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By using a pneumatic coaxial positioning mechanism and adjusting the air pressure of a combination of plastic and stainless steel cylinders, the problem of inaccurate positioning of the ceramic bonding tool substrate is solved, and high-precision chamfer grinding of the ceramic bonding tool is achieved.

CN118456185BActive Publication Date: 2026-06-23苏州芯合半导体材料有限公司

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
苏州芯合半导体材料有限公司
Filing Date
2024-06-20
Publication Date
2026-06-23

AI Technical Summary

Technical Problem

The existing ceramic bonding tool external chamfering grinding device has low substrate positioning accuracy, which causes the ceramic substrate and the positioning mechanism to be in a non-coaxial state, affecting the processing accuracy.

Method used

A pneumatic coaxial positioning mechanism is adopted, which injects 0.6Mpa-1Mpa of air pressure into the combination of plastic and stainless steel cylinders to achieve precise displacement adjustment of the adjusting cylinder. Combined with electric push rod and servo motor, it ensures that the ceramic bonding tool substrate and the central axis of the vision inspection mechanism are aligned.

Benefits of technology

It improves the machining accuracy of external chamfer grinding of ceramic bonding tools, enables rapid clamping and displacement adjustment of ceramic substrates, and ensures the coaxiality of the substrate and positioning mechanism during the machining process.

✦ Generated by Eureka AI based on patent content.

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    Figure CN118456185B_ABST
Patent Text Reader

Abstract

The application discloses a ceramic bonding tool outer grinding air pressure type coaxial positioning mechanism, which comprises an outer cylinder, an inner cylinder, an adjusting cylinder, a positioning clamp sleeve, an air pressure type adjusting mechanism, an electric push rod, a first air cylinder, a servo motor and a control module, a base is fixedly installed on the outer wall of the outer cylinder, a ball bearing is fixedly installed on the outer cylinder, the inner cylinder is fixedly installed on the rotating body of the ball bearing, and a first end cover is fixedly arranged at the rear end of the inner cylinder. The air pressure type coaxial positioning mechanism is characterized in that 0.6Mpa-1Mpa resisting air pressure is injected into the inside of a plastic cylinder body and a stainless steel cylinder body combination, the first rubber piston in the plastic cylinder body is not easily pushed to a position by the air pressure, a large amount of air pressure is injected, the first rubber piston in the plastic cylinder body can be made to produce a 1um displacement amount, and therefore the precision of adjusting the axial displacement of the adjusting cylinder is improved.
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Description

Technical Field

[0001] This invention belongs to the field of ceramic bonding tool processing technology, and in particular relates to a pneumatic coaxial positioning mechanism for external grinding of ceramic bonding tools. Background Technology

[0002] Bonding tools, also known as wire bonding tools, are used for bonding gold, silver, and alloy wires in semiconductor packaging. They are consumables in semiconductor packaging and are widely used in bonding circuits for silicon controlled rectifiers, LEDs, diodes, transistors, and IC chips. There are three main materials for bonding tools: tungsten carbide, titanium, and ceramic. Ceramic is an excellent material for making bonding tools. In existing technologies, the substrate positioning mechanism of traditional ceramic bonding tool chamfering and grinding devices has low positioning accuracy. This is because, after clamping and fixing the ceramic substrate, the ceramic substrate and the positioning mechanism are not coaxial. When the ceramic substrate rotates with the clamp of the positioning mechanism, there is a micrometer-level runout. Even using electric push rods or telescopic cylinders, it is impossible to achieve a 1µm displacement adjustment of the ceramic substrate, thus affecting the processing accuracy of the ceramic bonding tool's chamfering and grinding. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide a pneumatic coaxial positioning mechanism that can adjust the displacement of ceramic bonding tool substrate by 1µm after it is clamped and fixed on the positioning mechanism fixture.

[0004] To solve the above-mentioned technical problems, the present invention is achieved through the following technical solution: a pneumatic coaxial positioning mechanism for external grinding of ceramic bonding tools, comprising an outer cylinder, an inner cylinder, an adjusting cylinder, a positioning fixture sleeve, a pneumatic adjusting mechanism, an electric push rod, a first cylinder, a servo motor, and a control module. A base is fixedly installed on the outer wall of the outer cylinder, and a ball bearing is fixedly installed on the outer cylinder. The inner cylinder is fixedly installed on the rotating body of the ball bearing. A first end cap is fixedly provided at the rear end of the inner cylinder, and a transmission sleeve coaxially arranged with the inner cylinder is fixedly installed on the first end cap. The output shaft of the servo motor is connected to the transmission sleeve. The pneumatic adjusting mechanism... Four electric push rods are arranged in a circular array on the inner cylinder, and four electric push rods are arranged in a circular array on the outer cylinder. The actuator of the electric push rod is equipped with a first air source quick connector and a second air source quick connector. The first air source quick connector and the second air source quick connector are connected to a first air pressure station and a second air pressure station respectively through pipelines. The adjusting cylinder is placed inside the inner cylinder, and the positioning clamp sleeve is slidably installed inside the adjusting cylinder. The adjusting cylinder is screwed with a limit bolt for pressing and fixing the positioning clamp sleeve. The cylinder body of the first cylinder is fixedly installed on the adjusting cylinder, and a pressure block is fixedly installed on the piston rod of the first cylinder. The pressure block is slidably placed inside the positioning clamp sleeve.

[0005] The pneumatic regulating mechanism comprises a plastic cylinder, a protective cover, a second end cap, a first rubber piston, a plastic push rod, a connecting block, a third end cap, a valve seat, a guide sleeve, a stainless steel cylinder, and a stainless steel piston. The protective cover is fixedly mounted on the inner cylinder. The third end cap is sealed and fixedly mounted on the right end of the protective cover. The right end of the plastic cylinder is sealed and fixedly mounted on the protective cover. The second end cap is sealed and fixedly mounted on the left end of the plastic cylinder. The first rubber piston is slidably and sealedly mounted inside the plastic cylinder. The plastic push rod is fixedly mounted on the first rubber piston, and its left end slidably and sealedly passes through the second end cap. The connecting block is fixedly mounted on the regulating cylinder, and the left end of the plastic push rod is fixedly connected to the connecting block. The guide sleeve is fixedly mounted on the left end face of the third end cap, and the right end of the plastic push rod is slidably mounted inside the guide sleeve. Two stainless steel cylinders are symmetrically and fixedly mounted in the upper and lower parts of the protective cover. The stainless steel piston is slidably and sealedly mounted... Inside the stainless steel cylinder, the valve seat is fixedly installed on the right end face of the third end cover. The valve seat is equipped with a first solenoid valve and a second solenoid valve. The first and second solenoid valves are equipped with a third and a fourth quick-connect air supply connector that cooperate with the first and second quick-connect air supply connectors. The first and second quick-connect air supply connectors can be sealed and plugged into the third and fourth quick-connect air supply connectors, respectively. The first solenoid valve is connected to the air supply interfaces at the left and right ends of the plastic cylinder body through two pipes. The first solenoid valve is also connected to the air supply interfaces at both ends of the first cylinder through two pipes. The second solenoid valve is connected to an air supply interface on the stainless steel cylinder body through one pipe. The electric push rod, servo motor, first solenoid valve, and second solenoid valve are respectively connected to the control module through circuits. The actuator of the electric push rod is also equipped with a quick-connect power supply plug that cooperates with the first and second solenoid valves.

[0006] Preferably, the plastic push rod is configured as a cylindrical structure, and the clamping surface of the stainless steel piston is configured as an arc-shaped concave structure that cooperates with the plastic push rod.

[0007] Preferably, an anti-slip rubber pad is fixedly provided on the clamping surface of the stainless steel piston, and a mesh anti-slip pattern is provided on the outer surface of the anti-slip rubber pad.

[0008] Preferably, a square marking pad and a circular marking point are symmetrically arranged on both sides of the front end face of the inner cylinder.

[0009] Preferably, a counterweight corresponding to the first cylinder is fixedly installed on the adjusting cylinder.

[0010] Preferably, the first end cap is welded and fixedly installed to the rear end of the inner cylinder, and the first end cap and the inner cylinder are provided with pre-positioning bolt holes.

[0011] Preferably, the stainless steel cylinder body is provided with a guide shaft, a limit stop sleeve is fixedly sleeved on the guide shaft, the stainless steel piston is provided with a guide blind hole, and the lower end of the guide shaft is slidably installed in the guide blind hole inside the stainless steel piston.

[0012] Compared with the prior art, the advantages of this invention are as follows: This pneumatic coaxial positioning mechanism injects a resistance air pressure of 0.6Mpa-1Mpa into the plastic cylinder and stainless steel cylinder assembly, making it difficult for the first rubber piston in the plastic cylinder to be easily pushed to its position by air pressure. Only after injecting a large amount of air pressure can the first rubber piston in the plastic cylinder produce a displacement of 1µm, thereby improving the accuracy of adjusting the displacement of the adjusting cylinder axis. After adjustment, the air pressure inside the four plastic cylinders and stainless steel cylinder assemblies is kept consistent. Furthermore, the stainless steel cylinder in the pressure-holding state pushes the stainless steel piston to press and fix the plastic push rod fixedly connected to the first rubber piston, thereby fixing and limiting the first rubber piston and preventing it from displacing. When the first rubber piston is not moving, the displacement of the adjusting cylinder axis will not occur, thus ensuring that the ceramic bonding tool profile inside the positioning fixture sleeve and the reference center axis of the vision inspection mechanism are in a coincident state, ensuring the machining accuracy of the outer chamfer grinding of the ceramic bonding tool. The ceramic bonding tool profile is slidably inserted and installed in the positioning fixture sleeve, and then pressed and limited by the pressure block at the front end of the piston rod of the first cylinder, which has the advantage of fast clamping speed of ceramic bonding tool profile. Attached Figure Description

[0013] The invention will be further described below with reference to the accompanying drawings.

[0014] Figure 1 This is a schematic diagram of the internal structure of the main view of the present invention.

[0015] Figure 2 This is the left view of the present invention.

[0016] Figure 3 yes Figure 1 A magnified structural diagram at point M. Detailed Implementation

[0017] The present invention will now be described in detail with reference to specific embodiments:

[0018] like Figures 1 to 3The diagram illustrates a pneumatic coaxial positioning mechanism for external grinding of ceramic bonding tools. It includes an outer cylinder 1, an inner cylinder 2, an adjusting cylinder 3, a positioning fixture sleeve 4, a pneumatic adjusting mechanism 6, an electric push rod 7, a first cylinder 8, a servo motor 10, and a control module. A base 11 is fixedly mounted on the outer wall of the outer cylinder 1, and a ball bearing 12 is fixedly mounted on the outer cylinder 1. The inner cylinder 2 is fixedly mounted on the rotating body of the ball bearing 12. A first end cap 23 is fixedly disposed at the rear end of the inner cylinder 2, and a transmission sleeve 24 coaxially arranged with the inner cylinder 2 is fixedly mounted on the first end cap 23. The output shaft of the servo motor 10 is connected to the transmission sleeve 24. The pneumatic adjusting mechanism 6 is located within the inner cylinder 2. Four electric push rods 7 are arranged in a ring array on the outer cylinder 1. The actuator of the electric push rod 7 is provided with a first air source quick connector and a second air source quick connector. The first air source quick connector and the second air source quick connector are respectively connected to the first air pressure station and the second air pressure station through pipelines. The adjusting cylinder 3 is placed in the inner cylinder 2. The positioning clamp sleeve 4 is slidably installed in the adjusting cylinder 3. The adjusting cylinder 3 is screwed with a limit bolt for pressing and fixing the positioning clamp sleeve 4. The cylinder body of the first cylinder 8 is fixedly installed on the adjusting cylinder 3. A pressure block is fixedly installed on the piston rod of the first cylinder 8. The pressure block is slidably placed in the positioning clamp sleeve 4.

[0019] The pneumatic regulating mechanism 6 consists of a plastic cylinder 60, a protective cover 61, a second end cap 62, a first rubber piston 63, a plastic push rod 64, a connecting block 65, a third end cap 66, a valve seat 67, a guide sleeve 68, a stainless steel cylinder 69, and a stainless steel piston 610. The guide sleeve 68 improves the straightness of the plastic push rod 64 during movement. The protective cover 61 is fixedly installed on the inner cylinder 2. The third end cap 66 is sealed and fixedly installed on the right end of the protective cover 61. The right end of the plastic cylinder 60 is sealed and fixedly connected to the protective cover 61. The second end cap 62 is sealed and fixedly installed on the left end of the plastic cylinder 60. The first rubber piston 63 is slidably and sealedly installed inside the plastic cylinder 60. The plastic push rod 64 is fixedly installed on the first rubber piston 63. The left end of the plastic push rod 64 slidably and sealedly passes through the second end cap 62. The connecting block 65 is fixedly installed on the adjusting cylinder 3. The left end of the plastic push rod 64 is fixedly connected to the connecting block 65. The guide sleeve 68 is fixedly installed on the left end face of the third end cap 66. The right end of the plastic push rod 64 is slidably installed inside the guide sleeve 68. Two stainless steel... The steel cylinder body 69 is symmetrically and fixedly installed in the upper and lower parts of the protective cover 61. The stainless steel piston 610 is slidably and sealedly installed in the stainless steel cylinder body 69. The valve seat 67 is fixedly installed on the right end face of the third end cover 66. The valve seat 67 is provided with a first solenoid valve and a second solenoid valve. The first solenoid valve and the second solenoid valve are provided with a third air source quick connector and a fourth air source quick connector that cooperate with the first air source quick connector and the second air source quick connector, respectively. The first air source quick connector and the second air source quick connector can be sealed and plugged into the third air source quick connector and the fourth air source quick connector, respectively. The first solenoid valve is connected to the air source interface at both ends of the plastic cylinder body 60 through two pipes. The first solenoid valve is also connected to the air source interface at both ends of the first cylinder 8 through two pipes. The second solenoid valve is connected to an air source interface on the stainless steel cylinder body 69 through one pipe. The electric push rod 7, the servo motor 10, the first solenoid valve and the second solenoid valve are respectively connected to the control module through circuits. The actuator of the electric push rod 7 is also provided with a quick-connect power supply plug that cooperates with the first solenoid valve and the second solenoid valve.

[0020] The plastic push rod 64 is configured as a cylindrical structure, and the clamping surface of the stainless steel piston 610 is configured as an arc-shaped concave structure that cooperates with the plastic push rod 64 to increase the contact area between the stainless steel piston 610 and the plastic push rod 64 and improve the limiting friction between them. In order to further increase the limiting friction on the plastic push rod 64, an anti-slip rubber pad is fixedly provided on the clamping surface of the stainless steel piston 610, and a mesh anti-slip texture is provided on the outer surface of the anti-slip rubber pad.

[0021] A square marker pad 21 and a circular marker point 22 are symmetrically arranged on both sides of the front end face of the inner cylinder 2. After the visual positioning system detects that the square marker pad 21 and the circular marker point 22 have moved to the preset position, the visual positioning system sends a signal to the control module, and the servo motor 10 of the control module stops running. The aforementioned preset position is the position where the first, second, third, and fourth air source quick connectors on the electric push rod 7 are sealed and connected, and it is also the position where the quick-connect power supply plug on the electric push rod 7 is connected to the first and second solenoid valves for power supply.

[0022] To prevent the center of gravity of the inner cylinder 2, adjusting cylinder 3, and pneumatic adjustment mechanism 6 assembly from shifting due to the first cylinder 8, a counterweight 9 corresponding to the first cylinder 8 is fixedly installed on the adjusting cylinder 3 to ensure that the inner cylinder 2, adjusting cylinder 3, and pneumatic adjustment mechanism 6 assembly rotate more smoothly under the drive of the servo motor 10.

[0023] The first end cap 23 is welded and fixed to the rear end of the inner cylinder 2. Welding and fixing has the advantages of strong connection and reliable use. The first end cap 23 and the inner cylinder 2 are provided with pre-positioning bolt holes. First, the first end cap 23 and the inner cylinder 2 are connected and pre-positioned using the pre-positioning bolts. Then, the transmission sleeve 24 on the first end cap 23 is rotated and tested to see if it is coaxial with the inner cylinder 2. When the two are coaxial, the first end cap 23 and the rear end of the inner cylinder 2 are welded and fixed. Two dial indicators are fixed on a bearing base, and the rotational runout of the transmission sleeve 24 and the inner cylinder 2 are tested at the same time to determine whether the two are coaxial.

[0024] A guide shaft is provided on the stainless steel cylinder 69, and a limit stop sleeve is fixedly sleeved on the guide shaft. A guide blind hole is provided inside the stainless steel piston 610. The lower end of the guide shaft is slidably installed in the guide blind hole inside the stainless steel piston 610. When the stainless steel piston 610 moves upward, the stainless steel piston 610 is limited after contacting the limit stop sleeve, which can make the stainless steel piston 610 and the stainless steel cylinder 69 have an air intake gap, preventing the stainless steel piston 610 from blocking the air source interface of the stainless steel cylinder 69. The air filling and air extraction pipe structure of the stainless steel cylinder 69 is located at the air intake gap position.

[0025] The pressure-holding area 611 of the plastic cylinder 60 on the right side (outer side) of the first rubber piston 63 and the protective cover 61 are always maintained at a pressure of 0.6 MPa-1 MPa. The pressure-holding area of ​​the plastic cylinder 60 on the left side (inner side) of the first rubber piston 63 is 0.1 MPa. After replacing the positioning clamp sleeve 4 inside the adjusting cylinder 3, the positioning clamp sleeve 4 is pressed and positioned on the adjusting cylinder 3 by the limit bolt. At the same time, the pressure block on the piston rod of the first cylinder 8 is slid into the positioning clamp sleeve 4. The servo motor 10 drives the adjusting cylinder 3 to rotate to Figure 1In the current position, the electric push rod 7 is activated, causing its actuator rod to extend. The first and second quick-connect air supply connectors on the actuator rod of the electric push rod 7 can be sealed and connected to the third and fourth quick-connect air supply connectors, respectively. The quick-connect power supply plug on the actuator rod of the electric push rod 7 is connected to the first and second solenoid valves for power supply. The ceramic bonding tool profile 5 is slidably installed in the positioning fixture sleeve 4. The first air pressure station and the first solenoid valve are activated to inject air pressure into the first cylinder 8, causing its piston rod to push the pressure block outward. The pressure block presses and fixes the ceramic bonding tool profile 5 in the positioning fixture sleeve 4, and 0. The pressure is maintained at 6 MPa-1 MPa. The second pressure station and the second solenoid valve are activated. The second pressure station draws the air pressure in the stainless steel cylinder 69 to a negative pressure state, causing the stainless steel piston 610 to retract into the stainless steel cylinder 69. This releases the clamping and limiting effect of the stainless steel piston 610 on the plastic push rod 64. The vision inspection mechanism sends the position offset detection data of the ceramic bonding tool profile 5 to the control module. Taking the case where the central axis of the ceramic bonding tool profile 5 is offset to the lower left of the reference central axis as an example, the first pressure station and the first solenoid valve are activated to pressurize the left and lower plastic cylinder 60's pressure-holding area 611. As the air pressure gradually increases to 1.2 MPa-1.5 MPa, the air pressure in the pressure-holding area 611 of the right and upper plastic cylinder 60 remains at 0.8 MPa. During the gradual increase in air pressure in the pressure-holding area 611 of the left and lower plastic cylinder 60, the ceramic bonding tool profile 5, adjusting cylinder 3, and positioning clamp sleeve 4 assembly is pushed to the upper right. Because the plastic cylinder 60, plastic push rod 64, and first rubber piston 63 are made of plastic or rubber, they have the characteristic of slight deformation. The plastic cylinder 60, plastic push rod 64, and first rubber piston 63 all undergo slight bending deformation until the ceramic... The central axis of the ceramic bonding tool profile 5 coincides with the reference central axis of the vision inspection mechanism. At this time, the second air pressure station and the second solenoid valve are activated to inject 1.6Mpa-2Mpa pressure into the stainless steel cylinder 69, pushing the stainless steel piston 610 to contact the plastic push rod 64 and press it to a fixed position. Since the moving volume of the stainless steel piston 610 is only 0.1% of the internal volume of the plastic cylinder 60 and stainless steel cylinder 69 assembly, the downward movement of the stainless steel piston 610 has a very small impact on the internal air pressure change of the plastic cylinder 60 and stainless steel cylinder 69 assembly, and will not cause the first rubber piston 63 to shift.After the plastic push rod 64 is pressed and fixed by the stainless steel piston 610, the internal air pressure of the plastic cylinder 60 and stainless steel cylinder 69 assembly, as well as the stainless steel cylinder 69 itself, are adjusted to 0.6Mpa-1Mpa for pressure maintenance through the regulation of the first air pressure station, the first solenoid valve, the second air pressure station, and the second solenoid valve to prevent excessive internal pressure and extend service life. The actuator of the electric push rod 7 retracts, and the various joints separate. At this time, the servo motor 10 drives the transmission sleeve 24, the first end cover 23, the inner cylinder 2, the adjusting cylinder 3, the positioning clamp sleeve 4, the pneumatic adjustment mechanism 6, and the ceramic bonding tool profile 5 to rotate coaxially and synchronously. The displacement of the first rubber piston 63 is affected by different inflation pressures, which allows it to move slightly up and down and left and right within the plastic cylinder 60. Since the left end of the plastic push rod 64 is fixedly connected to the adjusting cylinder 3 via the connecting block 65, when the first rubber piston 63 moves slightly up and down and left and right relative to the fixed structure of the plastic cylinder 60, it can drive the fixed assembly of the connecting block 65, the adjusting cylinder 3, the positioning clamp sleeve 4, and the ceramic bonding tool profile 5 to achieve slight adjustment up and down and left and right. The plastic push rod 64 and the plastic cylinder 60 are made of plastic and have the characteristic of being able to bend and deform under force, thus enabling the ceramic bonding tool profile 5 and the assembly of the adjusting cylinder 3 and the positioning clamp sleeve 4 to be slightly offset to the upper right.

Claims

1. A ceramic bonding tool outer-machining air pressure type coaxial positioning mechanism, characterized by: Including outer tube (1), inner tube (2), adjusting cylinder (3), positioning fixture cover (4), pneumatic adjusting mechanism (6), electric push rod (7), first air cylinder (8), servo motor (10) and control module, the base (11) is fixedly installed on the outer wall of the outer tube (1), the ball bearing (12) is fixedly installed on the outer tube (1), the inner tube (2) is fixedly installed on the rotating body of ball bearing (12), the first end cover (23) is fixedly arranged on the rear end of the inner tube (2), the transmission cover (24) is fixedly installed on the first end cover (23) and is coaxially arranged with the inner tube (2), the output shaft of the servo motor (10) is in transmission connection with the transmission cover (24), the pneumatic adjusting mechanism (6) is arranged in annular array four on the inner tube (2), the electric push rod (7) is arranged in annular array four on the outer tube (1), the first air source quick connector and the second air source quick connector are arranged on the execution rod of the electric push rod (7), the first air source quick connector and the second air source quick connector are connected to the first pneumatic station and the second pneumatic station respectively through pipeline, the adjusting cylinder (3) is placed in the inner tube (2), the positioning fixture cover (4) is slidingly installed in the adjusting cylinder (3), the limiting bolt for pressing and fixing the positioning fixture cover (4) is screw-connected and installed on the adjusting cylinder (3), the cylinder body of the first air cylinder (8) is fixedly installed on the adjusting cylinder (3), the piston rod of the first air cylinder (8) is fixedly installed with the pressing block, and the pressing block is slidingly placed in the positioning fixture cover (4); The air pressure adjusting mechanism (6) is composed of a plastic cylinder (60), a protective cover (61), a second end cover (62), a first rubber piston (63), a plastic push rod (64), a connecting block (65), a third end cover (66), a valve seat (67), a guide sleeve (68), a stainless steel cylinder (69) and a stainless steel piston (610), the protective cover (61) is fixedly installed on the inner cylinder (2), the third end cover (66) is sealingly and fixedly installed on the right end of the protective cover (61), the plastic cylinder (60) is sealingly and fixedly installed on the protective cover (61) in communication, the second end cover (62) is sealingly and fixedly installed on the left end of the plastic cylinder (60), the first rubber piston (63) is slidingly and sealingly installed in the plastic cylinder (60), the plastic push rod (64) is fixedly installed on the first rubber piston (63), the left end of the plastic push rod (64) slidingly penetrates the second end cover (62), the connecting block (65) is fixedly arranged on the adjusting cylinder (3), the left end of the plastic push rod (64) is fixedly connected with the connecting block (65), the guide sleeve (68) is fixedly installed on the left end face of the third end cover (66), the right end of the plastic push rod (64) is slidingly installed in the guide sleeve (68), the two stainless steel cylinders (69) are symmetrically and fixedly arranged in the upper and lower parts of the protective cover (61), the stainless steel piston (610) is slidingly and sealingly installed in the stainless steel cylinder (69), the valve seat (67) is fixedly installed on the right end face of the third end cover (66), the valve seat (67) is provided with a first electromagnetic valve and a second electromagnetic valve, the first electromagnetic valve and the second electromagnetic valve are provided with a third gas source quick connector and a fourth gas source quick connector matched with a first gas source quick connector and a second gas source quick connector, the first gas source quick connector and the second gas source quick connector can be sealingly and insertedly connected with the third gas source quick connector and the fourth gas source quick connector in communication, the first electromagnetic valve is connected to the gas source interfaces at the left and right ends of the plastic cylinder (60) through two pipelines, the first electromagnetic valve is also connected to the gas source interfaces at the two ends of the first air cylinder (8) through two pipelines, the second electromagnetic valve is connected to a gas source interface on the stainless steel cylinder (69) through a pipeline, the electric push rod (7), the servo motor (10), the first electromagnetic valve and the second electromagnetic valve are connected to the control module through circuits respectively, and the actuator of the electric push rod (7) is also provided with a quick power supply plug matched with the first electromagnetic valve and the second electromagnetic valve.

2. The ceramic bonding tool outer-machining air-pressure type coaxial positioning mechanism according to claim 1, characterized by: The plastic push rod (64) is provided in a cylindrical structure, and the clamping surface of the stainless steel piston (610) is provided in a circular arc concave structure matched with the plastic push rod (64).

3. The ceramic bonding tool outer-machining air-pressure type coaxial positioning mechanism according to claim 2, characterized by: A non-slip rubber pad is fixedly arranged on the clamping surface of the stainless steel piston (610), and a meshed non-slip pattern is arranged on the outer surface of the non-slip rubber pad.

4. The ceramic bonding tool outer-machining air-pressure type coaxial positioning mechanism according to claim 1, characterized by: A square identification pad (21) and a circular identification point (22) are symmetrically arranged on the front end face of the inner cylinder (2).

5. The ceramic bonding tool outer-machining air-pressure type coaxial positioning mechanism according to claim 1, characterized by: A counterweight (9) corresponding to the first air cylinder (8) is fixedly arranged on the adjusting cylinder (3).

6. The ceramic bonding tool outer-machining air-pressure type coaxial positioning mechanism according to claim 1, characterized by: The first end cover (23) is welded and fixedly installed at the rear end of the inner cylinder (2), and the first end cover (23) and the inner cylinder (2) are provided with predetermined positioning bolt holes in cooperation.

7. The ceramic bonding tool outer-machining air-pressure type coaxial positioning mechanism according to claim 1, characterized by: The stainless steel cylinder (69) is provided with a guide shaft, the guide shaft is fixedly sleeved with a limiting stop sleeve, the stainless steel piston (610) is internally provided with a guide blind hole, and the lower end of the guide shaft is slidably installed in the guide blind hole in the stainless steel piston (610).