be a rotation sensor 71 (example shown in the figure) used by the rotation control unit 61 for feedback control during machining, or other sensors. In the former embodiment, the structure can be simplified, for example. In the latter embodiment, for example, a sensor that can detect minute changes in rotation angle more accurately than the rotation sensor 71 can be provided, thus detecting the deceleration of rotation with high precision. It should be noted that in the description of this embodiment, for ease of explanation, the former embodiment is sometimes presented as a premise.

[0145] The fluid control unit 65 controls the fluid supply unit 9 to supply machining fluid, for example, when machining is being performed and when a reference position is obtained. Specifically, the controlled objects are, for example, the control valve 53 and the machining fluid supply source 49 (e.g., a pump not shown).

[0146] (Order of obtaining the reference position)

[0147] Figure 5 (a) Figure 5 (b) and Figure 6 The summary is as described above.

[0148] The operation used to obtain the reference position shown in these figures can begin when the operator performs a prescribed operation on the operating unit (not shown) of the machining machine 1, or it can begin automatically by the control unit 5 without operator operation. In the latter embodiment, examples of when the control unit 5 automatically obtains the reference position include, for example, when a series of machining operations prescribed by the NC program begins, when a specific machining operation begins in the series of machining operations, and when a wear amount (not shown) is detected by a sensor (not shown) that detects wear on the tool 101 exceeding a predetermined threshold.

[0149] When the reference position is achieved, the control unit 5 controls the fluid supply unit 9 to supply machining fluid from the nozzle 7 to the tool 101. At this time, the control unit 5, for example, sets the spindle motor 41 to a torque-free state; that is, no power is supplied to the spindle motor 41. As a result, the spindle 37 rotates as shown by arrow a1. Furthermore, the control unit 5 controls the Z-axis motor 39, as shown by arrow a2, to move the spindle 37 toward the worktable 25.

[0150] In the process of achieving the reference position, the rotation and movement of the spindle 37 can begin simultaneously, or one can begin before the other. Furthermore, the outflow of machining fluid from the nozzle 7 can continue until the rotation of the spindle 37 is detected to have stopped, or it can stop before a deceleration of the spindle 37's rotation (due to contact) is detected. In the former embodiment, for example, the spindle 37 can be reliably rotated until its rotation decelerates due to contact with the workpiece 103. In the latter embodiment, for example, by reducing the rotational speed of the spindle 37 when it contacts the workpiece 103, the possibility of deterioration of the tool 101 and / or the workpiece 103 can be reduced.

[0151] The rotational speed of the spindle 37 when the reference position is obtained (or, from another perspective, the pressure of the fluid, etc.) can be a suitable rotational speed. For example, the rotational speed at this time can be sufficiently lower than the rotational speed when machining is performed by the tool 101. From another perspective, the inertial torque of the spindle 37 and the tool 101 and / or the torque applied to the tool 101 from the outside can be smaller than the torque during machining.

[0152] The specific rotational speed or torque used for machining or obtaining a reference position can be appropriately set according to the specific structure of the machine body 3 to which this embodiment is applied, the type of tool 101, the type of workpiece 103, etc. For example, the rotational speed during machining (more specifically, when the tool 101 is about to contact the workpiece 103 or during direct contact) is 2000 rpm (rotations per minute) or more, while the rotational speed for obtaining a reference position (more specifically, when the tool 101 is about to contact the workpiece 103) is 200 rpm or less, 100 rpm or less, 50 rpm or less, or 10 rpm or less. From another perspective, the rotational speed for obtaining a reference position can be less than 1 / 10 or less of the rotational speed used for machining.

[0153] It should be noted that the rotational speed used for machining can be set by, for example, the operator of machining machine 1. Alternatively, the rotational speed used for machining can be specified by an NC program. Therefore, when considering machining machine 1 in the production stage, the relative relationship between the rotational speed used for machining and the rotational speed used to obtain the reference position can not be considered a component of machining machine 1. However, regarding the rotational speed used for machining, if the lower limit set by the operator is set to a lower limit recommended by machining machine 1 or the manufacturer in specifications, the relationship can be determined by comparing the lower limit with the rotational speed used to obtain the reference position. When referring to the rotational speed used for machining specified by the NC program, if the rotational speed specified by the NC program is not constant, the lowest possible rotational speed can be compared with the rotational speed used to obtain the reference position.

[0154] It should be noted that the rotational speed used to obtain the reference position can be set by, for example, the manufacturer of the machining machine 1, or by the operator of the machining machine 1. Alternatively, the information regarding the rotational speed used to obtain the reference position can be pre-stored in the storage unit 67 and input to the control unit 5 via operation of an operation unit (not shown) relative to the machining machine 1. It should be noted that when the rotational speed used to obtain the reference position is set by the operator, similar to the rotational speed used for machining, when considering the machining machine 1 in the flow stage, the rotational speed used to obtain the reference position can be considered not as a component of the machining machine 1.

[0155] The movement speed of the spindle 37, which performs the action of obtaining the reference position, is suitable. Furthermore, this movement speed can be constant or variable (it can be variable speed). As an example of the latter implementation, a method that decelerates when approaching a predicted position of the reference position can be given. The predicted position can be input to the control unit 5 via an NC program or by the operator through operation of an operation unit (not shown). Furthermore, the movement speed when the tool 101 contacts the workpiece 103 for obtaining the reference position can be slower, equal, or faster than the movement speed when the tool 101 contacts the workpiece 103 for machining. The movement speed can be set by the manufacturer of the machining machine 1 or by the operator of the machining machine 1. Alternatively, the movement speed information can be pre-stored in the storage unit 67 or input to the control unit 5 through operation of an operation unit (not shown) on the machining machine 1. As an example of the movement speed when the tool 101 contacts the workpiece 103 for obtaining the reference position, this movement speed is 10 mm / min or less. Of course, the movement speed can be faster.

[0156] The control unit 5 can control the Z-axis motor 39 to move the spindle 37 to a position closer to the -Z side than the predicted position of the reference position. Furthermore, the spindle 37 can decelerate (and stop) in the Z direction using the force received from the workpiece 103. The control unit 5 controls the Z-axis motor 39 in a manner that generates appropriate torque to prevent the force exerted by the tool 101 on the workpiece 103 towards the -Z side from becoming excessive. Furthermore, the control unit 5 can detect the deceleration or stopping of the spindle 37 in the Z direction based on the detection values ​​of appropriate sensors, and stop the drive of the Z-axis motor 39 accordingly. Examples of such sensors include the Z-axis position sensor 69 and a sensor that detects the power supplied to the Z-axis motor 39.

[0157] Furthermore, when the control unit 5 detects a deceleration in the rotation of the spindle 37 caused by the contact between the tool 101 and the workpiece 103, it stops the movement of the spindle 37 towards the -Z side. This deceleration detection can be the same as the detection of rotational deceleration when the position of the spindle 37 in the Z direction is used as a reference position. In this case, the control unit 5 can obtain the position of the spindle 37 at the time of rotational deceleration detection and use it as a reference position; it can also obtain the position of the spindle 37 from the time of rotational detection until the movement towards the -Z side stops and use it as a reference position; or it can obtain the position of the spindle 37 after the movement towards the -Z side stops and use it as a reference position. However, unless otherwise specified in this specification, regardless of such strictness, in any of these embodiments, the position of the spindle 37 at the time of rotational deceleration is detected. It should be noted that, unlike the above, it is possible to separately detect (determine) the detection of rotational deceleration used to stop the movement towards the -Z side and the detection of rotational deceleration used to obtain the reference position.

[0158] As described above, when the control unit 5 is performing the action of rotating the tool 101 and bringing it closer to the workpiece 103 while the fluid from the nozzle 7 is being passed through, and the rotation sensor 71 (or other sensor) detects the deceleration of the rotation, the detection value of the Z-axis position sensor 69 at this time is stored in the storage unit 67 as a reference position.

[0159] The detection of deceleration caused by the contact between tool 101 and workpiece 103 can be appropriately performed. For example, control unit 5 receives a signal in real time corresponding to the rotational speed (or rotational velocity) detected by rotation sensor 71. Furthermore, control unit 5 determines that deceleration has occurred when the rotational speed specified by the received signal falls below a predetermined threshold. Moreover, for example, in an implementation where torque is applied to tool 101 only during the initial movement of tool 101 towards the -Z side, and rotation is decelerated from the initial movement, rotation can be stopped when the absolute value of the rate of change of rotational speed exceeds a predetermined threshold (when deceleration occurs rapidly). This determination can be performed by rotation sensor 71, not control unit 5. In other words, control unit 5 can receive a signal from rotation sensor 71 regarding the determination result of deceleration.

[0160] The threshold value can be set by the manufacturer of the processing machine 1 or by the operator of the processing machine 1. Alternatively, the threshold information can be pre-stored in the storage unit 67 and input to the control unit 5 via operation of an operation unit (not shown) relative to the processing machine 1. The specific value of the threshold can be suitably set. In an embodiment where deceleration is detected when the rotational speed falls below a predetermined threshold, the threshold can be substantially the size corresponding to the detection of a stop in rotation (0 rpm). Examples of rotational speed thresholds include any value below 20 rpm, any value below 10 rpm, any value below 5 rpm, or any value below 1 rpm. This threshold can be suitably combined in a way that does not contradict the example regarding the rotational speed before contact.

[0161] It should be noted that, Figure 5 (a) and Figure 5 (b) Part of the action shown can be performed manually, by an operator operating an unshown control unit on the machining machine 1. This part can include, for example, rotation of the spindle 37 and / or movement of the spindle 37 in the -Z direction. When the spindle 37 is moved in the -Z direction by the operator, a manual pulse generator (not shown) can be used.

[0162] The description up to this point has used workpiece 103 as an example of the reference component that tool 101 abuts against when a reference position is obtained. However, the reference component can be any other component that is stationary relative to workpiece 103. For example, the reference component can be worktable 25 or clamp 27, or a dedicated component that is detachably fixed to worktable 25 or clamp 27 and used to obtain the reference position. However, the aforementioned dedicated component can be considered as part of worktable 25 or clamp 27. In the description of obtaining the reference position in this invention, the term workpiece 103 can be replaced with the term other reference components, provided that there is no contradiction.

[0163] (Summary of implementation methods)

[0164] As described above, the machining machine 1 includes a spindle 37, a holding unit (table 25), a drive unit (Z-axis motor 39), a position sensor (Z-axis position sensor 69), a rotation sensor 71, and a control unit 5. The spindle 37 holds one of the tool 101 and the workpiece 103 (in the illustrated example, the tool 101). The holding unit (table 25) holds the other of the tool 101 and the workpiece 103 (in the illustrated example, the workpiece 103). The Z-axis motor 39 moves one of the spindle 37 and the table 25, i.e., the movable part (spindle 37), in a predetermined first direction (Z direction). The Z-axis position sensor 69 detects the position of the spindle 37 in the Z direction. The rotation sensor 71 detects the rotation of the spindle 37. When the workpiece 103 is machined by the tool 101 while the spindle 37 is rotating, the control unit 5 controls the Z-axis motor 39 based on the detection value of the Z-axis position sensor 69, moving the spindle 37 in the Z direction to a relative position set relative to a predetermined reference position. Furthermore, when the workpiece 103 or a component that is stationary relative to the workpiece 103 (such as the worktable 25) is used as a reference component, the control unit 5 detects the rotation of the spindle 37 by means of the rotation sensor 71, and when the spindle 37 moves in the Z direction and the tool 101 contacts the reference component in the Z direction, the control unit 5 inputs a predetermined signal and obtains the position detected by the Z-axis position sensor 69 as the reference position.

[0165] In another viewpoint, the workpiece manufacturing method of this embodiment uses a machining machine 1 to process a workpiece 103 using a tool 101 to obtain a workpiece. The machining machine 1 includes a spindle 37, a holding part (table 25), a drive part (Z-axis motor 39), a position sensor (Z-axis position sensor 69), and a rotation sensor 71. The spindle 37 holds one of the tool 101 and the workpiece 103 (in the illustrated example, the tool 101). The holding part (table 25) holds the other of the tool 101 and the workpiece 103 (in the illustrated example, the workpiece 103). The Z-axis motor 39 moves one of the spindle 37 and the table 25, i.e., the movable part (spindle 37), in a predetermined first direction (Z direction). The Z-axis position sensor 69 detects the position of the spindle 37 in the Z direction. The rotation sensor 71 detects the rotation of the spindle 37. This manufacturing method includes the following steps. When the workpiece 103 or a component that is stationary relative to the workpiece 103 (e.g., the worktable 25) is used as a reference component, the steps are as follows: While the spindle 37 is rotating, the spindle 37 is moved in the Z direction to bring the tool 101 into contact with the reference component (steps ST1 and ST2). Based on the detection result from the rotation sensor 71, the deceleration of the spindle 37's rotation caused by the contact between the tool 101 and the reference component is detected (step ST3). The position of the spindle 37 in the Z direction when deceleration is detected is obtained using the Z-axis position sensor 69 (step ST4).

[0166] Therefore, for example, as mentioned above, tool 101 and the reference component (workpiece 103 in this case) in contact with tool 101 may not be conductive. Furthermore, it is not necessary to replace tool 101 with a conductive approximation tool.

[0167] The specified signal that triggers the acquisition of the reference position is a deceleration (which may include stopping) signal from the rotation sensor 71 corresponding to the rotation of the spindle 37. The signal referred to herein, as described, may be, for example, a signal displaying the rotational speed, or a signal determining whether deceleration has occurred.

[0168] In this case, since the actions, for example, from the detection of deceleration to the acquisition of the reference position are performed automatically, it is more efficient than an operator-interventional implementation (which is included in the technology of this invention). See also Figure 7 (b) and Figure 7 (c) (described later) can reduce the deviation between the deceleration and the reference position. This can improve the accuracy of the reference position and reduce the operator's workload.

[0169] The first direction (Z direction) for obtaining the reference position can be a direction that intersects (e.g., is orthogonal) the rotation axis of the spindle 37. In another viewpoint, as illustrated in the figure, in an embodiment where tool 101 is a turning tool, the outer periphery of the turning tool can contact a reference component (e.g., workpiece 103) when the reference position is obtained. Alternatively, unlike the figure example, in an embodiment where tool 101 is a turning tool, the outer periphery of the reference component (e.g., workpiece 103) can abut against tool 101 when the reference position is obtained.

[0170] In this situation, although there may be influences such as the structure of the turning tool (tool 101), compared to the embodiment where the tip of the turning tool contacts the workpiece 103 (which is included in the technology of this invention), it is easier to reduce the rotation speed of the turning tool by having it contact the workpiece 103. This is because the distance from the rotation axis of the turning tool to the contact point between the turning tool and the workpiece 103 is more likely to be longer, and / or the contact area between the outer periphery of the turning tool and the workpiece 103 is more likely to be increased.

[0171] The spindle 37, which holds one of the tool 101 and the workpiece 103, can hold the tool 101. The holding part for the other of the tool 101 and the workpiece 103 can be a worktable (worktable 25 and / or fixture 27) located closer to the first direction (Z direction) than the spindle 37 and holding the workpiece 103. The tool 101 can be a grinding stone that performs grinding through its outer peripheral portion (the portion outside the axis of rotation; cutting edge 101a). The reference position can be the position where the outer peripheral portion of the tool 101 abuts against the workpiece 103 or the worktable (more specifically, the surface of these other side (+Z side) in the Z direction).

[0172] In this situation, for example, the distance (radius of the cutting edge) from the rotation axis CL of tool 101 to the point where tool 101 contacts workpiece 103 can be ensured to be relatively large, thus making it easier to slow down the rotation of tool 101. As a result, the method for obtaining the reference position of this embodiment can be easily applied. Furthermore, since the position where the cutting edge 101a abuts is used as the reference position, the cutting depth (groove depth) from workpiece 103 can be controlled with high precision. When the wear of the cutting edge 101a increases, the reference position can be obtained again, and the accuracy of the cutting depth can be maintained.

[0173] The processing machine 1 may further include a fluid supply unit 9. Here, a tool 101 or a workpiece 103 (in the illustrated example, tool 101) held on the spindle 37 is taken as the rotating object. At this time, the fluid supply unit 9 can realize the rotation of the spindle 37 by causing fluid to impact the outer surface of the rotating object to obtain a reference position.

[0174] In this situation, for example, the spindle 37 can be rotated to obtain a reference position by a different drive source than the drive source (spindle motor 41) that drives the spindle 37 for machining. Therefore, compared to an embodiment where the spindle 37 is rotated by the spindle motor 41 to obtain a reference position (which is included in the technology of this invention), the rotational speed at which the reference position is obtained can be set without being affected by the performance of the spindle motor 41. Furthermore, it is easier to reduce, for example, the rotational speed at which the reference position is obtained. And, compared to an embodiment where, for example, the fluid only impacts the outer surface of the spindle 37 (which is included in the technology of this invention), see [reference]. Figure 8 (b) (described later), it is easy to use the device for supplying machining fluid to the tool 101 or workpiece 103 during machining as a device for obtaining a reference position. From another perspective, in an embodiment where the device for supplying machining fluid during machining is used for obtaining a reference position, the structure of the device can be simplified. It should be noted that, as an example of a device for obtaining a reference position, a device for supplying machining fluid has been described; however, other devices such as devices for supplying cleaning gas can also be used.

[0175] Tool 101 may be a grinding stone (e.g., a cutting edge) that performs grinding through its outer periphery. The fluid supply unit 9 enables the rotation of the spindle 37, which achieves a reference position by impacting fluid in a tangential direction relative to the outer periphery of tool 101.

[0176] In this situation, the aforementioned effect can be achieved, for example, by making the device used to supply the processing fluid easily usable for obtaining a reference position. Furthermore, since the fluid impacts the tool 101 at a position with a longer distance from the rotation axis, it is easier to rotate the tool 101. As a result, for example, the burden on the fluid supply unit 9 when obtaining a reference position is easily reduced.

[0177] The fluid supply unit 9 may have a nozzle 7 for supplying a processing fluid, which is a fluid supplied to achieve the rotation of the spindle 37 when the reference position is obtained.

[0178] In this case, compared to, for example, an embodiment that supplies fluid from a nozzle different from nozzle 7 when a reference position is obtained (this embodiment is included in the technology of the present invention). See reference Figure 8 (a) described later) can simplify the structure. Furthermore, for example, when the tool 101 is replaced with a different type of structure, the position of the nozzle used to obtain the reference position can be adjusted by adjusting the position of the nozzle 7 for processing, thus reducing the operator's workload.

[0179] In the action of obtaining the reference position, the rotational speed of the spindle 37 before the tool 101 contacts the reference component (e.g., workpiece 103) can be lower than the rotational speed of the spindle 37 when the tool 101 is machining the workpiece 103.

[0180] In this case, for example, the possibility of tool 101 and / or reference components deteriorating when the reference position is obtained can be reduced. It should be noted that, as described, since the rotational speed used for machining is set by the operator, such characteristics are not specific to the machining machine 1 in the flow stage.

[0181] When machining workpiece 103, the spindle speed 37 can be set to 2000 rpm or higher. During the operation to obtain a reference position, the spindle speed 37 before the tool 101 contacts the reference component (e.g., workpiece 103) can be set to 200 rpm or lower. Furthermore, from another perspective, during the operation to obtain a reference position, the spindle speed 37 before the tool 101 contacts the reference component can be set to 1 / 10 or lower than the spindle speed 37 during machining workpiece 103.

[0182] In these situations, such as when the rotational speed for obtaining the reference position is sufficiently low compared to the rotational speed used for machining, the likelihood of at least one of the tools deteriorating due to contact between the tool 101 and the reference component during the reference position obtaining operation can be reduced.

[0183] Spindle 37 can be supported by air bearings (such as...) Figure 3 The bearing shown is 43) support.

[0184] In this situation, for example, compared to other types of bearings, the frictional force required to stop the spindle 37 is smaller, allowing the spindle 37 to rotate with a smaller torque. As a result, during actions such as obtaining a reference position, the torque applied to the spindle 37 from the outside and / or the inertial torque of the spindle 37 can be reduced. This further reduces the torque applied by the tool 101 to the workpiece 103 when the tool 101 contacts the workpiece 103. Consequently, the possibility of deterioration of the tool 101 and / or reference components during the acquisition of the reference position can be reduced.

[0185] It should be noted that in the above embodiments, the worktable 25 is an example of a holding part that holds the tool and the workpiece on the other side. The Z direction is an example of a first direction. The spindle 37 is an example of a movable part. The Z-axis motor 39 is an example of a drive part. The Z-axis position sensor 69 is an example of a position sensor. The workpiece 103, the fixture 27, and the worktable 25 are examples of reference components. The machining fluid is an example of a fluid.

[0186] (Variation example)

[0187] The following describes various variations. The descriptions of the variations are presented in a general order as follows.

[0188] • Three variations of detecting the deceleration of the rotation of the main spindle 37 ( Figure 7 (a) ~ Figure 7 (c)

[0189] • Three variations of the rotation method of spindle 37 ( Figure 8 (a) ~ Figure 8 (c)

[0190] (A variation of deceleration detection)

[0191] Figure 7 (a) to Figure 7 (c) These are modified examples showing the detection of deceleration of the rotation of the spindle 37, which is used to obtain the reference position. In these figures, the state of the tool 101 and the spindle 37 are schematically shown from the side.

[0192] In such Figure 7 In a variation of (a), the deceleration (rotation of the spindle 37) of the spindle 37, which is used to obtain the reference position, is detected by a rotation sensor 71A, which is different from the rotation sensor 71 provided in the spindle motor 41. The rotation sensor 71A detects, for example, the rotation of the tool 101 (or the spindle 37, hereinafter the same) in a non-contact manner. Such a rotation sensor 71A can be, for example, an optical or magnetic sensor.

[0193] Specifically, for example, tool 101 (as described, may include an instrument for mounting the tool body to spindle 37) has a detection portion 72 that moves circumferentially by rotation of spindle 37. The detection portion 72 may be a part located about the axis of rotation of spindle 37, and may form a repeating pattern covering approximately the entire circumference of spindle 37 about the axis of rotation. In an optical type, the detection portion 72 may be, for example, a component that reflects or transmits light. In a magnetic type, the detection portion 72 may be, for example, a magnet. Furthermore, rotation sensor 71A detects the circumferential movement of the detection portion 72 relative to rotation sensor 71A based on changes in the light or magnetism to be detected, thereby detecting the rotation of tool 101.

[0194] The rotation sensor 71A can be a feedback sensor used during machining, or a dedicated sensor for obtaining a reference position, replacing the rotation sensor 71. As explained in the former embodiment, the structure can be simplified. Furthermore, through fully closed-loop feedback control, improved machining accuracy can be expected. In the latter embodiment, using the rotation sensor 71A, which is more capable of detecting minute changes in rotation angle than the rotation sensor 71, allows for high-precision detection of rotational deceleration. It should be noted that the detection of deceleration based on the detected rotational speed value can be performed by either the control unit 5 or the rotation sensor 71A, as in the previous embodiment.

[0195] As described above, the detected part 72 may be located on the spindle 37, or held on the tool 101 or workpiece 103 on the spindle 37. The rotation sensor 71A may be a non-contact sensor that detects the rotation of the spindle 37 based on the detection of the passing of the detected part 72 in the circumferential direction of the spindle 37.

[0196] In this case, for example, the rotation of the tool 101, which is directly affected by contact, can be detected, thus improving the detection accuracy of the reference position. Furthermore, a rotation sensor 71A suitable for detecting low-speed rotation of the tool 101 with high detection accuracy can be easily attached. As a result, for example, the technology of the present invention can be easily applied to existing machining centers 1.

[0197] exist Figure 7 In a variation of (b), the control unit 5 does not acquire the reference position when a predetermined signal (corresponding to a deceleration signal) is input from the rotation sensor 71, but rather when a predetermined signal is input from the operator-operated input unit 75. More specifically, for example, the rotational speed detected by the rotation sensor 71 is displayed on the display 73 in real time. While the tool 101 is rotating and moving in the -Z direction, the operator determines, based on the rotational speed displayed on the display 73, whether the rotation of the spindle 37 is decelerated due to contact between the tool 101 and the workpiece 103. Furthermore, when it is determined that the rotation is decelerating, the operator performs a predetermined operation on the input unit 75, inputting a signal indicating the acquired reference position from the input unit 75 to the control unit 5.

[0198] In this implementation, the movement of tool 101 towards the -Z side can be performed, for example, by the operator performing a prescribed operation on input unit 75 (more specifically, for example, a manual pulse generator not shown included in input unit 75). Furthermore, when the operator determines that the spindle 37 is decelerating based on the rotational speed displayed on display 73, the operation of moving tool 101 towards the -Z side is stopped or the operation of resuming movement is not restarted. Then, as described above, the operation of obtaining the reference position is performed. When the operation of obtaining the reference position is performed, control unit 5 obtains the position detected by Z-axis position sensor 69 at this time and uses it as the reference position.

[0199] It should be noted that, as explained above, the signal indicating the acquisition of the reference position may be input not during the movement of tool 101 towards the -Z side, but after the movement of tool 101 towards the -Z side has stopped. From another perspective, for example, when the Z-axis position sensor 69 acquires the Z-direction position of the spindle 37 at the moment of detected deceleration of the spindle 37's rotation and uses it as the reference position, the period of detecting the deceleration of the rotation is different from the period when the Z-axis position sensor 69 detects the position as the reference position.

[0200] The structure of the display 73 is arbitrary. For example, the display 73 can be a display capable of displaying other information, or it can be a display that only displays rotation speed. As the former, examples include liquid crystal displays or organic EL (electro-luminescence) displays capable of displaying arbitrary images. Such a display can be a touch panel included in the input section 75. And as the latter, examples include LED (light emitting diode) or liquid crystal displays that display numbers through multiple segments, displays that rotate components depicting text, or displays that indicate values ​​on a scale using a rotating pointer.

[0201] The structure of the input unit 75 is arbitrary. The input unit 75 shown in the figure can be considered as one or more input devices included in the conceptual display processing machine 1. Although not shown, the input unit 75 may include, for example, a touch panel, a mechanical switch, and a manual pulse generator. The operation of obtaining the indicated reference position can be performed using, for example, a touch panel or a mechanical switch.

[0202] As explained above, the processing machine 1 may include: a display 73 that displays the rotational speed of the spindle 37 detected by the rotation sensor 71, and an input unit 75 that accepts operator input. The signal that triggers the acquisition of the reference position may be a signal from the input unit 75.

[0203] In this situation, for example, when applying the technology of the present invention to an existing machining machine 1, little or no changes are needed to the program of the control unit 5. As a result, the technology of the present invention can be easily applied to an existing machining machine 1. Furthermore, the criteria for determining whether a deceleration of the rotation of the tool 101 occurs can be flexibly and easily changed depending on the type of tool 101 and / or the material of the workpiece 103.

[0204] Figure 7 A variation of (c), simply put, is Figure 7 (a) variation and Figure 7 (b) is a combination of variations. That is, the rotation of tool 101 is directly detected by a non-contact rotation sensor 71A. Furthermore, the detected rotational speed is displayed on the display 73, and the operator then determines whether there is deceleration.

[0205] (A variation of the spindle rotation method)

[0206] Figure 8 (a) to Figure 8 (c) are figures showing variations of the rotation method of the main axis 37, which is used to obtain the reference position.

[0207] Figure 8 (a) is a schematic diagram of the tool 101 and workpiece 103 viewed from the axial direction of the spindle 37 (not shown here).

[0208] In this variation, fluid is supplied from a nozzle 7A other than the nozzle 7 supplying the processing fluid, and the tool 101 is rotated by this fluid. Furthermore, various descriptions of the nozzle 7 in the description of the embodiment (the nozzle 7 itself, the type of fluid supplied from the nozzle 7, the supply section used to supply fluid to the nozzle 7, and the position and direction of fluid impact, etc.) can be applied to the nozzle 7A as long as there is no contradiction.

[0209] The structure of nozzle 7A may be different from or the same as that of nozzle 7. The fluid supplied from nozzle 7A may be a processing fluid or a non-processing fluid. When the fluid supplied from nozzle 7A is a gas, the supply source for the fluid to nozzle 7A may be an air supply source such as a pump. The fluid supply section for supplying fluid to nozzle 7A may have a completely different structure from the fluid supply section for supplying fluid to nozzle 7, or it may share a portion of the fluid supply section. The fluid from nozzle 7A, such as the fluid from nozzle 7, may be supplied to the processing area or to an area different from the processing area.

[0210] As explained above, the fluid supply unit 9 may have a nozzle 7A, which is different from the nozzle 7 for supplying processing fluid, and is used to supply fluid that makes the spindle 37 rotate.

[0211] In this case, for example, since nozzle 7A is not a nozzle that supplies fluid for processing, there are no restrictions on the position, direction, and structure of nozzle 7A, as well as the type of fluid supplied from nozzle 7A, as there are restrictions on nozzle 7A, resulting in a high degree of freedom. As a result, for example, the fluid supply unit 9 can be configured with a structure suitable for obtaining a reference position.

[0212] Figure 8 (b) is a schematic diagram of the tool 101 and workpiece 103 viewed from the side of the spindle 37.

[0213] In this variation, with Figure 8 Similarly, in a variation of (a), a different nozzle 7B is provided, distinct from nozzle 7. The fluid from nozzle 7B impacts the spindle 37 (more specifically, the outer surface protruding from the spindle head 35) instead of the tool 101. It should be noted that, unlike the example shown in the figure, the fluid from nozzle 7 impacts the spindle 37. The various descriptions of the fluid direction, etc., in the embodiment where the fluid impacts the tool 101 can be applied to the embodiment where the fluid impacts the spindle 37, provided there are no contradictions.

[0214] In this modified example, when the fluid impacts the spindle 37, compared to an embodiment where the fluid impacts the tool 101, the variation in rotational speed used to obtain the reference position can be expected to be reduced when the tool 101 is replaced with a different type of tool.

[0215] Figure 8 (c) is equivalent to Figure 3 A partial cross-sectional view.

[0216] In this variation, the rotation of the spindle 37 used to obtain the reference position can be achieved by using a hydrostatic bearing (e.g., an air bearing), replacing or adding to the existing methods. Specifically, inside the hydrostatic bearing, when the fluid applies pressure to the spindle 37, the distribution of this pressure is made unbalanced. This causes the spindle 37 to rotate. The structure used to achieve this unbalance can be a suitable one.

[0217] In the illustrated example, a groove 77 is formed at an angle relative to the axis on the outer surface of the spindle 37. Fluid discharged from the hydrostatic bearing to the front end of the spindle 37 passes through the groove 77. As a result, the balance of pressure applied to the spindle 37 is disrupted, and a torque is applied to the spindle 37. However, this force is relatively small and has little effect on the rotation of the spindle 37 during machining.

[0218] Furthermore, although not illustrated, disequilibrium can be achieved, for example, by the shape and / or arrangement of multiple openings supplying fluid within the hydrostatic bearing. Disequilibrium can also be achieved by individually installing valves in flow paths communicating with said multiple openings. As can be seen from these examples, disequilibrium can be persistent, occurring other than when a reference position is achieved, or it can be temporary, occurring only when a reference position is achieved.

[0219] As described above, the machining machine 1 may include: an air bearing (bearing 43) supporting the spindle 37 and a pump 45 for supplying air to the bearing 43. The rotation of the spindle 37, which performs the action of obtaining a reference position, can be achieved by utilizing the pressure of the air supplied to the bearing 43 by the pump 45.

[0220] In this case, compared to an embodiment in which the tool 101 is rotated by impacting the fluid with the tool 101, the variation in rotational speed when the reference position is obtained can be expected to be reduced when the tool 101 is replaced with a different type.

[0221] The technology of the present invention is not limited to the above-described embodiments, and can be implemented through various other embodiments.

[0222] In the description of the embodiment, the reference position is defined as the position of the movable part (one of the spindle and the holding part) in the first direction (Z direction) of the absolute coordinate system. However, the reference position can be the relative position of the movable part with respect to other components (the other of the spindle and the holding part) in the first direction. In this case, the position sensor that detects the position of the movable part in the first direction can be a sensor that detects the relative position of the movable part with other components, or it can be a combination of a sensor that detects the absolute position of the movable part and a sensor that detects the absolute position of other components.

[0223] Explanation of reference numerals in the attached figures

[0224] 1. Processing machine 3. Main body of the machine 5. Control unit 7. Nozzle 9. Fluid supply unit 25. Worktable (holding unit) 37. Spindle 39. Z-axis motor (drive unit) 69. Z-axis position sensor (position sensor) 71. Rotation sensor 101. Tool 103. Workpiece (reference component).

Claims

1. A processing machine, comprising: Spindle, which holds the tool and the workpiece; A holding part that holds the other of the tool and the workpiece; A drive unit that moves one of the main shaft and the retaining unit, i.e., the movable part, in a predetermined first direction; A position sensor that detects the position of the movable part in the first direction; A rotation sensor that detects the rotation of the spindle; and The control unit, when machining the workpiece by the tool while the spindle is rotating, controls the drive unit based on the detection value of the position sensor in such a way that the movable part moves in the first direction to a relative position set relative to a predetermined reference position. When the workpiece or a component that is stationary relative to the workpiece is used as a reference component, the control unit, upon detecting the rotation of the spindle via the rotation sensor and the movable part moving in the first direction to bring the tool into contact with the reference component in the first direction, inputs a predetermined signal and obtains the position detected by the position sensor as the reference position. It also has a fluid supply unit that, when the tool or workpiece held on the spindle is a rotating object, realizes the rotation of the spindle in the action of obtaining the reference position by impacting the fluid relative to the outer surface of the rotating object.

2. The processing machine according to claim 1, wherein, The tool is a grinding stone that performs grinding through its outer periphery. The fluid supply unit realizes the rotation of the main shaft in the operation of obtaining the reference position by impacting the fluid in the tangential direction relative to the outer peripheral portion.

3. A processing machine, comprising: Spindle, which holds the tool and the workpiece; A holding part that holds the other of the tool and the workpiece; A drive unit that moves one of the main shaft and the retaining unit, i.e., the movable part, in a predetermined first direction; A position sensor that detects the position of the movable part in the first direction; A rotation sensor that detects the rotation of the spindle; and The control unit, when machining the workpiece by the tool while the spindle is rotating, controls the drive unit based on the detection value of the position sensor in such a way that the movable part moves in the first direction to a relative position set relative to a predetermined reference position. When the workpiece or a component that is stationary relative to the workpiece is used as a reference component, the control unit, upon detecting the rotation of the spindle via the rotation sensor and the movable part moving in the first direction to bring the tool into contact with the reference component in the first direction, inputs a predetermined signal and obtains the position detected by the position sensor as the reference position. It also has a fluid supply unit that realizes the rotation of the spindle during the operation of obtaining the reference position by impinging fluid against the outer surface exposed outside the spindle.

4. The processing machine according to any one of claims 1 to 3, wherein, The fluid supply unit has a nozzle for supplying the processing fluid as the fluid.

5. The processing machine according to any one of claims 1 to 3, wherein, The fluid supply unit has a nozzle for supplying the fluid, which is different from the nozzle for supplying the processing fluid.

6. A processing machine, comprising: Spindle, which holds the tool and the workpiece; A holding part that holds the other of the tool and the workpiece; A drive unit that moves one of the main shaft and the retaining unit, i.e., the movable part, in a predetermined first direction; A position sensor that detects the position of the movable part in the first direction; A rotation sensor that detects the rotation of the spindle; and The control unit, when machining the workpiece by the tool while the spindle is rotating, controls the drive unit based on the detection value of the position sensor in such a way that the movable part moves in the first direction to a relative position set relative to a predetermined reference position. When the workpiece or a component that is stationary relative to the workpiece is used as a reference component, the control unit, upon detecting the rotation of the spindle via the rotation sensor and the movable part moving in the first direction to bring the tool into contact with the reference component in the first direction, inputs a predetermined signal and obtains the position detected by the position sensor as the reference position. It also has: Air bearing supporting the main shaft; and A pump that supplies air into the air bearing; The rotation of the spindle during the operation of obtaining the reference position is achieved by utilizing the pressure of the air supplied to the air bearing by the pump.

7. The processing machine according to any one of claims 1 to 3 and 6, wherein, The specified signal is a deceleration signal from the rotation sensor corresponding to the rotation of the spindle.

8. The processing machine according to any one of claims 1 to 3 and 6, wherein, It also has: A display showing the rotational speed of the spindle detected by the rotation sensor; and The input section receives operations from the operator; The specified signal is a signal from the input section.

9. The processing machine according to any one of claims 1 to 3 and 6, wherein, The first direction is the direction that intersects the rotation axis of the main shaft.

10. The processing machine according to claim 9, wherein, The spindle holds the tool. The retaining part is a worktable located closer to the spindle in the first direction, used to hold the workpiece. The tool is a grinding stone that uses its outer periphery for grinding. The reference position is the position where the outer periphery contacts the workpiece or the worktable.

11. The processing machine according to any one of claims 1 to 3 and 6, wherein, The rotation sensor is mounted on the spindle motor that rotates the spindle.

12. The processing machine according to any one of claims 1 to 3 and 6, wherein, The part to be detected is located on the spindle or is held on the spindle by the tool or the workpiece. The rotation sensor is a non-contact sensor that detects the rotation of the spindle based on the detection of the passing of the detected part in the circumferential direction of the spindle.

13. The processing machine according to any one of claims 1 to 3 and 6, wherein, During the action of obtaining the reference position, the spindle speed before the tool contacts the reference component is lower than the spindle speed when the tool is machining the workpiece.

14. The processing machine according to claim 13, wherein, The spindle rotates at a speed of 2000 rpm or higher when machining the workpiece. During the operation of obtaining the reference position, the spindle speed before the tool contacts the reference component is below 200 rpm.

15. The processing machine according to claim 13, wherein, In the action of obtaining the reference position, the spindle speed before the tool contacts the reference component is less than 1 / 10 of the spindle speed when machining the workpiece.

16. A method for manufacturing a workpiece, wherein the workpiece is obtained by processing the workpiece using a processing machine as described in any one of claims 1 to 15 by means of the tool.

17. A method for manufacturing a workpiece, using a tool having: Spindle, which holds the tool and the workpiece; A holding part that holds the other of the tool and the workpiece; A drive unit that causes either the main shaft or the retaining unit, i.e., the movable part, to move in a predetermined first direction; A position sensor detects the position of the movable part in the first direction; and A machining machine that uses a rotation sensor to detect the rotation of the spindle, and uses the tool to process the workpiece to obtain a workpiece, has the following characteristics: When the workpiece or a component that is stationary relative to the workpiece is used as a reference component, the step of moving the movable part in the first direction so that the tool contacts the reference component while the spindle is rotating; The step of detecting the deceleration of the spindle rotation caused by the contact between the tool and the reference component, based on the detection results of the rotation sensor; and The step of obtaining the position of the movable part in the first direction when the deceleration is detected using the position sensor as a reference position. It also has a fluid supply unit that, when the tool or workpiece held on the spindle is a rotating object, realizes the rotation of the spindle in the action of obtaining the reference position by impacting the fluid relative to the outer surface of the rotating object.

18. A method for manufacturing a workpiece, using a tool having: Spindle, which holds the tool and the workpiece; A holding part that holds the other of the tool and the workpiece; A drive unit that causes either the main shaft or the retaining unit, i.e., the movable part, to move in a predetermined first direction; A position sensor detects the position of the movable part in the first direction; and A machining machine that detects the rotation of the spindle using a rotation sensor, and obtains a workpiece by machining the workpiece using the tool, has the following characteristics: When the workpiece or a component that is stationary relative to the workpiece is used as a reference component, the step of moving the movable part in the first direction so that the tool contacts the reference component while the spindle is rotating; The step of detecting the deceleration of the spindle rotation caused by the contact between the tool and the reference component, based on the detection results of the rotation sensor; and The step of obtaining the position of the movable part in the first direction when the deceleration is detected using the position sensor as a reference position. It also has a fluid supply unit that realizes the rotation of the spindle during the operation of obtaining the reference position by impinging fluid against the outer surface exposed outside the spindle.

19. A method for manufacturing an article of work, using a tool having: Spindle, which holds the tool and the workpiece; A holding part that holds the other of the tool and the workpiece; A drive unit that causes either the main shaft or the retaining unit, i.e., the movable part, to move in a predetermined first direction; A position sensor detects the position of the movable part in the first direction; and A machining machine that detects the rotation of the spindle using a rotation sensor, and obtains a workpiece by machining the workpiece using the tool, has the following characteristics: When the workpiece or a component that is stationary relative to the workpiece is used as a reference component, the step of moving the movable part in the first direction so that the tool contacts the reference component while the spindle is rotating; The step of detecting the deceleration of the spindle rotation caused by the contact between the tool and the reference component, based on the detection results of the rotation sensor; and The step of obtaining the position of the movable part in the first direction when the deceleration is detected using the position sensor as a reference position. It also has: Air bearings supporting the main shaft; and A pump that supplies air into the air bearing; The rotation of the spindle during the operation of obtaining the reference position is achieved by utilizing the pressure of the air supplied to the air bearing by the pump.

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