A sheet clamp, sheet clamping method, and thermo mechanical analyzer

Abstract

The application belongs to the technical field of chip encapsulation and discloses a sheet clamp, a sheet clamping method and a thermal mechanical analyzer. The sheet clamp comprises a base, a first clamping assembly and a second clamping assembly. The first clamping assembly and the second clamping assembly are oppositely arranged. The first clamping assembly comprises a first fixing module and a first clamping piece. The first fixing module is arranged on the base, and the first clamping piece is connected to the first fixing module. The second clamping assembly comprises a second fixing module and a second clamping piece. The second fixing module is arranged on the base, and the second clamping piece is connected to the second fixing module. The second clamping piece and the first clamping piece can approach or move away from each other. The sheet clamp can quickly clamp and position the sheet through the first clamping piece and the second clamping piece which can approach or move away from each other, thereby improving the efficiency and accuracy of the sheet thermal expansion coefficient detection.

Description

Technical Field

[0001] This invention relates to the field of chip packaging and testing technology, and in particular to a sheet fixture, a sheet clamping method, and a thermomechanical analyzer. Background Technology

[0002] As the carrier of semiconductor packaging, the packaging substrate provides support, protection, electrical interconnection, and heat dissipation for the chip. With the development of electronic products towards high performance and high integration, the role of advanced packaging technology in the industry chain is becoming increasingly prominent. The packaging substrate represents the largest cost component of semiconductor packaging. To improve chip functionality and reduce production costs, packaging substrates are evolving towards thinner profiles, higher heat dissipation, finer circuitry, and higher integration.

[0003] The coefficient of thermal expansion describes the change in length or volume of a material per unit temperature when the temperature changes. For packaging substrates, the coefficient of thermal expansion of the material is directly related to the stability and reliability of the packaging. Therefore, a thermomechanical analyzer is needed to test the coefficient of thermal expansion of the packaging material. During the test, the sample is placed vertically on the sample stage of the thermomechanical analyzer, and the probe of the thermomechanical analyzer contacts the top of the sample. The change in the length of the sample when the temperature rises is recorded by the change in the position of the probe.

[0004] The current packaging material samples are sheet-like, and the samples are thin (usually <1mm) and small in size. Placing the samples not only takes a certain amount of time, but the samples are also difficult to keep stable after placement and are very prone to tilting. Even if the sheet-like samples are temporarily held vertical by touching the top of the probe to the sample, the samples are still prone to falling off during the heating process, causing the test to be interrupted, which greatly affects the efficiency and accuracy of the thermal expansion coefficient detection of the samples. Summary of the Invention

[0005] The purpose of this invention is to provide a sheet clamp, a sheet clamping method, and a thermomechanical analyzer, which facilitates rapid clamping and positioning of sheets, enabling vertical placement of sheets and improving the efficiency and accuracy of sheet thermal expansion coefficient detection.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] A sheet clamp for positioning a sheet, the sheet clamp including a base, a first clamping assembly and a second clamping assembly, the first clamping assembly and the second clamping assembly being disposed opposite to each other, the first clamping assembly including:

[0008] A first fixing module, wherein the first fixing module is disposed on the base; and

[0009] A first clamping member is connected to the first fixing module;

[0010] The second clamping assembly includes:

[0011] A second fixing module, wherein the second fixing module is disposed on the base; and

[0012] The second clamping member is connected to the second fixing module, and the second clamping member and the first clamping member can move closer to or further away from each other;

[0013] When the sheet is placed vertically between the second clamping member and the first clamping member, the second clamping member and the first clamping member can approach each other and contact the sheet, thereby positioning the sheet. All contact points between the second clamping member and the first clamping member and the sheet are on a straight line in the same vertical direction.

[0014] Preferably, the first clamping component further includes:

[0015] The first upright is connected at its bottom to the first fixing module and is connected to the first clamping member. The first upright can slide towards or away from the second clamping member.

[0016] Preferably, one end of the first clamping member is slidably connected to the first upright, and the first clamping member slides in the vertical direction.

[0017] Preferably, the second clamping component further includes:

[0018] The second upright is connected at its bottom to the second fixing module and is connected to the second clamping member. The second upright can slide towards or away from the first clamping member.

[0019] Preferably, one end of the second clamping member is slidably connected to the second upright, and the second upright slides in the vertical direction.

[0020] Preferably, at least two first clamping members are provided along the height direction of the sheet, and the second clamping member is located between two adjacent first clamping members, or...

[0021] The first clamping member and the second clamping member are provided in a one-to-one correspondence.

[0022] Preferably, the upper surface of the base is provided with a first scale line and a second scale line that are perpendicular to each other, the second clamping member and the first clamping member both move along the first scale line, and the sheet is placed along the second scale line.

[0023] Preferably, the upper surface of the base is provided with a plurality of concentric circles, the centers of which coincide at the intersection of the first scale line and the second scale line.

[0024] A sheet clamping method is applied to a sheet whose coefficient of thermal expansion is to be tested. The sheet is clamped using a sheet clamp, and the sheet clamping method includes:

[0025] The sheet is placed vertically on the upper surface of the base;

[0026] Move the first clamping member and the second clamping member toward the sheet until the first clamping member and the second clamping member contact the sheet, so that the sheet is vertically positioned;

[0027] The base is placed on the sample stage of the thermomechanical analyzer body, and the probe of the thermomechanical analyzer is used to contact the sheet. Then, the second clamping member is moved away from the sheet to give the sheet room to expand.

[0028] A thermomechanical analyzer includes a thermomechanical analyzer body and a sheet clamp, the sheet clamp being able to be mounted on the sample stage of the thermomechanical analyzer body.

[0029] The beneficial effects of this invention are:

[0030] This invention provides a sheet clamp that, by vertically placing the sheet to be positioned on a base and positioning the sheet between a first clamping member and a second clamping member, allows the first and second clamping members, which can move closer or further apart from each other, to contact the sheet. All contact points are aligned vertically, making it difficult for the sheet to rotate around its vertical axis. This achieves rapid positioning of the sheet and is widely applicable to thinner sheets. The operation is simple, convenient, and fast, and the clamped sheet is less prone to movement, ultimately improving the efficiency and accuracy of sheet thermal expansion coefficient detection.

[0031] The present invention provides a sheet clamping method that can quickly achieve vertical positioning of the sheet whose thermal expansion coefficient is to be tested. At the same time, before the sheet is tested for thermal expansion coefficient, the probe of the thermomechanical analyzer limits the sheet and reserves a certain expansion space on the side of the sheet to achieve the effect of protecting the sheet.

[0032] The present invention discloses a thermomechanical analyzer, which facilitates the analysis of thin sheet samples by setting a sheet clamp on the sample stage of the thermomechanical analyzer body, thereby improving the efficiency and accuracy of the analysis. Attached Figure Description

[0033] Figure 1 This is a schematic diagram of the overall structure of a sheet clamp according to the present invention;

[0034] Figure 2 This is a top view of the base of the present invention.

[0035] In the picture:

[0036] 100. Sheet material; 1. Base; 11. First scale line; 12. Second scale line; 13. Circle; 2. First clamping assembly; 21. First fixing module; 22. First upright; 23. First clamping component; 3. Second clamping assembly; 31. Second fixing module; 32. Second upright; 33. Second clamping component. Detailed Implementation

[0037] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0038] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0039] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0040] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0041] The following reference Figures 1 to 2 The present invention provides a sheet clamp, a sheet holding method, and a thermomechanical analyzer.

[0042] The thermomechanical analyzer includes an analyzer body and a sheet clamp. The analyzer body has a probe and a sample stage, and the sheet clamp can be placed on the sample stage of the analyzer body. The sheet clamp can hold and position the sheet 100, keeping it in a vertical position. In this embodiment, the sheet 100 is described using a sheet-like sample as an example. Positioning the sheet-like sample facilitates the detection of its coefficient of thermal expansion. An exemplary structure of the sheet clamp is described below in this embodiment.

[0043] The sheet clamp includes a base 1, a first clamping component 2, and a second clamping component 3. Both the first clamping component 2 and the second clamping component 3 are disposed on the base 1. The first clamping component 2 and the second clamping component 3 are disposed opposite to each other and can cooperate to clamp the sheet 100 placed between the first clamping component 2 and the second clamping component 3.

[0044] Specifically, the base 1 is cylindrical. The base 1 can be an independent unit or the sample stage of the thermomechanical analyzer body can be used as the base 1. In this embodiment, the base 1 is independently set and is placed on the sample stage of the thermomechanical analyzer body.

[0045] Furthermore, the upper surface of the base 1 is provided with a first scale line 11 and a second scale line 12 that are perpendicular to each other. Both the first scale line 11 and the second scale line 12 are dashed lines. The intersection of the first scale line 11 and the second scale line 12 is the zero point, which coincides with the axis of the base 1 and is located directly below the probe of the thermomechanical analyzer body. The first scale line 11 and the second scale line 12 are symmetrically marked from their intersection to both ends. In this embodiment, each division is 1 mm. The second scale line 12 is used to provide a reference for the placement of the sheet 100. The sheet 100 is placed along the second scale line 12, and the center of the bottom side of the sheet 100 coincides with the zero point, so that the sheet 100 is located in the middle of the upper surface of the base 1.

[0046] In addition, the upper surface of the base 1 is provided with multiple concentric circles 13 of different diameters. In this embodiment, two circles are used as an example. The center of the circles 13 coincides with the axis of the base 1. By observing the relative positions of the two ends of the bottom side of the sheet 100 with the circles 13, it can be preliminarily determined whether the sheet 100 is placed accurately. The first scale line 11, the second scale line 12, and the circles 13 can be implemented by drawing lines on the surface of the base 1 or engraving lines on the surface of the base 1.

[0047] The first clamping assembly 2 includes a first fixing module 21, a first upright 22, and a first clamping member 23. The first fixing module 21 is disposed on the upper surface of the base 1, the first upright 22 is vertically disposed, the bottom end of the first upright 22 is connected to the first fixing module 21, and one end of the first clamping member 23 is connected to the first upright 22.

[0048] The second clamping assembly 3 includes a second fixing module 31, a second upright 32, and a second clamping member 33. The second fixing module 31 is disposed on the base 1, the second upright 32 is vertically disposed, the bottom end of the second upright 32 is connected to the second fixing module 31, and one end of the second clamping member 33 is connected to the second upright 32.

[0049] Furthermore, the first clamping member 23 and the second clamping member 33 can move closer to or further away from each other. Specifically, in this embodiment, the first fixing module 21 is fixedly connected to the base 1, and a slide rail is provided on the first fixing module 21. The slide rail is set along the first scale line 11, and the bottom end of the first upright 22 is slidably connected to the slide rail, thereby causing the first upright 22 to drive the first clamping member 23 to slide closer to or further away from the second clamping member 33, thus facilitating the contact of the first clamping member 23 with the sheet 100. It should be noted that there is a certain friction between the bottom end of the first upright 22 and the slide rail, so that the first upright 22 cannot slide on the slide rail on its own without the action of external force.

[0050] In addition, in this embodiment, the second fixing module 31 is fixedly connected to the base 1, and a slide rail is provided on the second fixing module 31. The slide rail is set along the first scale line 11, and the bottom end of the second upright 32 is slidably connected to the slide rail. This allows the second upright 32 to drive the second clamping member 33 to slide closer to or further away from the first clamping member 23, thereby facilitating the second clamping member 33 to cooperate with the first clamping member 23 to contact the sheet 100 and clamp and position the sheet 100. It should be noted that there is a certain friction between the bottom end of the second upright 32 and the slide rail, so that the second upright 32 cannot slide on the slide rail on its own without the action of external force.

[0051] Furthermore, one end of the first clamping member 23 is slidably connected to the first upright rod 22, and the first upright rod 22 slides vertically. Specifically, the first clamping member 23 is a straight rod, horizontally positioned along the first scale line 11, with the other end of the first clamping member 23 perpendicular to the surface of the sheet 100. The first clamping member 23 is also forked in shape. One end of the first clamping member 23 is provided with a component slidably connected to the first upright rod 22, such as a ring slidably fitted onto the first upright rod 22, thereby allowing the first clamping member 23 to slide vertically.

[0052] Furthermore, one end of the second clamping member 33 is slidably connected to the second upright 32, and the second upright 32 slides vertically. Specifically, the structure of the second clamping member 33 is the same as that of the first clamping member 23, and will not be described again here. The second clamping member 33 is horizontal and set along the first scale line 11, so that the other end of the second clamping member 33 is perpendicular to the surface of the sheet 100, and the other end of the second clamping member 33 and the other end of the first clamping member 23 are always in the same vertical plane. One end of the second clamping member 33 is provided with a component that can be slidably connected to the second upright 32, such as a ring that can be slidably sleeved on the second upright 32, so that the second clamping member 33 can slide vertically.

[0053] Based on the above, when the first clamping member 23 and the second clamping member 33 contact the sheet 100, all contact points between the first clamping member 23 and the second clamping member 33 and the sheet 100 are on the same vertical straight line, and the straight line coincides with the axis of the base 1, so that the middle of the sheet 100 in the width direction is clamped and positioned, thereby improving the stability of the sheet 100 being clamped and positioned.

[0054] Furthermore, at least two first clamping members 23 are provided along the height direction of the sheet 100, and the second clamping member 33 is located between two adjacent first clamping members 23, or the first clamping member 23 and the second clamping member 33 are provided in a one-to-one correspondence.

[0055] For example, in this embodiment, there are two first clamping members 23 along the axial direction of the first upright 22, and one second clamping member 33. The second clamping member 33 is located between the two first clamping members 23, and the distance between the second clamping member 33 and the two first clamping members 23 is equal, so that the first clamping member 23 and the second clamping member 33 clamp the sheet 100 at three points, making the sheet 100 less prone to tilting.

[0056] In addition, before conducting the thermal expansion coefficient test, expansion space needs to be provided for the sheet 100. The sheet 100 is supported at two points by the two first clamping members 23, and the probe touches the top of the sheet 100, so that the sheet 100 can be vertically positioned. At this time, a certain distance is left between the second clamping member 33 and the sheet 100, so that the sheet 100 has a certain expansion space. After the sheet 100 expands due to heat, it will be limited by the second clamping member 33, which can prevent the sheet 100 from tilting or falling off the probe after being heated.

[0057] Furthermore, the distance between the second clamping member 33 and the first clamping member 23 is 1 / 8 to 3 / 8 of the length of the sheet 100. In this embodiment, it is preferably 1 / 4 of the length of the sheet 100. This ensures that the three contact points between the second clamping member 33 and the two first clamping members 23 and the sheet 100 are evenly distributed along the length of the sheet 100, resulting in uniform force on the sheet 100 and improving the positioning effect of the sheet 100. At the same time, the three contact points between the second clamping member 33 and the first clamping member 23 and the sheet 100 do not coincide, which reduces the possibility of the sheet 100 being damaged locally due to simultaneous force on the same parts on both sides, thus protecting the sheet 100.

[0058] It should be noted that there may be two or more of the first clamping member 23 and the second clamping member 33, and the first clamping member 23 and the second clamping member 33 may be configured in a one-to-one correspondence, so that the positioning of the sheet 100 is more stable.

[0059] Furthermore, all components in this embodiment are made of materials with low coefficients of thermal expansion, such as stainless steel and polytetrafluoroethylene (PTFE). This embodiment uses PTFE as an example, which makes the components less prone to thermal expansion during heating, reducing the error in detecting the coefficient of thermal expansion of the sheet material. In addition, PTFE has heat resistance, cold resistance, and corrosion resistance, making the operation of the components more stable.

[0060] This embodiment also discloses a sheet clamping method for clamping a sheet 100 whose coefficient of thermal expansion is to be tested. The sheet 100 to be tested is clamped using the aforementioned sheet clamp, and the sheet clamping method includes:

[0061] The sheet 100 is placed vertically on the upper surface of the base 1, with the bottom edge of the sheet 100 placed along the second scale line 12, and the center of the bottom edge of the sheet 100 coinciding with the center of the upper surface of the base 1.

[0062] The second upright 32 is moved toward the sheet 100. The second upright 32 drives the second clamping member 33 to approach the sheet 100. Before the second clamping member 33 contacts the sheet 100, the second clamping member 33 is moved up and down so that the height of the second clamping member 33 is located at the center of the height direction of the sheet 100. Then the second upright 32 is moved until the second clamping member 33 contacts the surface of the sheet 100.

[0063] The first upright 22 is moved toward the sheet 100. The first upright 22 drives the first clamping member 23 to approach the sheet 100. Before contacting the sheet 100, the first clamping member 23 moves up and down so that the two first clamping members 23 are evenly distributed on both sides of the axis of the second clamping member 33, and the distance between the first clamping member 23 and the second clamping member 33 is 1 / 4 of the length of the sheet 100.

[0064] Place the base 1 on the sample stage of the thermomechanical analyzer, with the axis of the base 1 coinciding with the probe of the thermomechanical analyzer. Then, make the probe of the thermomechanical analyzer contact the sheet 100, and then move the second clamping member 33 away from the sheet 100 to give the sheet 100 an expansion space.

[0065] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A sheet clamping method, applied to clamping a sheet (100) with a coefficient of thermal expansion to be tested, characterized in that, A sheet material (100) to be inspected is held by a sheet clamp. The sheet clamp includes a base (1), a first clamping component (2), and a second clamping component (3). The first clamping component (2) and the second clamping component (3) are arranged opposite to each other. The first clamping component (2) includes: A first fixing module (21) is disposed on the base (1); and The first clamping member (23) is connected to the first fixing module (21); The second clamping assembly (3) includes: The second fixing module (31) is disposed on the base (1); and The second clamping member (33) is connected to the second fixing module (31), and the second clamping member (33) and the first clamping member (23) can move closer to or further away from each other; When the sheet (100) is placed vertically between the second clamping member (33) and the first clamping member (23), the second clamping member (33) and the first clamping member (23) can approach each other and contact the sheet (100) to position the sheet (100). All contact points between the second clamping member (33) and the sheet (100) are on the same vertical straight line, and all contact points between the first clamping member (23) and the sheet (100) are on the same vertical straight line. The sheet clamping method includes: The sheet (100) is placed vertically on the upper surface of the base (1); Move the first clamping member (23) and the second clamping member (33) toward the sheet (100) until the first clamping member (23) and the second clamping member (33) contact the sheet (100) so that the sheet (100) is vertically positioned; The base (1) is placed on the sample stage of the thermomechanical analyzer body, and the probe of the thermomechanical analyzer is used to contact the sheet (100). Then the second clamping member (33) is moved away from the sheet (100) so that the sheet (100) has an expansion space.

2. The sheet clamping method according to claim 1, characterized in that, The first clamping assembly (2) further includes: The first upright (22) is connected at its bottom to the first fixing module (21). The first upright (22) is connected to the first clamping member (23). The first upright (22) can slide towards or away from the second clamping member (33).

3. The sheet clamping method according to claim 2, characterized in that, One end of the first clamping member (23) is slidably connected to the first upright (22), and the first clamping member (23) slides in the vertical direction.

4. The sheet clamping method according to claim 1, characterized in that, The second clamping assembly (3) further includes: The second upright (32) is connected at its bottom to the second fixing module (31), and is connected to the second clamping member (33). The second upright (32) can slide towards or away from the first clamping member (23).

5. A sheet clamping method according to claim 4, characterized in that, One end of the second clamping member (33) is slidably connected to the second upright (32), and the second clamping member (33) slides in the vertical direction.

6. The sheet clamping method according to claim 1, characterized in that, Two first clamping members (23) are provided along the height direction of the sheet (100), and two second clamping members (33) are located between two adjacent first clamping members (23), or... The first clamping member (23) and the second clamping member (33) are configured in a one-to-one correspondence.

7. The sheet clamping method according to claim 1, characterized in that, The upper surface of the base (1) is provided with a first scale line (11) and a second scale line (12) that are perpendicular to each other. The second clamping member (33) and the first clamping member (23) both move along the first scale line (11), and the sheet (100) is placed along the second scale line (12).

8. The sheet clamping method according to claim 7, characterized in that, The upper surface of the base (1) is provided with a plurality of concentric circles (13), the center of which coincides with the intersection of the first scale line (11) and the second scale line (12).

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