A high-precision multi-axis transmission structure for chip transmission

Abstract

A kind of high-precision multi-axis transmission structure for chip transmission, characterized in that comprising rack, X-axis component, chip pickup component, the X-axis component is set on the rack by bolt, the chip pickup component is set on the rack, the X-axis component has two, two X-axis components are arranged in parallel;The present application is according to the characteristics of high positioning accuracy requirement of chip transmission speed, stable motion in the process of chip packaging detection, the movement mode of linear motor is used, long-distance transmission is realized quickly and stably, Z direction transmission and force feedback are realized through voice coil motor, angle deviation is calculated by camera shooting and angle compensation is made through motor, real-time position feedback is carried out through grating ruler, and high-speed accurate transmission of chip is realized.

Description

Technical Field

[0001] This invention relates to the field of semiconductor packaging equipment technology, and in particular to a high-precision multi-axis transmission structure for chip transmission. Background Technology

[0002] With the rapid rise of the semiconductor industry, chips are constantly developing towards miniaturization and precision, which places increasingly higher demands on the precision of various packaging equipment such as FCDFN, FCQFN, BGA, and Fan-out. In the later stages of chip testing and packaging, the chip testing accuracy and UPH value are important indicators of packaging equipment. Therefore, the equipment is required to be stable, efficient, and have high positioning accuracy during chip transmission.

[0003] In existing technologies, the packaging efficiency of the equipment is an important parameter in chip packaging processes, and chip transmission time is also one of the factors that restrict equipment efficiency. Therefore, efficient, stable, and fast chip transmission in the equipment is crucial. Traditional transmission structures often use a motor and lead screw structure for transmission. The motor and lead screw generate vibrations during movement, and the vibrations increase with the increase of transmission speed. To solve the above problems, a high-precision multi-axis transmission structure for chip transmission is proposed. Summary of the Invention

[0004] In view of the above-mentioned technical problems, the present invention provides a high-precision multi-axis transmission structure for chip transmission, characterized in that it includes a frame, an X-axis assembly, and a chip pickup assembly. The X-axis assembly is mounted on the frame by bolts, and the chip pickup assembly is mounted on the frame. There are two X-axis assemblies, and the two X-axis assemblies are arranged in parallel.

[0005] Furthermore, the X-axis assembly includes an X-axis linear motor stator, an X-axis linear motor mover, a cable chain, a Y-axis assembly, a grating ruler reading head, and a grating ruler. The X-axis linear motor stator is fixedly connected to the frame. A cable chain is disposed above the X-axis linear motor stator. The X-axis linear motor mover is disposed below the X-axis linear motor stator. The Y-axis assembly is disposed below the X-axis linear motor mover. A grating ruler is disposed below the X-axis linear motor mover. A grating ruler reading head is disposed next to the grating ruler.

[0006] Furthermore, the Y-axis assembly includes a Z-axis voice coil motor, a Z-axis grating reading head, a Z-axis grating ruler, a linear guide rail, a slider, a Y-axis linear motor mover, a Y-axis linear motor stator, a connecting plate, a cable chain mounting plate, a filter, a Y-axis grating reading head, and a Y-axis grating ruler. The connecting plate is mounted on the X-axis linear motor mover. A cable chain mounting plate is mounted on the connecting plate and connected to the cable chain. A Z-axis voice coil motor is mounted on the connecting plate. A Z-axis grating ruler is mounted on the Z-axis voice coil motor. A Z-axis grating reading head is mounted next to the Z-axis grating ruler. A linear guide rail is mounted on the connecting plate. A slider is mounted inside the linear guide rail. A Y-axis linear motor stator is mounted on the connecting plate. A Y-axis linear motor mover is mounted on the Y-axis linear motor stator. A filter is mounted on the connecting plate. A Y-axis grating ruler is mounted on the connecting plate. A Y-axis grating reading head is mounted next to the Y-axis grating ruler.

[0007] Furthermore, the chip pickup assembly includes a mounting block, a rotary motor, a voice coil motor mounting block, a compressed air hose connector, a vacuum hose connector, a chip pickup voice coil motor, a nozzle, a timing belt, a timing pulley, a home switch, a shaft end connecting block, a pad, a hollow shaft, a deep groove ball bearing, a linear bearing, a timing pulley shaft, a quick-change pin locking nut, and a nozzle quick-change pin. The mounting block is connected to the frame. The rotary motor is installed inside the mounting block. The voice coil motor mounting block is located next to the rotary motor. The chip pickup voice coil motor is installed inside the voice coil motor mounting block. A compressed air hose is located next to the chip pickup voice coil motor. A vacuum pipe connector is provided next to the compressed air pipe connector. A synchronous pulley is provided below the rotary motor. A home switch is provided at the front end of the synchronous pulley. A synchronous belt is provided on the synchronous pulley. A synchronous pulley shaft is provided on the synchronous belt. A linear bearing is provided inside the synchronous pulley shaft. A deep groove ball bearing is provided outside the linear bearing. A hollow shaft is provided on the linear bearing. A pad is provided on the hollow shaft. A shaft end connecting block is provided on the pad. A quick-change pin locking nut is provided at the lower end of the hollow shaft. A suction nozzle quick-change pin is provided at the lower end of the quick-change pin locking nut. A suction nozzle is provided at the lower end of the suction nozzle quick-change pin.

[0008] The beneficial effects of this invention are:

[0009] Based on the requirements of high chip transmission speed, stable movement, and high positioning accuracy in the chip packaging and testing process, this invention adopts a linear motor motion mode to achieve fast, stable, and long-distance transmission. A voice coil motor is used to achieve Z-axis transmission and force feedback. Angle deviation is calculated by taking pictures with a camera and then compensated by the motor. A grating ruler is used for real-time position feedback to achieve high-speed and precise chip transmission.

[0010] The combination of a linear motor and a linear guide rail can make the transmission faster and smoother, greatly reduce the vibration generated in the lead screw transmission, and achieve a higher transmission speed limit. When combined with a grating ruler, it can achieve higher precision motion positioning.

[0011] To improve transmission efficiency, this structure uses dual linear motors (X-axis linear motors) to alternately convey materials, thus compensating for the efficiency problem of linear transmission methods. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of a high-precision multi-axis transmission structure for chip transmission according to the present invention;

[0013] Figure 2 This is an overall layout diagram of a high-precision multi-axis transmission structure for chip transmission according to the present invention;

[0014] Figure 3 This is a schematic diagram of the X-axis component structure of a high-precision multi-axis transmission structure for chip transmission according to the present invention;

[0015] Figure 4 This is a schematic diagram of the bottom of the X-axis component of a high-precision multi-axis transmission structure for chip transmission according to the present invention;

[0016] Figure 5 This is a schematic diagram of the Y-axis component structure of a high-precision multi-axis transmission structure for chip transmission according to the present invention;

[0017] Figure 6 This is a schematic diagram of a chip pickup component structure for a high-precision multi-axis transmission structure for chip transmission according to the present invention.

[0018] Figure 7 This is a schematic diagram of the internal structure of a chip pickup component of a high-precision multi-axis transmission structure for chip transmission according to the present invention.

[0019] As shown in the figure: 1. Frame, 2. X-axis assembly, 3. Chip pickup assembly, 21. X-axis linear motor stator, 22. X-axis linear motor mover, 23. Cable chain, 24. Y-axis assembly, 25. Grating ruler reading head, 26. Grating ruler, 241. Z-axis voice coil motor, 242. Z-axis grating reading head, 243. Z-axis grating ruler, 244. Linear guide rail, 245. Slider, 246. Y-axis linear motor mover, 247. Y-axis linear motor stator, 248. Connecting plate, 249. Cable chain mounting plate, 2410. Filter, 2411. 1. Y-axis grating reading head; 2. Y-axis grating ruler; 31. Mounting block; 32. Rotary motor; 33. Voice coil motor mounting block; 34. Compressed air hose connector; 35. Vacuum hose connector; 36. Chip pickup voice coil motor; 37. Nozzle; 38. Synchronous belt; 39. Synchronous belt pulley; 310. Origin switch; 311. Shaft end connecting block; 312. Spacer block; 313. Hollow shaft; 314. Deep groove ball bearing; 315. Linear bearing; 316. Synchronous belt pulley shaft; 317. Quick-change pin locking nut; 318. Nozzle quick-change pin. Detailed Implementation

[0020] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0022] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances. Furthermore, the technical features involved in the different embodiments of this invention described below can be combined with each other as long as they do not conflict with each other.

[0023] Example 1

[0024] This invention provides a high-precision multi-axis transmission structure for chip transmission, characterized by including a frame 1, an X-axis assembly 2, and a chip pickup assembly 3. The X-axis assembly 2 is mounted on the frame 1 by bolts, and the chip pickup assembly 3 is mounted on the frame 1. There are two X-axis assemblies 2, which are arranged in parallel.

[0025] Furthermore, the X-axis assembly 2 includes an X-axis linear motor stator 21, an X-axis linear motor mover 22, a cable chain 23, a Y-axis assembly 24, a grating ruler reading head 25, and a grating ruler 26. The X-axis linear motor stator 21 is fixedly connected to the frame 1. The cable chain 23 is arranged above the X-axis linear motor stator 21, the X-axis linear motor mover 22 is arranged below the X-axis linear motor stator 21, the Y-axis assembly 24 is arranged below the X-axis linear motor mover 22, the grating ruler 26 is arranged below the X-axis linear motor mover 22, and the grating ruler reading head 25 is arranged next to the grating ruler 26.

[0026] Furthermore, the Y-axis assembly 24 includes a Z-axis voice coil motor 241, a Z-axis grating reading head 242, a Z-axis grating ruler 243, a linear guide rail 244, a slider 245, a Y-axis linear motor mover 246, a Y-axis linear motor stator 247, a connecting plate 248, a cable chain mounting plate 249, a filter 2410, a Y-axis grating reading head 2411, and a Y-axis grating ruler 2412. The connecting plate 248 is mounted on the X-axis linear motor mover 22, and the cable chain mounting plate 249 is mounted on the connecting plate 248. The cable chain mounting plate 249 is connected to the cable chain 23. The connecting plate 248 is equipped with a Z-axis voice coil motor. Machine 241, wherein a Z-axis grating ruler 243 is provided on the Z-axis voice coil motor 241, and a Z-axis grating reading head 242 is provided next to the Z-axis grating ruler 243; a linear guide rail 244 is provided on the connecting plate 248, and a slider 245 is provided inside the linear guide rail 244; a Y-axis linear motor stator 247 is provided on the connecting plate 248, and a Y-axis linear motor mover 246 is provided on the Y-axis linear motor stator 247; a filter 2410 is provided on the connecting plate 248; a Y-axis grating ruler 2412 is provided on the connecting plate 248, and a Y-axis grating reading head 2411 is provided next to the Y-axis grating ruler 2412;

[0027] Furthermore, the chip pickup assembly 3 includes a mounting block 31, a rotary motor 32, a voice coil motor mounting block 33, a compressed air hose connector 34, a vacuum hose connector 35, a chip pickup voice coil motor 36, a suction nozzle 37, a synchronous belt 38, a synchronous pulley 39, a home switch 310, a shaft end connecting block 311, a pad block 312, a hollow shaft 313, a deep groove ball bearing 314, a linear bearing 315, a synchronous pulley shaft 316, a quick-change pin locking nut 317, and a suction nozzle quick-change pin 318. The mounting block 31 is connected to the frame 1. The rotary motor 32 is installed inside the mounting block 31. The voice coil motor mounting block 33 is installed next to the rotary motor 32. The chip pickup voice coil motor 36 is installed inside the voice coil motor mounting block 33. The compressed air hose connector 36 is installed next to the chip pickup voice coil motor 36. 4. A vacuum pipe connector 35 is provided next to the compressed air pipe connector 34. A synchronous pulley 39 is provided below the rotary motor 32. An origin switch 310 is provided at the front end of the synchronous pulley 39. A synchronous belt 38 is provided on the synchronous pulley 39. A synchronous pulley shaft 316 is provided on the synchronous belt 38. A linear bearing 315 is provided inside the synchronous pulley shaft 316. A deep groove ball bearing 314 is provided outside the linear bearing 315. A hollow shaft 313 is provided on the linear bearing 315. A pad 312 is provided on the hollow shaft 313. A shaft end connecting block 311 is provided on the pad 312. A quick-change pin locking nut 317 is provided at the lower end of the hollow shaft 313. A suction nozzle quick-change pin 318 is provided at the lower end of the quick-change pin locking nut 317. A suction nozzle 37 is provided at the lower end of the suction nozzle quick-change pin 318.

[0028] Example 2

[0029] When in use, the entire device is in the initial default position, between the loading station and the inspection station, with the Y-axis component 24 of the two X-axis components 2 located at the pick-up position of the loading station and the placement position of the inspection station, respectively; between the unloading station and the inspection station, with the Y-axis component 24 of the two X-axis components 2 located at the pick-up position of the inspection station and the placement position of the unloading station, respectively.

[0030] After the chip to be tested is positioned at the loading station, the linear motors in the X-axis assembly 2 and Y-axis assembly 24 move respectively, moving the suction nozzle 37 in the chip pickup assembly above the chip to be tested. The Z-axis voice coil motor 241 moves rapidly downward until the suction nozzle 37 is about to contact the chip. Then, the chip pickup voice coil motor 36 in the chip pickup assembly 3 moves. After the suction nozzle 37 contacts the chip, it continues to move and provides force feedback. When the suction nozzle 37 contacts the chip, the vacuum is activated. Then, the chip pickup voice coil motor 36 moves upward at a certain speed, cooperating with the chip positioning device to remove the chip from the film. The chip positioning device is not shown in the figure. During the chip pickup process, the chip pickup voice coil motor 36 always maintains a constant position. With a certain force and feedback, after the chip is picked up from the thin film, the Z-axis voice coil motor 241 moves upward to the origin. The X-axis linear motor mover 21 in the X-axis assembly 2 drives the Y-axis assembly 24 to move towards the inspection station. At the same time, the Y-axis assembly 24 at the inspection station position moves towards the material loading station. When the Y-axis assembly 24 moves, the Y-axis linear motor movers 246 in the Y-axis assembly 24 move in the direction of their respective X-axis linear motors, so that when the two Y-axis assemblies 24 intersect, the chip picking components avoid each other. After the intersection, the Y-axis linear motor movers 246 in the Y-axis assembly 24 move in opposite directions, respectively towards the material loading station pickup position and the inspection station camera position (not shown in the figure). (Display) Movement: When the Y-axis assembly 24 carrying the chip moves onto the camera at the detection station, the camera takes a picture of the chip for inspection and calculates the chip's angular position. When the calculated angle deviates from the actual angle, the rotary motor 32 moves, and the synchronous pulley 39 drives the synchronous pulley shaft 316 to rotate via the synchronous belt 38 for angle compensation. The synchronous pulley shaft 316 rotates in the deep groove ball bearing 314. At the same time, the internal linear bearing 315, hollow shaft 313, quick-change pin locking nut 317, suction nozzle quick-change pin 318, and suction nozzle 37 all rotate together with the synchronous pulley shaft 316. The hollow shaft 313 cannot rotate within the linear bearing 315. The suction nozzle quick-change pin 318 is connected to the hollow shaft 313 via a zero-speed connection. The components are connected and have a positioning structure, preventing them from rotating relative to each other. After angle compensation, the chip pickup component 3 moves the chip to the detection station placement position. The Z-axis voice coil motor 241 moves downward a certain distance. When the chip is about to contact the detection station placement point, the Z-axis voice coil motor 241 stops, and the chip pickup voice coil motor 36 moves downward. When the chip contacts the placement point, it generates force feedback information, and the chip pickup voice coil motor 36 stops moving. The vacuum is disconnected, and compressed air passes through the compressed air pipe connector 34 to the hollow shaft 313, the nozzle quick-change pin 318, and the nozzle 37 to quickly separate the chip from the nozzle. The Z-axis voice coil motor 241 and the pickup voice coil motor 36 move upward, and the chip placement is completed.

[0031] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. The various components mentioned in this invention are common technologies in the existing field. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of this invention is defined by the appended claims and their equivalents.

Claims

1. A high-precision multi-axis transmission structure for chip transmission, characterized in that, It includes a frame, an X-axis assembly, and a chip pickup assembly. The X-axis assembly is mounted on the frame by bolts, and the chip pickup assembly is mounted on the frame. There are two X-axis assemblies, which are arranged in parallel. The X-axis assembly includes an X-axis linear motor stator, an X-axis linear motor mover, a cable chain, a Y-axis assembly, a grating ruler reading head, and a grating ruler. The X-axis linear motor stator is fixedly connected to the frame. A cable chain is disposed above the X-axis linear motor stator. The X-axis linear motor mover is disposed below the X-axis linear motor stator. The Y-axis assembly is disposed below the X-axis linear motor mover. A grating ruler is disposed below the X-axis linear motor mover. A grating ruler reading head is disposed next to the grating ruler. The Y-axis assembly includes a Z-axis voice coil motor, a Z-axis grating reading head, a Z-axis grating ruler, a linear guide rail, a slider, a Y-axis linear motor mover, a Y-axis linear motor stator, a connecting plate, a cable chain mounting plate, a filter, a Y-axis grating reading head, and a Y-axis grating ruler. The connecting plate is mounted on the X-axis linear motor mover. A cable chain mounting plate is mounted on the connecting plate and connected to a cable chain. A Z-axis voice coil motor is mounted on the connecting plate, and a Z-axis grating ruler is mounted on the Z-axis voice coil motor. A Z-axis grating reading head is located next to the Z-axis grating ruler. A linear guide rail is mounted on the connecting plate, and a slider is located inside the linear guide rail. A Y-axis linear motor stator is mounted on the connecting plate, and a Y-axis linear motor mover is mounted on the Y-axis linear motor stator. A filter is mounted on the connecting plate, and a Y-axis grating ruler is mounted on the connecting plate. A Y-axis grating reading head is located next to the Y-axis grating ruler. The chip pickup assembly includes a mounting block, a rotary motor, a voice coil motor mounting block, a compressed air hose connector, a vacuum hose connector, a chip pickup voice coil motor, a nozzle, a timing belt, a timing pulley, a home switch, a shaft end connecting block, a pad, a hollow shaft, a deep groove ball bearing, a linear bearing, a timing pulley shaft, a quick-change pin locking nut, and a nozzle quick-change pin. The mounting block is connected to the frame. A rotary motor is installed within the mounting block. A voice coil motor mounting block is located next to the rotary motor. A chip pickup voice coil motor is installed within the voice coil motor mounting block. A compressed air hose connector is located next to the chip pickup voice coil motor. The device includes a vacuum pipe connector next to the compressed air pipe connector, a synchronous pulley below the rotary motor, a home switch at the front end of the synchronous pulley, a synchronous belt on the synchronous pulley, a synchronous pulley shaft on the synchronous belt, a linear bearing inside the synchronous pulley shaft, a deep groove ball bearing outside the linear bearing, a hollow shaft on the linear bearing, a pad on the hollow shaft, a shaft end connecting block on the pad, a quick-change pin locking nut at the lower end of the hollow shaft, a suction nozzle quick-change pin at the lower end of the quick-change pin locking nut, and a suction nozzle at the lower end of the suction nozzle quick-change pin.

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