Substrate baking furnace with high sealing property

Abstract

The application discloses a substrate baking furnace with high sealing performance, which comprises a baking furnace body, a plurality of door leaf units movably installed on one side surface of the baking furnace body, door leaf end blocks fixedly connected to two ends of the door leaf units, the door leaf end blocks fixedly installed on two ends of a door leaf supporting rod, a door leaf sealing plate installed on the door leaf supporting rod, the door leaf end blocks slidably installed on corresponding swing arm connecting blocks through sliding bolts, upper swing arms and lower swing arms hingedly connected to the swing arm connecting blocks, driving air cylinders hingedly connected to the upper swing arms or the lower swing arms and hingedly supported on the baking furnace body, and a door leaf sealing plate corresponding to each door leaf unit, each door leaf sealing plate installed on the baking furnace body through a sealing and heat insulation pad and having a cavity heat sealing strip. The substrate baking furnace is used for manufacturing glass substrates for flat panel displays, can effectively eliminate deformation of the opening and closing door leaf caused by thermal expansion and cold contraction, has high sealing performance and long service life.

Description

Technical Field

[0001] This invention relates to equipment for manufacturing glass substrates used in flat panel displays such as liquid crystal and plasma displays, and more particularly to an oven for curing photoresist coating on the surface of glass substrates, specifically a high-sealing inlet and outlet door and window structure for the substrate oven. Background Technology

[0002] The key factor affecting the baking quality of glass substrates is the stability of the baking temperature. Uneven baking caused by low or fluctuating heating temperatures in the baking oven prevents the solvent in the photoresist film on the glass substrate from evaporating sufficiently. In under-baked areas, the solvent does not evaporate completely, and during exposure and development, the unexposed parts are dissolved, forming excess adhesive or causing pattern deformation. Over-baking, on the other hand, causes the photoresist film to warp and harden, resulting in the pattern not showing up during development or leaving a base film. Uneven baking temperatures can also cause thermal stress on the glass substrate due to temperature gradients, leading to cracking or breakage of the substrate glass and reducing the yield of baked products.

[0003] Existing glass substrate baking ovens are large chambers capable of accommodating multiple layers of glass substrates, with length, width, and height reaching 4-6 meters or even greater. Several operable door / window units are movably installed on one side of the oven. Inside the baking chamber, glass racks are installed to hold multiple layers of glass substrates for baking; each layer of glass substrate on the rack corresponds to a door / window unit. The number of door / window units on the baking chamber is typically 30-40 layers, allowing for alternating feeding and removal of different layers of glass substrates during operation, thus improving baking efficiency.

[0004] This structure results in each door / window unit being a long, thin, elongated opening door. Obviously, such a structure has poor stability, making it difficult to guarantee opening control and sealing performance under thermal expansion and contraction. Due to the significant temperature difference between the inner and outer sides of the door, the door body will warp and deform under the influence of thermal expansion and contraction and temperature changes. The bending deformation of the sealing plate will inevitably create gaps between it and the sealing surface of the oven window, and these gaps are inconsistent along their length. On the one hand, the gaps between the door sealing plate and the perimeter of the oven window will cause leakage of baking heat in the baking cavity, making it difficult to achieve the ideal baking temperature; on the other hand, the inconsistent leakage gaps along the length of the sealing plate will cause temperature fluctuations within the baking cavity, resulting in uneven baking of the glass substrate.

[0005] Thermal expansion and contraction of the door panel can also cause compression damage to the opening and closing drive mechanisms at both ends of the door panel unit, leading to damage to the opening and closing drive or inaccurate opening and closing actions. Since each door panel unit on the furnace body is a long and thin strip, opening and closing drive mechanisms are symmetrically arranged at both ends of the door panel unit. The current opening and closing drive mechanism is a single pendulum structure composed of a drive cylinder. In this structure, the door panel approaches and leaves the furnace body window in a swinging manner. Its drawback is that when the door panel is closed, the approach speed and contact pressure of the upper and lower edges of the door panel are different, and it will adhere to the periphery of the furnace body window with an uneven sealing compression force, resulting in inconsistent sealing on the upper and lower sides of the door panel, especially prone to leakage on the long side.

[0006] Currently, the sealing between the door unit and the furnace inlet / outlet windows is achieved through rubber sealing strips installed on the furnace body. These solid sealing strips lack sufficient elasticity, failing to ensure a tight seal at the door sealing area, directly impacting the door's sealing performance. Furthermore, the existing sealing strips are directly installed around the high-temperature furnace windows. Prolonged operation in a high-temperature environment causes the rubber seals to harden, leading to deformation and reduced compressive strength, resulting in decreased sealing tightness. Simultaneously, the reduced elasticity of the seals under high temperatures makes them prone to heat leakage within the baking chamber. Summary of the Invention

[0007] In view of the above-mentioned shortcomings of the existing technology, the technical problem to be solved by the present invention is to provide a substrate baking oven with high sealing performance, which can not only effectively eliminate the deformation of the door caused by thermal expansion and contraction, but also has excellent sealing performance and long service life.

[0008] To solve the above-mentioned technical problems, the present invention provides a substrate baking oven with high sealing performance, comprising a baking oven body, on one side of which a plurality of door leaf units are movably installed. Each door leaf unit has a door leaf end block fixedly connected to both ends, and the door leaf end blocks are respectively fixedly installed at both ends of a door leaf support rod. A door leaf sealing plate is installed on the door leaf support rod. The door leaf end blocks are slidably installed on corresponding swing arm connecting blocks via sliding bolts. An upper swing arm and a lower swing arm are hinged to the swing arm connecting blocks, and a drive cylinder is hinged to the upper or lower swing arm, the drive cylinder being hinged to the baking oven body. Each door leaf unit corresponds to a door leaf seal, and each door leaf seal is installed on the baking oven body via a sealing heat insulation pad. The door leaf seal is a heat-sealing strip with a cavity.

[0009] In the above structure, since the door leaf unit is not a single plate structure, but rather the door leaf sealing plate for closing and sealing is installed on the door leaf support rod, this split structure effectively avoids the closing gap caused by warping deformation of the single sealing plate due to thermal expansion and contraction. In the structure of this invention, when the door leaf unit is affected by temperature fluctuations and changes, the door leaf sealing plate can extend to both ends relative to the door leaf support rod and remain straight, thereby ensuring a uniform and tight seal. Simultaneously, door leaf end blocks are symmetrically installed at both ends of the door leaf support rod. This structure allows for symmetrical installation of drive units at both ends of the door leaf unit, which is beneficial for achieving synchronous operation of the entire slender strip door leaf.

[0010] Since the door leaf end blocks installed at both ends of the door leaf support rod are slidably installed on the swing arm connecting block by sliding bolts, the sliding bolts can not only provide the bonding force between the door leaf end blocks and the swing arm connecting block, but also ensure a slight relative slippage between the door leaf end blocks and the swing arm connecting block. In this way, when the door leaf support rod changes length due to thermal expansion and contraction, the relative slippage between the door leaf end blocks and the swing arm connecting block can compensate for and eliminate this length change. It will not cause warping deformation of the door leaf and support rod due to temperature changes, nor will it cause squeezing damage to the opening and closing drive mechanism at both ends due to this length change.

[0011] Because an upper and lower swing arm are hinged to the swing arm connecting block, and a drive cylinder supported on the furnace body is hinged to either the upper or lower swing arm, the swing arm connecting block, the upper swing arm, the lower swing arm, and the furnace body can form a parallel four-bar linkage. This allows the door sealing surface, fixedly connected to the swing arm connecting block, to evenly and synchronously approach the inlet / outlet window position on the furnace body, ensuring a balanced and tight fit between the door unit's sealing plate and the edge of the inlet / outlet window, resulting in a more stable and reliable seal. The drive cylinder hinged to the swing arm can achieve a large translational opening and closing motion of the door unit with a relatively small telescopic displacement.

[0012] Because the door panel seal uses a cavity-filled sealing strip, it effectively increases the strip's elasticity and the amount of sealing deformation. This not only increases the sealing surface area and stabilizes the sealing effect, but also effectively compensates for and avoids the adverse effects of door panel deformation on the sealing performance. It is particularly suitable for reliable sealing of slender, elongated door panels. Simultaneously, the cavity within the sealing strip enhances its heat-insulating effect. Therefore, sealing strips with sealing cavities significantly improve sealing quality and reliability, thereby stabilizing the baking quality of the oven.

[0013] Because the door seal is installed on the oven body via a heat-insulating gasket, the high temperature of the oven body hardens the seal, leading to deformation and compression failure. High temperatures also weaken the elasticity of the sealing ring, making it difficult to return to its original shape. This weakened elasticity also reduces the tightness of the sealing strip, increasing the risk of leakage. This invention, by installing a heat-insulating gasket between the door seal and the oven body, blocks the impact of the oven's high temperature on the door seal. This not only ensures the elasticity and compressive strength of the seal but also effectively slows down its aging process, stabilizing sealing performance and extending its service life.

[0014] In a preferred embodiment of the present invention, the door leaf unit includes door leaf end blocks at both ends, and two parallel door leaf support rods are fixedly connected between the two door leaf end blocks. The door leaf sealing plate is installed on the door leaf support rods. The sliding bolt includes a bolt and a nut; the door leaf end block or the swing arm connecting block is provided with a sliding waist hole, through which the bolt for connecting the door leaf end block and the swing arm connecting block passes. During installation, the bolt has a set torque value. This provides reliable support for the door leaf unit and also enables the door leaf unit to slide and extend.

[0015] In another preferred embodiment of the present invention, the sliding bolt includes a bolt and a nut; a sliding slot is provided on the door leaf end block or the swing arm connecting block, through which the bolt for connecting the door leaf end block and the swing arm connecting block passes, and a spring or elastic sleeve is fitted on the bolt. This maintains stable friction and elastic force, achieving reliable connection and relative sliding.

[0016] In a further embodiment of the present invention, the hinged ends of the upper and lower swing arms are hinged to a swing arm hinge support, which is fixedly mounted on the oven body via an opening and closing mechanism mounting seat; the piston rod of the drive cylinder is hinged to the piston rod end via a piston rod hinge connector, and the cylinder body of the drive cylinder is fixedly mounted on the oven body via the opening and closing mechanism mounting seat; the upper swing arm, lower swing arm, and swing arm connecting block mounted on the oven body constitute a parallelogram mechanism. This allows the door unit to fit snugly against the oven window in a translational manner, resulting in uniform sealing pressure and excellent sealing effect.

[0017] In a preferred embodiment of the present invention, the door leaf sealing plate is located on the heat-receiving side of the door leaf unit; the middle part of the door leaf sealing plate is fixedly installed at the middle position of the door leaf support rod, and both ends of the door leaf sealing plate extend freely in the longitudinal direction. This design maintains the straightness of the door leaf sealing plate, has a simple structure, and provides good sealing performance.

[0018] In another preferred embodiment of the present invention, the door leaf sealing plate is located on the heat-receiving side of the door leaf unit; the door leaf sealing plate includes a plurality of sealing plates, each of which is mounted on a door leaf support rod. This ensures the straightness of the door leaf sealing plate and reliable sealing.

[0019] In a further embodiment of the present invention, the body of the door seal has a sealing cavity, in which a sealing cavity transverse rib is provided; a sealing protrusion is provided on the sealing surface of the door seal, and a mounting groove is provided at the mounting end of the door seal. This ensures good sealing elasticity and reliable sealing performance.

[0020] In a preferred embodiment of the present invention, the door leaf seal is mounted on a sealing and heat-insulating pad via a folded mounting plate and an insert mounting plate; the folded mounting plate has a limiting folded edge on its body, and the insert mounting plate has an inclined insert edge. The structure is simple and installation is convenient.

[0021] In a preferred embodiment of the present invention, the door seal is made of silicone rubber or fluororubber, and the sealing and heat insulation pad is made of mica board. This effectively improves the heat resistance of the door seal and extends its service life. Attached Figure Description

[0022] The highly airtight substrate baking oven of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0023] Figure 1 This is a perspective structural diagram of a specific embodiment of the substrate baking oven with high sealing performance of the present invention;

[0024] Figure 2 yes Figure 1 A magnified view of a section of the side panel of the baking oven door;

[0025] Figure 3 yes Figure 2 3D structural diagram of the middle door seal;

[0026] Figure 4 yes Figure 2 3D structural diagram of the central sealing heat insulation pad;

[0027] Figure 5 yes Figure 2 Partial view of the installation structure of the middle door leaf seal;

[0028] Figure 6 yes Figure 5 Partial cross-sectional structural diagram of the middle door leaf seal;

[0029] Figure 7 yes Figure 5 3D structural diagram of the folded mounting plate;

[0030] Figure 8 yes Figure 5 A three-dimensional structural diagram of the inserted mounting plate;

[0031] Figure 9 yes Figure 23D structural diagram of the middle door panel unit and drive mechanism;

[0032] Figure 10 yes Figure 9 Enlarged structural diagram of the middle door drive mechanism;

[0033] Figure 11 yes Figure 10 3D structural diagram of the end block of the middle door leaf;

[0034] Figure 12 yes Figure 10 3D structural diagram of the middle swing arm connecting block;

[0035] Figure 13 yes Figure 10 A cross-sectional view of one embodiment of the sliding bolt;

[0036] Figure 14 yes Figure 10 A cross-sectional view of another embodiment of the sliding bolt;

[0037] Figure 15 yes Figure 10 A cross-sectional view of another embodiment of the sliding bolt;

[0038] Figure 16 yes Figure 2 A three-dimensional structural diagram of one embodiment of the middle door unit (with the door sealing plate removed);

[0039] Figure 17 yes Figure 16 A 3D view of the middle door support rod;

[0040] Figure 18 It is installed at Figure 16 A three-dimensional view of the door leaf sealing plate on the door leaf support rod shown;

[0041] Figure 19 yes Figure 2 A three-dimensional structural diagram of another implementation of the middle door unit (facing the heat-generating side);

[0042] Figure 20 yes Figure 19 A 3D structural diagram of the door panel without the sealing plate.

[0043] In the diagram, 1—baking oven body, 2—heater, 3—blower, 4—oven body cabinet, 5—drive cylinder, 6—door seal, 7—door end block, 8—swing arm connecting block, 9—door unit, 10—sealing and heat insulation pad, 11—folded mounting plate, 12—insertion mounting plate, 13—sealing ridge, 14—sealing cavity rib, 15—mounting slot, 16—opening and closing mechanism mounting seat, 17—piston rod hinge connector, 18—lower swing arm, 19—upper swing arm, 20—cylinder hinge support, 21—door support rod, 22—support rod screw hole, 23—door outer cover plate, 24—door sealing plate, 25—sealing plate screw hole, 26—swing arm hinge support, 27—oven body window partition, 28—sliding waist hole, 29—sliding bolt, 30—bolt, 31—washer, 32—nut, 33—spring, 34—elastic sleeve. Detailed Implementation

[0044] like Figure 1 The illustrated glass substrate baking oven features a high degree of airtightness. It comprises an oven body 1 and a base cabinet 4. The overall shape of the oven is a three-dimensional cabinet structure, with dimensions of 4500mm × 3500mm × 6200mm (length × width × height). The oven body 1 is fixedly mounted on the base cabinet 4. A 40-layer glass rack is installed within the baking cavity of the oven body 1. The bottom cavity of the base cabinet 4 houses a volatile agent collector, a volatile agent condensation and purification device, a heat exchange device, a fan, and an electrical control system. Several sets of heaters 2 and blowers 3 are installed on the right side of the oven body 1. The heaters 2 are electric heaters. Preheating air inlets and maintenance windows are also provided on the side of the oven body 1. Several top lifting brackets are installed on the top of the oven body 1 to facilitate the installation and maintenance of the equipment inside the oven. On the front side (feeding and unloading side) of the baking oven body 1, there are several door units 9 for inputting or removing glass substrates (the lower three door units have been removed in the figure). Each door unit 9 is arranged horizontally and parallel to each other. Each door unit 9 is 4000mm long and 120mm high, forming a long and narrow door. Door opening and closing drive mechanisms are provided at both ends of each door unit 9.

[0045] like Figure 2 As shown, several oven window partitions 27 are installed parallel to each other in the front chamber of the baking cavity of the baking oven body 1. The adjacent oven window partitions 27 and the window edges of the baking oven body 1 form the inlet and outlet windows of the baking oven. Each inlet and outlet window corresponds to a glass holder grid in the baking cavity. Glass substrates are fed into or taken out of the corresponding glass holder grid through the inlet and outlet windows. A sealing heat insulation pad 10 is fixedly installed around the outer perimeter of each inlet and outlet window, and a door seal 6 is fixedly installed on the sealing heat insulation pad 10.

[0046] like Figure 3 , Figure 4As shown, the sealing and heat insulation pad 10 has a slender rectangular frame structure, the shape of which matches the shape of the door leaf unit. The sealing and heat insulation pad 10 is made of mica board, or it can be made of commonly used heat-insulating materials such as foam board or fiberglass board. A door leaf seal 6, also in the shape of a slender rectangular frame, is fixedly installed on the outer surface of the sealing and heat insulation pad 10. The door leaf seal 6 is made of silicone rubber or fluororubber, or it can be made of other heat-resistant silicone materials.

[0047] like Figure 5 , Figure 6 , Figure 7 and Figure 8 As shown, the sealing side of the door leaf seal 6 is a semi-cylindrical surface. Several strip-shaped sealing ridges 13 are arranged along the longitudinal direction on this semi-cylindrical sealing surface. The cylindrical surface structure increases the amount of sealing deformation and compression, while the sealing ridges 13 increase the sealing contact pressure and tightness, thereby enhancing and stabilizing the sealing effect. A mounting groove 15 with an opening facing the inlet / outlet window is provided on the mounting side of the door leaf seal 6. A sealing cavity is provided on the body of the door leaf seal 6. This sealing cavity enhances the elasticity of the sealing strip and also provides a certain degree of heat insulation. A sealing cavity transverse rib 14 is also provided in the sealing cavity of the door leaf seal 6. This sealing cavity transverse rib 14 improves the stability of sealing deformation.

[0048] The folded mounting plate 11 has a limiting folded edge on its body; the insertion mounting plate 12 has an inclined insertion edge. During installation of the door seal 6, the limiting folded edge on the folded mounting plate 11 can calibrate and control the installation position of the door seal 6, while the insertion edge of the insertion mounting plate 12 precisely inserts into the mounting slot 15 of the door seal 6. The folded mounting plate 11 and the insertion mounting plate 12 are fixedly mounted on the sealing and heat insulation pad 10 by connecting screws. This installation structure allows for accurate installation of the door seal 6 and facilitates its installation and removal. The folded mounting plate 11 and the insertion mounting plate 12 are made of heat-resistant stainless steel.

[0049] like Figure 9 and Figure 10 As shown, the door leaf unit 9 adopts a symmetrical drive opening and closing structure at both ends, and door leaf end blocks 7 are fixedly connected to both ends. The door leaf end blocks 7 can be slidably installed on the corresponding swing arm connecting blocks 8 by means of sliding bolts 29. The sliding bolts 29 use friction and elastic force to enable the two parts to bear a certain mutual connection force, keeping them relatively fixed, and to slide relative to each other under a certain rated force.

[0050] An upper swing arm 19 and a lower swing arm 18 are hinged to the swing arm connecting block 8. The other ends of the upper swing arm 19 and the lower swing arm 18 are hinged to the swing arm hinge support 26, which is fixedly installed on the opening and closing mechanism mounting base 16. The opening and closing mechanism mounting base 16, which has a plate-like structure, is fixedly installed on the baking oven body 1. A drive cylinder 5 is hinged to the opening and closing mechanism mounting base 16. The cylinder body of the drive cylinder 5 is hinged to the opening and closing mechanism mounting base 16 via a cylinder hinge support 20. The piston rod end of the drive cylinder 5 is hinged to the lower swing arm 18 via a piston rod hinge connector 17; of course, the piston rod end of the drive cylinder 5 can also be hinged to the upper swing arm 19 via the piston rod hinge connector 17. The upper swing arm 19, the lower swing arm 18, and the swing arm connecting block 8, which are hinged to the baking oven body 1, form a parallelogram mechanism. This ensures the translational opening and closing of the door unit 9, so as to ensure its sealing when closed.

[0051] like Figure 11 and Figure 12 As shown, the door leaf end block 7 includes a mounting end and a connecting end, with a threaded hole provided on the connecting end. The swing arm connecting block 8 includes a hinged end and a connecting end. The upper swing arm 19 and the lower swing arm 18 are hinged to the swing arm connecting block 8, and the connecting end of the swing arm connecting block 8 is provided with a sliding waist hole 28 for the through bolt 30. Of course, the sliding waist hole 28 can also be provided on the door leaf end block 7, in which case the threaded hole for connection is provided on the swing arm connecting block 8.

[0052] Figure 13 This is a structural form in which the door leaf end block 7 and the swing arm connecting block 8 are slidably connected. The bolt 30 passes through the sliding slot 28 on the swing arm connecting block 8 and is tightened into the threaded hole on the door leaf end block 7. A washer 31 and a nut 32 are provided on the protruding end of the bolt 30 to form a locking structure. The rated tightening torque of the bolt 30 and nut 32 is determined based on the friction between the sliding surfaces of the door leaf end block 7 and the swing arm connecting block 8. Both the initial tightening and final tightening of the bolt 30 and nut 32 are performed using a torque wrench.

[0053] Figure 14 This is another structural form in which the door leaf end block 7 and the swing arm connecting block 8 can be slidably connected. A bolt 30 passes through the sliding slot 28 on the swing arm connecting block 8 and the through hole on the door leaf end block 7, and a nut 32 is screwed onto it. A washer 31 is placed between the nut 32 and the door leaf end block 7. A spring 33, which is a cylindrical helical compression spring, is also fitted onto the bolt 30. The protruding end of the bolt 30 should also be equipped with an anti-loosening locking structure, such as a cotter pin or anti-loosening double nut. Similarly, the rated tightening torque of the bolt 30 and nut 32 should be determined according to the friction between the sliding surfaces of the door leaf end block 7 and the swing arm connecting block 8. The initial tightening and final tightening of the bolt 30 and nut 32 are also completed using a torque wrench.

[0054] Figure 15This is another structural form in which the door leaf end block 7 and the swing arm connecting block 8 can be slidably connected. This structure is similar to the one described above. Figure 14 The difference in the structure shown is that an elastic sleeve 34 is fitted on the outside of the bolt 30. The material of the elastic sleeve 34 can be rubber, polyurethane foam, or polyurethane elastomer, etc.

[0055] like Figure 16 As shown, two parallel door support rods 21 are fixedly connected to door end blocks 7 at both ends. Support rod screw holes 22 are provided on the side of the door support rods 21 facing the baking oven cavity (heated side). Door outer cover plates 23 are fixedly installed on the outer sides of the two door support rods 21. The door support rods 21 are made of steel square tubing, while the door sealing plate 24 is made of high-temperature resistant stainless steel.

[0056] exist Figure 16 , 17 and Figure 18 In the embodiment shown, the door sealing plate 24 is fixed to the door support rod 21 by a screw passing through the screw hole in the middle of the plate. The two ends of the door sealing plate 24 can extend freely to avoid bending deformation caused by the asynchronous thermal expansion and contraction of the door sealing plate 24 and the door support rod 21.

[0057] Figure 19 , 20 The embodiment shown differs from the above-described embodiments in that the door leaf sealing plate 24 is not a single plate structure, but is composed of multiple sealing plates, with micro-gaps between each sealing plate, or staggered overlap. Each sealing plate may also be connected to the door leaf support rod 21 only in the middle of the plate by connecting screws.

[0058] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. Many modifications and variations can be made based on the content of this specification. The selection and detailed description of these embodiments are intended to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize it. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

Claims

1. A substrate baking oven with high sealing performance, comprising a baking oven body (1), wherein a plurality of door panels (9) are movably mounted on one side of the baking oven body (1), characterized in that: Door leaf unit (9) is fixedly connected to two ends of door leaf end blocks (7), and door leaf end blocks (7) are fixedly installed at both ends of door leaf support rod (21). Door leaf sealing plate (24) is installed on door leaf support rod (21). Door leaf end blocks (7) are slidably installed on corresponding swing arm connecting blocks (8) by sliding bolts (29). Upper swing arm (19) and lower swing arm (18) are hinged on swing arm connecting blocks (8). Drive cylinder (5) is hinged on the upper swing arm (19) or lower swing arm (18). Drive cylinder (5) is hinged on baking oven body (1). Each door leaf unit (9) has a corresponding door leaf seal (6). Each door leaf seal (6) is installed on baking oven body (1) by sealing heat insulation pad (10). The door leaf seal (6) is a sealing strip with cavity.

2. The substrate baking oven with high sealing performance according to claim 1, characterized in that: The door unit (9) includes door end blocks (7) at both ends, and two parallel door support rods (21) are fixedly connected between the two door end blocks (7). The door sealing plate (24) is installed on the door support rods (21).

3. The substrate baking oven with high sealing performance according to claim 1 or 2, characterized in that: The sliding bolt (29) includes a bolt (30) and a nut (32); the door leaf end block (7) or the swing arm connecting block (8) is provided with a sliding waist hole (28), and the bolt (30) for connecting the door leaf end block (7) and the swing arm connecting block (8) passes through the sliding waist hole (28). When installed, the bolt (30) has a set torque value.

4. The substrate baking oven with high sealing performance according to claim 1 or 2, characterized in that: The sliding bolt (29) includes a bolt (30) and a nut (32); the door leaf end block (7) or the swing arm connecting block (8) is provided with a sliding waist hole (28), the bolt (30) for connecting the door leaf end block (7) and the swing arm connecting block (8) passes through the sliding waist hole (28), and a spring (33) or elastic sleeve (34) is fitted on the bolt (30).

5. The substrate baking oven with high sealing performance according to claim 1, characterized in that: The hinged ends of the upper swing arm (19) and the lower swing arm (18) are hinged on the swing arm hinge support (26), which is fixedly installed on the baking oven body (1) by the opening and closing mechanism mounting seat (16); the piston rod of the driving cylinder (5) is hinged to the piston rod end by the piston rod hinge connector (17), and the cylinder body of the driving cylinder (5) is fixedly installed on the baking oven body (1) by the opening and closing mechanism mounting seat (16); the upper swing arm (19), the lower swing arm (18) and the swing arm connecting block (8) installed on the baking oven body (1) constitute a parallelogram mechanism.

6. The substrate baking oven with high sealing performance according to claim 1, characterized in that: The door sealing plate (24) is located on the hot side of the door unit (9), which is the side facing the baking oven cavity; the middle part of the door sealing plate (24) is fixedly installed at the middle position of the door support rod (21), and the two ends of the door sealing plate (24) extend freely to both ends along the length direction.

7. The substrate baking oven with high sealing performance according to claim 1, characterized in that: The door sealing plate (24) is located on the hot side of the door unit (9), which is the side facing the baking oven cavity; the door sealing plate (24) includes several sealing plates, each of which is installed on the door support rod (21).

8. The substrate baking oven with high sealing performance according to claim 1, characterized in that: The body of the door seal (6) has a sealing cavity, and a sealing cavity transverse rib (14) is provided in the sealing cavity; a sealing protrusion (13) is provided on the sealing surface of the door seal (6), and an installation slot (15) is provided at the installation end of the door seal (6).

9. The substrate baking oven with high sealing performance according to claim 1, characterized in that: The door seal (6) is installed on the sealing and heat insulation pad (10) by means of a folded mounting plate (11) and an insertion mounting plate (12); the folded mounting plate (11) has a limiting folded edge on its body, and the insertion mounting plate (12) has an inclined insertion edge.

10. The substrate baking oven with high sealing performance according to claim 1, characterized in that: The door seal (6) is made of silicone rubber or fluororubber, and the sealing heat insulation pad (10) is a mica plate.

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