一种碳陶坩埚及制备工艺

By preparing carbon fiber crucible blanks and combining them with a two-step resin densification and ceramic sintering process, carbon-ceramic crucibles are formed, which solves the problem of frequent replacement of quartz crucibles and carbon-carbon crucibles in single crystal furnaces, and achieves lower material consumption and longer service life.

CN118271101BActive Publication Date: 2026-07-17DEYI HI TECH (HANGZHOU) TECH CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
DEYI HI TECH (HANGZHOU) TECH CO LTD
Filing Date
2024-03-26
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

In existing single crystal furnaces, quartz crucibles and carbon-carbon crucibles require frequent replacement, consume a large amount of materials, have short service life, and exhibit poor thermal reliability, resulting in high costs and increased energy consumption.

Method used

Carbon fiber is used as raw material to prepare carbon fiber crucible blanks through three-dimensional weaving, needle punching and stitching processes. Combined with two-step resin densification and ceramic sintering processes, carbon ceramic crucibles are formed. Boron nitride is used to prevent silicon vapor corrosion.

Benefits of technology

This extends the service life of carbon ceramic crucibles to 12-18 months, reduces replacement frequency and material consumption, and improves the reliability of the thermal field and product strength.

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Abstract

本发明公开了一种碳陶坩埚及制备工艺,采用碳纤维作为坩埚原材料,通过三维编织、针刺、缝合等工艺制备碳纤维坩埚坯体。碳纤维具有高强度,有效保证了产品的性能。通过两步树脂增密碳化工艺,形成具有一定密度的碳碳材料。采用环氧树脂等低残碳率树脂作为一次增密碳源前驱体,环氧树脂残碳率低,可打开产品孔隙,在增密中同时打开孔隙,利于二次增密。采用酚醛树脂或呋喃树脂等高残碳率树脂为二次增密碳源前驱体,酚醛树脂残碳率高,可有效填充产品孔隙,得到具有一定密度的碳陶坩埚坯体。同时采用陶瓷烧结工艺,使氮化硼进入碳陶坩埚坯体内部,形成碳陶坩埚,氮化硼与硅不发生反应,可有效防止硅蒸汽对碳陶坩埚的侵蚀,延长了产品使用寿命。
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