Parameter configuration method and cleaning terminal

Abstract

The application provides a parameter configuration method and a cleaning terminal. The parameter configuration method is applied to the cleaning terminal. A control interface of a control program for controlling the operation of the cleaning terminal is displayed on the cleaning terminal. The parameter configuration method comprises the following steps: in response to a first triggering operation of a login control in the control interface, a plurality of adjustment controls for receiving user operations to perform corresponding functions are displayed on the control interface; and in response to the operation of at least one adjustment control in the control interface by a user according to the process cleaning requirement of a target workpiece, the configuration of the working parameter of the cleaning terminal when cleaning the target workpiece is completed. In this way, the technical solution provided by the application can quickly complete personalized parameter configuration, thereby improving the cleaning efficiency.

Description

Technical Field

[0001] This application relates to the field of data processing technology, and in particular to a parameter configuration method and a cleaning terminal. Background Technology

[0002] Manual cleaning machine control includes single-step action control of equipment actuators, display of equipment component status, process status of the process tank, status of the chemical solution, and input, selection, and display of process menu information. Customized equipment based on user needs may have requirements submitted in stages to meet actual production needs, such as during the solution communication phase and on-site equipment commissioning. The existing method of using customized membrane keypad controllers cannot meet the user's multi-stage needs for chemical solution and equipment operation and maintenance. Furthermore, due to the limited screen size, all control buttons and conditions cannot be displayed simultaneously, resulting in inconsistent interfaces on the current production line equipment. There is also overlap between interfaces used by personnel with different permissions, and parameter information is not concisely summarized, hindering timely and effective configuration of working parameters, thus leading to low work efficiency. Summary of the Invention

[0003] In view of this, the purpose of this application is to provide a parameter configuration method and a cleaning terminal that can quickly complete personalized parameter configuration, thereby improving work efficiency.

[0004] This application provides a parameter configuration method applied to a cleaning terminal, wherein the cleaning terminal displays a control interface of a control program that controls the operation of the cleaning terminal, and the parameter configuration method includes:

[0005] In response to the user's first trigger operation on the login control in the control interface, multiple adjustment controls are displayed in the control interface to receive user operations and perform corresponding functions.

[0006] In response to the user's operation of at least one adjustment control in the control interface according to the process cleaning requirements of the target workpiece, the working parameters of the cleaning terminal are configured when cleaning the target workpiece.

[0007] Optionally, in response to a user's first trigger operation on the login control in the control interface, multiple adjustment controls are displayed on the control interface to receive user operations and perform corresponding functions, including:

[0008] In response to the user's first trigger operation on the login control in the control interface, the user's login input information is obtained;

[0009] The login input information is verified;

[0010] After successful verification, the control interface displays multiple adjustment controls that receive user input to perform corresponding functions.

[0011] Optionally, after configuring the operating parameters of the cleaning terminal when cleaning the target workpiece, the parameter configuration method includes:

[0012] Receive the user's startup command;

[0013] In response to the start command, the component at the tank where the target workpiece is located in the cleaning terminal is controlled to start working according to the working parameters.

[0014] Optionally, the parameter configuration method further includes:

[0015] The operation of the cleaning terminal is monitored in real time;

[0016] Once an operational anomaly is identified, obtain the anomaly information;

[0017] Based on the abnormal information, the corresponding alarm information is displayed on the control interface.

[0018] Optionally, the control interface includes: an overview interface, a manual control interface, a process editing interface, a parameter setting interface, a solution preparation setting interface, a process record interface, and a calibration parameter editing interface.

[0019] Optionally, the overview interface displays at least one slot selection control, and the first display area of ​​each slot selection control is determined according to the slot layout of the cleaning terminal.

[0020] Optionally, the manual control interface includes a second display area, a third display area, and a fourth display area;

[0021] The second display area is used to display the dynamic diagram of the pipeline of the corresponding process tank;

[0022] The third display area is used to display the current working parameters and current working status of the corresponding process tank;

[0023] The fourth display area is used to display the function control controls for the corresponding process tank.

[0024] Optionally, the function control controls include process editing controls, parameter setting controls, solution preparation setting controls, and process recording controls, and the parameter configuration method further includes:

[0025] In response to the user's selection operation of the process editing control on the manual control interface, the user jumps from the manual control interface to the process editing interface;

[0026] Alternatively, in response to the user's selection operation of the parameter setting control on the manual control interface, the user may jump from the manual control interface to the parameter setting interface.

[0027] Alternatively, in response to the user's selection operation of the solution preparation setting control on the manual control interface, the user may jump from the manual control interface to the solution preparation setting interface.

[0028] Alternatively, in response to a user's selection of the process recording control on the manual control interface, the user may switch from the manual control interface to the process recording interface.

[0029] Optionally, the solution preparation setting interface displays parameter editing controls, and the parameter configuration method further includes:

[0030] In response to the user's selection operation of the parameter editing control on the solution preparation setting interface, the user is redirected from the solution preparation setting interface to the calibration parameter editing interface.

[0031] This application embodiment also provides a cleaning terminal, which displays a control interface of a control program for controlling the operation of the cleaning terminal, the cleaning terminal comprising:

[0032] The display module is used to respond to the user's first trigger operation on the login control in the control interface, and to display multiple adjustment controls in the control interface that receive user operations to perform corresponding functions;

[0033] The configuration module is used to configure the working parameters of the cleaning terminal when cleaning the target workpiece in response to the user's operation of at least one adjustment control in the control interface according to the process cleaning requirements of the target workpiece.

[0034] This application also provides an electronic device, including: a processor, a memory, and a bus. The memory stores machine-readable instructions executable by the processor. When the electronic device is running, the processor communicates with the memory via the bus. When the machine-readable instructions are executed by the processor, the steps of the parameter configuration method described above are performed.

[0035] This application also provides a computer-readable storage medium storing a computer program, which, when executed by a processor, performs the steps of the parameter configuration method described above.

[0036] This application provides a parameter configuration method and a cleaning terminal. The parameter configuration method is applied to the cleaning terminal, which displays a control interface of a control program that controls the operation of the cleaning terminal. The parameter configuration method includes: responding to a user's first trigger operation on a login control in the control interface, displaying multiple adjustment controls in the control interface to receive user operations and perform corresponding functions; and responding to the user's operation on at least one adjustment control in the control interface according to the process cleaning requirements of the target workpiece, completing the configuration of the working parameters of the cleaning terminal when cleaning the target workpiece.

[0037] In this way, this solution uses an appropriate number of control interfaces with related hierarchical relationships to categorize and place different equipment control controls to achieve automatic control of the cleaning terminal. It can fully meet the process requirements of the workpieces to be cleaned, flexibly adapt to various customized requirements, and thus carry out cleaning work more efficiently.

[0038] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0039] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0040] Figure 1 A flowchart illustrating a parameter configuration method provided in an embodiment of this application;

[0041] Figure 2 A schematic diagram of an overview interface provided for this application;

[0042] Figure 3 A schematic diagram of a system settings interface provided in this application;

[0043] Figure 4 A schematic diagram of a login interface provided for this application;

[0044] Figure 5 One of the schematic diagrams of a manual control interface provided in this application;

[0045] Figure 6 A second schematic diagram of a manual control interface provided in this application;

[0046] Figure 7 A schematic diagram of a process editing interface provided in this application;

[0047] Figure 8 A schematic diagram of a parameter setting interface provided in this application;

[0048] Figure 9 A schematic diagram of a process recording interface provided in this application;

[0049] Figure 10 A schematic diagram of a solution preparation setting interface provided in this application;

[0050] Figure 11A schematic diagram of a calibration parameter editing interface provided in this application;

[0051] Figure 12 This is a schematic diagram of the structure of a cleaning terminal provided in an embodiment of this application;

[0052] Figure 13 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Detailed Implementation

[0053] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. Based on the embodiments of this application, every other embodiment obtained by those skilled in the art without inventive effort falls within the scope of protection of this application.

[0054] Manual cleaning machine control includes single-step action control of equipment actuators, display of equipment component status, process status of the process tank, status of the chemical solution, and input, selection, and display of process menu information. Customized equipment based on user needs may have requirements submitted in stages to meet actual production needs, such as during the solution communication phase and on-site equipment commissioning. The existing method of using customized membrane keypad controllers cannot meet the user's multi-stage needs for chemical solution and equipment operation and maintenance. Furthermore, due to the limited screen size, all control buttons and conditions cannot be displayed simultaneously, resulting in inconsistent interfaces on the current production line equipment. There is also overlap between interfaces used by personnel with different permissions, and parameter information is not concisely summarized, hindering timely and effective configuration of working parameters, thus leading to low work efficiency.

[0055] Based on this, embodiments of this application provide a parameter configuration method and a cleaning terminal, which can quickly complete personalized parameter configuration, thereby improving cleaning efficiency.

[0056] Please see Figure 1 , Figure 1 This is a flowchart of a parameter configuration method provided in an embodiment of this application.

[0057] It is applied to a cleaning terminal, which displays a control interface of a control program that controls the operation of the cleaning terminal.

[0058] Here, the cleaning terminal has a graphical user interface, which displays a control interface for a control program that controls the operation of the cleaning terminal.

[0059] The cleaning terminal also includes at least one process tank in which a workpiece to be cleaned can be placed, thereby activating the corresponding component to clean the workpiece.

[0060] For example, the workpiece to be cleaned can be a semiconductor RCA, chip, wafer, etc.

[0061] like Figure 1 As shown in the embodiments of this application, the parameter configuration method includes:

[0062] S101. In response to the user's first trigger operation on the login control in the control interface, multiple adjustment controls are displayed in the control interface to receive user operations and perform corresponding functions.

[0063] S102. In response to the user's operation of at least one adjustment control in the control interface according to the process cleaning requirements of the target workpiece, the working parameters of the cleaning terminal are configured when cleaning the target workpiece.

[0064] This application provides a parameter configuration method applied to a cleaning terminal, which displays a control interface of a control program that controls the operation of the cleaning terminal. First, in response to a user's initial trigger operation on a login control in the control interface, the cleaning terminal displays multiple adjustment controls on the control interface to receive user operations and execute corresponding functions. Then, in response to the user's operation on at least one adjustment control in the control interface according to the process cleaning requirements of the target workpiece, the cleaning terminal completes the configuration of its operating parameters for cleaning the target workpiece. In this way, a single control program can configure parameters for different cleaning equipment, and also allows for personalized parameter configuration and rapid parameter configuration via multiple controls in the control interface, thereby effectively improving work efficiency.

[0065] For step S101, the control interface includes: overview interface, manual control interface, process editing interface, parameter setting interface, solution preparation setting interface, process record interface, and calibration parameter editing interface.

[0066] The control interface may also include a login interface, an alarm interface, a system settings interface, etc.

[0067] The next level of the overview interface includes the manual control interface, process editing interface, parameter setting interface, solution preparation setting interface, and process record interface; the calibration parameter editing interface is the next level of the solution preparation setting interface.

[0068] The overview interface displays at least one slot selection control, and the first display area of ​​each slot selection control is determined according to the slot layout of the cleaning terminal.

[0069] For an example, please refer to Figure 2 , Figure 2 This is a schematic diagram of an overview interface provided for this application. For example... Figure 2 As shown, the overview interface has eight slot selection controls and is divided into eight first display areas. In addition, the overview interface includes system settings controls and a login interface control. When a user operates any slot selection control, the processor in the cleaning terminal responds to the user's operation, redirects the page, and displays the manual control interface corresponding to the selected process slot on the graphical user interface of the cleaning terminal. When the user operates the system settings controls, the processor in the cleaning terminal responds to the user's operation, redirects the page, and displays the system settings interface on the graphical user interface of the cleaning terminal. Please refer to [link to relevant documentation]. Figure 3 , Figure 3 This application provides a schematic diagram of a system settings interface; when a user operates the login interface controls, the processor in the cleaning terminal responds to the user's operation, performs page redirection, and displays the login interface on the graphical user interface of the cleaning terminal. Please refer to [link to relevant documentation]. Figure 4 , Figure 4 This is a schematic diagram of a login interface provided for this application.

[0070] like Figure 2 As shown, the first display area of ​​the slot selection control also displays the relevant parameters and information of the slot (such as temperature, heating status, process time and timing). The pattern inside the U-shaped frame of the slot indicates the liquid level status of the slot, and the presence or absence and height of the liquid level are displayed using "H" and "L" icons and animations.

[0071] like Figure 2 As shown, the overview interface is divided into two parts: the upper part redirects to the system settings interface and login interface, displays authorized personnel information, and time information; the lower part displays slot-related information. When considering specific slot distribution requirements, the upper slot may be for medicine tanks and the lower slot may be for water tank placement; the left slot may be for medicine tanks and the right slot may be for water tank placement; or there may be single medicine tank or single water tank placement options, etc.

[0072] Regarding step S101, in one embodiment provided in this application, the step of responding to a user's first trigger operation on the login control in the control interface and displaying multiple adjustment controls on the control interface to receive user operations and perform corresponding functions includes: responding to a user's first trigger operation on the login control in the control interface, obtaining the user's login input information; verifying the login input information; and after successful verification, displaying multiple adjustment controls on the control interface to receive user operations and perform corresponding functions.

[0073] Here, the login information may include the user's login name and login password, etc.

[0074] Upon successful verification, the first control interface displayed to the user can be an overview screen. Users can then adjust the page layout and configure parameters by interacting with the controls.

[0075] In step S102, after the user operates the slot selection control on the overview interface, the processor in the cleaning terminal responds to the user's operation, performs a page jump, and manually controls the interface on the graphical user interface of the cleaning terminal.

[0076] In one embodiment, the manual control interface includes a second display area, a third display area, and a fourth display area; the second display area is used to display the dynamic diagram of the pipeline of the corresponding process tank; the third display area is used to display the current working parameters and current working status of the corresponding process tank; and the fourth display area is used to display the function control controls of the corresponding process tank.

[0077] In one embodiment, the functional control controls include process editing controls, parameter setting controls, solution preparation setting controls, and process recording controls. The parameter configuration method further includes: responding to a user's selection operation of the process editing controls on the manual control interface, jumping from the manual control interface to the process editing interface; or, responding to a user's selection operation of the parameter setting controls on the manual control interface, jumping from the manual control interface to the parameter setting interface; or, responding to a user's selection operation of the solution preparation setting controls on the manual control interface, jumping from the manual control interface to the solution preparation setting interface; or, responding to a user's selection operation of the process recording controls on the manual control interface, jumping from the manual control interface to the process recording interface.

[0078] Here, the manual control interface includes at least a manual control interface for the medicine tank and a manual control interface for the pure water tank.

[0079] The process editing interface includes at least the chemical tank process interface, the pure water tank process interface, and the furnace tube tank interface.

[0080] In one embodiment, the solution preparation setting interface displays a parameter editing control, and the parameter configuration method further includes: in response to the user's selection operation of the parameter editing control on the solution preparation setting interface, jumping from the solution preparation setting interface to the calibration parameter editing interface.

[0081] For an example, please refer to Figure 5 , Figure 5 This is one of the schematic diagrams of a manual control interface provided in this application. For example... Figure 5As shown, the manual control interface is the manual control interface for tank T1, which can be a chemical solution tank. This manual control interface can be viewed as comprising three parts: upper, middle, and lower. The upper part contains the manual control interface switching controls for all tanks, with the current tank status prominently displayed. The middle part is the process tank information display and control area. The lower part includes the process editing interface, parameter setting interface, process record interface navigation, access control information, and time information display (including the fourth display area).

[0082] The middle section can be divided into three parts: left, center, and right. The left side shows the dynamic diagram of the process tank pipeline (second display area), the center shows the current working parameters and current working status of the process tank (third display area), and the right side is the touch area for executing actions (including the fourth display area).

[0083] For an example, please refer to Figure 6 , Figure 6 This is a second schematic diagram of a manual control interface provided in this application. Figure 6 As shown, the manual control interface is the manual control interface for the QDR2 tank. The QDR2 tank can be a pure water tank.

[0084] For an example, please refer to Figure 7 , Figure 7 This is a schematic diagram of a process editing interface provided in this application. Figure 7 As shown, the process editing interface is the chemical tank process interface, which is divided into three parts: the top part displays authorized personnel information, the middle part is the process parameter editing table, and the bottom area contains controls to return to the manual control interface. For example, each time period and parameter / action combination changes with the process number and can be set to different values. The chemical tank uses one combination, while the pure water tank and furnace tube tank use eight combinations, arranged in eight columns in sequence.

[0085] For an example, please refer to Figure 8 , Figure 8 This is a schematic diagram of a parameter setting interface provided in this application. Figure 8 As shown, the interface can be divided into three parts: top, middle, and bottom. The top section displays authorized personnel information, process tank names, and time information arranged at equal intervals from left to right. The middle table shows the discharge time, temperature parameter settings, and chemical status parameter settings. The bottom section displays the current status of the chemical and controls its actions, including a link to the manual control interface.

[0086] For an example, please refer to Figure 9 , Figure 9 This is a schematic diagram of a process recording interface provided in this application. Figure 9As shown, the interface is divided into three parts: top, middle, and bottom. The top section displays authorized personnel information, process tank names, and time information, arranged at equal intervals from left to right. The middle table displays the sample data; the bottom section contains the sample data download function and a manual interface navigation entry, with corresponding controls also provided.

[0087] For an example, please refer to Figure 10 , Figure 10 This is a schematic diagram of a solution preparation setting interface provided in this application. Figure 10 As shown, it should be noted that each chemical in the process tank has a configuration combination. Each combination includes the process tank name, the parameters to be input, the parameters to be displayed, and the actions, all grouped together. The process tank name is at the top, and the elements below include the parameter names on the left, the data input boxes in the middle, and the action buttons on the right. Corresponding controls are also provided in this interface.

[0088] For an example, please refer to Figure 11 , Figure 11 This is a schematic diagram of a calibration parameter editing interface provided in this application. Figure 11 As shown, the interface is divided into three parts: top, middle, and bottom. The top section displays authorized personnel information, process tank names, and time information, arranged at equal intervals from left to right. The middle table is the calibration parameter table, and the bottom section contains user instructions and a jump button to the solution preparation interface. Corresponding controls are also provided on this interface. For example, the equation system y = ax + b can be used to calibrate the parameters of the injected solution, and the saved parameter data is displayed on the right side of the table.

[0089] In another embodiment provided in this application, after configuring the working parameters of the cleaning terminal when cleaning the target workpiece, the parameter configuration method includes: receiving a user's start command; and in response to the start command, controlling the component at the slot where the target workpiece is located in the cleaning terminal to start working according to the working parameters.

[0090] Here, the start command can be issued by the user by pressing the start button on the cleaning terminal.

[0091] In another embodiment provided in this application, the parameter configuration method further includes: real-time monitoring of the operation process of the cleaning terminal; obtaining abnormal information when an abnormal operation is detected; and displaying corresponding alarm information in the control interface according to the abnormal information.

[0092] Here, different types of abnormal information correspond to different alarm messages.

[0093] In addition, the cleaning terminal also includes a dedicated keyboard that can be used to input the ID number of the wafer (target workpiece).

[0094] In this way, this solution uses an appropriate number of control interfaces with related hierarchical relationships to categorize and place different equipment control controls to achieve automatic control of the cleaning terminal. It can fully meet the process requirements of the workpieces to be cleaned, flexibly adapt to various customized requirements, and thus carry out cleaning work more efficiently.

[0095] Please see Figure 12 , Figure 12 This is a schematic diagram of the structure of a cleaning terminal provided in an embodiment of this application. Figure 12 As shown, the cleaning terminal 200 includes:

[0096] Display module 210 is used to respond to a user's first trigger operation on the login control in the control interface, and to display multiple adjustment controls in the control interface that receive user operations to perform corresponding functions.

[0097] The configuration module 220 is used to configure the working parameters of the cleaning terminal when cleaning the target workpiece in response to the user's operation of at least one adjustment control in the control interface according to the process cleaning requirements of the target workpiece.

[0098] Optionally, when the display module 210 is used to respond to a user's first trigger operation on the login control in the control interface, and the control interface displays multiple adjustment controls that receive user operations to perform corresponding functions, the display module 210 is used to:

[0099] In response to the user's first trigger operation on the login control in the control interface, the user's login input information is obtained;

[0100] The login input information is verified;

[0101] After successful verification, the control interface displays multiple adjustment controls that receive user input to perform corresponding functions.

[0102] Optionally, the cleaning terminal 200 is further used for:

[0103] After configuring the operating parameters of the cleaning terminal when cleaning the target workpiece, it receives the user's start command;

[0104] In response to the start command, the component at the tank where the target workpiece is located in the cleaning terminal is controlled to start working according to the working parameters.

[0105] Optionally, the cleaning terminal 200 is further used for:

[0106] The operation of the cleaning terminal is monitored in real time;

[0107] Once an operational anomaly is identified, obtain the anomaly information;

[0108] Based on the abnormal information, the corresponding alarm information is displayed on the control interface.

[0109] Optionally, the control interface includes: an overview interface, a manual control interface, a process editing interface, a parameter setting interface, a solution preparation setting interface, a process record interface, and a calibration parameter editing interface.

[0110] Optionally, the overview interface displays at least one slot selection control, and the first display area of ​​each slot selection control is determined according to the slot layout of the cleaning terminal.

[0111] Optionally, the manual control interface includes a second display area, a third display area, and a fourth display area;

[0112] The second display area is used to display the dynamic diagram of the pipeline of the corresponding process tank;

[0113] The third display area is used to display the current working parameters and current working status of the corresponding process tank;

[0114] The fourth display area is used to display the function control controls for the corresponding process tank.

[0115] Optionally, the function control controls include process editing controls, parameter setting controls, solution preparation setting controls, and process recording controls. The cleaning terminal 200 is also used for:

[0116] In response to the user's selection operation of the process editing control on the manual control interface, the user jumps from the manual control interface to the process editing interface;

[0117] Alternatively, in response to the user's selection operation of the parameter setting control on the manual control interface, the user may jump from the manual control interface to the parameter setting interface.

[0118] Alternatively, in response to the user's selection operation of the solution preparation setting control on the manual control interface, the user may jump from the manual control interface to the solution preparation setting interface.

[0119] Alternatively, in response to a user's selection of the process recording control on the manual control interface, the user may switch from the manual control interface to the process recording interface.

[0120] Optionally, the solution preparation setting interface displays parameter editing controls, and the cleaning terminal 200 is further used for:

[0121] In response to the user's selection operation of the parameter editing control on the solution preparation setting interface, the user is redirected from the solution preparation setting interface to the calibration parameter editing interface.

[0122] Please see Figure 13 , Figure 13 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Figure 13 As shown, the electronic device 500 includes a processor 510, a memory 520, and a bus 530.

[0123] The memory 520 stores machine-readable instructions executable by the processor 510. When the electronic device 500 is running, the processor 510 and the memory 520 communicate via the bus 530. When the machine-readable instructions are executed by the processor 510, they can perform the operations described above. Figures 1 to 11 The steps in the method embodiment shown are specifically implemented in the method embodiment and will not be repeated here.

[0124] This application also provides a computer-readable storage medium storing a computer program, which, when executed by a processor, can perform the above-described actions. Figures 1 to 11 The steps in the method embodiment shown are specifically implemented in the method embodiment and will not be repeated here.

[0125] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes of the systems, devices, and units described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here.

[0126] In the several embodiments provided in this application, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. The apparatus embodiments described above are merely illustrative. For example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Additionally, the shown or discussed mutual couplings, direct couplings, or communication connections may be through some communication interfaces; indirect couplings or communication connections between devices or units may be electrical, mechanical, or other forms.

[0127] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0128] In addition, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.

[0129] If the aforementioned functions are implemented as software functional units and sold or used as independent products, they can be stored in a processor-executable, non-volatile, computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0130] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The scope of protection of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the scope of the technology disclosed in this application. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be covered within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A parameter configuration method, characterized in that, The cleaning terminal is applied to a cleaning terminal, which has a graphical user interface (GUI) displaying a control interface for a control program that controls the operation of the cleaning terminal. The cleaning terminal also includes at least one process tank in which workpieces to be cleaned are placed. The workpieces to be cleaned include semiconductor RCA, chips, and wafers. The parameter configuration method includes: In response to the user's first trigger operation on the login control in the control interface, multiple adjustment controls are displayed on the control interface to receive user operations and perform corresponding functions; the control interface includes: an overview interface, a manual control interface, a process editing interface, a parameter setting interface, a solution preparation setting interface, a process record interface, and a calibration parameter editing interface. In response to the user's operation of at least one adjustment control in the control interface according to the process cleaning requirements of the target workpiece, the working parameters of the cleaning terminal are configured when cleaning the target workpiece. The overview interface displays at least one tank selection control, and the first display area of ​​each tank selection control is determined according to the tank layout of the cleaning terminal. When the user operates any tank selection control, the processor in the cleaning terminal responds to the user's operation, performs a page jump, and displays the manual control interface corresponding to the process tank selected by the user on the graphical user interface of the cleaning terminal. The manual control interface includes a second display area, a third display area, and a fourth display area. The second display area is used to display the dynamic diagram of the pipeline of the corresponding process tank. The third display area is used to display the current working parameters and current working status of the corresponding process tank. The fourth display area is used to display the function control controls of the corresponding process tank. The function control controls include process editing controls, parameter setting controls, liquid mixing setting controls, and process recording controls. The first display area of ​​the tank selection control displays the relevant parameters and information of the tank, including temperature, heating status, process time, and timing time. The pattern inside the U-shaped frame of the tank indicates the liquid level status of the tank. The parameter configuration method further includes: responding to a user's selection operation of the process editing control on the manual control interface, jumping from the manual control interface to the process editing interface; or, responding to a user's selection operation of the parameter setting control on the manual control interface, jumping from the manual control interface to the parameter setting interface; or, responding to a user's selection operation of the solution preparation setting control on the manual control interface, jumping from the manual control interface to the solution preparation setting interface; or, responding to a user's selection operation of the process recording control on the manual control interface, jumping from the manual control interface to the process recording interface. The solution preparation setting interface displays a parameter editing control, and the parameter configuration method further includes: in response to the user's selection operation of the parameter editing control on the solution preparation setting interface, jumping from the solution preparation setting interface to the calibration parameter editing interface.

2. The parameter configuration method according to claim 1, characterized in that, In response to a user's first trigger operation on the login control in the control interface, the control interface displays multiple adjustment controls that receive user operations to perform corresponding functions, including: In response to the user's first trigger operation on the login control in the control interface, the user's login input information is obtained; The login input information is verified; After successful verification, the control interface displays multiple adjustment controls that receive user input to perform corresponding functions.

3. The parameter configuration method according to claim 1, characterized in that, After configuring the operating parameters of the cleaning terminal when cleaning the target workpiece, the parameter configuration method includes: Receive the user's startup command; In response to the start command, the component at the tank where the target workpiece is located in the cleaning terminal is controlled to start working according to the working parameters.

4. The parameter configuration method according to claim 1, characterized in that, The parameter configuration method further includes: The operation of the cleaning terminal is monitored in real time; Once an operational anomaly is identified, obtain the anomaly information; Based on the abnormal information, the corresponding alarm information is displayed on the control interface.

5. A cleaning terminal, characterized in that, The cleaning terminal has a graphical user interface (GUI) that displays a control interface for a control program that controls the operation of the cleaning terminal. The cleaning terminal also includes at least one process tank in which workpieces to be cleaned are placed. These workpieces include RCA semiconductors, chips, and wafers. The cleaning terminal comprises: The display module is used to respond to the user's first trigger operation on the login control in the control interface, and to display multiple adjustment controls that receive user operations to perform corresponding functions in the control interface; the control interface includes: an overview interface, a manual control interface, a process editing interface, a parameter setting interface, a solution preparation setting interface, a process record interface, and a calibration parameter editing interface. The configuration module is used to respond to the user's operation on at least one adjustment control in the control interface according to the process cleaning requirements of the target workpiece, and to complete the configuration of the working parameters of the cleaning terminal when cleaning the target workpiece; The overview interface displays at least one tank selection control, and the first display area of ​​each tank selection control is determined according to the tank layout of the cleaning terminal. When the user operates any tank selection control, the processor in the cleaning terminal responds to the user's operation, performs a page jump, and displays the manual control interface corresponding to the process tank selected by the user on the graphical user interface of the cleaning terminal. The manual control interface includes a second display area, a third display area, and a fourth display area. The second display area is used to display the dynamic diagram of the pipeline of the corresponding process tank. The third display area is used to display the current working parameters and current working status of the corresponding process tank. The fourth display area is used to display the function control controls of the corresponding process tank. The function control controls include process editing controls, parameter setting controls, liquid mixing setting controls, and process recording controls. The first display area of ​​the tank selection control displays the relevant parameters and information of the tank, including temperature, heating status, process time, and timing time. The pattern inside the U-shaped frame of the tank indicates the liquid level status of the tank. The cleaning terminal is also configured to: switch from the manual control interface to the process editing interface in response to a user's selection of a process editing control on the manual control interface; or switch from the manual control interface to the parameter setting interface in response to a user's selection of a parameter setting control on the manual control interface; or switch from the manual control interface to the solution preparation setting interface in response to a user's selection of a solution preparation setting control on the manual control interface; or switch from the manual control interface to the process recording interface in response to a user's selection of a process recording control on the manual control interface. The solution preparation setting interface displays parameter editing controls, and the cleaning terminal is also used to: in response to the user's selection operation of the parameter editing controls on the solution preparation setting interface, jump from the solution preparation setting interface to the calibration parameter editing interface.

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