Electron beam furnace crystallizer and its manufacturing method and melting device

Abstract

The present application relates to an electron beam furnace crystallizer in the field of metal smelting technology, a manufacturing method and a smelting device thereof, wherein the electron beam furnace crystallizer comprises: a crystallization sleeve, wherein an ingot induction cavity is formed in the crystallization sleeve, and the two ends of the ingot induction cavity respectively form a melt inlet and an ingot outlet; a plurality of partitions, wherein the plurality of partitions are installed at intervals on the outer periphery of the crystallization sleeve, and the two ends of the partitions are respectively close to the melt inlet and the ingot outlet, and flow channels are formed between adjacent partitions; a coolant jacket, wherein the coolant jacket is arranged on the outside of the crystallization sleeve and the plurality of partitions, and the coolant jacket is formed with a liquid inlet cavity connected to one common end of each of the flow channels and a liquid outlet cavity connected to the other common end of each of the flow channels. The electron beam furnace crystallizer of the present application can improve the cooling uniformity of the ingot and improve the quality of the ingot.

Description

Technical Field

[0001] The present application relates to the technical field of metal smelting, and in particular to an electron beam furnace crystallizer and a manufacturing method and a smelting device thereof. Background Art

[0002] The electron beam melting furnace is a special vacuum metallurgical equipment. The electron beam melting furnace is evacuated. Under high vacuum conditions, the electrons emitted by the electron gun are heated by the high-voltage electric field of the cathode and emit electrons. The electrons are gathered into beams. Under the action of the accelerating voltage, the electron beam moves toward the anode at an extremely high speed. After passing through the anode, under the action of the focusing coil and the deflection coil, it accurately bombards the material and melts the material in the cooling bed. The material is refined and purified to obtain a high-purity and clean melt that flows into the crystallizer. The bottom ingot in the crystallizer is melted to form a molten pool, which is cooled by the crystallizer water cooling system. The ingot rod is pulled down at a certain speed, thereby realizing the melting of high-purity metal ingots.

[0003] With the continuous upgrading of advanced semiconductor processes, the requirements for the purity and internal defects of raw materials are further improved. During the solidification process of electron beam melting ingots, the requirements for the internal grain structure of the ingots are very high. Therefore, the conventional design structure of the crystallizer water channel is a spiral water channel, which has only a single spiral and a long circulation path, and has the disadvantages of uneven cooling, poor cooling effect, great processing difficulty, and high cost. Summary of the invention

[0004] In view of the problems existing in the background technology, the present application provides an electron beam furnace crystallizer and a manufacturing method and a smelting device thereof. The electron beam furnace crystallizer can improve the cooling uniformity of the ingot and improve the quality of the ingot.

[0005] According to a first aspect of the present invention, there is provided an electron beam furnace crystallizer, comprising: a crystallization sleeve, wherein an ingot guiding cavity is formed in the crystallization sleeve, and two ends of the ingot guiding cavity respectively form a melt inlet and an ingot outlet; a plurality of partitions, wherein the plurality of partitions are installed on the outer periphery of the crystallization sleeve at intervals, and the two ends of the partitions are respectively close to the melt inlet and the ingot outlet, and flow channels are formed between adjacent partitions; a coolant jacket, wherein the coolant jacket is arranged on the outside of the crystallization sleeve and the plurality of partitions, and a liquid inlet cavity connected to one common end of each of the flow channels and a liquid outlet cavity connected to the other common end of each of the flow channels are formed on the coolant jacket.

[0006] By using the electron beam furnace crystallizer in the technical solution, utilizing the multiple flow channels and liquid outlet cavities formed by the liquid inlet cavity and the partition, the cooling liquid can flow through the outside of the crystallization sleeve in a straight-in and straight-out manner, and the circulation path is unobstructed, which greatly reduces the impact on the flow rate and pressure of the cooling liquid. It has excellent flow rate and pressure, increases the heat exchange rate, improves the cooling effect, makes the heat exchange more uniform, and can improve the cooling consistency of the ingot guide cavity along its length direction, thereby improving the cooling uniformity of the ingot, and then improving the quality of the ingot.

[0007] In some embodiments of the present invention, the liquid inlet cavity is close to the ingot outlet, and the liquid outlet cavity is close to the molten liquid inlet.

[0008] In some embodiments of the present invention, reinforcing ribs are formed on the outer periphery of the crystallization sleeve.

[0009] In some embodiments of the present invention, the reinforcing rib is arranged close to the melt inlet.

[0010] In some embodiments of the present invention, an annular baffle is coaxially fixed to one end of the coolant jacket; the inner diameter of the baffle is smaller than the inner diameter of the coolant jacket and greater than or equal to the inner diameter of the crystallization jacket; the crystallization jacket is connected to the other end of the coolant jacket by a flange structure.

[0011] In some embodiments of the present invention, an O-ring is used to seal between the crystallization jacket and the cooling liquid jacket.

[0012] In some embodiments of the present invention, the O-ring is a fluororubber O-ring.

[0013] In some embodiments of the present invention, a pin for reinforcement is connected between one end of the partition close to the melt inlet and the crystallization sleeve.

[0014] According to a second aspect of the present invention, there is provided a method for manufacturing the electron beam furnace crystallizer, comprising: designing a crystallization sleeve according to the diameter of the ingot, preparing the crystallization sleeve by hot forging technology, and detecting internal defects of the crystallization sleeve by flaw detection technology; designing the partition width according to the thermal field simulation of the melting temperature, and fixing the partition to the outer periphery of the crystallization sleeve; integrally forming a coolant jacket by integrated welding technology; assembling the coolant jacket with the crystallization sleeve with the partition to obtain the electron beam furnace crystallizer.

[0015] According to a third aspect of the present invention, there is provided a smelting device comprising the above-mentioned electron beam furnace crystallizer.

[0016] The present invention adopts split structure processing, and the partition type flow channel (water channel) and the copper crystal sleeve are processed separately, which not only simplifies the water channel processing, but also diversifies the size selection of the water channel pipeline pattern, and can effectively reduce the influence of the stress and thermal tension generated during smelting on the copper sleeve.

[0017] The present invention adopts a baffle-type water channel design and a straight-in and straight-out design, which has a shorter circulation path, a more uniform heat exchange effect, and a better effect; and according to the smelting process and the requirements of the microscopic grain structure of the ingot, a water channel heat exchange system that meets the process can be designed to obtain an ingot with a more uniform microscopic grain structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present application. Also, the same reference symbols are used throughout the accompanying drawings to represent the same components. In the accompanying drawings:

[0019] Figure 1 It is a schematic diagram of the overall structure of the electron beam furnace crystallizer of the present invention;

[0020] Figure 2 is a cross-sectional view of an electron beam furnace crystallizer of the present invention;

[0021] Figure 3 It is a schematic structural diagram of the crystallization sleeve of the present invention;

[0022] Figure 4 It is a schematic diagram of the structure of the coolant jacket of the present invention;

[0023] Figure 5 It is a schematic diagram of the structure of the reinforcing rib of the present invention;

[0024] Figure 6 It is a structural schematic diagram of the baffle of the present invention;

[0025] Figure 7 It is a schematic structural diagram of the ejector pin of the present invention.

[0026] The reference numerals in the accompanying drawings represent as follows: 1. crystallization sleeve; 11. ingot guiding cavity; 12. melt inlet; 13. ingot outlet; 14. flange; 2. coolant jacket; 21. liquid inlet cavity; 22. liquid outlet cavity; 23. sleeve body; 24. annular plate; 25. L-shaped plate; 26. gap; 3. partition; 4. flow channel; 5. reinforcing rib; 6. baffle; 7. flange; 8. O-ring; 9. ejector pin; 10. pipeline. DETAILED DESCRIPTION

[0027] It should be clear that the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0028] When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present application. Instead, they are only examples of devices and methods consistent with some aspects of the present application as detailed in the attached claims.

[0029] In the description of the present application, it should be understood that the terms "first", "second", etc. are used for descriptive purposes only and should not be understood as indicating or implying relative importance. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances. In addition, in the description of the present application, unless otherwise specified, "multiple" refers to two or more. "And / or" describes the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. The character " / " generally indicates that the objects associated before and after are in an "or" relationship.

[0030] The present application embodiment discloses an electron beam furnace crystallizer. Figure 1-4 As shown, the electron beam furnace crystallizer includes a crystallization jacket 1, a cooling liquid jacket 2 and a plurality of partitions 3.

[0031] A starting ingot cavity 11 is formed in the crystallization sleeve 1 , and a melt inlet 12 and an ingot outlet 13 are formed at two ends of the starting ingot cavity 11 .

[0032] A plurality of partitions 3 are installed at intervals on the outer circumference of the crystallization sleeve 1 , with two ends of the partitions 3 respectively close to the melt inlet 12 and the ingot outlet 13 , and flow channels 4 are formed between adjacent partitions 3 .

[0033] The cooling liquid jacket 2 is sleeved on the outside of the crystallization jacket 1 and the plurality of partitions 3 , and is formed with a liquid inlet cavity 21 connected to one common end of each flow channel 4 and a liquid outlet cavity 22 connected to the other common end of each flow channel 4 .

[0034] By using the electron beam furnace crystallizer in the technical solution, the molten metal enters the ingot-drawing cavity 11 from the molten metal inlet 12, and then is pulled down at a certain speed by the ingot-drawing rod from the ingot outlet 13 to obtain a metal ingot. At the same time, the circulating cooling liquid continuously enters the liquid inlet cavity 21, and then enters each flow channel 4 from the liquid inlet cavity 21, and then the cooling liquid enters the liquid outlet cavity 22 through each flow channel 4. In this process, the cooling liquid flows through the outside of the crystallization sleeve 1 in a straight-in and straight-out manner, and the circulation path is unobstructed. The flow rate and pressure of the cooling liquid are basically unaffected, and it has excellent flow rate and pressure, which increases the heat exchange rate, improves the cooling effect, makes the heat exchange more uniform, and can improve the cooling consistency of the ingot-drawing cavity 11 along its length direction, thereby improving the cooling uniformity of the ingot, and then improving the quality of the ingot.

[0035] In some embodiments of the present invention, Figure 2 As shown, the liquid inlet cavity 21 is close to the ingot outlet 13 , and the liquid outlet cavity 22 is close to the melt inlet 12 .

[0036] It should be understood that the electron beam furnace crystallizer is arranged vertically when in use, the melt inlet 12 is located above the ingot outlet 13, the upper half of the ingot guide cavity 11 close to the melt inlet 12 is a high temperature area, and the lower half of the ingot guide cavity 11 close to the ingot outlet 13 is a low temperature area.

[0037] The present invention arranges the liquid inlet cavity 21 close to the ingot outlet 13 and the liquid outlet cavity 22 close to the molten liquid inlet 12, thereby ensuring that the cooling liquid fills each flow channel 4, ensuring heat exchange coverage of each area of ​​the ingot guiding cavity 11, improving the heat exchange effect, and further improving the cooling uniformity of the ingot guiding cavity 11.

[0038] In some embodiments of the present invention, Figure 2 As shown, the coolant jacket 2 includes a jacket body 23, an annular plate 24 is fixed to the middle area inside the jacket body 23, an L-shaped plate 25 is fixed to the upper and lower sides of the annular plate 24, and the two L-shaped plates 25 and the inner side of the coolant jacket 2 form a liquid inlet cavity 21 and a liquid outlet cavity 22, respectively, and a gap 26 is left between the end of the L-shaped plate 25 and the jacket body 23 for communicating with the flow channel 4.

[0039] In some embodiments of the present invention, Figure 3 As shown, the partition 3 can be arranged in parallel with the axis of the ingot-starting cavity 11 (crystallizer), or the partition 3 can be arranged tilted at a certain angle to the axis of the ingot-starting cavity 11 .

[0040] By arranging the partition 3 in parallel with the axis of the ingot-leading cavity 11, the resistance to the cooling liquid can be minimized to better achieve the purpose of straight in and straight out. By arranging the partition 3 in an inclined manner at a certain angle to the axis of the ingot-leading cavity 11, while ensuring that the cooling liquid can enter and exit directly with high efficiency, the length of the flow channel 4 can be reasonably designed according to the cooling efficiency, thereby improving the temperature control of the ingot-leading cavity 11.

[0041] In some embodiments of the present invention, Figure 1 and Figure 2 As shown, the width of the partition 3 can be designed according to the thermal field simulation of the melting temperature through different temperatures, that is, the size of the partition 3 flow channel 4 can be designed according to the temperature distribution of the thermal field in the ingot melting area, the heat exchange area in the high-temperature area can be increased, and the partition 3 can be fixed to the outer periphery of the crystallization sleeve 1 to better achieve a consistent cooling effect in the high-temperature area and the low-temperature area. The partition 3 and the flow channel 4 that meet the smelting process and the requirements of the microscopic grain structure of the ingot can also be designed according to the smelting process and the requirements of the microscopic grain structure of the ingot to obtain an ingot with a more uniform microscopic grain structure.

[0042] In some embodiments of the present invention, Figure 5 As shown, the outer periphery of the crystallization sleeve 1 is formed with reinforcement ribs 5 .

[0043] The strength of the crystallization sleeve 1 can be improved by the reinforcing ribs 5, and deformation and cracks of the crystallization sleeve 1 caused by high temperature can be effectively prevented.

[0044] Specifically, the reinforcing rib 5 in this embodiment can be integrally formed on the circumference of the crystallization sleeve 1 in a circular shape.

[0045] Furthermore, the number of the reinforcing ribs 5 may be one or more. When the number of the reinforcing ribs 5 is more than one, the plurality of reinforcing ribs 5 may be arranged at intervals.

[0046] In some embodiments of the present invention, Figure 2 and Figure 5 As shown, the reinforcing rib 5 is arranged close to the melt inlet 12 .

[0047] It should be understood that the reinforcing ribs 5 of the present invention are preferably arranged at the periphery of the high temperature area of ​​the ingot starting cavity 11 corresponding to the crystallization sleeve 1 to better prevent the crystallization sleeve 1 from being deformed and cracked due to high temperature.

[0048] It should be noted that, in other embodiments, the reinforcing ribs 5 may also be arranged at the peripheries of the high-temperature region and the low-temperature region of the ingot-starting cavity 11 corresponding to the crystallization sleeve 1 as required.

[0049] Furthermore, the cross-sectional dimensions of the reinforcing rib 5 can be reasonably designed according to the material of the crystallization sleeve 1 and / or the thickness of the crystallization sleeve 1 and / or the material of the ingot and / or the size of the ingot, so as to protect the crystallization sleeve 1 to the greatest extent and improve the service life of the crystallization sleeve 1.

[0050] In some embodiments of the present invention, the material of the crystallization sleeve 1 includes but is not limited to copper-based alloys, etc., and can be reasonably selected according to the material of the ingot.

[0051] Copper-based alloys such as red copper, copper-silver alloy, etc., preferably red copper are used to prepare the crystallization sleeve 1.

[0052] Furthermore, the partition plate 3 and the reinforcing rib 5 may be made of the same material or a different material from the crystallization sleeve 1, preferably the same material.

[0053] In some embodiments of the present invention, Figure 3-6 As shown, an annular baffle 6 is coaxially fixed to one end of the coolant jacket 2, the inner diameter of the baffle 6 is smaller than the inner diameter of the coolant jacket 2 and greater than or equal to the inner diameter of the crystallization jacket 1, and the other end of the crystallization jacket 1 is connected to the coolant jacket 2 by a flange structure.

[0054] It should be understood that when assembling the crystallization sleeve 1 and the coolant sleeve 2, one end of the crystallization sleeve 1 is inserted into the coolant sleeve 2 from the end of the coolant sleeve 2 without the baffle 6 until the end of the crystallization sleeve 1 abuts against the baffle 6, and then the crystallization sleeve 1 and the coolant sleeve 2 can be fixed to each other at the other end of the crystallization sleeve 1 through the flange structure to form an electron beam furnace crystallizer of an integral structure, and the baffle 6 can prevent the crystallization sleeve 1 from shifting downward under the downward force, such as the weight of the crystallization sleeve 1 itself and the friction force generated by the ingot pulling rod pulling the ingot downward, and the flange structure can also play a corresponding anti-displacement role.

[0055] Specifically, in this embodiment, an annular flange 7 is coaxially connected to one end of the crystallization sleeve 1 close to the melt inlet 12 thereof, and the flange 7 is supported on the top of the coolant jacket 2 and fixed by screws.

[0056] In some embodiments of the present invention, Figure 3 and Figure 6 As shown, an O-ring 8 is used to seal between the crystallization jacket 1 and the coolant jacket 2 .

[0057] In this embodiment, a portion of the O-ring 8 is embedded in the outer periphery of the crystallization sleeve 1. The O-ring 8 can be set at a position near the bottom end of the outer periphery of the crystallization sleeve 1 and compressed and clamped between the outer periphery of the crystallization sleeve 1 and the inner periphery of the cooling liquid.

[0058] Specifically, in this embodiment, the bottom end of the crystallization sleeve 1 has an outward flange 14 , and the O-ring 8 is arranged at the flange 14 . The number of the O-ring 8 can be multiple.

[0059] In addition, an end face sealing ring (not shown) may be provided between the flange 7 and the coolant jacket 2 .

[0060] Furthermore, the O-ring 8 and the sealing ring may be made of fluororubber, such as a fluororubber O-ring, which has excellent high temperature resistance and can achieve the minus 11th power leak detection limit of a helium mass spectrometer leak detector.

[0061] In some embodiments of the present invention, Figure 7 As shown, an ejector pin 9 for reinforcement is connected between one end of the partition plate 3 close to the melt inlet 12 and the crystallization sleeve 1 .

[0062] Specifically, in this embodiment, the bottom end of the partition 3 is connected to the flange 14, a gap is left between the top end of the partition 3 and the flange 7, one end of the ejector pin 9 is fixed to the partition 3, and the other end of the ejector pin 9 is fixed to the flange 7, thereby achieving reinforcement of both ends of the partition 3, especially the top end, which can prevent the partition 3 from being displaced due to the impact force of the water flow, and ensure the stability of the flow channel 4 formed by the partition 3.

[0063] In some embodiments of the present invention, Figure 4 As shown, the coolant jacket 2 is connected to the liquid inlet cavity 21 and the liquid outlet cavity 22 with external pipes 10 respectively, thereby achieving connection with an external coolant circulation supply device.

[0064] Furthermore, the cooling liquid includes but is not limited to water and the like.

[0065] Furthermore, the main body of the coolant jacket 2 can be made of 304 stainless steel.

[0066] In some embodiments of the present invention, the coolant jacket 2 can be designed as a universal part, the crystallization jacket 1 can be designed and processed according to the diameter of the ingot, and the baffle 3-type flow channel 4 can be processed with different widths and depths to match the size of the crystallization jacket 1. Therefore, a set of coolant jackets 2 can be used in combination with crystallization jackets 1 of different diameters.

[0067] The present application also discloses a manufacturing method for manufacturing the electron beam furnace crystallizer. The manufacturing method comprises the following steps:

[0068] 1) According to the diameter of the ingot, a crystallization sleeve 1 is designed, the crystallization sleeve 1 is prepared by hot forging technology, and the internal defects of the crystallization sleeve 1 are detected by flaw detection technology.

[0069] 2) According to the thermal field simulation of the melting temperature, the width of the partition 3 is designed, and the partition 3 is fixed to the outer periphery of the crystallization sleeve 1.

[0070] 3) The coolant jacket 2 is integrally formed by using integrated welding technology.

[0071] 4) Assemble the coolant jacket 2 and the crystallization jacket 1 with the partition 3 to obtain an electron beam furnace crystallizer.

[0072] An embodiment of the present application also discloses a smelting device, which includes the above-mentioned electron beam furnace crystallizer and cooling bed. The smelting device has the characteristics of high temperature resistance and can be applied to metal casting, smelting, and purification, such as tantalum, niobium, titanium, nickel, vanadium and other metals. It can be refined and purified to obtain a high-purity and clean melt, and prepare high-purity metal ingots from the melt.

[0073] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed by the present invention should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A method for manufacturing an electron beam furnace crystallizer, characterized in that: The electron beam furnace crystallizer comprises: a crystallization sleeve, wherein a guide ingot cavity is formed in the crystallization sleeve, and two ends of the guide ingot cavity respectively form a melt inlet and an ingot outlet; a plurality of partitions, wherein the plurality of partitions are installed at intervals on the outer periphery of the crystallization sleeve, and the two ends of the partitions are respectively close to the melt inlet and the ingot outlet, and flow channels are formed between adjacent partitions; a coolant jacket, wherein the coolant jacket is arranged on the outer sides of the crystallization sleeve and the plurality of partitions, and a liquid inlet cavity connected to one common end of each of the flow channels and a liquid outlet cavity connected to the other common end of each of the flow channels are formed on the coolant jacket; the liquid inlet cavity The body is close to the ingot outlet, and the liquid outlet cavity is close to the molten liquid inlet; the coolant jacket includes a jacket body, an annular plate is fixed to the middle area of ​​the inner side of the jacket body, and an L-shaped plate is fixed to the upper and lower sides of the annular plate respectively, and the two L-shaped plates and the inner side of the coolant jacket respectively form a liquid inlet cavity and a liquid outlet cavity, and a gap is left between the end of the L-shaped plate and the jacket body for communicating with the flow channel; a reinforcing rib is formed on the outer periphery of the crystallization jacket, and the reinforcing rib is integrally formed with the crystallization jacket, and the reinforcing rib is arranged close to the molten liquid inlet; an ejector pin for reinforcement is connected between one end of the partition close to the molten liquid inlet and the crystallization jacket; The manufacturing method comprises the following steps: According to the ingot diameter, the crystallization sleeve is designed, the crystallization sleeve is prepared by hot forging technology, and the internal defects of the crystallization sleeve are detected by flaw detection technology; According to the thermal field simulation of the melting temperature, the width of the partition is designed by different temperatures, that is, the size of the partition flow channel is designed according to the temperature distribution of the thermal field in the ingot melting area, the heat exchange area is increased in the high temperature area, and the partition is fixed to the outer periphery of the crystallization sleeve; The coolant jacket is formed in one piece using integrated welding technology; The cooling liquid jacket is assembled with the crystallization sleeve with the partition to obtain the electron beam furnace crystallizer.

2. The manufacturing method according to claim 1, characterized in that: An annular baffle is coaxially fixed to one end of the coolant jacket; The inner diameter of the baffle is smaller than the inner diameter of the coolant jacket and greater than or equal to the inner diameter of the crystallization jacket; The crystallization jacket and the other end of the cooling liquid jacket are connected by a flange structure.

3. The manufacturing method according to claim 2, characterized in that: An O-ring is used to seal between the crystallization jacket and the coolant jacket.

4. The manufacturing method according to claim 3, characterized in that: The O-ring is a fluorine rubber O-ring.

5. A smelting device, characterized in that: An electron beam furnace crystallizer manufactured by the electron beam furnace crystallizer manufacturing method according to any one of claims 1 to 4.

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