A polishing drain system and a polishing drain method

Abstract

The application provides a kind of grinding drainage system and grinding drainage method, system includes: liquid inlet pipeline, liquid outlet pipeline, sedimentation filter tank and movable basket, the liquid inlet of sedimentation filter tank and liquid inlet pipeline are connected, the liquid outlet of sedimentation filter tank and liquid outlet pipeline are connected, that is, in the drainage pipeline, setting sedimentation filter tank, movable basket is set in the inside of sedimentation filter tank, movable basket includes filter screen structure, filter screen structure is at least set in the liquid outlet of sedimentation filter tank, so that filter screen structure can filter the particulate impurities in grinding waste liquid, avoid the particulate impurities in grinding waste liquid flow into liquid outlet pipeline, reduce the probability of drainage pipeline blockage, improve drainage efficiency.

Description

Technical Field

[0001] This invention relates to the field of semiconductors, and in particular to a grinding and draining system and a grinding and draining method. Background Technology

[0002] With the technological advancements in semiconductor-related fields, the manufacturing processes for semiconductor devices are constantly improving. Grinding processes are frequently used in the manufacture of semiconductor devices; this involves using grinding equipment to grind semiconductor materials to achieve surface planarization.

[0003] During the grinding process, grinding waste liquid and grinding by-products are generated. In the existing grinding drainage system, the drainage pipeline is usually a single pipeline. Grinding waste liquid and grinding by-products can easily cause blockage in the drainage pipeline, and technicians cannot detect the blockage in time, which affects the normal operation of subsequent production.

[0004] Therefore, there is an urgent need for a grinding and drainage system and a grinding and drainage method. Summary of the Invention

[0005] In view of this, the purpose of this application is to provide a grinding and drainage system and a grinding and drainage method that can reduce the probability of blockage in the drainage pipeline and improve the drainage efficiency.

[0006] This application provides a grinding and drainage system, which includes: an inlet pipe, an outlet pipe, a sedimentation and filtration tank, and a movable basket. The inlet of the sedimentation and filtration tank is connected to the inlet pipe, and the outlet of the sedimentation and filtration tank is connected to the outlet pipe.

[0007] The movable basket is located inside the sedimentation filtration tank, and the movable basket includes a filter screen structure, which is at least disposed on the liquid outlet side of the sedimentation filtration tank.

[0008] Optionally, the filter structure includes a plurality of sub-filter structures along the direction from the liquid inlet to the liquid outlet, the sub-filter structures being disposed inside the movable basket.

[0009] Optionally, the pore size of the plurality of sub-filter structures gradually decreases along the direction from the inlet to the outlet.

[0010] Optionally, a liquid level sensor is provided inside the movable basket, and the liquid level sensor is located on the upper part of the side wall of the movable basket near the liquid outlet.

[0011] Optionally, multiple sidewalls of the movable basket are configured as filter screens. Optionally, a closed chamber is provided on the sidewall of the movable basket near the liquid outlet, and a normally closed valve is provided on one side of the closed chamber, the normally closed valve opening towards the interior of the closed chamber, and a liquid level sensor is provided inside the closed chamber. Optionally, the liquid level sensor is located at a target position on the sidewall of the movable basket, and the height of the target position is at least greater than the height of the sidewall at 1 / 2 of its length.

[0012] Optionally, the inlet of the sedimentation filter tank is located above the sedimentation filter tank, the inlet pipe extends into the interior of the movable basket, and the outlet of the sedimentation filter tank is located at the bottom of the side wall of the sedimentation filter tank.

[0013] This application provides a grinding and drainage method, which utilizes the grinding and drainage system described in the above embodiments. The method includes:

[0014] The liquid level sensor monitors in real time whether the liquid level of the grinding waste liquid in the sedimentation and filtration tank exceeds a predetermined threshold. If it exceeds the predetermined threshold, an alarm signal is issued so that the movable basket can be removed from the sedimentation and filtration tank to remove particulate impurities.

[0015] Optionally, the predetermined threshold is a liquid level height that is at least greater than the height at the halfway point of the movable basket sidewall.

[0016] This application provides a grinding waste liquid drainage system, which includes: an inlet pipe, an outlet pipe, a sedimentation filter tank, and a movable basket. The inlet of the sedimentation filter tank is connected to the inlet pipe, and the outlet of the sedimentation filter tank is connected to the outlet pipe. That is, the sedimentation filter tank is set in the drainage pipeline. The movable basket is set inside the sedimentation filter tank and includes a filter screen structure. The filter screen structure is at least set at the outlet of the sedimentation filter tank so that the filter screen structure can filter particulate impurities in the grinding waste liquid, prevent particulate impurities in the grinding waste liquid from flowing into the outlet pipe, reduce the probability of blockage in the drainage pipeline, and improve drainage efficiency. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A schematic diagram of a grinding drainage pipeline is shown;

[0019] Figure 2A schematic diagram of a grinding and drainage system provided in an embodiment of this application is shown;

[0020] Figure 3 A schematic diagram of another grinding and drainage system provided in an embodiment of this application is shown;

[0021] Figure 4 This invention provides a schematic diagram of the structure of another grinding and drainage system according to an embodiment of the present application.

[0022] Figure 5 This invention provides a schematic diagram of the structure of another grinding and drainage system according to an embodiment of the present application.

[0023] Figure 6 This invention provides a schematic diagram of the structure of another grinding and drainage system according to an embodiment of the present application.

[0024] Figure 7 This invention provides a schematic diagram of the structure of another grinding and drainage system according to an embodiment of the present application.

[0025] Figure 8 This invention provides a schematic diagram of the structure of another grinding and drainage system according to an embodiment of the present application.

[0026] Figure 9 A schematic flowchart of a grinding and drainage method provided in an embodiment of this application is shown. Detailed Implementation

[0027] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present application.

[0028] Many specific details are set forth in the following description in order to provide a full understanding of this application. However, this application may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0029] This application is described in detail with reference to the schematic diagrams. When detailing the embodiments of this application, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this application. In actual fabrication, the three-dimensional spatial dimensions of length, width, and depth should be included.

[0030] With the technological advancements in semiconductor-related fields, the manufacturing processes for semiconductor devices are constantly improving. Grinding processes are frequently used in the manufacture of semiconductor devices; this involves using grinding equipment to grind semiconductor materials to achieve surface planarization.

[0031] During the grinding process, grinding fluid is used to grind semiconductor materials, which will generate grinding waste fluid and grinding by-products. Since the grinding fluid is a high-purity, low-metal-ion product, it is easy to form an ionic network structure in an aqueous environment. Once it is removed from the water, its surface will quickly condense and easily form crystal blocks.

[0032] In existing grinding drainage systems, the drainage pipeline is usually a single pipeline, as shown in the reference. Figure 1 As shown, the crystallized lumps and grinding byproducts in the grinding waste liquid are directly discharged through this single pipeline. These lumps and byproducts easily accumulate at the bends in the drainage pipeline. Because of this easy accumulation, these lumps and byproducts can easily cause blockages at the bends of the drainage pipeline over time, preventing the timely discharge of grinding waste liquid. Furthermore, technicians cannot ascertain the current blockage status, making it impossible to predict when the grinding waste liquid will backflow into the grinding equipment. Accumulation to a certain extent will cause the grinding waste liquid to overflow from the grinding equipment, triggering a safety incident and causing the grinding equipment to shut down and alarm. Prolonged downtime also reduces the effective utilization time of the grinding equipment. In addition, when the drainage pipeline becomes blocked, the process for technicians to clear the blockage is cumbersome and inefficient.

[0033] In other words, in existing grinding drainage systems, the drainage pipeline is usually a single pipeline. Crystallized blocks and grinding by-products in the grinding waste liquid can easily cause blockages at the bends of the drainage pipeline, and technicians cannot detect the blockages in time, which affects the normal operation of subsequent production.

[0034] Therefore, there is an urgent need for a grinding and drainage system and a grinding and drainage method.

[0035] Based on this, this application provides a grinding waste liquid drainage system, which includes: an inlet pipe, an outlet pipe, a sedimentation filter tank, and a movable basket. The inlet of the sedimentation filter tank is connected to the inlet pipe, and the outlet of the sedimentation filter tank is connected to the outlet pipe. That is, a sedimentation filter tank is set in the drainage pipeline. The movable basket is set inside the sedimentation filter tank and includes a filter screen structure. The filter screen structure is at least set at the outlet of the sedimentation filter tank so that the filter screen structure can filter particulate impurities in the grinding waste liquid, prevent particulate impurities in the grinding waste liquid from flowing into the outlet pipe, reduce the probability of blockage in the drainage pipeline, and improve drainage efficiency.

[0036] To better understand the technical solution and effects of this application, the specific embodiments will be described in detail below with reference to the accompanying drawings.

[0037] See Figure 2 The figure is a schematic diagram of a grinding and drainage system provided in an embodiment of this application.

[0038] The polishing fluid drainage system provided in this application embodiment can be applied to the chemical mechanical polishing (CMP) process. Chemical mechanical polishing is an important step in integrated circuit manufacturing to achieve surface planarization of semiconductor materials. Its principle is that under certain pressure and polishing fluid, the semiconductor material and polishing pad move relative to each other, and the surface of the semiconductor material is highly planarized by means of mechanical force and chemical reaction.

[0039] The grinding and drainage system 100 provided in this embodiment includes: a sedimentation and filtration tank 110, an inlet pipe 120, and an outlet pipe 130.

[0040] In the embodiments of this application, the inlet 111 of the sedimentation filter tank 110 can be connected to the inlet pipe 120, and the outlet 112 of the sedimentation filter tank 110 can be connected to the outlet pipe 130. That is, the sedimentation filter tank 110 is provided between the inlet pipe 120 and the outlet pipe 130 for sedimentation and filtration of particulate impurities in the grinding waste liquid.

[0041] Specifically, particulate impurities can be crystalline blocks or grinding byproducts in the grinding waste liquid.

[0042] In the embodiments of this application, the sedimentation filter tank 110 includes a movable basket 140, which is disposed in the sedimentation filter tank 110. (Refer to...) Figure 2 As shown, the movable basket 140 includes a filter structure 141, which is at least located on one side of the outlet 112 of the sedimentation filter tank 110. This allows the filter structure 141 to filter particulate impurities in the grinding waste liquid, preventing them from flowing into the outlet pipe 130, reducing the probability of blockage in the discharge pipe of the grinding waste liquid system, and improving the discharge efficiency.

[0043] In the embodiments of this application, the filter structure 141 of the movable basket 140 can prevent particulate impurities from flowing into the liquid outlet pipe 130, thereby achieving the purpose of blocking particulate impurities inside the movable basket 140. When there are too many particulate impurities inside the movable basket 140, the movable basket 140 can be directly removed from the sedimentation filter tank 110 to remove the particulate impurities therein, thereby achieving efficient removal of particulate impurities and improving the cleaning efficiency of blockages in the drain pipe of the grinding and draining system 100.

[0044] In practical applications, the sedimentation filter tank 110 can be placed in a location in the drain pipe that is prone to clogging, such as at a bend in the drain pipe. Figure 2 As shown, the inlet 111 of the sedimentation filter tank 110 is located above the sedimentation filter tank 110, the inlet pipe 120 extends into the interior of the movable basket 140, and the outlet 112 of the sedimentation filter tank 110 is located at the bottom of the side wall of the sedimentation filter tank 110. That is to say, the grinding waste liquid flows into the interior of the movable basket 140 from the inlet 111 at the top of the sedimentation filter tank 110 and flows out from the outlet 112 at the bottom of the side wall of the sedimentation filter tank 110.

[0045] As an example, Figure 2 The grinding waste liquid flows into the movable basket 140 from the upper inlet 111 of the sedimentation and filtration tank 110, and then flows from right to left, and flows out from the bottom outlet 112 of the side wall of the sedimentation and filtration tank 110.

[0046] In the embodiments of this application, the filter structure 141 has a structure including multiple holes, and the pore size of the filter structure 141 can be determined according to the diameter of particulate impurities in the grinding waste liquid.

[0047] In practical applications, the holes of the filter structure 141 can be of various shapes, such as circular or polygonal. If the holes are circular, the hole diameter of the filter structure 141 is the diameter of the hole.

[0048] Specifically, the pore size of the filter structure 141 is smaller than the diameter of the particulate impurities in the grinding waste liquid, so as to achieve the purpose of intercepting particulate impurities using the filter structure 141. The pore size range of the filter structure 141 can be 0.5 mm to 5 mm.

[0049] For example, the pore size of the filter structure 141 can be 1 mm, 1.5 mm or 3 mm.

[0050] In the embodiments of this application, multiple sidewalls of the movable basket 140 can be configured as filter structures 141, which can prevent particulate impurities from flowing out of the movable basket 140 and improve the utilization rate of the movable basket 140. At this time, the liquid inlet pipe 120 can directly extend into the interior of the movable basket 140 so as to input particulate impurities into the movable basket 140 using the liquid inlet pipe 120.

[0051] As an example, multiple sidewalls, top, and bottom of the movable basket 140 can be configured as filter structures 141 to further improve the filtration efficiency of impurity particles in the movable basket 140 and increase the flow rate of grinding waste liquid.

[0052] In the embodiments of this application, in addition to providing a filter structure 141 around the movable basket 140, a filter structure 141 can also be provided inside the movable basket 140 to achieve graded filtration of impurity particles and improve the filtration efficiency of impurity particles.

[0053] Specifically, the filter structure 141 includes multiple sub-filter structures 1411, which are disposed inside the movable basket 140. The multiple sub-filter structures 1411 can be arranged along the direction from the liquid inlet 111 to the liquid outlet 112 so as to achieve graded filtration of impurity particles using the multiple sub-filter structures 1411.

[0054] As one possible implementation, the pore size of the multiple sub-filter structures 141 gradually decreases along the direction from the inlet 111 to the outlet 112, so as to maximize the purpose of using the sub-filter structures 1411 to perform graded filtration of impurity particles.

[0055] In practical applications, the aperture of the sub-filter structure 1411 inside the movable basket 140 can be larger than the aperture of the filter structure 1411 on the side wall of the movable basket 140, so as to prevent impurity particles from flowing out of the movable basket 141.

[0056] One end of the sub-filter structure 1411 inside the movable basket 140 is connected to the bottom of the movable basket 140, and the other end can be connected to the top of the movable basket 140, or it can be not connected to the top of the movable basket 140. The specific setting can be made according to the actual situation.

[0057] The sub-filter structure 1411 inside the movable basket 140 can be disassembled to facilitate the processing of impurity particles and to allow for flexible settings based on the type and diameter of the impurity particles.

[0058] refer to Figure 3 As shown, a sub-filter structure 1411 is provided inside the movable basket 140, which is used to achieve secondary filtration of impurity particles. The pore size of the sub-filter structure 1411 can be in the range of 2.0mm-4.0mm, specifically 2.0mm, 2.5mm, 3.0mm, 3.5mm or 4.0mm.

[0059] In an embodiment of this application, the sedimentation filter tank 110 includes a liquid level sensor 150, which can be disposed on the upper side of the movable basket 140 near the liquid outlet 112, for reference. Figure 4As shown, the liquid level sensor 150 can be used to trigger an alarm when the liquid level of the grinding waste liquid in the sedimentation and filtration tank 110 exceeds a predetermined threshold, so that the movable basket 140 can be removed from the sedimentation and filtration tank 110 to remove particulate impurities. In other words, the liquid level sensor 150 can be used to detect and alarm whether the grinding drainage system 100 is blocked, thereby reducing the probability of safety incidents caused by the overflow of grinding waste liquid from the grinding equipment.

[0060] Specifically, the liquid level sensor 150 can be set at a target position on the side wall of the movable basket 140. The height of the target position is at least greater than the height of the side wall of the movable basket at 1 / 2 position to avoid frequent alarms from the liquid level sensor 150. The predetermined threshold value can be the same as the target position so that an alarm is triggered when the level of the grinding waste liquid exceeds the target position.

[0061] As an example, the height of the target position is the height at 3 / 4 or 4 / 5 of the height of the movable basket sidewall.

[0062] In other words, a liquid level sensor 150 is installed on the side wall of the movable basket 140. When the movable basket 140 becomes blocked, the grinding waste liquid will accumulate in the movable basket 140 until the liquid level sensor 150 is triggered to alarm. Technicians only need to lift the movable basket 140 and clean the impurity particles inside the movable basket 140, thus achieving the purpose of easily cleaning the impurity particles at the bend of the drain pipe.

[0063] In the embodiments of this application, the sub-filter structure 1411 can act as a buffer. When the grinding waste liquid in the inlet pipe 120 flows into the movable basket 140, the sub-filter structure 1411 can mainly confine the grinding waste liquid inside the movable basket 140 to the side near the inlet pipe 120. On the side of the movable basket 140 away from the inlet pipe 120, there will be no significant liquid disturbance, thus preventing false alarms from occurring on the side of the movable basket away from the inlet pipe 120 where the level sensor 150 is located. (Reference) Figure 5 As shown, the grinding waste liquid can be mainly confined to the right side of the movable basket 140, so the liquid level sensor 150 installed on the left side wall of the movable basket 140 will not generate false alarms due to liquid disturbance.

[0064] In the embodiments of this application, when the sidewall of the movable basket 140 is a filter structure 141, the liquid level sensor 150 can be disposed in the closed chamber 160. The closed chamber 160 can be disposed on the sidewall of the movable basket 140 near the liquid outlet 112, for example, it can be disposed on the upper part of the sidewall of the movable basket 140 near the liquid outlet 112. Figure 6 and Figure 7As shown, a normally closed valve 161 is provided on one side of the closed chamber 160, and the normally closed valve 161 can be opened toward the inside of the closed chamber 160.

[0065] Normally closed valve 161 is closed under normal circumstances. (Refer to...) Figure 6 As shown, when the sedimentation filter tank 110 becomes clogged, the level of the grinding waste liquid gradually rises, increasing the liquid pressure. The normally closed valve 161 opens under pressure, allowing the grinding waste liquid to enter the closed chamber 160. (Refer to...) Figure 7 As shown, the liquid level sensor 150 sends an alarm signal.

[0066] In other words, the closed chamber 160 and the normally closed valve 161 can prevent the liquid level sensor 150 from being falsely triggered due to fluctuations in liquid pressure in the drain pipe. For example, if the instantaneous increase in liquid flow in the inlet pipe 120 causes large fluctuations in the grinding waste liquid in the sedimentation filter tank 110, and the liquid level sensor 150 is directly installed in the movable basket 140, the fluctuating grinding waste liquid may come into contact with the liquid level sensor 150, resulting in false triggering.

[0067] Specifically, the normally closed valve 161 can be installed on the side wall of the closed chamber 160 or at the bottom of the closed chamber 160.

[0068] In the embodiments of this application, when one or more sub-filter structures 1411 are provided inside the movable basket 140, a liquid level sensor 150 can be provided on each sub-filter structure 1411 to realize liquid level detection for each filtration in multi-stage filtration.

[0069] When one level sensor 150 alarms, it indicates a possible blockage. When multiple level sensors 150 alarm, it indicates a more serious blockage, requiring timely cleaning of the sedimentation filter tank 110. In other words, by setting a level sensor 150 on each sub-filter structure 1411, it is possible to use the level sensors 150 to perform graded alarms, and subsequent actions can be taken according to the severity of the graded alarms.

[0070] Specifically, the height of the liquid level sensor 150 gradually decreases along the direction from the inlet 111 to the outlet 112. This is because the level of the grinding waste liquid may gradually decrease along the direction from the inlet 111 to the outlet 112. This setting can prevent the liquid level sensor 150 from alarming frequently.

[0071] As one possible implementation, refer to Figure 8As shown, a sub-filter structure 1411 is provided inside the movable basket 140 to achieve secondary filtration of impurity particles. A liquid level sensor 150 is provided on the sub-filter structure 1411 and another liquid level sensor 150 is provided on the side wall of the movable basket 140. Along the direction from the inlet 111 to the outlet 112, the height of the liquid level sensor 150 on the sub-filter structure 1411 is higher than that of the liquid level sensor 150 on the side wall of the movable basket 140. When the liquid level sensor 150 on the sub-filter structure 1411 emits an alarm signal, it indicates that the sedimentation filter tank 110 is blocked. When both liquid level sensors 150 emit alarm signals, it indicates that the blockage is more serious and the movable basket 140 needs to be removed in time to treat the impurity particles. Therefore, this embodiment of the application, by installing a horizontally placed sedimentation filter tank equipped with a liquid level sensor below the drainage pipe of the grinding equipment, utilizes a movable basket within the sedimentation filter tank to precipitate and filter crystallized blocks and grinding byproducts in the grinding waste liquid. Regular maintenance and cleaning are also required. The addition of the sedimentation filter tank significantly reduces the possibility of blockage caused by crystallized blocks and grinding byproducts at bends in the drainage pipe. When there are too many crystallized blocks in the sedimentation filter tank and it is about to become clogged, the liquid level sensor will be triggered, alerting technicians to clean and maintain it promptly, thus preventing safety incidents.

[0072] This application provides a grinding waste liquid drainage system, which includes: an inlet pipe, an outlet pipe, a sedimentation filter tank, and a movable basket. The inlet of the sedimentation filter tank is connected to the inlet pipe, and the outlet of the sedimentation filter tank is connected to the outlet pipe. That is, the sedimentation filter tank is set in the drainage pipeline. The movable basket is set inside the sedimentation filter tank and includes a filter screen structure. The filter screen structure is at least set at the outlet of the sedimentation filter tank so that the filter screen structure can filter particulate impurities in the grinding waste liquid, prevent particulate impurities in the grinding waste liquid from flowing into the outlet pipe, reduce the probability of blockage in the drainage pipeline, and improve drainage efficiency.

[0073] Based on the grinding and drainage system provided in the above embodiments, this application also provides a grinding and drainage method, the working principle of which will be described in detail below with reference to the accompanying drawings.

[0074] See Figure 9 The figure is a schematic flowchart of a grinding and drainage method provided in an embodiment of this application.

[0075] This application provides a grinding and drainage method utilizing the grinding and drainage system described in the above embodiments. The grinding and drainage method provided in this embodiment includes the following steps:

[0076] S101, the liquid level sensor monitors in real time whether the liquid level of the grinding waste liquid in the sedimentation and filtration tank exceeds the predetermined threshold. If it exceeds the predetermined threshold, an alarm signal is issued.

[0077] In the embodiments of this application, a liquid level sensor monitors in real time whether the liquid level of the grinding waste liquid in the sedimentation filter tank exceeds a predetermined threshold. If the predetermined threshold is exceeded, an alarm signal is issued so that the movable basket can be removed from the sedimentation filter tank to remove particulate impurities.

[0078] Optionally, the predetermined threshold is a liquid level height that is at least greater than the height at the halfway point of the movable basket sidewall.

[0079] The various embodiments in this specification are described in a progressive manner. Similar or identical parts between embodiments can be referred to mutually. Each embodiment focuses on its differences from other embodiments. In particular, the method embodiments are basically similar to the system embodiments, so the description is relatively simple; relevant parts can be referred to the descriptions in the system embodiments. The apparatus embodiments described above are merely illustrative. The units and modules described as separate components may or may not be physically separate. Furthermore, some or all of the units and modules can be selected to achieve the purpose of this embodiment according to actual needs. Those skilled in the art can understand and implement this without creative effort.

[0080] The above description is merely a preferred embodiment of this application. Although this application has disclosed preferred embodiments above, it is not intended to limit this application. Any person skilled in the art can make many possible variations and modifications to the technical solutions of this application using the methods and techniques disclosed above, or modify them into equivalent embodiments with equivalent changes, without departing from the scope of the technical solutions of this application. Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of this application without departing from the content of the technical solutions of this application shall still fall within the protection scope of the technical solutions of this application.

Claims

1. A grinding and drainage system, characterized in that, The system includes: an inlet pipe, an outlet pipe, a sedimentation filter tank, and a movable basket. The inlet of the sedimentation filter tank is connected to the inlet pipe, and the outlet of the sedimentation filter tank is connected to the outlet pipe. The sedimentation filter tank is located in the drainage pipeline. The movable basket is located inside the sedimentation filter tank. The movable basket includes a filter screen structure, which is at least disposed on the liquid outlet side of the sedimentation filter tank. The movable basket has multiple side walls configured as filter structures; A closed chamber is provided on the side wall of the movable basket near the liquid outlet. A normally closed valve is provided on one side of the closed chamber, and the normally closed valve opens towards the inside of the closed chamber. A liquid level sensor is provided inside the closed chamber. When the sedimentation filter tank becomes blocked, causing the liquid level of the grinding waste liquid to gradually rise and the liquid pressure of the grinding waste liquid to increase, the normally closed valve is opened under pressure, allowing the grinding waste liquid to enter the closed chamber, and the liquid level sensor will send an alarm signal.

2. The system according to claim 1, characterized in that, The filter structure includes multiple sub-filter structures along the direction from the liquid inlet to the liquid outlet, and the sub-filter structures are disposed inside the movable basket.

3. The system according to claim 2, characterized in that, Along the direction from the inlet to the outlet, the pore size of the plurality of sub-filter structures gradually decreases.

4. The system according to claim 3, characterized in that, The movable basket is equipped with a liquid level sensor, which is located on the upper side wall of the movable basket near the liquid outlet.

5. The system according to claim 1, characterized in that, The liquid level sensor is positioned at a target location on the side wall of the movable basket, and the height of the target location is at least greater than the height of the side wall at 1 / 2 position.

6. The system according to any one of claims 1-5, characterized in that, The inlet of the sedimentation filter tank is located above the sedimentation filter tank, the inlet pipe extends into the interior of the movable basket, and the outlet of the sedimentation filter tank is located at the bottom of the side wall of the sedimentation filter tank.

7. A grinding and drainage method, characterized in that, The grinding and drainage method utilizes the grinding and drainage system according to any one of claims 1, 4-6, and the method includes: The liquid level sensor monitors in real time whether the liquid level of the grinding waste liquid in the sedimentation and filtration tank exceeds a predetermined threshold. If it exceeds the predetermined threshold, an alarm signal is issued so that the movable basket can be removed from the sedimentation and filtration tank to remove particulate impurities.

8. The method according to claim 7, characterized in that, The predetermined threshold is that the liquid level is at least greater than the height at the position of 1 / 2 of the side wall of the movable basket.

Images