A spray head with phase change heat dissipation and a manufacturing method thereof

Abstract

The application discloses a spray head with phase change heat dissipation and a manufacturing method, and the spray head comprises a condensing part, an evaporating part, an evaporating wick and a condensing wick. A plurality of air inlet holes penetrating through the condensing part in the axial direction are arranged on the condensing part, and a plurality of condensing micro flow channels distributed in a staggered mode with the air inlet holes are embedded in the condensing part. Liquid inlets and liquid outlets communicated with the micro flow channels are arranged on the condensing part. The evaporating part is connected with the condensing part to form a sealed vacuum cavity, and a heat exchange working medium is arranged in the cavity. A plurality of support columns coaxially arranged with the air inlet holes are arranged on the side end face of the evaporating part close to the condensing part, and a plurality of spray holes communicated with the air inlet holes are arranged in the support columns. A vacuumizing and liquid injecting pipe is arranged on the side of the evaporating part. The evaporating wick is attached to the side end face of the evaporating part close to the condensing part and attached to the outer circumferential surface of the support column. The condensing wick is attached to the side end face of the condensing part close to the evaporating part. The condensing wick and the evaporating wick are both provided with through holes corresponding to the support columns. The spray head has the capacity of uniform and efficient heat dissipation.

Description

Technical Field

[0001] This application relates to the field of chemical vapor deposition (CVD) equipment, and more specifically to a spray head with phase change heat dissipation and a method for manufacturing it. Background Technology

[0002] High-end vapor phase epitaxial growth equipment involves feeding gases, such as organic compounds, gaseous elements, and carrier gases, into a reaction chamber. These gases flow over a substrate surface heated to the reaction temperature, where a chemical reaction occurs, resulting in the epitaxial growth of a single-crystal thin film material with specific requirements and crystal orientation matching the substrate. To obtain high-quality single-crystal thin films with larger areas, greater thickness, and more uniform doping, the substrate rotating at high speed within the reaction chamber should be placed in a temperature and flow field with better uniformity and consistency.

[0003] Therefore, the gas supply system needs to deliver the reactant gas into the reaction chamber in a uniform and controllable manner. The reaction chamber spray head, as a crucial component of the equipment, is primarily used to spray the reactant gas into the reaction chamber. Therefore, the design of the spray holes will affect the spatial distribution and diffusion rate of the reactant gas within the reaction chamber. Furthermore, during normal operation, the heat generated by the reaction chamber heating system will radiate to the outlet surface of the spray head. Therefore, the design of the internal cooling and heat dissipation channels of the spray head will affect the pre-reaction of the reactant gas, the deposition and growth of particles on the outlet surface of the spray head, and the high-temperature thermal deformation of the spray head itself.

[0004] invention

[0005] To overcome the above-mentioned shortcomings, the purpose of this application is to provide a spray head with phase change heat dissipation and its manufacturing method. The spray head can uniformly and efficiently remove the heat radiated upward in the reaction chamber in a timely and controllable manner, ensuring that the spray head can operate safely, efficiently and reliably for a long time within a suitable temperature range.

[0006] To achieve the above objectives, this application adopts the following technical solution:

[0007] A spray head with phase change heat dissipation, the spray head comprising:

[0008] The condenser section is provided with a plurality of air inlets that penetrate the condenser section axially. The condenser section is embedded with an array of condenser microchannels. The air inlets and the condenser microchannels are staggered. The condenser section is provided with a liquid inlet and a liquid outlet that communicate with the microchannels.

[0009] An evaporation section is connected to the condensation section to form a sealed and vacuum cavity, which is filled with a heat exchange medium.

[0010] The evaporation section is provided with a plurality of support columns on one end face near the condensation section. Each support column is provided with a spray hole that communicates with the air inlet. The support column and the air inlet are coaxially arranged. A vacuum injection pipe is provided on the side of the evaporation section.

[0011] The liquid suction core assembly includes an evaporation liquid suction core and a condensation liquid suction core. The evaporation liquid suction core is attached to the end face of the evaporation section near the condensation section and is attached to the outer peripheral surface of the support column. The condensation liquid suction core is attached to the end face of the condensation section near the evaporation section. Both the condensation liquid suction core and the evaporation liquid suction core are provided with through holes corresponding to the support column and / or the air inlet.

[0012] In one embodiment, the condenser section has a condensation surface near the evaporator section and an air inlet surface opposite to the condensation surface;

[0013] The air inlet has a first opening on the air inlet surface and a second opening on the condensation surface, wherein the diameter of the first opening is greater than or equal to the diameter of the second opening.

[0014] In one embodiment, the evaporation section has a concave surface near the condensation section and an outlet surface opposite to the concave surface, the outlet surface being a smooth plane;

[0015] The spray hole has a third opening communicating with the air inlet and a fourth opening located on the air outlet surface.

[0016] The spray hole has a narrow section inside, and the diameter of the spray hole near the third opening is larger than the diameter of the narrow section, and / or, the diameter of the spray hole near the fourth opening is larger than the diameter of the narrow section.

[0017] In one embodiment, the distance from the narrow portion to the fourth opening gradually increases from the center of the evaporation portion to its edge;

[0018] Alternatively, the distance from the narrow section to the fourth opening may decrease progressively from the center of the evaporation section to its edge;

[0019] Alternatively, the distance from the narrow section to the fourth opening may be set in the form of "peaks and troughs".

[0020] In one embodiment, a plurality of air inlets are evenly distributed in an array on the condenser section, and a plurality of support columns are evenly distributed in an array on the evaporator section;

[0021] The condensation microchannels in the array are arranged in parallel intervals. Each array of condensation microchannels includes several condensation microchannels arranged at intervals, and the distance between two adjacent condensation microchannels is 3-5 mm.

[0022] In one embodiment, the side of the condensation microchannel away from the condensation wick is a rectangular groove, and the side of the condensation microchannel closer to the condensation wick is one of an arc shape, a rectangle, or a dovetail shape.

[0023] In one embodiment, both the evaporation liquid absorption core and the condensation liquid absorption core are porous structures formed by powder sintering, and both the evaporation liquid absorption core and the condensation liquid absorption core have a thickness of 0.5 to 2.5 mm and a porosity of 30% to 60%.

[0024] The powder is a high-temperature resistant metal powder with a particle size of 25–200 μm.

[0025] In one embodiment, the heat exchange medium is one of deionized water, ethanol, or liquid alkali metal.

[0026] This application embodiment also provides a method for manufacturing a spray head with phase change heat dissipation, the method comprising the following steps:

[0027] During the evaporation section manufacturing stage, a first metal plate is provided, and several support columns are formed on the first metal plate based on milling technology. Spray holes are formed on the support columns based on drilling technology.

[0028] During the condenser manufacturing stage, a second metal plate is provided. Embedded microchannels are formed on the second metal plate using wire cutting technology, and several air inlets are formed on the second metal plate using milling technology.

[0029] In the cleaning and drying stage, the evaporation section and the condensation section are cleaned using an ultrasonic cleaning process, and then the cleaned evaporation section and the condensation section are dried.

[0030] In the liquid absorption core preparation stage, an evaporation liquid absorption core is formed on one side end face of the support column of the cleaned evaporation section based on a high-temperature sintering process, and a condensation liquid absorption core is formed on one side end face of the cleaned condensation section based on a high-temperature sintering process.

[0031] During the assembly phase, the end face of the evaporator section with the evaporation liquid absorption core is connected to the end face of the condenser section with the condensation liquid absorption core using the vacuum diffusion welding process to form a sealed cavity. The cavity is then evacuated using a vacuum injection pipe to form a sealed and vacuum cavity. The cavity is then filled with heat exchange medium using the vacuum injection pipe, and the vacuum injection pipe is sealed after filling is completed.

[0032] In one embodiment, the high-temperature sintering process includes:

[0033] Mold preparation stage: A first graphite mold adapted to the evaporation section and a second mold adapted to the condensation section are made; the second mold and the condensation section are assembled and stacked to form a second cavity;

[0034] Filling stage: Assemble and stack the first mold and the evaporation section to form the first cavity. Fill the first cavity with high-temperature resistant metal powder under no pressure. Intermittently vibrate the first mold during the filling process until the first cavity is filled with high-temperature resistant metal powder.

[0035] The second mold and the condenser are assembled and stacked to form the second cavity; under no pressure, high-temperature resistant metal powder is filled into the second cavity, and the second mold is intermittently vibrated during the filling process until the second cavity is filled with high-temperature resistant metal powder.

[0036] Sintering stage: The first mold and evaporation section filled with high-temperature resistant metal powder, and the second mold and condensation section filled with high-temperature resistant metal powder are placed together in a box-type vacuum atmosphere resistance furnace for high-temperature sintering;

[0037] Demolding stage: After sintering, the first mold and the second mold are removed respectively, resulting in an evaporation section with an evaporation wick and a condensation section with a condensation wick.

[0038] Beneficial effects

[0039] The spray head in this application has advantages such as high thermal conductivity, excellent temperature uniformity, fast hot start, simple structure, and no need for additional power drive. The spray head can uniformly and efficiently remove the heat radiated upward in the reaction chamber in a timely and controllable manner, ensuring that the spray head can operate safely, efficiently, and reliably for a long time within a suitable temperature range.

[0040] The spray head integrates a condensation section, an evaporation section, and a liquid suction core into its main structure, giving it uniform and efficient heat dissipation capabilities, effectively reducing the inlet air temperature and minimizing pre-reaction. In addition, the gas flowing out of the spray holes has a lower temperature and is more uniform and controllable, reducing the deposition and growth of reactants on the spray head outlet surface and the thermal deformation of the spray head itself, further improving the thickness and doping uniformity of the epitaxially grown thin film material.

[0041] The main body of the spray head is located in a vacuum environment at the top of the reaction chamber. When the heat in the reaction chamber is conducted to the gas outlet of the evaporation section, the heat exchange medium in the chamber evaporates in the vacuum environment to produce a gas phase. The heat exchange medium absorbs heat and expands rapidly when it changes from liquid to gas. When the gaseous heat exchange medium encounters the condensation section with a condensation channel, it will turn into a liquid phase. The heat exchange medium releases the heat it carries when it changes from gas to liquid. The liquid heat exchange medium flows back to the evaporation section under the action of the liquid suction core assembly. This phase change process is repeated in the sealed and vacuum chamber. In this cycle, heat is transferred evenly and efficiently.

[0042] The condensation surface of the condenser section is the conductive surface of the condensation microchannel, also known as the heat exchange surface. This design reduces the interfacial thermal resistance of the condenser section by one layer. The heat absorbed by the condensation surface of the condenser section can be more quickly conducted to the liquid flowing in the condensation microchannel (specifically, condensate), thereby achieving efficient heat exchange. The condensate (such as deionized water) introduced into the condensation microchannel absorbs heat and boils at a relatively low temperature, thus achieving two-phase flow boiling heat exchange. The two-phase flow boiling heat exchange of the condensation microchannel not only has efficient heat exchange capacity, but also has anti-clogging capability, which is more conducive to the uniformity of temperature required in all areas of the spray head. Attached Figure Description

[0043] The accompanying drawings are provided to illustrate the technical solutions of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the technical solutions of this disclosure and do not constitute a limitation on the technical solutions of this disclosure. The shapes and sizes of the components in the drawings do not reflect actual proportions and are only intended to illustrate the content of this application.

[0044] Figure 1 An exploded view of a spray head with phase change heat dissipation provided in an embodiment of this application;

[0045] Figure 2 A cross-sectional view of a spray head with phase change heat dissipation provided in an embodiment of this application;

[0046] Figure 3 A cross-sectional view of the condenser section and the condenser suction core provided in the embodiments of this application;

[0047] Figure 4 for Figure 3 Enlarged diagram of part A in the middle;

[0048] Figure 5 A cross-sectional view of the evaporation section and the evaporation absorbent core provided in the first aspect of the embodiments of this application;

[0049] Figure 6 A cross-sectional view of the evaporation section and the evaporation absorbent core provided in the second aspect of the embodiments of this application;

[0050] Figure 7 A cross-sectional view of the evaporation section and the evaporation absorber provided in the third aspect of the embodiments of this application.

[0051] Figure 8 A flowchart illustrating the manufacturing method of a spray head with phase change heat dissipation provided in an embodiment of this application;

[0052] Figure 9 A cross-sectional view of the sintered powder of the evaporation wick on the evaporation section;

[0053] Figure 10 A cross-sectional view of the sintered powder of the condenser suction core on the condenser section;

[0054] Figure 11 A schematic diagram of the liquid suction core structure for either evaporation or condensation. Detailed Implementation

[0055] The above-described solution will be further illustrated below with reference to specific embodiments. It should be understood that these embodiments are for illustrative purposes only and are not intended to limit the scope of this application. The implementation conditions used in the embodiments may be further adjusted according to the conditions of specific manufacturers, and the implementation conditions not specified are generally those in routine experiments.

[0056] Unless otherwise defined, the technical or scientific terms used in the embodiments of this disclosure shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," and similar terms used in the embodiments of this disclosure do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the element or object listed following the word and its equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. In this document, "electrical connection" includes the situation where constituent elements are connected together by an element having some electrical function. There is no particular limitation on the "electrically functioning element," as long as it enables the transmission and reception of electrical signals between the connected constituent elements. An "electrically functioning element" can be, for example, an electrode or wiring, a switching element such as a transistor, or other functional elements such as a resistor, inductor, or capacitor. "Up," "down," "left," and "right" are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0057] In this application, the terms "upper," "lower," "inner," "middle," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0058] This application discloses a spray head with phase change heat dissipation and its manufacturing method. The spray head includes a condenser section, an evaporator section, an evaporator liquid absorption core, and a condenser liquid absorption core. The condenser section is provided with multiple axially penetrating air inlets. The condenser section is embedded with an array of condenser microchannels that are staggered with the air inlets. The condenser section is provided with a liquid inlet and a liquid outlet communicating with the microchannels. The evaporator section and the condenser section are connected to form a sealed vacuum cavity containing a heat exchange medium. The evaporator section is provided with multiple support columns coaxially arranged with the air inlets on one end face near the condenser section. The support columns are provided with spray holes communicating with the air inlets. The side of the evaporator section is provided with a vacuum injection pipe. The evaporator liquid absorption core is attached to the side face of the evaporator section near the condenser section and is attached to the outer peripheral surface of the support columns. The condenser liquid absorption core is attached to the side face of the condenser section near the evaporator section. Both the condenser liquid absorption core and the evaporator liquid absorption core are provided with through holes corresponding to the support columns. This spray head has the ability to dissipate heat evenly and efficiently.

[0059] Next, join Figures 1-8 This application describes a spray head with phase change heat dissipation provided in an embodiment. The spray head can controllably and uniformly remove the heat radiated upward from the reaction chamber in a timely manner, ensuring that the spray head can operate safely, efficiently, and reliably for a long time within a suitable temperature range.

[0060] The spray head includes a condenser section 10, an evaporator section 40, and a liquid absorption core assembly. The spray head is mainly made of high-temperature resistant metal material, preferably stainless steel. Specifically, the condenser section 10 and the evaporator section 40 are both circular metal plates, and the liquid absorption core assembly is a sintered porous structure.

[0061] The condenser 10 is provided with a plurality of axially penetrating air inlets 13, and the condenser 10 is embedded with an array of condenser microchannels 14. The air inlets 13 and the condenser microchannels 14 are staggered. The condenser 10 is provided with liquid inlets (not shown in the figure) and liquid outlets (not shown in the figure) that are connected to the condenser microchannels 14.

[0062] The evaporator section 40 is connected to the condenser section to form a sealed and vacuum cavity, which is filled with a heat exchange medium.

[0063] The evaporation section is provided with a plurality of support columns 43 on one end face near the condensation section. Each support column is provided with a spray hole 44 that communicates with the air inlet 13. The support column 43 is coaxially arranged with the air inlet 13. The side of the evaporation section 40 is provided with a vacuum injection pipe 45.

[0064] The liquid suction core assembly includes an evaporation liquid suction core 30 and a condensation liquid suction core 20. The evaporation liquid suction core 30 is attached to the end face of the evaporation section near the condensation section 10 and is attached to the outer peripheral surface of the support column 43. The condensation liquid suction core 20 is attached to the end face of the condensation section 10 near the evaporation section 40. Both the condensation liquid suction core 40 and the evaporation liquid suction core 30 are provided with through holes (not marked in the attached drawings) corresponding to the support column 43 and / or the air inlet 13.

[0065] It should be noted that the main body of the spray head is located in a vacuum environment at the top of the reaction chamber. When the heat in the reaction chamber is conducted to the gas outlet of the evaporation section, the heat exchange medium in the chamber evaporates in the vacuum environment to produce a gas phase. The heat exchange medium absorbs heat and expands rapidly when it changes from liquid to gas. When the gaseous heat exchange medium encounters the condensation section with condensation channels, it will turn into a liquid phase. The heat exchange medium releases the heat it carries when it changes from gas to liquid. The liquid heat exchange medium flows back to the evaporation section under the action of the liquid suction core assembly. This phase change process is repeated in the sealed and vacuum chamber, thus achieving uniform and efficient heat transfer.

[0066] The condensation surface of the condenser section is the conductive surface of the condensation microchannel, also known as the heat exchange surface. This design reduces the interfacial thermal resistance of the condenser section by one layer. The heat absorbed by the condensation surface of the condenser section can be more quickly conducted to the liquid flowing in the condensation microchannel, thereby achieving efficient heat exchange. The condensate (deionized water) introduced into the condensation microchannel absorbs heat and boils at a relatively low temperature, undergoing a phase change (deionized water boils below 100°C in a vacuum environment), thus achieving two-phase flow boiling heat exchange. The two-phase flow boiling heat exchange of the condensation microchannel not only has efficient heat exchange capacity, but the condensation microchannel also has anti-clogging capability, which is more conducive to the uniformity of temperature required in all areas of the spray head.

[0067] In this application, a condensation section, an evaporation section, and a liquid absorption core assembly are integrated into the main structure of the spray head, which enables the spray head to have uniform and efficient heat dissipation capabilities, effectively reducing the inlet air temperature and minimizing the occurrence of pre-reactions. In addition, the temperature of the gas flowing out of the spray hole is lower and more uniform and controllable, reducing the deposition and growth of reactants on the gas outlet surface of the spray head and the thermal deformation of the spray head itself, further improving the thickness and doping uniformity of the epitaxially grown thin film material.

[0068] refer to Figure 3In this embodiment, the condenser section has a condenser surface 12 near the evaporator section and an air inlet surface 11 opposite to the condenser surface; the air inlet 13 has a first opening 131 located on the air inlet surface and a second opening 132 located on the condenser surface 12. The diameter of the first opening 131 is larger than the diameter of the second opening 132. The diameter of the first opening 131 is R1, and the diameter of the second opening 132 is R2, where R1 > R2, R1 is between 10-16 mm, R2 is between 5-8 mm, and the distance between the first opening 131 and the second opening 132 of the air inlet 13 is B, where B is between 6-12 mm.

[0069] refer to Figure 1 and Figure 5 In this embodiment, the evaporation section 40 has a concave surface 41 near the condensation section and an outlet surface 42 opposite to the concave surface 41. The outlet surface 42 is a smooth plane. It should be noted that the outlet surface in this embodiment is the evaporation surface of the evaporation section. The outlet surface 42 is made into a smooth plane by electrolytic polishing. Since the heat absorbed by the outlet surface 42 can be conducted evenly and efficiently and the temperature can be controlled, the particles deposited on the outlet surface 42 of the evaporation section can be significantly reduced, which is beneficial to improving the quality of the epitaxial thin film material on the substrate due to the falling particles.

[0070] The spray hole 43 has a third opening 441 communicating with the air inlet 13 and a fourth opening 442 located on the air outlet surface; the interior of the spray hole has a narrow portion 443, the diameter of the spray hole near the third opening is larger than the diameter of the narrow portion, and / or, the diameter of the spray hole 44 near the fourth opening 442 is larger than the diameter of the narrow portion 443. This design makes the diameter of the spray hole 44 larger at both ends and smaller in the middle. When the gas enters from the third opening 441 and passes through the narrow portion 443, the gas velocity increases. When it flows from the narrow portion 443 into the fourth opening 442, its velocity gradually decreases. This design avoids the gas with a faster flow rate from being directly sprayed onto the substrate, which is beneficial for controlling the uniformity of the epitaxially grown thin film material in different areas.

[0071] Further, refer to Figure 5 -- Figure 7 The distance from the narrow portion 443 to the fourth opening 442 is D, wherein the distance D from the narrow portion 443 located at the center of the evaporation portion 40 to the fourth opening is between 2 and 4 mm. In the first aspect, as... Figure 5As shown, the distance D from the narrow section 443 to the fourth opening 442 gradually increases from the center to the edge of the evaporation section; the gradient of each increase is between 1 and 2 mm. This design allows the gas flow velocity of the spray head to gradually decrease from the center to the edge, ultimately achieving fine control of the airflow distribution within the reaction chamber. This not only improves the utilization rate of the reaction gas but also makes it easier for the airflow to diffuse evenly onto the substrate surface, which is beneficial to the uniformity and consistency of the flow field on the substrate epitaxial growth surface, thereby improving the thickness and doping uniformity of the epitaxially grown thin film material. Secondly, as... Figure 6 As shown, the distance D2 from the narrow section 443 to the fourth opening 442 gradually decreases from the center to the edge of the evaporation section. This design allows the gas flow velocity of the spray head to gradually increase from the center to the edge; thirdly, as Figure 7 As shown, the distance D3 from the narrow section 443 to the fourth opening 442 is set in the form of "peak and trough". When it is in the "trough", the distance is between 2 and 4 mm, and when it is in the "peak", the distance is between 7 and 9 mm.

[0072] refer to Figures 1-4 In this embodiment, multiple air inlets 13 are evenly distributed in an array on the condenser section 10, and multiple support columns 43 are evenly distributed in an array on the evaporator section 40. The arrays of condenser microchannels 14 are arranged in parallel at intervals. Each array of condenser microchannels 14 includes several spaced-apart condenser microchannels 141, with a spacing of 3-5 mm between adjacent condenser microchannels 141. Further, the side of the condenser microchannel 141 away from the condenser suction core 20 is a first groove 1411, with a rectangular cross-sectional shape. The side of the condenser microchannel 141 closer to the condenser suction core 20 is a second groove 1412 connected to the first groove 1411, with a rectangular cross-sectional shape. The spray nozzle is shaped like an arc, rectangle, or dovetail. Specifically, the width of the first groove 1411 is C (C is between 1 and 2 mm), the diameter of the second groove 1412 is Φ (Φ is between 2 and 4 mm), and the distance from the top of the first groove 1411 to the center of the second groove 1412 is E (E is between 3 and 6 mm). This design effectively increases the effective heat exchange area of ​​the condensing microchannel 141, and thus effectively increases the effective heat exchange area of ​​the condensing microchannel 14. In practical applications, the inlet and outlet of the condensing microchannel 14 are connected to an external drive pump to form a forced convection circuit for the condensate. The condensate flows into the microchannel from the inlet, and after sufficient heat exchange, it flows out from the outlet, thereby achieving uniform and efficient heat dissipation of the spray head body.

[0073] refer to Figure 1 and Figure 2In this embodiment, both the evaporation wick 30 and the condensation wick 20 are porous structures formed by powder sintering. The thickness of both the evaporation wick and the condensation wick is 0.5–2.5 mm, and the porosity is 30%–60%. Furthermore, the powder is a high-temperature resistant metal powder with a particle size of 25–200 μm. Preferably, the high-temperature resistant metal powder is stainless steel. The evaporation wick and the condensation wick are sintered at high temperature, and metallurgical bonding is achieved between the powder particles and between the powder particles and the inner wall of the metal plate, forming a wick structure with a large number of microscale pores.

[0074] In this embodiment, the heat exchange medium is one of deionized water, ethanol, or liquid alkali metal. Preferably, the heat exchange medium is liquid alkali metal. When the epitaxial process temperature reaches 1800°C, the temperature of the heat radiated from the reaction chamber to the nozzle can reach about 1000°C. At this time, because the boiling point of deionized water or ethanol is low, the heat exchange medium loses its cooling effect. Liquid alkali metal has a relatively high phase change temperature. For example, liquid potassium can be used in the temperature range of 400°C to 1100°C, liquid sodium can be used in the temperature range of 500°C to 1200°C, and liquid lithium can be used in the temperature range of 1000°C to 1500°C. Different heat exchange media can be selected according to different operating temperature ranges. At the same time, during use, attention should also be paid to the compatibility of liquid alkali metal with metal plate materials. Stainless steel, nickel-based alloys, tantalum-based alloys, tungsten or molybdenum and their alloys all meet the requirements.

[0075] Next, join Figures 8-11 The present application also provides a method for manufacturing a spray head with phase change heat dissipation, which specifically includes an evaporation section manufacturing stage, a condensation section manufacturing stage, a cleaning and drying stage, a liquid absorption core preparation stage, and an assembly and installation stage.

[0076] Evaporation section manufacturing stage: Provide a first metal plate, form several support columns on the first metal plate based on milling process, form spray holes on the support columns based on drilling process, and reserve a vacuum injection pipe on the side of the evaporation section;

[0077] Specifically, the first metal plate is a first circular metal plate, and the material of the first metal plate is a high melting point metal material, such as stainless steel, tungsten-molybdenum alloy, etc. Spray holes are formed by milling, forming tapered hole cutter, electrical discharge drilling or wire cutting, etc. Specifically, the diameter of the spray hole near the first opening is larger than the diameter of the narrow part, and / or, the diameter of the spray hole near the second opening is larger than the diameter of the narrow part.

[0078] A smooth surface is formed on the gas outlet surface of the evaporation section based on the electrolytic polishing process;

[0079] Condensation section manufacturing stage: A second metal plate is provided, and embedded microchannels are formed on the second metal plate using wire cutting technology. Several air inlet holes are formed on the second metal plate using milling technology.

[0080] Specifically, the second metal plate is a second circular metal plate; the material of the second metal plate is a high melting point metal material, such as stainless steel, tungsten-molybdenum alloy, etc. A guide hole with a diameter of 3mm is made on the circumference of the second metal plate by a deep hole drilling machine or an electrical discharge machining (EDM) machine; then a condensation microchannel is processed by wire EDM; and then an air inlet is formed by milling, forming tapered hole cutter, EDM or wire EDM, etc. The diameter of the first opening of the air inlet is larger than the diameter of the second opening.

[0081] Cleaning and drying stage: The evaporation section and the condensation section are cleaned using ultrasonic cleaning technology, and then the cleaned evaporation section and the condensation section are dried.

[0082] Specifically, the evaporator and condenser are first placed in a diluted alkaline cleaning agent and ultrasonically cleaned for 3-12 minutes, then placed in an acidic cleaning agent and ultrasonically cleaned for 3-12 minutes to remove stains and rust from the metal plate surface. The remaining cleaning agent on the metal plate surface is then rinsed with deionized water, and finally placed in a drying oven to dry, resulting in a clean and dry evaporator and condenser.

[0083] Liquid suction core preparation stage: Based on the high temperature sintering process, an evaporation liquid suction core is formed on one side end face of the support column in the cleaned evaporation section, and a condensation liquid suction core is formed on one side end face of the cleaned condensation section based on the high temperature sintering process.

[0084] Specifically, the high-temperature sintering process includes the mold preparation stage, the filling stage, the sintering stage, and the demolding stage.

[0085] Mold preparation stage: making a first mold adapted to the evaporation section and making a second mold adapted to the condensation section;

[0086] Specifically, in this embodiment, both the first mold and the second mold are preferably high-purity graphite molds.

[0087] refer to Figures 9-10 Filling stage: Assemble and stack the first mold and the evaporation section to form the first cavity. Fill the first cavity with high-temperature resistant metal powder under no pressure. Intermittently vibrate the first mold during the filling process until the first cavity is filled with high-temperature resistant metal powder.

[0088] The second mold and the condenser are assembled and stacked to form the second cavity; under no pressure, high-temperature resistant metal powder is filled into the second cavity, and the second mold is intermittently vibrated during the filling process until the second cavity is filled with high-temperature resistant metal powder.

[0089] Furthermore, in order to reduce demolding resistance, a layer of release agent can be coated on the inner surface of the first mold and the second mold.

[0090] Sintering stage: The first mold filled with high-temperature resistant metal powder (stainless steel powder) and the evaporation section, and the second mold filled with high-temperature resistant metal powder (stainless steel powder) and the condensation section are placed together in a box-type vacuum atmosphere resistance furnace for high-temperature sintering;

[0091] The specific steps for sintering high-temperature resistant metal powder (stainless steel powder) are as follows:

[0092] First, the box-type vacuum atmosphere resistance furnace is evacuated; then nitrogen or argon is introduced as a protective sintering atmosphere, and the temperature rise program is run, with a maximum sintering temperature of 1100-1300℃ and a temperature curve duration of about 240 minutes; wait for the vacuum sintering furnace to cool to room temperature.

[0093] Demolding stage: After sintering, the first mold and the second mold are removed respectively to obtain the evaporation section with the evaporation liquid absorption core and the condensation section with the condensation liquid absorption core.

[0094] In this embodiment, the evaporation and condensation wicks are subjected to high-temperature solid-state sintering, achieving metallurgical bonding between the powders and between the powders and the inner wall of the metal plate, forming a wick structure with numerous microscale pores (e.g., Figure 11 (as shown);

[0095] Installation and assembly stage: Based on the vacuum diffusion welding process, the side of the evaporator with the evaporation liquid absorption core is connected to the side of the condenser with the condensation liquid absorption core to form a sealed cavity. The cavity is evacuated using a vacuum injection pipe to form a sealed and vacuum cavity. The heat exchange working fluid is injected into the cavity using the vacuum injection pipe. After the injection is completed, the vacuum injection pipe is sealed.

[0096] The above embodiments are only for illustrating the technical concept and features of this application, and are intended to enable those skilled in the art to understand the content of this application and implement it accordingly. They should not be used to limit the scope of protection of this application. All equivalent changes or modifications made in accordance with the spirit and essence of this application should be included within the scope of protection of this application.

Claims

1. A spray head with phase change heat dissipation, characterized in that, include: The condenser section is provided with a plurality of air inlets that penetrate the condenser section axially. The condenser section is embedded with an array of condenser microchannels. The air inlets and the condenser microchannels are staggered. The condenser section is provided with a liquid inlet and a liquid outlet that communicate with the microchannels. An evaporation section is connected to the condensation section to form a sealed and vacuum cavity, which is filled with a heat exchange medium. The evaporation section is provided with a plurality of support columns on one end face near the condensation section. Each support column is provided with a spray hole that communicates with the air inlet. The support column and the air inlet are coaxially arranged. A vacuum injection pipe is provided on the side of the evaporation section. The liquid suction core assembly includes an evaporation liquid suction core and a condensation liquid suction core. The evaporation liquid suction core is attached to the end face of the evaporation section near the condensation section and is attached to the outer peripheral surface of the support column. The condensation liquid suction core is attached to the end face of the condensation section near the evaporation section. Both the condensation liquid suction core and the evaporation liquid suction core are provided with through holes corresponding to the support column and / or the air inlet.

2. A spray head with phase change heat dissipation according to claim 1, characterized in that, The condenser section has a condensation surface near the evaporator section and an air inlet surface opposite to the condensation surface; The air inlet has a first opening on the air inlet surface and a second opening on the condensation surface, wherein the diameter of the first opening is greater than or equal to the diameter of the second opening.

3. A spray head with phase change heat dissipation according to claim 1, characterized in that, The evaporation section has a concave surface near the condensation section and an outlet surface opposite to the concave surface, the outlet surface being a smooth plane; The spray hole has a third opening communicating with the air inlet and a fourth opening located on the air outlet surface. The spray hole has a narrow section inside, and the diameter of the spray hole near the third opening is larger than the diameter of the narrow section, and / or, the diameter of the spray hole near the fourth opening is larger than the diameter of the narrow section.

4. A spray head with phase change heat dissipation according to claim 3, characterized in that, The distance from the narrow section to the fourth opening increases progressively from the center of the evaporation section to the edge; Alternatively, the distance from the narrow section to the fourth opening may decrease progressively from the center of the evaporation section to its edge; Alternatively, the distance from the narrow section to the fourth opening may be set in the form of "peaks and troughs".

5. A spray head with phase change heat dissipation according to claim 1, characterized in that, The plurality of air inlets are evenly distributed in an array on the condenser section, and the plurality of support columns are evenly distributed in an array on the evaporator section; The condensation microchannels in the array are arranged in parallel intervals. Each array of condensation microchannels includes several condensation microchannels arranged at intervals, and the distance between two adjacent condensation microchannels is 3-5 mm.

6. A spray head with phase change heat dissipation according to claim 5, characterized in that, The side of the condensation microchannel away from the condensation suction core is a rectangular groove, while the side of the condensation microchannel closer to the condensation suction core is one of an arc shape, a rectangle, or a dovetail shape.

7. A spray head with phase change heat dissipation according to claim 1, characterized in that, Both the evaporation and condensation liquid absorption cores are porous structures formed by powder sintering, with a thickness of 0.5–2.5 mm and a porosity of 30%–60%. The powder is a high-temperature resistant metal powder with a particle size of 25–200 μm.

8. A spray head with phase change heat dissipation according to claim 1, characterized in that, The heat exchange medium is one of deionized water, ethanol, or liquid alkali metal.

9. A method for manufacturing a spray head with phase change heat dissipation, characterized in that, Includes the following steps: During the evaporation section manufacturing stage, a first metal plate is provided, and several support columns are formed on the first metal plate based on milling technology. Spray holes are formed on the support columns based on drilling technology. During the condenser manufacturing stage, a second metal plate is provided. Embedded microchannels are formed on the second metal plate using wire cutting technology, and several air inlets are formed on the second metal plate using milling technology. In the cleaning and drying stage, the evaporation section and the condensation section are cleaned using an ultrasonic cleaning process, and then the cleaned evaporation section and the condensation section are dried. In the liquid absorption core preparation stage, an evaporation liquid absorption core is formed on one side end face of the support column of the cleaned evaporation section based on a high-temperature sintering process, and a condensation liquid absorption core is formed on one side end face of the cleaned condensation section based on a high-temperature sintering process. During the assembly phase, the end face of the evaporator section with the evaporation liquid absorption core is connected to the end face of the condenser section with the condensation liquid absorption core using the vacuum diffusion welding process to form a sealed cavity. The cavity is then evacuated using a vacuum injection pipe to form a sealed and vacuum cavity. The cavity is then filled with heat exchange medium using the vacuum injection pipe, and the vacuum injection pipe is sealed after filling is completed.

10. A method for manufacturing a spray head with phase change heat dissipation according to claim 9, characterized in that, The high-temperature sintering process includes: Mold preparation stage: fabricating a first graphite mold adapted to the evaporation section and a second mold adapted to the condensation section; Filling stage: Assemble and stack the first mold and the evaporation section to form the first cavity. Fill the first cavity with high-temperature resistant metal powder under no pressure. Intermittently vibrate the first mold during the filling process until the first cavity is filled with high-temperature resistant metal powder. The second mold and the condenser are assembled and stacked to form the second cavity; under no pressure, high-temperature resistant metal powder is filled into the second cavity, and the second mold is intermittently vibrated during the filling process until the second cavity is filled with high-temperature resistant metal powder. Sintering stage: The first mold and evaporation section filled with high-temperature resistant metal powder, and the second mold and condensation section filled with high-temperature resistant metal powder are placed together in a box-type vacuum atmosphere resistance furnace for high-temperature sintering; Demolding stage: After sintering, the first mold and the second mold are removed respectively to obtain an evaporation section with an evaporation liquid absorption core and a condensation section with a condensation liquid absorption core.

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