Linear module and machining device

Abstract

The application provides a linear module and processing equipment, and relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem that the linear module is easily damaged in a high-temperature environment. The linear module is configured to drive a paddle assembly to move and comprises a guide rail assembly extending in a first direction, a sliding seat assembly slidably connected with the guide rail assembly, and a base body extending in the first direction and configured to support the guide rail assembly, wherein the base body has a first cavity penetrating through the base body in the first direction, and a forced air cooling assembly in communication with the first cavity and configured to deliver cold air to the first cavity to cool the linear module. The forced air cooling assembly is used to cool the linear module, so that the linear module is prevented from being damaged due to the high-temperature residual heat of a reaction furnace and the heat of the paddle assembly when the paddle assembly is transported out of the reaction furnace.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic material processing, specifically to a linear module and processing equipment. Background Technology

[0002] When processing workpieces (such as semiconductor or photovoltaic materials), a linear module typically drives a paddle assembly to transport the workpiece to the reactor for processing. Because the reactor operates at high temperatures (e.g., 400-1200 degrees Celsius) during heating, the heat emitted by the paddle assembly and the reactor after the reaction can easily damage the linear module, such as causing deformation of the cover plate, damage to the synchronous belt, or deformation of the frame. This can lead to vibration or even malfunction of the linear module during transport. Summary of the Invention

[0003] To address the aforementioned technical problems, this application is proposed. Embodiments of this application provide a linear module and processing equipment.

[0004] In a first aspect, one embodiment of this application provides a linear module configured to drive a propeller assembly to move, comprising: a guide rail assembly extending along a first direction; a slide assembly slidably connected to the guide rail assembly; a base extending along the first direction and configured to support the guide rail assembly, wherein the base has a first cavity penetrating the base along the first direction; and an air-cooling assembly communicating with the first cavity and configured to deliver cold air to the first cavity to cool the linear module.

[0005] In some embodiments, the air-cooled assembly includes: a blowing structure disposed at a first end of a first cavity and configured to introduce cold air into the first cavity; and an exhaust structure disposed at a second end of the first cavity and configured to extract air from the first cavity.

[0006] In some embodiments, the substrate further includes: a second cavity; an inlet and an outlet communicating with the second cavity, the inlet and outlet being located at the upper part of the first end of the second cavity and the lower part of the first end of the second cavity, respectively; wherein, the cooling medium flows in from the inlet, passes through the second cavity, and flows out from the outlet.

[0007] In some embodiments, the first cavity extends through the substrate in a first direction; and / or, the second cavity includes: a first sub-cavity extending from a first end of the substrate to a second end of the substrate; and a second sub-cavity extending from the second end of the substrate to the first end of the substrate; wherein the first sub-cavity and the second sub-cavity are in communication, an inlet is located in the first sub-cavity near the first end of the substrate, and an outlet is located in the second sub-cavity near the first end of the substrate.

[0008] In some embodiments, the slide assembly includes: a support member; and at least one roller assembly connected to the support member, the roller assembly being configured to roll along the surface of the guide rail assembly.

[0009] In some embodiments, the guide rail assembly includes a cylindrical guide rail, and the side of the roller assembly has a first annular groove; wherein, in the radial direction of the cylindrical guide rail, the first annular groove accommodates at least a portion of the cylindrical guide rail.

[0010] In some embodiments, the guide rail assembly includes at least two sets of cylindrical guide rails, which are respectively disposed on both sides of the base and symmetrically arranged with respect to the base; the roller assembly includes a reference roller assembly and an eccentric roller assembly, which roll along the at least two sets of cylindrical guide rails respectively; wherein the distance between the eccentric roller assembly and the reference roller assembly is adjustable.

[0011] In some embodiments, the support has a through hole and a threaded hole; the eccentric roller assembly includes: an adjusting plate located on one side of the support, the adjusting plate including a slotted hole; an adjusting screw passing through the slotted hole from the side of the adjusting plate away from the support and screwed into the threaded hole; an eccentric shaft, a first end of the eccentric shaft passing through the through hole and connected to the adjusting plate; and an eccentric roller connected to a second end of the eccentric shaft.

[0012] In some embodiments, the substrate further includes a third cavity; wherein the linear module further includes a temperature sensor disposed inside the third cavity and configured to measure the temperature of the linear module; a temperature control module communicatively connected to the temperature sensor and configured to receive the temperature of the linear module measured by the temperature sensor; wherein the temperature control module is also communicatively connected to an air-cooling component and an external water supply device, the external water supply device being configured to provide a cooling medium to the second cavity, and the temperature control module being configured to adjust the rotational speed of the air-cooling component and the flow rate of the cooling medium provided by the external water supply device to the second cavity based on the temperature of the linear module.

[0013] In a second aspect, one embodiment of this application provides a processing apparatus, including: a frame; a reactor disposed within the frame, the reactor being configured to process a workpiece; a paddle assembly configured to carry the workpiece; and a linear module, any of the first aspects described above, disposed on the frame and connected to the paddle assembly, configured to drive the paddle assembly to move in order to convey the workpiece to the reactor.

[0014] The linear module and processing equipment proposed in this application embodiment are configured to drive the movement of the propeller assembly. The linear module includes: a guide rail assembly extending along a first direction; a slide assembly slidably connected to the guide rail assembly; a base extending along the first direction and configured to support the guide rail assembly, wherein the base has a first cavity penetrating through the base along the first direction; and an air-cooling assembly communicating with the first cavity and configured to deliver cold air into the first cavity to cool the linear module. Cooling the linear module using the air-cooling assembly can prevent damage to the linear module due to the high-temperature residual heat of the reactor and the heat of the propeller assembly during transport of the linear module from the reactor. Attached Figure Description

[0015] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0016] Figure 1 The image shown is an exploded view of a linear module provided in an exemplary embodiment of this application.

[0017] Figure 2 The image shown is a top view of a linear module provided in an exemplary embodiment of this application.

[0018] Figure 3 The image shown is a side view of a linear module provided in an exemplary embodiment of this application.

[0019] Figure 4 The image shown is a side view of a linear module provided in another exemplary embodiment of this application.

[0020] Figure 5 The image shown is an exemplary embodiment of this application. Figure 1 The image shows a magnified view of the linear module in region A.

[0021] Figure 6 The diagram shown is a schematic diagram of the slide assembly provided in an exemplary embodiment of this application.

[0022] Figure 7 The diagram shown is a schematic diagram of the slide assembly provided in another exemplary embodiment of this application.

[0023] Figure 8 The image shown is a side view of a slide assembly provided in an exemplary embodiment of this application.

[0024] Figure 9 The image shown is an exploded view of a slide assembly provided in an exemplary embodiment of this application.

[0025] Figure 10 The image shown is a top view of an eccentric roller assembly provided in an exemplary embodiment of this application.

[0026] Figure 11 The diagram shown is a schematic diagram of the structure of a driving component provided in an exemplary embodiment of this application.

[0027] Figure 12 The diagram shown is a schematic diagram of the processing equipment provided in an exemplary embodiment of this application.

[0028] Figure label:

[0029] 100. Linear module; 110. Guide rail assembly; 120. Slide assembly; 121. Support component; 122. Roller assembly; 1221. Reference roller assembly; 1222. Eccentric roller assembly; 12221. Adjusting plate; 122211. Waist-shaped hole; 12222. Adjusting screw; 12223. Eccentric roller; 12224. Eccentric shaft; 12225. Bearing; 12226. Wheel cover; 123. Connector; 130. Base; 131. First cavity; 132. Second cavity; 1321. First sub-cavity; 1322. Second sub-cavity Cavity; 133, Liquid inlet; 134, Liquid outlet; 140, Air-cooled assembly; 141, Blowing structure; 142, Exhaust structure; 150, First fixed plate; 160, Second fixed plate; 170, Water inlet / outlet assembly; 171, Water inlet connector; 172, Water outlet connector; 180, Sealing gasket; 190, Drive assembly; 191, Servo motor; 192, Reducer; 193, Synchronous belt; 194, Drive pulley; 195, Driven pulley; 196, Belt guard; 200, Processing equipment; 210, Paddle assembly; 220, Reactor; 230, Frame. Detailed Implementation

[0030] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0031] Application Overview

[0032] In the semiconductor and photovoltaic industries, thermal processing equipment is commonly used for processes such as diffusion and coating. This type of equipment typically consists of several parts, including a furnace cabinet (or reactor), a clean bench, and a gas source cabinet. The furnace cabinet primarily provides a vacuum high-temperature heating reaction chamber. After the reaction is heated to 800-1200 degrees Celsius in the furnace cabinet, a large amount of heat is conducted to the clean bench as the paddle assembly moves. Within the clean bench, the paddle assembly is transported by a linear module to the furnace cabinet for processing. The linear module is easily damaged by the high temperatures carried by the paddle assembly, such as cover plate deformation, synchronous belt damage, and frame deformation. This can cause the linear module to vibrate or even stop operating during transport.

[0033] In view of this, this application proposes a linear module and processing equipment, wherein the linear module is configured to drive the movement of a propeller assembly, comprising: a guide rail assembly extending along a first direction; a slide assembly slidably connected to the guide rail assembly; a base extending along the first direction and configured to support the guide rail assembly, wherein the base has a first cavity penetrating the base along the first direction; and an air-cooling assembly communicating with the first cavity and configured to deliver cold air into the first cavity to cool the linear module. Cooling the linear module using the air-cooling assembly can prevent damage to the linear module due to the high-temperature residual heat of the reactor and the heat of the propeller assembly during transport of the linear module from the reactor.

[0034] Exemplary device

[0035] Figure 1 The image shown is an exploded view of a linear module provided in an exemplary embodiment of this application. Figure 2 The image shown is a top view of a linear module provided in an exemplary embodiment of this application. Figure 3 The image shown is a side view of a linear module provided in an exemplary embodiment of this application. Figure 4 The image shown is a side view of a linear module provided in another exemplary embodiment of this application. Figure 5 The image shown is an exemplary embodiment of this application. Figure 1 The image shows a magnified view of the linear module in region A.

[0036] like Figures 1 to 5As shown, this application embodiment provides a linear module 100 configured to drive a propeller assembly. The linear module 100 includes: a guide rail assembly 110, a slide assembly 120, a base 130, and an air-cooling assembly 140. The guide rail assembly 110 extends along a first direction. The slide assembly 120 is slidably connected to the guide rail assembly 110. The base 130 extends along the first direction and is configured to support the guide rail assembly 110. The base 130 has a first cavity 131 extending through the base 130 along the first direction. The air-cooling assembly 140 communicates with the first cavity 131 and is configured to deliver cold air to the first cavity 131 to cool the linear module 100.

[0037] Specifically, the linear module 100 is exemplarily used to transport the propeller assembly to the reactor, and the air-cooling assembly 140 can exemplarily be a fan, blower, vacuum pump, etc. The air-cooling assembly 140 can blow cold air into the first cavity 131. Since the first cavity 131 penetrates the substrate 130, it can cool the entire linear module 100 and prevent the heat carried by the propeller assembly from damaging the linear module 100.

[0038] In some embodiments, such as Figures 1 to 4 As shown, the air-cooled component 140 is disposed at the first end of the base 130 and communicates with the first cavity 131.

[0039] In some embodiments, such as Figure 1 As shown, the air-cooled assembly 140 includes: a blowing structure 141 disposed at the first end of the first cavity 131 and configured to introduce cold air into the first cavity 131; and an exhaust structure 142 disposed at the second end of the first cavity 131 and configured to extract air from the first cavity 131.

[0040] Specifically, the blowing structure 141 can be a fan or a blower, and the exhaust structure 142 can be an exhaust fan or an air pump. By setting the blowing structure 141 and the exhaust structure 142 at both ends of the first cavity 131 respectively, the flow rate of cold air through the first cavity 131 can be accelerated, thereby improving the air cooling efficiency.

[0041] In some embodiments, such as Figure 1 and Figure 4As shown, the linear module 100 also includes a first fixing plate 150 and a second fixing plate 160. The first fixing plate 150 is connected to the first end of the base 130, a blowing structure 141 is connected to the surface of the first fixing plate 150 away from the base 130, the second fixing plate 160 is connected to the second end of the base 130, and an exhaust structure 142 is connected to the surface of the second fixing plate 160 away from the base 130. Specifically, the blowing structure 141 can be connected to the first fixing plate 150 by screws. The first fixing plate 150 has an air inlet for allowing cold air blown out by the blowing structure 141 to enter the first cavity 131. The exhaust structure 142 can be connected to the second fixing plate 160 by screws. The second fixing plate 160 has an air outlet for allowing air in the first cavity 131 to be discharged through the outlet.

[0042] In some embodiments, such as Figure 5 As shown, the substrate 130 further includes: a second cavity 132; an inlet 133 and an outlet 134 communicating with the second cavity 132, the inlet 133 and the outlet 134 being located at the upper part of the first end of the second cavity 132 and the lower part of the first end of the second cavity 132, respectively; wherein, the cooling medium flows in from the inlet 133, passes through the second cavity 132, and flows out from the outlet 134.

[0043] The cooling medium can be a coolant and / or a cooling gas. When the cooling medium is a cooling gas, the inlet 133 is a port for air intake, and the outlet 134 is a port for exhaust. With this structure, the linear module 100 can be further cooled by the cooling medium, that is, the linear module 100 is cooled by both air cooling and water cooling, which improves the cooling efficiency.

[0044] In some embodiments, such as Figure 4 As shown, the linear module 100 also includes a water inlet / outlet assembly 170, which includes a water inlet connector 171 and a water outlet connector 172. The water inlet connector 171 and the water outlet connector 172 are connected to the surface of the first fixing plate 150 away from the base 130. The water inlet connector 171 is connected to the liquid inlet 133, and the water outlet connector 172 is connected to the liquid outlet 134. The water inlet connector 171 and the water outlet connector 172 can be connected to the water inlet pipe and the water outlet pipe of an external water supply device, respectively.

[0045] In some embodiments, such as Figure 5As shown, the first cavity 131 extends through the substrate 130 along a first direction; and / or, the second cavity 132 includes: a first sub-cavity 1321 extending from a first end of the substrate 130 to a second end of the substrate 130; and a second sub-cavity 1322 extending from the second end of the substrate 130 to a first end of the substrate 130; wherein the first sub-cavity 1321 and the second sub-cavity 1322 are connected, that is, the second cavity 132 has a U-shaped structure in the substrate 130, the liquid inlet 133 is located in the first sub-cavity 1321 near the first end of the substrate 130, and the liquid outlet 134 is located in the second sub-cavity 1322 near the first end of the substrate 130.

[0046] With this structure, the cooling medium can enter through the inlet 133, flow through the first sub-cavity 1321, then through the second sub-cavity 1322, and finally flow out through the outlet 134. That is, it flows in a U-shape within the substrate 130, thereby extending the flow path and flow time of the cooling medium within the substrate 130 and improving cooling efficiency.

[0047] In some embodiments, such as Figure 1 As shown, the linear module 100 also includes at least one sealing gasket 180, which is disposed between the first fixing plate 150 and the base 130, and / or between the second fixing plate 160 and the base 130, to prevent leakage of cooling gas and / or coolant. The sealing gasket 180 has multiple through holes for allowing the input cooling medium and cold air to pass through the through holes into the first cavity 131 and the second cavity 132. In a specific example, the through holes on the sealing gasket 180 are correspondingly arranged with the water inlet connector 171, the water outlet connector 172, the air inlet, and the air outlet.

[0048] In some embodiments, the substrate 130 is made of aluminum. In related technologies, linear modules typically use a solid aluminum substrate, which requires customization. However, in this embodiment, an aluminum substrate 130 with a first cavity 131 and / or a second cavity 132 is used, which is a common aluminum material that can be mass-produced and has a lower cost, thus saving costs.

[0049] Figure 6 The diagram shown is a schematic representation of the structure of a sliding block assembly provided in an exemplary embodiment of this application. Figure 7 The diagram shown is a structural schematic of a slide assembly provided in another exemplary embodiment of this application. Figure 8 The image shown is a side view of a slide assembly provided in an exemplary embodiment of this application. Figure 9 The image shown is an exploded view of a slide assembly provided in an exemplary embodiment of this application.

[0050] In some embodiments, such as Figure 6 , Figure 7 , Figure 8 and Figure 9As shown, the slide assembly 120 includes: a support 121; at least one roller assembly 122 connected to the support 121, the roller assembly 122 being configured to roll along the surface of the guide rail assembly 110.

[0051] Specifically, linear modules in related technologies are typically ball-bearing or roller-type, with a large number of balls or rollers. The total contact area between these balls or rollers and the guide rail is large, resulting in significant friction. Therefore, the balls or rollers need to be coated with grease to reduce friction. However, cleanliness has a significant impact on the processing of the workpiece. Grease solidifies at high temperatures, and solidified grease can contaminate the workpiece after falling off, thus reducing its processing quality. For example, when silicon wafers are contaminated, microcracks or abnormal sheet resistance may occur. In this embodiment, a rolling pair is formed between the roller assembly 122 and the guide rail assembly 110. Since the number of roller assemblies 122 is relatively small (e.g., ...), ... Figure 7 The diagram shows six roller assemblies 122. The number of roller assemblies 122 required by the roller structure is significantly lower than the number of balls or rollers. The total contact area with the guide rail assembly 110 is small, resulting in low friction. Therefore, there is no need to apply grease, which allows for smooth transport of the workpiece and avoids contamination of the workpiece.

[0052] In some embodiments, such as Figure 1 , Figure 3 , Figure 5 and Figure 8 As shown, the guide rail assembly 110 includes a cylindrical guide rail, and the roller assembly 122 has a first annular groove 1221 on its side; wherein, in the radial direction of the cylindrical guide rail, the first annular groove 1221 accommodates at least a portion of the cylindrical guide rail.

[0053] Specifically, any set of cylindrical guide rails may include at least one cylindrical guide rail, such as Figure 5 As shown, a set of cylindrical guide rails includes two cylindrical guide rails. The number of first annular grooves 1221 on the roller assembly 122 is the same as the number of cylindrical guide rails in the set of cylindrical guide rails, as shown. Figure 8 As shown, the roller assembly 122 includes two first annular grooves 1221.

[0054] The first annular groove 1221 and the cylindrical guide rail are engaged to make the slide assembly 120 move stably on the guide rail assembly 110, thus preventing the slide assembly 120 from shaking.

[0055] In some embodiments, the guide rail assembly 110 includes at least two sets of cylindrical guide rails, which are respectively disposed on both sides of the base 130 and symmetrically arranged with respect to the base 130; such as Figure 6 and Figure 7As shown, the roller assembly 122 includes a reference roller assembly 1221 and an eccentric roller assembly 1222, which roll along at least two sets of cylindrical guide rails respectively; wherein the distance between the eccentric roller assembly 1222 and the reference roller assembly 1221 is adjustable.

[0056] Specifically, the inner sides of the reference roller assembly 1221 and the eccentric roller assembly 1222 can respectively contact the outer sides of the two sets of cylindrical guide rails. Since the distance between the eccentric roller assembly 1222 and the reference roller assembly 1221 is adjustable, when the distance between the eccentric roller assembly 1222 and the reference roller assembly 1221 is large, the distance is reduced to prevent the slide assembly 120 from shaking during travel. When the distance between the eccentric roller assembly 1222 and the reference roller assembly 1221 is small, the distance is increased to prevent the friction between the roller assembly 122 and the guide rail assembly 110 from being too large.

[0057] Figure 10 The image shown is a top view of an eccentric roller assembly provided in an exemplary embodiment of this application.

[0058] In some embodiments, such as Figure 9 and Figure 10 As shown, the support member 121 has a through hole and a threaded hole; the eccentric roller assembly 1222 includes: an adjusting plate 12221 located on one side of the support member 121, the adjusting plate 12221 including a waist-shaped hole 122211; an adjusting screw 12222, which passes through the waist-shaped hole 122211 from the side of the adjusting plate 12221 away from the support member 121 and is screwed into the threaded hole; an eccentric shaft 12224, the first end of which passes through the through hole and is connected to the adjusting plate 12221; and an eccentric roller 12223 connected to the second end of the eccentric shaft 12224. The connection point between the eccentric shaft 12224 and the adjusting plate 12221 is not at the center of the adjusting plate 12221, which is exemplarily circular.

[0059] Specifically, when adjusting the distance between the eccentric roller assembly 1222 and the reference roller assembly 1221, it is necessary to first loosen the adjusting screw 12222, and then rotate the adjusting plate 12221. Since the connection point between the eccentric shaft 12224 and the adjusting plate 12221 is not at the center of the adjusting plate 12221, rotating the adjusting plate 12221 can change the distance between the eccentric shaft 12224 and the reference roller assembly 1221, thereby adjusting the distance between the eccentric roller assembly 1222 and the reference roller assembly 1221. After adjusting the distance between the eccentric roller assembly 1222 and the reference roller assembly 1221, it is necessary to tighten the adjusting screw 12222 to fix the adjusting plate 12221.

[0060] In some embodiments, such as Figure 9 As shown, the eccentric roller assembly 1222 also includes: a bearing 12225 and a wheel cover 12226. The bearing 12225 is sleeved on the eccentric shaft 12224. The eccentric roller 12223 has a tubular structure and is sleeved on the bearing 12225. The wheel cover 12226 is embedded in the opening of the eccentric roller 12223 at the end opposite to the support member 121.

[0061] In some embodiments, the substrate 130 further includes a third cavity; wherein the linear module 100 further includes a temperature sensor disposed inside the third cavity and configured to measure the temperature of the linear module 100; a temperature control module communicatively connected to the temperature sensor and configured to receive the temperature of the linear module 100 measured by the temperature sensor; wherein the temperature control module is also communicatively connected to the air-cooling assembly 140 and an external water supply device, the external water supply device being configured to provide a cooling medium to the second cavity 132, and the temperature control module being configured to adjust the rotation speed of the air-cooling assembly 140 and the flow rate of the cooling medium provided by the external water supply device to the second cavity 132 based on the temperature of the linear module 100.

[0062] Specifically, the second fixing plate 160 may also include a sensor mounting hole, through which a temperature sensor can be disposed inside the third cavity. The temperature sensor may be, for example, a thermocouple. The substrate 130 may include one or more temperature sensors. In the case that the linear module 100 has multiple temperature sensors, the multiple temperature sensors may be disposed at different positions inside the third cavity, or inside different third cavities (there may also be multiple third cavities).

[0063] In a specific example, the temperature control module stores multiple temperature ranges. The temperature control module can determine the target temperature range to which the temperature sent by the temperature sensor belongs, and adjust the rotation speed of the air-cooled component 140 and the flow rate of the cooling medium supplied by the external water supply device to the second cavity 132 according to the target temperature range.

[0064] Through temperature sensors and temperature control modules, the air-cooled component 140 and the external water supply device can be intelligently adjusted. This allows for precise adjustment of the cooling efficiency of water cooling and air cooling based on the actual temperature. When the temperature is high, the cooling efficiency is improved to ensure that the linear module 100 is within a safe temperature range. When the temperature is low, the power of the air-cooled component 140 and the external water supply device is reduced to decrease energy consumption.

[0065] Figure 11 The diagram shown is a schematic diagram of the structure of a driving component provided in an exemplary embodiment of this application.

[0066] In some embodiments, such as Figure 11As shown, the linear module 100 further includes a drive assembly 190; wherein the drive assembly 190 includes a servo motor 191, a reducer 192, a synchronous belt 193, a drive pulley 194, and a driven pulley 195. Specifically, the servo motor 191 is connected to the reducer 192 to transmit the torque of the servo motor 191 to the drive pulley 194 and reduce its speed. The synchronous belt 193 is fitted onto the drive pulley 194 and the driven pulley 195, and the drive pulley 194 can drive the synchronous belt 193 to move, thereby driving the driven pulley 195 to rotate. The synchronous belt 193 is connected to the slide assembly 120 to drive the slide assembly 120 to move along the guide rail assembly 110.

[0067] In some embodiments, such as Figure 7 As shown, the slide assembly 120 also includes a connector 123, which is connected to the surface of the support plate 121 near the base 130, and the timing belt 193 is connected to the connector 123.

[0068] In some embodiments, such as Figure 1 As shown, the base 130 also includes a drive pulley mounting hole and a driven pulley mounting hole. The drive pulley 194 extends out of the drive pulley mounting hole, and the driven pulley 195 extends out of the driven pulley mounting hole, so that the timing belt 193 is positioned close to the connector 123, thereby connecting the timing belt 193 to the connector 123.

[0069] In some embodiments, such as Figure 1 As shown, the drive assembly 190 also includes a belt guard 196, which is fitted onto the timing belt 193 and connected to the base 190 to protect the timing belt 193. The belt guard 196 has an elongated through-hole or groove extending in a first direction on the surface near the connector 123, to prevent obstruction of the connection between the connector 123 and the timing belt 193 during the movement of the slide assembly 120.

[0070] In the above embodiment, the linear module 100 is configured to drive the propeller assembly to move, and includes: a guide rail assembly 110 extending along a first direction; a slide assembly 120 slidably connected to the guide rail assembly 110; a base 130 extending along the first direction and configured to support the guide rail assembly 110, wherein the base 130 has a first cavity 131 penetrating the base 130; and an air-cooling assembly 140 communicating with the first cavity 131 and configured to deliver cold air to the first cavity 131 to cool the linear module 100. Cooling the linear module 100 using the air-cooling assembly 140 can prevent damage to the linear module 100 due to the high-temperature residual heat of the reactor and the heat of the propeller assembly when transporting the propeller assembly from the reactor.

[0071] Based on the same inventive concept, this application also provides a processing device 200. Figure 12The diagram shown is a structural schematic of a processing device provided in an exemplary embodiment of this application. Figure 12 As shown, the processing equipment 200 provided in this application embodiment includes: a frame 230; a reactor 220 disposed within the frame 230, the reactor 220 being configured to process the workpiece to be processed; a paddle assembly 210 being configured to carry the workpiece to be processed; and any linear module 100 in the above embodiments being disposed on the frame 230 and connected to the paddle assembly 210, configured to drive the paddle assembly 210 to move, so as to transport the workpiece to be processed to the reactor 220.

[0072] In some embodiments, the base 130 of the linear module 100 may be connected to the frame 230.

[0073] In some embodiments, the processing equipment 200 further includes a connecting structure, one end of which is connected to the support member 121 of the slide assembly 120, and the other end of which is connected to the paddle assembly 210.

[0074] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0075] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0076] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0077] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0078] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A linear module, characterized in that, Configured to drive the propeller assembly, wherein the linear module includes: The guide rail assembly extends along a first direction; The slide assembly is slidably connected to the guide rail assembly; A base extending along the first direction is configured to support the guide rail assembly. The base has a first cavity extending through it along the first direction. The base also has a second cavity and an inlet and an outlet communicating with the second cavity. The inlet and outlet are located at the upper part of a first end of the second cavity and the lower part of a first end of the second cavity, respectively. Cooling medium flows in from the inlet, passes through the second cavity, and flows out from the outlet. The second cavity includes a first sub-cavity extending from the first end of the base to a second end of the base and a second sub-cavity extending from the second end of the base to the first end of the base. The first sub-cavity communicates with the second sub-cavity. The inlet is located in the first sub-cavity near the first end of the base, and the outlet is located in the second sub-cavity near the first end of the base. The base also includes a third cavity. An air-cooled component, connected to the first cavity, is configured to deliver cold air into the first cavity to cool the linear module. A temperature sensor, disposed inside the third cavity, is configured to measure the temperature of the linear module; A temperature control module, which is communicatively connected to the temperature sensor, is configured to receive the temperature of the linear module measured by the temperature sensor. The temperature control module is also communicatively connected to the air-cooling component and the external water supply device. The external water supply device is configured to provide cooling medium to the second cavity. The temperature control module is configured to adjust the rotation speed of the air-cooling component and the flow rate of the cooling medium provided by the external water supply device to the second cavity based on the temperature of the linear module.

2. The linear module according to claim 1, characterized in that, The air-cooling component includes: A blowing structure is disposed at the first end of the first cavity and is configured to introduce cold air into the first cavity; An exhaust structure is located at the second end of the first cavity and is configured to extract air from the first cavity.

3. The linear module according to claim 1 or 2, characterized in that, The slide assembly includes: Support components; At least one roller assembly is connected to the support member, the roller assembly being configured to roll along the surface of the guide rail assembly.

4. The linear module according to claim 3, characterized in that, The guide rail assembly includes a cylindrical guide rail, and the side of the roller assembly has a first annular groove; Wherein, in the radial direction of the cylindrical guide rail, the first annular groove accommodates at least a portion of the cylindrical guide rail.

5. The linear module according to claim 4, characterized in that, The guide rail assembly includes at least two sets of cylindrical guide rails, which are respectively disposed on both sides of the base and symmetrically arranged with respect to the base. The roller assembly includes a reference roller assembly and an eccentric roller assembly, wherein the reference roller assembly and the eccentric roller assembly roll along at least two sets of cylindrical guide rails respectively. The distance between the eccentric roller assembly and the reference roller assembly is adjustable.

6. The linear module according to claim 5, characterized in that, The support member has a through hole and a threaded hole; The eccentric roller assembly includes: An adjusting plate is located on one side of the support member, and the adjusting plate includes an oblong hole; An adjusting screw passes through the oblong hole from the side of the adjusting plate away from the support member and is screwed into the threaded hole; An eccentric shaft, the first end of which passes through the through hole and is connected to the adjusting plate; An eccentric roller is connected to the second end of the eccentric shaft.

7. A processing equipment, characterized in that, include: frame; A reactor, located within the frame, is configured to process the workpiece. The paddle assembly is configured to carry the workpiece to be processed; The linear module according to any one of claims 1 to 6 is disposed on the frame and connected to the paddle assembly, and is configured to drive the paddle assembly to move in order to transport the workpiece to be processed to the reactor.

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