Clean room particle monitoring device

Abstract

This invention discloses a cleanroom microparticle monitoring device, comprising: a drive platform, positioning suction cups, adsorption rollers, a winding shaft, a support belt, adjusting arms, a lifting device, a fixed plate, and a monitor. The drive platform supports the entire device and provides power for its movement. The positioning suction cups are retractably mounted at the bottom of the drive platform. The adsorption rollers are fixed on both sides of the drive platform, and multiple circularly distributed vacuum suction cups controlled by a vacuum pump are mounted on the rollers. The winding shaft is rotatably mounted on the drive platform and wound with the support belt. The adjusting arms are fixed on both sides of the winding shaft, and a rotating motor is mounted on one side. The lifting device is fixed between the adjusting arms, and a fixed plate is fixedly connected to the support belt at the top. The monitor is fixed on the top of the fixed plate. Compared with the prior art, this invention allows for arbitrary adjustment of height and position according to needs, improving the particle monitoring effect of the environment and accurately obtaining the air conditions in the cleanroom.

Description

Technical Field

[0001] This invention relates to the field of microparticle monitoring technology, and more specifically, to a cleanroom microparticle monitoring device. Background Technology

[0002] Cleanroom particulate matter monitoring instruments are used to monitor the dust content in the air, measuring the concentration of inhalable particulate matter, respirable dust, total dust concentration, and dust mass concentration (mg / m3). The basic principle is that the detection laser light from an optical sensor is scattered by dust particles and received by a photosensitive element, generating a pulse signal. This pulse signal is output, amplified, and then digitally processed. By comparing it with a standard particle signal, the comparison result is expressed using different parameters. However, traditional particle measuring instruments have fixed installation positions and monitoring ranges, failing to accurately obtain the air conditions in cleanrooms. Furthermore, because their height and position cannot be adjusted arbitrarily according to needs, their particle monitoring effect is poor. Therefore, it is necessary to provide a cleanroom particulate matter monitoring device to solve the problems mentioned in the background technology. Summary of the Invention

[0003] To achieve the above objectives, the present invention provides the following technical solution: a cleanroom microparticle monitoring device, comprising:

[0004] The drive platform supports the entire device and provides power for its movement.

[0005] Two positioning suction cups are symmetrically distributed and can be extended and retracted at the bottom of the drive platform;

[0006] Adsorption rollers are fixed on both sides of the drive platform, and multiple circularly distributed vacuum suction cups are provided on the adsorption rollers. The vacuum suction cups are controlled by a vacuum pump.

[0007] The winding shaft is rotated and mounted on the drive platform;

[0008] Support strip, wound around the winding shaft;

[0009] Two adjusting arms are symmetrically distributed and fixed on both sides of the winding shaft, and a rotating motor is provided at the top of one adjusting arm;

[0010] The lifting device is fixed between the adjusting arms and is fixedly connected to the rotating motor;

[0011] A fixed plate is installed on top of the lifting device and is fixedly connected to the support belt;

[0012] The monitor is fixed on the top of the fixed plate, and the top of the monitor is equipped with a fan and a particle measuring instrument is installed inside.

[0013] Furthermore, preferably, the top two sides of the drive platform are respectively equipped with an adjusting motor and a cooperating motor. The adjusting motor is fixedly connected to the adjusting arm; the cooperating motor is fixedly connected to the corresponding part of the support belt on the winding shaft. That is, driven by the adjusting motor, the winding shaft is rotated and adjusted by the adjusting arm, which in turn drives the top monitor to adjust its angle. It monitors different angles at a fixed position. When the lifting device retracts the support belt, the support belt winds around the winding shaft. At this time, the cooperating motor drives the winding part to rotate, assisting the winding shaft in retracting the support belt.

[0014] Furthermore, preferably, the winding shaft comprises:

[0015] Two limiting surfaces are symmetrically distributed and fixed to the inner sides of the two adjusting arms respectively;

[0016] The rotating shaft segment is rotatably positioned between the limiting surfaces and is divided into three mutually rotatably connected segments. The middle rotating shaft segment rotates in the opposite direction to the side rotating shaft segment, and one side rotating shaft segment is fixedly connected to the cooperating motor. In other words, the adjusting motor drives the winding shaft to rotate as a whole through the limiting surfaces, adjusting the angle of the monitor. When the lifting device extends the support belt to support the monitor for height adjustment, the rotating shaft segment releases the support belt due to the tension of the support belt. When the lifting device retracts the support belt, the support belt moves downward, and the cooperating motor simultaneously drives the rotating shaft segment to rotate and wind the support belt until the support belt is retracted onto the rotating shaft segment.

[0017] Furthermore, preferably, the support belt includes a main support belt and auxiliary support belts disposed on both sides of the main support belt. The main support belt is wound around the central rotating shaft segment, and the auxiliary support belts are wound around the side rotating shaft segments, with the two winding in opposite directions. To provide stable support for the monitor at the top of the fixed disk, the main support belt and auxiliary support belts are respectively disposed on both sides of the bottom of the fixed disk. As the two support belts move up and down, the rotating shaft segments corresponding to the same side support belt rotate in the same direction, while the rotating shaft segments corresponding to different side support belts rotate in opposite directions; that is, the winding directions of the main support belt and auxiliary support belts are opposite.

[0018] Furthermore, preferably, the support belt is composed of multiple belt plates, and symmetrically distributed connecting rods are provided on the back of the belt plates. One end of each connecting rod is provided with a connecting shaft, and the other end is rotatably connected to the connecting shaft between the connecting rods on adjacent belt plates. A locking slot is provided on the inner side of this end of the connecting rod. In other words, multiple belt plates form a support belt through the connection of the connecting rods and connecting shafts, and the belt plates are rotatably connected under the action of the connecting shafts and connecting rods, so that the support belt can be wound around the winding shaft.

[0019] Furthermore, preferably, the connecting shaft includes:

[0020] Two shafts are symmetrically distributed at the ends and fixed to the inner side of the connecting rod.

[0021] The central shaft is fixed between the shaft ends;

[0022] Adjust the gear, rotating it at the center of the central shaft;

[0023] The screw has two symmetrically distributed sections, which are fixed on both sides of the adjusting gear and rotate on the central shaft, with the threads on the two sections of the screw turning in opposite directions.

[0024] Two limit nuts are symmetrically distributed, meshing with the screw rods and slidingly connected to the central shaft on their inner sides. The outer sides have locking blocks corresponding to the inner locking slots of the connecting rods. To further improve the stability of the support belts supporting the fixed disc, the connecting shaft passing through the lifting device is adjusted to lock the connecting shaft and connecting rod together, forming a vertical unit with multiple belt plates supporting the fixed disc and the top monitor. When the connecting shaft is at the bottom of the lifting device, the connecting rod is rotatably connected to the shaft end, allowing the belt plates to rotate relative to each other. When the connecting shaft passes the lifting device from bottom to top, the adjusting gear rotates downwards under the restriction of the lifting device, which in turn drives the limit nuts to move laterally on the central shaft via the screw rods on both sides. It is important to note that the limit nuts can only slide on the central shaft and cannot rotate. When the connecting shaft moves from top to bottom past the lifting device, the adjusting gear rotates upward under the restriction of the lifting device. This causes the limiting nut to move towards the center of the central shaft via the screws on both sides. Consequently, the locking block on the limiting nut disengages from the inner slot of the connecting rod. At this point, the connecting rod and the shaft end are rotatably connected, meaning the belt plates rotate relative to each other, allowing the support belt to wind around the winding shaft.

[0025] Furthermore, preferably, the lifting device includes:

[0026] The protective housing is fixed between the adjusting arms;

[0027] The rotating mechanism is housed inside the protective casing and connected to the rotating motor on its side;

[0028] A limiting component, located at the top of the protective housing, restricts the position of the support belt. Driven by a rotating motor, the support belt moves up and down via a rotating mechanism, thereby adjusting the height of the monitor. Simultaneously, the limiting component adjusts the connecting shaft, further strengthening the stable support for the monitor.

[0029] Furthermore, preferably, the rotating mechanism includes:

[0030] The rotating gears are arranged in three staggered positions and are connected to the main support belt and the auxiliary support belt respectively;

[0031] The transmission pinion gear set connects to adjacent rotating gears, causing the adjacent rotating gears to rotate in opposite directions. That is, when the rotating motor drives the side rotating gear to rotate counterclockwise (with... Figure 7 For example, driven by the transmission pinion gear set, the central rotating gear rotates clockwise, while simultaneously driving the other side rotating gear to rotate counterclockwise. This causes the main support belt and auxiliary support belt to move upward, raising the height of the monitor via the fixed plate. Conversely, when the rotating motor drives the side rotating gear to rotate clockwise, driven by the transmission pinion gear set, the central rotating gear rotates counterclockwise, while the other side rotating gear rotates clockwise. This causes the main support belt and auxiliary support belt to move downward, lowering the height of the monitor via the fixed plate.

[0032] Furthermore, preferably, the limiting component includes:

[0033] The positioning shaft is fixed at the top center of the protective housing;

[0034] The first rolling shaft is rotatably mounted on the protective housing, parallel to the positioning shaft, and corresponding to the main support belt;

[0035] The second rolling shaft is provided in two symmetrically distributed parts, which are arranged parallel to the positioning shaft and correspond to the auxiliary support belt;

[0036] The side rolling shafts are mounted on both sides of the first and second rolling shafts. That is, under the action of the first and side rolling shafts, the main support belt's plate moves up and down against the first rolling shaft; under the action of the second and side rolling shafts, the auxiliary support belt's plate moves up and down against the second rolling shaft. Constrained by the rolling shafts, the support belts are brought into contact with the rotating gears in the rotating mechanism, and under the action of the rotating gears, they move up and down, thus adjusting the height of the monitor.

[0037] Furthermore, preferably, the positioning shaft is provided with paddles on both sides corresponding to the main support belt and the auxiliary support belt, respectively. The front end of the paddle corresponds to the adjusting gear at the connection of the support belt, and the front end is a retractable structure. When the support belt moves upward past the limiting component, the paddle on the positioning shaft engages with the adjusting gear, causing the adjusting gear to rotate downward while the paddle retracts. After the adjusting gear moves past, the paddle extends and resets, sequentially adjusting the adjusting gear on the connecting shaft between the belt plates to lock the belt plates together and provide stable support for the monitor. When the support belt moves downward past the limiting component, the paddle on the positioning shaft engages with the adjusting gear, causing the adjusting gear to rotate upward while the paddle retracts. After the adjusting gear moves past, the paddle extends and resets, sequentially adjusting the adjusting gear on the connecting shaft between the belt plates to rotate the belt plates together, facilitating the winding shaft to wind and collect the support belt.

[0038] Compared with the prior art, the beneficial effects of the present invention are:

[0039] In this invention, by setting up adsorption rollers, the monitoring device can be moved on the wall and ceiling under the drive of the driving platform. Under the action of the lifting device, the height of the monitor can be adjusted by the support belt, allowing monitoring of any position in the cleanroom. Under the action of the adjusting arm, the monitoring angle of the same position can be adjusted, effectively improving the particle monitoring effect of the cleanroom environment and obtaining more accurate information about the cleanroom environment. Attached Figure Description

[0040] Figure 1 This is a schematic diagram of the overall structure of a cleanroom microparticle monitoring device.

[0041] Figure 2 A side view of a cleanroom microparticle monitoring device;

[0042] Figure 3 This is a top view of a cleanroom microparticle monitoring device;

[0043] Figure 4 This is a schematic diagram of a lifting device in a cleanroom microparticle monitoring device.

[0044] Figure 5 This is a schematic diagram of the support belt connection structure in a cleanroom microparticle monitoring device;

[0045] Figure 6 This is a schematic diagram of the rotating mechanism in a cleanroom microparticle monitoring device.

[0046] Figure 7 This is a top view of a rotating mechanism in a cleanroom microparticle monitoring device;

[0047] Figure 8A schematic diagram of the limiting component structure of a cleanroom microparticle monitoring device;

[0048] In the diagram: 1. Drive platform; 2. Positioning suction cup; 3. Adsorption roller; 4. Winding shaft; 5. Support belt; 6. Adjusting arm; 7. Lifting device; 8. Fixed plate; 9. Monitor; 11. Adjusting motor; 12. Coordinating motor; 31. Vacuum suction cup; 41. Limiting surface; 42. Rotating shaft section; 51. Main support belt; 52. Auxiliary support belt; 61. Rotating motor; 71. Protective housing; 72. Rotating mechanism; 73. Limiting component ; 91. Fan; 92. Particle measuring instrument; 511. Belt plate; 512. Connecting rod; 513. Connecting shaft; 721. Rotating gear; 722. Transmission pinion set; 731. Positioning shaft; 732. First rolling shaft; 733. Second rolling shaft; 734. Side rolling shaft; 5131. Shaft end; 5132. Central shaft; 5133. Adjusting gear; 5134. Screw; 5135. Limit nut; 7311. Paddle. Detailed Implementation

[0049] Please see Figures 1-8 In this embodiment of the invention, a cleanroom microparticle monitoring device includes:

[0050] Drive platform 1, which supports the entire device, provides power for the movement of the device;

[0051] Positioning suction cups 2 are symmetrically distributed in two and are retractably mounted at the bottom of the drive platform 1;

[0052] The adsorption roller 3 is fixed on both sides of the drive platform 1, and multiple vacuum suction cups 31 are arranged in a ring on the adsorption roller 3. The vacuum suction cups 31 are controlled by a vacuum pump.

[0053] The winding shaft 4 is rotatably mounted on the drive platform 1;

[0054] Support belt 5 is wound around winding shaft 4;

[0055] Two adjusting arms 6 are symmetrically distributed and fixed on both sides of the winding shaft 4, and a rotating motor 61 is provided on the top of one adjusting arm 6;

[0056] The lifting device 7 is fixed between the adjusting arms 6 and is fixedly connected to the rotating motor 61;

[0057] The fixed plate 8 is set on the top of the lifting device 7 and is fixedly connected to the support belt 5;

[0058] The monitor 9 is fixed on the top of the fixed plate 8. The top of the monitor 9 is equipped with a fan 91 and a particle measuring instrument 92 is installed inside.

[0059] In this embodiment, an adjusting motor 11 and a cooperating motor 12 are respectively provided on the top two sides of the drive platform 1. The adjusting motor 11 is fixedly connected to the adjusting arm 6; the cooperating motor 12 is fixedly connected to the corresponding part of the support belt 5 on the winding shaft 4. That is, driven by the adjusting motor 11, the winding shaft 4 is rotated and adjusted by the adjusting arm 6, which in turn drives the top monitor 9 to adjust its angle and monitor different angles at a fixed position. When the lifting device 7 drives the support belt 5 to retract, the support belt 5 winds around the winding shaft 4. At this time, the cooperating motor 12 drives the winding part to rotate, assisting the winding shaft 4 in retracting the support belt 5.

[0060] In this embodiment, the winding shaft 4 includes:

[0061] Two limiting surfaces 41 are symmetrically distributed and fixed to the inner sides of the two adjusting arms 6 respectively;

[0062] The rotating shaft segment 42 is rotatably positioned between the limiting surfaces 41, and is divided into three mutually rotatably connected segments. The middle rotating shaft segment 42 rotates in the opposite direction to the side rotating shaft segment 42, and one side rotating shaft segment 42 is fixedly connected to the cooperating motor 12. That is, the adjusting motor 11 drives the winding shaft 4 to rotate as a whole through the limiting surfaces 41 to adjust the angle of the monitor 9. When the lifting device 7 drives the support belt 5 to extend and support the monitor 9 for height adjustment, the rotating shaft segment 42 is released by the tension of the support belt 5 as it rotates. When the lifting device 7 drives the support belt 5 to retract, the support belt 5 moves down, and at the same time, the cooperating motor 12 drives the rotating shaft segment 42 to rotate and wind the support belt 5 until the support belt 5 is retracted onto the rotating shaft segment 42.

[0063] In this embodiment, the support belt 5 includes a main support belt 51 and auxiliary support belts 52 disposed on both sides of the main support belt 51. The main support belt 51 is wound around the central rotating shaft section 42, and the auxiliary support belts 52 are wound around the side rotating shaft sections 42, with the two winding in opposite directions. To provide stable support for the top monitor 9 of the fixed disk 8, the main support belt 51 and the auxiliary support belts 52 are respectively disposed on both sides of the bottom of the fixed disk 8. As the two side support belts 5 move up and down, the rotating shaft section 42 corresponding to the same side support belt 5 rotates in the same direction, and the rotating shaft section 42 corresponding to the opposite side support belt 5 rotates in the opposite direction, that is, the winding directions of the main support belt 51 and the auxiliary support belt 52 are opposite.

[0064] In this embodiment, the support belt 5 is composed of multiple belt plates 511, and symmetrically distributed connecting rods 512 are provided on the back of the belt plates 511. One end of each connecting rod 512 is provided with a connecting shaft 513, and the other end is rotatably connected to the connecting shaft 513 between the connecting rods 512 on adjacent belt plates 511. A locking slot is provided on the inner side of this end of the connecting rod 512. That is to say, the multiple belt plates 511 form the support belt 5 under the connection of the connecting rods 512 and the connecting shaft 513, and the belt plates 511 are rotatably connected under the action of the connecting shaft 513 and the connecting rods 512, so that the support belt 5 can be wound on the winding shaft 4.

[0065] In this embodiment, the connecting shaft 513 includes:

[0066] Two shaft ends 5131 are symmetrically distributed and fixed to the inner side of the connecting rod 512;

[0067] The central shaft 5132 is fixed between the shaft ends 5131;

[0068] Adjusting gear 5133 is rotatably set at the center of central shaft 5132;

[0069] The screw 5134 has two symmetrically distributed sections, which are fixed on both sides of the adjusting gear 5133 and rotatably mounted on the central shaft 5132, and the threads on the two sections of the screw 5134 have opposite directions.

[0070] Two limit nuts 5135 are symmetrically distributed and mesh with the screw 5134. The inner side is slidably connected to the central shaft 5132, and the outer side is provided with a locking block corresponding to the inner locking slot of the connecting rod 512. To further improve the stability of the support belt 5 when supporting the fixed plate 8, the connecting shaft 513 passing through the lifting device 7 is adjusted to lock the connecting shaft 513 and the connecting rod 512 together, so that the multiple belt plates 511 form a vertical whole to support the fixed plate 8 and the top monitor 9. When the connecting shaft 513 is at the bottom of the lifting device 7, the connecting rod 512 is rotatably connected to the shaft end 5131, that is, the belt plates 511 rotate relative to each other. When the connecting shaft 513 passes the lifting device 7 from bottom to top, under the restriction of the lifting device 7, the adjusting gear 5133 rotates downward, which in turn drives the limit nut 5135 to move to both sides on the central shaft 5132 through the screws 5134 on both sides. It should be noted that the limit nut 5135 can only slide on the central shaft 5132 and cannot rotate, thus limiting the movement. The locking block on nut 5135 engages with the inner slot of connecting rod 512. Under the action of limiting nut 5135, connecting rod 512, limiting nut 5135 and central shaft 5132 are fixed together, that is, connecting rod 512 and shaft end 5131 are fixed, and belt plate 511 is in a vertical state to support fixed plate 8. Conversely, when connecting shaft 513 passes through lifting device 7 from top to bottom, under the restriction of lifting device 7, adjusting gear 5133 rotates upward, and then drives limiting nut 5135 to move towards the center on central shaft 5132 through screws 5134 on both sides. Then the locking block on limiting nut 5135 disengages from the inner slot of connecting rod 512. At this time, connecting rod 512 and shaft end 5131 are rotatably connected, that is, belt plates 511 rotate relative to each other, so that support belt 5 can be wound on winding shaft 4.

[0071] In this embodiment, the lifting device 7 includes:

[0072] The protective housing 71 is fixed between the adjusting arms 6;

[0073] The rotating mechanism 72 is housed inside the protective housing 71 and is connected to the rotating motor 61 on its side;

[0074] The limiting component 73 is located on the top of the protective housing 71 and restricts the position of the support belt 5. Driven by the rotating motor 61, the supporting belt 5 moves up and down through the rotating mechanism 72, thereby adjusting the height of the monitor 9. At the same time, under the action of the limiting component 73, the connecting shaft 513 is adjusted to further strengthen the stable support of the monitor 9.

[0075] In this embodiment, the rotating mechanism 72 includes:

[0076] Three rotating gears 721 are staggered and connected to the main support belt 51 and the auxiliary support belt 52 respectively;

[0077] The transmission pinion 722 connects to the adjacent rotating gear 721, causing the adjacent rotating gears 721 to rotate in opposite directions. That is, when the rotating motor 61 drives the side rotating gear 721 to rotate counterclockwise (as shown in the image), the gears rotate in opposite directions. Figure 7 For example, driven by the transmission pinion 722, the central rotating gear 721 rotates clockwise, while simultaneously driving the other side rotating gear 721 to rotate counterclockwise. This causes the main support belt 51 and auxiliary support belt 52 to move upward, raising the height of the monitor 9 via the fixed plate 8. Conversely, when the rotating motor 61 drives the side rotating gear 721 to rotate clockwise, driven by the transmission pinion 722, the central rotating gear 721 rotates counterclockwise, while the other side rotating gear 721 rotates clockwise. This causes the main support belt 51 and auxiliary support belt 52 to move downward, lowering the height of the monitor 9 via the fixed plate 8.

[0078] In this embodiment, the limiting component 73 includes:

[0079] The positioning shaft 731 is fixed at the top center of the protective housing 71;

[0080] The first rolling shaft 732 is rotatably mounted on the protective housing 71, parallel to the positioning shaft 731, and corresponding to the main support belt 51;

[0081] Two second rolling shafts 733 are symmetrically distributed, arranged parallel to the positioning shaft 731, and corresponding to the auxiliary support belt 52;

[0082] The side rolling shaft 734 is rolled on both sides of the first rolling shaft 732 and the second rolling shaft 733. That is, under the action of the first rolling shaft 732 and the side rolling shaft 734, the belt plate 511 of the main support belt 51 moves up and down against the first rolling shaft 732, and under the action of the second rolling shaft 733 and the side rolling shaft 734, the belt plate 511 of the auxiliary support belt 52 moves up and down against the second rolling shaft 733. Under the constraint of the rolling shaft, the support belt 5 is made to adhere to the rotating gear 721 in the rotating mechanism 72, and moves up and down under the action of the rotating gear 721 to adjust the height of the monitor 9.

[0083] In this embodiment, the positioning shaft 731 is provided with paddles 7311 on both sides corresponding to the main support belt 51 and the auxiliary support belt 52, respectively. The front end of the paddle 7311 corresponds to the adjusting gear 5133 at the connection of the support belt 5, and the front end is a telescopic structure. When the support belt 5 moves upward past the limiting component 73, the paddle 7311 on the positioning shaft 731 engages with the adjusting gear 5133, causing the adjusting gear 5133 to rotate downward while the paddle 7311 retracts. After the adjusting gear 5133 has moved past, the paddle 7311 extends back to its original position, sequentially adjusting the rotation of the adjusting gear 5133 on the connecting shaft 513 between the belt plates 511, so that the belt plates 511 are locked together, providing stable support for the monitor 9. When the support belt 5 moves downward past the limiting component 73, the paddle 7311 on the positioning shaft 731 engages with the adjusting gear 5133, causing the adjusting gear 5133 to rotate upward while the paddle 7311 retracts. After the adjusting gear 5133 has moved past, the paddle 7311 extends back to its original position, sequentially adjusting the rotation of the adjusting gear 5133 on the connecting shaft 513 between the belt plates 511, so that the belt plates 511 rotate together, facilitating the winding shaft 4 to wind and collect the support belt 5.

[0084] In practice, the drive platform 1 first moves the entire device, allowing it to move freely against walls or ceilings via the suction rollers 3. This means the device can perform microparticle monitoring at any location within the cleanroom. After selecting a monitoring location, the positioning suction cup 2 at the bottom of the drive platform 1 extends to further secure the device, preventing displacement during monitoring and ensuring accuracy. Then, the adjusting motor 11 rotates the adjusting arm 6 and the winding shaft 4 to select a suitable monitoring angle. The rotating motor 61 then drives the rotating gear 721 of the rotating mechanism 72 in the lifting device 7 to rotate. Driven by the rotating gear 721, the support belt 5 moves upward, raising the fixed plate 8 and the monitor 9. As the support belt 5 moves upward, the connecting shaft 513 between the belt plates 511 passes the limiting component 73. The adjusting gear 5133 on the connecting shaft 513 rotates downward under the action of the paddle 7311 on the positioning shaft 731, locking the multiple belt plates 511 on the support belt 5 together for monitoring. The device 9 is stably supported. When it reaches the monitoring position, the fan 91 on top of the device 9 draws air into the device 9, which is then detected by the internal particle measuring instrument 92 and discharged to obtain particle distribution data. Then, the rotating motor 61 drives the rotating gear 721 of the rotating mechanism 72 in the lifting device 7 to rotate in the opposite direction. Under the drive of the rotating gear 721, the support belt 5 moves downward, driving the fixed plate 8 and the device 9 to move down and reset. During the downward movement of the support belt 5, the connecting shaft 513 between the belt plates 511 passes through the limiting component 73. At this time, the adjusting gear 5133 on the connecting shaft 513 rotates upward under the action of the paddle 7311 on the positioning shaft 731, so that the multiple belt plates 511 on the support belt 5 return to the state of mutual rotation. At the same time, the motor 12 drives the rotating shaft section 42 to rotate, and the support belt 5 is wound and retracted. After the monitor 9 is reset, the operation stops. Then the positioning suction cup 2 is retracted, and the drive platform 1 drives the equipment to change the monitoring position. Multi-position monitoring is carried out in the clean room to improve the particle monitoring effect of the clean room environment and obtain the environmental conditions of the clean room more accurately.

[0085] The above description is merely a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A cleanroom microparticle monitoring device, characterized in that: include: The drive platform (1) supports the entire device and provides power for the movement of the device; Positioning suction cups (2) are provided in two symmetrically distributed locations and can be extended and retracted at the bottom of the drive platform (1); The adsorption roller (3) is fixed on both sides of the drive platform (1), and multiple vacuum suction cups (31) are arranged in a ring on the adsorption roller (3). The vacuum suction cups (31) are controlled by a vacuum pump. The winding shaft (4) is rotatably mounted on the drive platform (1); Support belt (5) is wound around the winding shaft (4); Two adjusting arms (6) are symmetrically distributed and fixed on both sides of the winding shaft (4), and a rotating motor (61) is provided on the top of one adjusting arm (6). The lifting device (7) is fixed between the adjusting arms (6) and is fixedly connected to the rotating motor (61); A fixed plate (8) is set on top of the lifting device (7) and is fixedly connected to the support belt (5); The monitor (9) is fixed on the top of the fixed plate (8). The top of the monitor (9) is equipped with a fan (91) and a particle measuring instrument (92) is installed inside. The support belt (5) includes a main support belt (51) and auxiliary support belts (52) arranged on both sides of the main support belt (51). The main support belt (51) is wrapped around the central rotating shaft section (42), and the auxiliary support belts (52) are wrapped around the side rotating shaft section (42), and the two are wrapped in opposite directions. The support belt (5) is composed of multiple belt plates (511), and symmetrically distributed connecting rods (512) are provided on the back of the belt plates (511). One end of the connecting rod (512) is provided with a connecting shaft (513), and the other end is rotatably connected to the connecting shaft (513) between the connecting rods (512) on the adjacent belt plates (511). A bayonet is provided on the inner side of this end of the connecting rod (512). The connecting shaft (513) includes: Two shaft ends (5131) are symmetrically distributed and fixed to the inner side of the connecting rod (512); The central shaft (5132) is fixed between the shaft ends (5131); The adjusting gear (5133) is rotatably set at the center of the central shaft (5132); The screw (5134) has two symmetrically distributed sections, which are fixed on both sides of the adjusting gear (5133) and rotatably mounted on the central shaft (5132). The threads on the two sections of the screw (5134) have opposite directions. Two limit nuts (5135) are symmetrically distributed and mesh with the screw (5134). The inner side is slidably connected to the central shaft (5132), and the outer side is provided with a locking block corresponding to the inner locking slot of the connecting rod (512).

2. The cleanroom microparticle monitoring device according to claim 1, characterized in that: The top two sides of the drive platform (1) are respectively provided with an adjustment motor (11) and a cooperating motor (12). The adjustment motor (11) is fixedly connected to the adjustment arm (6); the cooperating motor (12) is fixedly connected to the corresponding part of the support belt (5) on the winding shaft (4).

3. The cleanroom microparticle monitoring device according to claim 1, characterized in that: The winding shaft (4) includes: Two limiting surfaces (41) are symmetrically distributed and fixed on the inner side of the two adjusting arms (6) respectively; The rotating shaft segment (42) is rotatably set between the limiting surfaces (41), and the rotating shaft segment (42) is divided into three segments that are rotatably connected to each other. The middle rotating shaft segment (42) and the side rotating shaft segment (42) rotate in opposite directions, and the side rotating shaft segment (42) on one side is fixedly connected to the cooperating motor (12).

4. The cleanroom microparticle monitoring device according to claim 1, characterized in that: The lifting device (7) includes: The protective housing (71) is fixed between the adjusting arms (6); The rotating mechanism (72) is installed inside the protective housing (71) and is connected to the rotating motor (61) on the side; A limiting component (73) is provided on the top of the protective housing (71) to limit the position of the support belt (5).

5. The cleanroom microparticle monitoring device according to claim 4, characterized in that: The rotating mechanism (72) includes: Three rotating gears (721) are provided in a staggered arrangement and are respectively connected to the main support belt (51) and the auxiliary support belt (52); The transmission pinion (722) is connected to the adjacent rotating gear (721), causing the adjacent rotating gear (721) to rotate in opposite directions.

6. The cleanroom microparticle monitoring device according to claim 4, characterized in that: The limiting component (73) includes: The positioning shaft (731) is fixed at the top center of the protective housing (71); The first rolling shaft (732) is rotatably mounted on the protective housing (71), parallel to the positioning shaft (731), and corresponding to the main support belt (51); Two second rolling shafts (733) are symmetrically distributed and arranged parallel to the positioning shaft (731) and corresponding to the auxiliary support belt (52); Side rolling shaft (734) is rolled on both sides of the first rolling shaft (732) and the second rolling shaft (733).

7. The cleanroom microparticle monitoring device according to claim 6, characterized in that: The positioning shaft (731) has paddles (7311) on both sides corresponding to the main support belt (51) and the auxiliary support belt (52). The front end of the paddle (7311) corresponds to the adjusting gear (5133) at the connection of the support belt (5), and the front end is a telescopic structure.

Images