Wafer scriber and adjustment method and adjustment device for its blade breakage detection base

Abstract

This invention discloses a dicing machine and its blade breakage detection base adjustment method and device, relating to the field of dicing machine technology. The dicing machine includes a blade and a blade breakage detection base movable relative to the blade. The adjustment method includes: acquiring light emitted by the blade breakage detection base and passing through the blade; when the light intensity of the light is greater than a preset light intensity, and the difference between the light intensity and the preset light intensity is greater than a preset light intensity difference, calculating the displacement of the blade breakage detection base based on the light intensity; and controlling the blade breakage detection base to move relative to the blade based on the displacement.

Description

Technical Field

[0001] This invention relates to the field of dicing machine technology, and in particular to a dicing machine and an adjustment method and device for its blade breakage detection base. Background Technology

[0002] As a core piece of equipment in the semiconductor packaging process, the dicing machine uses a high-speed rotating air-hydrostatic spindle to drive diamond grinding wheel blades to precisely dice wafers, ensuring cutting efficiency and quality. However, during this process, the high-speed friction and extremely thin nature of the blades can easily lead to blade breakage or wear, directly affecting product quality. Therefore, real-time monitoring of the blade status is crucial.

[0003] Existing blade breakage detection devices mainly rely on fiber optic sensors to monitor blade condition through changes in light intensity, effectively identifying blade breakage and providing immediate feedback. However, when the blade wears to a certain extent and the exposure amount increases abnormally, existing blade breakage detection devices require manual adjustment of the exposure amount, which is not only cumbersome, inefficient, and prone to errors, but also poses safety risks. Summary of the Invention

[0004] The purpose of this invention is to provide an adjustment method and device for a dicing machine and its blade breakage detection base, which solves the technical problems of inconvenience and large errors caused by manual adjustment.

[0005] To achieve the above objectives, the present invention provides an adjustment method for a blade breakage detection base of a dicing machine, characterized in that the dicing machine includes a blade and a blade breakage detection base movable relative to the blade;

[0006] Adjustment methods include:

[0007] Acquire the light emitted from the blade damage detection base and passing through the blade;

[0008] When the light intensity is greater than the preset light intensity, and the difference between the light intensity and the preset light intensity is greater than the preset light intensity difference, the displacement of the blade breakage detection base is calculated based on the light intensity.

[0009] The movement of the blade breakage detection base relative to the blade is controlled by the amount of displacement.

[0010] Preferably, between the step of acquiring the light emitted by the blade breakage detection base and passing through the blade, and the step of calculating the displacement of the blade breakage detection base based on the light intensity when the light intensity is greater than a preset light intensity and the difference between the light intensity and the preset light intensity is greater than a preset limit light intensity, the method further includes:

[0011] Convert the light signal corresponding to the light ray into a voltage value;

[0012] The voltage value is converted into a digital electrical signal value digit_A after being filtered by a first-order hysteresis filter.

[0013] Preferably, the dicing machine also includes a servo motor for controlling the movement of the blade breakage detection base, and the blade breakage detection base is provided with a light-receiving element for receiving light;

[0014] The steps for calculating the displacement of the blade breakage detection base based on light intensity include:

[0015] The light receiver is calibrated to ensure that its signal value is within the range of 0% to 95%.

[0016] Approximation tests were performed on both ends of the preset height threshold of the blade breakage detection base to obtain the digital electrical signal values ​​of the light receiving component, namely digit_C and digit_D, and the actual position register values ​​Act_pos1 and Act_pos2 in the servo motor were obtained. Among them, digit_D is greater than digit_C, and the units of Act_pos1 and Act_pos2 are micrometers, with Act_pos2 being greater than Act_pos1.

[0017] The displacement of the blade breakage detection base is calculated using the formula digit_A× / .

[0018] Preferred,

[0019] The steps for calculating the displacement of the blade breakage detection base based on light intensity include:

[0020] Using the Tektronix averaging algorithm, the average displacement is calculated from the light intensity obtained within a preset time range and at a preset frequency.

[0021] Preferably, the preset light intensity is 5%-95% of the maximum light intensity that the light-receiving element can receive.

[0022] and / or;

[0023] The preset light intensity difference is specifically 10%-90% of the maximum light intensity that the light receiving device can receive.

[0024] This application also provides an adjustment device for a blade breakage detection base of a dicing machine, comprising:

[0025] Memory, used to store computer programs;

[0026] The processor, which is connected to the memory, executes a computer program to implement the steps of the adjustment method for the blade breakage detection base of the dicing machine as described above.

[0027] This application also provides a dicing machine that can perform the steps of the above-described adjustment method for the blade breakage detection base of the dicing machine. The dicing machine includes a blade and a blade breakage detection base that can move relative to the blade. The blade breakage detection base is provided with an emitting element for emitting detection light and a light receiving element for receiving light.

[0028] Preferably, the dicing machine also includes a fixed block, and the relative positions of the fixed block and the blade are fixed; the blade breakage detection base is slidably disposed on the fixed block, and the fixed block is also provided with an air inlet, which is connected to an air blowing pipe, and the air blowing end of the air blowing pipe is located between the ejector and the light-receiving component and is oriented towards the blade.

[0029] Preferably, the dicing machine also includes a servo motor, the output end of which is connected to a lead screw, and the lead screw and the blade breakage detection base are threaded together.

[0030] Preferably, the dicing machine also includes a tool holder fixing plate, which is vertically arranged, with a main shaft and a blade on its two sides respectively. The output end of the main shaft is connected to the blade. The servo motor, the lead screw, and the blade breakage detection base are located on the same side of the tool holder fixing plate as the blade, and the three are inclined at an angle to the blade and extend away from the blade. The servo motor is mounted on the tool holder fixing plate through a motor fixing plate. A grating ruler is provided on the lead screw, and the grating ruler is connected to the controller inside the servo motor. An upper limit seat, a limit blocking plate, and a lower limit seat are sequentially provided on the lead screw along the direction close to the blade.

[0031] Compared with the above-mentioned background technology, the present invention provides an adjustment method for a blade breakage detection base of a dicing machine. The dicing machine used in this adjustment method includes a blade and a blade breakage detection base that can move relative to the blade. Generally speaking, the blade breakage detection base has an ejector on one side and a light-receiving element on the other side. The blade is located between the ejector and the light-receiving element. The ejector is used to irradiate a designated area of ​​the cutting edge of the blade, and the light-receiving element is used to receive the light passing through the blade. When the light intensity is greater than a preset light intensity, and the difference between the light intensity and the preset light intensity is greater than the preset light intensity difference, the displacement of the blade breakage detection base is calculated based on the light intensity. Finally, the blade breakage detection base is controlled to move relative to the blade according to the displacement, so that the light intensity received by the light-receiving element is maintained within a preset range, and the blade breakage detection base is kept in a high-sensitivity state.

[0032] Compared to existing technologies, this application first determines whether the light intensity is greater than a preset light intensity and whether the difference between the light intensity and the preset light intensity is greater than the preset light intensity difference. That is, it determines whether the preconditions for adjusting the blade breakage detection base are met. If both are met, the light intensity is used to calculate the displacement of the blade breakage detection base. This setting avoids the danger caused by manual adjustment in existing technologies, and the adjustment accuracy is reliable and the adjustment timing is more flexible. This ensures that the light intensity received by the light-receiving component of the blade breakage detection base is maintained within a certain range, ensuring that the blade breakage detection base remains in a high-sensitivity state. Attached Figure Description

[0033] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0034] Figure 1 This is a partial structural diagram of the blade breakage detection base in the dicing machine provided in an embodiment of the present invention;

[0035] Figure 2 This is a schematic diagram of the blade breakage detection base and blade of the dicing machine provided in an embodiment of the present invention;

[0036] Figure 3 for Figure 2 A sectional view;

[0037] Figure 4 This is a flowchart illustrating the adjustment method of the blade breakage detection base of the dicing machine provided in an embodiment of the present invention;

[0038] Figure 5 This is a schematic diagram of the control process of the adjustment method for the blade breakage detection base of the dicing machine provided in an embodiment of the present invention;

[0039] in:

[0040] 1-Servo motor, 2-Motor mounting plate, 3-Raster ruler, 4-Fixing block, 5-Air inlet, 6-Tool holder mounting plate, 7-Spindle, 8-Main nozzle device, 9-Cooling pipe, 10-Blade, 11-Injection part mounting base, 12-Lower limit seat, 13-Limit shield, 14-Upper limit seat, 15-Blade breakage detection base, 16-Fiber optic data cable, 17-Lead screw, 18-Coupling, 19-Air blowing pipe, 20-Injection part, 21-Light receiving part, 22-Light receiving part mounting base. Detailed Implementation

[0041] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0042] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0043] This application provides a method for adjusting the blade breakage detection base of a dicing machine. Before introducing the method for adjusting the blade breakage detection base, the general structure of the dicing machine will be briefly described.

[0044] Please see the appendix Figure 1-3 The dicing machine includes a blade 10 and a blade breakage detection base 15. The blade 10 can rotate under the action of the spindle 7 to achieve the dicing operation. In order to detect the wear of the blade 10, a blade breakage detection base 15 is provided above the blade 10. The blade breakage detection base 15 detects the wear of the blade 10 based on the optical detection principle.

[0045] The blade breakage detection base 15 is provided with an ejector 20 and a light receiver 21. The blade 10 is located between the ejector 20 and the light receiver 21. The ejector 20 is used to emit detection light, and the light receiver 21 is used to receive the light passing through the blade 10. The ejector 20 emits light towards the cutting edge of the blade 10. Part of the light is blocked by the blade 10, and the remaining light is received by the light receiver 21.

[0046] For example, when the blade 10 wears and becomes thinner, it can still be used without replacement. In order to keep the light intensity received by the light-receiving element 21 within a certain range, the position of the blade damage detection base 15 needs to be adjusted downward, that is, moved closer to the blade 10. The blade damage detection base 15 is moved to the thicker part of the blade 10, thereby reducing the light intensity received by the light-receiving element 21 and keeping the received light intensity within a certain range.

[0047] Please see the appendix Figure 4 , Figure 4 A flowchart illustrating the adjustment method of the blade breakage detection base for a dicing machine;

[0048] S1. Acquire the light emitted by the blade breakage detection base 15 and passing through the blade 10;

[0049] S2. When the light intensity is greater than the preset light intensity and the difference between the light intensity and the preset light intensity is greater than the preset light intensity difference, the displacement of the blade breakage detection base 15 is calculated based on the light intensity.

[0050] S3. Control the movement of the blade breakage detection base 15 relative to the blade 10 according to the displacement amount.

[0051] In step S1, the ejector 20 of the blade breakage detection base 15 can emit light to the cutting edge of the blade 10. Part of the emitted light is blocked by the blade 10, and the remaining light is received by the light receiver 21. It can be assumed that the light receiver 21 acquires the light intensity of the light at a preset frequency within a preset time.

[0052] In step S2, the light intensity collected by the light-receiving element 21 is compared with the preset light intensity to determine whether the collected light intensity is greater than the preset light intensity, and whether the difference between the light intensity collected by the light-receiving element 21 and the preset light intensity is greater than the preset light intensity difference. That is, the light intensity collected by the light-receiving element 21 must not only be greater than the preset light intensity, but also be greater than the preset light intensity by a certain degree, i.e., the light intensity collected by the light-receiving element 21 must be greater than the preset light intensity plus the preset light intensity difference. Only when the above conditions are met does it prove that the position of the blade breakage detection base 15 relative to the blade 10 needs to be adjusted. Therefore, the displacement of the blade breakage detection base 15 is calculated based on the light intensity collected by the light-receiving element 21.

[0053] In step S3, the blade breakage detection base 15 is moved relative to the blade 10 according to the displacement amount, that is, the positional relationship between the ejector 20 and the light receiver 21 relative to the blade breakage detection base 15 is adjusted so that the light intensity received by the light receiver 21 is stabilized within a certain range.

[0054] In some embodiments, between steps S1 and S2, the method further includes:

[0055] Convert the light signal corresponding to the light ray into a voltage value;

[0056] The voltage value is converted into a digital electrical signal value digit_A after being filtered by a first-order hysteresis filter.

[0057] In other words, before comparing light intensity and calculating the displacement of the blade breakage detection base 15, corresponding numerical operations can be performed to ensure data reliability. After receiving light, the characteristics of the light cause changes in the chemical or physical properties of the light intensity sensor of the light receiver 21. These changes can be detected and converted into voltage values. In addition, to facilitate the execution of subsequent steps, the voltage value can be converted into a digital signal. There are various methods to convert the voltage value into a digital signal digit_A. However, in this embodiment, the working environment of the slicing machine can be an open environment. In addition to the light emitted by the emitter 20, light generated from the outside will also be received by the light receiver 21. Furthermore, the chips during the cutting process will adhere to the light emitter and / or the light receiver 21, resulting in inaccurate light intensity values. Therefore, the digital signal conversion method in this embodiment adopts first-order hysteresis filtering. By weighted averaging the voltage value, interference and fluctuations in the light intensity acquisition process are eliminated, making the output digital signal more accurate and the adjustment effect of the blade breakage detection base 15 more precise.

[0058] In some embodiments, the dicing machine further includes a servo motor 1, which controls the movement of the blade breakage detection base 15; furthermore, the step S2 described above, which calculates the displacement of the blade breakage detection base based on light intensity, includes:

[0059] The light receiver 21 is calibrated to ensure that its signal value is within the range of 0% to 95%.

[0060] Approximation tests were performed on both ends of the preset height threshold of the blade breakage detection base 15 to obtain the digital electrical signal values ​​of the light receiving element 21 as digit_C and digit_D, respectively, and the actual position register values ​​Act_pos1 and Act_pos2 in the servo motor 1 were obtained. Among them, digit_D is greater than digit_C, and the units of Act_pos1 and Act_pos2 are micrometers, with Act_pos2 being greater than Act_pos1.

[0061] The displacement of the blade breakage detection base 15 is calculated using the formula digit_A× / .

[0062] Here, a servo motor 1 is used to perform the displacement of the blade breakage detection base 15, and the direction closer to the blade 10 is set as the positive Z-axis. Before calculating the light intensity, the light receiving element 21 needs to be calibrated so that the signal value of the light receiving element 21 is within the range of 0% to 95%.

[0063] The Z-axis displacement signals in both positive and negative directions are sent to the servo motor 1 to perform an approximation test on both ends of the preset height threshold of the blade breakage detection base 15. The two ends of the height threshold can be customized high and low points.

[0064] When a positive Z-axis displacement signal is sent to servo motor 1, servo motor 1 moves. The light receiver 21 transmits a light intensity signal to the processor. When the light intensity signal reaches 5% of the limit light intensity, the operation of servo motor 1 can be terminated, and the light intensity at this time is recorded and converted into a digital signal digit_C. Similarly, the processor sends a negative Z-axis displacement signal to servo motor 1. When the light intensity signal reaches 95% of the limit light intensity, the operation of servo motor 1 is terminated, and the light intensity at this time is recorded and converted into a digital signal digit_D. In addition, it is also necessary to read the position data in the position register of servo motor 1 when the light receiver 21 reaches the limit light intensity of 5% and 95%, respectively, which are recorded as Act_pos1 and Act_pos2, where the unit of Act_pos1 and Act_pos2 is micrometers.

[0065] Subsequently, the difference between the digital signals digit_C and digit_D is calculated to determine the signal change between 5% and 95% of the limiting illuminance. Simultaneously, the difference between Act_pos1 and Act_pos2 is calculated to determine the displacement required by servo motor 1 to move from 95% to 5% limiting illuminance. Finally, the ratio of the position difference to the numerical signal difference is calculated to determine the displacement required by servo motor 1 to control the blade breakage detection base 15 for each unit change in the digital signal. Finally, the difference between the acquired digital signal and the preset digital signal, digit_A, is calculated. The ratio of the position difference to the numerical signal difference is multiplied by digit_A to determine the displacement required by servo motor 1 to adjust the current light intensity to the preset light intensity. This displacement of the blade breakage detection base 15 is calculated using the formula digit_A × (1 / 2) / (1 / 2). Furthermore, the ratio of the position difference to the numerical signal difference is stored. When calculating the adjustment displacement, only digit_A is calculated, and this ratio is periodically updated to ensure the accuracy of data processing.

[0066] In some embodiments, step S2 above, the step of calculating the displacement of the blade breakage detection base 15 based on the light intensity, includes:

[0067] Using the Tektronix averaging algorithm, the average displacement is calculated from the light intensity obtained within a preset time range and at a preset frequency.

[0068] When calculating the required displacement of the blade breakage detection base 15, although a first-order hysteresis filter was applied to the voltage signal to eliminate the influence of external interference on the data, the blade breakage detection base 15 may still have systematic errors. This can lead to deviations in the acquired data when obtaining digit_C and digit_D, and Act_pos1 and Act_pos2, resulting in inaccurate adjustment. Therefore, when calculating the displacement of the blade breakage detection base 15 based on light intensity, the Tektronix averaging method can also be used. Taking the processing of digit_C data as an example, the Tektronix averaging method calculation steps are as follows:

[0069] Multiple sets of digit_C data were collected and initially processed. An initial average was calculated using the arithmetic mean. Then, statistical methods or specific outlier detection techniques were used to identify outliers. Once an outlier was identified, it was removed from the dataset. The average of the outlier-removed dataset was calculated again to obtain a new average. At this point, the difference between the old and new averages needed to be evaluated to determine if it met the preset convergence criteria. If the difference met the convergence criteria, the data was considered sufficiently stable, and the iteration process could end. If the difference did not meet the criteria, it indicated that unidentified outliers still existed in the dataset, requiring continued outlier detection and removal. After several iterations of the Tek averaging algorithm, a more accurate and reliable average was finally obtained, ensuring the quality of the dataset and the accuracy of the analysis results.

[0070] Taking the above as an example, this paper can also use the Tektronix averaging algorithm to calculate all the light intensity data collected by the light receiving element 21 within a preset time range and at a preset frequency. For example, within a preset time range of 2-10 seconds, at a frequency of once every 2-10 milliseconds, the Tektronix averaging algorithm is used to calculate the average displacement of the blade breakage detection base 15, and the blade breakage detection base 15 is controlled to move according to the average displacement.

[0071] In some embodiments, the preset light intensity recorded in step S2 above may be specifically 5%-95% of the limit light intensity that the light receiver 21 can receive, and / or; the preset light intensity difference may be specifically 10%-90% of the limit light intensity that the light receiver 21 can receive.

[0072] Generally speaking, the preset light intensity and the preset light intensity difference can be determined according to the actual working conditions. The preset light intensity is preferably 20%-65% of the limit light intensity that the light receiving element 21 can receive. The setting of the preset light intensity difference should not only take into account the preset light intensity, but also the actual working conditions. This article will not elaborate on this.

[0073] Please see the appendix Figure 5 , Figure 5 This is a schematic diagram of the control process of the adjustment method for the blade breakage detection base of the dicing machine provided in an embodiment of the present invention;

[0074] First, the adjustment method for the blade breakage detection base of the dicing machine is put into operation;

[0075] Then, determine whether spindle 7 is running. If spindle 7 starts running, enable the monitoring function for the blade breakage detection base; otherwise, disable the monitoring function.

[0076] After enabling the monitoring function of the blade breakage detection base, it is determined whether the blade breakage timed self-test trigger has started. If so, the host computer sends a signal command to the signal board of the blade breakage detection base to collect the light intensity of the light receiving component 21. If not, the blade cutting operation continues. Here, the blade breakage timed self-test trigger refers to the cyclical timed triggering of the blade breakage detection operation. The specific time of the cyclical timed triggering can be determined according to actual needs. In addition, the blade breakage timed self-test is only triggered when the spindle is running.

[0077] Next, the signal board of the blade breakage detection base transmits the optical signal data collected by the light receiving component 21 to the host computer, which then calculates the displacement data required for the blade breakage detection base to move.

[0078] When it is determined from the displacement data that the blade breakage detection base needs to be moved, the host computer transmits the displacement data to the servo motor, and the motion controller of the servo motor adjusts the position of the blade breakage detection base.

[0079] Afterwards, the host computer again determines whether the light signal received by the light receiver is appropriate. If not, the above steps are repeated, in which the host computer sends a signal instruction to the signal board of the blade breakage detection base to collect the light intensity of the light receiver 21. If so, the signal board of the blade breakage detection base continues to collect N cycles of data according to the set sampling rate. The data here is still the light signal data received by the light receiver. The sampling period is the time length, and the value is determined according to the customer's experience and the age of the tool.

[0080] Then, the host computer analyzes and calculates the data and compares it with the previous data. This step can be considered as comparing the collected optical signal data for different sampling cycles as the dicing machine runs. The host computer can use the optical signal data to determine whether there is a difference between the current blade wear and the previous cycle. If there is no difference, it is considered that the blade wear is not significant and cutting can continue. If there is a difference, the host computer sends a height measurement signal to the servo motor and the light receiver. The height measurement signal here refers to the signal correction of the light receiver 21 in step S2 above and the approximation test at both ends of the preset height threshold of the blade breakage detection base 15, and finally obtains the execution signals of the digital electrical signal values ​​digit_C and digit_D and the actual position register values ​​Act_pos1 and Act_pos2 in the servo motor 1. As mentioned above, since the blade breakage timer self-check is only triggered when the spindle is running, but the spindle running does not mean that actual cutting will be performed, it may perform sham cutting. Therefore, it is necessary to compare the detection data before and after to determine whether the height needs to be adjusted.

[0081] After the height measurement is completed, the latest compensation value of the blade breakage detection base 15 is written into the motion coordinates, and finally the height adjustment of the blade breakage detection base 15 is completed.

[0082] This application also provides an adjustment device for a blade breakage detection base of a dicing machine, comprising:

[0083] Memory, used to store computer programs;

[0084] The processor, which is connected to the memory, executes a computer program to implement the steps of the adjustment method for the blade breakage detection base of the dicing machine as described above.

[0085] This application also provides a dicing machine; please refer to the appendix for details. Figure 1-3 The dicing machine can perform the steps of the above-described adjustment method for the blade breakage detection base of the dicing machine. The dicing machine includes a blade 10 and a blade breakage detection base 15 that can move relative to the blade 10. The blade breakage detection base 15 is provided with an emitter 20 for emitting detection light and a receiver 21 for receiving light.

[0086] Based on the above, the blade breakage detection base 15 has brackets on both sides of its front end. The brackets on both sides are a light-receiving component mounting base 22 and an ejector mounting base 11, respectively. The light-receiving component 21 is installed facing the inside of the blade breakage detection base 15. Opposite to the light-receiving component 21 is an ejector 20 that emits light, which is used to emit light to the blade cutting edge area. Part of the light is blocked by the blade 10, and the rest is received by the light-receiving component 21. As the blade cutting edge wears down, the area blocking the light decreases, the portion received by the light-receiving component 21 increases, and the light intensity increases. The degree of blade wear is reflected by the change in light intensity.

[0087] The light-receiving component 21 can be a fiber optic sensor. The working principle of the fiber optic sensor is to convert the state of the object being measured into a measurable optical signal. Specifically, the light beam emitted by the light source is introduced into the modulator through the optical fiber. The modulator converts the optical signal into a modulated optical signal by changing the optical properties of the light. The light intensity signal is then transmitted to the fiber optic amplifier through the fiber optic data line 16. The photoelectric conversion module of the fiber optic amplifier converts the measurement parameters into a voltage from 0V to 10V and transmits it to the processor.

[0088] The ejector 20 can be a laser emitter. Compared with other light sources, the laser beam emitted by the laser emitter has high directionality and almost no scattering. This ensures that the light intensity per unit area of ​​the laser beam is consistent, making the light intensity obtained by the light receiver 21 have a near linear relationship with the blade wear area, and making the calculated displacement of the blade breakage detection base 15 more accurate.

[0089] In conjunction with the above, the dicing machine also includes a servo motor 1, the output end of which is connected to a lead screw 17, and the lead screw 17 is threadedly connected to the blade breakage detection base 15.

[0090] Servo motor 1 is connected to motor mounting plate 2, and motor mounting plate 2 can be fixed to tool holder mounting plate 6 through screw holes. Servo motor 1 has a lead screw 17 inside, and the two are connected by coupling 18. The lead screw 17 can obtain power from servo motor 1 through coupling 18 to move along the Z-axis. The other end of lead screw 17 is connected to blade breakage detection base 15. Blade breakage detection base 15 and lead screw 17 are connected and locked by threads, and there is no relative displacement between them. When servo motor 1 receives adjustment displacement information from processor, servo motor 1 provides power to lead screw 17, and lead screw 17 and blade breakage detection base 15 move synchronously to adjust the position of blade breakage detection base 15 so that the light intensity received by light receiving element 21 meets the preset range.

[0091] The aforementioned tool holder fixing plate 6 is vertically arranged, with a spindle 7 and a blade 10 respectively on its two sides. The output end of the spindle 7 is connected to the blade 10. The servo motor 1, the lead screw 17, and the blade breakage detection base 15 are located on the same side of the tool holder fixing plate 6 as the blade 10, and they are inclined at an angle to the blade 10 and extend away from the blade 10. The servo motor 1 is mounted on the tool holder fixing plate 6 via a motor fixing plate 2. A grating ruler 3 is provided on the lead screw 17, and the grating ruler 3 is connected to the controller inside the servo motor 1. An upper limit seat 14, a limit blocking plate 13, and a lower limit seat 12 are sequentially provided on the lead screw 17 along the direction close to the blade 10. The grating ruler 3 is parallel to the lead screw 17 and can detect linear displacement. The grating ruler 3 and the servo motor 1 can be connected via an RS422A data cable to obtain the displacement of the lead screw 17 and transmit digital signals to the servo motor 1. The processor controlling the servo motor 1 becomes... The speed loop in the system adjusts the operating power of the servo motor 1, making the movement of the lead screw 17 smoother, ensuring feed accuracy, and improving the reliability of online monitoring.

[0092] In some embodiments, the dicing machine further includes a fixing block 4, the relative positions of the fixing block 4 and the blade 10 are fixed; the blade breakage detection base 15 is slidably disposed on the fixing block 4, the fixing block 4 is also provided with an air inlet 5, the air inlet 5 is connected to an air blowing pipe 19, the air blowing end of the air blowing pipe 19 is located between the ejector 20 and the light receiving element 21, and is disposed toward the blade 10.

[0093] In actual production, during the operation of the servo motor 1 and the movement of the lead screw 17, the lead screw 17 may feed too much in the positive Z-axis direction, causing the blade 10 to contact the blade breakage detection base 15, or feed too much in the negative Z-axis direction, causing the blade breakage detection base 15 to collide with the motor fixing plate 2, thereby causing equipment damage. To avoid such problems, a lower limit seat 12, a limit shield 13, and an upper limit seat 14 are set on the outside of the blade breakage detection base 15. The lower limit seat 12 is at the end closer to the blade 10, the upper limit seat is at the end farther from the blade 10, and the limit shield 13 is in between the two. Each limiter restricts the displacement of the lead screw 17 within the specified range, avoiding mechanical overrun.

[0094] During the cutting process of the dicing machine, while the blade 10 rotates at high speed to perform the cutting task, the supporting main nozzle device 8 and cooling pipe 9 work together to effectively cool the high-speed rotating blade 10 by spraying water, and immediately wash away the debris generated during the cutting process, ensuring the cleanliness and safety of the working area. However, due to the high-speed rotation effect of the blade 10, the surrounding air is significantly agitated, forming water mist and scattering cutting debris. This water mist containing debris will adhere to the measuring components, contaminating the emitting end face of the ejector 20 and the receiving mirror surface of the light receiver 21, thereby affecting the accuracy and stability of optical measurement, and may ultimately lead to distorted measurement data or measurement failure. To ensure the reliability of the adjustment results, an air blowing interface 5 is provided on the dicing machine fixing block, which is connected by threads. The air blowing interface 5 connects to two air blowing pipes 19, with the air blowing ends of the air blowing pipes 19 located between the blade 10 and the ejector 20, and between the blade 10 and the light receiver 21, respectively, and facing towards the blade 10. While the blade 10 is running, the air blowing port 5 receives clean air pumped in from the outside and blows it out from the air blowing pipe 19. The blown airflow forms a positive pressure on both sides of the blade 10, which can promptly blow the chips generated by cutting away from the blade damage detection base 15, preventing them from adhering to the light receiving element 21 and the light emitting element 20, thus improving the reliability of use.

[0095] It should be noted that in this specification, relational terms such as first and second are used only to distinguish one entity from several other entities, and do not necessarily require or imply any such actual relationship or order between these entities.

[0096] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention. It should be noted that those skilled in the art can make several improvements and modifications to the present invention without departing from the principles of the present invention, and these improvements and modifications also fall within the protection scope of the present invention.

Claims

1. A method for adjusting a blade breakage detection base for a dicing machine, characterized in that, The dicing machine includes a blade and a blade breakage detection base movable relative to the blade; The adjustment method includes: Acquire the light emitted by the blade damage detection base and passing through the blade; When the light intensity of the light is greater than the preset light intensity, and the difference between the light intensity and the preset light intensity is greater than the preset light intensity difference, the displacement of the blade breakage detection base is calculated based on the light intensity. The blade breakage detection base is moved relative to the blade according to the displacement amount; Between the step of acquiring the light emitted by the blade breakage detection base and passing through the blade, and the step of calculating the displacement of the blade breakage detection base based on the light intensity when the light intensity is greater than a preset light intensity and the difference between the light intensity and the preset light intensity is greater than a preset light intensity difference, the method further includes: Convert the optical signal corresponding to the light ray into a voltage value; The voltage value is converted into a digital electrical signal value digit_A after being filtered by a first-order hysteresis filter. The dicing machine also includes a servo motor (1) for controlling the movement of the blade breakage detection base, and the blade breakage detection base is provided with a light receiving element (21) for receiving the light. The step of calculating the displacement of the blade breakage detection base based on the light intensity includes: The light-receiving element (21) is signal-corrected so that the signal value of the light-receiving element (21) is within the range of 0% to 95%; Approximation tests were performed on both ends of the preset height threshold of the blade breakage detection base to obtain the digital electrical signal values ​​of the light receiving element (21) as digit_C and digit_D, respectively, and the actual position register values ​​Act_pos1 and Act_pos2 in the servo motor (1) were obtained, where digit_D is greater than digit_C, the units of Act_pos1 and Act_pos2 are micrometers, and Act_pos2 is greater than Act_pos1; The displacement of the blade breakage detection base is calculated using the formula digit_A×(Act_pos2 - Act_pos1) / (digit_D - digit_C).

2. The adjustment method according to claim 1, characterized in that, The step of calculating the displacement of the blade breakage detection base based on the light intensity includes: Using the Tektronix averaging algorithm, the average displacement is calculated from the light intensity obtained within a preset time range and at a preset frequency.

3. The adjustment method according to claim 1, characterized in that, The preset light intensity is specifically 5%-95% of the maximum light intensity that the light-receiving element (21) can receive. and / or; The preset light intensity difference is specifically 10%-90% of the maximum light intensity that the light receiving element (21) can receive.

4. An adjustment device for a blade breakage detection base of a dicing machine, characterized in that, include: Memory, used to store computer programs; A processor, connected to the memory, wherein the processor is configured to execute the computer program to implement the steps of the adjustment method for the blade breakage detection base of the dicing machine as described in any one of claims 1 to 3.

5. A dicing machine, characterized in that, The adjustment method of the blade breakage detection base of the dicing machine according to any one of claims 1 to 3 is applicable. The dicing machine includes a blade (10) and a blade breakage detection base (15) movable relative to the blade (10). The blade breakage detection base (15) is provided with an emitter (20) for emitting detection light and a receiver (21) for receiving the light.

6. The dicing machine according to claim 5, characterized in that, The dicing machine also includes a fixing block (4), the relative positions of the fixing block (4) and the blade (10) are fixed; the blade breakage detection base (15) is slidably disposed on the fixing block (4), the fixing block (4) is also provided with an air inlet (5), the air inlet (5) is connected to an air blowing pipe (19), the air blowing end of the air blowing pipe (19) is located between the ejector (20) and the light receiving element (21), and is set towards the blade (10).

7. The dicing machine according to claim 5, characterized in that, The dicing machine also includes a servo motor (1), the output end of which is connected to a lead screw (17), and the lead screw (17) and the blade breakage detection base (15) are threaded together.

8. The dicing machine according to claim 7, characterized in that, The dicing machine also includes a blade holder fixing plate (6), which is vertically arranged. A main shaft (7) and the blade (10) are respectively provided on its two sides. The output end of the main shaft (7) is connected to the blade (10). The servo motor (1), the lead screw (17) and the blade breakage detection base (15) are located on the same side of the blade holder fixing plate (6) as the blade (10), and the three are inclined at an angle to the blade (10) and extend away from the blade (10). The servo motor (1) is mounted on the blade holder fixing plate (6) through a motor fixing plate (2). A grating ruler (3) is provided on the lead screw (17). The grating ruler (3) is connected to the controller inside the servo motor (1). An upper limit seat (14), a limit blocking plate (13) and a lower limit seat (12) are sequentially provided on the lead screw (17) along the direction close to the blade (10).

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