一种离子束检测装置及检测系统
By designing an ion beam detection device that includes a vacuum chamber, a probe detection component, and an adjustment component, the problem of detection aging error in the prior art is solved, and accurate detection of a specific position at the ion beam inlet is achieved, thus improving detection accuracy.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- BEIJING JIAOTONG UNIV
- Filing Date
- 2024-04-18
- Publication Date
- 2026-07-17
AI Technical Summary
Existing ion beam detection devices require the probe to be moved back and forth when detecting large-aperture ion beams, which leads to time-related errors and inaccurate measurement data.
An ion beam detection device was designed, including a vacuum chamber, a probe detection assembly, and an adjustment assembly. The probe detection assembly is moved and rotated through a drive mechanism and a connecting mechanism, enabling simultaneous and accurate detection of multiple positions in a specific cross section without changing the distance or angle between the probe and the ion beam inlet.
It enables simultaneous and accurate detection of multiple locations within a specific distance or angle section of the ion beam inlet, eliminating aging errors and improving the accuracy and reliability of detection.
Smart Images
Figure CN118438266B_ABST