Glass cleaning apparatus, glass coating apparatus, and glass cleaning method

Abstract

The application relates to the technical field of semiconductor manufacturing, and provides a glass cleaning device, a glass gluing device and a glass cleaning method. The glass cleaning device is arranged in the glass gluing device, and comprises a conveying unit, a cleaning unit and a drying unit. The cleaning unit is used for cleaning glass; the drying unit is used for drying the cleaned glass; and the conveying unit is used for conveying the glass to the cleaning position of the cleaning tank for cleaning, and is used for transferring the cleaned glass to the drying unit and transferring the dried glass to a gluing area of the glass gluing device. The glass cleaning device is integrated in the glass gluing device and is used for cleaning glass; the cleaned glass can be directly subjected to a gluing operation in the glass gluing device, the operation efficiency is improved, the cleaning device can clean multiple glasses at the same time, the cleaning efficiency is high, and the amount of cleaning liquid is small.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a glass cleaning apparatus, a glass coating equipment, and a glass cleaning method. Background Technology

[0002] In semiconductor manufacturing processes, wafers typically need to be fixed in place to facilitate processing. For example, in wafer bonding, etching, and thinning processes, the positioned wafer must be fixed in place to prevent displacement.

[0003] Taking wafer thinning as an example, during the wafer thinning process, the wafer is usually bonded to a glass substrate to fix it in place, and then the back side of the fixed wafer is thinned. After the wafer thinning is completed, the wafer is separated from the glass to debond it, at which point there will be adhesive residue on the glass surface.

[0004] Because glass can be recycled, it needs to be cleaned for the next thinning application to remove any residues adhering to its surface.

[0005] There are generally two existing glass cleaning methods. One method uses the cleaning head in the existing glue coating machine for glass cleaning. This method is single-piece cleaning (only one piece can be cleaned at a time), which is time-consuming, inefficient, and severely hinders the glue coating output of the machine. Furthermore, it consumes a large amount of cleaning fluid, resulting in high cleaning costs. The other method uses a dedicated mechanical debonding cleaning device. This method requires first conveying the glass to the mechanical debonding cleaning device for cleaning, and then conveying the cleaned glass to the glass glue coating equipment for glue application. This results in a long glass conveying path, affecting transmission efficiency, and increasing the risk of secondary contamination during glass transport. Additionally, this method requires separate manual operation of the mechanical debonding cleaning device and the glass glue coating equipment, leading to increased labor costs.

[0006] Therefore, the present invention provides a glass cleaning device, a glass coating equipment, and a glass cleaning method. The glass cleaning device is integrated into the glass coating equipment for cleaning glass. The cleaned glass can be directly coated with adhesive in the glass coating equipment, which helps to improve work efficiency. Moreover, the cleaning device can clean multiple glasses at the same time, with high cleaning efficiency and small cleaning fluid consumption. Summary of the Invention

[0007] The purpose of this invention is to provide a glass cleaning device that is integrated into a glass coating equipment for cleaning glass. The cleaned glass can be directly coated with adhesive in the glass coating equipment, which helps to improve work efficiency. Moreover, the cleaning device can clean multiple glasses at the same time, with high cleaning efficiency and low cleaning fluid consumption.

[0008] This invention provides a glass cleaning apparatus, comprising: a conveying unit, a cleaning unit, and a drying unit;

[0009] The cleaning unit includes a cleaning tank, which has multiple cleaning positions for placing glass.

[0010] The drying unit is used to dry the cleaned glass;

[0011] The conveying unit is used to convey the glass to the cleaning position of the cleaning tank for cleaning, and to transfer the cleaned glass to the drying unit and the dried glass to the coating area of ​​the glass coating equipment.

[0012] Optionally, the glass cleaning device further includes a circulation tank and a waste liquid pipe, wherein the outlet of the cleaning tank is connected to the inlet of the circulation tank, the outlet of the circulation tank is connected to the inlet of the cleaning tank, and the outlet of the cleaning tank is also connected to the waste liquid pipe.

[0013] The cleaning unit is configured as follows:

[0014] If the number of cleaning cycles in the cleaning tank is less than the set number, after the glass cleaning is completed, the cleaning fluid in the cleaning tank is discharged into the circulation tank, and the cleaning fluid in the circulation tank is injected into the cleaning tank during the next cleaning cycle.

[0015] If the number of cleaning cycles in the cleaning tank equals the set number of cycles, the cleaning solution in the cleaning tank will be discharged to the waste liquid pipe after the glass cleaning is completed.

[0016] Optionally, the cleaning unit further includes a spray pipe;

[0017] The spray pipe is configured as follows:

[0018] After the glass cleaning is completed and the cleaning liquid in the cleaning tank is drained, the spray pipe sprays pure water and / or cleaning gas onto the glass.

[0019] Optionally, the cleaning unit further includes an ultrasonic vibration device disposed in the cleaning tank.

[0020] Optionally, the cleaning tank is provided with multiple slots, which serve as the cleaning positions.

[0021] Optionally, the drying unit includes a support portion for carrying the cleaned glass conveyed by the conveying unit, and the support portion is rotatable.

[0022] Optionally, the glass cleaning apparatus further includes a detection unit for detecting the cleanliness of the glass surface within the drying unit.

[0023] Optionally, the drying unit further includes a cleaning component for cleaning the surface of the glass within the drying unit;

[0024] The cleaning component is configured as follows:

[0025] If the cleanliness detected by the detection unit is lower than the cleanliness standard, the cleaning component is activated to clean the surface of the glass in the drying unit.

[0026] The present invention also provides a glass coating equipment, including a machine base, wherein adjacent cleaning areas and coating areas are provided within the machine base, and the glass cleaning device described above is provided within the cleaning area.

[0027] Optionally, the machine tool is further provided with an adjacent defect detection area and a temperature control area, the defect detection area being adjacent to the glue application area.

[0028] The present invention also provides a glass cleaning method, comprising the following steps:

[0029] The glass is transferred to the cleaning tank inside the glass coating equipment and then immersed in the cleaning solution in the tank for cleaning.

[0030] After cleaning, the glass is transferred to the drying unit inside the glass coating equipment for drying.

[0031] After drying, the glass is transferred to the coating area of ​​the glass coating equipment.

[0032] Optionally, the following steps are also included:

[0033] After cleaning, drain the cleaning solution from the cleaning tank, and then transfer the glass to the drying unit in the glass coating equipment for drying.

[0034] If the number of cleaning cycles of the cleaning solution in the cleaning tank is less than the set number, the cleaning solution will be discharged into the circulation tank for recycling.

[0035] If the number of cleaning cycles of the cleaning fluid in the cleaning tank is equal to the set number, then the cleaning fluid is discharged to the waste fluid pipe.

[0036] Optionally, after draining the cleaning fluid from the cleaning tank, the following steps are also included:

[0037] Pure water is injected into the cleaning tank and sprayed onto the glass, and / or cleaning gas is introduced toward the glass.

[0038] Optionally, transferring the glass to the drying unit for drying includes:

[0039] Cleanliness test: The cleanliness of the glass is tested. If the cleanliness of the glass is lower than the cleanliness standard, the glass surface is cleaned.

[0040] Glass drying involves introducing a cleaning gas onto the glass surface and / or rotating the glass to dry it.

[0041] With this configuration, the glass cleaning device of the present invention is integrated into the glass coating equipment for cleaning the glass. The cleaned glass can be directly coated with adhesive in the glass coating equipment. The glass transfer process takes place inside the glass coating equipment, and its output path is short, which helps to improve work efficiency. Moreover, the cleaning device can clean multiple glasses at the same time, with high cleaning efficiency, which helps to increase the overall coating output of the glass coating machine. In addition, the amount of cleaning fluid used is small, which helps to reduce cleaning costs.

[0042] Furthermore, the glass cleaning device in this invention is integrated into the glass coating machine. The glass to be debonded is first transported to the cleaning area of ​​the glass coating machine for debonding, cleaning, and drying. Then, the cleaned glass is transferred to the coating area for coating. This glass coating equipment integrates cleaning and coating functions, and through reasonable partitioning, these functions are performed sequentially. This machine shortens the glass transport path, improves transport efficiency, and requires only one operator to perform the cleaning and coating functions, eliminating the need for a separate operator for glass cleaning and helping to reduce labor costs. Attached Figure Description

[0043] Figure 1 This is a schematic diagram of the structure of a glass coating device according to an embodiment of the present invention;

[0044] Figure 2 This is a three-dimensional structural diagram of a glass cleaning apparatus according to an embodiment of the present invention;

[0045] Figure 3 This is a side view of a cleaning unit according to an embodiment of the present invention;

[0046] Figure 4 This is a schematic diagram of the drain pipe structure of the cleaning unit according to an embodiment of the present invention;

[0047] Figure 5 This is a schematic diagram of the transmission unit structure according to an embodiment of the present invention;

[0048] Figure 6 This is a schematic diagram of the structure of a drying unit according to an embodiment of the present invention;

[0049] Figure 7 This is a flowchart of the cleaning process of the present invention.

[0050] In the attached diagram:

[0051] 100-machine station;

[0052] 110 - Cleaning Area;

[0053] 120 - Glue application area; 121 - Work area; 122 - Glue storage area; 123 - Glue application unit; 124 - Glue storage tank;

[0054] 130 - Defect detection area; 131 - Defect detection unit;

[0055] 140 - Temperature control zone; 141 - Heating zone; 142 - Cooling zone; 143 - Heating unit; 144 - Cooling unit;

[0056] 10-Transfer unit; 11-Transfer table; 111-X-guide rail; 112-Y-guide rail; 113-Z-guide rail; 114-Rotary cylinder; 12-Gripper; 13-Transfer robotic arm;

[0057] 20-Cleaning unit; 21-Cleaning tank; 22-Spray pipe; 23-Slot;

[0058] 30 - Detection unit;

[0059] 40 - Drying unit; 41 - Supporting part; 42 - Drying part; 43 - Cleaning component; 44 - First swing arm; 45 - Second swing arm;

[0060] 50 - Circulation tank;

[0061] 60 - Waste liquid pipe; 61 - First pipeline; 62 - Second pipeline; 63 - Bend; 64 - Pump; 65 - Third pipeline

[0062] Road; 66-Filter;

[0063] 70 - Isolation component; 71 - Lifting drive component. Detailed Implementation

[0064] The glass cleaning apparatus proposed in this invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of this invention will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this invention.

[0065] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the terms “at least two” or “more than” are generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. Additionally, as used in this invention, “installed,” “connected,” “linked,” and “set” on one element from another should be interpreted broadly, generally indicating only a connection, coupling, mating, or transmission relationship between the two elements, which can be direct or indirect through an intermediate element. This connection, coupling, mating, or transmission should not be construed as indicating or implying a spatial positional relationship between the two elements, i.e., one element can be located arbitrarily inside, outside, above, below, or to one side of another element, unless otherwise explicitly stated. For those skilled in the art, the specific meaning of the above terms in this invention can be understood according to the specific circumstances. Furthermore, directional terms such as above, below, up, down, upward, downward, left, right, etc., are used relative to exemplary embodiments as shown in the figures, with upward or up direction pointing towards the top of the corresponding figure, and downward or down direction pointing towards the bottom of the corresponding figure.

[0066] Please refer to Figure 1 As shown, this embodiment provides a glass coating equipment, which includes a machine base 100, wherein the machine base 100 is divided into several areas.

[0067] like Figure 1 As shown, the machine 100 is arranged from right to left as follows: cleaning area 110, glue application area 120, defect detection area 130 and temperature control area 140.

[0068] A glass cleaning device is installed in cleaning area 110.

[0069] The glue application area 120 is divided into a working area 121 and a glue storage area 122. The working area 121 is equipped with a glue application unit 123, and the glue storage area 122 is equipped with a glue storage tank 124. The glue storage tank 124 stores glue to provide glue for the glue application unit 123.

[0070] A defect detection unit 131 is provided in the defect detection area 130. The defect detection unit 131 is used to detect defects in the glass after the adhesive is applied. For example, the defect detection unit 131 can be a camera.

[0071] The temperature control zone 140 is divided into a heating zone 141 and a cooling zone 142. The heating zone 141 contains a heating unit 143, and the cooling zone 142 contains a cooling unit 144. The heating unit 143 can be, for example, an electric heater or a heat exchanger, and the cooling unit 144 can be a heat exchanger. The temperature control zone 140 is used to heat or cool the coated glass as needed to meet temperature control requirements.

[0072] In the aforementioned glass adhesive coating equipment, the unbonded glass is first conveyed to the cleaning zone 110 for adhesive removal, cleaning, and drying. The cleaned glass is then transferred to the adhesive coating zone 120 for adhesive application. The coated glass is then transferred to the defect detection zone 130 for adhesive defect detection. Glass that meets the requirements is conveyed to the temperature control zone 140 for temperature control. This glass adhesive coating equipment integrates cleaning, adhesive coating, defect detection, and temperature control functions, and through reasonable zoning, these processes are performed sequentially. This machine shortens the glass transport path, improves transport efficiency, and requires only one operator to perform the cleaning, adhesive coating, defect detection, and temperature control functions, eliminating the need for a separate operator for glass cleaning and helping to reduce labor costs.

[0073] In this embodiment, the coating area 120, defect detection area 130, and temperature control area 140 in the glass coating equipment, as well as the component configuration in each area, can be consistent with existing glass coating machines, and will not be described in detail here.

[0074] In other alternative embodiments, the glass coating equipment may retain only one of the defect detection area 130 and the temperature control area 140 based on actual needs, and the configuration and distribution of each area in the glass coating equipment may be adaptively adjusted based on actual usage requirements.

[0075] The following is combined with Figures 2 to 5 This section describes the specific structure of a glass cleaning device.

[0076] Please refer to Figure 2 As shown, the glass cleaning apparatus includes: a conveying unit 10, a cleaning unit 20, a detection unit 30, and a drying unit 40. The conveying unit 10 is used to convey glass into the cleaning unit 20 for cleaning; the drying unit 40 is used at least to dry the cleaned glass, and also to transfer the cleaned glass to the drying unit 40 and the dried glass to the coating area of ​​the glass coating equipment; the detection unit 30 is used to detect the cleanliness of the glass in the drying unit 40.

[0077] The cleaning unit 20 includes a cleaning tank 21, which is a rectangular quartz tank with an opening at the top. The cleaning tank 21 has multiple cleaning positions for placing glass. Figure 3As shown, in this embodiment, multiple slots 23 are arranged horizontally within the cleaning tank 21, and the slots 23 serve as the cleaning positions. Each slot 23 is vertically arranged with an opening at the top, allowing the glass to be vertically inserted into the slot 23 for cleaning.

[0078] Since there are multiple slots 23, multiple glasses can be accommodated simultaneously. The conveying unit 10 can sequentially transfer each glass into its respective slot 23, enabling simultaneous cleaning of multiple glasses. This improves cleaning efficiency and reduces the amount of cleaning fluid used. The cleaning tank 21 contains cleaning fluid, the composition of which can be selected based on actual cleaning needs. For example, the cleaning fluid can be an ammonia solution, and the glass is immersed in the cleaning fluid for cleaning.

[0079] In this embodiment, ultrasonic cleaning is employed to further improve cleaning efficiency. Therefore, an ultrasonic oscillating plate is installed at the bottom of the cleaning tank 21. After the glass is transferred, the ultrasonic oscillating plate begins ultrasonic cleaning. In other alternative embodiments, the cleaning method can also be immersion cleaning or rinsing cleaning, etc. The specific cleaning method can be adjusted according to the cleaning requirements.

[0080] In this embodiment, the cleaning position is a vertical slot. In other alternative embodiments, the slot may also be horizontally or angled to accommodate the glass. In other alternative embodiments, the cleaning position may also be formed by a partition or other known structures for placing glass.

[0081] Furthermore, the cleaning unit 20 also includes a spray pipe 22. For example... Figure 3 As shown, the spray pipe 22 is a circular pipe, and two spray pipes 22 are provided, respectively located on both sides of the upper opening of the cleaning tank 21. The long side of the spray pipe 22 at the upper opening of the cleaning tank 21 is parallel to the long side of the upper opening of the cleaning tank 21. The length direction of the spray pipe 22 is perpendicular to the extension direction of the slot 23. Figure 3 In the design, slot 23 extends in the left-right direction, and spray pipe 22 extends in the up-down direction. Multiple nozzles are arranged on the side of spray pipe 22 near the cleaning tank 21 and along its length. Fluid can be sprayed into the cleaning tank 21 through the nozzles. Since the extension direction of spray pipe 22 is perpendicular to that of slot 23, the fluid sprayed from the nozzles is parallel to slot 23 and can be sprayed into the slot and contact the glass.

[0082] Depending on the application scenario, the spray pipe 22 can spray pure water or cleaning gas. The cleaning gas may be, for example, nitrogen or other inert gas.

[0083] In some applications, after the glass cleaning is completed and the cleaning solution in the cleaning tank 21 is drained, it is necessary to rinse off the remaining cleaning solution adhering to the glass. Therefore, pure water is introduced through the spray pipe 22 to rinse off any residual cleaning solution. The rinsing time can be set according to requirements, for example, 5 minutes. After rinsing is complete, the fluid in the spray pipe 22 can be switched to spray out cleaning gas, thereby reducing the adhesion of pure water to the glass surface.

[0084] For other application scenarios, when the cleaning fluid does not require rinsing (e.g., the cleaning fluid is pure water), cleaning gas can be sprayed directly through the spray pipe 22 to reduce the adhesion of liquid to the glass surface.

[0085] The spray pipe 22 helps reduce liquid residue on the glass surface after cleaning, thus improving cleaning efficiency.

[0086] In this embodiment, the spray pipe 22 is disposed outside the opening of the cleaning tank 21. In other alternative embodiments, the spray pipe 22 may be built inside the cleaning tank 21. Furthermore, the spray pipes 22 may be evenly distributed circumferentially along the inner wall of the cleaning tank 21. The number and distribution of the spray pipes 22 can be adaptively adjusted based on the specific structure of the cleaning tank 21 and the opening direction of the slots 23.

[0087] Cleaning fluid needs to be injected into the cleaning tank 21. In order to accurately control the amount of cleaning fluid injected, a liquid level sensor is also installed in the cleaning tank 21 in this embodiment to detect the liquid level height of the cleaning fluid inside the cleaning tank 21, thereby controlling the cleaning fluid in the cleaning tank 21.

[0088] Please continue to refer to this. Figure 2 and Figure 4 As shown, the glass cleaning device is also equipped with a circulation tank 50 and a waste liquid pipe 60.

[0089] like Figure 4 As shown, the outlet of the cleaning tank 21 is connected to the inlet of the circulation tank 50 through the first pipe 61;

[0090] The outlet of the circulation tank 50 is connected to the inlet of the cleaning tank 21. Specifically, please refer to... Figure 4 As shown, the outlet of the circulation tank 50 is connected to the second pipeline 62, the middle part of the second pipeline 62 is connected to the inlet of the pump 64 through the bend 63, the outlet of the second pipeline 62 can be connected to the waste liquid tank, and the outlet of the pump 64 is connected to the inlet of the cleaning tank 21 through the third pipeline 65.

[0091] Please combine Figure 4 As shown, the waste liquid pipe 60 is connected between the first pipe 61 and the second pipe 62. This allows the outlet of the cleaning tank 21 to also be connected to the waste liquid tank via the waste liquid pipe 60.

[0092] Figure 4 In this process, a three-way valve may be installed at the connection between the first pipeline 61 and the waste liquid pipeline 60 and at the connection between the second pipeline 62 and the bend 63.

[0093] The fluid path is controlled by two three-way valves.

[0094] For example, the flow path from the first pipeline 61 to the circulation tank 50 can be opened by controlling the three-way valve. At this time, the cleaning fluid in the cleaning tank 21 is discharged into the circulation tank 50 through the outlet of the cleaning tank 21. Moreover, the flow path from the second pipeline 62 to the bend 63 can be opened by controlling the three-way valve. At this time, the cleaning fluid in the circulation tank 50 can be drawn by the pump 64 and reinjected into the cleaning tank 21 through the third pipeline 65 and the inlet of the cleaning tank 21.

[0095] For example, the flow path from the first pipeline 61 to the circulation tank 50 can be closed by controlling the three-way valve, and the flow path from the first pipeline 61 to the waste liquid pipe 60 can be opened, and the flow path from the second pipeline 62 to the bend 63 can be closed. At this time, the cleaning liquid in the cleaning tank 21 is discharged into the waste liquid pipe 60 through the outlet of the cleaning tank 21, and then discharged into the waste liquid tank through the second pipeline 62.

[0096] To ensure a better cleaning effect, in this embodiment, a filter 66 is also installed on the third pipeline 65 to filter particulate matter in the cleaning fluid. The filter 66 is selected based on the filtration requirements.

[0097] Based on the above structure, the cleaning unit 20 is configured as follows:

[0098] If the number of cleaning cycles in the cleaning tank 21 is less than the set number, after the glass cleaning is completed, the cleaning fluid in the cleaning tank 21 is discharged into the circulation tank 50. During the next cleaning cycle, the cleaning fluid in the circulation tank 50 is injected into the cleaning tank 21, thus enabling the reuse of the cleaning fluid. If the number of cleaning cycles in the cleaning tank 21 is equal to the set number, it is determined that the cleaning fluid no longer meets the requirements for cleaning the glass and is not reused. After the glass cleaning is completed, the cleaning fluid in the cleaning tank 21 is discharged into the waste liquid pipe 60, through which the cleaning fluid can be discharged into the waste liquid tank.

[0099] The set number of times refers to the number of times the cleaning solution can be reused, and the set number of times is determined based on actual cleaning needs.

[0100] It is conceivable that the cleaning tank 21 should also be connected to an external injection pipe, which is used to inject fresh cleaning solution into the cleaning tank 21.

[0101] In the above embodiments, the flow path of the cleaning fluid is switched during discharge through various pipelines and corresponding valves, thereby enabling the reuse of the cleaning fluid and the discharge of waste liquid. In other alternative embodiments, the flow path of the cleaning fluid can be switched by setting two outlets and configuring two sets of outlet pipelines. The switching method can be adaptively adjusted based on actual usage requirements.

[0102] In this embodiment, the inlet and outlet of the circulation tank 50 are two independent ports. In other alternative embodiments, the inlet and outlet of the circulation tank 50 can be a single port, which can achieve liquid inlet and outlet functions based on the change of fluid direction. When discharging, this port can act as an outlet; when inlet, this port can act as an inlet. In this case, the switching between liquid inlet and outlet can be achieved by configuring a valve. Furthermore, in other alternative embodiments, the circulation tank 50 can be provided with multiple inlets and outlets based on usage requirements.

[0103] Please refer to Figure 2 and Figure 5 As shown, the conveying unit 10 includes a conveying table 11, a gripper 12, and a transfer robotic arm 13. The gripper 12 is disposed on the conveying table 11 and can be driven to move by the conveying table 11. The gripper 12 is used to grasp the glass and place the glass in the cleaning tank 21. The transfer robotic arm 13 is used to transfer the cleaned glass in the cleaning tank 21 to the drying unit 40.

[0104] The conveyor table 11 includes an X-axis guide rail 111, a Y-axis guide rail 112, a Z-axis guide rail 113, and a rotary cylinder 114. The X, Y, and Z axes are three mutually perpendicular directions. The rotary cylinder 114 is driven to move along the X-axis and is mounted on the X-axis guide rail 111. The X-axis guide rail 111 is driven to move along the Z-axis and is mounted on the Z-axis guide rail 113. The Z-axis guide rail 113 is driven to move along the Y-axis and is mounted on the Y-axis guide rail 112. Therefore, the rotary cylinder 114 can be driven along the X, Y, and Z axes.

[0105] The X-axis guide rail 111, Y-axis guide rail 112, and Z-axis guide rail 113 can be a lead screw and nut structure or other known linear guide rails. Of course, the guide rail needs to be equipped with a drive structure. When the guide rail is a lead screw and nut structure, the drive structure can be a rotary motor. When the linear guide rail is a linear sliding structure with a track and slider, the drive structure can be a linear motor. The structures of the above-mentioned linear guide rails can adopt existing technologies, and will not be elaborated here.

[0106] The output shaft of the rotary cylinder 114 is connected to the gripper 12, so the gripper 12 can be driven to rotate by the rotary cylinder 114 to change the posture of the glass held by the gripper 12. Figure 5The gripper 12 described above is horizontal, and the glass held by the gripper 12 is also horizontal. When the gripper 12 is driven to rotate 90° clockwise, the gripper 12 and the glass it holds rotate to an upright position.

[0107] Therefore, the gripper 12 can be driven along the X, Y, and Z directions and can be driven to rotate. The gripper 12 is used to hold glass and adopts an existing gripper structure, such as a mechanical gripper or a vacuum suction gripper.

[0108] Combination Figure 2 As shown, in this embodiment, the transfer robotic arm 13 is used to remove the cleaned glass and transfer it to the drying unit 40. The transfer robotic arm 13 uses an existing multi-degree-of-freedom robotic arm (e.g., a six-axis robotic arm) with a vacuum adsorption structure at the end or a clamping structure at the end to achieve the transfer of the glass. In other alternative embodiments, the transfer robotic arm 13 may also use other known transfer structures to achieve the transfer of the glass.

[0109] Therefore, the conveying unit 10 can grasp the glass and transport it to the top of the cleaning tank 21. Then, by changing the posture of the gripper 12, the glass is made to stand upright. Then, by driving the gripper 12 to move in the Z direction, the glass is inserted into the slot 23 in the cleaning tank 21, realizing the conveying of the glass into the cleaning tank 21. After the glass is cleaned, it is transferred to the drying unit 40 by the transfer robotic arm 13.

[0110] In this embodiment, the conveying unit 10 employs two relatively independent transfer structures (the conveyor table 11 and gripper 12 form one set, and the transfer robotic arm 13 forms the other set). In other alternative embodiments, the conveying unit 10 may employ one transfer structure, for example, using a multi-degree-of-freedom robotic arm to realize the conveying of glass into the cleaning tank 21 and the conveying of glass from the cleaning tank 21 to the drying unit 40; or the conveying unit 10 may also use other known conveying structures to realize the conveying of glass.

[0111] Combination Figure 6 As shown, the drying unit 40 includes a support part 41 and a drying part 42;

[0112] The bearing part 41 is used to receive and fix the cleaned glass conveyed by the conveying unit 10.

[0113] In this embodiment, the supporting part 41 has a disc structure, and its upper surface serves as a supporting surface for supporting and fixing the glass. A vacuum adsorption groove can be formed on the supporting surface, and this vacuum adsorption groove can be connected to an external vacuum adsorption unit to create a negative pressure environment, thereby adsorbing and fixing the glass located on the supporting surface.

[0114] Please continue to refer to this. Figure 6As shown, the drying section 42 is located directly above the bearing surface of the bearing section 41. The drying section 42 is a nozzle, and its external air supply pipe is used to spray clean gas toward the glass located on the bearing section 41 to dry the glass on the bearing section 41. The drying section 42 can dry the glass quickly by using a high airflow speed or by spraying hot air to dry the glass.

[0115] To ensure a better drying effect, in this embodiment, the drying part 42 is disposed on the first swing arm 44, the swing axis of the first swing arm 44 is parallel to the central axis of the bearing part 41, and the swing axis of the first swing arm 44 is located outside the bearing part 41. Therefore, Figure 6 The first swing arm 44 can be driven to swing horizontally to adjust the position of the drying part 42. On the one hand, the swing of the first swing arm 44 can adjust the position of the drying part 42 directly above the support part 41 to adjust the drying position of the drying part 42 relative to the glass. On the other hand, the first swing arm 44 can also swing the drying part 42 outside the support part 41 to facilitate the loading and unloading of the glass on the support part 41.

[0116] The first swing arm 44 can be driven to swing by a motor installed in the cleaning zone 110. The driving method is based on existing technology and will not be described in detail here.

[0117] In addition, the first swing arm 44 can also be driven to move horizontally or vertically to adjust the position and height of the drying section 42.

[0118] In this embodiment, the support part 41 has a disc structure and uses vacuum adsorption to fix the glass. In other alternative embodiments, the support part 41 can also use slots to fix the glass. For example, the support part 41 includes multiple drying slots set in a relatively closed drying chamber. Glass can be inserted into each drying slot, and clean gas is introduced into the drying slots or toward the glass through the drying part 42 to achieve simultaneous drying of multiple pieces of glass. Of course, the support part 41 can also use other existing methods to support and fix the glass.

[0119] In this embodiment, the drying section 42 dries the glass by purging with clean gas. In other alternative embodiments, the drying section 42 may also be a heating structure, such as using electric heating or gas heating to dry the glass, or other known drying methods may be employed.

[0120] Please continue to refer to this. Figure 6 As shown, the detection unit 30 in the glass cleaning device is used to detect the cleanliness of the glass surface on the support part 41.

[0121] In this embodiment, the detection unit 30 is a camera, which is positioned directly above the support portion 41, with the camera lens facing the support portion 41. The detection unit 30 acquires images and identifies the number and particle size of particles attached to the glass surface to determine the cleanliness of the glass surface. For example, if the number of particles on the glass surface exceeds a quantity threshold or the size of the largest particle is greater than a particle size threshold, the cleanliness is considered to be below the cleanliness standard (i.e., not meeting the cleanliness standard); if the number of particles is less than the quantity threshold or the size of the largest particle is less than the particle size threshold, the cleanliness is considered to meet the cleanliness standard. Detecting the cleanliness of the glass surface using a camera is prior art and will not be elaborated upon here.

[0122] In other alternative embodiments, the detection unit 30 may also employ a laser sensor, which determines the unevenness of the glass surface by detecting the distance from the glass surface, thereby determining the number and size of attached particles, and thus achieving the purpose of measuring the cleanliness of the glass surface. Of course, the detection unit 30 may also employ other known detection methods, such as using the light transmittance of the glass as a benchmark to detect cleanliness.

[0123] In this embodiment, the detection unit 30 faces the carrier 41 to identify the cleanliness of the glass. In other alternative embodiments, the detection unit 30 can also acquire images of the glass during the glass transport process after cleaning to identify the cleanliness of the glass. In this case, the detection unit 30 does not need to face the carrier 41 directly. The detection unit 30 can be mounted on the transfer robotic arm 13 and move with the transfer robotic arm 13 to detect the cleanliness of the glass during the glass transport process of the transfer robotic arm 13.

[0124] Please continue to refer to this. Figure 6 As shown, the drying unit 40 also includes a cleaning member 43, which is used to clean the surface of the glass on the support portion 41.

[0125] In this embodiment, the cleaning component 43 adopts a disc-shaped flexible brush structure. The cleaning component 43 is driven to rotate so that the brush of the cleaning component 43 moves relative to the glass surface to achieve cleaning.

[0126] like Figure 6 As shown, the sweeping component 43 is mounted on the second swing arm 45. The sweeping component 43 is driven to rotate by a motor mounted on the second swing arm 45. The rotation axis of the sweeping component 43 is parallel to the central axis of the bearing portion 41. The swing axis of the second swing arm 45 is parallel to the central axis of the bearing portion 41, and the swing axis of the second swing arm 45 is located outside the bearing portion 41.

[0127] therefore, Figure 6The second swing arm 45 can be driven to swing horizontally to adjust the position of the cleaning component 43. On the one hand, the position of the cleaning component 43 directly above the support part 41 can be adjusted by swinging the second swing arm 45 to adjust the cleaning position of the cleaning component 43 on the glass; on the other hand, the second swing arm 45 can also swing the cleaning component 43 outside the support part 41 to facilitate the picking and placing of the glass on the support part 41.

[0128] The cleaning component 43 is normally in a non-working state. If the cleanliness level detected by the detection unit 30 is lower than the cleanliness standard, the cleaning component 43 is activated to clean the surface of the glass on the support unit 41. The detection unit 30 can transmit the collected cleanliness data to the controller, which controls the swing of the second swing arm 45 and the rotation of the detection unit 30, thus enabling the detection unit 30 to clean the glass surface. Therefore, through the cooperation of the cleaning component 43 and the detection unit 30, the cleaning device has the function of detecting the cleanliness of the glass, eliminating the need for manual assistance in detection and cleaning, thus reducing labor intensity and improving cleaning efficiency.

[0129] The second swing arm 45 can be driven to swing by a motor installed in the cleaning zone 110. The driving method is based on existing technology and will not be described in detail here.

[0130] In addition, the second swing arm 45 can also be driven to move horizontally or vertically to adjust the position and height of the sweeping component 43.

[0131] Please continue to refer to this. Figure 6 As shown, the first swing arm 44 and the second swing arm 45 are located on both sides of the bearing part 41 in the radial direction, and this arrangement prevents the drying part 42 and the cleaning part 43 from interfering with each other.

[0132] Furthermore, to ensure a better drying effect, in this embodiment, the support portion 41 is rotatably positioned within the cleaning zone 110. The rotational axis of the support portion 41 is perpendicular to the support surface (i.e., perpendicular to...). Figure 6 (The upper surface of the bearing portion 41). In this embodiment, the bearing portion 41 is a cylindrical structure, and its rotation axis is collinear with the central axis of the bearing portion 41 itself, so that the bearing portion 41 can rotate around its own central axis.

[0133] The bearing unit 41 can be driven to rotate by a motor installed in the cleaning zone 110. The rotation drive method adopts existing technology, which will not be described in detail here.

[0134] The rotating arrangement of the bearing unit 41 can, on the one hand, drive the glass supported on it to rotate, and use centrifugal force to dry the water stains on the glass, which helps to improve the drying effect; on the other hand, the bearing unit 41 drives the glass to rotate, which, together with the drying unit 42 and the cleaning component 43, helps to form a uniform blowing and cleaning effect on the circumference of the glass, which helps to further improve the cleaning and drying efficiency.

[0135] Furthermore, the glass cleaning apparatus also includes a separator 70, which is isolated between the cleaning unit 20 and the drying unit 40.

[0136] Combination Figure 2 As shown, the isolation member 70 has an upright plate structure. A lifting drive 71 is located below the isolation member 70 and is positioned in the cleaning area 110 to drive the isolation member 70 to rise and fall. The lifting drive 71 can be, for example, a linear motor, hydraulic, or pneumatic lifting structure. This lifting configuration of the isolation member 70 allows for flexible adjustment of its position based on actual usage scenarios. For example, when the cleaning tank 21 or spray pipe 22 is operating, the isolation member 70 is raised to isolate the cleaning unit 20 from the drying unit 40; when the glass needs to be transferred to the carrying unit 41 after cleaning, the isolation member 70 is lowered to prevent interference with the transfer robotic arm 13.

[0137] The working process of the aforementioned glass cleaning device is as follows:

[0138] An external robotic arm transfers glass to a conveying unit 10. The grippers 12 of the conveying unit 10 hold the glass and transfer it via a conveyor table 11. After adjusting the glass's orientation, it is placed in a slot 23 of the cleaning tank 21, immersing it in the cleaning solution. This transfer process is repeated multiple times to ensure that each slot 23 contains glass. After the glass transfer is complete, the ultrasonic oscillating plate is activated to begin the cleaning process. If the number of cleaning cycles is less than the preset time, the cleaning solution is drained into a circulation tank 50 for temporary storage. After the cleaning solution is drained, the spray pipe 22 begins spraying pure water to rinse away any remaining cleaning solution from the glass. During rinsing, the pure water can be drained into a waste tank via the waste pipe 60. After rinsing for the preset time, the spray pipe 22 sprays cleaning gas towards the glass to reduce liquid adhesion on the glass surface. The glass is then transferred to a support unit 41 by a transfer robotic arm 13 and fixed in place by the support unit 41. The detection unit 30 detects the cleanliness of the glass surface. If the cleanliness meets the standard, the drying unit 42 sprays cleaning gas to sweep the glass surface, and the carrying unit 41 is driven to rotate and spin-dry the glass. The glass surface is dried through the blowing of cleaning gas and the rotation of the glass. If the cleanliness does not meet the standard, the cleaning component 43 is activated to clean the glass surface. After cleaning, the cleanliness of the glass surface is re-detected by the detection unit 30 until the cleanliness meets the standard. After the glass is dried, it can be transferred to the adhesive application area 120 by the transfer robotic arm 13 for adhesive application.

[0139] After the above cleaning process is completed, the next cleaning cycle is carried out. At this time, the cleaning solution in the circulation tank 50 can be re-injected into the cleaning tank 21, or fresh cleaning solution can be injected into the cleaning tank 21.

[0140] This embodiment also provides a glass cleaning method, including the following steps:

[0141] S1: The glass is transferred to the cleaning tank within the glass coating equipment and immersed in the cleaning solution for cleaning. The cleaning time can be determined based on cleaning requirements, such as 30 minutes. Specifically, the glass can be transferred via the conveying unit 10, the process of which has been described above and will not be repeated here. Since the cleaning tank has multiple cleaning positions (slots), the conveying unit 10 needs to transfer the glass multiple times. During the transfer, the number of glasses transferred into the cleaning tank is counted. If the number of glasses is less than the number of cleaning positions, the conveying unit 10 continues to transfer; if the number of glasses equals the number of cleaning positions, the transfer stops, and then the glass is cleaned.

[0142] S2: After cleaning, the glass is transferred to the drying unit in the glass coating equipment for drying. This drying process is achieved by the rotation of the bearing unit 41 and / or the gas blowing of the drying unit 42. The drying process has been described above and will not be repeated here.

[0143] S3: After drying, transfer the glass to the coating area in the glass coating equipment.

[0144] The above-mentioned cleaning and drying processes are all carried out in the glass coating equipment. The cleaned glass can be directly coated with adhesive in the glass coating equipment, which helps to improve work efficiency. Moreover, the cleaning device can clean multiple glasses at the same time, with high cleaning efficiency and small cleaning fluid consumption.

[0145] Furthermore, step S2 also includes the following steps:

[0146] After cleaning, the cleaning solution in the cleaning tank is first drained, and then pure water is injected into the cleaning tank to spray the glass and rinse off the cleaning solution adhering to the glass surface. During this rinsing process, the pure water is simultaneously discharged into the waste liquid tank through the waste liquid pipe. After rinsing, cleaning gas is introduced into the cleaning tank towards the glass to reduce liquid adhesion on the glass surface. The glass is then transferred to the drying unit 40. This method helps to reduce the adhesion of cleaning solution to the glass surface and improves the cleaning effect of the glass.

[0147] The cleaning fluid draining process should comply with the following rules:

[0148] If the number of cleaning cycles in the cleaning tank 21 is less than the set number, the cleaning solution is discharged into the circulation tank 50 for recycling. If the number of cleaning cycles in the cleaning tank 21 is equal to the set number, the cleaning solution is discharged into the waste liquid pipe and then placed into the waste liquid tank. This method helps ensure the recycling of the cleaning solution, reduces the amount of cleaning solution required for cleaning a single piece of glass, and helps reduce cleaning costs.

[0149] After the cleaning tank is emptied, since there are multiple pieces of glass in the cleaning tank, each piece of glass needs to be transferred to the carrying unit 41 for drying in sequence. During the transfer process, the number of pieces of glass transferred to the carrying unit 41 is counted. If the number of pieces of glass to be dried is less than the number of cleaning positions, the transfer robot arm 13 continues to transfer. If the number of pieces of glass to be dried is equal to the number of cleaning positions, the transfer stops. At this time, it means that the number of pieces of glass in the cleaning tank is zero. At this time, it is necessary to prepare for the next cleaning cycle step. Therefore, the pump is started to inject the cleaning fluid in the circulation tank into the cleaning tank or to inject fresh cleaning fluid into the cleaning tank (if there is no cleaning fluid in the circulation tank, fresh cleaning fluid is injected into the cleaning tank).

[0150] Furthermore, in step S3, before transferring the glass to the drying unit 40 for drying, the following steps are also included:

[0151] Cleanliness detection is performed on the glass. If the cleanliness of the glass is lower than the cleanliness standard, the glass surface is cleaned. The cleaning process is achieved by the cleaning component 43.

[0152] The glass is dried by introducing a cleaning gas onto its surface and / or rotating the glass. The introduction of the cleaning gas is achieved through the drying section 42, and the rotation of the glass is achieved through the rotation of the support section 41. The cleaning and drying processes have been described above and will not be repeated here.

[0153] Please refer to Figure 7 As shown, in this embodiment, cleanliness detection occurs before glass drying. If the cleanliness of the glass is not lower than the cleanliness standard, the glass is rotated and clean gas is passed through it to achieve glass drying. If the cleanliness of the glass is lower than the cleanliness standard, the glass surface is cleaned, and then clean gas is passed through the glass while the glass is rotated to achieve glass drying. This method is more efficient and facilitates the removal of deposits on the glass surface. After the deposits are removed, the clean gas or the rotation of the glass causes the deposits to separate from the glass surface, achieving a thorough cleaning of the glass.

[0154] It should be added that the order of the cleanliness test and glass drying is not particularly limited. For example, the cleanliness test can be arranged before, during, or after glass drying, or it can be arranged in any two or all of the three stages of glass drying.

[0155] In other alternative embodiments, the glass can be dried first, and then the cleanliness of the glass can be tested. If the cleanliness of the glass is lower than the cleanliness standard, the glass surface is cleaned until the cleanliness meets the standard. If the cleanliness of the glass is not lower than the cleanliness standard, the glass is directly transferred to the adhesive application area.

[0156] In other alternative embodiments, glass cleanliness can be detected simultaneously during the glass drying process. When cleanliness detection uses camera image recognition, glass rotation can affect the detection. Therefore, clean gas can be introduced first for drying, and glass cleanliness can be detected simultaneously. If the cleanliness of the glass is lower than the cleanliness standard, the glass is cleaned until the cleanliness standard is met, and then the glass is rotated and spun dry. If the cleanliness of the glass is not lower than the cleanliness standard, the glass is directly rotated and spun dry, and then the glass is transferred to the adhesive coating area.

[0157] In other alternative embodiments, cleanliness can be pre-tested before glass drying, monitored in real-time during the glass drying process, and re-tested after glass drying. Cleanliness testing can be flexibly arranged based on actual needs, and will not be elaborated upon here.

[0158] By testing the cleanliness of the glass and implementing corresponding cleaning procedures, the cleanliness of the glass can be further guaranteed, which helps to improve the cleaning success rate and cleaning effect.

[0159] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0160] The above description is merely a description of preferred embodiments of the present invention and is not intended to limit the scope of the present invention in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A glass coating apparatus for coating glass used for wafer fixing, characterized in that, The machine includes a cleaning area and an adhesive application area, wherein the cleaning area is equipped with a glass cleaning device and the adhesive application area is equipped with an adhesive application unit. The glass cleaning device includes: a conveying unit, a cleaning unit, and a drying unit; The cleaning unit includes a cleaning tank, which has multiple cleaning positions for placing glass. The drying unit is used to dry the cleaned glass; The conveying unit is used to convey the glass to the cleaning position of the cleaning tank for cleaning, and to transfer the cleaned glass to the drying unit and the dried glass to the coating area of ​​the glass coating equipment.

2. The glass coating equipment as described in claim 1, characterized in that, The glass cleaning device also includes a circulation tank and a waste liquid pipe. The outlet of the cleaning tank is connected to the inlet of the circulation tank, the outlet of the circulation tank is connected to the inlet of the cleaning tank, and the outlet of the cleaning tank is also connected to the waste liquid pipe. The cleaning unit is configured as follows: If the number of cleaning cycles in the cleaning tank is less than the set number, after the glass cleaning is completed, the cleaning fluid in the cleaning tank is discharged into the circulation tank, and the cleaning fluid in the circulation tank is injected into the cleaning tank during the next cleaning cycle. If the number of cleaning cycles in the cleaning tank equals the set number of cycles, the cleaning solution in the cleaning tank will be discharged to the waste liquid pipe after the glass cleaning is completed.

3. The glass coating equipment as described in claim 1, characterized in that, The cleaning unit also includes a spray pipe; The spray pipe is configured as follows: After the glass cleaning is completed and the cleaning liquid in the cleaning tank is drained, the spray pipe sprays pure water and / or cleaning gas onto the glass.

4. The glass coating equipment as described in claim 1, characterized in that, The cleaning unit also includes an ultrasonic vibration device, which is disposed in the cleaning tank.

5. The glass coating equipment as described in claim 1, characterized in that, The cleaning tank is provided with multiple slots, which serve as the cleaning positions.

6. The glass coating equipment as described in claim 1, characterized in that, The drying unit includes a support section for carrying the cleaned glass conveyed by the conveying unit, and the support section is rotatable.

7. The glass coating equipment as described in claim 1, characterized in that, The glass cleaning apparatus further includes a detection unit for detecting the cleanliness of the glass surface within the drying unit.

8. The glass coating equipment as described in claim 7, characterized in that, The drying unit includes a cleaning component for cleaning the surface of the glass within the drying unit; The cleaning component is configured as follows: If the cleanliness detected by the detection unit is lower than the cleanliness standard, the cleaning component is activated to clean the surface of the glass in the drying unit.

9. The glass coating equipment as described in claim 1, characterized in that, The machine tool is also equipped with an adjacent defect detection area and a temperature control area, with the defect detection area adjacent to the glue application area.

10. A glass cleaning method based on a glass coating apparatus according to any one of claims 1 to 9, characterized in that, Includes the following steps: The glass is transferred to the cleaning tank inside the glass coating equipment and then immersed in the cleaning solution in the tank for cleaning. After cleaning, the glass is transferred to the drying unit inside the glass coating equipment for drying. After drying, the glass is transferred to the coating area of ​​the glass coating equipment.

11. The glass cleaning method as described in claim 10, characterized in that, It also includes the following steps: After cleaning, drain the cleaning solution from the cleaning tank, and then transfer the glass to the drying unit in the glass coating equipment for drying. If the number of cleaning cycles of the cleaning solution in the cleaning tank is less than the set number, the cleaning solution will be discharged into the circulation tank for recycling. If the number of cleaning cycles of the cleaning fluid in the cleaning tank is equal to the set number, then the cleaning fluid is discharged to the waste fluid pipe.

12. The glass cleaning method as described in claim 11, characterized in that, After draining the cleaning solution from the cleaning tank, the following steps are also included: Pure water is injected into the cleaning tank and sprayed onto the glass, and / or cleaning gas is introduced toward the glass.

13. The glass cleaning method as described in claim 11, characterized in that, Transferring the glass to the drying unit for drying includes: Cleanliness test: The cleanliness of the glass is tested. If the cleanliness of the glass is lower than the cleanliness standard, the glass surface is cleaned. Glass drying involves introducing a cleaning gas onto the glass surface and / or rotating the glass to dry it.

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