XYZ table for high-speed precision positioning

Abstract

The application relates to the field of micro-nano and super-precision manufacturing technology, in particular to an XYZ workbench for high-speed precision positioning, which comprises a base, an X-axis displacement output unit, a Y-axis displacement output unit and a Z-axis displacement output unit, the X-axis displacement output unit, the Y-axis displacement output unit and the Z-axis displacement output unit are arranged in three different directions of the left side, the back side and the lower side inside the base respectively, the axes of the three units intersect at a point, and the output ends of the X-axis displacement output unit, the Y-axis displacement output unit and the Z-axis displacement output unit are fixedly connected to a workbench support. The application combines the characteristics of a coaxial macro-micro composite driver, such as large stroke, high precision and fast response speed, with a two-degree-of-freedom guide rail assembly, so that the driving objects of the X-axis displacement output unit, the Y-axis displacement output unit and the Z-axis displacement output unit are concentrated on the workbench support, the driving load in a single direction is reduced in structure, and the workbench has the functional characteristics of multi-degree-of-freedom, large stroke, high precision and high sensitivity.

Description

Technical Field

[0001] This invention relates to the field of micro-nano and ultra-precision manufacturing technology, and more specifically, to an XYZ stage for high-speed precision positioning. Background Technology

[0002] Precision and ultra-precision machining technologies are new machining processes that have emerged to meet the needs of modern technological development. They are indispensable key processing methods for developing cutting-edge technology products. Among them, micro-nano positioning technology is widely used in integrated circuit processing, microelectromechanical system manufacturing and assembly, biomedical experiments, and other fields. Currently, the mainstream micro-nano positioning technology utilizes the inverse piezoelectric effect of piezoelectric ceramic materials combined with compliant mechanisms to form the actuator of the micro-nano positioning platform, thereby realizing micro-nano positioning technology.

[0003] For example, patent document CN106312591A discloses a three-dimensional elliptical micro-displacement motion platform with three piezoelectric vertical drives. The piezoelectric stacks in the X, Y, and Z directions achieve micro-displacement transmission in these three directions via flexible hinges. Another example is patent document CN113028972A, which discloses a closed-loop controlled nanoscale three-dimensional precision positioning stage. The amplification mechanism is composed of piezoelectric ceramics arranged at a certain angle and a main body equipped with flexible hinges, assembled along the X, Y, and Z directions to form a nanoscale three-dimensional precision positioning stage. As described in these two patent documents, positioning of the micro-displacement motion platform can be achieved. However, as research in the microscopic field shifts towards industrial applications, the limitations of piezoelectric ceramics in terms of their range of motion greatly restrict the development of related technologies.

[0004] For example, patent document CN115055983A discloses a coaxial integrated macro-micro composite drive XY stage and its control method for high-speed precision positioning. This method transforms a coaxial integrated macro-micro composite drive stage into a coaxial integrated macro-micro composite drive XY stage. While its structure is simple, it achieves high precision and long stroke positioning requirements in the XY direction. However, it still has certain limitations for high-precision positioning technology requiring multiple degrees of freedom. Therefore, there is an urgent need for a precision positioning platform with multiple degrees of freedom, long stroke, high precision, and high sensitivity to solve the above problems.

[0005] To address the technical problems existing in the prior art, the present invention provides an XYZ stage for high-speed precision positioning, realizing platform precision positioning technology with large stroke, high precision, and fast response. Summary of the Invention

[0006] To address the shortcomings of existing technologies, this invention provides an XYZ stage for high-speed precision positioning. It combines the large stroke, high precision, and fast response of a coaxial macro-micro composite actuator with a two-degree-of-freedom guide rail assembly, so that the driving objects of the X, Y, and Z axis displacement output units are concentrated on the stage support, giving it the functional characteristics of multiple degrees of freedom, large stroke, high precision, and high sensitivity.

[0007] To achieve the above objectives, the technical solution adopted by the present invention is as follows: An XYZ stage for high-speed precision positioning includes a base, an X-axis displacement output unit, a Y-axis displacement output unit, and a Z-axis displacement output unit. The X-axis displacement output unit, Y-axis displacement output unit, and Z-axis displacement output unit are respectively arranged in three different directions inside the base: the left side, the rear side, and the bottom side. The axes of the X-axis displacement output unit, Y-axis displacement output unit, and Z-axis displacement output unit intersect at a point. The output ends of the X-axis displacement output unit, Y-axis displacement output unit, and Z-axis displacement output unit are all fixedly connected to the stage support. A stage is fixedly mounted on the upper side of the stage support. The X-axis displacement output unit, Y-axis displacement output unit and Z-axis displacement output unit have the same structure, each consisting of a coaxial macro-micro composite driver, a drive connection plate and a two-degree-of-freedom guide rail assembly. The coaxial macro-micro composite driver is embedded inside the base, and its installation direction is perpendicular to the corresponding side of the base. The output end of the coaxial macro-micro composite driver is provided with a drive connection plate, and the drive connection plate is provided with a two-degree-of-freedom guide rail assembly. The two-degree-of-freedom guide rail assembly is connected to the worktable support. The two-degree-of-freedom guide rail assembly includes a guide rail, a slider, and a guide rail assembly connecting plate. The guide rail assembly connecting plate is arranged parallel to each other on the upper side of the drive connecting plate. Sliders are symmetrically mounted on the upper and lower surfaces of the guide rail assembly connecting plate, and the guiding direction of the slider on the lower surface is perpendicular to the guiding direction of the slider on the upper surface. The sliders are fixed on the guide rail assembly connecting plate. The sliders are all slidably connected to the guide rails, and the guide rails are fixedly connected to the worktable support.

[0008] Furthermore, the base is provided with mutually orthogonal mounting holes in the X, Y and Z directions, and the mounting holes have a stepped structure. The coaxial macro-micro composite actuators on the X-axis displacement output unit, Y-axis displacement output unit and Z-axis displacement output unit are respectively installed in the mounting holes in the X, Y and Z directions of the base. The outer end of the coaxial macro-micro composite actuator is axially fixed by a pressure cap, and the pressure cap is fixed to the base by screw a.

[0009] Furthermore, the bottom surface of the workbench is uniformly provided with multiple sets of stepped bosses, and the bosses are provided with fixing threaded holes. The workbench support has multiple sets of screw holes along the X, Y, and Z axes of the base on its outer side. The two sets of guide rails on the upper side of the guide rail assembly connecting plate are fixedly connected to the screw holes by bolts. The workbench support has multiple sets of stepped holes along the Z axis of the base on its upper surface. The stepped holes are composed of positioning countersunk holes a and b. The stepped holes cooperate with the bosses provided on the workbench. The bosses are inserted into the stepped holes and fixedly connected by bolts.

[0010] Furthermore, the drive connection plate is provided with stepped threaded holes a, and the output ends of the coaxial macro-micro composite drivers on the X-axis displacement output unit, Y-axis displacement output unit and Z-axis displacement output unit are connected to the stepped threaded holes a. Multiple sets of stepped threaded holes b are provided on both the left and right sides near the edges of the drive connection plate, and the stepped threaded holes b are connected to the two sets of guide rails on the lower side of the guide rail assembly connection plate by threads.

[0011] Furthermore, the workbench support is covered with a transparent observation window, and the observation window is fixedly connected to the base.

[0012] Furthermore, two sets of sliders are respectively installed on the upper and lower surfaces of the guide rail assembly connecting plate.

[0013] Furthermore, the slider is fixed to the guide rail assembly connecting plate by screw b.

[0014] Compared with the prior art, the present invention has the following beneficial effects: 1. The XYZ stage proposed in this invention for high-speed precision positioning relies on the large stroke, high precision, and fast response speed of the coaxial macro-micro composite actuator as the driving element for stage positioning. It fulfills the positioning requirements of the XYZ stage for high-speed precision positioning with large stroke and micro displacement. In the X, Y, and Z directions of the base, a two-degree-of-freedom guide rail assembly is used as the displacement transmission medium between the driving element and the stage. This achieves three-degree-of-freedom driving of the stage without increasing the driving load of the single-direction driving element, which greatly improves the response speed and structural stability of the entire XYZ stage for high-speed precision positioning.

[0015] 2. This invention utilizes the characteristics of large stroke, high precision, and fast response speed of coaxial macro-micro composite actuators combined with two-degree-of-freedom guide rail components, so that the driving objects of the X, Y, and Z axis displacement output units are concentrated on the worktable support. Structurally, the driving load in one direction is reduced, thereby improving the displacement output response of the X, Y, and Z axis displacement output units, reducing wear between various mechanisms, and possessing the functional characteristics of multiple degrees of freedom, large stroke, high precision, and high sensitivity.

[0016] 3. The two-degree-of-freedom guide rail assembly in this invention allows the worktable to slide simultaneously in two mutually perpendicular directions. Furthermore, the coaxial macro-micro composite actuator, in conjunction with the two-degree-of-freedom guide rail assembly, forms a novel series-parallel hybrid decoupled transmission structure, thereby achieving motion transmission and decoupling. This series-parallel hybrid decoupled transmission structure ensures a symmetrical arrangement of the overall worktable structure, with no height difference in the X and Y axes, theoretically giving the worktable the same motion characteristics in the X, Y, and Z axes. Moreover, the two degrees of freedom of the two-degree-of-freedom guide rail assembly represent coupling in two directions, not a simple superposition of directions.

[0017] 4. In this invention, when the worktable needs to move in the X-axis direction, the sliders on the guide rails and guide rail assembly connecting plates on the Y-axis and Z-axis surfaces of the worktable support will have relative displacement; when the worktable needs to move in the Y-axis direction, the sliders on the guide rails and guide rail assembly connecting plates on the X-axis and Z-axis surfaces of the worktable support will have relative displacement; when the worktable needs to move in the Z-axis direction, the sliders on the guide rails and guide rail assembly connecting plates on the X-axis and Y-axis surfaces of the worktable support will have relative displacement, thereby driving the worktable to move in three degrees of freedom, so that the worktable obtains decoupling capability.

[0018] 5. The present invention adopts a design scheme of three coaxial macro-micro composite actuators and two-degree-of-freedom guide rail assemblies connected in parallel and then connected in series with the worktable support. This design scheme can reduce the complexity of the worktable structure, reduce the control difficulty, and increase the stability of the movement. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of the present invention.

[0020] Figure 2 This is a partial cross-sectional view of the present invention.

[0021] Figure 3 This is a cross-sectional schematic diagram of the base in this invention.

[0022] Figure 4 This is a schematic diagram of the structure of the two-degree-of-freedom guide rail assembly in this invention.

[0023] Figure 5 This is a schematic diagram of the structure of the guide rail assembly connecting plate in this invention.

[0024] Figure 6 This is a schematic diagram of the driver connection board in this invention.

[0025] Figure 7 This is a schematic diagram of the workbench support in this invention.

[0026] Figure 8 This is a schematic diagram of the workbench structure in this invention.

[0027] Figure 9 This is a schematic diagram of the pressure cap structure in this invention.

[0028] Figure 10 This is a schematic diagram of the unidirectional displacement output unit in this invention.

[0029] In the diagram: 1. Base; 2. Y-axis displacement output unit; 3. Worktable support; 301. Positioning countersunk hole; 302. Fixing threaded hole a; 4. Worktable; 401. Positioning boss; 402. Fixing threaded hole; 5. X-axis displacement output unit; 6. Observation window; 7. Z-axis displacement output unit; 8. Coaxial macro-micro composite actuator; 9. Two-degree-of-freedom guide rail assembly; 10. Actuator connecting plate; 1001. Stepped threaded hole a; 1002. Stepped threaded hole b; 11. Pressure cap; 12. Screw a; 13. Guide rail; 14. Slider; 15. Guide rail assembly connecting plate; 16. Screw b. Detailed Implementation

[0030] The technical solutions of the present invention will be clearly and completely described below with reference to the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0031] Example: like Figures 1 to 10 As shown, an XYZ worktable for high-speed precision positioning includes a base 1, an X-axis displacement output unit 5, a Y-axis displacement output unit 2, and a Z-axis displacement output unit 7. The X-axis displacement output unit 5, the Y-axis displacement output unit 2, and the Z-axis displacement output unit 7 are respectively arranged in three different directions on the left, rear, and lower sides inside the base 1, and the axes of the X-axis displacement output unit 5, the Y-axis displacement output unit 2, and the Z-axis displacement output unit 7 intersect at a point. The output ends of the X-axis displacement output unit 5, the Y-axis displacement output unit 2, and the Z-axis displacement output unit 7 are all fixedly connected to the worktable support 3, and a worktable 4 is fixedly mounted on the upper side of the worktable support 3.

[0032] In this embodiment, the X-axis displacement output unit 5, Y-axis displacement output unit 2, and Z-axis displacement output unit 7 have the same structure, all consisting of a coaxial macro-micro composite driver 8, a drive connecting plate 10, and a two-degree-of-freedom guide rail assembly 9. The coaxial macro-micro composite driver 8 is embedded inside the base 1, and its installation direction is perpendicular to the corresponding side of the base 1. The coaxial macro-micro composite driver 8 has two working modes: macro motion and micro motion, which can realize a wide range and high precision displacement output. The output end of the coaxial macro-micro composite driver 8 is provided with a drive connecting plate 10, which plays the role of transmitting driving force. The two-degree-of-freedom guide rail assembly 9 is provided outside the drive connecting plate 10. The two-degree-of-freedom guide rail assembly 9 is connected to the worktable support 3. The two-degree-of-freedom guide rail assembly 9 allows the worktable 4 to slide in two mutually perpendicular directions at the same time. Furthermore, the coaxial macro-micro composite actuator 8, in conjunction with the two-degree-of-freedom guide rail assembly, forms a novel series-parallel hybrid decoupled transmission structure, thereby achieving motion transmission and decoupling. Through this series-parallel hybrid decoupled transmission structure, the overall structure of the worktable 4 is symmetrically arranged, with no height difference in the X and Y axes. This allows the worktable 4 to theoretically possess the same motion characteristics in the X, Y, and Z axes. Moreover, the two degrees of freedom of the two-degree-of-freedom guide rail assembly 9 are coupled in two directions, rather than being a simple superposition of directions.

[0033] Furthermore, when the worktable 4 needs to move in the X-axis direction, the guide rails 13 on the Y-axis and Z-axis surfaces of the worktable support 3 and the slider 14 on the guide rail assembly connecting plate 15 will have relative displacement; when the worktable 4 needs to move in the Y-axis direction, the guide rails 13 on the X-axis and Z-axis surfaces of the worktable support 3 and the slider 14 on the guide rail assembly connecting plate 15 will have relative displacement; when the worktable 4 needs to move in the Z-axis direction, the guide rails 13 on the X-axis and Y-axis surfaces of the worktable support 3 and the slider 14 on the guide rail assembly connecting plate 15 will have relative displacement, thereby enabling the worktable 4 to move in three degrees of freedom, thus enabling the worktable 4 to achieve decoupling capability.

[0034] In this embodiment, the two-degree-of-freedom guide rail assembly 9 includes guide rails 13, sliders 14, and a guide rail assembly connecting plate 15. The guide rail assembly connecting plate 15 is arranged parallel to each other on the upper side of the drive connecting plate 10. Two sets of sliders 14 are symmetrically mounted on the upper surface of the guide rail assembly connecting plate 15, and two sets of sliders 14 are symmetrically mounted on the lower surface. The guiding direction of the lower surface sliders 14 is perpendicular to the guiding direction of the upper surface sliders 14. The sliders 14 are fixed to the guide rail assembly connecting plate 15 by screws b16. Two sets of transverse guide rails 13 are symmetrically mounted on the guide rail assembly connecting plate 15. The two sets of sliders 14 on the lower surface of the guide rail assembly connecting plate 15 are slidably connected to the guide rails 13. The guide rails 13 are fixedly connected to the worktable support 3.

[0035] In this embodiment, the base 1 has mutually orthogonal mounting holes in the X, Y and Z directions, and the mounting holes have a stepped structure. The stepped structure of the mounting holes helps to securely install the coaxial macro-micro composite actuator 8, providing better support and positioning, and ensuring that the actuator will not shift or loosen during operation. The coaxial macro-micro composite actuators 8 on the X-axis displacement output unit 5, Y-axis displacement output unit 2 and Z-axis displacement output unit 7 are respectively installed in the mounting holes in the X, Y and Z directions of the base 1. The design of the mounting holes allows the X-axis displacement output unit 5, Y-axis displacement output unit 2 and Z-axis displacement output unit 7 to be installed in different directions of the base 1, thereby realizing precise movement in three-dimensional space. The outer end of the coaxial macro-micro composite actuator 8 is axially fixed by the pressure cover 11, which is fixed to the base 1 by screw a12.

[0036] In this embodiment, the bottom surface of the workbench 4 is uniformly provided with multiple sets of stepped positioning bosses 401. The positioning bosses 401 not only increase the structural strength of the bottom surface of the workbench 4, but also provide a precise positioning point for its connection with the workbench support 3, which facilitates accurate positioning. The positioning bosses 401 are provided with fixed threaded holes 402. Multiple sets of screw holes are provided on the outer side of the workbench support 3 along the X, Y, and Z axes of the base 1. The two sets of guide rails 13 on the upper side of the guide rail assembly connecting plate 15 are fixedly connected to the screw holes by bolts. The workbench support 3 is provided with multiple sets of stepped holes on the upper surface along the Z axis of the base 1. The stepped holes are composed of positioning countersunk holes a301 and positioning countersunk holes b302. The stepped holes cooperate with the positioning bosses 401 provided on the workbench 4. The positioning bosses 401 are inserted into the stepped holes and fixedly connected by bolts. By engaging the positioning boss 401 on the bottom surface of the worktable 4 with the stepped hole on the worktable support 3, the worktable 4 is precisely positioned in three-dimensional space. This positioning method not only improves the installation accuracy of the worktable 4, but also ensures its stability during operation.

[0037] In this embodiment, a stepped threaded hole a1001 is provided on the drive connection plate 10. The output end of the coaxial macro-micro composite driver 8 on the X-axis displacement output unit 5, Y-axis displacement output unit 2, and Z-axis displacement output unit 7 is connected to the stepped threaded hole a1001 to fix and connect the displacement output unit with the drive connection plate 10. Multiple sets of stepped threaded holes b1002 are provided on the left and right sides near the edge of the drive connection plate 10. The stepped threaded holes b1002 are connected to the two sets of guide rails 13 on the lower side of the guide rail assembly connection plate 15 by threads to fix and connect the drive connection plate 10 with the guide rails 13.

[0038] In this embodiment, a transparent observation window 6 is provided on the outer side of the workbench support 3, and the observation window 6 is fixedly connected to the base 1. The transparent observation window 6 allows the operator to observe the operating status of the workbench 4 and each transmission component in real time during operation. The observation window 6 not only provides the function of observation, but also plays a certain protective role, preventing external dust and impurities from contacting the transmission components and affecting normal operation. At the same time, the observation window 6 can also serve as an isolation barrier to prevent the operator from accidentally touching the transmission components and being injured.

[0039] The working principle of this XYZ stage for high-speed precision positioning is as follows: The stage 4 consists of a base 1, an X-axis displacement output unit 5, a Y-axis displacement output unit 2, a Z-axis displacement output unit 7, a stage support 3, and the stage itself. The X, Y, and Z-axis displacement output units 7 are responsible for generating displacement in three different directions (X-axis, Y-axis, and Z-axis) within three-dimensional space, respectively. Each displacement output unit consists of a coaxial macro-micro composite actuator 8, a drive connecting plate 10, and a two-degree-of-freedom guide rail assembly 9, achieving a wide range and high precision displacement output. The actuator has two working modes: macro and micro. It can achieve coarse macro adjustment over a wide range and fine micro adjustment within a small range. The actuator is embedded inside the base 1, with its installation direction perpendicular to the corresponding side of the base 1, ensuring the accuracy and stability of the displacement output. The drive connecting plate 10 transmits the driving force, transferring the displacement output of the actuator to the guide rail assembly 13. The two-degree-of-freedom guide rail assembly 9 allows the stage 4 to slide in two mutually perpendicular directions, increasing the flexibility and positioning accuracy of the stage 4. When the position of the worktable 4 needs to be adjusted, the coaxial macro-micro composite actuator 8 on the X, Y, and Z axis displacement output unit 7 can be used to achieve precise movement of the worktable 4 in three-dimensional space. The output end of the actuator is connected to the two-degree-of-freedom guide rail assembly 9 through the drive connection plate 10, converting the displacement output into the movement of the worktable 4. The positioning boss 401 on the bottom surface of the worktable 4 cooperates with the stepped hole on the worktable support 3 to ensure the precise positioning and stability of the worktable 4 during movement.

[0040] In summary, this XYZ stage designed for high-speed precision positioning achieves high-precision positioning and movement of the stage 4 in three-dimensional space through precise mechanical design and the coordinated operation of its components. The XYZ stage relies on the large stroke, high precision, and fast response of the coaxial macro-micro composite actuator 8 as the driving element for positioning the stage 4, fulfilling the positioning requirements of the XYZ stage for both large stroke and micro displacement. In the X, Y, and Z directions of the base 1, a two-degree-of-freedom guide rail assembly 9 is used as the displacement transmission medium between the driving element and the stage 4, achieving three-degree-of-freedom drive of the stage 4 without increasing the driving load of the single-direction driving element. This significantly improves the response speed and structural stability of the entire XYZ stage designed for high-speed precision positioning.

[0041] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. For those skilled in the art, other variations or modifications can be made based on the above description. It is impossible to exhaustively list all the implementation methods here. All obvious variations or modifications derived from the technical solutions of the present invention are still within the protection scope of the present invention.

Claims

1. An XYZ stage for high-speed precision positioning, comprising a base (1), an X-axis displacement output unit (5), a Y-axis displacement output unit (2), and a Z-axis displacement output unit (7), characterized in that: The X-axis displacement output unit (5), Y-axis displacement output unit (2) and Z-axis displacement output unit (7) are respectively arranged in three different directions on the left, rear and lower sides inside the base (1), and the axes of the X-axis displacement output unit (5), Y-axis displacement output unit (2) and Z-axis displacement output unit (7) intersect at one point. The output ends of the X-axis displacement output unit (5), Y-axis displacement output unit (2) and Z-axis displacement output unit (7) are all fixedly connected to the workbench support (3), and a workbench (4) is fixedly provided on the upper side of the workbench support (3). The X-axis displacement output unit (5), Y-axis displacement output unit (2) and Z-axis displacement output unit (7) have the same structure. They are all composed of a coaxial macro-micro composite driver (8), a drive connection plate (10) and a two-degree-of-freedom guide rail assembly (9). The coaxial macro-micro composite driver (8) is embedded in the base (1) and its installation direction is perpendicular to the corresponding side on the base (1). The output end of the coaxial macro-micro composite driver (8) is provided with a drive connection plate (10). The drive connection plate (10) is provided outside the drive connection plate (10). The two-degree-of-freedom guide rail assembly (9) is connected to the worktable support (3). The two-degree-of-freedom guide rail assembly (9) includes a guide rail (13), a slider (14) and a guide rail assembly connecting plate (15). The guide rail assembly connecting plate (15) is arranged parallel to each other on the upper side of the drive connecting plate (10). The upper and lower surfaces of the guide rail assembly connecting plate (15) are respectively parallel and symmetrically mounted with sliders (14). The guiding direction of the slider (14) on the lower surface is perpendicular to the guiding direction of the slider (14) on the upper surface. The slider (14) is fixed on the guide rail assembly connecting plate (15). The slider (14) is slidably connected to the guide rail (13) inside. The guide rail (13) is fixedly connected to the worktable support (3).

2. The XYZ stage for high-speed precision positioning according to claim 1, characterized in that: The base (1) has mutually orthogonal mounting holes in the X, Y and Z directions, and the mounting holes have a stepped structure. The coaxial macro-micro composite actuators (8) on the X-axis displacement output unit (5), Y-axis displacement output unit (2) and Z-axis displacement output unit (7) are respectively installed in the mounting holes in the X, Y and Z directions of the base (1). The outer end of the coaxial macro-micro composite actuator (8) is axially fixed by a pressure cap (11), and the pressure cap (11) is fixed to the base (1) by screw a (12).

3. The XYZ stage for high-speed precision positioning according to claim 1, characterized in that: The bottom surface of the workbench (4) is uniformly provided with multiple sets of stepped positioning bosses (401), and the positioning bosses (401) are provided with fixing threaded holes (402). The workbench support (3) has multiple sets of screw holes along the X, Y, and Z axes of the base (1) on its outer side. The two sets of guide rails (13) on the upper side of the guide rail assembly connecting plate (15) are fixedly connected to the screw holes by bolts. The workbench support (3) has multiple sets of stepped holes along the Z axis of the base (1) on its upper surface. The stepped holes are composed of a positioning countersunk hole a (301) and a positioning countersunk hole b (302). The stepped holes cooperate with the positioning boss (401) provided on the workbench (4). The positioning boss (401) is inserted into the stepped hole and fixedly connected by bolts.

4. The XYZ stage for high-speed precision positioning according to claim 1, characterized in that: The drive connection plate (10) is provided with a stepped threaded hole a (1001). The output end of the coaxial macro-micro composite driver (8) on the X-axis displacement output unit (5), Y-axis displacement output unit (2) and Z-axis displacement output unit (7) is connected to the stepped threaded hole a (1001). Multiple sets of stepped threaded holes b (1002) are provided on the left and right sides near the edge of the drive connection plate (10). The stepped threaded holes b (1002) are connected to the two sets of guide rails (13) on the lower side of the guide rail assembly connection plate (15) by threads.

5. The XYZ stage for high-speed precision positioning according to claim 1, characterized in that: The workbench support (3) is covered with a transparent observation window (6), and the observation window (6) is fixedly connected to the base (1).

6. The XYZ stage for high-speed precision positioning according to claim 1, characterized in that: Two sets of sliders (14) are installed on the upper and lower surfaces of the guide rail assembly connecting plate (15).

7. The XYZ stage for high-speed precision positioning according to claim 1, characterized in that: The slider (14) is fixed to the guide rail assembly connecting plate (15) by screw b (16).

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