Robotic system and method of controlling an industrial robot

Abstract

A robot system and a control method for an industrial robot, which can prevent interference between the various devices of the robot system and the object being transported by the first hand when the rotation center of the first front arm and the rotation center of the first hand are shorter in the horizontal direction than the rotation center of the shared arm and the rotation center of the first front arm, even if the horizontal distance between the rotation center of the first front arm and the rotation center of the first front arm is shorter in the horizontal direction. In this robot system (1), when the first hand (6) moves between the first hand position and the first reference position (6B), the trajectory of the center (C1) of the first hand relative to the system reference line (CL3) swings in the Y direction when viewed from the top and bottom. When the first hand (6) is positioned at the first reference position (6B), the reference line (CL1) of the first hand is tilted relative to the system reference line (CL3), and the shared arm drive mechanism and the first front arm drive mechanism are driven. The first hand position is the position of the first hand (6) when the object being transported (2) is handed over to the storage part (3).

Description

Technical Field

[0001] This invention relates to a robot system comprising a storage unit for storing and transporting objects and an industrial robot for transporting and transporting the objects. The invention also relates to a control method for the industrial robot used to transport and transport objects relative to the storage unit. Background Technology

[0002] Previously, an industrial robot for handling glass substrates for liquid crystal displays was known (see, for example, Patent Document 1). This industrial robot includes: a first hand and a second hand on which the glass substrate is loaded; an arm on which the first hand and the second hand are rotatably connected; a main body on which the base end of the arm is rotatably connected; and an arm drive mechanism that extends and retracts the arm relative to the main body in a horizontal direction. The arm consists of a first front-end arm, a second front-end arm, and a common arm. The first hand is rotatably connected to the front end of the first front-end arm, the second hand is rotatably connected to the front end of the second front-end arm, the base end of the first front-end arm and the base end of the second front-end arm are rotatably connected to the common arm, and the common arm is rotatably connected to the main body.

[0003] In the industrial robot described in Patent Document 1, the common arm is formed in a generally V-shape. The central portion of the generally V-shaped common arm is rotatably connected to the main body. A base end of a first front-side arm is rotatably connected to one front end of the generally V-shaped common arm, and a base end of a second front-side arm is rotatably connected to the other front end of the common arm. The arm drive mechanism includes: a common arm drive mechanism that rotates the common arm relative to the main body; a first front-side arm drive mechanism that rotates the first front-side arm relative to the common arm and rotates a first hand relative to the first front-side arm; and a second front-side arm drive mechanism that rotates the second front-side arm relative to the common arm and rotates a second hand relative to the second front-side arm.

[0004] In the industrial robot described in Patent Document 1, the rotation center of the common arm relative to the main body is set as the first rotation center, the rotation center of the first front end arm relative to the common arm is set as the second rotation center, the rotation center of the second front end arm relative to the common arm is set as the third rotation center, the rotation center of the first hand relative to the first front end arm is set as the fourth rotation center, the rotation center of the second hand relative to the second front end arm is set as the fifth rotation center, the horizontal distance between the first and second rotation centers is set as the first center-to-center distance, the horizontal distance between the first and third rotation centers is set as the second center-to-center distance, the horizontal distance between the second and fourth rotation centers is set as the third center-to-center distance, and the horizontal distance between the third and fifth rotation centers is set as the fourth center-to-center distance. When the first center-to-center distance, the second center-to-center distance, the third center-to-center distance, and the fourth center-to-center distance are equal to each other.

[0005] In the industrial robot described in Patent Document 1, the arm is extended and retracted to transport a glass substrate relative to a glass substrate storage section of a glass substrate manufacturing apparatus or the like. In this industrial robot, when the first hand transports the glass substrate relative to the glass substrate storage section, a common arm drive mechanism and a first front-end arm drive mechanism are driven while the second front-end arm drive mechanism is stopped. At this time, the common arm drive mechanism and the first front-end arm drive mechanism are controlled to make the first hand move linearly in a constant direction (i.e., while the first hand maintains a constant posture).

[0006] Furthermore, if the center of the glass substrate stored in the standard position of the storage section when viewed from above is set as the center of the storage section side substrate, and the imaginary line connecting the first rotation center when viewed from above and below and the center of the storage section side substrate is set as the system reference line, then the shared arm drive mechanism and the first front-end arm drive mechanism are controlled so that the trajectory of the center of the glass substrate loaded on the first hand when viewed from above coincides with the system reference line. Specifically, the shared arm drive mechanism and the first front-end arm drive mechanism are controlled so that the rotation angle of the shared arm relative to the main body is equal to the rotation angle of the first hand relative to the first front-end arm, and the rotation angle of the first front-end arm relative to the shared arm is twice the rotation angle of the shared arm relative to the main body.

[0007] Similarly, in the industrial robot described in Patent Document 1, when the second hand is used to move the glass substrate relative to the glass substrate's storage portion, the common arm drive mechanism and the second front-end arm drive mechanism are driven while the first front-end arm drive mechanism is stopped. At this time, the common arm drive mechanism and the second front-end arm drive mechanism are controlled to make the second hand move linearly in a constant direction.

[0008] Furthermore, at this time, the shared arm drive mechanism and the second front-end arm drive mechanism are controlled such that, when viewed from above and below, the trajectory of the center of the glass substrate mounted on the second hand coincides with the system reference line. Specifically, the shared arm drive mechanism and the second front-end arm drive mechanism are controlled such that the rotation angle of the shared arm relative to the main body is equal to the rotation angle of the second hand relative to the second front-end arm, and the rotation angle of the second front-end arm relative to the shared arm is twice the rotation angle of the shared arm relative to the main body.

[0009] Existing technical documents

[0010] Patent documents

[0011] Patent Document 1: Japanese Patent Application Publication No. 2021-13961 Summary of the Invention

[0012] The technical problem that the invention aims to solve

[0013] In the industrial robot described in Patent Document 1, as described above, the first center-to-center distance, the second center-to-center distance, the third center-to-center distance, and the fourth center-to-center distance are equal. In this industrial robot, to prevent interference between the first front-end arm and the second front-end arm, the first front-end arm is positioned higher than the second front-end arm. Therefore, in this industrial robot, it is possible to increase its size in the vertical direction. Furthermore, in this industrial robot, in order to position the first front-end arm higher than the second front-end arm, a cylindrical rotating shaft is provided at the connection between the first front-end arm and the shared arm, which may reduce the rigidity of the connection between the first front-end arm and the shared arm.

[0014] Therefore, the inventors of this application have studied a method in which the distances between the third and fourth centers are shorter than the distances between the first and second centers, and the first and second front-end side arms are positioned at the same location in the vertical direction. On the other hand, if the distance between the third centers is shorter than the distance between the first centers, it is difficult to extend and retract the arm to handle the glass substrate using the first hand, so that when viewed from the vertical direction, the trajectory of the center of the glass substrate loaded in the first hand coincides with the system reference line. Similarly, if the distance between the fourth centers is shorter than the distance between the second centers, it is difficult to extend and retract the arm to handle the glass substrate using the second hand, so that when viewed from the vertical direction, the trajectory of the center of the glass substrate loaded in the second hand coincides with the system reference line.

[0015] Furthermore, the inventors of this application investigated how, when transporting a glass substrate using a first hand relative to the glass substrate's receiving portion, the common arm drive mechanism and the first front-end arm drive mechanism are controlled, as in the conventional method, to move the first hand in a constant direction. However, the inventors' research shows that if the direction of the system reference line is set to the front-back direction, and the direction orthogonal to the up-down and front-back directions is set to the left-right direction, then when the first hand moves in a constant direction, the offset of the trajectory of the center of the glass substrate loaded on the first hand relative to the system reference line in the left-right direction increases when viewed from the up-down direction.

[0016] Furthermore, when viewed from above, if the offset of the trajectory of the center of the glass substrate mounted on the first hand relative to the system reference line in the left-right direction increases, the likelihood of interference between the various devices constituting the glass substrate manufacturing system and the glass substrate mounted on the first hand increases. Similarly, as the inventors of this application have observed, when the second hand moves in a constant direction, when viewed from above, the offset of the trajectory of the center of the glass substrate mounted on the second hand relative to the system reference line in the left-right direction increases, further increasing the likelihood of interference between the various devices constituting the glass substrate manufacturing system and the glass substrate mounted on the second hand.

[0017] Therefore, the objective of this invention is to provide a robot system comprising a storage section for storing transportable objects and an industrial robot for transporting transportable objects relative to the storage section, wherein even if the horizontal distance between the rotation center of the first front-end arm relative to the common arm and the horizontal distance between the rotation center of the first hand relative to the first front-end arm is shorter than the horizontal distance between the rotation center of the common arm relative to the main body and the horizontal distance between the rotation center of the first front-end arm and the common arm, and the horizontal distance between the rotation center of the second front-end arm relative to the common arm and the horizontal distance between the rotation center of the second hand relative to the second front-end arm is shorter than the horizontal distance between the rotation center of the common arm relative to the main body and the horizontal distance between the rotation center of the second front-end arm and the common arm, interference between the various devices of the robot system and the transportable objects loaded on the first hand and the second hand can be prevented when transporting transportable objects using the first hand and the second hand.

[0018] Another objective of this invention is to provide a control method for an industrial robot used to transport an object to be transported relative to a receiving part for storing the object, and for use in a robot system, wherein even if the horizontal distance between the rotation center of the first front-end arm relative to the common arm and the horizontal distance between the rotation center of the first hand relative to the first front-end arm is less than the horizontal distance between the rotation center of the common arm relative to the main body and the rotation center of the first front-end arm relative to the common arm, and the horizontal distance between the rotation center of the second front-end arm relative to the common arm and the rotation center of the second hand relative to the second front-end arm is less than the horizontal distance between the rotation center of the common arm relative to the main body and the rotation center of the second front-end arm relative to the common arm, interference between the various devices of the robot system and the object to be transported loaded on the first hand and the second hand can be prevented when the object to be transported is transported using the first hand and the second hand.

[0019] To address the aforementioned issues, one aspect of the present invention provides a robot system comprising: a storage section for storing a transportable object; and a horizontally articulated industrial robot capable of at least one of removing a transportable object from the storage section and moving a transportable object into the storage section. The industrial robot includes: a first hand and a second hand for loading the transportable object; an arm rotatably connected to the front end of the arm; a main body rotatably connected to the base end of the arm; an arm drive mechanism for extending and retracting the arm horizontally relative to the main body; and a control unit for controlling the industrial robot. The arm includes: a first front end arm portion to which the first hand is rotatably connected; and a second front end arm portion to which the second hand is rotatably connected. The arm includes a front end of an end arm and a common arm, wherein the base ends of the first front end arm and the second front end arm are rotatably connected to the common arm at different positions, and the common arm is rotatably connected to the main body. The arm drive mechanism includes: a common arm drive mechanism that rotates the common arm relative to the main body with the vertical direction as the rotation axis; a first front end arm drive mechanism that rotates the first front end arm relative to the common arm with the vertical direction as the rotation axis, and rotates a first hand relative to the first front end arm; and a second front end arm drive mechanism that rotates the second front end arm relative to the common arm with the vertical direction as the rotation axis, and rotates a second hand relative to the second front end arm, from the vertical direction... During observation, the first and second hands are elongated strips with a predetermined length. The rotation center of the shared arm relative to the main body is designated as the first rotation center; the rotation center of the first front-end arm relative to the shared arm is designated as the second rotation center; the rotation center of the second front-end arm relative to the shared arm is designated as the third rotation center; the rotation center of the first hand relative to the first front-end arm is designated as the fourth rotation center; and the rotation center of the second hand relative to the second front-end arm is designated as the fifth rotation center. The horizontal distance between the first and second rotation centers is designated as the first center-to-center distance; the horizontal distance between the first and third rotation centers is designated as the second center-to-center distance; and the horizontal distance between the second and fourth rotation centers is designated as the second center-to-center distance. The horizontal distance is defined as the third center-to-center distance. The horizontal distance between the third and fifth rotation centers is defined as the fourth center-to-center distance. The width direction of the first hand, orthogonal to the length direction of the first hand when viewed from above, is defined as the first width direction. The width direction of the second hand, orthogonal to the length direction of the second hand when viewed from above, is defined as the second width direction. The centerline of the first width direction of the first hand when viewed from above is defined as the first hand reference line. The centerline of the second width direction of the second hand when viewed from above is defined as the second hand reference line. The rotational speed of the common arm relative to the main body is defined as the common arm rotational speed. The rotational speed of the first front-end side arm relative to the common arm is defined as the first front-end side arm rotational speed.The rotational speed of the second front-end arm relative to the common arm is defined as the rotational speed of the second front-end arm. The center of the transported object loaded in the standard position of the first hand, viewed from above, is defined as the center of the first hand. The center of the transported object loaded in the standard position of the second hand, viewed from above, is defined as the center of the second hand. The center of the transported object stored in the standard position of the storage unit, viewed from above, is defined as the center of the storage unit. An imaginary line connecting the first rotational center and the center of the storage unit, viewed from above, is defined as the system reference line. The direction of the system reference line is defined as the front-back direction. A direction orthogonal to the front-back and rear-back directions is defined as... The orientation is set to left and right. The position of the first hand when transferring the object to the storage unit while the first front arm is extended is designated as the first transfer position. The position of the second hand when transferring the object to the storage unit while the second front arm is extended is designated as the second transfer position. The position of the first hand when the arm is retracted to a predetermined state so that the first and second hands are close to the main body is designated as the first reference position. The position of the second hand when the first hand is positioned at the first reference position is designated as the second reference position. The first center-to-center distance is equal to the second center-to-center distance. The third center-to-center distance is shorter than the first center-to-center distance. The fourth center-to-center distance... The distance is shorter than the distance between the second and third centers. When the first hand moves between the first junction position and the first reference position, the ratio of the rotational speed of the shared arm to the rotational speed of the first front-end arm remains constant. When the second hand moves between the second junction position and the second reference position, the ratio of the rotational speed of the shared arm to the rotational speed of the second front-end arm remains constant. When the first hand is positioned at the first junction position, the system reference line overlaps with the first hand reference line when viewed from above. When the second hand is positioned at the second junction position, the system reference line overlaps with the second hand reference line when viewed from above. When the first hand moves between the first junction position and the first reference position, the control unit... When viewed from above, the trajectory of the center of the first hand oscillates to the left and right relative to the system baseline. When the first hand is positioned at the first reference position, the reference line of the first hand is tilted relative to the system baseline, driving the shared arm drive mechanism and the first front-end arm drive mechanism. Similarly, when the second hand moves between the second junction position and the second reference position, its trajectory oscillates to the left and right relative to the system baseline when viewed from above. When the second hand is positioned at the second reference position, the reference line of the second hand is tilted relative to the system baseline, driving the shared arm drive mechanism and the second front-end arm drive mechanism.

[0020] In this robot system, when the first hand moves between the first hand junction position and the first reference position, the control unit oscillates the trajectory of the first hand's center relative to the system reference line in a left-right direction when the first hand is positioned at the first reference position, thereby tilting the first hand reference line relative to the system reference line. This is done by driving the shared arm drive mechanism and the first front-end arm drive mechanism. Therefore, according to the inventors' research, in this method, even if the distance between the third centers is shorter than the distance between the first centers, the left-right offset of the trajectory of the first hand's center relative to the system reference line can be reduced when viewed from the top and bottom. Therefore, in this method, even if the distance between the third centers is shorter than the distance between the first centers, interference between the various devices of the robot system and the object being transported by the first hand can be prevented when the first hand is used to transport the object.

[0021] Furthermore, in this method, when the control unit moves the second hand between the second hand's second hand position and the second reference position, it causes the second hand's reference line to tilt relative to the system reference line when the second hand is positioned at the second reference position by oscillating the trajectory of the second hand's center relative to the system reference line in a left-right direction when viewed from above. This tilts the shared arm drive mechanism and the second front-end arm drive mechanism. Therefore, according to the inventors' research, in this method, even if the distance between the fourth centers is shorter than the distance between the second centers, the left-right offset of the trajectory of the second hand's center relative to the system reference line when the second hand moves between the second hand's second hand position and the second reference position can be reduced when viewed from above. Therefore, in this method, even if the distance between the fourth centers is shorter than the distance between the second centers, interference between the various devices of the robot system and the object being transported by the second hand can be prevented when the second hand is used to transport the object.

[0022] In this configuration, for example, the first front-end side arm and the second front-end side arm are positioned at the same location in the vertical direction. Furthermore, in this configuration, for example, when viewed from the vertical direction, the shape of the shared arm is an isosceles triangle.

[0023] Furthermore, to address the aforementioned issues, one aspect of the present invention provides a control method for an industrial robot, specifically a control method for a horizontal multi-joint type industrial robot. The industrial robot comprises: a first hand and a second hand for loading a transported object; an arm, the first hand and the second hand being rotatably connected to the front end of the arm; a main body, the base end of the arm being rotatably connected to the main body; and an arm drive mechanism that extends and retracts the arm horizontally relative to the main body. The industrial robot performs at least one of the following: removing a transported object from a receiving section and moving a transported object into the receiving section. The arm comprises: a first front end arm portion, the first hand being rotatably connected to the front end of the first front end arm portion; and a second front end arm portion, the second hand being rotatably connected to the second front end arm portion. The arm drive mechanism comprises: a front end side; and a common arm, wherein the base end sides of the first front end arm and the base end sides of the second front end arm are rotatably connected to the common arm at different positions, and the common arm is rotatably connected to the main body. The arm drive mechanism includes: a common arm drive mechanism that rotates the common arm relative to the main body with the vertical direction as the axis of rotation; a first front end arm drive mechanism that rotates the first front end arm relative to the common arm with the vertical direction as the axis of rotation, and rotates the first hand relative to the first front end arm; and a second front end arm drive mechanism that rotates the second front end arm relative to the common arm with the vertical direction as the axis of rotation, and rotates the second hand relative to the second front end arm. When viewed from the vertical direction... The first and second hands are elongated strips with a predetermined length. The rotation center of the shared arm relative to the main body is designated as the first rotation center; the rotation center of the first front-end arm relative to the shared arm is designated as the second rotation center; the rotation center of the second front-end arm relative to the shared arm is designated as the third rotation center; the rotation center of the first hand relative to the first front-end arm is designated as the fourth rotation center; and the rotation center of the second hand relative to the second front-end arm is designated as the fifth rotation center. The horizontal distance between the first and second rotation centers is designated as the first center-to-center distance; the horizontal distance between the first and third rotation centers is designated as the second center-to-center distance; and the horizontal distance between the second and fourth rotation centers is designated as the fifth rotation center. The distance in the direction is set as the third center-to-center distance. The horizontal distance between the third and fifth rotation centers is set as the fourth center-to-center distance. The width direction of the first hand, which is orthogonal to the length direction of the first hand when viewed from above and below, is set as the first width direction. The width direction of the second hand, which is orthogonal to the length direction of the second hand when viewed from above and below, is set as the second width direction. The center line of the first width direction of the first hand when viewed from above and below is set as the first hand reference line. The center line of the second width direction of the second hand when viewed from above and below is set as the second hand reference line. The rotation speed of the common arm relative to the main body is set as the common arm rotation speed. The rotation speed of the first front-end side arm relative to the common arm is set as the first front-end side arm rotation speed.The rotational speed of the second front-end arm relative to the common arm is defined as the rotational speed of the second front-end arm. The center of the transported object loaded in the standard position of the first hand, viewed from above, is defined as the center of the first hand. The center of the transported object loaded in the standard position of the second hand, viewed from above, is defined as the center of the second hand. The center of the transported object stored in the standard position of the storage unit, viewed from above, is defined as the center of the storage unit. An imaginary line connecting the first rotational center and the center of the storage unit, viewed from above, is defined as the system reference line. The direction of the system reference line is defined as the front-back direction. A direction orthogonal to the front-back and rear-back directions is defined as... The orientation is set to left and right. The position of the first hand when transferring the object to the storage unit while the first front arm is extended is designated as the first transfer position. The position of the second hand when transferring the object to the storage unit while the second front arm is extended is designated as the second transfer position. The position of the first hand when the arm is retracted to a predetermined state so that the first and second hands are close to the main body is designated as the first reference position. The position of the second hand when the first hand is positioned at the first reference position is designated as the second reference position. The first center-to-center distance is equal to the second center-to-center distance. The third center-to-center distance is shorter than the first center-to-center distance. The fourth center-to-center distance... The distance is shorter than the distance between the second and third centers. When the first hand moves between the first junction position and the first reference position, the ratio of the rotational speed of the shared arm to the rotational speed of the first front-end arm remains constant. When the second hand moves between the second junction position and the second reference position, the ratio of the rotational speed of the shared arm to the rotational speed of the second front-end arm remains constant. When the first hand is positioned at the first junction position, the system reference line overlaps with the first hand reference line when viewed from above. When the second hand is positioned at the second junction position, the system reference line overlaps with the second hand reference line when viewed from above. Specifically, when the first hand moves between the first junction position and the first reference position, the ratio of the rotational speed of the shared arm to the rotational speed of the second front-end arm remains constant. When viewed from above, the trajectory of the center of the first hand oscillates to the left and right relative to the system baseline. When the first hand is positioned at the first reference position, the reference line of the first hand is tilted relative to the system baseline, driving the shared arm drive mechanism and the first front-end arm drive mechanism. Similarly, when the second hand moves between the second junction position and the second reference position, its trajectory oscillates to the left and right relative to the system baseline when viewed from above. When the second hand is positioned at the second reference position, the reference line of the second hand is tilted relative to the system baseline, driving the shared arm drive mechanism and the second front-end arm drive mechanism.

[0024] In the control method of the industrial robot of this embodiment, when the first hand moves between the first handing position and the first reference position, the trajectory of the first hand's center relative to the system reference line oscillates to both sides in the left and right directions when viewed from above and below. This tilts the first hand's reference line relative to the system reference line when the first hand is positioned at the first reference position, and drives the shared arm drive mechanism and the first front-end arm drive mechanism. Therefore, according to the inventors' research, in this embodiment, even if the distance between the third centers is shorter than the distance between the first centers, the left and right offset of the trajectory of the first hand's center relative to the system reference line can be reduced when viewed from above and below. Therefore, in this embodiment, even if the distance between the third centers is shorter than the distance between the first centers, interference between the various devices of the robot system and the object being transported by the first hand can be prevented when the first hand is used to transport the object.

[0025] Furthermore, in this method, when the second hand moves between the second hand's second hand position and the second reference position, the trajectory of the second hand's center, when viewed from above, oscillates to the left and right relative to the system reference line. This tilts the second hand's reference line relative to the system reference line when the second hand is positioned at the second reference position, driving the shared arm drive mechanism and the second front-end arm drive mechanism. Therefore, according to the inventors' research, in this method, even if the distance between the fourth centers is shorter than the distance between the second centers, the left-right offset of the second hand's center trajectory relative to the system reference line can be reduced when viewed from above. Therefore, in this method, even if the distance between the fourth centers is shorter than the distance between the second centers, interference between the various devices of the robot system and the object being transported by the second hand can be prevented when the second hand is used to transport the object.

[0026] As described above, in the present invention, in a robot system comprising a storage section for storing transported objects and an industrial robot for transporting transported objects relative to the storage section, even if the horizontal distance between the rotation center of the first front-end arm relative to the common arm and the horizontal distance between the rotation center of the first hand relative to the first front-end arm is shorter than the horizontal distance between the rotation center of the common arm relative to the main body and the horizontal distance between the rotation center of the first front-end arm and the common arm, and the horizontal distance between the rotation center of the second front-end arm relative to the common arm and the horizontal distance between the rotation center of the second hand relative to the second front-end arm is shorter than the horizontal distance between the rotation center of the common arm relative to the main body and the horizontal distance between the rotation center of the second front-end arm and the common arm, interference between the various devices of the robot system and the transported objects loaded on the first hand and the second hand can be prevented when transporting transported objects using the first hand and the second hand.

[0027] Furthermore, if the control method of the present invention is used to control an industrial robot, even if the horizontal distance between the rotation center of the first front arm relative to the common arm and the rotation center of the first hand relative to the first front arm is shorter than the horizontal distance between the rotation center of the common arm relative to the main body and the rotation center of the first front arm relative to the common arm, and the horizontal distance between the rotation center of the second front arm relative to the common arm and the rotation center of the second hand relative to the second front arm is shorter than the horizontal distance between the rotation center of the common arm relative to the main body and the rotation center of the second front arm relative to the common arm, interference between the various devices of the robot system and the objects being transported by the first and second hands can be prevented when the objects are being transported by the first and second hands. Attached Figure Description

[0028] Figure 1 This is a top view used to illustrate the structure of the robot system according to an embodiment of the present invention.

[0029] Figure 2 It is used for explanation Figure 1 The diagram shows a top view of the structure of the robot system.

[0030] Figure 3 yes Figure 1 The image shown is a 3D view of an industrial robot.

[0031] Figure 4 yes Figure 1 The image shown is a 3D view of an industrial robot.

[0032] Figure 5 yes Figure 4 The rear view of the industrial robot shown.

[0033] Figure 6 It is used for explanation Figure 3 The diagram shows the structure of the industrial robot.

[0034] Figure 7 It is used for explanation Figure 1 A diagram illustrating an example of the trajectory of the center of the first hand as it moves between the first handover position and the first reference position.

[0035] Figure 8 It is used for explanation Figure 1 A diagram showing a comparative example of the trajectory of the center of the first hand as it moves between the first handover position and the first reference position. Detailed Implementation

[0036] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0037] (Structure of a robot system)

[0038] Figure 1 , Figure 2 This is a top view used to illustrate the structure of the robot system 1 according to an embodiment of the present invention. Figure 3 , Figure 4 yes Figure 1 The image shows a 3D view of industrial robot 4. Figure 5 yes Figure 4 The rear view of industrial robot 4 shown. Figure 6 It is used for explanation Figure 3 The diagram shows the structure of the industrial robot 4.

[0039] The robot system 1 of this embodiment is a semiconductor manufacturing system comprising a storage section 3 for storing semiconductor wafers 2 (hereinafter referred to as "wafers 2") as transport objects, and a horizontally articulated industrial robot 4 (hereinafter referred to as "robot 4") for transporting wafers 2 relative to the storage section 3. The wafers 2 are formed into thin circular plates. The storage section 3 of this embodiment is, for example, a FOUP (front-opening wafer cassette) that stores multiple wafers 2 at a certain interval in the vertical direction (vertical direction). Therefore, in the following description, the storage section 3 will be referred to as "FOUP 3". In addition to the FOUP 3 and the robot 4, the robot system 1 also includes various processing devices for manufacturing semiconductors.

[0040] Robot 4 performs at least one of the following actions: removing wafer 2 from FOUP 3 and inserting wafer 2 into FOUP 3. Robot 4 includes: hands 6 and 7 for loading wafer 2; an arm 8 to which hands 6 and 7 are rotatably connected; and a main body 9 to which the base end of the arm 8 is rotatably connected. In this embodiment, robot 4 includes four hands 6 arranged in an overlapping state in the vertical direction; and four hands 7 arranged in an overlapping state in the vertical direction. In this embodiment, hands 6 are first hands, and hands 7 are second hands.

[0041] Additionally, the robot 4 includes: a control unit 10 for controlling the robot 4; an arm drive mechanism 11 for extending and retracting the arm 8 relative to the main body 9 in the horizontal direction; and a lifting mechanism (not shown) for raising and lowering the hands 6 and 7 and the arm 8 relative to the main body 9. The arm 8 includes: a front-end arm portion 13, to which the hand 6 is rotatably connected; a front-end arm portion 14, to which the hand 7 is rotatably connected; and a common arm portion 15, to which the base ends of the front-end arm portions 13 and 14 are rotatably connected at different positions, and is rotatably connected to the main body 9. The arm 8 in this embodiment is composed of the front-end arm portions 13 and 14 and the common arm portion 15. In this embodiment, the front-end arm portion 13 is a first front-end arm portion, and the front-end arm portion 14 is a second front-end arm portion.

[0042] When viewed from above, the hands 6 and 7 are elongated strips with a predetermined length. Specifically, when viewed from above, the hands 6 and 7 are Y-shaped, with their front ends forked. The hands 6 and 7 are formed with approximately the same shape. The wafer 2 is mounted on the front ends of the hands 6 and 7. The hands 6 and 7 have positioning members for horizontally positioning the wafer 2 mounted on them. The four hands 6 are fixed to the hand fixing member 16 at intervals in the vertical direction. The base ends of the hands 6 are fixed to the hand fixing member 16. The four hands 7 are fixed to the hand fixing member 17 at intervals in the vertical direction. The base ends of the hands 7 are fixed to the hand fixing member 17.

[0043] Hand fixing member 16 is rotatably connected to the front end of the front end arm 13. That is, four hands 6 are rotatably connected to the front end of the front end arm 13 via hand fixing member 16. Hand fixing member 17 is rotatably connected to the front end of the front end arm 14. That is, four hands 7 are rotatably connected to the front end of the front end arm 14 via hand fixing member 17. Each of the four hands 6 and each of the four hands 7 are alternately arranged in the vertical direction.

[0044] In the following explanation, such as Figure 1 , Figure 2 As shown, the center of the chip 2 mounted in the standard position (designed position) of hand 6 when viewed from the top and bottom is designated as the first hand center C1; the center of the chip 2 mounted in the standard position (designed position) of hand 7 when viewed from the top and bottom is designated as the second hand center C2; and the center of the chip 2 stored in the standard position (designed position) of FOUP 3 when viewed from the top and bottom is designated as the FOUP center C3. The chip 2 mounted in the standard position of hand 6 is positioned horizontally by the positioning member of hand 6, and the chip 2 mounted in the standard position of hand 7 is positioned horizontally by the positioning member of hand 7. In this embodiment, the FOUP center C3 is the center of the storage section.

[0045] Furthermore, in the following description, the direction of the short side of hand 6, which is orthogonal to the length direction of hand 6 when viewed from the top and bottom, is defined as the first short side direction, and the center line of the first short side direction of hand 6 when viewed from the top and bottom is defined as the first hand reference line CL1. Additionally, the direction of the short side of hand 7, which is orthogonal to the length direction of hand 7 when viewed from the top and bottom, is defined as the second short side direction, and the center line of the second short side direction of hand 7 when viewed from the top and bottom is defined as the second hand reference line CL2. When viewed from the top and bottom, the center of the first hand C1 lies on the first hand reference line CL1, and the center of the second hand C2 lies on the second hand reference line CL2.

[0046] The front side arms 13 and 14 are positioned lower than the hands 6 and 7. The front side arms 13 and 14 are positioned in the same vertical direction. The common arm 15 is positioned lower than the front side arms 13 and 14. Furthermore, the common arm 15 is positioned above the main body 9. The main body 9 is cylindrical. The front side arms 13 and 14 are shaped as slender, approximately rectangular blocks with thin vertical thickness when viewed from above. The vertical thickness of the front side arms 13 and 14 is fixed. The front side arms 13 and 14 are hollow. The front side arms 13 and 14 have the same shape.

[0047] The common arm 15 is formed into an isosceles triangular block when viewed from above. That is, the common arm 15 is an isosceles triangle when viewed from above. The thickness of the common arm 15 in the vertical direction is fixed. The common arm 15 is hollow. The length of the base of the isosceles triangular common arm 15 is longer than the outer diameter of the cylindrical main body 9. The base of the front end arm 13 is rotatably connected to the corner where one hypotenuse intersects the base of the isosceles triangular common arm 15, and the base of the front end arm 14 is rotatably connected to the corner where the other hypotenuse intersects the base of the isosceles triangular common arm 15. The central portion of the common arm 15 is rotatably connected to the main body 9.

[0048] The arm drive mechanism 11 includes: a common arm drive mechanism 19, which rotates the common arm 15 relative to the main body 9 along an axis that rotates vertically; a front-end arm drive mechanism 20, which rotates the front-end arm 13 relative to the common arm 15 along an axis that rotates vertically and rotates the hand 6 relative to the front-end arm 13; and a front-end arm drive mechanism 21, which rotates the front-end arm 14 relative to the common arm 15 along an axis that rotates vertically and rotates the hand 7 relative to the front-end arm 14. The arm drive mechanism 11 of this embodiment is composed of the common arm drive mechanism 19 and the front-end arm drive mechanisms 20 and 21. The front-end arm drive mechanism 20 of this embodiment is a first front-end arm drive mechanism, and the front-end arm drive mechanism 21 is a second front-end arm drive mechanism.

[0049] In the following explanation, such as Figure 1 , Figure 5As shown, the rotation center of the common arm 15 relative to the main body 9 is set as the first rotation center C6, the rotation center of the front end arm 13 relative to the common arm 15 is set as the second rotation center C7, the rotation center of the front end arm 14 relative to the common arm 15 is set as the third rotation center C8, the rotation center of the hand 6 relative to the front end arm 13 is set as the fourth rotation center C9, and the rotation center of the hand 7 relative to the front end arm 14 is set as the fifth rotation center C10. The horizontal distance between the first rotation center C6 and the second rotation center C7 is set as the first center distance L1, the horizontal distance between the first rotation center C6 and the third rotation center C8 is set as the second center distance L2, the horizontal distance between the second rotation center C7 and the fourth rotation center C9 is set as the third center distance L3, and the horizontal distance between the third rotation center C8 and the fifth rotation center C10 is set as the fourth center distance L4.

[0050] Additionally, in the following explanation, the imaginary line connecting the first rotation center C6 and the FOUP center C3 when viewed from the top and bottom directions will be designated as the system reference line CL3, and the direction of the system reference line CL3 will be defined as follows: Figure 1 , Figure 2 The X direction is set as the front-back direction, and the direction orthogonal to the up-down and front-back directions is set as the back-and-forth direction. Figure 1 , Figure 2 The Y-direction is set as the left-right direction. FOUP3 and main body 9 are arranged with a predetermined interval in the front-back direction. Two sidewalls parallel to the left-right direction are formed on FOUP3. The wafer 2 is housed between the two sidewalls.

[0051] The distance between the third centers, L3, is shorter than the distance between the first centers, L1. The distance between the fourth centers, L4, is shorter than the distance between the second centers, L2. Furthermore, the distances between the first and second centers, L1 and L2, are equal, and the distances between the third and fourth centers, L3 and L4, are equal. In the first short-side direction, the fourth rotation center, C9, deviates from the first hand reference line, CL1. In the second short-side direction, the fifth rotation center, C10, deviates from the second hand reference line, CL2. The distances between the fourth rotation center, C9, and the first hand reference line, CL1, in the first short-side direction, and the distances between the fifth rotation center, C10, and the second hand reference line, CL2, in the second short-side direction, are equal.

[0052] The shared arm drive mechanism 19 includes a motor 24 and a power transmission mechanism that transmits the power of the motor 24 to the shared arm 15. The power transmission mechanism consists of a reducer, pulleys, and a belt. The motor 24 and the power transmission mechanism are located inside the main body 9. The front-end arm drive mechanism 20 includes a motor 25 and a power transmission mechanism that transmits the power of the motor 25 to the front-end arm 13 and the hand 6. The power transmission mechanism consists of a reducer, pulleys, and a belt. The motor 25 and the power transmission mechanism are located inside the front-end arm 13 and the shared arm 15. The front-end arm drive mechanism 21 includes a motor 26 and a power transmission mechanism that transmits the power of the motor 26 to the front-end arm 14 and the hand 7. The power transmission mechanism consists of a reducer, pulleys, and a belt. The motor 26 and the power transmission mechanism are located inside the front-end arm 14 and the shared arm 15.

[0053] Motors 24 to 26 are servo motors. Rotary encoders for detecting the rotational position of each motor are mounted on motors 24 to 26. Motors 24 to 26 and the rotary encoders are electrically connected to the control unit 10. The control unit 10 controls motors 24 to 26 based on the detection results from the rotary encoders. Furthermore, during the extension and retraction of arm 8, the control unit 10 drives one of the two motors 25 and 26, and motor 24. That is, during the extension and retraction of arm 8, the control unit 10 drives motors 25 and 24 while motor 26 is stopped, or drives motors 26 and 24 while motor 25 is stopped.

[0054] The position of the hand 6 when transferring the wafer 2 to the FOUP3 while the front arm 13 is extended is designated as the first transfer position 6A (refer to...). Figure 1 When arm 8 is retracted to a predetermined state so that hands 6 and 7 approach the main body 9, the position of hand 6 is set as the first reference position 6B (refer to...). Figure 2 , Figure 4 When the hand 6 is used to move the wafer 2 relative to the FOUP 3, the hand 6 moves between the first handover position 6A and the first reference position 6B. When the hand 6 is positioned at the first handover position 6A, the center C1 of the first hand is aligned with the center C3 of the FOUP when viewed from above.

[0055] Additionally, the position of the hand 7 during the handover of the chip 2 relative to the FOUP3 when the front arm 14 is extended is designated as the second handover position 7A (refer to...). Figure 3 The position of hand 7 when hand 6 is positioned in the first reference position 6B is set as the second reference position 7B (refer to...). Figure 4When the hand 7 is used to move the wafer 2 relative to the FOUP 3, the hand 7 moves between the second handover position 7A and the second reference position 7B. When the hand 7 is positioned at the second handover position 7A, the center C2 of the second hand coincides with the center C3 of the FOUP when viewed from the top and bottom.

[0056] In this embodiment, with hand 6 positioned at the first reference position 6B and hand 7 positioned at the second reference position 7B, the arm 8 retracts to the position where the rotation radius of the arm 8 and hands 6 and 7 relative to the main body 9 is minimized, centered on the first rotation center C6. That is, the position of hand 6 when the arm 8 retracts to the position where the rotation radius of the arm 8 and hands 6 and 7 centered on the first rotation center C6 is minimized is the first reference position 6B, and the position of hand 7 is the second reference position 7B.

[0057] If the rotational speed of the common arm 15 relative to the main body 9 is defined as the common arm rotational speed, the rotational speed of the front end arm 13 relative to the common arm 15 is defined as the first front end arm rotational speed, and the rotational speed of the front end arm 14 relative to the common arm 15 is defined as the second front end arm rotational speed, then when the hand 6 moves between the first junction position 6A and the first reference position 6B, the ratio of the common arm rotational speed to the first front end arm rotational speed remains constant. Furthermore, when the hand 7 moves between the second junction position 7A and the second reference position 7B, the ratio of the common arm rotational speed to the second front end arm rotational speed remains constant. For example, the first front end arm rotational speed and the second front end arm rotational speed are approximately 1.5 to 2.5 times the common arm rotational speed.

[0058] Furthermore, when hand 6 moves between the first junction position 6A and the first reference position 6B, the rotational speed of the shared arm and the rotational speed of the first front-end arm remain constant. Similarly, when hand 7 moves between the second junction position 7A and the second reference position 7B, the rotational speed of the shared arm and the rotational speed of the second front-end arm remain constant. In this embodiment, the rotational speed of the shared arm when hand 6 moves between the first junction position 6A and the first reference position 6B is equal to the rotational speed of the shared arm when hand 7 moves between the second junction position 7A and the second reference position 7B.

[0059] like Figure 1 As shown, when hand 6 is positioned at the first junction position 6A, viewed from above, the system reference line CL3 overlaps with the first hand reference line CL1. Similarly, when hand 7 is positioned at the second junction position 7A, viewed from above, the system reference line CL3 overlaps with the second hand reference line CL2. When hand 6 is positioned at the first reference position 6B and hand 7 is positioned at the second reference position 7B, viewed from above, hand 6 and hand 7 overlap (see reference). Figure 2 , Figure 4 ).

[0060] Furthermore, when hand 6 is positioned at the first reference position 6B and hand 7 is positioned at the second reference position 7B, when viewed from the vertical direction, the first hand reference line CL1 is inclined relative to the system reference line CL3 (refer to...). Figure 2 Similarly, when hand 6 is positioned at the first reference position 6B and hand 7 is positioned at the second reference position 7B, viewed from the top and bottom, the second hand reference line CL2 is inclined relative to the system reference line CL3. When hand 6 is positioned at the first reference position 6B and hand 7 is positioned at the second reference position 7B, viewed from the top and bottom, the first hand reference line CL1 overlaps with the second hand reference line CL2.

[0061] (Control methods for industrial robots)

[0062] Figure 7 It is used for explanation Figure 1 The diagram shows an example of the trajectory of the first hand center C1 when the hand 6 moves between the first handover position 6A and the first reference position 6B.

[0063] When the control unit 10 moves the hand 6 between the first handover position 6A and the first reference position 6B, it causes the first hand reference line CL1 to tilt relative to the system reference line CL3 when the hand 6 is positioned at the first reference position 6B, in a manner that the trajectory of the first hand center C1 as viewed from the vertical direction oscillates to both sides in the left and right directions relative to the system reference line CL3 (that is, it tilts the first hand reference line CL1 relative to the front and back directions, and refers to...). Figure 2 The control unit 10 drives the shared arm drive mechanism 19 and the front arm drive mechanism 20. That is, when the hand 6 moves between the first hand-to-hand position 6A and the first reference position 6B, the control unit 10 moves the first hand center C1 relative to the system reference line CL3 in a left-right direction when viewed from the top and bottom. When the hand 6 is positioned at the first reference position 6B, the control unit 10 tilts the first hand reference line CL1 relative to the system reference line CL3 and drives the motors 24 and 25.

[0064] For example, when the hand 6 is positioned at the first reference position 6B, the control unit 10 tilts the first hand reference line CL1 relative to the system reference line CL3, and drives the shared arm drive mechanism 19 and the front arm drive mechanism 20, so that the trajectory of the first hand center C1 when the hand 6 moves between the first junction position 6A and the first reference position 6B becomes Figure 7 The curve CV1. In Figure 7 In the diagram, the position of "0" on the vertical axis indicates the position of the system reference line CL3 in the left-right direction. Additionally, if a point on the first hand reference line CL1, positioned along the length of hand 6 at the same location as the fourth rotation center C9, is designated as point P1 (refer to...),... Figure 1 , Figure 2 ),but Figure 7 The curve CV2 is the trajectory of point P1 when the hand 6 moves between the first junction position 6A and the first reference position 6B, as viewed from the top and bottom.

[0065] exist Figure 7 In the example shown, viewed from the top and bottom, when hand 6 is positioned at the first reference position 6B, the first hand center C1 is located on the left-right side relative to the system reference line CL3. As hand 6 moves towards the first junction position 6A, it further moves to the left-right side, and then moves to the other side relative to the left-right side relative to the system reference line CL3. Furthermore, when hand 6 reaches the first junction position 6A, the first hand center C1 is positioned on the system reference line CL3. At this time, point P1 is also positioned on the system reference line CL3.

[0066] In addition, Figure 7 In the example shown, when hand 6 moves between the first hand-intersection position 6A and the first reference position 6B, the amount of oscillation (offset) A1 of the first hand center C1 relative to the system reference line CL3 on one side in the left-right direction is approximately equal to the amount of oscillation A2 of the first hand center C1 relative to the system reference line CL3 on the other side in the left-right direction. That is, in Figure 7 In the example shown, when the hand 6 is positioned at the first reference position 6B, the control unit 10 tilts the first hand reference line CL1 relative to the system reference line CL3, and drives the shared arm drive mechanism 19 and the front arm drive mechanism 20 so that the oscillation amount A1 and oscillation amount A2 when the hand 6 moves between the first junction position 6A and the first reference position 6B are approximately equal.

[0067] Similarly, when the hand 7 moves between the second hand junction position 7A and the second reference position 7B, the control unit 10 swings the trajectory of the second hand center C2 relative to the system reference line CL3 in the left and right directions when viewed from the top and bottom. When the hand 7 is positioned at the second reference position 7B, the control unit 10 tilts the second hand reference line CL2 relative to the system reference line CL3 and drives the common arm drive mechanism 19 and the front arm drive mechanism 21.

[0068] For example, when the hand 7 is positioned at the second reference position 7B, the control unit 10 tilts the second hand reference line CL2 relative to the system reference line CL3, and drives the shared arm drive mechanism 19 and the front arm drive mechanism 21, so that the trajectory of the second hand center C2 when the hand 7 moves between the second junction position 7A and the second reference position 7B becomes consistent with... Figure 7 The curve CV1 is the same curve. Furthermore, in this case, if a point on the second hand reference line CL2, positioned in the same position as the fifth rotation center C10 along the length direction of hand 7, is designated as point P2 (refer to...),... Figure 2If, when hand 7 moves between the second junction position 7A and the second reference position 7B, the trajectory of point P2 when viewed from the vertical direction becomes... Figure 7 The curve CV2 is the same curve.

[0069] (Main effects of this implementation method)

[0070] As explained above, in this embodiment, when the hand 6 moves between the first hand junction position 6A and the first reference position 6B, the control unit 10 swings the trajectory of the first hand center C1 relative to the system reference line CL3 in the left and right directions when viewed from the top and bottom. When the hand 6 is positioned at the first reference position 6B, the control unit 10 tilts the first hand reference line CL1 relative to the system reference line CL3 and drives the common arm drive mechanism 19 and the front arm drive mechanism 20.

[0071] Therefore, according to the inventors' research, in this embodiment, even if the third center-to-center distance L3 is shorter than the first center-to-center distance L1, when viewed from the top and bottom, the swaying amounts A1 and A2 of the trajectory of the first hand center C1 relative to the system reference line CL3 in the left and right directions when the hand 6 moves between the first junction position 6A and the first reference position 6B can be reduced. Therefore, in this embodiment, even if the third center-to-center distance L3 is shorter than the first center-to-center distance L1, interference between the various devices of the robot system 1 such as FOUP3 and the wafer 2 mounted on the hand 6 can be prevented when the hand 6 is used to handle the wafer 2.

[0072] In addition, in this embodiment, when the hand 7 moves between the second junction position 7A and the second reference position 7B, the control unit 10 swings the trajectory of the second hand center C2 relative to the system reference line CL3 in the left and right directions when viewed from the top and bottom. When the hand 7 is positioned at the second reference position 7B, the control unit 10 tilts the second hand reference line CL2 relative to the system reference line CL3 and drives the common arm drive mechanism 19 and the front arm drive mechanism 21.

[0073] Therefore, according to the inventors' research, in this embodiment, even if the fourth center-to-center distance L4 is shorter than the second center-to-center distance L2, when viewed from the top and bottom, the amount of swaying of the trajectory of the second hand center C2 relative to the system reference line CL3 in the left and right directions when the hand 7 moves between the second junction position 7A and the second reference position 7B can be reduced. Therefore, in this embodiment, even if the fourth center-to-center distance L4 is shorter than the second center-to-center distance L2, interference between the various devices of the robot system 1 such as FOUP3 and the chip 2 mounted on the hand 7 can be prevented when the hand 7 is used to handle the chip 2.

[0074] Furthermore, in robot system 1, if when hand 6 moves between the first junction position 6A and the first reference position 6B, and hand 6 moves in a state of constant orientation (specifically, in a state where the length direction of hand 6 is aligned with the forward and backward directions), and when hand 6 is positioned at the first reference position 6B, the first hand reference line CL1 overlaps with the system reference line CL3, and the shared arm drive mechanism 19 and the front-end arm drive mechanism 20 are driven, then, for example, when viewed from the vertical direction, the trajectory of the first hand center C1 when hand 6 moves between the first junction position 6A and the first reference position 6B becomes... Figure 8 The curve CV11.

[0075] like Figure 8 As shown, when viewed from above and below, when hand 6 moves between the first junction position 6A and the first reference position 6B, the trajectory of the first hand center C1 only oscillates to a position on the left-right side relative to the system reference line CL3. The oscillation A11 of the first hand center C1 relative to the system reference line CL3 on the left-right side is greater than the aforementioned oscillations A1 and A2. Furthermore, Figure 8 The curve CV12 is the trajectory of point P1 when the hand 6 moves between the first handover position 6A and the first reference position 6B so that the trajectory of the first hand center C1 becomes the curve CV11, as viewed from the top and bottom.

[0076] (Other implementation methods)

[0077] The above-described embodiments are examples of preferred embodiments of the present invention, but are not limited thereto. Various modifications can be made without changing the spirit of the present invention.

[0078] In the above embodiment, the oscillation A1 of the first hand center C1 relative to the system reference line CL3 in the left-right direction is approximately equal to the oscillation A2 of the first hand center C1 relative to the system reference line CL3 in the left-right direction. However, the oscillation A1 can also be greater than the oscillation A2, or the oscillation A1 can be less than the oscillation A2. In addition, in the above embodiment, the shape of the common arm 15 when viewed from the top and bottom can be V-shaped, rectangular, or trapezoidal.

[0079] In the above embodiment, the robot 4 may have five or more hands 6, or it may have only one. Similarly, the robot 4 may have five or more hands 7, or it may have only one. Furthermore, in the above embodiment, the wafer 2 may be housed in a storage section other than the FOUP 3. For example, the wafer 2 may be housed in various processing devices used for manufacturing semiconductors. Moreover, in the above embodiment, the robot 4 may also handle objects other than the wafer 2. For example, the robot 4 may handle glass substrates for liquid crystal displays. In this case, the robot system 1 is a liquid crystal display manufacturing system.

[0080] Symbol Explanation

[0081] 1. Robot System

[0082] 2. Wafer (semiconductor wafer, object to be transported)

[0083] 3. FOUP (Storage Department)

[0084] 4. Robots (Industrial Robots)

[0085] 6th hand (first hand)

[0086] 6A First handover position

[0087] 6B First Reference Position

[0088] 7th hand (second hand)

[0089] 7A Second handover position

[0090] 7B Second Reference Position

[0091] 8 arms

[0092] 9. Main body

[0093] 10. Control Department

[0094] 11-arm drive mechanism

[0095] 13. Frontal side arm (first frontal side arm)

[0096] 14. Frontal side arm (second frontal side arm)

[0097] 15 Shared arm

[0098] 19. Shared arm drive mechanism

[0099] 20. Front-end side arm drive mechanism (first front-end side arm drive mechanism)

[0100] 21. Front-end side arm drive mechanism (second front-end side arm drive mechanism)

[0101] C1 First-hand Center

[0102] C2 Second-hand Center

[0103] C3 FOUP Center (Storage Center)

[0104] C6 First Rotation Center

[0105] C7 Second Rotation Center

[0106] C8 Third Rotation Center

[0107] C9 Fourth Rotation Center

[0108] C10 Fifth Rotation Center

[0109] CL1 First-hand baseline

[0110] CL2 Second-hand baseline

[0111] CL3 System Baseline

[0112] L1 First center-to-center distance

[0113] L2 Second Intercenter Distance

[0114] L3 Third center distance

[0115] L4 Fourth Intercenter Distance

[0116] X Forward and backward directions

[0117] Y represents the left and right directions.

Claims

1. A robot system characterized by comprising: a housing portion that houses a transport object; and a horizontal multi-joint industrial robot that performs at least either one of transporting the transport object out of the housing portion and transporting the transport object into the housing portion, the industrial robot includes a first hand and a second hand that load the transport object, an arm, a main body portion, an arm drive mechanism that extends and retracts the arm in a horizontal direction with respect to the main body portion, and a control portion that controls the industrial robot, the arm includes a first front end side arm portion to which the first hand is rotatably connected at a front end side thereof, a second front end side arm portion to which the second hand is rotatably connected at a front end side thereof, and a common arm portion to which base end sides of the first front end side arm portion and the second front end side arm portion are rotatably connected at mutually different positions, and which is rotatably connected to the main body portion, the arm drive mechanism includes a common arm portion drive mechanism, a first front end side arm portion drive mechanism, and a second front end side arm portion drive mechanism, ​ ​ ​ Let the rotation center of the shared arm relative to the main body be the first rotation center, the rotation center of the first front end arm relative to the shared arm be the second rotation center, the rotation center of the second front end arm relative to the shared arm be the third rotation center, the rotation center of the first hand relative to the first front end arm be the fourth rotation center, and the rotation center of the second hand relative to the second front end arm be the fifth rotation center. Let the horizontal distance between the first rotation center and the second rotation center be the first center-to-center distance, and the horizontal distance between the first rotation center and the third rotation center be the second center-to-center distance. The horizontal distance of the fourth rotation center is defined as the distance between the third and fifth rotation centers. The horizontal distance between the third and fifth rotation centers is defined as the distance between the fourth centers. The width direction of the first hand, which is orthogonal to the length direction of the first hand when viewed from above, is defined as the first width direction. The width direction of the second hand, which is orthogonal to the length direction of the second hand when viewed from above, is defined as the second width direction. The center line of the first hand in the first width direction when viewed from above is defined as the first hand reference line. The center line of the second hand in the second width direction when viewed from above is defined as the second hand reference line. The rotational speed of the common arm relative to the main body is defined as the rotational speed of the common arm. Rotation speed: The rotation speed of the first front-end arm relative to the common arm is defined as the first front-end arm rotation speed; the rotation speed of the second front-end arm relative to the common arm is defined as the second front-end arm rotation speed; the center of the object being transported, viewed from above and below, when placed in the standard position of the first hand, is defined as the center of the first hand; the center of the object being transported, viewed from above and below, when placed in the standard position of the storage unit, is defined as the center of the storage unit; an imaginary line connecting the first rotation center and the center of the storage unit when viewed from above and below is defined as the system base. The system reference line is defined as follows: the direction of the reference line is set as the front-back direction; the direction orthogonal to the up-down and front-back directions is set as the left-right direction; the position of the first hand when the object to be transported is handed over to the storage unit with the first front-end arm extended is set as the first handover position; the position of the second hand when the object to be transported is handed over to the storage unit with the second front-end arm extended is set as the second handover position; the position of the first hand when the arm is retracted to a predetermined state so that the first and second hands are close to the main body is set as the first reference position; and the position of the second hand when the first hand is positioned at the first reference position is set as the second reference position. The first inter-center distance is equal to the second inter-center distance. The distance between the third centers is shorter than the distance between the first centers. The fourth inter-center distance is shorter than the second inter-center distance. When the first hand moves between the first handover position and the first reference position, the ratio of the rotational speed of the shared arm to the rotational speed of the first front-end arm remains constant. When the second hand moves between the second handover position and the second reference position, the ratio of the rotational speed of the shared arm to the rotational speed of the second front-end arm remains constant. When the first hand is positioned at the first handover location, when viewed from above, the system baseline overlaps with the first hand's baseline. When the second hand is positioned at the second handover location, when viewed from above, the system baseline overlaps with the second hand's baseline. When the first hand moves between the first junction position and the first reference position, the control unit causes the first hand reference line to tilt relative to the system reference line when the first hand is positioned at the first reference position by oscillating the trajectory of the center of the first hand relative to the system reference line in a left-right direction when viewed from the top and bottom, and drives the shared arm drive mechanism and the first front-end arm drive mechanism. Similarly, when the second hand moves between the second junction position and the second reference position, the control unit causes the second hand reference line to tilt relative to the system reference line when the second hand is positioned at the second reference position by oscillating the trajectory of the center of the second hand relative to the system reference line in a left-right direction when viewed from the top and bottom, and drives the shared arm drive mechanism and the second front-end arm drive mechanism.

2. The robot system according to claim 1, characterized in that, The first front end arm and the second front end arm are positioned at the same location in the vertical direction.

3. The robot system according to claim 1 or 2, characterized in that, When viewed from above, the shape of the shared arm is an isosceles triangle.

4. The robot system according to claim 1 or 2, characterized in that, The shared arm drive mechanism rotates the shared arm relative to the main body with the vertical direction as the axis of rotation. The first front-end arm drive mechanism rotates the first front-end arm relative to the common arm with the vertical direction as the rotation axis, and also rotates the first hand relative to the first front-end arm. The second front-end arm drive mechanism rotates the second front-end arm relative to the common arm with the vertical direction as the rotation axis, and also rotates the second hand relative to the second front-end arm. When viewed from above and below, the shapes of the first and second hands become elongated strips with a specified length direction.

5. A control method for an industrial robot, specifically a control method for a horizontal multi-joint industrial robot, the industrial robot comprising: a first hand and a second hand for loading a transported object; an arm; a main body; and an arm drive mechanism that extends and retracts the arm relative to the main body in a horizontal direction, the industrial robot performing at least one of the following: removing the transported object from a receiving portion and moving the transported object into the receiving portion. The arm has: a first front end side arm section, and a first hand rotatably connected to a front end side of the first front end side arm section. The second front end arm is rotatably connected to the front end of the second front end arm. And a common arm, wherein the base ends of the first front-end arm and the base ends of the second front-end arm are rotatably connected to the common arm at different positions, and the common arm is rotatably connected to the main body. The arm drive mechanism includes: a common arm drive mechanism; First front-end side arm drive mechanism; And the second front-end side arm drive mechanism, Let the rotation center of the shared arm relative to the main body be the first rotation center, the rotation center of the first front end arm relative to the shared arm be the second rotation center, the rotation center of the second front end arm relative to the shared arm be the third rotation center, the rotation center of the first hand relative to the first front end arm be the fourth rotation center, and the rotation center of the second hand relative to the second front end arm be the fifth rotation center. Let the horizontal distance between the first rotation center and the second rotation center be the first center-to-center distance, and the horizontal distance between the first rotation center and the third rotation center be the second center-to-center distance. The horizontal distance between the fourth rotation center is defined as the distance between the third and fifth rotation centers. The horizontal distance between the third and fifth rotation centers is defined as the distance between the fourth centers. The width direction of the first hand, which is orthogonal to the length direction of the first hand when viewed from above, is defined as the first width direction. The width direction of the second hand, which is orthogonal to the length direction of the second hand when viewed from above, is defined as the second width direction. The centerline of the first hand in the first width direction when viewed from above is defined as the first hand reference line. The centerline of the second hand in the second width direction when viewed from above is defined as the second hand reference line. The rotational speed of the common arm relative to the main body is defined as the rotational speed of the common arm. The rotational speed is defined as follows: the rotational speed of the first front-end arm relative to the common arm is set as the first front-end arm rotational speed; the rotational speed of the second front-end arm relative to the common arm is set as the second front-end arm rotational speed; the center of the object being transported, viewed from above and below, when placed in the standard position of the first hand is set as the center of the first hand; the center of the object being transported, viewed from above and below, when placed in the standard position of the storage part is set as the center of the storage part; and an imaginary line connecting the first rotational center and the center of the storage part when viewed from above and below is set as the system base. The system reference line is defined as follows: the direction of the reference line is set as the front-back direction; the direction orthogonal to the up-down and front-back directions is set as the left-right direction; the position of the first hand when the object to be transported is handed over to the storage unit with the first front-end arm extended is set as the first handover position; the position of the second hand when the object to be transported is handed over to the storage unit with the second front-end arm extended is set as the second handover position; the position of the first hand when the arm is retracted to a predetermined state so that the first and second hands are close to the main body is set as the first reference position; and the position of the second hand when the first hand is positioned at the first reference position is set as the second reference position. The first inter-center distance is equal to the second inter-center distance. The distance between the third centers is shorter than the distance between the first centers. The fourth inter-center distance is shorter than the second inter-center distance. When the first hand moves between the first handover position and the first reference position, the ratio of the rotational speed of the shared arm to the rotational speed of the first front-end arm remains constant. When the second hand moves between the second handover position and the second reference position, the ratio of the rotational speed of the shared arm to the rotational speed of the second front-end arm remains constant. When the first hand is positioned at the first handover location, when viewed from above, the system baseline overlaps with the first hand's baseline. When the second hand is positioned at the second handover location, when viewed from above, the system baseline and the second hand baseline overlap. Its features are, When the first hand moves between the first junction position and the first reference position, the trajectory of the center of the first hand, when viewed from the top and bottom, oscillates to the left and right relative to the system reference line. When the first hand is positioned at the first reference position, the reference line of the first hand is tilted relative to the system reference line, and the shared arm drive mechanism and the first front-end arm drive mechanism are driven. Similarly, when the second hand moves between the second junction position and the second reference position, the trajectory of the center of the second hand, when viewed from the top and bottom, oscillates to the left and right relative to the system reference line. When the second hand is positioned at the second reference position, the reference line of the second hand is tilted relative to the system reference line, and the shared arm drive mechanism and the second front-end arm drive mechanism are driven.

6. The robot control method according to claim 5, characterized in that, The shared arm drive mechanism rotates the shared arm relative to the main body with the vertical direction as the axis of rotation. The first front-end arm drive mechanism rotates the first front-end arm relative to the common arm with the vertical direction as the rotation axis, and also rotates the first hand relative to the first front-end arm. The second front-end arm drive mechanism rotates the second front-end arm relative to the common arm with the vertical direction as the rotation axis, and also rotates the second hand relative to the second front-end arm. When viewed from above and below, the shapes of the first and second hands become elongated strips with a specified length direction.

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