一种碳化硅粉合成设备及合成方法

By controlling the temperature gradient and the effect of gravity, silicon carbide powder with uniform particle size was prepared using silicon carbide powder synthesis equipment, which solved the problems of uneven particle size and low density of silicon carbide powder in the existing technology, and achieved the growth of thicker silicon carbide crystals and cost reduction.

CN118289763BActive Publication Date: 2026-07-17CHINA UNIV OF MINING & TECH

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
CHINA UNIV OF MINING & TECH
Filing Date
2024-04-01
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

The existing silicon carbide powder has an uneven particle size and low packing density, which makes it difficult to grow silicon carbide crystals and form thick silicon carbide crystals.

Method used

Using silicon carbide powder synthesis equipment, silicon carbide powder with uniform particle size is prepared by controlling the heating temperature gradient and gravity. The addition of silicon carbide seed crystals is precisely controlled by the conveying device and the discharge mechanism to form spherical silicon carbide powder and improve the bulk density.

Benefits of technology

This technology enables uniform control of silicon carbide powder particle size, increases the packing density of silicon carbide powder, allows for the growth of thicker silicon carbide crystals, simplifies the production process, and reduces costs.

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Abstract

本发明公开一种碳化硅粉合成设备及合成方法,包括炉体、炉盖、晶种盒、传输装置、冷却装置、加热装置和炉体控制系统,炉体内部形成生长室,生长室内放置有坩埚,炉体侧壁和坩埚侧壁均同轴开设有测温孔,坩埚侧壁上的测温孔通过石英玻璃密封;炉盖装配在炉体上部,用于密封炉体;晶种盒装配在坩埚上部,晶种盒底部设有出料机构;传输装置与生长室相连,用于向坩埚内输送碳粉;冷却装置用于为炉体降温;加热装置包括感应线圈,感应线圈用于为坩埚加热;炉体控制系统用于控制传输装置、冷却装置和加热装置工作或停止工作。本发明能够控制碳化硅粉粒径的大小,提高碳化硅粉的堆积密度,从而使用该碳化硅粉能够生长出更厚的碳化硅晶体。
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