Integrated sealing ring limiting and locking tool

Abstract

The application relates to the field of valve body sealing tool for semiconductor equipment, and discloses an integrated sealing ring limiting and locking tool, which comprises a sleeve arranged on the top end face of a valve body and embedded in the valve body concave table of the top of the valve body; a transmission structure, one end of which is connected with a power source located outside the tool, and the other end of the transmission structure is located in the sleeve and used for providing driving force for the whole tool; and a limiting and locking structure arranged in the sleeve, the top of the limiting and locking structure being connected with the transmission structure through a connecting rod, and the bottom of the limiting and locking structure being located at the sealing groove of the top of the valve body where the sealing ring is to be installed. The limiting and locking can be continuously carried out in the sealing ring assembling step, the tool does not need to be disassembled and replaced during the assembling, the assembling efficiency can be improved, and the consistency of the assembling effect can be ensured.

Description

Technical Field

[0001] This invention relates to the field of valve body sealing fixture technology for semiconductor equipment, and in particular to an integrated sealing ring limiting and locking fixture. Background Technology

[0002] The assembly process of the sealing ring in the valve body has high requirements. The installation process determines the quality of the product and will affect the sealing characteristics, service life and consistency of the product.

[0003] In the existing technology, assembling the sealing ring into the valve body sealing groove requires two separate operations using two different tools. First, a limiting tool is used to press the sealing ring smoothly into the sealing groove. This step only serves to center the sealing ring in the sealing groove, but the sealing ring is not compressed. After this step, the limiting tool needs to be removed, and another pressing tool is assembled to press the edge of the sealing groove until it is deformed, thereby achieving a good effect of fixing the sealing ring and sealing. At this point, the assembly process of the sealing ring is completed.

[0004] It is evident that the tooling used in the existing technology is scattered and the operation is cumbersome. The limiting and clamping steps are not continuous, resulting in poor sealing effect and low assembly efficiency. Summary of the Invention

[0005] To address the aforementioned problems, the purpose of this invention is to provide an integrated sealing ring limiting and locking fixture that can continuously limit and lock the sealing ring, thereby improving assembly efficiency.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: an integrated sealing ring limiting and locking fixture, comprising: a sleeve disposed on the top end face of a valve body and embedded in a valve body recess on the top of the valve body; a transmission structure, one end of which is connected to a power source located outside the fixture, and the other end of which is located inside the sleeve, for providing driving force for the entire fixture; and a limiting and locking structure disposed inside the sleeve, the top of which is connected to the transmission structure via a connecting rod, and the bottom of which is located at the sealing groove on the top of the valve body where the sealing ring is to be installed.

[0007] Furthermore, the transmission structure includes a pressure block, a spring, and a connecting plate; the top of the pressure block is connected to a power source, which provides downward power to the pressure block; the bottom of the pressure block is located inside the sleeve and can slide up and down along the inner wall of the sleeve, and the bottom of the pressure block is connected to the connecting plate through the spring.

[0008] Furthermore, a guide post integrally formed with the bottom center of the pressure block is provided; a first groove is provided around the bottom circumference of the pressure block outside the guide post for installing a spring; outside the first groove, a pressure post is also provided around the bottom circumference of the pressure block, the outer diameter of the pressure post corresponding to the outer diameter of the connecting plate, so that the pressure post overlaps the top surface of the connecting plate, and the downward pressure is transmitted to the connecting plate through the pressure block itself and the spring.

[0009] Furthermore, the top surface of the connecting plate is provided with a second groove for installing the spring, and the spring is limited by the first groove and the second groove.

[0010] Furthermore, a third groove is provided on the bottom surface of the connecting plate, and several hinge seats are provided on both sides of the groove for connecting with the connecting rod.

[0011] Furthermore, the connecting rod and the connecting plate, as well as the connecting rod and the limiting locking structure, are all hinged.

[0012] Furthermore, the limiting and locking structure includes at least six clamping blocks. Two clamping blocks on the two sides of the groove of the third groove on the bottom surface of the connecting plate constitute a working unit. Each set of clamping blocks is equipped with a toothed column and a pressure plate. The top of each clamping block is hinged to the connecting rod, which is set on both sides of the groove edge of the third groove on the bottom surface of the connecting plate.

[0013] Furthermore, the toothed post is located on the top side wall of the clamping block and extends upward along the top of the clamping block to form an extension of an inwardly protruding arc-shaped structure. The extension covers the hinge joint between the clamping block and the connecting rod, and the end of the extension contacts the side wall of the connecting rod.

[0014] Furthermore, the pressure plate is set on the inner side wall of the clamping block and has an arc-shaped structure; and the pressure plates of the two clamping blocks in each working unit are set in a corresponding manner so that the two pressure plates are located on both sides of the top of the sealing ring, and the two pressure plates are located on the same arc-shaped surface.

[0015] Furthermore, the bottoms of the two clamping blocks in each working unit are located on the outer side of the sealing groove and the outer side of the inner side of the sealing groove, respectively, and there is a gap between the clamping blocks and the inner wall surface of the sleeve. The bottom edge of the clamping block located on the outer side of the inner side of the sealing groove is hinged to the support plate, and the support plate is fixed to the bottom of the guide column; Alternatively, the bottom edge of the clamping block located on the outer side of the inner side of the sealing groove is hinged to the support ring, and the support ring is fixedly connected to the support rod fixed on the inner surface of the sleeve. The clamping block located on the outer side of the sealing groove is hinged to the sleeve; or, the clamping block located on the outer side of the sealing groove is limited and locked at the spatial corner formed between the sleeve and the valve body.

[0016] The present invention has the following advantages due to the adoption of the above technical solutions: This invention uses a sleeve mounted on the top end face of the valve body. A power source provides driving force to the transmission structure, which in turn drives the limiting and locking structure to work within the sleeve. The limiting and locking structure then limits and locks the sealing ring to be installed within the sealing groove. This allows for a continuous limiting and locking process during the sealing ring assembly, eliminating the need to disassemble or replace tooling during assembly, thus improving assembly efficiency and ensuring consistent assembly results. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the integrated sealing ring limiting and locking fixture in an embodiment of the present invention; Figure 2 yes Figure 1 A partially enlarged schematic diagram shows the fixture used to limit the sealing ring. Figure 3 yes Figure 1 A partially enlarged schematic diagram, showing the diagram after the sealing ring has been positioned. Figure 4 This is a schematic diagram of the integrated sealing ring limiting and locking fixture being pressed in an embodiment of the present invention; Figure 5 yes Figure 4 Enlarged view of a portion of the image; Figure label: 100-Pressure block; 110-Pressure column; 120-Guide column; 121-Support plate; 200-Spring; 300-Connecting plate; 400-Connecting rod; 500-Clamping block; 510-Tooth column; 520-Pressure plate; 600-Sleeve; 610-Support ring; 620-Support rod; 700-Valve body; 710-Outer side of sealing groove; 720-Inner side of sealing groove; 800-Sealing ring. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention are within the scope of protection of the present invention.

[0019] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0020] Because the assembly process of the valve body requires high precision, and the installation process determines the product quality, it affects the product's sealing characteristics, service life, and consistency. Therefore, this invention designs the limiting fixture and the clamping fixture into an integrated structure, eliminating the need to disassemble the fixture during assembly, simplifying operation, and greatly improving assembly efficiency.

[0021] In one embodiment of the present invention, an integrated sealing ring limiting and locking fixture is provided. In this embodiment, as shown... Figures 1 to 5 As shown, the tooling includes: Sleeve 600 is set on the top end face of valve body 700 and embedded in the valve body recess at the top of valve body 700; The transmission structure has one end connected to a power source located outside the tooling, and the other end located inside the sleeve 600, which is used to provide driving force for the entire tooling. The limiting and locking structure is set inside the sleeve 600. The top of the limiting and locking structure is connected to the transmission structure via the connecting rod 400, and the bottom of the limiting and locking structure is located at the sealing groove of the sealing ring 800 to be installed on the top of the valve body 700.

[0022] In use, place the sealing ring 800 in the sealing groove of the valve body 700, and place the sleeve 600 of the tooling stably in the valve body recess of the valve body 700, with the bottom of the limiting and locking structure located in the sealing groove; apply power through an external power source to drive the transmission structure to move, and then the transmission structure drives the limiting and locking structure to work through the connecting rod 400, pressing the sealing ring into the sealing groove and locking the sealing groove.

[0023] In a preferred embodiment, the sleeve 600 has an inverted T-shaped cross-section, with its bottom edge embedded in the valve body recess of the valve body 700 to maintain a stable state between the two.

[0024] Optionally, the bottom outer diameter of the sleeve 600 is set to correspond to the inner diameter of the valve body recess to ensure that the sealing ring 800 can be accurately placed in the sealing groove.

[0025] In a preferred embodiment, the transmission structure includes a pressure block 100, a spring 200, and a connecting plate 300. The top of the pressure block 100 is connected to a power source, which provides downward force to the pressure block 100. The bottom of the pressure block 100 is located inside the sleeve 600 and can slide up and down along the inner wall of the sleeve 600. The bottom of the pressure block 100 is connected to the connecting plate 300 through the spring 200, thereby driving the connecting plate 300 to move up and down.

[0026] In this embodiment, optionally, the power source can be a servo press or a hydraulic press, and the pressing block 100 is fixed or overlapped with the top rod of the servo press or hydraulic press.

[0027] In this embodiment, optionally, a guide post 120 integrally formed with the bottom center of the pressure block 100 is provided; a first groove is provided around the bottom circumference of the pressure block 100 outside the guide post 120 for mounting the spring 200. Outside the first groove, a ring of pressure posts 110 is also provided around the bottom circumference of the pressure block 100, with the outer diameter of the pressure posts 110 corresponding to the outer diameter of the connecting plate 300, so that the pressure posts 110 overlap the top surface of the connecting plate 300, thereby transmitting downward pressure to the connecting plate 300 through the pressure block 100 itself and the spring 200.

[0028] In this embodiment, optionally, the top surface of the connecting plate 300 is provided with a second groove for mounting the spring 200, and the spring 200 is limited by the first groove and the second groove.

[0029] Optionally, the bottom surface of the connecting plate 300 is provided with a third groove, and several hinge seats are provided on both sides of the groove for connecting with the connecting rod 400.

[0030] Optionally, the inner diameter of the third groove on the bottom surface of the connecting plate 300 is set to correspond to the outer diameter of the sealing groove.

[0031] In this embodiment, the outer diameter of the pressure block 100 is set to correspond to the inner diameter of the sleeve 600, and the sizes are nearly equal to ensure the centering effect.

[0032] In a preferred embodiment, the connecting rod 400 and the connecting plate 300, as well as the connecting rod 400 and the limiting locking structure, are hinged. Preferably, the connecting plate 300 has an annular structure, and the guide post 120 passes through the central annular position of the connecting plate 300.

[0033] In a preferred embodiment, the limiting locking structure includes at least six clamping blocks 500. Two clamping blocks 500 located on the two sides of the third groove on the bottom surface of the connecting plate 300 constitute a working unit. Each set of clamping blocks 500 is provided with a toothed post 510 and a pressure plate 520.

[0034] Each clamping block 500 is hinged at the top to the connecting rod 400 and is set on both sides of the third groove on the bottom surface of the connecting plate 300 via the connecting rod 400. The toothed post 510 is located on the top side wall of the clamping block 500 and extends upward along the top of the clamping block 500, forming an inwardly protruding arc-shaped extension. This extension covers the hinge joint between the clamping block 500 and the connecting rod 400, and the end of the extension contacts the side wall of the connecting rod 400 to prevent the clamping block 500 from rotating inward, i.e., to prevent the clamping block 500 from protruding outward. Figure 5 As shown.

[0035] The pressure plate 520 is disposed on the inner side wall of the clamping block 500 and has an arc-shaped structure; and the pressure plates 520 of the two clamping blocks 500 in each working unit are correspondingly arranged so that the two pressure plates 520 are located on both sides of the top of the sealing ring 800, and the two pressure plates 520 are located on the same arc-shaped surface. When the clamping block 500 moves downward, it can drive the pressure plate 520 to accurately press the sealing ring 800 into the sealing groove, such as... Figure 2 , Figure 3 As shown.

[0036] In this embodiment, optionally, the sealing groove on the valve body 700 is composed of an outer sealing groove side 710 and an inner sealing groove side 720.

[0037] In this embodiment, the bottoms of the two clamping blocks 500 in each working unit are located outside the outer side 710 and the inner side 720 of the sealing groove, respectively, and there is a gap between the clamping block 500 and the inner wall surface of the sleeve 600. This gap is the working space when the clamping block 500 locks the sealing groove.

[0038] The bottom edge of the clamping block 500, located on the outer side of the inner side 720 of the sealing groove, is hinged to the support plate 121. The support plate 121 is fixed to the bottom of the guide post 120. Figure 1 As shown; Alternatively, the bottom edge of the clamping block 500 located on the outer side of the inner side 720 of the sealing groove is hinged to the support ring 610, and the support ring 610 is fixedly connected to the support rod 620 fixed to the inner surface of the sleeve 600, such as... Figure 4 As shown.

[0039] The clamping block 500 located on the outer side of the sealing groove 710 is hinged to the sleeve 600; or, the clamping block 500 located on the outer side of the sealing groove 710 is limited and locked between the sleeve 600 and the valve body 700 at the spatial corner.

[0040] In summary, during use, the integrated sealing ring limiting and locking fixture of this invention is initially placed on the valve body 700 through the sleeve 600; downward pressure is applied to the pressure block 100 by the servo press, and the pressure is transmitted to the pressure plate 520, which then presses down on the sealing ring 800, as shown. Figure 2 As shown, this completes the function of the limiting fixture. Then, the clamping blocks 500 distributed on the outer side 710 and inner side 720 of the sealing groove press against the edge of the sealing groove, causing it to deform inwards and ultimately locking the sealing ring. During the pressing of the sealing groove, the toothed post 510 on each clamping block 500 effectively prevents the clamping block 500 from rotating inwards, thus preventing the pressing of the sealing groove edge from being achieved. Figure 4 As shown, it completes the function of the clamping fixture.

[0041] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An integrated sealing ring limiting and locking fixture, characterized in that, include: A sleeve (600) is provided on the top end face of the valve body (700) and embedded in the valve body recess at the top of the valve body (700); The transmission structure has one end connected to a power source located outside the tooling, and the other end located inside the sleeve (600) to provide driving force for the entire tooling. The limiting locking structure is set inside the sleeve (600). The top of the limiting locking structure is connected to the transmission structure via the connecting rod (400). The bottom of the limiting locking structure is located at the sealing groove of the sealing ring (800) to be installed on the top of the valve body (700). The transmission structure includes a pressure block (100), a spring (200), and a connecting plate (300); the top of the pressure block (100) is connected to a power source, which provides downward power to the pressure block (100); the bottom of the pressure block (100) is located inside the sleeve (600) and can slide up and down along the inner wall of the sleeve (600), and the bottom of the pressure block (100) is connected to the connecting plate (300) through the spring (200); The limiting locking structure includes at least six clamping blocks (500). Two clamping blocks (500) are set on the two sides of the third groove on the bottom surface of the connecting plate (300) to form a working unit. Each set of clamping blocks (500) is provided with a toothed post (510) and a pressure plate (520). The top of each clamping block (500) is hinged to the connecting rod (400) and is set on the two sides of the third groove on the bottom surface of the connecting plate (300) via the connecting rod (400). The toothed column (510) is located on the top side wall of the clamping block (500) and extends upward along the top of the clamping block (500) to form an extension of an inwardly protruding arc-shaped structure. The extension covers the hinge of the clamping block (500) and the connecting rod (400) within the extension, and the end of the extension contacts the side wall of the connecting rod (400). The pressure plate (520) is set on the inner side wall of the clamping block (500) and has an arc-shaped structure; and the pressure plates (520) of the two clamping blocks (500) in each working unit are set in a corresponding manner so that the two pressure plates (520) are located on both sides of the top of the sealing ring (800) respectively, and the two pressure plates (520) are located on the same arc surface. The bottoms of the two clamping blocks (500) in each working unit are located outside the outer side (710) and the inner side (720) of the sealing groove, respectively, and there is a gap between the clamping block (500) and the inner wall surface of the sleeve (600); The bottom edge of the clamping block (500) located on the outer side of the inner side (720) of the sealing groove is hinged to the support plate (121), and the support plate (121) is fixed to the bottom of the guide post (120); Alternatively, the bottom edge of the clamping block (500) located on the outer side of the inner side (720) of the sealing groove is hinged to the support ring (610), and the support ring (610) is fixedly connected to the support rod (620) fixed on the inner surface of the sleeve (600). The clamp (500) located on the outer side of the sealing groove (710) is hinged to the sleeve (600); or, the clamp (500) located on the outer side of the sealing groove (710) is locked at the space corner between the sleeve (600) and the valve body (700).

2. The integrated sealing ring limiting and locking fixture as described in claim 1, characterized in that, A guide post (120) integrally formed with the bottom center of the pressure block (100) is provided; a first groove is provided around the bottom circumference of the pressure block (100) outside the guide post (120) for installing the spring (200); outside the first groove, a pressure post (110) is also provided around the bottom circumference of the pressure block (100), the outer diameter of the pressure post (110) corresponds to the outer diameter of the connecting plate (300) so that the pressure post (110) overlaps the top surface of the connecting plate (300) and transmits downward pressure to the connecting plate (300) through the pressure block (100) itself and the spring (200).

3. The integrated sealing ring limiting and locking fixture as described in claim 2, characterized in that, The top surface of the connecting plate (300) is provided with a second groove for mounting the spring (200), and the spring (200) is limited by the first groove and the second groove.

4. The integrated sealing ring limiting and locking fixture as described in claim 1, characterized in that, The bottom surface of the connecting plate (300) is provided with a third groove, and several hinge seats are provided on the two sides of the groove for connecting with the connecting rod (400).

5. The integrated sealing ring limiting and locking fixture as described in claim 1, characterized in that, The connecting rod (400) and the connecting plate (300) are hinged, as are the connecting rod (400) and the limiting locking structure.

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