一种覆膜氮化硅陶瓷及其制备方法
By forming a diamond/MoS2-TiN composite film on the surface of silicon nitride ceramics, the problems of insufficient lubrication and thermal management of silicon nitride ceramic bearings in a vacuum environment are solved, improving hardness, wear resistance and thermal conductivity, and achieving improved self-lubricating performance.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHENYANG JIANZHU UNIVERSITY
- Filing Date
- 2024-04-07
- Publication Date
- 2026-07-17
AI Technical Summary
Existing silicon nitride ceramic bearings suffer from insufficient lubrication and are prone to heat generation in a vacuum environment, leading to wear and failure. They also lack effective self-lubricating and thermal conductivity properties.
A composite film consisting of a diamond film and a MoS2-TiN film is formed on the surface of silicon nitride ceramics by hot-wire chemical vapor deposition and physical vapor deposition techniques, which improves hardness, wear resistance and thermal conductivity.
It significantly improves the hardness, wear resistance, and thermal conductivity of silicon nitride ceramics, enhances their self-lubricating properties, and solves the problems of insufficient lubrication and thermal management in vacuum environments.
Smart Images
Figure CN118307342B_ABST