IZO陶瓷靶材及其制备方法
By mixing indium oxide, zinc, and tin powders and performing spray granulation and low-temperature heat treatment, the problem of high-temperature sintering in the preparation of IZO targets was solved, resulting in IZO ceramic targets with high density and uniform composition, suitable for devices such as flat panel displays.
CN118754608BActive Publication Date: 2026-07-17ZHENGZHOU UNIV
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- ZHENGZHOU UNIV
- Filing Date
- 2024-06-17
- Publication Date
- 2026-07-17
Smart Images
Figure CN118754608B_ABST
Abstract
本发明公开了一种IZO陶瓷靶材及其制备方法。IZO陶瓷靶材的制备方法包括：将氧化铟粉末、氧化锌粉末和氧化锡粉末按照设定质量比在去离子水中混合均匀，得到固含量为30～60％的混合浆料；向混合浆料中加入分散剂，搅拌、研磨，然后再加入粘结剂，喷雾造粒形成IZO复合粉末；取设定量的IZO复合粉末与乙酸溶液混合，得到IZO复合浆料；将IZO复合浆料进行冷烧结，得到IZO坯体；将IZO坯体在无压氧气气氛下进行低温热处理，得到IZO陶瓷靶材。本发明实施例公开的制备方法，简化了制备工艺，能够在较低烧结温度和较低烧结时间下得到高致密度、细粒径、低电阻率的IZO陶瓷靶材，解决了氧化物烧结失氧的问题，得到的IZO陶瓷靶材成分均匀，不易开裂，具有良好的工业应用前景。
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