Float on-line high-efficiency preparation of multifunctional coated glass device

CN118439794BActive Publication Date: 2026-10-16威海中玻新材料技术研发有限公司
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Patent Information

Application Number
CN202410612317.4
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-05-17
Publication Date
2026-10-16
Estimated Expiration
2044-05-17

AI Technical Summary

Technical Problem

前者从镀膜区下游以斜进气方式向镀膜区内输入反应气体,从镀膜区上游抽出废气;后者则从镀膜区上方空间向镀膜区内布置多个进气通道,并在反应区周围环形布置多个抽气通道,包裹于多个进气通道外,两者的发明目的都是为了缩短镀膜时间、降低非镀膜区的补偿热耗,均不能解决汽化原料的预反应问题

Benefits of technology

本发明装置结构灵活,调节方便,能够避免反应气体的预反应。本发明设计的两块石墨块之间组成的S型进气通道,改变了现有技术中在线镀膜反应气体的喷射方式,由直型喷射改为S型喷射,该S型进气通道克服了其他反应器由于高温玻璃板直接热辐射对整个进气通道及进气室中工艺气体造成的提前预反应,提高了反应沉积效率;同时,提高了镀膜玻璃质量,提升了镀膜原料的利用率,降低了生产成本。

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Abstract

The application discloses a kind of on-line high-efficiency preparation of float method multifunctional coated glass device, including bottom plate, a plurality of mutually spaced alternate arrangement gas inlet chamber and exhaust chamber are fixed on bottom plate, the gas outlet of gas inlet chamber and the gas inlet of exhaust chamber are respectively corresponding with slit on bottom plate, cooling cavity is welded above bottom plate, graphite block is fixed below, S-shaped gas inlet passage corresponding with gas inlet chamber and straight exhaust passage corresponding with exhaust chamber are formed between every two graphite blocks, the gas inlet of gas inlet chamber is communicated with the gas inlet distributor of connecting gas inlet pipe, gas inlet chamber height is lower than exhaust chamber height, flow regulating device is arranged at the joint of gas inlet chamber and gas inlet distributor, gas distribution device for making gas evenly distributed is arranged at the gas outlet end of gas inlet chamber, the application changes the common coating reaction gas injection mode, avoids the pre-reaction of reaction gas, improves the height ratio of gas inlet chamber and exhaust chamber, so that the residence time of process gas in the reaction device is reduced, and the deposition efficiency is greatly improved.
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Description

Technical Field

[0001] This invention relates to an online coating apparatus for float glass, and more particularly to an apparatus for efficiently preparing multifunctional coated glass such as self-cleaning coated glass, low-emissivity coated glass, and conductive film glass. Background Technology

[0002] In-line coating equipment is crucial equipment on float glass production lines, using continuously running, hot glass ribbons as substrates and employing chemical vapor deposition (CVD) to prepare thin films with various functionalities. Typically, one or more compounds or elemental gases containing the elements constituting the thin film are supplied to the surface of the hot glass substrate. The clean, high-speed, high-temperature glass substrate serves as the deposition substrate, where the desired solid thin films with different functions are deposited. The tin bath and the inlet of the annealing furnace in float glass production lines are the most common coating areas. The main gaseous raw materials used for deposition include oxides, transition metal oxides, and nitrides. During in-line coating, to ensure deposition efficiency and the utilization rate of coating materials, the CVD reaction should ideally occur as close as possible to or directly on the glass substrate surface. In existing technologies, the air inlet channel of online coating devices generally adopts a straight-through structure. Since online chemical vapor deposition is carried out in a high-temperature environment of 550℃ to 720℃, when the vaporized raw material is transported through the air inlet channel of the coating device to the area above the hot glass strip, it is easy for a pre-reaction to occur in the gas phase in advance, forming a powdery deposit, which has an adverse effect on the deposition efficiency and coating quality.

[0003] For example, organotin compounds, commonly used as vaporizing raw materials in coating reaction gases, can decompose at temperatures between 300°C and 600°C. Therefore, in actual production processes, if the temperature of the reaction gases during transport is not controlled and decomposition occurs, it will adversely affect the redox reaction and film deposition on the glass surface.

[0004] Patent CN102603200B discloses an online coating device for float glass, comprising a suspension beam, a coating unit mounted on the suspension beam, a graphite plate on the bottom surface of the unit, and alternating air intake and exhaust units. Both the air intake and exhaust pipes are inverted conical structures, wider at the bottom and narrower at the top, with spiral channels on the inner wall of the pipes. In this air intake configuration, the nozzle area near the top of the glass strip is relatively large, making it easy for the vaporized raw materials to undergo pyrolysis under the thermal radiation of the glass strip.

[0005] Both invention patents with announcement numbers CN 101844873 B and CN 101844874 B disclose an online coating method and an online coating device for conductive glass. The former introduces reactant gas into the coating zone from downstream using an oblique air intake method and extracts waste gas from upstream of the coating zone; the latter arranges multiple air intake channels from above the coating zone into the coating zone and arranges multiple air extraction channels in a ring around the reaction zone, enclosing the multiple air intake channels. The purpose of both inventions is to shorten the coating time and reduce the compensating heat consumption in the non-coating zone, but neither can solve the problem of pre-reaction of vaporized raw materials.

[0006] The invention patent with announcement number CN 100340512 C discloses an online coating device for float glass. The device adopts a straight-through air inlet channel. In production practice, it was found that because the air inlet channel of the device is directly facing the glass plate, the process gas in the channel pre-reacts in advance under the direct heat radiation of the hot glass belt, which causes a significant reduction in deposition efficiency. This not only affects the coating quality, but also increases the treatment cost of coating exhaust gas recovery and emission. Summary of the Invention

[0007] To address the above problems, this invention provides an apparatus for the efficient online preparation of multifunctional coated glass using the float glass process.

[0008] This invention overcomes the defects and shortcomings of the prior art, avoids the pre-reaction of the reactant gas before it is transported to the hot glass surface through the air inlet channel, and significantly improves the efficiency of chemical vapor deposition and the quality of online coated glass.

[0009] A float glass online high-efficiency preparation device for multifunctional coated glass includes a shell and a base plate. The shell encloses the base plate to form a sealed space. The base plate is composed of multiple strip steel plates connected together, with a slit between each pair of steel plates. Multiple air inlet chambers and air outlet chambers are fixed on the base plate, arranged alternately and spaced apart. The air outlet of the air inlet chamber and the air inlet of the air outlet chamber correspond to the slits on the base plate. A cooling cavity is welded above each base plate, and multiple graphite blocks of different shapes are fixed below. An S-shaped air inlet channel corresponding to the air inlet chamber and a straight exhaust channel corresponding to the exhaust chamber are formed between each pair of graphite blocks. The air inlet of the air inlet chamber is connected to an air distributor connected to an air inlet pipe. The air outlet of the air inlet chamber is equipped with an air distribution device and connected to the S-shaped air inlet channel. The air outlet of the S-shaped air inlet channel is conical to facilitate uniform air distribution. The exhaust chamber has a straight-up-down structure. The exhaust outlet of the exhaust chamber is connected to the exhaust manifold that connects to the exhaust pipe. The exhaust manifold has a horizontal trapezoidal structure. A damping device is arranged inside the exhaust manifold. A negative pressure regulating device is provided at the connection between the exhaust chamber and the exhaust manifold.

[0010] The shell of the present invention is made of ceramic insulation cotton and stainless steel plate, which isolates the bottom plate inside the shell and the air inlet chamber, exhaust chamber and cooling chamber provided on the bottom plate from the high temperature environment outside, preventing them from being heated too high, thereby protecting the reaction gas from pyrolysis reaction.

[0011] The cooling chamber of the present invention can be circulated with a circulating cooling medium, heat transfer oil or water, to control the temperature of the reaction gas in the coating device to not exceed 300°C before entering the air intake channel, so as to avoid the reaction gas in the air intake chamber and air intake channel being too hot and causing pre-reaction, which would affect the vapor deposition efficiency and coating quality on the glass surface.

[0012] Meanwhile, to prevent the reactant gas from being continuously heated to the pre-reaction temperature during its transport in the coating apparatus, after experimental analysis by technical personnel, the height of the inlet chamber of the device of this invention was designed to be 2 / 3 to 1 / 2 of the height of the exhaust chamber. This significantly shortens the residence time and heating time of the reactant gas in the coating apparatus, further improving the efficiency of the vapor deposition reaction. To ensure uniform distribution of the reactant gas flow, a flow regulating device is installed at the connection between the inlet chamber and the inlet distributor, and a gas distribution device is installed at the outlet end of the inlet chamber to ensure uniform gas distribution. The inlet chamber is also made into an inverted triangular structure. This inverted triangular structure causes the pressure of the reactant gas to gradually increase as it descends, resulting in a more uniform spray distribution of the reactant gas flow on the glass surface, which is more conducive to improving the quality of the deposited coating.

[0013] In addition, in order to prevent the reactant gas from being radiated and heated to the pre-reaction temperature in the coating device, especially when it is close to the hot glass strip, the present invention designs the air intake channel formed between every two graphite blocks corresponding to the air intake chamber as an S-shaped air intake channel, which significantly reduces the thermal radiation heating of the reactant gas by the glass strip and avoids the pre-reaction before vapor deposition.

[0014] Since the graphite block constituting the S-shaped air intake channel can reach a body temperature of over 250°C in the tin bath or annealing furnace and has high thermal conductivity, in order to further reduce the heating of the reaction gas in the S-shaped air intake channel, the present invention also coats the inner wall of the S-shaped air intake channel with heat insulation material.

[0015] During operation, cooling medium oil or water is circulated into the cooling chamber of the online coating device. The device is placed in the tin bath or annealing furnace of the float glass production line. The glass ribbon is located on the lower surface of the graphite block in the device, and the space formed by the upper surface of the glass ribbon and the lower surface of the graphite block is the reaction zone. Reaction gas is introduced through the gas inlet pipe, and the hot glass ribbon surface at high temperature is coated online using chemical vapor deposition. The exhaust gas generated during coating is discharged from the exhaust chamber.

[0016] The device described in this invention, during operation, can control the temperature of the reactant gas during transmission within the inlet chamber and inlet channel to below 300°C via a cooling chamber. Through repeated experimental analysis, the ideal temperature control range is found to be between 150°C and 200°C. This ensures that the reactant gas does not undergo pre-reaction, saves temperature control resources, and avoids condensation of the reactant gas.

[0017] Furthermore, the S-shaped air intake channel described in this invention can also be designed as an L-shaped or inverted T-shaped channel to minimize the thermal radiation heating of the reactant gas.

[0018] Furthermore, the heat insulation material coated on the inner wall of the S-shaped air intake channel described in this invention can be a high-temperature resistant heat insulation coating, preferably a ceramic material.

[0019] The beneficial effects of this invention are as follows: The device of this invention features a flexible structure and convenient adjustment, avoiding pre-reaction of the reactant gases. The S-shaped air inlet channel formed between the two graphite blocks in this invention changes the injection method of the reactant gases in existing online coating technologies, replacing the straight injection with an S-shaped injection. This S-shaped air inlet channel overcomes the premature pre-reaction caused by direct thermal radiation from the high-temperature glass plate to the process gases in the entire air inlet channel and air inlet chamber in other reactors, thus improving the reaction deposition efficiency. Simultaneously, it improves the quality of the coated glass, increases the utilization rate of coating raw materials, and reduces production costs.

[0020] The inlet chamber height designed in this invention is 1 / 2 to 2 / 3 of the exhaust chamber height, which shortens the residence time and heating time of the process gas in the reactor, thereby improving the reaction deposition efficiency. The inverted triangular inlet chamber structure ensures that the pressure of the process gas increases uniformly during its downward movement, enhancing the homogenization of the process gas and ensuring uniform coating across the entire glass strip.

[0021] The housing described in this invention isolates the device placed inside the housing from the surrounding high-temperature environment, thereby preventing the reactant gas from being heated to an excessively high temperature.

[0022] The straight structure of the exhaust chamber prevents dust generated by the exhaust gas from accumulating inside. The transverse trapezoidal structure of the exhaust integrator, along with its internal damping and negative pressure regulating devices, easily maintains uniform exhaust pressure in each chamber. The end caps on both sides of the exhaust integrator can be easily opened for quick online or offline cleaning of exhaust dust, ensuring that uneven exhaust during coating production does not cause defects such as streaks. Exhaust is uniform and stable over a long period, resulting in longer coating cycles.

[0023] This invention's device effectively avoids pre-reaction of reactant gases, improves chemical vapor deposition efficiency and the quality of online coated glass, and can be flexibly and conveniently disassembled and assembled according to production needs. Using this coating device allows for a wide range of adjustable film thicknesses, easy and rapid operation, meeting the production needs of various film thicknesses. This device can accommodate both high and low flow rate requirements. It can efficiently produce coated glasses with various special functions online, such as self-cleaning glass with a super-amphiphilic surface structure; low-emissivity glass with high reflectivity to mid- and far-infrared rays; and conductive film glass for solar cell substrates. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of the device of the present invention.

[0025] Figure 2 yes Figure 1 AA sectional view. Detailed Implementation

[0026] Referring to the accompanying drawings, the present invention will be further described below with reference to embodiments.

[0027] Example 1 The float glass online high-efficiency preparation device of the present invention includes a shell 20 and a base plate 3. The shell 20 encloses the base plate 3 to form a sealed space. The base plate 3 is composed of multiple strip steel plates connected together, with a slit 16 between each two steel plates. Multiple air inlet chambers 14 and exhaust chambers 5 are fixed on the base plate 3, arranged alternately and spaced apart. The air outlet of the air inlet chamber 14 and the air inlet of the exhaust chamber 5 correspond to the slits 16 on the base plate, respectively. A cooling cavity 4 is welded above each base plate, and a graphite block 2 is fixed below it. An S-shaped air inlet channel 17 corresponding to the air inlet chamber 14 and a straight exhaust channel corresponding to the exhaust chamber 5 are formed between each two graphite blocks.

[0028] The air inlet of the air inlet chamber 14 is connected to the air inlet distributor 12 connected to the air inlet pipe 6, and the air outlet of the air inlet chamber 14 is connected to the S-shaped air inlet channel 17. The air outlet of the S-shaped air inlet channel 17 is a conical spray nozzle, and the inner wall of the S-shaped air inlet channel 17 is coated with heat insulation material 18.

[0029] The exhaust port of exhaust chamber 5 is connected to exhaust manifold 8, which is connected to exhaust pipe 10. A negative pressure regulating device 11 is provided at the connection between exhaust chamber 5 and exhaust manifold 8. Exhaust chamber 5 has a vertical structure, while exhaust manifold 8 has a horizontal trapezoidal structure. A damping device 9 is provided inside exhaust manifold 8, and end caps 7 are provided on both sides of exhaust manifold 8. In the figure, 1 represents glass, and 19 represents the reaction zone.

[0030] A flow regulating device 13 is provided at the connection between the air intake chamber 14 and the air intake distributor 12, and an air distribution device 15 for uniformly distributing the gas is provided in the slit 16 at the air outlet end of the air intake chamber 14. The air intake chamber 14 is made into an inverted triangular structure.

[0031] The shell 20 is made of ceramic insulation cotton and stainless steel plate, which isolates the bottom plate 3 inside the shell 20 and the air inlet chamber 14, exhaust chamber 5, cooling chamber 4 and other components on the bottom plate 3 from the high temperature environment outside, thus preventing the reaction gas from being heated to an excessively high temperature.

[0032] Circulate cooling medium, either oil or water, into cooling chamber 4. Prevent the reactant gas from overheating during transport; ensure its temperature does not exceed 300℃, but also does not drop too low to avoid condensation. Experimental data indicates that the reactant gas temperature should be controlled between 150℃ and 200℃, ideally 180℃.

[0033] Preferably, the height of the air intake chamber 14 of the device of the present invention is 2 / 3 to 1 / 2 of the height of the exhaust chamber 5, and most preferably 1 / 2.

[0034] Preferably, the S-shaped air intake channel 17 of the present invention can be an L-shaped structure or an inverted T-shaped structure, but is preferably an S-shaped structure.

[0035] Preferably, the air outlet of the S-shaped air intake channel 17 of the present invention is a conical injection port.

[0036] This invention effectively avoids the pre-reaction of reactive gases, improves the efficiency of chemical vapor deposition and the quality of online coated glass, and meets the needs of float glass online production of various coated glasses. The end caps 7 on both sides of the exhaust integrator 8 can be easily opened to quickly clean exhaust gas dust, ensuring uniform and stable exhaust and a longer coating cycle.

[0037] Example 2 Similar to Example 1, the float glass online high-efficiency preparation device of the present invention includes a shell 20 and a base plate 3. The base plate 3 is composed of multiple strip steel plates connected together, with a slit 16 between each two steel plates. Multiple air inlet chambers 14 and exhaust chambers 5 are fixed on the base plate 3, arranged alternately and spaced apart. The air outlet of the air inlet chamber 14 and the air inlet of the exhaust chamber 5 correspond to the slits 16 on the base plate, respectively. A cooling cavity 4 is welded above each base plate, and a graphite block 2 is fixed below it. An S-shaped air inlet channel 17 corresponding to the air inlet chamber 14 and a straight exhaust channel corresponding to the exhaust chamber 5 are formed between each two graphite blocks.

[0038] The housing 20 encloses the bottom plate 3 to form a closed space, thus isolating the bottom plate 3 inside the housing 20 and the air intake chamber 14, exhaust chamber 5, cooling chamber 4, etc. provided on the bottom plate 3 from the high-temperature environment outside.

[0039] The inner wall of the S-shaped air intake channel 17 is coated with heat insulation material 18 to reduce the heating of the reaction gas in the S-shaped air intake channel.

[0040] The air inlet chamber 14 has an inverted triangular structure, which causes the pressure of the reactant gas to gradually increase as it descends, resulting in a more uniform spray distribution of the reactant gas flow on the glass surface, which is beneficial to improving the quality of the deposited coating.

[0041] Circulating cooling medium, such as oil or water, is introduced into the cooling chamber to prevent the reactant gas from overheating during transport. The temperature should be kept below 300°C, but also not too low to avoid condensation. The reactant gas temperature should be controlled between 150°C and 200°C, preferably 150°C.

[0042] Preferably, the housing 20 is made of ceramic insulation cotton and stainless steel plate.

[0043] Preferably, the height of the air intake chamber 14 of the device of the present invention is 2 / 3 to 1 / 2 of the height of the exhaust chamber 5, and most preferably 0.62.

[0044] Preferably, the S-shaped air intake channel 17 of the present invention can be an L-shaped structure or an inverted T-shaped structure, and is preferably an L-shaped structure.

[0045] Preferably, the air outlet of the S-shaped air intake channel 17 of the present invention is a conical injection port.

[0046] Example 3 Similar to Example 1, the float glass online high-efficiency preparation device of the present invention includes a shell 20 and a base plate 3. The base plate 3 is composed of multiple strip steel plates connected together, with a slit 16 between each two steel plates. Multiple air inlet chambers 14 and exhaust chambers 5 are fixed on the base plate 3, arranged alternately and spaced apart. The air outlet of the air inlet chamber 14 and the air inlet of the exhaust chamber 5 correspond to the slits 16 on the base plate, respectively. A cooling cavity 4 is welded above each base plate, and a graphite block 2 is fixed below it. An S-shaped air inlet channel 17 corresponding to the air inlet chamber 14 and a straight exhaust channel corresponding to the exhaust chamber 5 are formed between each two graphite blocks.

[0047] The housing 20 encloses the bottom plate 3 to form a closed space, thus isolating the bottom plate 3 inside the housing 20 and the air intake chamber 14, exhaust chamber 5, cooling chamber 4, etc. provided on the bottom plate 3 from the high-temperature environment outside.

[0048] The inner wall of the S-shaped air intake channel 17 is coated with heat insulation material 18 to reduce the heating of the reaction gas in the S-shaped air intake channel.

[0049] The air inlet chamber 14 has an inverted triangular structure, which causes the pressure of the reactant gas to gradually increase as it descends, resulting in a more uniform spray distribution of the reactant gas flow on the glass surface, which is beneficial to improving the quality of the deposited coating.

[0050] To prevent the reactant gases from overheating during transport, a circulating cooling medium, oil or water, is introduced into the cooling chamber to ensure that the temperature does not exceed 300°C, but also does not fall too low to prevent condensation. The temperature of the reactant gases should be controlled between 150°C and 200°C, preferably 200°C.

[0051] Preferably, the housing 20 is made of ceramic insulation cotton and stainless steel plate.

[0052] Preferably, the height of the air intake chamber 14 of the device of the present invention is 2 / 3 to 1 / 2 of the height of the exhaust chamber 5, and more preferably 2 / 3.

[0053] Preferably, the S-shaped air intake channel 17 of the present invention can be an L-shaped structure or an inverted T-shaped structure, but is preferably an S-shaped structure.

[0054] Preferably, the air outlet of the S-shaped air intake channel 17 of the present invention is a conical injection port.

[0055] Example 4 Similar to Example 1, the float glass online high-efficiency preparation device of the present invention has an operating environment temperature of 550℃~720℃.

[0056] To prevent the reactant gas from undergoing a pre-reaction due to excessive heat during the transport process of the device, the device of the present invention is further provided with a sealed shell 20. The shell 20 encloses the bottom plate 3 and forms a closed space with the bottom plate 3. The air inlet chamber 14, exhaust chamber 5, cooling chamber 4 and bottom plate 3 of the device are placed inside the shell, and a circulating cooling medium of oil or water is introduced into the cooling chamber 4. The air inlet channel is designed as an S-shaped air inlet channel 17 and the inner wall of the S-shaped air inlet channel is coated with heat insulation material to control the temperature of the reactant gas between 150°C and 200°C before it reaches the surface of the glass substrate.

[0057] It should be noted that the above embodiments only illustrate some implementation methods of the present invention and are not intended to limit the present invention in any way. Any modifications and improvements made in accordance with the concept of the present invention will fall within the protection scope of the present invention.

Claims

1. A float glass online high-efficiency multifunctional coated glass preparation device, comprising a base plate, the base plate being composed of multiple strip steel plates connected together, with a slit between every two steel plates; multiple alternating air inlet chambers and exhaust chambers fixed on the base plate, the air outlets of the air inlet chambers and the air inlets of the exhaust chambers corresponding to the slits on the base plate; a cooling cavity welded above the base plate; multiple graphite blocks of different shapes fixed below the base plate, with a straight exhaust channel formed between every two graphite blocks corresponding to the exhaust chambers; the air inlet of the air inlet chamber connected to an air inlet distributor connected to an air inlet pipe; and the air outlet of the exhaust chamber connected to an exhaust inlet connector connected to an exhaust pipe, characterized in that... It also includes a shell, which encloses the bottom plate to form a closed space. An S-shaped air intake channel is formed between every two graphite blocks corresponding to the air intake chamber. The inner wall of the S-shaped air intake channel is coated with heat insulation material. The air outlet of the air intake chamber is equipped with an air distribution device and connected to the S-shaped air intake channel. The height of the air intake chamber is 1 / 2 to 2 / 3 of the height of the exhaust chamber, so that the temperature of the reaction gas is controlled between 150°C and 200°C during the transmission process. The exhaust chamber has a straight-up-down structure and no other accessories are installed inside it; The exhaust manifold has a horizontal trapezoidal structure, a damping device is arranged inside the exhaust manifold, and end caps are set at both ends of the exhaust manifold.

2. The float glass online high-efficiency preparation device for multifunctional coated glass according to claim 1, characterized in that... The air intake chamber has an inverted triangular structure.

3. The float glass online high-efficiency preparation device for multifunctional coated glass according to claim 1, characterized in that... The ratio of the height of the intake chamber to the height of the exhaust chamber is 0.

62.

4. The float glass online high-efficiency preparation device for multifunctional coated glass according to claim 1, characterized in that... The air outlet of the S-shaped air intake channel is conical.

5. The float glass online high-efficiency preparation device for multifunctional coated glass according to claim 1, characterized in that... A flow regulating device is provided at the connection between the air intake chamber and the air intake distributor.

6. The float glass online high-efficiency preparation device for multifunctional coated glass according to claim 1, characterized in that... A negative pressure regulating device is installed at the connection between the exhaust chamber and the exhaust integrator.

7. The float glass online high-efficiency preparation device for multifunctional coated glass according to claim 1, characterized in that... The heat insulation material is a high-temperature resistant heat insulation coating or ceramic material.

8. The float glass online high-efficiency preparation device for multifunctional coated glass according to claim 1, characterized in that... The shell is made of ceramic insulation cotton and stainless steel plate.

Citation Information

Patent Citations

  • Apparatus for on-line coating film of float glass

    CN100340512C

  • On-line film coating method of conductive glass and on-line film coating device

    CN101844873B

  • On-line film coating method of conductive glass and on-line film coating device

    CN101844874B

  • Online film coating device for float glass

    CN102603200B

  • Reaction device for off-line chemical vapor deposition coating of transparent electrode glass for solar cell

    CN116121732A