Pressure detection device for square root machine, square root machine and square root method

Abstract

The present application relates to the technical field of silicon wafer processing, and particularly discloses a pressure detection device for a squaring machine, the squaring machine and a squaring method, aiming to solve the problem that the silicon rod is prone to edge collapse due to uneven stress on the edge skin during the squaring process. To this end, the pressure detection device for the squaring machine is provided with a contact plate on at least one side in the length direction of the base body, the contact plate being capable of contacting the output ends of the two telescopic assemblies, so as to detect the output pressure of the two telescopic assemblies clamping the same edge skin of the silicon rod. When the output pressures of the two telescopic assemblies are deviated, the output pressure of at least one of the two telescopic assemblies can be adjusted in time, so as to avoid the problem that the silicon rod is prone to edge collapse during the squaring process due to inconsistent pressure at the two ends of the edge skin.

Description

Technical Field

[0001] This invention relates to the field of silicon wafer processing technology, specifically providing a pressure detection device for a squaring machine, a squaring machine, and a squaring method. Background Technology

[0002] Silicon wafers are a key material in silicon-based solar cells, and their quality directly affects the cell's conversion efficiency and lifespan. To obtain silicon wafers, the edges of silicon rods are typically cut using a dicing wire mesh (such as diamond wire mesh) to obtain block-shaped silicon rods, such as square silicon rods. These block-shaped silicon rods are then cut into silicon wafers. This process of cutting the edges of the silicon rod is called squaring. However, during squaring, the edges are often not effectively fixed, leading to varying degrees of edge chipping on the cut surface as they gradually detach from the silicon rod, thus affecting the quality of the silicon rod product.

[0003] To address these issues, the edge strip is typically clamped during the squaring process to ensure its stability. However, due to inconsistent clamping forces at both ends of the same edge strip, edge chipping is prone to occur at the final exit point of the silicon rod where the wire mesh is cut. Summary of the Invention

[0004] This invention aims to solve the aforementioned technical problem, namely, the problem of edge chipping of silicon rods caused by uneven force on the edge during the squaring process. To this end, this invention provides a pressure detection device for a squaring machine, the squaring machine including two telescopic components clamping the same edge of the silicon rod, and the pressure detection device comprising:

[0005] Matrix;

[0006] A contact plate is disposed on at least one side of the substrate along its length, the contact plate being configured to contact the output end of the telescopic assembly during pressure detection;

[0007] A pressure sensor is disposed on the contact plate and is configured to detect the output pressure of the telescopic assembly when the contact plate contacts the output end of the telescopic assembly.

[0008] In the preferred embodiment of the pressure detection device described above, the base is provided with contact plates on both sides along its length direction, and the two contact plates are configured to contact the output ends of the two telescopic components respectively during the pressure detection process.

[0009] In the preferred embodiment of the pressure detection device described above, the pressure detection device further includes:

[0010] A fixing plate is disposed on the base, and the pressure detection element is disposed between the fixing plate and the contact plate.

[0011] In the preferred embodiment of the pressure detection device described above, the base is a telescopic base, and it is configured to extend and retract along its length; and / or

[0012] The pressure sensing element is equipped with a data cable interface; and / or

[0013] The pressure detection element is a pressure sensor; and / or

[0014] The telescopic component is a pneumatic cylinder or a hydraulic cylinder.

[0015] This application also provides a squaring machine, which includes a first telescopic assembly, a second telescopic assembly, and the pressure detection device described in the preferred embodiment above.

[0016] This application also provides a squaring method using a squaring machine. The squaring machine includes a pressure detection device and two telescopic components that clamp the same side of a silicon rod. The pressure detection device includes a base, a contact plate, and a pressure detection element. The contact plate is disposed on at least one side of the base along its length. The contact plate is configured to contact the output ends of the two telescopic components respectively during pressure detection. A pressure detection element is disposed on the contact plate and configured to detect the output pressure of the telescopic components when the contact plate contacts the output ends of the telescopic components. The squaring method includes:

[0017] During the square opening process, the first output pressure and the second output pressure of the two telescopic components are obtained respectively;

[0018] Calculate the absolute value of the difference between the first output pressure and the second output pressure;

[0019] Compare the absolute value with the preset difference;

[0020] Based on the comparison results, the output pressure of at least one of the two telescopic components is selectively adjusted.

[0021] In the preferred embodiment of the above square root method, the step of "comparing the absolute value with the preset difference" is followed by:

[0022] Obtain the length of the silicon rod;

[0023] The preset difference is determined based on the length of the silicon rod.

[0024] In the preferred embodiment of the above square root method, there is a positive correlation between the length of the silicon rod and the preset difference.

[0025] In a preferred embodiment of the above square root method, when the preset difference includes a first preset difference, the step of "selectively adjusting the output pressure of at least one of the two telescopic components based on the comparison result" further includes:

[0026] When the absolute value is greater than or equal to the first preset difference, adjust the output pressure of at least one of the two telescopic components;

[0027] When the absolute value is less than the first preset difference, the cutting line of the squaring machine is controlled to continue cutting the edge skin.

[0028] In the preferred embodiment of the above square root method, when the preset difference further includes a second preset difference, the step of "adjusting the output pressure of at least one of the two telescopic components when the absolute value is greater than or equal to the first preset difference" further includes:

[0029] When the absolute value is greater than or equal to the first preset difference, compare the absolute value with the second preset difference;

[0030] When the absolute value is greater than or equal to the second preset difference, compare the magnitudes of the first output pressure and the second output pressure.

[0031] When the first output pressure is greater than the second output pressure, the output pressure of the telescopic component corresponding to the first output pressure is reduced; when the first output pressure is less than the second output pressure, the output pressure of the telescopic component corresponding to the second output pressure is reduced.

[0032] The second preset difference is greater than the first preset difference.

[0033] In the preferred embodiment of the above-mentioned square root method, the step of "reducing the output pressure of the telescopic component corresponding to the first output pressure" further includes: controlling the telescopic component corresponding to the first output pressure to reduce the output pressure according to a first slope; and / or, the step of "reducing the output pressure of the telescopic component corresponding to the second output pressure" further includes: controlling the telescopic component corresponding to the second output pressure to reduce the output pressure according to a first slope.

[0034] In the preferred embodiment of the above-mentioned square root extraction method, the square root extraction method further includes:

[0035] When the absolute value is less than the second preset difference, compare the magnitudes of the first output pressure and the second output pressure.

[0036] When the first output pressure is greater than the second output pressure, the output pressure of the telescopic component corresponding to the second output pressure is increased; when the first output pressure is less than the second output pressure, the output pressure of the telescopic component corresponding to the first output pressure is increased.

[0037] In the preferred embodiment of the above-mentioned square root method, the step of "increasing the output pressure of the telescopic component corresponding to the second output pressure" further includes: controlling the telescopic component corresponding to the second output pressure to increase the output pressure according to a second slope; and / or, the step of "increasing the output pressure of the telescopic component corresponding to the first output pressure" further includes: controlling the telescopic component corresponding to the first output pressure to increase the output pressure according to a second slope; wherein, the first slope is less than the second slope.

[0038] In the preferred embodiment of the above square root method, when the preset difference further includes a third preset difference, the step of "adjusting the output pressure of at least one of the two telescopic components when the absolute value is greater than or equal to the first preset difference" further includes:

[0039] When the absolute value is greater than or equal to the first preset difference, compare the absolute value with the third preset difference;

[0040] When the absolute value is greater than or equal to the third preset difference, the average value of the first output pressure and the second output pressure is calculated;

[0041] Control the two telescopic components to output corresponding pressure according to the average value;

[0042] Among them, the third preset difference is greater than the second preset difference.

[0043] In the preferred embodiment of the above-described square root method, the steps of "selectively adjusting the output pressure of at least one of the two telescopic components" are performed before, after, or simultaneously:

[0044] The cutting line of the squaring machine is controlled to stop cutting.

[0045] In the preferred embodiment of the above-described square root method, after the step of "selectively adjusting the output pressure of at least one of the two telescopic components based on the comparison results," the method further includes:

[0046] Continue to obtain the first output pressure and the second output pressure of the two telescopic components respectively;

[0047] Calculate the absolute value of the difference between the first output pressure and the second output pressure;

[0048] When the absolute value is less than the first preset difference, the cutting line is controlled to cut the edge skin.

[0049] In the preferred embodiment of the above square root method, the step of "obtaining the first output pressure and the second output pressure of the two telescopic components respectively during the square root process" further includes:

[0050] Obtain the length of the silicon rod;

[0051] Based on the length of the silicon rod, determine the clamping pressure required for the two telescopic components to clamp the same side skin;

[0052] Control the two telescopic components to output corresponding pressure according to the tightening pressure.

[0053] In the preferred embodiment of the above-mentioned square root method, there is a positive correlation between the length of the silicon rod and the clamping pressure.

[0054] Those skilled in the art will understand that the pressure detection device for the squaring machine of this application provides a contact plate on at least one side of the substrate along its length. The contact plate can contact the output ends of the two telescopic components, thereby detecting the output pressure of the two telescopic components clamping the same edge of the silicon rod. This allows for timely adjustment of the output pressure of at least one of the two telescopic components when there is a deviation in the output pressure of the two telescopic components, thus avoiding the problem of edge breakage of the silicon rod during the squaring process caused by inconsistent pressure at both ends of the edge.

[0055] Furthermore, by setting contact plates on both sides of the base length direction, the two contact plates can simultaneously contact the output ends of the two telescopic components, thereby enabling simultaneous detection of the output pressure of the two telescopic components clamping the same side skin. This avoids errors caused by inconsistent detection times of the two telescopic components and improves the reliability of the pressure detection device.

[0056] Furthermore, by setting the substrate as a telescopic substrate, it is beneficial for the pressure detection device to detect the output end of the telescopic assembly that clamps different lengths of side skin.

[0057] Those skilled in the art will understand that the squaring method of the squaring machine of this application obtains the output pressure of two telescopic components, calculates the absolute value of the difference between the two, and then selectively adjusts the output pressure of at least one of the two telescopic components according to the magnitude of the absolute value and the preset difference. This balances the clamping force of the two telescopic components clamping the same edge, ensuring that the edge is subjected to uniform force during the squaring process and avoiding the problem of the silicon rod easily breaking during the squaring process due to inconsistent pressure at both ends of the edge.

[0058] Furthermore, by setting a positive correlation between the length of the silicon rod and the preset difference, the squaring process can adjust the output pressure of the telescopic component clamping the same side skin according to the actual length of the silicon rod, avoiding the problem of edge breakage of the silicon rod during the squaring process, making the squaring method more adaptable and flexible.

[0059] Furthermore, when the absolute value is greater than or equal to the second preset difference, the output pressure of the telescopic component corresponding to the first output pressure or the second output pressure is reduced according to the magnitude of the first output pressure and the second output pressure, thereby balancing the pressure at both ends of the edge skin and avoiding excessive clamping force on the edge skin, which could affect the edge skin.

[0060] Furthermore, when the absolute value is less than the second preset difference, the output pressure of the telescopic component corresponding to the first output pressure or the second output pressure is increased according to the magnitude of the first output pressure and the second output pressure, so as to balance the pressure at both ends of the edge skin and improve the clamping stability of the edge skin.

[0061] Furthermore, by controlling the output pressure of the two telescopic components according to the average of the first output pressure and the second output pressure when the absolute value is greater than or equal to the third preset difference, it is possible to avoid the silicon rod quality being affected by excessive pressure at both ends of the edge skin, and also to avoid the edge skin stability being affected by insufficient pressure at both ends of the edge skin.

[0062] Furthermore, by controlling the cutting line to stop the cutting operation before, after, or simultaneously with adjusting the output pressure of the telescopic component, the problem of edge chipping of the silicon rod due to inconsistent pressure at both ends of the edge can be avoided.

[0063] Furthermore, after adjusting the output pressure of the telescopic component, the first output pressure and the second output pressure are continuously acquired. When the absolute value of the difference between the two output pressures is less than the first preset difference, the cutting line is controlled to cut the edge skin. This not only improves the product yield but also enhances the product stability.

[0064] Furthermore, by determining the required clamping pressure of the telescopic component to hold the edge skin based on the length of the silicon rod, the clamping stability of the edge skin can be improved, avoiding the problem of edge breakage due to poor edge skin stability during the squaring process.

[0065] Furthermore, by establishing a positive correlation between the length of the silicon rod and the clamping pressure, the stability of the silicon rod during the edge squaring process can be ensured, thereby improving the squaring quality. Attached Figure Description

[0066] The preferred embodiments of the present invention are described below with reference to the accompanying drawings, in which:

[0067] Figure 1 This is a schematic diagram of the pressure detection device for a square rooting machine according to this application;

[0068] Figure 2 This is a schematic diagram of the square root extractor of this application;

[0069] Figure 3 This is a flowchart of the method for extracting the extractor according to this application;

[0070] Figure 4 This is a logic diagram of one possible implementation of the square root extraction method of the square root extraction machine of this application.

[0071] Explanation of reference numerals in the attached figures:

[0072] 1. Pressure detection device; 11. Base; 12. Contact plate; 13. Pressure sensor; 14. Fixing plate; 15. Data cable interface; 2. First clamping mechanism; 21. First cylinder; 22. First telescopic spindle; 3. Second clamping mechanism; 31. Second cylinder; 32. Second telescopic spindle. Detailed Implementation

[0073] Preferred embodiments of this application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of this application and are not intended to limit the scope of protection of this application. For example, although this embodiment is described in conjunction with a silicon rod, this is not intended to limit the scope of protection of this application. Those skilled in the art can apply this application to other application scenarios without departing from the principles of this application, such as silicon rods or other hard and brittle semiconductor materials.

[0074] It should be noted that in the description of this application, terms such as "upper," "lower," "left," "right," "inner," and "outer," indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. These are used merely for ease of description and do not indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0075] Furthermore, it should be noted that, in the description of this application, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0076] First refer to Figure 1-2 This application describes the pressure detection device used in a squaring machine.

[0077] In the prior art, the squaring machine includes two clamping mechanisms: a first clamping mechanism 2 and a second clamping mechanism 3. The first clamping mechanism 2 includes a first telescopic spindle 22 and four first cylinders 21, and the second clamping mechanism 3 includes a second telescopic spindle 32 and four second cylinders 31. The second telescopic spindle 32 corresponds to the first telescopic spindle 22, and the four second cylinders 31 correspond one-to-one with the first cylinders 21. The silicon rod includes four fan-shaped edges and a square silicon rod. The two ends of the square silicon rod along its length are clamped by the first telescopic spindle 22 and the second telescopic spindle 32, respectively. The first cylinders 21 and their corresponding second cylinders 31 form a group. The two ends of each edge along its length are clamped by a group of first cylinders 21 and second cylinders 31, so that the silicon rod is clamped by the first clamping mechanism 2 and the second clamping mechanism 3. When the silicon rod is clamped and squared, the output pressure of the first cylinder 21 clamping the same edge is inconsistent with the output pressure of the second cylinder 31, which can easily cause edge chipping at the final exit position of the wire mesh on the silicon rod.

[0078] To address the issue of edge chipping in silicon rods caused by uneven stress on the edge during the squaring process, this application provides a pressure detection device 1 for a squaring machine. This device includes two telescopic components and a pressure sensor 13. The two telescopic components clamp both ends of the same edge of the silicon rod. The pressure detection device 1 includes a base 11, a contact plate 12, and a pressure detection element. The contact plate 12 is disposed on at least one side of the base 11 along its length and is configured to contact the output ends of the two telescopic components during pressure detection. The pressure detection element is disposed on the contact plate 12 and is configured to detect the output pressure of the telescopic components when the contact plate 12 contacts the output ends of the telescopic components.

[0079] This application provides a contact plate 12 on at least one side of the substrate 11 along its length. The contact plate 12 can contact the output ends of the two telescopic components, thereby detecting the output pressure of the two telescopic components clamping the same edge of the silicon rod. When there is a deviation in the output pressure of the two telescopic components, the output pressure of at least one of the two telescopic components can be adjusted in time, avoiding the problem of the silicon rod easily breaking off during the squaring process due to inconsistent pressure at both ends of the edge.

[0080] It should be noted that the pressure detection device 1 of this application can not only detect the output pressure of the two telescopic components during the squaring process, but also test the output pressure of the two telescopic components before the squaring machine starts working, in order to determine whether the output pressure of the two telescopic components meets the consistency requirements. Among these, Figure 2 This is a schematic diagram of testing the output pressure of the telescopic component before the squaring machine starts working.

[0081] The following reference Figure 1-2 This paper describes a preferred embodiment of the pressure detection device 1 of this application. Those skilled in the art will understand that the embodiments described below are merely illustrative of the principles of this application and are not intended to limit the scope of protection of this application. Provided that the pressure detection device 1 includes at least a base 11, a contact plate 12, and a pressure detection element, those skilled in the art can adjust the following configuration to make this application applicable to more specific application scenarios.

[0082] See Figure 1-2 As shown, the pressure detection device 1 of this application includes a base 11, two sets of contact plates 12, and four pressure sensors 13. The base 11 extends along its length (e.g., ...). Figure 1 A set of contact plates 12 is symmetrically arranged on both sides of the substrate 11 (shown in the X direction). One set of contact plates 12 can contact the output end of one telescopic component, and the other set of contact plates 12 can contact the output end of another telescopic component. Both telescopic components are cylinders, specifically a first cylinder 21 and a second cylinder 31. The first cylinder 21 and the second cylinder 31 can clamp and fix the same side of the silicon rod. Each set of contact plates 12 includes two contact plates relative to the width direction of the substrate 11 (e.g., in the X direction). Figure 2 The contact plates 12 shown are symmetrically arranged in the Y direction. The outer sides of both contact plates 12 are flush with one side of the base 11 along its length and extend towards one side of the base 11 along its width, protruding beyond that side. A pressure sensor 13 is provided on the inner side of the portion of the contact plate 12 protruding beyond the width of the base 11, enabling the contact plate 12 to detect the output pressure of the corresponding cylinder when it contacts the output end of the cylinder. A data cable interface 15 is provided on the pressure sensor 13, through which the pressure value detected by the pressure sensor 13 is converted into a digital output value.

[0083] Of course, the number and arrangement of the contact plates 12 are not fixed in this application, and those skilled in the art can adjust them according to the arrangement requirements. For example, a contact plate 12 may be symmetrically arranged on both sides of the base 11 along its length. And / or, the outer side of the contact may not be flush with one side of the base 11 along its length, as long as the contact plate 12 can contact the output end of the telescopic component.

[0084] Furthermore, the specific configuration of the two telescopic components is not fixed in this application, and those skilled in the art can adjust it according to the configuration requirements. For example, both telescopic components can be hydraulic cylinders. Alternatively, one telescopic component can be a pneumatic cylinder, and the other a hydraulic cylinder. Or, one telescopic component can be a hydraulic cylinder, and the other a pneumatic cylinder.

[0085] It should be noted that the substrate 11 in this application can be either a fixed substrate 11 or a telescopic substrate 11. A fixed substrate 11 refers to a substrate whose dimensions do not change along its length, and the pressure detection device 1 formed by this fixed substrate 11 can be used to detect the output pressure of a telescopic assembly clamping a silicon rod of a fixed size. A telescopic substrate 11 refers to a substrate that can extend and retract along its length, and the pressure detection device 1 formed by this telescopic substrate 11 can be used to detect the output pressure of a telescopic assembly clamping silicon rods of different sizes.

[0086] See next Figure 1-2 The pressure detection device 1 also includes two sets of fixing plates 14. These two sets of fixing plates 14 are symmetrically arranged on both sides of the width direction of the base 11. Each set of fixing plates 14 includes two fixing plates 14. These two fixing plates 14 correspond to two contact plates 12 protruding from one side of the width direction of the base 11, so that the pressure sensor 13 inside the contact plate 12 is arranged between the fixing plate 14 and the contact plate 12.

[0087] It should be noted that in other preferred embodiments, the fixing plate 14 is not necessary, and those skilled in the art can choose it according to the setting requirements.

[0088] In addition, this application also provides a squaring machine, which includes a first telescopic assembly for clamping the same side of a silicon rod, a second telescopic assembly, and the pressure detection device 1 described in any of the above embodiments.

[0089] The preferred embodiment of the square-opening method of the square-opening machine of this application is described below.

[0090] like Figure 3 As shown, under the above-described configuration, the method for opening a square root using the square root machine of this application includes:

[0091] S101. During the square root process, the first output pressure and the second output pressure of the two telescopic components are obtained respectively. For example, by contacting the output end of the telescopic components with the pressure detection device 1, the first output pressure and the second output pressure of the two telescopic components can be detected.

[0092] S102. Calculate the absolute value of the difference between the first output pressure and the second output pressure. For example, after obtaining the first output pressure and the second output pressure, calculate the difference between the first output pressure and the second output pressure, and take the absolute value of the difference.

[0093] S103. Determine the difference interval in which the absolute value lies. For example, if the difference interval is preset, after obtaining the absolute value, compare it with the endpoints of the preset difference interval to determine the interval in which the absolute value lies.

[0094] S104. Based on the comparison results, selectively adjust the output pressure of at least one of the two telescopic components. For example, after determining the range of the absolute value, adjusting the output pressure of at least one of the two telescopic components can reduce the pressure difference between the two telescopic components.

[0095] This application obtains the output pressure of two telescopic components, calculates the absolute value of the difference between them, and then selectively adjusts the output pressure of at least one of the two telescopic components according to the magnitude of the absolute value and the preset difference. This balances the clamping force of the two telescopic components clamping the same edge skin, ensuring that the edge skin is subjected to uniform force during the squaring process and avoiding the problem of the silicon rod easily breaking during the squaring process due to inconsistent pressure at both ends of the edge skin.

[0096] The preferred embodiment of the square-opening method of the square-opening machine of this application will be described below. The two telescopic components are respectively represented by a first cylinder 21 and a second cylinder 31.

[0097] In one implementation, the step of "obtaining the first output pressure and the second output pressure of the two telescopic components respectively during the square root process" further includes:

[0098] Obtain the length of the silicon rod;

[0099] Based on the length of the silicon rod, determine the clamping pressure required for the two telescopic components to clamp the same side skin;

[0100] Control the two telescopic components to output corresponding pressure according to the tightening pressure.

[0101] Specifically, there is a positive correlation between the length of the silicon rod and the clamping pressure.

[0102] It should be noted that the silicon rod length refers to the total length of the silicon rod, which is also the total length of the edge skin before squaring. During the squaring process, due to the silicon rod's own weight and internal stress distribution, the longer the silicon rod, the more prone it is to bending or deformation. To ensure the stability of the silicon rod during the squaring process, greater clamping pressure needs to be applied to both ends along its length. Although the telescopic component outputs pressure according to the clamping pressure, due to the material properties of the telescopic component, there is often a certain difference between the output pressure of the telescopic component and the clamping pressure. This difference leads to uneven pressure at both ends of the edge skin, making the silicon rod prone to edge chipping during the squaring process.

[0103] For example, consider a silicon rod with a diameter of 20cm and two telescopic components, namely, a first cylinder 21 and a second cylinder 31. When the silicon rod is 30cm long, both cylinders apply a 50N clamping pressure to the same edge of the silicon rod to ensure the stability of the edge during the squaring process. When the silicon rod is 50cm long, both cylinders apply a 100N clamping pressure to the same edge of the silicon rod to ensure the stability of the edge during the squaring process.

[0104] In one implementation, the method further includes the following step before the step of "comparing the absolute value with a preset difference":

[0105] Obtain the length of the silicon rod;

[0106] A preset difference is determined based on the length of the silicon rod;

[0107] After determining the preset difference, compare the absolute value with the preset difference.

[0108] Specifically, there is a positive correlation between the length of the silicon rod and the preset difference.

[0109] It's important to note that the length of the silicon rod affects the required pressure at both ends of the edge during cutting. When the silicon rod is short, due to its higher overall rigidity and stability, the pressure difference between the two ends must be kept within a small range. This is because a large difference in pressure between the two ends will create uneven stress distribution on the silicon edge. During the squaring process, this uneven stress may cause deformation of the silicon edge, leading to edge chipping. To reduce the risk of chipping and ensure cutting quality, the pressure difference should be kept within a small range for short silicon rods. However, when the silicon rod is long, its overall rigidity and stability are relatively low, and it is more susceptible to external factors such as material inhomogeneity. In this case, to accommodate these external factors and reduce the risk of chipping, a certain pressure difference is allowed between the two ends of the edge. This pressure difference can better accommodate local variations in the silicon rod material and reduce stress concentration that may occur during cutting.

[0110] In one implementation, when the preset difference includes a first preset difference, the step of "selectively adjusting the output pressure of at least one of the two telescopic components based on the comparison result" further includes:

[0111] When the absolute value is greater than or equal to the first preset difference, adjust the output pressure of at least one of the two telescopic components;

[0112] When the absolute value is less than the first preset difference, the cutting line is controlled to continue cutting the edge skin.

[0113] It should be noted that the preset difference includes a first preset difference, which has a positive correlation with the length of the silicon rod. It should also be noted that when the absolute value is greater than or equal to the first preset difference, and the output pressure of at least one telescopic component needs to be adjusted, the output pressure of the telescopic component does not necessarily need to be adjusted according to the clamping pressure. As long as the edge skin can be clamped and fixed, and the pressure at both ends of the edge skin is consistent, it is sufficient. The clamping pressure is designed solely to ensure the stability of the edge skin; a slight increase or decrease in pressure will not affect the stability of the edge skin.

[0114] For example, consider a silicon rod with a diameter of 20cm and a length of 30cm, with two telescopic components: a first cylinder 21 and a second cylinder 31, and a preset pressure difference of 3N. When the absolute value is greater than or equal to 3N, it indicates a significant difference between the first output pressure of the first cylinder 21 and the second output pressure of the second cylinder 31. Under these conditions, edge chipping is likely to occur during the squaring process. Therefore, it is necessary to adjust the first output pressure of the first cylinder 21 and the second output pressure of the second cylinder 31 to reduce the pressure difference between the two cylinders, balancing their pressures and preventing edge chipping due to inconsistent pressure at both ends. When the absolute value is less than 3N, it indicates a small difference between the first output pressure of the first cylinder 21 and the second output pressure of the second cylinder 31. Under these conditions, edge chipping will not occur during the squaring process.

[0115] Furthermore, when the preset difference includes a second preset difference, the step of "adjusting the output pressure of at least one of the two telescopic components when the absolute value is greater than or equal to the first preset difference" further includes:

[0116] When the absolute value is greater than or equal to the first preset difference, compare the absolute value with the second preset difference;

[0117] When the absolute value is greater than or equal to the second preset difference, compare the magnitudes of the first output pressure and the second output pressure.

[0118] When the first output pressure is greater than the second output pressure, the output pressure of the telescopic component corresponding to the first output pressure is reduced; when the first output pressure is less than the second output pressure, the output pressure of the telescopic component corresponding to the second output pressure is reduced.

[0119] The second preset difference is greater than the first preset difference.

[0120] Among them, the second preset difference also shows a positive correlation with the length of the silicon rod.

[0121] For example, consider a silicon rod with a diameter of 20cm and a length of 30cm. The two telescopic components are a first cylinder 21 and a second cylinder 31, with a first preset difference of 3N and a second preset difference of 5N. When the absolute value is greater than or equal to 3N, compare the absolute value with the second preset difference. If the absolute value is greater than or equal to 5N, it indicates that the difference between the first output pressure of the first cylinder 21 and the second output pressure of the second cylinder 31 is too large. Then, compare the first and second output pressures. If the first output pressure is greater than the second output pressure, it indicates that the force applied to the edge by the first cylinder 21 is greater than the force applied to the edge by the second cylinder 31. In this case, reduce the first output pressure of the first cylinder 21 so that it is close to the second output pressure of the second cylinder 31. This ensures the stability of the edge clamping and avoids excessive clamping force caused by increasing the second output pressure of the second cylinder 31, which could lead to deformation of the edge during cutting and affect the squaring quality. When the first output pressure is less than the second output pressure, it means that the force applied by the first cylinder 21 to the edge skin is less than the pressure applied by the second cylinder 31 to the edge skin. At this time, the second output pressure of the second cylinder 31 is reduced so that the second output pressure of the second cylinder 31 is close to the first output pressure of the first cylinder 21. On the one hand, this can ensure the clamping stability of the edge skin, and on the other hand, it can avoid the edge skin from deforming during the cutting process due to excessive clamping force caused by increasing the first output pressure of the first cylinder 21, which would affect the squaring quality.

[0122] Specifically, the step of "reducing the output pressure of the telescopic component corresponding to the first output pressure" further includes:

[0123] The telescopic component corresponding to the first output pressure is controlled to reduce the output pressure according to a first slope; and / or

[0124] The step of "reducing the output pressure of the telescopic component corresponding to the second output pressure" further includes:

[0125] The telescopic component corresponding to the second output pressure is controlled to reduce the output pressure according to the first slope.

[0126] For example, consider a silicon rod with a diameter of 20cm and a length of 30cm, with two telescopic components: a first cylinder 21 and a second cylinder 31, and a second preset pressure difference of 5N. When the absolute value is greater than or equal to 5N, and the first output pressure is greater than the second output pressure, it indicates that the difference between the first output pressure of the first cylinder 21 and the second output pressure of the second cylinder 31 is too large. If the first output pressure of the first cylinder 21 is rapidly reduced at this point, it may cause deformation of the edge on the silicon rod, affecting the cutting quality. Therefore, the first output pressure needs to be gradually reduced according to a first slope to ensure that the clamping force at both ends of the edge gradually becomes balanced, while maintaining the stability of the silicon rod during the squaring process. Therefore, the first output pressure of the first cylinder 21 is controlled to decrease according to the first slope. Similarly, when the absolute value is greater than or equal to 5N and the first output pressure is less than the second output pressure, it indicates that the difference between the first output pressure of the first cylinder 21 and the second output pressure of the second cylinder 31 is too large. If the second output pressure of the second cylinder 31 is rapidly reduced at this time, it may cause deformation of the edge skin on the silicon rod, affecting the cutting quality. Therefore, the second output pressure needs to be gradually reduced according to the first slope to ensure that the clamping force of the edge skin gradually becomes balanced, while maintaining the stability of the silicon rod during the cutting process. Therefore, the second output pressure of the second cylinder 31 is controlled to decrease according to the first slope.

[0127] Furthermore, the square root extraction method also includes:

[0128] When the absolute value is less than the second preset difference, compare the magnitudes of the first output pressure and the second output pressure.

[0129] When the first output pressure is greater than the second output pressure, the output pressure of the telescopic component corresponding to the second output pressure is increased; when the first output pressure is less than the second output pressure, the output pressure of the telescopic component corresponding to the first output pressure is increased.

[0130] For example, consider a silicon rod with a diameter of 20cm and a length of 30cm. The two telescopic components are a first cylinder 21 and a second cylinder 31, with a first preset difference of 3N and a second preset difference of 5N. When the absolute value is greater than or equal to 3N, compare the absolute value with the second preset difference. When the absolute value is less than 5N, it indicates a significant difference between the first output pressure of the first cylinder 21 and the second output pressure of the second cylinder 31. Then, compare the magnitudes of the first and second output pressures. When the first output pressure is greater than the second output pressure, it indicates that the force applied to the edge by the first cylinder 21 is greater than the force applied to the edge by the second cylinder 31. In this case, increase the second output pressure of the second cylinder 31 to bring it close to the first output pressure of the first cylinder 21. This ensures the clamping stability of the edge and prevents the stability of the edge from being affected by reducing the second output pressure of the second cylinder 31. When the first output pressure is less than the second output pressure, it means that the force applied by the first cylinder 21 to the edge skin is less than the pressure applied by the second cylinder 31 to the edge skin. At this time, increasing the first output pressure of the first cylinder 21 so that the first output pressure of the first cylinder 21 is close to the second output pressure of the second cylinder 31 can ensure the clamping stability of the edge skin and avoid affecting the stability of the edge skin by reducing the second output pressure of the second cylinder 31.

[0131] Specifically, the step of "increasing the output pressure of the telescopic component corresponding to the second output pressure" further includes:

[0132] The telescopic component corresponding to the second output pressure is controlled to increase the output pressure according to the second slope; and / or

[0133] The step of "increasing the output pressure of the telescopic component corresponding to the first output pressure" further includes:

[0134] The telescopic component corresponding to the first output pressure is controlled to increase the output pressure according to the second slope.

[0135] For example, consider a silicon rod with a diameter of 20cm and a length of 30cm. The two telescopic components are a first cylinder 21 and a second cylinder 31, with a first preset pressure difference of 3N and a second preset pressure difference of 5N. When the absolute value is less than 5N but greater than or equal to 3N, and the first output pressure is greater than the second output pressure, it indicates that the difference in the second output pressure between the first cylinder 21 and the second cylinder 31 is not significant. In this case, the second output pressure of the second cylinder 31 can be quickly increased to ensure that the edge of the silicon rod does not deform, thus affecting the cutting quality. Therefore, the second output pressure of the second cylinder 31 is controlled to increase according to the second slope. Similarly, when the absolute value is less than 5N but greater than or equal to 3N, and the first output pressure is less than the second output pressure, it indicates that the difference in the first output pressure between the first cylinder 21 and the second output pressure of the second cylinder 31 is not significant. In this case, the first output pressure of the first cylinder 21 can be quickly increased without affecting the quality of the silicon rod. Therefore, the first output pressure of the first cylinder 21 is controlled to increase according to the second slope.

[0136] In one embodiment, when the preset difference further includes a third preset difference, the step of "adjusting the output pressure of at least one of the two telescopic components when the absolute value is greater than or equal to the first preset difference" further includes:

[0137] When the absolute value is greater than or equal to the first preset difference, compare the absolute value with the third preset difference;

[0138] When the absolute value is greater than or equal to the third preset difference, the average value of the first output pressure and the second output pressure is calculated;

[0139] Control the two telescopic components to output corresponding pressure according to the average value;

[0140] Among them, the third preset difference is greater than the second preset difference.

[0141] Among them, the third preset difference also shows a positive correlation with the length of the silicon rod.

[0142] For example, consider a silicon rod with a diameter of 20cm and a length of 30cm. Two telescopic components are a first cylinder 21 and a second cylinder 31, with a first preset pressure difference of 3N, a second preset pressure difference of 5N, and a third preset pressure difference of 8N. When the absolute value is greater than or equal to 3N, compare the absolute value with the third preset pressure difference. If the absolute value is greater than or equal to 8N, it indicates that the difference between the first output pressure of the first cylinder 21 and the second output pressure of the second cylinder 31 is too large. If the cylinder with the larger output pressure is reduced to a pressure close to the smaller output pressure, the stability of the edge skin may deteriorate. If the cylinder with the smaller output pressure is increased to a pressure close to the larger output pressure, the clamping force on the edge skin may increase. In this case, the average value of the first and second output pressures can be calculated, and the two cylinders can be controlled to output pressure according to the average value. That is, the output pressure of the cylinder with the smaller output pressure is increased to the average value, while the output pressure of the cylinder with the larger output pressure is decreased to the average value.

[0143] It should be noted that when controlling the output pressure of the cylinder with lower output pressure to increase to the average value, there are no restrictions on the method of increasing the output pressure, as long as the output pressure of the cylinder with lower output pressure can be increased to the average value. Similarly, when controlling the output pressure of the cylinder with higher output pressure to decrease to the average value, there are no restrictions on the method of decreasing the output pressure, as long as the output pressure of the cylinder with higher output pressure can be decreased to the average value.

[0144] Before, after, or simultaneously with the step of "adjusting the output pressure of at least one of the two telescopic components":

[0145] Control the cutting line to stop cutting.

[0146] It should be noted that if the output pressure difference between the two telescopic components is large, the silicon rod may break easily if it continues to be squared. Therefore, before, after or at the same time as adjusting the output pressure of at least one of the two telescopic components, the cutting line should be stopped.

[0147] In one implementation, the step of "selectively adjusting the output pressure of at least one of the two telescopic components based on the comparison results" further includes:

[0148] Continue to obtain the first output pressure and the second output pressure of the two telescopic components respectively;

[0149] Calculate the absolute value of the difference between the first output pressure and the second output pressure;

[0150] When the absolute value is less than the first preset difference, the cutting line is controlled to cut the edge skin.

[0151] It should be noted that during the process of adjusting the output pressure of at least one of the two telescopic components, it is necessary to continue to obtain the output pressure of both telescopic components so that the output pressure of the two telescopic components is close, in order to avoid the problem of edge breakage of silicon rod during the squaring process due to a large pressure difference.

[0152] For example, taking a silicon rod with a diameter of 20cm and a length of 30cm, the first telescopic component is a first cylinder 21, the second telescopic component is a second cylinder 31, the first preset difference is 3N, and the second preset difference is 5N. When the absolute value is greater than or equal to 5N and less than 8N, and the first output pressure of the first cylinder 21 is greater than the second output pressure of the second cylinder 31, and the first cylinder 21 is controlled to reduce its output pressure according to the first slope, the first output pressure of the first cylinder 21 and the second output pressure of the second cylinder 31 are continuously acquired, and the absolute value of the difference between the first output pressure and the second output pressure is calculated. When the absolute value is less than 3N, it means that the difference between the first output pressure of the first cylinder 21 and the second output pressure of the second cylinder 31 is small. At this time, continuing to cut the edge will not cause edge chipping. Therefore, the cutting line is controlled to cut the edge.

[0153] The following is combined with Figure 4 A brief description of one possible operating process of the square root extractor of this application is provided below. Figure 4 A logic diagram of a possible implementation of the square root extraction method of the square root extraction machine of this application.

[0154] like Figure 4 As shown, in one possible operation:

[0155] S201. During the squaring process, obtain the length of the silicon rod, and then execute S202.

[0156] S202. Based on the positive correlation between the length of the silicon rod and the clamping pressure, determine the clamping pressure of the first cylinder 21 and the second cylinder 31 when they clamp the same side skin, and then execute S203.

[0157] S203, control the first cylinder 21 and the second cylinder 31 to output the corresponding pressure according to the clamping pressure, and clamp the silicon rod, and then execute S204.

[0158] S204. The first output pressure of the first cylinder 21 and the second output pressure of the second cylinder 31 are obtained by the pressure detection device 1, and then S205 is executed.

[0159] S205. Calculate the absolute value of the difference between the first output pressure and the second output pressure, and then execute S206.

[0160] S206. Based on the positive correlation between the length of the silicon rod and the first preset difference, the second preset difference, and the third preset difference, determine the first preset difference, the second preset difference, and the third preset difference, and then execute S207.

[0161] S207. Determine if the absolute value is greater than or equal to 3N. If it is true, proceed to S208; otherwise, proceed to S204.

[0162] S208, Control the cutting line to stop cutting, and then execute S209.

[0163] S209. Determine whether the absolute value is greater than or equal to 5N and less than 8N. If it is true, execute S210; if the absolute value is less than 5N, execute S213; if the absolute value is greater than or equal to 8N, execute S216.

[0164] S210. Determine whether the first output pressure is greater than the second output pressure. If yes, execute S211; otherwise, execute S212.

[0165] S211, control the first cylinder 21 to reduce the first output pressure according to the first slope, and then execute S218.

[0166] S212, control the second cylinder 31 to reduce the second output pressure according to the first slope, and then execute S218.

[0167] S213. Determine whether the first output pressure is greater than the second output pressure. If yes, execute S214; otherwise, execute S215.

[0168] S214. Control the second cylinder 31 to increase the second output pressure according to the second slope, and then execute S218.

[0169] S215, control the first cylinder 21 to increase the first output pressure according to the second slope, and then execute S218.

[0170] S216. Calculate the average value of the first output pressure and the second output pressure, and then execute S217.

[0171] S217. Control the first cylinder 21 and the second cylinder 31 to output the corresponding pressure according to the average value, and then execute S218.

[0172] S218. Obtain the first output pressure of the first cylinder 21 and the second output pressure of the second cylinder 31 respectively, and then execute S219.

[0173] S219. Calculate the absolute value of the difference between the first output pressure and the second output pressure, and then execute S220.

[0174] S220. Determine if the absolute value is less than 3N. If it is true, execute S221; otherwise, execute 218.

[0175] S221, control the cutting line to cut the edge skin, and then execute S204.

[0176] Those skilled in the art will understand that although some embodiments described herein include certain features included in other embodiments but not others, combinations of features from different embodiments are intended to be within the scope of this application and form different embodiments. For example, any of the claimed embodiments in the claims of this application can be used in any combination.

[0177] The technical solution of the present invention has been described above with reference to the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the scope of protection of the present invention is obviously not limited to these specific embodiments. Without departing from the principles of the present invention, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after such changes or substitutions will all fall within the scope of protection of the present invention.

Claims

1. A method for square root extraction using a square root extraction machine, characterized in that, The squaring machine includes a pressure detection device and two telescopic components that clamp the same side of a silicon rod. The pressure detection device includes a base, a contact plate, and a pressure detection element. The contact plate is disposed on at least one side of the base along its length. The contact plate is configured to contact the output ends of the two telescopic components respectively during pressure detection. A pressure detection element is disposed on the contact plate and configured to detect the output pressure of the telescopic components when the contact plate contacts the output ends of the telescopic components. The squaring method includes: During the square opening process, the first output pressure and the second output pressure of the two telescopic components are obtained respectively; Calculate the absolute value of the difference between the first output pressure and the second output pressure; Compare the absolute value with the preset difference; Based on the comparison results, the output pressure of at least one of the two telescopic components is selectively adjusted; When the preset difference includes a first preset difference, the step of "selectively adjusting the output pressure of at least one of the two telescopic components based on the comparison result" further includes: When the absolute value is greater than or equal to the first preset difference, adjust the output pressure of at least one of the two telescopic components; When the absolute value is less than the first preset difference, the cutting line of the squaring machine is controlled to continue cutting the edge skin. When the preset difference also includes a second preset difference, the step of "adjusting the output pressure of at least one of the two telescopic components when the absolute value is greater than or equal to the first preset difference" further includes: When the absolute value is greater than or equal to the first preset difference, compare the absolute value with the second preset difference; When the absolute value is greater than or equal to the second preset difference, compare the magnitudes of the first output pressure and the second output pressure. When the first output pressure is greater than the second output pressure, the output pressure of the telescopic component corresponding to the first output pressure is reduced; when the first output pressure is less than the second output pressure, the output pressure of the telescopic component corresponding to the second output pressure is reduced. Among them, the second preset difference is greater than the first preset difference; The step of "reducing the output pressure of the telescopic component corresponding to the first output pressure" further includes: The telescopic component corresponding to the first output pressure is controlled to reduce the output pressure according to a first slope; and / or The step of "reducing the output pressure of the telescopic component corresponding to the second output pressure" further includes: The telescopic component corresponding to the second output pressure is controlled to reduce the output pressure according to the first slope; The method for extracting the root also includes: When the absolute value is less than the second preset difference, compare the magnitudes of the first output pressure and the second output pressure. When the first output pressure is greater than the second output pressure, the output pressure of the telescopic component corresponding to the second output pressure is increased; when the first output pressure is less than the second output pressure, the output pressure of the telescopic component corresponding to the first output pressure is increased. The step of "increasing the output pressure of the telescopic component corresponding to the second output pressure" further includes: The telescopic component corresponding to the second output pressure is controlled to increase the output pressure according to the second slope; and / or The step of "increasing the output pressure of the telescopic component corresponding to the first output pressure" further includes: The telescopic component corresponding to the first output pressure is controlled to increase the output pressure according to the second slope; Among them, the first slope is less than the second slope; When the preset difference also includes a third preset difference, the step of "adjusting the output pressure of at least one of the two telescopic components when the absolute value is greater than or equal to the first preset difference" further includes: When the absolute value is greater than or equal to the first preset difference, compare the absolute value with the third preset difference; When the absolute value is greater than or equal to the third preset difference, the average value of the first output pressure and the second output pressure is calculated; Control the two telescopic components to output corresponding pressure according to the average value; Among them, the third preset difference is greater than the second preset difference.

2. The square root extraction method according to claim 1, characterized in that, The step of "comparing the absolute value with the preset difference" is preceded by: Obtain the length of the silicon rod; The preset difference is determined based on the length of the silicon rod.

3. The square root extraction method according to claim 2, characterized in that, There is a positive correlation between the length of the silicon rod and the preset difference.

4. The square root extraction method according to claim 1, characterized in that, Before, after, or simultaneously with the step of "selectively adjusting the output pressure of at least one of the two telescopic components": The cutting line of the squaring machine is controlled to stop cutting.

5. The square root extraction method according to claim 4, characterized in that, The step of "selectively adjusting the output pressure of at least one of the two telescopic components based on the comparison results" further includes: Continue to obtain the first output pressure and the second output pressure of the two telescopic components respectively; Calculate the absolute value of the difference between the first output pressure and the second output pressure; When the absolute value is less than the first preset difference, the cutting line is controlled to cut the edge skin.

6. The square root extraction method according to claim 1, characterized in that, Before the step of "obtaining the first and second output pressures of the two telescopic components respectively during the square root process", the following is also included: Obtain the length of the silicon rod; Based on the length of the silicon rod, determine the clamping pressure required for the two telescopic components to clamp the same side skin; Control the two telescopic components to output corresponding pressure according to the tightening pressure.

7. The square root extraction method according to claim 6, characterized in that, There is a positive correlation between the length of the silicon rod and the clamping pressure.

8. A pressure detection device for a squaring machine used to implement the squaring method according to any one of claims 1-7, the squaring machine comprising two telescopic components clamping the same side of a silicon rod, characterized in that, The pressure detection device includes: Matrix; A contact plate is disposed on at least one side of the substrate along its length, the contact plate being configured to contact the output end of the telescopic assembly during pressure detection; A pressure sensor is disposed on the contact plate and is configured to detect the output pressure of the telescopic assembly when the contact plate contacts the output end of the telescopic assembly.

9. The pressure detection device according to claim 8, characterized in that, The substrate is provided with contact plates on both sides along its length, and the two contact plates are configured to contact the output ends of the two telescopic components respectively during pressure detection.

10. The pressure detection device according to claim 8, characterized in that, The pressure detection device also includes: A fixing plate is disposed on the base, and the pressure detection element is disposed between the fixing plate and the contact plate.

11. The pressure detection device according to claim 8, characterized in that, The substrate is a stretchable substrate, and it is configured to stretch or extend along its length; and / or The pressure sensing element is equipped with a data cable interface; and / or The pressure detection element is a pressure sensor; and / or The telescopic component is a pneumatic cylinder or a hydraulic cylinder.

12. A square root extractor, characterized in that, The squaring machine includes a first telescopic assembly, a second telescopic assembly, and a pressure detection device as described in any one of claims 8-11, which clamp the same side of the silicon rod.

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