Objective protection, protection device, objective system and lithographic apparatus

Abstract

The present application relates to the technical field of semiconductor, provide a kind of objective lens protection piece, protection device, objective lens system and photoetching equipment, objective lens protection piece includes: protection main body;The protection main body is equipped with protection cavity, flow passage cavity, gas inlet and homogenization unit;The homogenization unit is set in the flow passage cavity, the homogenization unit includes multiple homogenization bodies distributed in the circumferential direction of the flow passage cavity, the homogenization unit is provided with multiple layers along the radial direction of the flow passage cavity, to several annular flow passages and gas outlet in the flow passage cavity.The protection device is installed with the above-mentioned objective lens protection piece, the objective lens system is installed with the above-mentioned protection device, the photoetching equipment is installed with the above-mentioned objective lens system.Such configuration, by simple array internal flow passage design, improve the phenomenon of excessive flow passage pressure resistance, improve the stability of gas flow, eliminate the high-frequency vibration phenomenon.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a protective lens component, protective device, objective lens system, and photolithography equipment. Background Technology

[0002] As a core component of the lithography machine, the objective lens directly determines the imaging quality of the product. The distance between the bottom lens of the objective lens and the silicon wafer is very small (approximately 40mm). During the exposure process, the photoresist coating on the silicon wafer contains organic solvents, which continuously and slowly evaporate under exposure. As the lithography machine continues to run, the evaporated organic solvents adhere to the lower surface of the objective lens, forming an organic solvent contamination film on the lower surface of the bottom lens. This contamination film severely affects the light transmittance of the objective lens, reduces the imaging effect of the silicon wafer, and is detrimental to product quality.

[0003] Therefore, to ensure stable imaging quality, the cleanliness of the objective lens must be maintained. Currently, one way to ensure the cleanliness of the objective lens is to regularly wipe the surface of the bottom lens to remove the adhering organic solvents. This method can easily cause irreversible damage to the lens. Another method is to set a lens mount under the bottom lens of the objective lens and install an extremely thin objective lens protective film on the lens mount to prevent organic solvents from adhering to the lens surface. However, the protective film needs to be replaced regularly and can easily affect the energy of transmitted light, thus affecting the imaging quality.

[0004] Based on this, an air curtain protective structure is proposed. This structure is positioned below the objective lens and blows clean gas circumferentially around the lens, forming a protective air curtain. The gas blocks volatile organic solvents from approaching the objective lens, thus providing protection. Existing protective structures are typically annular, with several coaxial annular internal channels. Air outlets are evenly distributed circumferentially on the inner wall of the protective structure, each connecting to the innermost annular internal channel. The annular internal channels are generally interconnected using through-holes with a diameter of 0.8-1.6 mm, and the airflow velocity is uniformly distributed. The problem with this type of protective structure is that the annular internal channels have excessive internal pressure resistance, leading to unstable airflow in actual processes, affecting protective performance. It also easily causes high-frequency vibrations, affecting image quality. Furthermore, this structure is difficult to apply to the design requirements of protective devices under high spatial constraints.

[0005] Therefore, there is an urgent need for a protective lens component, protective device, objective lens system, and photolithography equipment to improve the phenomenon of excessive flow channel pressure resistance, improve the stability of air intake flow, and ensure stable protective performance. At the same time, it also eliminates high-frequency vibration and solves the technical problem of not being able to be applied under high spatial constraints. Summary of the Invention

[0006] The invention provides an objective lens protective component, a protective device, an objective lens system, and a photolithography equipment. Through a simplified array-type internal flow channel design, it improves the phenomenon of excessive flow channel pressure resistance, enhances the stability of air intake flow, and ensures stable protective performance. At the same time, it eliminates high-frequency vibration and solves the technical problem of not being applicable under high spatial constraints.

[0007] The objective lens protective component includes: a protective body;

[0008] The protective body is provided with a protective cavity, a flow channel cavity, an air inlet, and a homogenization unit;

[0009] The flow channel cavity is formed along the circumference of the protective cavity on the inner peripheral wall of the protective cavity;

[0010] The air inlet is connected to the flow channel cavity;

[0011] The homogenizing unit is disposed within the flow channel cavity. The homogenizing unit includes multiple homogenizing bodies arranged in a circumferential array along the flow channel cavity. The two ends of the homogenizing bodies are respectively connected to two opposite sidewalls of the flow channel cavity along the axial direction of the flow channel cavity. The homogenizing unit is arranged in multiple layers along the radial direction of the flow channel cavity to form several nested and interconnected annular flow channels within the flow channel cavity, and to form multiple air outlets arranged in a circumferential array along the flow channel cavity and connected to the protective cavity.

[0012] Optionally, the homogenization unit is provided with three layers from the outside to the inside along the radial direction of the flow channel cavity, namely a preliminary homogenization unit, an airflow splitting unit, and an end homogenization unit.

[0013] Optionally, the air inlet is connected from the inner peripheral wall of the flow channel cavity to the outer peripheral wall of the protective body.

[0014] Optionally, in the homogenization units of adjacent layers, at least a portion of the homogenizing bodies are staggered along the circumferential direction of the flow channel cavity.

[0015] Optionally, the cross-section of each homogenizer cut along the axial direction perpendicular to the flow channel cavity is one or a combination of several of the following: circular, triangular, rectangular, and fan-shaped.

[0016] Optionally, along the radial direction of the flow channel cavity from the outside to the inside, the circumferential dimension of at least a portion of the homogenizing bodies in each homogenizing unit layer gradually decreases.

[0017] Optionally, the homogenizing body of the preliminary homogenizing unit has a rectangular or fan-shaped cross-section cut along the axial direction perpendicular to the flow channel cavity; and / or, at least a portion of the homogenizing body of the airflow splitting unit has a triangular cross-section cut along the axial direction perpendicular to the flow channel cavity; and / or, the homogenizing body of the terminal homogenizing unit has a circular cross-section cut along the axial direction perpendicular to the flow channel cavity.

[0018] Optionally, the protective body is annular, and the inner cylindrical cavity of the protective body forms the protective cavity; and / or; the flow channel cavity is annular; and / or; the annular flow channel is annular.

[0019] Optionally, the protective body, the flow channel cavity, and the annular flow channel are coaxially arranged.

[0020] Optionally, the protective body is provided with an objective lens fixing part; and / or; the protective body is provided with a tooling fixing part; the objective lens fixing part is used to connect with the objective lens holder, and the tooling fixing part is used to fix the protective body during tooling.

[0021] Optionally, the protective body is provided with a powder cleaning hole, which is connected to the flow channel cavity.

[0022] Optionally, the powder cleaning holes include inner powder cleaning holes and outer powder cleaning holes. The outer powder cleaning holes are directly connected to the outermost annular flow channel along the radial direction of the flow channel cavity, and the inner powder cleaning holes are directly connected to other annular flow channels other than the outermost annular flow channel.

[0023] Optionally, the powder cleaning hole is opened on one side of the protective body along the axial direction of the protective cavity.

[0024] Optionally, the distance between the homogenizing units of adjacent layers is 1-5 mm along the radial direction of the flow channel cavity.

[0025] The present invention also provides a protective device, wherein the protective device is equipped with the aforementioned objective lens protective component.

[0026] Optionally, the protective device further includes a flow guiding unit disposed on the protective body. The flow guiding unit is used to guide the gas flowing out through the air outlet so that the gas flows toward the objective lens side.

[0027] Optionally, the flow guiding unit includes a first flow guiding plate, the first flow guiding plate having a first flow guiding portion, the first flow guiding portion being used to guide the gas flowing out through the gas outlet toward the objective lens side.

[0028] Optionally, the flow guiding unit further includes a second flow guiding plate, and the first flow guiding plate also has a second flow guiding part. A flow guiding channel is formed between the second flow guiding part and the second flow guiding plate. The flow guiding channel is connected to the air outlet and is used to guide the gas flowing out of the air outlet to flow towards the first flow guiding part.

[0029] Optionally, the protective cavity extends through the protective body along the axial direction of the protective cavity, the first guide plate and the second guide plate are respectively disposed on both sides of the protective body along the axial direction of the protective cavity, and the second guide portion extends radially into the protective cavity.

[0030] Optionally, the protective cavity and the protective body are coaxially arranged; and / or; the protective cavity and the first guide plate are coaxially arranged; and / or; the protective cavity and the second guide plate are coaxially arranged.

[0031] The present invention also provides an objective lens system equipped with the aforementioned protective device.

[0032] The present invention also provides a photolithography apparatus, wherein the photolithography apparatus is equipped with the objective lens system described above.

[0033] In this configuration, multiple homogenizers are arranged within a large flow channel cavity, forming a multi-layered annular flow channel and an outlet. This structure is not limited by machining process constraints; the annular flow channel adopts an internal array flow channel structure and is applied to the annular outlet structure. The homogenizers in the homogenization unit can be flexibly configured, allowing different array homogenizers to be used flexibly within a limited space to form a low-pressure-resistance internal flow channel and a uniform airflow velocity distribution, thereby forming a stable and uniform outlet airflow field. While ensuring homogenized outlet airflow, the internal pressure resistance is reduced, solving problems such as insufficient flow, instability, or high-frequency vibration caused by high pressure resistance in actual processes, improving protection stability and reliability, and thus ensuring the high optical characteristics of the optical objective lens, increasing the lifespan, production efficiency, and yield of the produced objective lens. Moreover, through refined design methods and analysis of the function of different homogenizer structural components, the homogenizers can be flexibly configured, enabling the rapid application of the array-type protective component in different design environments, improving the possibility of rapid design iteration and the performance output stability of the designed protective component.

[0034] Because the flow channel cavity employs an array of homogenized materials, the resulting annular flow channels form an open, interconnected interface structure, mitigating the problems of easy clogging during processing or blockage caused by particulate contaminants during operation. This open, interconnected interface structure effectively reduces internal pressure resistance and consequently minimizes high-frequency vibrations. Furthermore, this array-type design can be used even with an axial height of only 1-2 mm along the flow channel cavity, effectively solving the technical challenge of applying it under high spatial constraints within limited space. Attached Figure Description

[0035] Figure 1 This is a schematic diagram of the protective device according to Embodiment 1 of the present invention;

[0036] Figure 2This is a top view of the objective lens protective device according to Embodiment 1 of the present invention;

[0037] Figure 3 This is a bottom view of the objective lens protective device according to Embodiment 1 of the present invention;

[0038] Figure 4 This is a cross-sectional structural schematic diagram of the objective lens protective component according to Embodiment 1 of the present invention;

[0039] Figure 5 This is a top view of the second guide plate according to Embodiment 1 of the present invention;

[0040] Figure 6 This is a bottom view of the second guide plate in Embodiment 1 of the present invention;

[0041] Figure 7 This is a schematic diagram of the protective device and objective lens assembly structure according to Embodiment 1 of the present invention;

[0042] Figure 8 This is a cross-sectional structural schematic diagram of the objective lens protective component according to Embodiment 1 of the present invention;

[0043] Figure 9 This is a cross-sectional view of the second guide plate according to Embodiment 1 of the present invention;

[0044] Figure 10 This is a schematic diagram of the objective lens system of the present invention;

[0045] Figure 11 This is a cross-sectional structural schematic diagram of the objective lens protective component according to Embodiment 2 of the present invention;

[0046] Figure 12 This is a cross-sectional structural schematic diagram of the objective lens protective component according to Embodiment 3 of the present invention;

[0047] Figure 13 This is a cross-sectional structural diagram of the objective lens protective component according to Embodiment 4 of the present invention.

[0048] The accompanying figure is labeled as follows:

[0049] 10-Protective body; 11-Protective cavity; 12-Flow channel cavity; 13-Homogenization unit; 131-Preliminary homogenization unit; 132-Airflow splitting unit; 133-End homogenization unit; 1301-Homogenizing body; 141-Air inlet; 142-Air outlet; 15-Objective lens fixing part; 16-Tooling fixing part; 17-Guide baffle fixing part; 181-Outer flow channel; 182-Middle flow channel; 183-Inner flow channel; 19-Powder cleaning hole; 191-Inner powder cleaning hole; 192-Outer powder cleaning hole;

[0050] 20-Flow guiding unit; 21-First flow guiding plate; 211-First flow guiding section; 212-Second flow guiding section; 22-Second flow guiding plate; 221-Block; 222-Assembly hole; 223-Flow guiding surface; 23-Flow guiding channel;

[0051] 30-Objective lens;

[0052] 40 - Objective lens holder.

[0053] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the term “at least two” is generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. Additionally, as used in this invention, “installed,” “connected,” “joined,” and “one element “set” on another element should be interpreted broadly, generally indicating only a connection, coupling, mating, or transmission relationship between the two elements, which can be direct or indirect through an intermediate element. They should not be construed as indicating or implying a spatial positional relationship between the two elements, i.e., one element can be located inside, outside, above, below, or to one side of another element, unless otherwise explicitly stated. For those skilled in the art, the specific meaning of the above terms in the invention can be understood according to the specific circumstances. Furthermore, directional terms such as above, below, up, down, upward, downward, left, right, etc., are used relative to exemplary embodiments as shown in the figures, with upward or up direction pointing towards the top of the corresponding figure, and downward or down direction pointing towards the bottom of the corresponding figure.

[0054] Please refer to Figure 1 As shown, this embodiment provides a protective device, which includes an objective lens protector and a flow guiding unit 20. The objective lens protector includes a protective body 10, and the flow guiding unit 20 is disposed on the protective body 10. The protective body 10 is used for blowing air, and the flow guiding unit 20 is used to guide the flow direction of the air blown out by the protective body 10 to form a protective air curtain.

[0055] Please continue to refer to this. Figure 1As shown, the protective body 10 is provided with a protective cavity 11. The shape of the protective cavity 11 is adapted to the structure of the objective lens being protected. Since the objective lens is typically circular, in this embodiment, the protective cavity 11 is set as a cylindrical inner cavity. During the protection process, the protective body 10 needs to be assembled and connected with the objective lens. Therefore, in this embodiment, the protective body 10 is adaptively set as an annular shape. The inner cylindrical cavity of the protective body 10 naturally forms the protective cavity 11. The protective body 10 and the protective cavity 11 are coaxially arranged. The outer diameter of the protective body 10 is limited by the system installation environment and space constraints.

[0056] In other alternative embodiments, the shape of the protective body 10 and the shape of the protective cavity 11 may be adjusted based on the actual assembly structure or the structural adaptability of the objective lens to be protected.

[0057] Please refer to the structure of the protective body 10. Figures 2 to 4 As shown;

[0058] A flow channel cavity 12 is formed circumferentially within the protective body 10. An air inlet 141 is provided on the protective body 10, communicating with the flow channel cavity 12. The air inlet 141 is used to communicate with an air supply device to supply clean gas into the flow channel cavity 12, and the gas is evenly distributed circumferentially within the flow channel cavity 12. In this embodiment, the flow channel cavity 12 is configured as an annular shape to accommodate the structure of the protective cavity 11, and the flow channel cavity 12 and the protective cavity 11 are coaxially arranged.

[0059] Please continue to refer to this. Figures 2 to 4 As shown, in order to homogenize the gas entering the flow channel cavity 12, a homogenization unit 13 is provided in the flow channel cavity 12. The homogenization unit 13 includes a plurality of homogenizing bodies 1301 distributed in a circumferential array along the flow channel cavity 12. The two ends of the homogenizing bodies 1301 are respectively connected to the two opposite sidewalls of the flow channel cavity 12 along the axial direction of the flow channel cavity 12. The homogenization unit 13 is arranged in multiple layers along the radial direction of the flow channel cavity 12. An annular flow channel is formed between adjacent homogenization units 13. The multiple homogenization units 13 form a plurality of nested and interconnected annular flow channels in the flow channel cavity 12, and form a plurality of outlets 142 distributed in a circumferential array along the flow channel cavity 12 and connected to the protective cavity 11.

[0060] In this invention, multiple homogenizers 1301 are arranged within a large flow channel cavity 12, forming corresponding multiple annular flow channels and air outlets 142. This structure is not limited by the process constraints of machining process holes; the shape and distribution structure of the homogenizers 1301 can be adaptively adjusted based on factors such as homogenization effect, flow guiding effect, and flow channel pressure resistance. It should be understood that the arrangement of the homogenizer array 1301 differs from the arrangement of process through holes that connect adjacent flow channels after machining multiple flow channels. In this method, the flow channel connecting holes are limited by the machining process, which restricts the solid wall thickness between adjacent process through holes. At the same time, the properties of the processed material need to be considered during machining, and the machining size is limited, thus resulting in limitations on the machining process holes and their distribution structure and density. In contrast, the arrangement of the homogenizers 1301 in this invention eliminates the need for machining process holes, thereby avoiding the series of limitations imposed by machining process holes.

[0061] In this invention, the annular flow path formed between adjacent homogenization unit 13 layers should be understood as a flow channel structure with circumferentially spaced openings, which can be a circular ring, an elliptical ring, or a polygonal closed structure. In this embodiment, the homogenizing bodies 1301 in each homogenization unit 13 layer are all distributed in a circular ring circumferentially, so the formed annular flow channel has an overall circular ring structure, and the annular flow channel is coaxially arranged with the flow channel cavity 12. Each homogenizing body 1301 in the homogenization unit 13 can adopt different cross-sectional shapes. Based on the structural differences of the homogenizing bodies 1301, the inner wall of the annular flow channel can locally form a hole structure due to the homogenizing bodies 1301 themselves.

[0062] Please continue to refer to this. Figure 2 and Figure 3 As shown, the protective body 10 is provided with an objective lens fixing part 15, a tooling fixing part 16, and a flow guide baffle fixing part 17. The objective lens fixing part 15 is used to assemble with the objective lens holder to install the entire objective lens protective component onto the objective lens holder. The tooling fixing part 16 is used to fix the protective body 10 during tooling. The flow guide baffle fixing part 17 is used to fixally connect with the flow guide unit 20. In this embodiment, the objective lens fixing part 15 consists of several fixing ears connected to the outer peripheral surface of the protective body 10, and each fixing ear has an objective lens fixing hole. The tooling fixing part 16 consists of several tooling ears connected to the outer peripheral surface of the protective body 10, and each tooling ear has a tooling fixing hole. The flow guide baffle fixing part 17 consists of several connecting holes formed on the protective body 10. In other alternative embodiments, the specific structures of the objective lens fixing part 15, the tooling fixing part 16, and the flow guide baffle fixing part 17 can be adjusted based on the actual assembly structure.

[0063] Please continue to refer to this. Figure 4As shown, in this embodiment, the homogenization unit 13 is arranged in three layers from the outside to the inside along the radial direction of the flow channel cavity 12, namely, a preliminary homogenization unit 131, an airflow diversion unit 132, and a terminal homogenization unit 133. Each adjacent homogenizer 1301 in the terminal homogenization unit 133 forms an air outlet 142. The three homogenization units 13 form three annular flow channels within the flow channel cavity 12, namely, an outer flow channel 181, a middle flow channel 182, and an inner flow channel 183. The air inlet 141 is directly connected to the outer flow channel 181. Clean gas passing through the air inlet 141 enters the outer flow channel 181, is homogenized by the preliminary homogenization unit 131, flows to the middle flow channel 182, is circumferentially homogenized by the airflow diversion unit 132, flows to the inner flow channel 183, and finally flows out through the air outlet 142 formed by the terminal homogenization unit 133. Along the radial direction of the flow channel cavity 12, the distance between the homogenization units 13 of adjacent layers is 1-5 mm, preferably 3 mm. The specific setting distance can be adjusted based on space constraints and the required design of the piezoresistive range.

[0064] In other alternative embodiments, the number of layers of homogenization unit 13 can be adjusted adaptively based on actual usage requirements.

[0065] Conventional machined flow channel structures often exhibit poor homogenization, easily resulting in counter-clockwise or clockwise annular airflow. This causes pollutants to rise from the center of the protective device due to the annular airflow, accelerating contamination. This invention addresses this by flexibly configuring the homogenizing bodies 1301 in the preliminary homogenization unit 131, the airflow diversion unit 132, and the terminal homogenization unit 133, ensuring better homogenization. The airflow diversion unit 132, as the core unit, uniformly diverts airflow and, in conjunction with the terminal homogenization unit 133, eliminates the possibility of counter-clockwise or clockwise annular airflow. The simplified array-type internal flow channel design facilitates rapid design and can quickly meet the design requirements of low-pressure resistance protective devices in different scenarios, such as high protection or high resistance to lateral disturbances.

[0066] Please continue to refer to this. Figure 4 As shown, in this embodiment, in the homogenization units 13 of adjacent layers, at least a portion of the homogenizing bodies 1301 are staggered along the circumferential direction of the flow channel cavity 12; the specific staggered positions are flexibly determined based on factors such as actual piezoresistive design requirements and homogenization design requirements.

[0067] Overall, most of the homogenization bodies 1301 in the outermost homogenization units 13 have larger circumferential dimensions, such as... Figure 4As shown, the homogenizing bodies 1301 in each homogenization unit 13 are fan-shaped annular structures. In the preliminary homogenization unit 131, most of the homogenizing bodies 1301 have the largest circumferential dimensions and a relatively sparse distribution. In the airflow diversion unit 132, most of the homogenizing bodies 1301 have a moderate circumferential dimension and a moderate distribution density; some homogenizing bodies 1301 in the airflow diversion unit 132 may have a larger circumferential dimension than some homogenizing bodies 1301 in the preliminary homogenization unit 131. In the terminal homogenization unit 133, most of the homogenizing bodies 1301 have the smallest circumferential dimensions and the densest distribution. This flexible arrangement achieves good airflow guidance and homogenization effects. The circumferential spacing between each pair of adjacent homogenizing bodies 1301 in each homogenization unit 13 can be different, and this spacing can be flexibly adjusted based on actual design requirements.

[0068] The homogenizing body 1301, cut along the axial direction perpendicular to the flow channel cavity 12, has a cross-section that is circular, triangular, rectangular, or a combination of several of these shapes. The cross-sections of the homogenizing bodies 1301 in each homogenizing unit 13 can be the same or different, and the cross-sections of the homogenizing bodies 1301 in a single homogenizing unit 13 can also be the same or different. Please refer to... Figure 4 As shown, in this embodiment, the homogenizing bodies 1301 of the preliminary homogenizing unit 131, the airflow splitting unit 132, and the terminal homogenizing unit 133 are all fan-shaped annular structures. In other alternative embodiments, the cross-sectional shape of the homogenizing body 1301 in each splitting unit can be adaptively adjusted based on actual design requirements. According to simulation analysis results, Figure 4 The array-type flow channel structure in the image, when applied to the design of different optical components in different lithography machines, can reduce internal piezoresistive resistance by an average of 40-80%.

[0069] Please refer to Figure 2 and Figure 4As shown, the protective body 10 is provided with a dust removal hole 19, which communicates with the flow channel cavity 12. The dust removal hole 19 is used to introduce cleaning gas to blow the dust in the flow channel cavity 12 out of the cleaning flow channel. Specifically, the dust removal hole 19 includes an inner dust removal hole 191 and an outer dust removal hole 192. The outer dust removal hole 192 is directly connected to the outermost annular flow channel along the radial direction of the flow channel cavity 12. There is one outer dust removal hole 192, which is opened along the axial direction perpendicular to the protective body 10 and communicates to the outer peripheral surface of the protective body 10. The outer dust removal hole 192 is a circular hole. The inner dust removal hole 191 is directly connected to the other annular flow channels besides the outermost annular flow channel. Specifically, in this embodiment, the inner dust removal hole 191 is directly connected to the middle flow channel 182. The inner cleaning holes 191 are formed along the axial direction of the protective cavity 11 on one side of the protective body 10. The inner cleaning holes 191 are oblong-shaped holes, and four of them are evenly arranged circumferentially around the central axis of the flow channel cavity 12 to achieve a better cleaning effect. When the flow channel cavity 12 is not clean, the inner cleaning holes 191 and the outer cleaning holes 192 need to be sealed with sealing plugs. When the flow channel cavity 12 needs cleaning, the sealing plugs of the inner cleaning holes 191 and the outer cleaning holes 192 are opened, and clean gas is introduced through the air inlet 141.

[0070] In other alternative embodiments, the shape, location, and number of the inner powder cleaning holes 191 and the outer powder cleaning holes 192 can be adaptively adjusted based on actual usage requirements.

[0071] In this invention, the use of an array of homogenized materials within the flow channel cavity creates an open, interconnected interface structure between the annular flow channels, mitigating the problems of easy clogging during processing or blockage caused by particulate contaminants during operation. This open, interconnected interface structure effectively reduces internal pressure resistance and consequently minimizes high-frequency vibrations. Furthermore, this array-type design can be employed even with an axial height of 1-2 mm along the flow channel cavity 12, effectively solving the technical challenge of applying it under limited space constraints to high-space-constraint applications.

[0072] In this invention, the homogenizing channel adopts an internal array-type channel structure and is applied to the annular air outlet structure. The homogenizing body 1301 in the homogenizing unit 13 can be flexibly configured. Within a limited space, different array-type homogenizing bodies can be flexibly used to form a low-pressure-resistance internal channel and a uniform airflow velocity distribution, thereby forming a stable and uniform outlet airflow field. While ensuring homogenized outlet airflow, the internal pressure resistance is reduced, solving problems such as insufficient flow, instability, or high-frequency vibration caused by high pressure resistance in actual processes. This improves the stability and reliability of protection, thereby ensuring the high optical characteristics of the optical objective lens and increasing the service life, production efficiency, and yield of the produced objective lens. Through refined design methods and analysis of the function of different homogenizing body structural components, the homogenizing body 1301 can be flexibly configured, enabling the rapid application of array-type protective components in different design environments, improving the possibility of rapid design iteration and the performance output stability of the designed protective components.

[0073] Please refer to the structure of the flow guiding unit 20. Figures 5 to 10 As shown;

[0074] The flow guiding unit 20 is used to guide the gas flowing out of the outlet 142 so that the gas flows toward the objective lens side.

[0075] The flow guiding unit 20 includes a first flow guiding plate 21 and a second flow guiding plate 22;

[0076] Please refer to Figure 1 as well as Figure 5 and Figure 6 As shown, the protective cavity 11 extends through the protective body 10 along the axial direction of the protective cavity 11, and the first guide plate 21 and the second guide plate 22 are respectively disposed on both sides of the protective body 10 along the axial direction of the protective cavity 11.

[0077] The second guide plate 22 is provided with a plug 221. The second guide plate 22 covers the axial upper side of the protective body 10, and the plug 221 seals the inner powder cleaning hole 191 to form a seal. The second guide plate 22 is also provided with assembly holes 222 that cooperate with each fixing hole on the guide baffle fixing part 17, so as to facilitate the connection between the second guide plate 22 and the protective body 10.

[0078] Please refer to Figure 7 As shown, the objective lens 30 is mounted on the axial upper side of the protective body 10, and the second guide plate 22 is located between the objective lens 30 and the protective body 10 in the axial direction. The first guide plate 21 and the second guide plate 22 are both annular structures, and the protective cavity 11, the first guide plate 21 and the second guide plate 22 are coaxially arranged.

[0079] Please refer to 7 and Figure 8As shown, the first guide plate 21 has an annular structure and is integrally integrated into the protective body 10. The first guide plate 21 has a first guide portion 211 and a second guide portion 212. The first guide portion 211 and the second guide portion 212 are both annular curved surface structures on the first guide plate 21 along the axial direction close to the second guide plate 22. The second guide portion 212 extends radially inward from the outer peripheral surface of the first guide plate 21 and then transitions to the curved surface of the first guide portion 211. The curved surface of the second guide portion 212 extends obliquely away from the second guide plate 22, and the curved surface of the first guide portion 211 extends obliquely towards the second guide plate 22. The first guide portion 211 extends radially into the protective cavity 11.

[0080] Please refer to Figure 7 and Figure 9 As shown, the second guide plate 22 has an annular structure. The side of the second guide plate 22 axially close to the first guide plate 21 has a guide surface 223, forming a guide channel 23 between the guide surface 223 and the first guide plate 21. The second guide portion 212 is part of the guide channel 23, which communicates with the air outlet 142. The guide channel 23 extends obliquely away from the second guide plate 22, causing the airflow to first flow along the second guide portion 212 away from the objective lens 30 to the first guide portion 211. Then, the airflow is redirected by the guide of the first guide portion 211 to flow closer to the objective lens 30. Since the first guide portion 211 extends radially into the protective cavity 11, and the second guide plate 22 has an annular structure, the airflow then flows through the middle chamber of the second guide plate 22 towards the objective lens 30. After contacting the objective lens 30, it turns axially away from the objective lens 30. Therefore, clean air can always be kept in contact with the objective lens 30, thereby preventing outside air or organic solvent volatiles from flowing to the objective lens 30 and contacting the objective lens.

[0081] In other alternative embodiments, the flow guiding unit 20 may also consist of only one flow guiding plate or one flow guiding channel for guiding airflow. For example, the flow guiding unit 20 may only include a first flow guiding plate 21, on which a flow guiding surface or flow guiding channel is provided to guide the gas flowing out of the air outlet 142 toward the objective lens side. The specific configuration of the flow guiding unit 20 can be adaptively adjusted based on the actual spatial structure.

[0082] Please refer to Figure 10 As shown, this embodiment also provides an objective lens system, which is equipped with the aforementioned protective device; the objective lens system further includes an objective lens 30 and an objective lens holder 40, wherein the objective lens 30 is mounted on the objective lens holder 40. The objective lens holder 40 is connected to the objective lens fixing part 15 of the protective body 10 by bolts.

[0083] like Figure 10As shown, clean gas flows in from the inlet 141, is homogenized by the internal array of flow channels, and then flows out from the outlet 142. After being guided by the flow guiding unit 20, it flows towards the objective lens 30, contacts the objective lens 30, and then turns away from the objective lens 30, suppressing the flow of airborne contaminants towards the objective lens 30 and thus preventing contaminants from adhering to the objective lens surface. Simultaneously, the semi-enclosed flow channel cavity 12 forms a filled positive pressure gas layer, improving the device's protection under lateral disturbances and preventing rising contaminants from contacting the optical element surface. In simulations, the surface contamination level of this objective lens system remained below 0.5% under lateral disturbance conditions. In continuous anti-contamination effectiveness verification tests, no tendency for surface contamination of optical elements was observed.

[0084] This embodiment also provides a photolithography apparatus, which is equipped with the aforementioned objective lens system. The various subsystems of the photolithography apparatus are well known in the art and will not be described in detail here. The photolithography apparatus includes an objective lens system and a stage system. The objective lens system is equipped with the aforementioned objective lens protection device, which is located between the objective lens system and the stage system. During exposure and non-exposure processes, the objective lens system is protected from contamination by gases, droplets, or other forms of pollutants emitted from the stage and workpiece.

[0085] Example 2:

[0086] The difference between this embodiment and Embodiment 1 is that the number of homogenization units 13 is different, and the density of homogenization bodies 1301 in each homogenization unit 13 is different.

[0087] In this embodiment, four layers of homogenizing units 13 are provided, thereby forming four annular flow channels within the flow channel cavity 12. The inner layer of powder-clearing holes 191 can communicate with the two annular flow channels located in the middle. In this embodiment, the number of homogenizing bodies 1301 in each layer of homogenizing unit 13 is less than that in embodiment one, the axial dimension of a single homogenizing body 1301 is larger, fewer array homogenizing bodies 1301 are used, and the circumferential distance between adjacent homogenizing bodies 1301 is larger. The main purpose is to reduce internal pressure resistance and reduce the possibility of internal contaminant deposition. The more layers of homogenizing units 13 can better homogenize the airflow, further improving the phenomenon of counterclockwise or clockwise annular airflow at the outlet.

[0088] Example 3:

[0089] The difference between this embodiment and Embodiment 1 is that the cross-section of the homogenizing body 1301 cut along the axial direction perpendicular to the flow channel cavity 12 is different.

[0090] The cross-section of the homogenizing body 1301 of the preliminary homogenizing unit 131 and the airflow splitting unit 132 is a fan-shaped ring, and the circumferential length of part of the homogenizing body 1301 of the preliminary homogenizing unit 131 is greater than the circumferential length of the homogenizing body 1301 of the airflow splitting unit 132.

[0091] The homogenizing body 1301 of the terminal homogenizing unit 133 has a circular cross-section. Each air outlet 142 is formed between adjacent homogenizing bodies 1301 in the terminal homogenizing unit 133. The outer circumferential surface of the circular homogenizing body 1301 can better guide the diversion of the homogenized airflow, thereby helping to eliminate the phenomenon of counterclockwise or clockwise annular airflow at the air outlet.

[0092] Example 4:

[0093] The difference between this embodiment and Embodiment 3 is that the cross-section of the homogenizing body 1301 cut along the axial direction perpendicular to the flow channel cavity 12 is different.

[0094] The cross-section of the homogenizing body 1301 of the preliminary homogenizing unit 131 is a fan-shaped ring, and the circumferential length of the homogenizing body 1301 of the preliminary homogenizing unit 131 is greater than the circumferential length of the homogenizing body 1301 of the airflow splitting unit 132.

[0095] The homogenizer 1301 of the airflow splitting unit 132 has a cross-section that is a combination of fan-shaped ring and triangle. The fan-shaped ring and triangle homogenizer 1301 are alternately arranged along the circumference. By adding the triangle homogenizer 1301, the internal airflow can be homogenized more flexibly to improve the airflow homogenization effect. The shape of the triangle cross-section of the homogenizer 1301, the angle of each corner of the triangle, the arrangement direction of the triangle, and the arrangement position of the triangle homogenizer are all determined based on the actual homogenization requirements.

[0096] The homogenizer 1301 of the end homogenizing unit 133 has a circular cross-section, and each air outlet 142 is formed between adjacent homogenizers 1301 in the end homogenizing unit 133.

[0097] The cross-sectional shape of the homogenizer 1301 is relatively simple, which is conducive to processing and manufacturing. Moreover, the array arrangement of the homogenizer 1301 is relatively flexible. A good flow guiding and homogenization effect can be achieved by combining homogenizers 1301 with various cross-sectional shapes. It is easy to adapt to the flow guiding needs under different working conditions by flexible arrangement methods, and its application range is wide.

[0098] In other alternative embodiments, based on actual homogenization requirements, all homogenizing bodies 1301 of the airflow splitting unit 132 can be set to triangular cross sections, or based on actual homogenization requirements, the cross-sectional shape of the homogenizing bodies 1301 in each homogenization unit can be adaptively adjusted. For example, the cross-sectional shape can be rectangular, fan-shaped, circular, triangular, or other polygonal structures, which will not be elaborated here.

[0099] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0100] The above description is merely a description of preferred embodiments of the invention and is not intended to limit the scope of the invention in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A protective component for an objective lens, characterized in that, include: Protective main body and homogenization unit; The protective body is provided with a protective cavity, a flow channel cavity, and an air inlet; The flow channel cavity is formed along the circumference of the protective cavity on the inner peripheral wall of the protective cavity; The air inlet is connected to the flow channel cavity; The homogenizing unit is disposed within the flow channel cavity. The homogenizing unit includes multiple homogenizing bodies arranged in a circumferential array along the flow channel cavity. The two ends of the homogenizing bodies are respectively connected to two opposite sidewalls of the flow channel cavity along the axial direction of the flow channel cavity. The homogenizing unit is arranged in multiple layers along the radial direction of the flow channel cavity to form several nested and interconnected annular flow channels within the flow channel cavity, and to form multiple air outlets arranged in a circumferential array along the flow channel cavity and connected to the protective cavity.

2. The objective lens protective component as described in claim 1, characterized in that, The homogenization unit has three layers arranged radially from the outside to the inside along the flow channel cavity, namely a preliminary homogenization unit, an airflow splitting unit, and an end homogenization unit.

3. The objective lens protective component as described in claim 1, characterized in that, The air inlet is connected from the inner peripheral wall of the flow channel cavity to the outer peripheral wall of the protective body.

4. The objective lens protective component as described in claim 1, characterized in that, In the homogenization units of adjacent layers, at least a portion of the homogenizing bodies are staggered along the circumferential direction of the flow channel cavity.

5. The objective lens protective component as described in claim 1, characterized in that, The cross-section of each homogenizing body cut along the axial direction perpendicular to the flow channel cavity is one or a combination of one or more of the following: circular, triangular, rectangular, and fan-shaped.

6. The objective lens protective component as described in claim 1, characterized in that, Along the radial direction of the flow channel cavity from the outside to the inside, the circumferential dimension of at least a portion of the homogenizing bodies in each homogenizing unit layer gradually decreases.

7. The objective lens protective component as described in claim 2, characterized in that, The homogenizing body of the preliminary homogenizing unit has a rectangular or fan-shaped cross-section cut along the axial direction perpendicular to the flow channel cavity; and / or, at least a portion of the homogenizing body of the airflow splitting unit has a triangular cross-section cut along the axial direction perpendicular to the flow channel cavity; and / or, the homogenizing body of the terminal homogenizing unit has a circular cross-section cut along the axial direction perpendicular to the flow channel cavity.

8. The objective lens protective component as described in claim 1, characterized in that, The protective body is annular in shape, and the inner cylindrical cavity of the protective body forms the protective cavity; and / or; the flow channel cavity is annular in shape; and / or; the annular flow channel is annular in shape.

9. The objective lens protective component as described in claim 8, characterized in that, The protective body, the flow channel cavity, and the annular flow channel are arranged coaxially.

10. The objective lens protective component as claimed in claim 1, characterized in that, The protective body is provided with an objective lens fixing part; and / or; the protective body is provided with a tooling fixing part; the objective lens fixing part is used to connect with the objective lens holder, and the tooling fixing part is used to fix the protective body during tooling.

11. The objective lens protective component as claimed in claim 1, characterized in that, The protective body is provided with a powder cleaning hole, which is connected to the flow channel cavity.

12. The objective lens protective component as described in claim 11, characterized in that, The powder cleaning holes include inner powder cleaning holes and outer powder cleaning holes. The outer powder cleaning holes are directly connected to the outermost annular flow channel along the radial direction of the flow channel cavity. The inner powder cleaning holes are directly connected to other annular flow channels other than the outermost annular flow channel.

13. The objective lens protective component as described in claim 11, characterized in that, The cleaning hole is located on one side of the protective body along the axial direction of the protective cavity.

14. The objective lens protective component as claimed in claim 1, characterized in that, Along the radial direction of the flow channel cavity, the distance between the homogenization units of adjacent layers is 1-5 mm.

15. A protective device, characterized in that, The protective device is equipped with the objective lens protector as described in any one of claims 1-14.

16. The protective device as described in claim 15, characterized in that, The protective device also includes a flow guiding unit, which is disposed on the protective body. The flow guiding unit is used to guide the gas flowing out through the gas outlet so that the gas flows towards the objective lens side.

17. The protective device as claimed in claim 16, characterized in that, The flow guiding unit includes a first flow guiding plate, which has a first flow guiding section for guiding the gas flowing out of the outlet toward the objective lens side.

18. The protective device as claimed in claim 17, characterized in that, The flow guiding unit further includes a second flow guiding plate, and the first flow guiding plate also has a second flow guiding part. A flow guiding channel is formed between the second flow guiding part and the second flow guiding plate. The flow guiding channel is connected to the air outlet and is used to guide the gas flowing out of the air outlet to flow towards the first flow guiding part.

19. The protective device as described in claim 18, characterized in that, The protective cavity extends through the protective body along the axial direction of the protective cavity. The first guide plate and the second guide plate are respectively disposed on both sides of the protective body along the axial direction of the protective cavity. The second guide portion extends radially into the protective cavity.

20. The protective device as described in claim 18, characterized in that, The protective cavity and the protective body are coaxially arranged; and / or; the protective cavity and the first guide plate are coaxially arranged; and / or; the protective cavity and the second guide plate are coaxially arranged.

21. An objective lens system, characterized in that, The objective lens system is equipped with the protective device as described in any one of claims 15-20.

22. A photolithography apparatus, characterized in that, The lithography equipment is equipped with the objective lens system as described in claim 21.

Images