High-efficiency green cleaning equipment

Abstract

The present application aims to provide a kind of simple structure, energy saving, environmental protection and low cost high efficiency green cleaning equipment.The present application includes liquid gas mixing pump (1), cleaning tank (2) and at least 1 one-time mixing tank passage, each one-time mixing tank passage includes a one-time pressure regulating valve (3) and a one-time mixing tank (4), the pressure in the one-time mixing tank in each one-time mixing tank passage is regulated by the one-time pressure regulating valve in the passage, the input end of all one-time mixing tank passages is communicated to the output end of liquid gas mixing pump, a gas-liquid outlet assembly (5) is arranged in the inner tank bottom of cleaning tank, the output end of each one-time mixing tank passage is communicated with the gas-liquid outlet assembly, and the gas-liquid outlet assembly injects gas-liquid mixture into the cleaning tank;The difference of another scheme is that a secondary mixing tank (10) is arranged between the one-time mixing tank passage and the cleaning tank.The present application can be applied to the field of cleaning equipment.

Description

Technical Field

[0001] This invention relates to the field of cleaning equipment, and more particularly to a high-efficiency, green cleaning device for silicon-based wafers or carbide-based wafers. Background Technology

[0002] Currently, silicon-based wafers or carbide-based wafers are the main substrates for manufacturing semiconductors and solar cells. The cleaning techniques used in the manufacturing process of silicon-based or carbide-based wafers are crucial for producing high-quality products. The surface atoms of silicon-based or carbide-based wafers have dangling bonds due to the breaking of chemical bonds perpendicular to the wafer direction, creating a free force field near the surface. This makes them highly susceptible to adsorbing various impurities. Potential contaminants can be categorized into three types: ① organic substances such as grease, rosin, wax, epoxy resin, and polyethylene glycol; ② metals, metal ions, and some inorganic compounds; ③ natural oxide layers, dust, and other particles (silicon, silicon carbide). In the past, various wet cleaning techniques were used for silicon-based or carbide-based wafers, such as acid and alkaline water cleaning, ultrasonic cleaning, low-pressure plasma cleaning, and mechanical methods. However, wet processes use acidic and alkaline solutions and harmful chemicals, leading to issues related to the cost of acid and alkali consumables, wastewater treatment costs, and environmental regulations. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to overcome the shortcomings of the prior art and provide a high-efficiency green cleaning equipment that is simple in structure, energy-saving, environmentally friendly and low in cost.

[0004] The technical solution adopted in this invention is as follows: the invention includes a liquid-gas mixing pump, a cleaning tank, and at least one primary mixing tank channel. Each primary mixing tank channel includes a primary pressure regulating valve and a primary mixing tank. The pressure in the primary mixing tank within each primary mixing tank channel is regulated by the primary pressure regulating valve within that channel. The input ends of all primary mixing tank channels are connected to the output end of the liquid-gas mixing pump. A gas-liquid outlet assembly is provided inside the bottom of the cleaning tank. The output end of each primary mixing tank channel is connected to the gas-liquid outlet assembly, and the gas-liquid outlet assembly injects a gas-liquid mixture into the cleaning tank.

[0005] As can be seen from the above scheme, this invention utilizes a liquid-gas mixing pump to mix the input gas and liquid, and then inputs the mixture into a primary mixing tank channel. A primary pressure regulating valve adjusts the pressure of each primary mixing tank channel. Specifically, the ratio of gas to liquid entering the primary mixing tank channel is adjusted. By adjusting the pressure, the gas volume is controllable, ensuring that the gas-liquid mixture output from the corresponding channel has a sufficient density of bubbles. Furthermore, the gas-liquid mixture from all primary mixing tank channels is input into a cleaning tank, resulting in a higher bubble density in the cleaning tank, thus ensuring the bubble density of the gas-liquid mixture in the cleaning tank. Additionally, by adjusting the pressure of each primary mixing tank channel using the primary pressure regulating valve, the pressure within each channel differs. Under these conditions, the bubble size in the gas-liquid mixture output from each channel differs, ultimately ensuring that the gas-liquid mixture input from all primary mixing tank channels into the cleaning tank has a wider range of bubble sizes to meet different application requirements. Moreover, in this invention… (1) The gas-liquid mixture is a mixture of millimeter-scale, micrometer-scale, and nanometer-scale gas-liquid of oxygen or ozone. It is milky white or light blue (ozone) in water. It disappears automatically after 90-120 seconds in water. After standing for 10 minutes, the bubbles completely disappear and it becomes a transparent liquid. (2) By utilizing the oxidation-reduction capacity of a large amount of gas (oxygen or ozone) itself, organic matter is stripped from the product surface during cleaning. The generation of bubbles increases the solubility of oxygen or ozone per unit volume, enabling industrial cleaning applications. (3) Each bubble in the gas-liquid mixture carries an electric charge on its surface. The surface charge of the bubble is continuously concentrated as the bubble shrinks. When the bubble shrinks and bursts in the water, the pressure and potential of the charge stored in the bubble are released. Its energy generates strong oxidizing activity. The hydroxyl radicals (strong oxidizing agents) are used to oxidize the organic matter, inorganic matter, particulate matter, etc. on the surface of the product, thereby achieving stripping and elimination. (4) The bubble itself has a large specific surface area, which can increase the contact area between the bubble and the object being cleaned and accelerate the cleaning speed; (5) Some bubbles can generate Brownian motion in water, enabling rapid removal of particulate matter from the product surface; (6) Compared with existing traditional technologies, the equipment of the present invention maximizes the oxidation-reduction capacity of oxygen or ozone, and at the same time utilizes the stripping capacity of hydroxyl radicals, reducing the amount of traditional chemical agents used, or even eliminating their use, thus achieving green and environmentally friendly cleaning. (7) Compared with existing traditional technologies, the present invention uses little or no chemical agents (low concentration), which reduces secondary pollution or damage to the cleaned workpieces and also reduces the input of chemical agents in the cleaning process, greatly reducing costs. It also avoids rework of damaged workpieces, shortens the process flow, and achieves the effect of cost reduction and efficiency improvement. (8) The present invention has been tested and found to be able to achieve a cleaning cycle of 8,000 pieces per hour. After 12 hours of continuous product testing, the results show that the cleaning effect perfectly meets the cleaning requirements and the cleaning cycle is the same as that of cleaning with chemical agents. (9) The equipment of the present invention can be used independently in the cleaning line, and can also be used to modify the existing chemical agent cleaning line, which has good applicability; (10) The equipment of the present invention is simple to operate, easy to maintain, and meets the life requirements of standard equipment in the cleaning industry; (11) In addition, the equipment of the present invention is simple to maintain and has low maintenance costs; (12) The equipment of the present invention operates under normal temperature conditions, avoiding the introduction of high temperature and improving the safety factor.

[0006] Furthermore, the number of primary mixing tank channels is 1 to 6, each channel connecting to one gas-liquid outlet assembly, and each assembly has 6 to 8 outlets. Thus, the gas-liquid outlet assemblies ensure that a set pressure value is maintained within each primary mixing tank channel, and their structure guarantees greater gas solubility in the gas-liquid mixture entering the cleaning tank; the 6 to 8 outlets in each assembly expand the range of gas-liquid output.

[0007] Furthermore, an ultrasonic generator is installed inside the cleaning tank. Here, the ultrasonic generator is used after the product is cleaned with the gas-liquid mixture. Ultrasonic cleaning can perform deep physical cleaning of the residues on the product surface, allowing the residues on the product surface to be quickly removed, achieving high-quality cleaning.

[0008] Furthermore, the liquid injected into the liquid-gas mixing pump is pure water, weakly alkaline water, or weakly acidic water, and the gas injected is ozone, oxygen, or nitrogen. Therefore, different input liquids and gases can be set as needed to adapt to various cleaning applications.

[0009] Furthermore, a water collection tank is connected to the rear end of the cleaning tank. This tank collects the wastewater overflowing from the cleaning tank and is connected to a circulation pipe via a pipeline leading to the liquid input end of the liquid-gas mixing pump. A filter is installed on this circulation pipe. Therefore, the filter removes particulate matter from the wastewater, the water collection tank collects the wastewater, and the circulation pipe recycles the wastewater, reducing liquid input, significantly lowering costs, and providing excellent environmental benefits.

[0010] More specifically, a reagent addition port is provided above the cleaning tank, through which reagents, such as alkaline solutions or surfactants, are added to the cleaning tank. Therefore, the reagent addition port allows for the addition of small amounts of reagent to the cleaning tank as needed, improving convenience; the addition of reagents is designed to meet the cleaning requirements of products with special needs, thus improving the applicability of the equipment of this invention.

[0011] Furthermore, the aforementioned high-efficiency green cleaning equipment is made of 316 stainless steel, fluoropolymer resin, or fluoropolymer-plated material. Therefore, using 316 stainless steel, fluoropolymer resin, or fluoropolymer-plated material to manufacture the equipment of this invention utilizes the inherent properties of the materials to prevent corrosion and ensure the equipment's service life. Simultaneously, depending on the process, when it is necessary to reduce the introduction of metal ions, fluoropolymer resin or fluoropolymer-plated material is selected.

[0012] This invention also provides another efficient and green cleaning device. Compared with the above solution, the difference of this solution is that: the efficient and green cleaning device includes a liquid-gas mixing pump, a cleaning tank, a secondary mixing tank, and at least one primary mixing tank channel. Each primary mixing tank channel includes a primary pressure regulating valve and a primary mixing tank. The pressure in the primary mixing tank within each primary mixing tank channel is regulated by the primary pressure regulating valve within that channel. The input ends of all primary mixing tank channels are connected to the output end of the liquid-gas mixing pump, and the output ends of all primary mixing tank channels are connected to the input end of the secondary mixing tank. The internal pressure of the secondary mixing tank is regulated by a secondary pressure regulating valve. A gas-liquid outlet assembly is provided inside the bottom of the cleaning tank. The output end of the secondary mixing tank is connected to the gas-liquid outlet assembly, and the gas-liquid outlet assembly injects a gas-liquid mixture into the cleaning tank.

[0013] Compared to the previous solution, the advantages of this invention are as follows: This invention utilizes a liquid-gas mixing pump to mix the input gas and liquid, and then inputs the mixture into all primary mixing tank channels. The pressure of each primary mixing tank channel is adjusted using a primary pressure regulating valve, ensuring that the gas-liquid mixture output from the corresponding channel contains sufficiently dense bubbles. The output ends of all primary mixing tank channels are connected to the input end of a secondary mixing tank, sending the gas-liquid mixture from each channel into the secondary mixing tank. The secondary mixing tank uses a secondary pressure regulating valve to internally regulate the pressure, further pressurizing the gas-liquid mixture, resulting in higher bubble density and higher solubility of the gas-liquid mixture. The secondary mixing tank... The gas-liquid mixture is fed into the cleaning tank, making the bubble density in the cleaning tank denser, thus ensuring a better cleaning effect. Furthermore, the pressure in each primary mixing tank channel is adjusted using a primary pressure regulating valve, resulting in different pressures within each channel. Under these conditions, the bubble size and density in the gas-liquid mixture output from each channel differ, ultimately ensuring that the gas-liquid mixture fed into the secondary mixing tank from all primary mixing tank channels has a wider range of bubble sizes to meet different usage requirements. Moreover, the equipment of this invention has a simple structure, excellent energy-saving and environmental protection effects, and extremely low cost. For cleaning applications with higher requirements, this solution can meet the needs.

[0014] Compared with the previous solution, the present invention also has the following structure: The number of primary mixing tank channels is 1 to 6, each primary mixing tank channel is connected to one gas-liquid outlet assembly, and the number of outlets of each gas-liquid outlet assembly is set to 6 to 8.

[0015] An ultrasonic generator is installed inside the cleaning tank.

[0016] The liquid injected into the liquid-gas mixing pump is pure water, weak alkaline water, or weak acid water, and the gas injected is ozone, oxygen, or nitrogen.

[0017] A water collection tank is also connected to the rear end of the cleaning tank. The water collection tank collects the wastewater overflowing from the cleaning tank. The water collection tank is equipped with a circulation pipe that connects to the liquid input end of the liquid-gas mixing pump. A filter device is installed on the circulation pipe.

[0018] A reagent addition port is also provided above the cleaning tank, through which a reagent, which is an alkaline solution or a surfactant, is added into the cleaning tank.

[0019] The aforementioned high-efficiency green cleaning equipment is made of 316 stainless steel, fluororesin, or fluoroplated material.

[0020] The same structure described above achieves the same technical effect as the structure corresponding to the first scheme, and will not be elaborated further here. Attached Figure Description

[0021] Figure 1 This is a simplified structural diagram of Embodiment 1 of the present invention; Figure 2 This is a simplified structural diagram of Embodiment 2 of the present invention; Figure 3 This is a simplified structural diagram of the outlet portion of the gas-liquid outlet assembly. Detailed Implementation

[0022] Example 1: like Figure 1 As shown in this embodiment, the high-efficiency green cleaning equipment includes a liquid-gas mixing pump 1, a cleaning tank 2, and at least one primary mixing tank channel. In this embodiment, the number of primary mixing tank channels is 1 to 6. The number of primary mixing tank channels is designed according to the power of the liquid-gas mixing pump. When the liquid-gas mixing pump can provide sufficient power, the number of primary mixing tank channels is more; conversely, the number is less. More specifically, setting 4 to 6 channels can ensure cleaning efficiency while fully utilizing the working capacity of the liquid-gas mixing pump and reducing wasted power. Each primary mixing tank channel includes a primary pressure regulating valve 3 and a primary mixing tank 4. The pressure in the primary mixing tank 4 within each primary mixing tank channel is regulated by the primary pressure regulating valve 3 within that channel. The input end of all primary mixing tank channels is connected to the output end of the liquid-gas mixing pump 1. A gas-liquid outlet assembly 5 is provided inside the bottom of the cleaning tank 2. The output end of each primary mixing tank channel is connected to the gas-liquid outlet assembly 5. Here, each primary mixing tank channel is connected to one gas-liquid outlet assembly 5, and the number of outlets of each gas-liquid outlet assembly 5 is set to 6 to 8.

[0023] Here, the outlet of the gas-liquid outlet assembly 5 adopts a nozzle structure capable of generating microbubbles. It includes a hollow, cylindrical outer shell 17 and an input cavity 18 coaxially arranged with the outer shell 17 and fixedly fitted at its end. The outer diameter of the portion of the input cavity 18 extending into the outer shell 17 is smaller than the inner diameter of the hollow portion of the outer shell 17. The inside of the input cavity is hollow, and a first through hole 19 is provided on the side wall of the end inserted into the outer shell 17 to conduct through the inside and outside of the input cavity 18. A first pressure relief chamber 23 is formed in the region of the input cavity 18 near the first through hole 19. A plurality of second through holes 20 are provided on the wall surface of the outer shell 17 to conduct through the inside and outside of the outer shell 17. A second pressure relief chamber 24 is formed in the region of the outer shell 17 near the second through holes 20. Four layers of perforated plates 21 are disposed within the input cavity 18, with spacers 22 separating each layer. The apertures of the holes on the four perforated plates 21 are arranged sequentially from the inlet to the interior of the input cavity 18, with the apertures of the small holes on each perforated plate being φ0.8mm, φ1.2mm, φ1.5mm, and φ1.2mm respectively. The outer diameter of the perforated plates and spacers is smaller than the inner diameter of the input cavity 18. Gaps are maintained between the plates in the composite structure of the spacers and perforated plates. The gas-liquid mixture is input from the inlet of the input pipe 18. After passing through the partition plate and the perforated plate, the gas-liquid mixture is divided by the perforated plate. It then enters the first pressure relief chamber 23, and then through the first through hole 19 to enter the second pressure relief chamber 24. During the process of entering the second pressure relief chamber from the first through hole, the gas-liquid mixture is divided again, generating more gas-liquid mixture. Finally, the gas-liquid mixture is discharged from the second through hole of the second pressure relief chamber and enters the cleaning tank for cleaning.

[0024] The gas-liquid outlet assembly 5 injects a gas-liquid mixture into the cleaning tank 2. The front end of the liquid-gas mixing pump 1 is equipped with a pure liquid output tank 12 and a gas storage tank 13. The pure liquid output tank 12, with its flow rate controlled by a control valve 14, is connected to the liquid inlet of the liquid-gas mixing pump 1, providing pure liquid to the pump. The gas storage tank 13, with its gas flow valve 15 and gas switch 16, is connected to the gas inlet of the liquid-gas mixing pump 1, providing gas to the pump. In this embodiment, the pure liquid is pure water, weakly alkaline water, or weakly acidic water, and the injected gas is ozone, oxygen, or nitrogen. Because the device uses a circulation structure to recycle wastewater, the circulating water may contain weak acidity or weak alkalinity; therefore, the liquid entering the liquid-gas mixing pump 1 may be pure water, weakly alkaline water, or weakly acidic water. When the residue on the surface of the product to be cleaned has no obvious acidity or alkalinity, use pure water for cleaning; when the residue on the surface of the product to be cleaned is acidic, add a weak alkaline solution to the reagent addition port and use the weak alkaline water to neutralize the acidity; when the residue on the surface of the product to be cleaned is alkaline, add a weak acidic solution to the reagent addition port and use the weak acidic water to neutralize the alkalinity.

[0025] An ultrasonic generator 6 is installed inside the cleaning tank 2. The ultrasonic generator 6 is located at the bottom of the cleaning tank 2, and there are at least two of them. After the product has been cleaned by the gas-liquid mixture in the cleaning tank, the ultrasonic generator 6 is activated to accelerate the removal of residues from the product surface.

[0026] A reagent addition port is also provided above the cleaning tank 2. Reagents, such as an alkaline solution or a surfactant, are added to the cleaning tank 2 through this port. Here, a low-concentration NaOH solution is used as the alkaline solution, and a standard compound surfactant is used as the surfactant.

[0027] A water collection tank 7 is connected to the rear end of the cleaning tank 2. The water collection tank 7 collects the wastewater overflowing from the cleaning tank 2. The water collection tank 7 is equipped with a circulation pipe 8 connected to the liquid input end of the liquid-gas mixing pump 1. A filter device 9 is installed on the circulation pipe 8. In this embodiment, the filter device 9 is a filter screen with a mesh size of 80-120.

[0028] The aforementioned high-efficiency green cleaning equipment is made of 316 stainless steel, fluororesin, or fluoroplated material. Using stainless steel, fluororesin, or fluoroplated material in the fabrication of this equipment prevents ozone corrosion of the internal structure and pipes. The fluororesin or fluoroplated material also prevents the introduction of metal ions, thus ensuring the service life of the equipment.

[0029] Therefore, this invention can be applied to the cleaning of silicon-based wafers or silicon carbide wafers, achieving harmless production, cost reduction and efficiency improvement, and environmental protection.

[0030] Example 2: like Figure 2 As shown, the difference between this embodiment and Embodiment 1 is that: The high-efficiency green cleaning equipment includes a secondary mixing tank 10 between the primary mixing tank channel and the cleaning tank. Each primary mixing tank channel includes a primary pressure regulating valve 3 and a primary mixing tank 4. The pressure inside the primary mixing tank 4 in all primary mixing tank channels can be set to different or the same value, which is adjusted by regulating the primary pressure regulating valve 3 according to the actual cleaning needs. The input ends of all primary mixing tank channels are connected in parallel to the output end of the liquid-gas mixing pump 1, and the output ends of all primary mixing tank channels are connected to the input end of the secondary mixing tank 10. The internal pressure of the secondary mixing tank 10 is regulated by a secondary pressure regulating valve 11. A gas-liquid outlet assembly 5 is provided in the bottom of the cleaning tank 2. The output end of the secondary mixing tank 10 is connected to the gas-liquid outlet assembly 5, which injects a gas-liquid mixture into the cleaning tank 2.

[0031] This embodiment also has other structures and effects as shown in Embodiment 1, which will be briefly described here.

[0032] The primary mixing tank has 1 to 6 channels, each channel connecting to one gas-liquid outlet assembly 5, and each assembly has 6 to 8 outlets. An ultrasonic generator 6 is installed inside the cleaning tank 2. The liquid injected into the liquid-gas mixing pump 1 is pure water, weakly alkaline water, or weakly acidic water, and the injected gas is ozone, oxygen, or nitrogen. A water collection tank 7 is connected to the rear end of the cleaning tank 2 to collect wastewater overflowing from it. The collection tank 7 is equipped with a circulation pipe 8 connected to the liquid input end of the liquid-gas mixing pump 1, and a filter device 9 is installed on the circulation pipe 8. A reagent addition port is located above the cleaning tank 2, through which reagents, such as alkaline solutions or surfactants, are added to the tank. The high-efficiency green cleaning equipment is made of 316 stainless steel, fluororesin, or fluorinated material.

[0033] The equipment of this invention has been continuously tested for 12 hours and can reach a cleaning cycle of 8,000 pieces per hour. The surface cleanliness test results show that the cleaning effect perfectly meets the cleaning requirements, and the cleaning cycle is the same as that of cleaning with chemical agents.

[0034] Simultaneously, the gas-liquid mixture was tested. The number of bubbles per milliliter of gas-liquid mixture in the cleaning tank was 10 to 50 times that of a typical gas-liquid mixture (1 million bubbles / mL). The ratio of micron-sized bubbles to nano-sized bubbles in the gas-liquid mixture was approximately 1 / 10 to 1 / 100 (in liquids, bubbles with a diameter of less than 100 μm are called micron-sized bubbles, and bubbles with a diameter of less than 100 nm are called nano-sized bubbles).

[0035] The device of the present invention has the following advantages: 1. Significantly reduces the use of high-concentration, highly polluting chemical cleaning solutions, resulting in excellent environmental protection and cost reduction effects; 2. This invention provides room temperature cleaning, eliminating the need for heating equipment and high-temperature gas, thus significantly reducing costs; 3. Compared with traditional multi-chemical tank cleaning equipment, it greatly reduces the space required, the number of chemical cleaning tanks, and the length of the production line; 4. The gas is prepared using oxygen or ozone from air, achieving energy conservation and environmental protection; 5. Compared with traditional chemical reagent cleaning, the equipment of this invention has a higher cost performance; 6. The equipment of this invention is simple to operate and causes no damage to the workpiece; 7. By utilizing circulation pipes and filtration devices, water can be circulated and filtered, resulting in excellent water-saving effects.

[0036] In summary, this invention reduces the factory's wastewater treatment costs and equipment investment costs, fundamentally solving the practical problems of green, clean, and efficient cleaning processes.

[0037] Finally, it should be emphasized that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A high-efficiency, green cleaning device, characterized in that, It includes a liquid-gas mixing pump (1), a cleaning tank (2), a secondary mixing tank (10) and at least one primary mixing tank channel. Each primary mixing tank channel includes a primary pressure regulating valve (3) and a primary mixing tank (4). The pressure in the primary mixing tank (4) in each primary mixing tank channel is regulated by the primary pressure regulating valve (3) in the channel. The pressure of each primary mixing tank channel is adjusted by the primary pressure regulating valve (3) so that the pressure in the primary mixing tank (4) in each channel is different. Under this condition, the size and density of the bubbles in the gas-liquid mixture output by each channel are different. The input end of all the primary mixing tank channels is connected to the output end of the liquid-gas mixing pump (1), and the output end of all the primary mixing tank channels is connected to the input end of the secondary mixing tank (10). The secondary mixing tank (10) is internally pressure regulated by a secondary pressure regulating valve (11). A gas-liquid outlet assembly (5) is provided inside the bottom of the cleaning tank (2). The output end of the secondary mixing tank (10) is connected to the gas-liquid outlet assembly (5). The gas-liquid outlet assembly (5) includes a hollow cylindrical shell and an input tube cavity coaxially arranged with the shell and fixed at the end. The input tube cavity is hollow inside, and a first through hole is provided on the side wall of one end inserted into the shell to conduct through the inside and outside of the input tube cavity. A first pressure relief chamber is formed in the area of ​​the input tube cavity and near the first through hole. Several second through holes are provided on the wall of the shell to conduct through the inside and outside of the shell. A second pressure relief chamber is formed in the area of ​​the shell and near the second through hole. Four layers of perforated plates are provided in the input tube cavity. Each layer of perforated plates is separated by a partition plate. The hole diameters on the four perforated plates are arranged in the order from the inlet of the input tube cavity to the inside of the input tube cavity. The hole diameters of the small holes on each perforated plate are set sequentially as follows: φ 0.8mm, φ 1.2mm, φ 1.5mm, φ 1.2mm, the outer diameter of the perforated plate and the spacer is smaller than the inner diameter of the inlet lumen; The gas-liquid outlet assembly (5) injects a gas-liquid mixture into the cleaning tank (2); a water collection tank (7) is also connected to the rear end of the cleaning tank (2), the water collection tank (7) collects the wastewater overflowing from the cleaning tank (2), the water collection tank (7) is provided with a circulation pipe (8) connected to the liquid input end of the liquid-gas mixing pump (1), and a filter device (9) is provided on the circulation pipe (8).

2. The high-efficiency green cleaning equipment according to claim 1, characterized in that, The primary mixing tank channel The number is 1 to 6, and each of the primary mixing tank channels is connected to one of the gas-liquid outlet components (5). The number of outlets of each gas-liquid outlet component (5) is set to 6 to 8.

3. The high-efficiency green cleaning equipment according to claim 1, characterized in that, An ultrasonic generator (6) is installed in the cleaning tank (2).

4. The high-efficiency green cleaning equipment according to claim 1, characterized in that, The liquid injected into the liquid-gas mixing pump (1) is pure water, weak alkaline water or weak acid water, and the gas injected is ozone or oxygen or nitrogen.

5. The high-efficiency green cleaning equipment according to claim 1, characterized in that, A reagent addition port is provided above the cleaning tank (2). A reagent, which is an alkaline solution or a surfactant, is added into the cleaning tank (2) through the reagent addition port.

6. The high-efficiency green cleaning equipment according to claim 1, characterized in that, The aforementioned high-efficiency green cleaning equipment is made of 316 stainless steel, fluororesin, or fluoroplated material.

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