Ventilated workpiece and method of making and using same

Abstract

The application provides a ventilation workpiece and a manufacturing method and application thereof. The manufacturing method comprises the following steps: (I) providing a raw material blank, performing a groove milling treatment on the surface of the raw material blank to obtain an air channel groove, and performing a processing treatment on the air channel groove to form at least one positioning boss, wherein the positioning boss separates the air channel groove into at least two air channel cavities; (II) performing a first punching on the bottom surface of the air channel cavity to form a plurality of first uniform air holes; (III) providing an air channel cover plate, and connecting the air channel cover plate to the air channel groove to form at least two uniform air chambers with the air channel cavities; and (IV) performing a second punching on the side wall surface of the raw material blank to form a plurality of second uniform air holes, so that the second uniform air holes are communicated with the uniform air chambers, and the ventilation workpiece is obtained. The application solves the problem that the uniform air holes are prone to be blocked, effectively improves the uniform air effect, and improves the processing efficiency.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor annealing equipment processing technology, and relates to a ventilated workpiece, its manufacturing method and application. Background Technology

[0002] When impurity ions are implanted into a semiconductor, the high-energy incident ions collide with atoms on the semiconductor lattice, causing some lattice atoms to shift and creating a large number of vacancies. This results in disordered atomic arrangement or the formation of an amorphous region in the implanted area. Therefore, the semiconductor must be annealed after ion implantation to restore the crystal structure and eliminate defects.

[0003] Semiconductor annealing equipment typically employs a component with gas distribution and uniform gas distribution, releasing gas evenly through a single small orifice. In actual production, 3D printing technology is used to process porous, ventilated parts. However, 3D printing is time-consuming, inefficient, and costly. Furthermore, burrs or irregularities at the edges of the small holes in 3D-printed products can easily clog them, leading to uneven gas release. Additionally, 3D-printed parts have simple internal structures and short lifespans.

[0004] Therefore, there is a need to provide a highly efficient processing method to ensure the quality of ventilated workpieces, ensure uniform gas release, and thereby improve product production efficiency. Summary of the Invention

[0005] In view of the shortcomings of the existing technology, the purpose of this invention is to provide a ventilated workpiece and its manufacturing method and application, which improves processing efficiency, uses two small holes for uniform gas distribution, so as to release gas evenly, solve the problem of easy clogging of the gas distribution holes, and effectively improve the gas distribution effect.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] In a first aspect, the present invention provides a method for manufacturing a ventilated workpiece, the method comprising:

[0008] (I) Provide a raw material blank, perform milling on the surface of the raw material blank to obtain an air passage groove, process the air passage groove to form at least one positioning boss, the positioning boss divides the air passage groove into at least two air passage cavities.

[0009] (II) A hole is drilled on the bottom surface of the airway cavity to form several first uniform air passages;

[0010] (III) Provide an airway cover plate, and fasten the airway cover plate to the airway groove for connection, so as to form at least two uniform air chambers with the airway cavity;

[0011] (IV) The side wall surface of the raw material blank is punched a second time to form a number of second uniform air passages, so that the second uniform air passages are connected to the uniform air chamber to obtain a ventilated workpiece.

[0012] The method for manufacturing the gas distribution component provided by this invention can better form uniform gas through holes. The cover plate structure solves the problems of low processing efficiency for products with small holes inside, as well as burrs and irregularities at the edges of the holes inside the product. It shortens the processing time and achieves uniform gas distribution through two through holes by adding side holes, so that the gas is released evenly, which greatly improves the uniform gas distribution effect. At the same time, it avoids the problem of through hole blockage caused by long-term uniform gas distribution, which helps to extend its service life.

[0013] As a preferred embodiment of the present invention, the material of the raw material blank is stainless steel.

[0014] Preferably, the airway cover is made of stainless steel.

[0015] Preferably, the first gas-distributing through-hole penetrates the raw material blank.

[0016] Preferably, the diameter of the second air-regulating through hole is greater than or equal to the diameter of the first air-regulating through hole.

[0017] During use, the gas distribution component prepared by this invention allows gas to enter the first uniform gas through hole, then flow into the uniform gas chamber formed between the gas channel groove and the gas channel cover plate, and finally be discharged through the second uniform gas through hole connected thereto, thereby achieving uniform gas release.

[0018] As a preferred embodiment of the present invention, the processing further includes: forming a support step along the inner wall of the air passage groove, such that the top surface of the support step is flush with the end face of the positioning boss.

[0019] In this invention, the positioning boss divides the airway groove into at least two airway cavities along the length direction, and the supporting step is arranged circumferentially along the inner wall of the airway groove, and together with the positioning boss, it supports the airway cover plate, which is beneficial to improving structural stability.

[0020] It should be noted that the present invention does not specifically limit the processing technology. The positioning boss and support step in the air passage groove can be processed by any processing technology known to those skilled in the art. For example, turning or milling can be used, or a combination of different processing technologies can be used.

[0021] Preferably, the drilling is performed by a drill bit.

[0022] Preferably, the secondary drilling is laser drilling.

[0023] As a preferred technical solution of the present invention, the connection method includes: extending the air passage cover into the air passage groove so that it abuts against the support step, and then performing argon arc welding.

[0024] Preferably, after the airway cover is inserted into the airway groove, the distance between the end of the airway cover and the inner wall of the airway groove is 0.01 to 0.05 mm, for example, it can be 0.01 mm, 0.015 mm, 0.02 mm, 0.025 mm, 0.03 mm, 0.035 mm, 0.04 mm, 0.045 mm or 0.05 mm, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0025] Preferably, the welding current for argon arc welding is 50 to 70A, for example, it can be 50A, 53A, 55A, 58A, 60A, 62A, 65A, 68A or 70A, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0026] Preferably, the welding voltage of the argon arc welding is 8.5 to 10V, for example, it can be 8.5V, 8.8V, 9V, 9.3V, 9.5V, 9.6V, 9.8V or 10V, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0027] This invention utilizes a supporting step to support the airway cover plate, so that the airway cover plate matches the airway groove. Argon arc welding is used to enhance the connection strength between the airway groove and the airway cover plate, forming a uniform gas chamber composed of the side wall of the airway groove, the bottom surface of the airway groove, and the airway cover body. This ensures the sealing of the weld joint, facilitates uniform gas release, and extends its service life.

[0028] As a preferred technical solution of the present invention, the manufacturing method further includes: drilling holes three times on the surface of the raw material blank away from the second uniform air passage to form at least two detection passages, such that the detection passages are connected to the uniform air chamber, and using the detection passages to perform defect testing on the air-permeable workpiece.

[0029] Preferably, the detection through hole is a threaded hole.

[0030] Preferably, the detection through-hole corresponds one-to-one with the gas uniform chamber.

[0031] Preferably, the defect testing method includes: introducing water into the detection through hole and observing whether leakage occurs at the connection between the air passage cover and the air passage groove.

[0032] Preferably, the three drilling operations are laser drilling.

[0033] As a preferred technical solution of the present invention, the manufacturing method further includes precision machining of the ventilated workpiece; the precision machining includes: deburring, grinding and polishing the ventilated workpiece in sequence, so that the flatness of the outer surface of the ventilated workpiece is ≤0.05mm and the roughness is ≤0.5μm.

[0034] To help those skilled in the art better understand the overall technical solution and working process of the present invention, the present invention provides, by way of example, the specific steps of a method for manufacturing a ventilated workpiece:

[0035] (1) Provide a raw material blank, perform milling on the surface of the raw material blank to obtain an air passage groove, process the air passage groove to form at least one positioning boss, the positioning boss divides the air passage groove into at least two air passage cavities, and forms a support step along the inner wall of the air passage groove, so that the top surface of the support step is flush with the end face of the positioning boss.

[0036] (2) A hole is drilled on the bottom surface of the air passage cavity to form a number of first uniform air passages, and the first uniform air passages penetrate the raw material blank.

[0037] (3) Provide an airway cover plate, fasten the airway cover plate onto the airway groove so that it abuts against the support step, and then perform argon arc welding to form at least two uniform gas chambers in the airway groove and with the airway cavity.

[0038] (4) The side wall surface of the raw material blank is punched twice to form a number of second uniform air passages, so that the second uniform air passages are connected to the uniform air chamber to obtain a ventilated workpiece.

[0039] (5) Drill holes three times on the side of the raw material blank away from the second uniform air passage to form at least two detection passages, so that the detection passages are connected to the uniform air chamber, water flow is introduced into the detection passages, and it is observed whether there is leakage at the connection between the air passage cover and the air passage groove.

[0040] (6) The ventilation workpiece is deburred, ground and polished in sequence so that the flatness of the outer surface of the ventilation workpiece is ≤0.05mm and the roughness is ≤0.5μm.

[0041] Secondly, the present invention provides a ventilated workpiece, which is prepared by the ventilated workpiece manufacturing method described in the first aspect. The ventilated workpiece includes a workpiece body and an air passage cover plate. An air passage groove is formed on the top surface of the workpiece body. At least one positioning boss is provided in the air passage groove. The positioning boss divides the air passage groove into at least two air passage cavities. The air passage cover plate is fastened to the air passage groove and forms at least two uniform air chambers with the air passage cavities.

[0042] As a preferred embodiment of the present invention, the bottom surface of the air passage cavity is provided with a plurality of first uniform air passages penetrating the workpiece body, and the side surface of the workpiece body is provided with a plurality of second uniform air passages, the second uniform air passages being connected to the uniform air chamber.

[0043] Preferably, a support step is provided circumferentially on the inner wall of the air passage groove, and the top surface of the support step is flush with the end face of the positioning boss.

[0044] Preferably, the thickness of the workpiece body is 16 to 24 mm, for example, it can be 16 mm, 17 mm, 18 mm, 19 mm, 20 mm, 21 mm, 22 mm, 23 mm or 24 mm, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0045] Preferably, the depth of the airway groove is 8 to 18 mm, for example, it can be 8 mm, 9 mm, 10 mm, 11 mm, 12 mm, 13 mm, 14 mm, 15 mm, 16 mm, 17 mm or 18 mm, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0046] Preferably, the thickness of the airway cover is 3 to 6 mm, for example, it can be 3 mm, 3.5 mm, 4 mm, 4.5 mm, 5 mm, 5.5 mm or 6 mm, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0047] As a preferred embodiment of the present invention, the first uniform air passage is a circular hole and / or a polygonal hole, and the second uniform air passage is a "U" shaped hole.

[0048] Preferably, a plurality of the second air-uniforming through holes are arranged side by side along the length of the air-uniforming chamber.

[0049] Thirdly, the present invention provides an application of the ventilated workpiece described in the second aspect, wherein the ventilated workpiece is used in an annealing apparatus for preparing semiconductor devices.

[0050] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0051] This invention provides a ventilated workpiece, its manufacturing method, and its application. The manufacturing method of the gas distribution component provided by this invention can better form uniform gas through holes. The cover plate structure solves the problems of low processing efficiency for products with small holes inside, as well as burrs and irregularities on the edges of the holes inside the product, shortening the processing time. By adding side drilling, it achieves two-stage gas uniformity through holes, which makes the gas released evenly and greatly improves the gas uniformity effect. At the same time, it avoids the problem of through hole blockage caused by long-term gas uniformity, which helps to extend its service life. Attached Figure Description

[0052] Figure 1 This is a schematic diagram of the structure of the first uniform air passage on the ventilated workpiece obtained in Embodiment 1 of the present invention;

[0053] Figure 2 This is a schematic diagram of the structure of the ventilated workpiece obtained in Embodiment 1 of the present invention;

[0054] Figure 3 This is a schematic diagram of the airway cover fastening method used in Embodiment 1 of the present invention;

[0055] Figure 4 This is a schematic diagram of the structure of the second uniform air passage on the ventilated workpiece obtained in Embodiment 1 of the present invention.

[0056] Among them, 1-raw material blank; 2-air passage cover plate; 3-air passage groove; 4-positioning boss; 5-first air equalization through hole; 6-second air equalization through hole; 7-support step. Detailed Implementation

[0057] It should be understood that in the description of this invention, the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0058] It should be noted that, in the description of this invention, unless otherwise explicitly specified and limited, the terms "set," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0059] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0060] In one specific embodiment, the present invention provides a method for manufacturing a ventilated workpiece, which specifically includes the following steps:

[0061] (1) Provide a raw material blank 1, perform milling on the surface of the raw material blank 1 to obtain an air passage groove 3, process the air passage groove 3 to form at least one positioning boss 4, the positioning boss 4 divides the air passage groove 3 into at least two air passage cavities, and forms a support step 7 along the inner wall of the air passage groove 3, so that the top surface of the support step 7 is flush with the end face of the positioning boss 4.

[0062] (2) A hole is drilled on the bottom surface of the air passage cavity to form a plurality of first uniform air passages 5, and the first uniform air passages 5 penetrate the raw material blank 1.

[0063] (3) Provide an air passage cover plate 2, fasten the air passage cover plate 2 onto the air passage groove 3 so that it abuts against the support step 7, the distance between the end of the air passage cover plate 2 and the inner wall of the air passage groove 3 is 0.01 to 0.05 mm, and then perform argon arc welding to form at least two uniform gas chambers in the air passage groove 3 and the air passage cavity, wherein the welding current of argon arc welding is 50 to 70 A and the welding voltage is 8.5 to 10 V;

[0064] (4) Secondary drilling is performed on the side wall surface of the raw material blank 1 to form several second uniform air passages 6, so that the second uniform air passages 6 are connected to the uniform air chamber to obtain a ventilated workpiece.

[0065] In some implementations, the primary drilling is drilling with a drill bit, and the secondary drilling is laser drilling.

[0066] In some embodiments, the manufacturing method of the present invention further includes: drilling three times on the surface of the raw material blank 1 away from the second gas equalization hole 6 to form at least two detection holes, such that the detection holes connect to the gas equalization chamber, water is introduced into the detection holes, and the connection between the air passage cover 2 and the air passage groove 3 is observed to see if leakage occurs. Specifically, the three drillings are performed using laser drilling. The detection holes are threaded holes, and each detection hole corresponds to one of the gas equalization chambers.

[0067] In some embodiments, the manufacturing method of the present invention further includes: deburring, grinding and polishing the ventilated workpiece in sequence, so that the flatness of the outer surface of the ventilated workpiece is ≤0.05mm and the roughness is ≤0.5μm.

[0068] In some embodiments, the raw material blank 1 is made of stainless steel, and the air passage cover 2 is made of stainless steel.

[0069] In another specific embodiment, the present invention provides a ventilated workpiece, which is prepared using the ventilated workpiece manufacturing method described in a specific embodiment.

[0070] The ventilated workpiece includes a workpiece body and an air duct cover plate 2. An air duct groove 3 is formed on the top surface of the workpiece body. At least one positioning boss 4 is provided within the air duct groove 3, dividing the air duct groove 3 into at least two air duct cavities. A supporting step 7 is provided circumferentially on the inner wall of the air duct groove 3, with the top surface of the supporting step 7 flush with the end face of the positioning boss 4. The air duct cover plate 2 is fastened to the air duct groove 3, forming at least two uniform air chambers with the air duct cavities. A plurality of first uniform air passages 5 penetrating the workpiece body are distributed on the bottom surface of the air duct cavities. The first uniform air passages 5 are circular holes and / or polygonal holes. A plurality of second uniform air passages 6 are distributed on the side surface of the workpiece body, communicating with the uniform air chambers. The second uniform air passages 6 are U-shaped holes, and the plurality of second uniform air passages 6 are arranged side-by-side along the length of the uniform air chambers.

[0071] In some embodiments, the thickness of the workpiece body is 16–24 mm, the depth of the air channel groove 3 is 8–18 mm, and the thickness of the air channel cover plate 2 is 3–6 mm. The porous gas distribution assembly of the present invention achieves double-pass gas equalization by adding side perforations, resulting in uniform gas release and significantly improving the gas equalization effect. Simultaneously, it avoids the problem of through-hole blockage caused by prolonged gas equalization. During use, gas enters the first equalization through-hole 5, then flows into the equalization chamber formed between the air channel groove 3 and the air channel cover plate 2, and finally exits through the second equalization through-hole 6 connected to it, achieving uniform gas release.

[0072] In another specific embodiment, the present invention provides an annealing apparatus, which includes the ventilated workpiece described in another specific embodiment.

[0073] Example 1

[0074] This embodiment provides a method for manufacturing a ventilated workpiece, which specifically includes the following steps:

[0075] (1) Provide raw material blank 1, such as Figure 1 As shown, a milling process is performed on the surface of the raw material blank 1 to obtain an air passage groove 3. The air passage groove 3 is then processed to form a positioning boss 4. The positioning boss 4 divides the air passage groove 3 into two air passage cavities. A support step 7 is then formed along the inner wall of the air passage groove 3, so that the top surface of the support step 7 is flush with the end face of the positioning boss 4.

[0076] (2) Drill holes on the bottom surface of the air passage cavity to form multiple evenly distributed first uniform air passages 5, and make the first uniform air passages 5 penetrate the raw material blank 1. The first uniform air passages 5 are circular holes.

[0077] (3) Provide airway cover 2, such as Figure 2 and Figure 3 As shown, the air passage cover 2 is fastened onto the air passage groove 3 so that it abuts against the support step 7, keeping the distance between the end of the air passage cover 2 and the inner wall of the air passage groove 3 at 0.03mm. Then, argon arc welding is performed to form at least two uniform gas chambers in the air passage groove 3 and the air passage cavity. The welding current of the argon arc welding is 60A and the welding voltage is 9V.

[0078] (4) Figure 2 and Figure 4 As shown, laser drilling is performed on the side wall surface of the raw material blank 1 to form multiple second gas equalization holes 6 arranged side by side along the length direction of the gas equalization chamber, so that the second gas equalization holes 6 connect the gas equalization chamber, and the second gas equalization holes 6 are "U" shaped holes.

[0079] (5) Laser drilling is performed on the side of the raw material blank 1 away from the second uniform air passage 6 to form two detection passages, so that the detection passages correspond one-to-one with the uniform air chamber and are connected to each other. Water is simultaneously introduced into the two detection passages, and it is observed whether there is leakage at the connection between the air passage cover plate 2 and the air passage groove 3.

[0080] (6) The ventilation workpiece is deburred, ground and polished in sequence so that the flatness of the outer surface of the ventilation workpiece is 0.05mm and the roughness is 0.4μm.

[0081] Example 2

[0082] This embodiment provides a method for manufacturing a ventilated workpiece, which specifically includes the following steps:

[0083] (1) Provide a raw material blank 1, and perform milling on the surface of the raw material blank 1 to obtain an air passage groove 3. Process the air passage groove 3 to form a positioning boss 4. The positioning boss 4 divides the air passage groove 3 into two air passage cavities. Then, a support step 7 is formed along the inner wall of the air passage groove 3 so that the top surface of the support step 7 is flush with the end face of the positioning boss 4.

[0084] (2) Drill holes on the bottom surface of the air passage cavity to form multiple evenly distributed first uniform air passages 5, and make the first uniform air passages 5 penetrate the raw material blank 1. The first uniform air passages 5 are circular holes.

[0085] (3) Provide an air passage cover plate 2, fasten the air passage cover plate 2 onto the air passage groove 3 so that it abuts against the support step 7, and keep the distance between the end of the air passage cover plate 2 and the inner wall of the air passage groove 3 at 0.02mm. Then perform argon arc welding to form at least two uniform gas chambers in the air passage groove 3 and the air passage cavity, wherein the welding current of the argon arc welding is 55A and the welding voltage is 8.5V.

[0086] (4) Laser drilling is performed on the side wall surface of the raw material blank 1 to form multiple second gas equalization holes 6 arranged side by side along the length direction of the gas equalization chamber, so that the second gas equalization holes 6 connect the gas equalization chamber and the second gas equalization holes 6 are "U" shaped holes.

[0087] (5) Laser drilling is performed on the side of the raw material blank 1 away from the second uniform air passage 6 to form two detection passages, so that the detection passages correspond one-to-one with the uniform air chamber and are connected to each other. Water is simultaneously introduced into the two detection passages, and it is observed whether there is leakage at the connection between the air passage cover plate 2 and the air passage groove 3.

[0088] (6) The ventilation workpiece is deburred, ground and polished in sequence so that the flatness of the outer surface of the ventilation workpiece is 0.03mm and the roughness is 0.5μm.

[0089] Example 3

[0090] This embodiment provides a method for manufacturing a ventilated workpiece, which specifically includes the following steps:

[0091] (1) Provide a raw material blank 1, and perform milling on the surface of the raw material blank 1 to obtain an air passage groove 3. Process the air passage groove 3 to form a positioning boss 4. The positioning boss 4 divides the air passage groove 3 into two air passage cavities. Then, a support step 7 is formed along the inner wall of the air passage groove 3 so that the top surface of the support step 7 is flush with the end face of the positioning boss 4.

[0092] (2) Drill holes on the bottom surface of the air passage cavity to form multiple evenly distributed first uniform air passages 5, and make the first uniform air passages 5 penetrate the raw material blank 1. The first uniform air passages 5 are circular holes.

[0093] (3) Provide an air passage cover plate 2, fasten the air passage cover plate 2 onto the air passage groove 3 so that it abuts against the support step 7, and keep the distance between the end of the air passage cover plate 2 and the inner wall of the air passage groove 3 at 0.04 mm. Then perform argon arc welding to form at least two uniform gas chambers in the air passage groove 3 and the air passage cavity, wherein the welding current of argon arc welding is 75A and the welding voltage is 10V.

[0094] (4) Laser drilling is performed on the side wall surface of the raw material blank 1 to form multiple second gas equalization holes 6 arranged side by side along the length direction of the gas equalization chamber, so that the second gas equalization holes 6 connect the gas equalization chamber and the second gas equalization holes 6 are "U" shaped holes.

[0095] (5) Laser drilling is performed on the side of the raw material blank 1 away from the second uniform air passage 6 to form two detection passages, so that the detection passages correspond one-to-one with the uniform air chamber and are connected to each other. Water is simultaneously introduced into the two detection passages, and it is observed whether there is leakage at the connection between the air passage cover plate 2 and the air passage groove 3.

[0096] (6) The ventilation workpiece is deburred, ground and polished in sequence so that the flatness of the outer surface of the ventilation workpiece is 0.05mm and the roughness is 0.5μm.

[0097] Comparative Example 1

[0098] This comparative example provides a method for manufacturing a ventilated workpiece, which specifically includes the following steps:

[0099] (1) Provide a raw material blank 1, drill holes in the raw material blank 1 to form multiple evenly distributed air passage holes, and make the first air passage hole 5 penetrate the raw material blank 1. The air passage hole is a circular hole, and an air-permeable workpiece is obtained.

[0100] (2) The ventilation workpiece is deburred, ground and polished in sequence so that the flatness of the outer surface of the ventilation workpiece is 0.05mm and the roughness is 0.4μm.

[0101] Comparative Example 2

[0102] This comparative example provides a method for manufacturing a ventilated workpiece, which specifically includes the following steps:

[0103] (1) Multiple uniformly distributed air holes are formed on the raw material blank 1 using 3D printing technology to obtain an air-permeable workpiece;

[0104] (2) The ventilation workpiece is deburred, ground and polished in sequence so that the flatness of the outer surface of the ventilation workpiece is 0.05mm and the roughness is 0.4μm.

[0105] The present invention conducted performance tests on the ventilated workpieces prepared in the above embodiments and comparative examples, and the results are shown in Table 1. Performance test: ① Observe whether there are obvious burrs or protrusions on the edge of the air-uniforming holes; ② Randomly select ten air-uniforming holes on the raw material blank 1, measure the hole diameter of each hole, and calculate the average deviation of the hole diameter.

[0106] Table 1

[0107]

[0108]

[0109] As can be seen from Table 1, compared with Comparative Example 1 and Comparative Example 2, no burrs or protrusions were found on the edge of the uniform air passage of the ventilated workpiece prepared in Example 1, and the average deviation of the hole diameter was reduced. This is because Example 1 can better control the regularity of the uniform air passage by first slotting and then drilling the hole in the raw material blank 1 and adopting a cover plate structure.

[0110] The applicant declares that the above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention fall within the protection and disclosure scope of the present invention.

Claims

1. A method for manufacturing a ventilated workpiece, characterized in that, The manufacturing method includes: (I) Provide a raw material blank, perform milling on the surface of the raw material blank to obtain an air passage groove, process the air passage groove to form at least one positioning boss, the positioning boss divides the air passage groove into at least two air passage cavities; the processing further includes: forming a support step along the inner wall of the air passage groove, such that the top surface of the support step is flush with the end face of the positioning boss. (II) A hole is drilled on the bottom surface of the airway cavity to form several first uniform air passages; (III) Provide an airway cover plate, and fasten the airway cover plate to the airway groove for connection, so as to form at least two uniform air chambers with the airway cavity; the connection method includes: extending the airway cover plate into the airway groove so that it abuts against the support step, and then performing argon arc welding; (IV) The side wall surface of the raw material blank is punched a second time to form a number of second uniform air passages, so that the second uniform air passages are connected to the uniform air chamber to obtain a ventilated workpiece; The aforementioned ventilated workpiece is used in annealing equipment for preparing semiconductor devices.

2. The manufacturing method according to claim 1, characterized in that, The material of the raw material blank is stainless steel; The airway cover is made of stainless steel; The first gas-distributing through hole penetrates the raw material blank; The diameter of the second uniform air passage is greater than or equal to the diameter of the first uniform air passage.

3. The manufacturing method according to claim 1 or 2, characterized in that, The aforementioned single drilling refers to drilling with a drill bit. The secondary drilling is laser drilling.

4. The manufacturing method according to claim 1, characterized in that, After the airway cover is inserted into the airway groove, the distance between the end of the airway cover and the inner wall of the airway groove is 0.01~0.05mm. The welding current for the argon arc welding is 50~70A; The welding voltage for the argon arc welding is 8.5~10V.

5. The manufacturing method according to claim 1, characterized in that, The manufacturing method further includes: drilling holes three times on the surface of the raw material blank away from the second uniform air passage to form at least two detection passages, such that the detection passages are connected to the uniform air chamber, and using the detection passages to perform defect testing on the air-permeable workpiece; The detection through-hole is a threaded hole; The detection through-holes correspond one-to-one with the gas uniform chambers; The defect testing method includes: introducing water into the detection through hole and observing whether there is leakage at the connection between the air passage cover and the air passage groove; The three drilling operations were laser drilling.

6. The manufacturing method according to claim 1, characterized in that, The manufacturing method further includes precision machining of the ventilated workpiece; The finishing process includes: deburring, grinding and polishing the ventilated workpiece in sequence, so that the flatness of the outer surface of the ventilated workpiece is ≤0.05mm and the roughness is ≤0.5μm.

7. A ventilated workpiece, characterized in that, The ventilation workpiece is prepared using the manufacturing method of any one of claims 1-6. The ventilation workpiece includes a workpiece body and an air passage cover plate. An air passage groove is formed on the top surface of the workpiece body. At least one positioning boss is provided in the air passage groove. The positioning boss divides the air passage groove into at least two air passage cavities. The air passage cover plate is fastened to the air passage groove and forms at least two uniform air chambers with the air passage cavities.

8. The ventilated workpiece according to claim 7, characterized in that, The bottom surface of the air passage cavity is provided with a number of first uniform air passages penetrating the workpiece body, and the side surface of the workpiece body is provided with a number of second uniform air passages, which are connected to the uniform air chamber. A support step is provided circumferentially on the inner wall of the airway groove, and the top surface of the support step is flush with the end face of the positioning boss. The thickness of the workpiece body is 16~24mm; The depth of the airway groove is 8~18mm; The thickness of the airway cover is 3~6mm.

9. The ventilated workpiece according to claim 8, characterized in that, The first air distribution hole is a circular hole and / or a polygonal hole; The second air distribution orifice is a "U" shaped orifice; Several second uniform air passages are arranged side by side along the length of the uniform air chamber.

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