A connection mechanism for extending the life of a susceptor heating pedestal

Abstract

The application relates to the technical field of Susceptor heating bases, and discloses a connecting mechanism for prolonging the service life of a Susceptor heating base, which comprises a heating base, a fixing column and a ceramic plate installed on the back of the heating base; when the flange seat is fixed on the lower end of the ceramic plate through bolts, the second air bag ring is subjected to pressure for inflating the first air bag ring, so that the first air bag ring is expanded and tensioned at the lower part of the opening; after the first air bag ring is expanded, the support ring seat is pushed to move upwards along the second plug-in column, so that the support column slides downwards along the inclined block, and the rotation of the rotating ring seat is realized; when the rotating ring seat rotates, the abutting plate pushes the cylinder mechanism in the slotted hole to inflate the tensioning air bag ring, so that the tensioning air bag ring is expanded and tensioned at the upper part of the opening. After the bolts are locked, the firmness of the connection between the second plug-in column on the fixing column and the opening on the heating base can be realized, the ceramic plate is tightly fastened on the back of the heating base, the fixing column and the ceramic plate cannot shake, and no abnormal phenomenon of glass breakage occurs in the use process of the heating base.

Description

Technical Field

[0001] This invention relates to the field of Susceptor heating base technology, specifically a connection mechanism for extending the service life of a Susceptor heating base. Background Technology

[0002] The susceptor (heated substrate, SUSC) is one of the most important pieces of equipment in CVD-related systems. Its reference surface directly contacts and heats the liquid crystal glass substrate. Due to the high precision requirements of the process, the machining accuracy of the reference surface is also very high. The opposite back side of the reference surface contacts and adheres to the bottom of the CVD chamber, and has multiple pin holes for mounting and positioning. Under high pressure and constant temperature conditions, a high-frequency voltage is input to ionize the gas source, forming plasma. Chemical vapor deposition (CVD) occurs on the substrate surface, growing thin films with various functions. Frequent use can easily generate ionic states and a large number of dust particles, contaminating the CVD chamber environment and causing numerous defects in the film formation. If such defects occur, regeneration is necessary. Therefore, a high-temperature resistant, corrosion-resistant, abrasion-resistant, and insulating anodic oxide film needs to be applied to the product surface. Regularly renewing the film layer provides an excellent film formation environment and increases the lifespan of the chamber.

[0003] After a period of use, the Susceptor heating base requires maintenance, cleaning, and regeneration. During this process, as the Roller-Bushing aperture on the back of the Susceptor heating base increases, the fixed size of the matching ceramic on the back causes it to wobble. This can lead to breakage of the Susceptor heating base during use, requiring replacement and resulting in significant financial loss. Furthermore, as the Roller-Bushing aperture increases, the Susceptor heating base becomes unusable, limiting its lifespan. Therefore, we have developed a connection mechanism to extend the lifespan of the Susceptor heating base. Summary of the Invention

[0004] The purpose of this invention is to provide a connection mechanism for extending the service life of the Susceptor heating base, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a connection mechanism for extending the service life of a Susceptor heating base, comprising a heating base, a fixing column, and a ceramic plate mounted on the back of the heating base. The back of the heating base is provided with a plurality of openings, and the ceramic plate is provided with a plurality of through holes corresponding to the openings. The upper middle part of the fixing column is provided with a first insertion post and a second insertion post with gradually decreasing diameters, and the first insertion post and the second insertion post are respectively inserted into the through holes and the openings.

[0006] A flange seat is provided on the outside of the connection between the fixed column and the first plug-in column, and a first airbag ring and a second airbag ring that are distributed vertically and communicate with each other are sleeved on the outside of the first plug-in column.

[0007] The second plug is fitted with a support ring seat and a rotating ring seat distributed vertically. Two sets of symmetrical positioning protrusions on the inner side of the support ring seat slide in the vertical groove corresponding to the outer side wall of the second plug. Two sets of abutment plates symmetrically connected at the upper part of the second plug extend into the groove corresponding to the lower end of the rotating ring seat.

[0008] The support ring seat is located on the upper end of the first airbag ring, and the rotating ring seat is located on the four sets of support springs on the upper end of the support ring seat, so that the two sets of pillars symmetrically connected at the lower end of the rotating ring seat abut against the corresponding inclined blocks on the upper end of the support ring seat. The outer side of the rotating ring seat is fitted with a tension airbag ring.

[0009] When the flange seat is fixed to the lower end of the ceramic plate by bolts, the second airbag ring is pressurized to inflate the first airbag ring, causing the first airbag ring to expand and tighten at the lower part of the opening. After the first airbag ring expands, it pushes the support ring seat to move upward along the second plug-in post, thereby causing the support column to slide down along the inclined block, realizing the rotation of the rotating ring seat.

[0010] As the rotating ring seat rotates, the abutment plate pushes the cylinder mechanism in the slot to inflate the tensioning airbag ring, thereby causing the tensioning airbag ring to expand and tighten at the top of the opening.

[0011] Preferably, the upper end of the flange seat is provided with an annular placement groove for placing the second airbag ring, and the two sides of the first insertion post are provided with vertical receiving grooves. The first airbag ring and the second airbag ring are connected by a first pipe, and the first pipe is disposed inside the vertical receiving groove.

[0012] Preferably, the fixing post, the first insertion post, the second insertion post, and the flange seat are integrally formed.

[0013] Preferably, the outer side of the rotating ring seat is provided with an annular groove for fitting the tensioning airbag ring, and the air outlet of the cylinder mechanism is connected to the tensioning airbag ring through a second pipe built into the rotating ring seat.

[0014] Preferably, the cylinder mechanism includes a cylinder body fixed on the slotted sidewall, a piston disposed inside the cylinder body, and a piston rod connected in the middle of the piston. After the piston rod extends out of the cylinder body, it abuts against the side of the corresponding abutment plate. The second pipe is connected to the air outlet of the cylinder body.

[0015] Preferably, the piston rod includes a connecting cylinder fixed in the middle of the piston and a screw rod screwed inside the connecting cylinder, with the other end of the screw rod extending out of the connecting cylinder and abutting against the side of the corresponding abutment plate.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: When the flange seat is fixed to the lower end of the ceramic plate by bolts, the second airbag ring is pressurized to inflate the first airbag ring, causing the first airbag ring to expand and tighten at the lower part of the opening. After the first airbag ring expands, it pushes the support ring seat to move upward along the second insertion post, thereby causing the support column to slide down along the inclined block, realizing the rotation of the rotating ring seat. When the rotating ring seat rotates, the abutment plate pushes the cylinder mechanism in the slot to inflate the tensioning airbag ring, thereby causing the tensioning airbag ring to expand and tighten at the upper part of the opening. In this way, after the first airbag ring expands and tightens at the lower part of the opening and after the tensioning airbag ring expands and tightens inside the opening, the connection between the second insertion post on the fixed post and the opening on the heating base is firmly achieved. The ceramic plate is firmly fixed to the back of the heating base, and the fixed post and the ceramic plate will not shake. The heating base will not experience abnormal glass breakage during use.

[0017] Because the tensioning airbag can still be tensioned inside the opening after the opening diameter is increased, the connection and fixation between the ceramic plate and the heating base can be achieved without changing the size of the ceramic plate. This extends the service life of the heating base and doubles the number of regeneration cycles. Attached Figure Description

[0018] Figure 1 This is a schematic cross-sectional view of the overall assembled structure of the present invention;

[0019] Figure 2 This is a cross-sectional view of the first airbag ring, the second airbag ring, and the tensioning airbag ring after assembly according to the present invention.

[0020] Figure 3 This is an exploded structural diagram showing the connection between the rotating ring seat, the supporting ring seat, the first airbag ring, the second airbag ring, the first insertion post, and the second insertion post of the present invention.

[0021] Figure 4 This is a three-dimensional structural diagram of the connection between the first insertion post, the second insertion post, the flange seat, and the fixing post of the present invention;

[0022] Figure 5 This is an exploded structural diagram of the connection between the rotating ring seat and the supporting ring seat of the present invention;

[0023] Figure 6For the present invention Figure 5 Schematic diagram of the cross-sectional structure at point AA;

[0024] Figure 7 This is a three-dimensional structural diagram of the present invention after the rotating ring seat, tensioning airbag ring and cylinder mechanism are connected and inverted.

[0025] Figure 8 A cross-sectional schematic diagram showing the abutment plate, cylinder mechanism, and tensioning airbag ring of the present invention;

[0026] Figure 9 This is a three-dimensional structural diagram of the support pillar of the present invention on the inclined block.

[0027] In the diagram: 1. Heating base; 2. Ceramic plate; 3. Flange seat; 301. Annular placement groove; 4. Fixing column; 5. Second airbag ring; 6. Bolt; 7. Opening; 8. Tensioning airbag ring; 9. Support ring seat; 901. Positioning protrusion; 902. Inclined block; 903. Support spring; 10. First airbag ring; 11. Through hole; 12. Rotating ring seat; 121. Annular groove; 122. Slot; 123. Cylinder body; 124. Piston; 125. Support column; 126. Connecting cylinder; 127. Screw; 128. Second pipe; 13. Abutment plate; 14. First pipe; 15. First insertion post; 151. Vertical receiving groove; 16. Second insertion post; 161. Vertical groove. Detailed Implementation

[0028] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0029] Example:

[0030] Please see Figure 1-9 The present invention provides a technical solution:

[0031] Example 1:

[0032] A connection mechanism for extending the service life of a Susceptor heating base includes a heating base 1, a fixing post 4, and a ceramic plate 2 mounted on the back of the heating base 1. The back of the heating base 1 is provided with several sets of openings 7, and the ceramic plate 2 is provided with several sets of through holes 11 corresponding to the openings 7. The inner diameters of the openings 7 and the through holes 11 are the same. The upper middle part of the fixing post 4 is provided with a first insertion post 15 and a second insertion post 16 with gradually decreasing diameters. The first insertion post 15 and the second insertion post 16 are respectively inserted into the through holes 11 and the openings 7.

[0033] A flange seat 3 is provided on the outer side of the connection between the fixed column 4 and the first plug-in column 15. The fixed column 4, the first plug-in column 15, the second plug-in column 16 and the flange seat 3 are integrally formed.

[0034] The outer side of the first plug post 15 is fitted with a first airbag ring 10 and a second airbag ring 5 that are distributed vertically and interconnected; the upper end of the flange seat 3 is provided with an annular placement groove 301 for placing the second airbag ring 5. When the flange seat 3 is fixed to the lower end of the ceramic plate 2 by bolts 6, the second airbag ring 5 is deformed and compressed by the pressure of the flange seat 3 and the ceramic plate 2, and the gas inside the second airbag ring 5 is filled into the first airbag ring 10 through the first pipe 14, causing the first airbag ring 10 to expand.

[0035] Meanwhile, the second airbag ring 5 is tightly fitted between the flange seat 3 and the ceramic plate 2, and also serves to seal the connection between the flange seat 3 and the ceramic plate 2, preventing dust and other foreign objects from entering the back of the heating base 1 through the gap and through hole 11 at the connection between the flange seat 3 and the ceramic plate 2.

[0036] The size of the second airbag ring 5 is larger than that of the first airbag ring 10, so that the internal space of the second airbag ring 5 is larger than that of the first airbag ring 10. This allows the second airbag ring 5 to deform and compress under pressure, which is sufficient to fill the first airbag ring 10 with gas through the first pipe 14, so that the first airbag ring 10 is fully inflated.

[0037] The first insertion post 15 has vertical receiving grooves 151 on both sides. The first airbag ring 10 and the second airbag ring 5 are connected by a first pipe 14, and the first pipe 14 is disposed inside the vertical receiving groove 151. This can hide the first pipe 14 and prevent the first pipe 14 from being exposed outside the first insertion post 15, which would prevent the first insertion post 15 from being smoothly inserted into the through hole 11 due to the obstruction of the first pipe 14.

[0038] In its natural state, both the first airbag ring 10 and the second airbag ring 5 are in a relatively soft state. In this way, the first airbag ring 10 has not yet expanded, which can prevent the first insertion post 15 from being unable to be smoothly inserted into the through hole 11 due to the obstruction of the expansion of the first airbag ring 10.

[0039] The second insertion post 16 is fitted with a support ring seat 9 and a rotating ring seat 12 distributed vertically. Two sets of symmetrical positioning protrusions 901 on the inner side of the support ring seat 9 slide in the vertical groove 161 corresponding to the outer side wall of the second insertion post 16. The positioning protrusions 901 and the support ring seat 9 are integrally formed. In this way, when the first airbag ring 10 expands and pushes the support ring seat 9 to move upward along the second insertion post 16, the positioning protrusions 901 slide in the corresponding vertical groove 161, so that the support ring seat 9 moves upward smoothly along the second insertion post 16 and the support ring seat 9 will not rotate. When the support column 125 slides down along the inclined block 902, the rotating ring seat 12 is rotated.

[0040] The two sets of abutment plates 13 symmetrically connected at the upper part of the second plug post 16 extend into the corresponding slot 122 at the lower end of the rotating ring seat 12;

[0041] The support ring seat 9 is located on the upper end of the first airbag ring 10, and the rotating ring seat 12 is located on the four sets of support springs 903 on the upper end of the support ring seat 9, so that the two sets of pillars 125 symmetrically connected at the lower end of the rotating ring seat 12 abut against the corresponding inclined block 902 on the upper end of the support ring seat 9. The outer side of the rotating ring seat 12 is fitted with a tension airbag ring 8.

[0042] The outer side of the rotating ring seat 12 is provided with an annular groove 121 for fitting the tensioning airbag ring 8. In the initial state, the tensioning airbag ring 8 is not inflated and is located inside the annular groove 121. This avoids the tensioning airbag ring 8 being exposed on the outside of the rotating ring seat 12, and prevents the second insertion post 16 from being unable to be smoothly inserted into the opening 7 due to the obstruction of the tensioning airbag ring 8.

[0043] When the flange seat 3 is fixed to the lower end of the ceramic plate 2 by the bolt 6, the second airbag ring 5 is pressurized to inflate the first airbag ring 10, so that the first airbag ring 10 expands and is tensioned at the lower part of the opening 7. After the first airbag ring 10 expands, it pushes the support ring seat 9 to move upward along the second plug post 16, thereby causing the support post 125 to slide down along the inclined block 902, realizing the rotation of the rotating ring seat 12.

[0044] When the rotating ring seat 12 rotates, the abutment plate 13 pushes the cylinder mechanism in the slot 122 to inflate the tensioning airbag ring 8, thereby causing the tensioning airbag ring 8 to expand and be tensioned on the upper part of the opening 7.

[0045] The air outlet of the cylinder mechanism is connected to the tensioning airbag ring 8 via a second pipe 128 built into the rotating ring seat 12. The cylinder mechanism includes a cylinder body 123 fixed to the side wall of the slot 122, a piston 124 disposed inside the cylinder body 123, and a piston rod connected to the middle of the piston 124. After the piston rod extends out of the cylinder body 123, it abuts against the side of the corresponding abutment plate 13. The second pipe 128 is connected to the air outlet of the cylinder body 123.

[0046] When the rotating ring seat 12 rotates relative to the second insertion post 16 and the support ring seat 9, the piston rod is pushed by the abutment plate 13 and moves into the cylinder body 123. This causes the piston 124 to fill the gas inside the cylinder body 123 into the tensioning air bag ring 8 through the second pipe 128. This causes the tensioning air bag ring 8 to expand and be tensioned inside the opening 7, thus achieving a firm connection between the second insertion post 16 on the fixed post 4 and the opening 7 on the heating base 1.

[0047] The piston rod includes a connecting cylinder 126 fixed in the middle of the piston 124 and a screw 127 screwed inside the connecting cylinder 126. The other end of the screw 127 extends out of the connecting cylinder 126 and abuts against the side of the corresponding abutment plate 13.

[0048] The length of the screw 127 extending from the connecting cylinder 126 can be adjusted by rotating the screw 127, thereby adjusting the length of the piston rod. By lengthening the piston rod, the piston 124 can move more within the cylinder body 123, thereby increasing the amount of gas inside the cylinder body 123 that is injected into the tensioning airbag ring 8. This allows the tensioning airbag ring 8 to expand further after the opening 7 becomes larger, thus satisfying the tension within the opening 7.

[0049] Heating base 1 is a Susceptor heating base. The cleaning and regeneration process of the Susceptor heating base involves the following steps.

[0050] 1. Oxide film stripping: Remove adhering dirt and grime from the SUSC body by using acidic and alkaline chemical solutions for cleaning;

[0051] 2. After cleaning, grind and polish to make the surface smooth and flat.

[0052] 3. Sandblasting: to obtain the corresponding roughness.

[0053] 4. Clean and re-oxidize.

[0054] Oxide film peeling: NaOH corrodes the substrate, and the diameter of the Roller-Bushing hole (i.e., opening 7) will increase accordingly;

[0055] Grinding and polishing: The amount of grinding in the grinding process will increase the diameter of the Roller-Bushing hole (i.e., opening 7);

[0056] Cleaning before oxidation: Chemical solutions will corrode the substrate again, causing the diameter of the Roller-Bushing hole (i.e., opening 7) to expand and enlarge again;

[0057] As the Roller-Bushing aperture data continues to increase, the size of the matching ceramic (i.e., ceramic plate 2) is fixed, which will cause the matching ceramic to wobble from side to side, and break during use. This will require the replacement of a new susceptor, resulting in costly losses.

[0058] The Roller-Bushing aperture is 26.8mm. Each cleaning and regeneration cycle results in an aperture expansion of 0.1mm to 0.15mm. When the Roller-Bushing aperture changes to 27.5mm, the Susceptor heating base can no longer be reused, thus limiting its service life.

[0059] Specifically, during use, the second insertion post 16 and the first insertion post 15 on the fixing post 4 are inserted into the opening 7 and the through hole 11 respectively. Then, the flange seat 3 is fixed to the lower end of the ceramic plate 2 with bolts 6. The second airbag ring 5 is deformed and compressed by the pressure of the flange seat 3 and the ceramic plate 2. The gas inside the second airbag ring 5 is filled into the first airbag ring 10 through the first pipe 14, so that the first airbag ring 10 expands and is tensioned at the lower part of the opening 7.

[0060] After the first airbag ring 10 inflates, it pushes the support ring seat 9 to move upward along the second insertion post 16. At this time, the support column 125 slides down along the inclined block 902, so that the rotating ring seat 12 rotates around the second insertion post 16 as the center.

[0061] When the rotating ring seat 12 rotates relative to the second insertion post 16 and the support ring seat 9, the piston rod is pushed by the abutment plate 13 and moves into the cylinder body 123, so that the piston 124 fills the gas inside the cylinder body 123 into the tensioning air bag ring 8 through the second pipe 128, so that the tensioning air bag ring 8 expands and is tensioned inside the opening 7.

[0062] In this way, after the first airbag ring 10 expands and is tensioned at the lower part of the opening 7, and after the tensioning airbag ring 8 expands and is tensioned inside the opening 7, the second insertion post 16 on the fixing post 4 and the opening 7 on the heating base 1 are firmly connected. The ceramic plate 2 is fastened to the back of the heating base 1. The fixing post 4 and the ceramic plate 2 will not shake. The heating base 1 will not experience glass breakage during use.

[0063] The length of the screw 127 extending from the connecting cylinder 126 can be adjusted by rotating the screw 127, thereby adjusting the length of the piston rod. By lengthening the piston rod, the piston 124 can move more within the cylinder body 123, thereby increasing the amount of gas inside the cylinder body 123 that is injected into the tensioning airbag ring 8. This allows the tensioning airbag ring 8 to expand further after the opening 7 becomes larger, thus satisfying the tension within the opening 7.

[0064] Since the tensioning airbag ring 8 can still be tensioned inside the opening 7 after the diameter of the opening 7 is increased, the connection and fixation between the ceramic plate 2 and the heating base 1 can be achieved without changing the size of the ceramic plate 2. The service life of the heating base 1 can be extended and the number of regeneration times can be doubled.

[0065] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A connection mechanism for extending the service life of a Susceptor heating base, comprising a heating base, a fixing column, and a ceramic plate mounted on the back of the heating base, characterized in that: The heating base has several sets of openings on its back side, and the ceramic plate has several sets of through holes corresponding to the openings. The upper middle part of the fixing column has a first plug-in post and a second plug-in post with gradually decreasing diameters. The first plug-in post and the second plug-in post are respectively inserted into the through holes and the openings. A flange seat is provided on the outside of the connection between the fixed column and the first plug-in column, and a first airbag ring and a second airbag ring that are distributed vertically and communicate with each other are sleeved on the outside of the first plug-in column. The second plug is fitted with a support ring seat and a rotating ring seat distributed vertically. Two sets of symmetrical positioning protrusions on the inner side of the support ring seat slide in the vertical groove corresponding to the outer side wall of the second plug. Two sets of abutment plates symmetrically connected at the upper part of the second plug extend into the groove corresponding to the lower end of the rotating ring seat. The support ring seat is located on the upper end of the first airbag ring, and the rotating ring seat is located on the four sets of support springs on the upper end of the support ring seat, so that the two sets of pillars symmetrically connected at the lower end of the rotating ring seat abut against the corresponding inclined blocks on the upper end of the support ring seat. The outer side of the rotating ring seat is fitted with a tension airbag ring. When the flange seat is fixed to the lower end of the ceramic plate by bolts, the second airbag ring is pressurized to inflate the first airbag ring, causing the first airbag ring to expand and tighten at the lower part of the opening. After the first airbag ring expands, it pushes the support ring seat to move upward along the second plug-in post, thereby causing the support column to slide down along the inclined block, realizing the rotation of the rotating ring seat. As the rotating ring seat rotates, the abutment plate pushes the cylinder mechanism in the slot to inflate the tensioning airbag ring, thereby causing the tensioning airbag ring to expand and tighten at the top of the opening.

2. The connection mechanism for extending the service life of the Susceptor heating base according to claim 1, characterized in that: The flange seat has an annular placement groove for placing the second airbag ring at its upper end. The first insertion post has vertical receiving grooves on both sides. The first airbag ring and the second airbag ring are connected by a first pipe, and the first pipe is located inside the vertical receiving groove.

3. The connection mechanism for extending the service life of the Susceptor heating base according to claim 1, characterized in that: The fixed column, the first plug-in column, the second plug-in column, and the flange seat are integrally formed.

4. The connection mechanism for extending the service life of the Susceptor heating base according to claim 1, characterized in that: The outer side of the rotating ring seat is provided with an annular groove for fitting the tensioning airbag ring, and the air outlet of the cylinder mechanism is connected to the tensioning airbag ring through a second pipe built into the rotating ring seat.

5. The connection mechanism for extending the service life of the Susceptor heating base according to claim 4, characterized in that: The cylinder mechanism includes a cylinder body fixed on the slotted sidewall, a piston disposed inside the cylinder body, and a piston rod connected in the middle of the piston. After the piston rod extends out of the cylinder body, it abuts against the side of the corresponding abutment plate. The second pipe is connected to the air outlet of the cylinder body.

6. A connection mechanism for extending the service life of a Susceptor heating base according to claim 5, characterized in that: The piston rod includes a connecting cylinder fixed in the middle of the piston and a screw rod screwed inside the connecting cylinder. The other end of the screw rod extends out of the connecting cylinder and abuts against the side of the corresponding abutment plate.

Images