一种压电驱动式高带宽微转角型振动台及其组装方法
By combining an integrated flexible hinge and a piezoelectric stack, the problems of low stiffness and large rotation center drift of existing high-frequency angular displacement vibration tables are solved, realizing high bandwidth and high precision micro-rotation vibration, with a large installation area and high load-bearing capacity, and simplifying the processing and assembly process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- XIAN AIKE INTELLIGENT TECH CO LTD
- Filing Date
- 2024-05-15
- Publication Date
- 2026-07-17
AI Technical Summary
Existing high-frequency angular displacement vibration tables suffer from problems such as low system stiffness, insufficient load-bearing capacity, large rotation center drift, and complex manufacturing, making it difficult to achieve high bandwidth and high precision angular displacement vibration.
The piezoelectric-driven high-bandwidth micro-rotation vibration table, composed of integrated flexible hinges, piezoelectric stacks, wedge-shaped adjustment blocks, compression springs, sliders, stops, and preload screws, achieves high-rigidity, frictionless, and backlash-free rotational motion through the combination of flexible hinge bearings and piezoelectric stacks. The wedge-shaped adjustment blocks and helical compression springs ensure the initial consistency of the piezoelectric stacks and the uniformity of the preload.
It achieves micro-rotation vibration with high frequency response, low shaft drift, large installation area and high load capacity, improves the fundamental frequency and vibration accuracy of the system, and simplifies the processing and assembly process.
Smart Images
Figure CN118558570B_ABST