A flexible arrangement of vacuum drying apparatus and inkjet printing system

Abstract

The application relates to a flexible vacuum drying device and an inkjet printing system, which comprises a box body with a passage opening formed in the side surface, a bearing plate located in the box body, a ejector pin assembly comprising a connecting piece and multiple ejector pin modules, the connecting piece being located below the bearing plate and the multiple ejector pin modules all penetrating through the bearing plate, a lifting mechanism installed on the outer wall of the box body, the driving end of the lifting mechanism vertically penetrating into the box body and abutting against the bearing plate through the connecting piece, a connecting structure, the bearing plate and the connecting piece being detachably connected through the connecting structure, and multiple groups of sliding assemblies, the bearing plate and / or the connecting piece being slidingly connected with the bottom surface in the box body through the sliding assemblies, the bearing plate and the ejector pin assembly being adapted to slide out of the box body from the passage opening. In the application, the bearing plate and the ejector pin assembly in the box body can slide out of the box body through the sliding assemblies, so that the box body and the components in the box body can be conveniently maintained and cleaned.

Description

Technical Field

[0001] This application relates to the field of vacuum drying technology, and in particular to a flexible vacuum drying device and inkjet printing system. Background Technology

[0002] Inkjet printing technology is already used in the fabrication processes of existing OLED and QLED devices. Certain functional materials can be printed using inkjet printing, such as hole injection layers (HIL), hole transport layers (HTL), and light-emitting layers (EML). This technology is also applicable to other inkjet-printable functional layers. In other words, for existing pixel pits, inkjet printing is used to inject ink of the functional layer material into the pixel pits.

[0003] Among the various factors affecting the efficiency of OLED devices, the uniformity of film formation of each functional layer material is a very important consideration. Generally, vacuum drying equipment is used to dry the substrate to form a film.

[0004] In related technologies, the substrate is placed in a sealed chamber and dried by evacuating the chamber. Specifically, the chamber contains a support plate, a ejector plate, and a lifting mechanism. The top of the chamber is connected to a pump. Multiple ejector pins of the ejector plate pass through the support plate from bottom to top. The lifting mechanism is used to move the ejector plate up and down. The ejector pins rise to receive the substrate, and the ejector pins descend to place the substrate on the support plate to complete the loading process. Then, the pump can be turned on to perform vacuum drying on the substrate.

[0005] During vacuum drying of substrates, the substrates need to be transferred into a chamber and supported by multiple pins. The substrates also need to be lifted and lowered during transport. Uneven stress during this process can lead to breakage. Temperature differences on the substrate surface during vacuum drying also pose a risk of breakage. Furthermore, it's understandable that larger substrates are more prone to uneven stress and temperature distribution, increasing the likelihood of breakage. When a substrate breaks, fragments scatter inside the chamber, making complete removal difficult due to the concentrated structure within the chamber.

[0006] In addition, when maintaining vacuum drying equipment, the support plate, lifting mechanism and ejector plate are all located inside the chamber. It is necessary to remove the top wall of the chamber to maintain the internal structure. However, even if the top wall of the chamber is removed, it is difficult to maintain the internal structure inside the chamber due to the limited space inside the chamber.

[0007] Therefore, the relevant technologies have technical problems such as difficulty in cleaning the inside of the enclosure and difficulty in maintaining the internal structure of the enclosure. Summary of the Invention

[0008] This application provides a flexible vacuum drying device and inkjet printing system to solve the technical problems in related technologies, such as difficulty in cleaning the inside of the chamber and difficulty in maintaining the internal structure of the chamber.

[0009] Firstly, a flexible vacuum drying apparatus is provided, comprising:

[0010] The box body has a passage opening on its side, and a passage door is provided at the passage opening of the box body;

[0011] A support plate, located inside the housing, is used to support the substrate;

[0012] The ejector assembly includes a connector and multiple ejector modules. The multiple ejector modules are evenly installed on the connector on the same horizontal plane. The connector is located below the support plate, and the multiple ejector modules all pass through the support plate.

[0013] A lifting mechanism is installed on the outer wall of the housing. The driving end of the lifting mechanism extends vertically into the housing and passes through the connector to abut against the support plate. The driving end of the lifting mechanism drives the support plate to move up and down.

[0014] A connection structure is provided in which the support plate and the connector are detachably connected.

[0015] Multiple sets of sliding components, the support plate, and / or the connector are slidably connected to the bottom surface of the housing via the sliding components, and the sliding direction of the support plate and the connector is set towards the channel opening. The support plate and the ejector pin assembly are adapted to slide out of the housing together from the channel opening.

[0016] In some embodiments, the passage door is hinged to the housing, and when the passage door is open, the inner side of the passage door is flush with the bottom surface of the passage opening.

[0017] In some embodiments, the flexible vacuum drying equipment further includes multiple auxiliary slide rails detachably connected to the bottom surface of the chamber or the inner side of the passage door. One end of the auxiliary slide rail extends into the chamber and abuts against the sliding assembly, while the other end of the auxiliary slide rail is located outside the chamber. The support plate and the ejector pin assembly are adapted to slide on the auxiliary slide rails and move away from the chamber.

[0018] In some embodiments, the sliding assembly includes a first sliding module, and the support plate is slidably connected to the housing via multiple sets of the first sliding modules. The first sliding module includes:

[0019] A sliding bar is mounted on the support plate, and the length direction of the sliding bar is oriented towards the channel opening.

[0020] A rolling track is detachably installed on the bottom surface of the housing, with its length pointing towards the channel opening, and a sliding bar sliding on the rolling track; wherein...

[0021] The ejector pin assembly is connected to the support plate via the connecting structure, so that it slides out of the housing along with the support plate from the channel opening.

[0022] In some embodiments, the flexible vacuum drying equipment further includes a positioning and mounting structure. The rolling track is connected to the bottom surface of the chamber through multiple sets of the positioning and mounting structures. The positioning and mounting structure includes a positioning block and a positioning groove. The positioning block and the positioning groove are respectively located on the bottom surface of the rolling track and the bottom surface of the chamber. The positioning block and the positioning groove are inserted and engaged. The rolling track and the chamber are connected through the engagement of the positioning block and the positioning groove.

[0023] In some embodiments, one of the multiple rolling tracks is provided with a limiting structure that abuts against both sides of the slider to limit the sliding direction of the slider relative to the rolling track.

[0024] In some embodiments, the connection structure includes multiple connecting blocks, all of which are connected to the bottom surface of the support plate and are respectively arranged near the four corners of the support plate;

[0025] The connector has a connecting groove on its side, the connecting block is adapted to be inserted into the connecting groove, and the connecting block is detachably connected to the connector by bolts.

[0026] In some embodiments, the sliding assembly includes a second sliding module, and the connector is slidably connected to the inner bottom surface of the housing via multiple sets of the second sliding modules. The second sliding module includes:

[0027] The guide channel is laid on the bottom surface of the box body along the direction towards the channel opening, and multiple guide channels are arranged side by side;

[0028] Multiple rollers are mounted on the bottom surface of the connector and roll within the guide groove; wherein,

[0029] The support plate is supported by the connector and slides out of the channel opening along with the connector.

[0030] In some embodiments, the connection structure includes a connecting post and a connecting hole, the connecting post and the connecting hole being respectively disposed on the sides of the connector and the support plate facing each other, the connecting post being adapted to be inserted into the connecting hole, and the connector and the support plate forming an insertion fit through the cooperation of the connecting post and the connecting hole.

[0031] In some embodiments, the flexible vacuum drying apparatus further includes a condenser plate disposed near the inner top surface of the housing, the condenser plate being positioned above the support plate.

[0032] In some embodiments, the flexible vacuum drying equipment also includes multiple support blocks that are detachably mounted on the top surface of the support plate;

[0033] The condenser plate is detachably connected to the housing; wherein...

[0034] The connection between the condenser plate and the housing is disconnected. The condenser plate is supported by multiple support blocks. The condenser plate, the ejector pin assembly, and the carrier plate slide out of the housing from the channel opening.

[0035] In some embodiments, the flexible vacuum drying equipment also includes multiple mounting rails, through which the condenser plate is slidably connected to the housing, and the condenser plate is adapted to slide out of the housing from the channel opening.

[0036] The beneficial effects of the technical solution provided in this application include:

[0037] This application provides a flexible vacuum drying device. The substrate is fed into the chamber through a channel opening and supported by multiple ejector pin modules of an ejector pin assembly. A lifting mechanism then raises a support plate, which evenly supports the substrate. During vacuum drying, the substrate experiences more uniform support force, reducing the risk of breakage. Furthermore, once the substrate is inside the chamber, it does not need to move with the ejector pin assembly; the assembly remains stationary while supporting the substrate. This also reduces the risk of uneven stress and breakage. Therefore, the possibility of substrate breakage inside the chamber is reduced, thereby decreasing the frequency of cleaning the chamber interior.

[0038] When the substrate breaks or other situations requiring cleaning of the cabinet interior arise, since the drive end of the lifting mechanism is not connected to the support plate and the lifting mechanism is located outside the cabinet, the drive end of the lifting mechanism can be lowered below the connecting piece. At this time, the support plate falls onto the connecting piece due to gravity and is supported by the connecting piece. By connecting the support plate to the connecting piece, the cabinet door is opened, and with the support of the sliding assembly, the support plate and ejector pin assembly can slide out of the cabinet from the channel opening together, removing most of the internal structure of the cabinet to facilitate cleaning. The removed support plate and ejector pin assembly are also easier to clean, improving cleaning efficiency.

[0039] When maintenance is required on the vacuum drying equipment, the support plate and ejector assembly can be slid out of the chamber together for easy access. Additionally, since the lifting mechanism is located outside the chamber, its drive end can be pulled out for convenient maintenance of its various components. This significantly improves the ease of maintenance for the vacuum drying equipment, particularly greatly enhancing the efficiency of maintaining the internal structure of the chamber.

[0040] Secondly, an inkjet printing system is provided, including the flexible vacuum drying equipment described above.

[0041] Another embodiment of this application provides an inkjet printing system. Since the inkjet printing system includes the aforementioned flexible vacuum drying equipment, the beneficial effects of the inkjet printing system are the same as those of the aforementioned flexible vacuum drying equipment, and will not be repeated here. Attached Figure Description

[0042] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0043] Figure 1 A schematic diagram of a flexible vacuum drying device provided in an embodiment of this application;

[0044] Figure 2 A schematic diagram from another perspective of the flexible vacuum drying equipment provided in the embodiments of this application;

[0045] Figure 3 A schematic diagram showing the slidable connection between the support plate and the box body via the first sliding module, as provided in the embodiments of this application;

[0046] Figure 4 A schematic diagram illustrating the sliding connection between the connector and the housing via a second sliding module, as provided in another embodiment of this application;

[0047] Figure 5 This is a schematic diagram of the assembly of the carrier plate ejector pin assembly provided in an embodiment of this application;

[0048] Figure 6 A schematic diagram of the ejector pin module provided in an embodiment of this application;

[0049] Figure 7 A schematic diagram of the lifting mechanism provided in an embodiment of this application;

[0050] Figure 8 A schematic diagram of the first sliding module and the support plate provided in an embodiment of this application;

[0051] Figure 9 A schematic diagram of the first sliding module and the support plate from another perspective, provided in an embodiment of this application;

[0052] Figure 10 A partial cross-sectional schematic diagram of the first sliding module, the housing, and the support plate provided in the embodiments of this application;

[0053] Figure 11 A schematic diagram of the first sliding module provided in an embodiment of this application;

[0054] Figure 12 A partial cross-sectional schematic diagram of the second sliding module, housing, and support plate provided in another embodiment of this application;

[0055] Figure 13 This is a schematic diagram of the auxiliary slide rail installation provided in an embodiment of this application;

[0056] Figure 14 A schematic diagram showing the condenser plate being installed via a mounting block, as provided in an embodiment of this application;

[0057] Figure 15 A schematic diagram showing the condenser plate supported by a support block according to an embodiment of this application;

[0058] Figure 16 This is a schematic diagram showing the condenser plate installed via a mounting rail, according to another embodiment of this application.

[0059] In the diagram: 1. Box body; 101. Channel door; 102. Limiting block; 1a. Channel opening; 2. Bearing plate; 201. Baffle; 2a. Mounting hole; 3. Ejector pin assembly; 301. Connector; 301a. Connecting groove; 302. Ejector pin module; 3021. Magnetic seat; 3022. Adjusting seat; 3023. Pin body; 4. Lifting mechanism; 401. Lifting drive assembly; 4011. Sliding frame; 4012. Mounting seat; 4013. Lifting drive component; 402. Push rod; 403. Flexible sleeve; 5. Connecting structure; 501. Connecting block; 502. Connecting column 503. Connecting hole; 601. First sliding module; 6011. Sliding bar; 6012. Rolling track; 6012a. Limiting structure; 602. Second sliding module; 6021. Guide groove; 6022. Roller; 7. Positioning and mounting structure; 701. Positioning block; 702. Positioning groove; 8. Auxiliary slide rail; 9. Alignment structure; 901. Alignment block; 902. Alignment groove; 10. Condensation plate; 11. Mounting block; 12. Support block; 13. Mounting support structure; 1301. Connecting pin; 1302. Pin hole; 14. Mounting slide rail; 15. Vacuum assembly. Detailed Implementation

[0060] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0061] This application provides a flexible vacuum drying equipment and inkjet printing system. The support plate and ejector pin assembly inside the vacuum drying equipment can be slid out of the equipment via sliding components, facilitating maintenance and cleaning of the equipment and its components. This application addresses the technical problems in related technologies where it is difficult to clean the interior of the equipment and maintain its internal structure.

[0062] Reference Figures 1-4 A flexible vacuum drying device includes a housing 1, a support plate 2, a pin assembly 3, a lifting mechanism 4, a connecting structure 5, and multiple sets of sliding components. The support plate 2 and the pin assembly 3 are both located inside the housing 1. The lifting mechanism 4 pushes the support plate 2 to raise or lower it. The support plate 2 is detachably connected to the pin assembly 3 via the connecting structure 5. After the support plate 2 and the pin assembly 3 are connected, they can slide out of the housing 1 together via the sliding components, thereby removing most of the structure inside the housing 1, facilitating maintenance and cleaning of the structure inside the housing 1.

[0063] Reference Figure 1 and Figure 2 Furthermore, the flexible vacuum drying equipment also includes a vacuum assembly 15, which is connected to the interior of the chamber 1 to create negative pressure inside the chamber 1.

[0064] Reference Figure 1 and Figure 2 The box 1 is cuboid in shape and is made of multiple welded plates. The side of the box 1 has a channel opening 1a, and a channel door 101 is arranged at each channel opening 1a. The channel opening 1a is opened and closed through the channel door 101, and the substrate is delivered into the box 1 from the channel opening 1a by an external robot.

[0065] This design, through the welding of multiple plates, facilitates the forming of large-volume boxes 1 and is suitable for the processing of large-size substrates.

[0066] In some embodiments, channel openings 1a are provided on both opposite sides of the housing 1, and channel doors 101 are provided at each channel opening 1a. Both channel openings 1a can be used for loading and unloading substrates, or for maintenance inside the housing 1, and are not limited here.

[0067] The arrangement of two opposing channel ports 1a facilitates the loading and unloading of substrates, allowing for loading and unloading from both channels 1a separately, resulting in a better processing cycle and improved processing efficiency.

[0068] It should be noted that the vacuum drying equipment in this embodiment is suitable for large-size substrates processed by G6 and G8.5 generation production lines. The G6 substrate has dimensions of 1500×1850mm, and the G8.5 substrate has dimensions of 2200×2500mm. Due to the large substrate size, the chamber 1 is also large, making the substrate more prone to breakage during vacuum drying.

[0069] Reference Figure 1 and Figure 2 The vacuum assembly 15 includes multiple pump bodies. Multiple pump bodies are connected to the top surface, bottom surface, and side surface of the housing 1 that avoids the passage opening 1a, and are used to evacuate the interior of the housing 1. It should be noted that the vacuum assembly 15 is connected to the interior of the housing 1 through any one or more of the top surface, bottom surface, and side surface that avoids the passage opening 1a; this is not limited here.

[0070] Reference Figures 1-4 The support plate 2 is installed inside the housing 1 and placed horizontally within the housing 1. The support plate 2 is used to support the substrate, and the substrate is laid flat on the support plate 2. The support plate 2 provides uniform support to the substrate to avoid uneven stress and deformation, improve the film formation quality on the substrate, and prevent the substrate from being damaged due to uneven stress.

[0071] Reference Figure 5Furthermore, baffles 201 are provided on the circumferential sides of the support plate 2, and the height of the baffles 201 is higher than the top surface of the support plate 2.

[0072] With this configuration, by setting up the baffle 201, when the substrate breaks, the baffle 201 restricts the fragments from flying around randomly, and makes it easier to concentrate the fragments on the support plate 2, thus facilitating the cleaning of the fragments.

[0073] Reference Figure 3 and Figure 4 The ejector pin assembly 3 includes a connector 301 and multiple ejector pin modules 302. The connector 301 is located below the support plate 2 and is installed on the bottom surface of the housing 1. Multiple ejector pin modules 302 are evenly installed on the connector 301 at the same horizontal plane. The support plate 2 has multiple mounting holes 2a through which the ejector pin modules 302 pass. The multiple ejector pin modules 302 pass through the support plate 2 through the mounting holes 2a, and are used to provide multi-point support for the substrate. In this embodiment, the connector 301 includes a connecting plate; in other embodiments, the connector 301 may also include a connecting frame.

[0074] Reference Figure 6 and Figure 10 Specifically, the ejector module 302 includes a magnetic base 3021, an adjusting base 3022, and a needle body 3023. The magnetic base 3021 is connected to the connector 301; in this embodiment, the magnetic base 3021 is embedded in the connector 301. The adjusting base 3022 is magnetically connected to the magnetic base 3021, and the adjusting base 3022 can translate horizontally relative to the magnetic base 3021. In this embodiment, the adjusting base 3022 is made of stainless steel. The needle body 3023 is connected to the adjusting base 3022; in this embodiment, the needle body 3023 is vertically inserted into the adjusting base 3022. By adjusting the position of the adjusting base 3022 relative to the magnetic base 3021, the needle body 3023 passes through the mounting hole 2a into the support plate 2.

[0075] This design allows the adjusting base 3022 to move relative to the magnetic base 3021, enabling flexible adjustment of the needle body 3023's position during the assembly of the ejector pin assembly 3 and the support plate 2. This ensures that each needle body 3023 can pass through its corresponding mounting hole 2a, facilitating the assembly process of the ejector pin assembly 3 and the support plate 2. Furthermore, the needle body 3023 can be removed from the adjusting base 3022 for replacement, simplifying maintenance of the ejector pin assembly 3.

[0076] Reference Figure 2 , Figure 3 and Figure 7 The lifting mechanism 4 is installed on the outside of the housing 1. The drive end of the lifting mechanism 4 extends into the housing 1 and passes through the connector 301, and supports or pushes the bearing plate 2.

[0077] During substrate loading and unloading, the top surface of the support plate 2 is lower than the top of the ejector pin module 302. Multiple ejector pin modules 302 support the substrate, with gaps between them. An external robot arm is positioned to reach into these gaps, supporting the substrate from below. The height difference between the top of the ejector pin module 302 and the support plate 2 provides sufficient space for the robot arm. During substrate drying, the lifting mechanism 4 raises the support plate 2, ensuring its top surface is higher than the top of the ejector pin module 302. The support plate 2 provides uniform support to the substrate, resulting in better substrate flatness and improved film formation.

[0078] Since the ejector pin assembly 3 does not move up or down, the substrate, after being loaded and supported by the ejector pin assembly 3, will not move with the ejector pin assembly 3, reducing the risk of large-size substrates being scratched or even broken. After the substrate is delivered into the housing 1, the substrate does not need to move up or down with the ejector pin assembly 3; the ejector pin assembly 3 is in a stationary state when supporting the substrate, so the substrate is less likely to break due to uneven force when supported by the ejector pin assembly 3. Therefore, the possibility of the substrate breaking inside the housing 1 is reduced, thereby reducing the frequency of cleaning the inside of the housing 1.

[0079] Reference Figure 7 Specifically, the lifting mechanism 4 includes a lifting drive assembly 401 and multiple push rods 402. The lifting drive assembly 401 is installed on the outer bottom surface of the housing 1, and the push rods 402 are the drive ends of the lifting mechanism 4. Multiple push rods 402 are installed on the drive ends of the lifting drive assembly 401 for lifting movement. The push rods 402 extend into the housing 1 and are adapted to pass through the connector 301 and abut against the support plate 2.

[0080] In this embodiment, multiple push rods 402 are evenly arranged and used to provide multi-point support for the bearing plate 2. In this embodiment, there are four push rods 402, which are respectively set near the corners of the bottom surface of the bearing plate 2. In other embodiments, multiple push rods 402 can be arranged according to the size of the bearing plate 2 to ensure stable support for the bearing plate 2.

[0081] With this configuration, only the push rod 402 of the lifting mechanism 4 extends into the housing 1. When performing maintenance inside the housing 1, it is convenient to pull the push rod 402 out of the housing 1 by lowering it down, which facilitates maintenance and repair of the lifting mechanism 4.

[0082] Reference Figure 2 , Figure 3 and Figure 7 The lifting mechanism 4 also includes multiple flexible sleeves 403, which are sleeved on the push rod 402, and both ends of the flexible sleeves 403 are respectively sealed to the outer bottom surface of the housing 1 and the drive end of the lifting drive assembly 401. In this embodiment, the flexible sleeves 403 include corrugated pipes.

[0083] This design allows the flexible sleeve 403 to seal the area on the bottom wall of the housing 1 through which the push rod 402 passes, thereby improving the internal sealing of the housing 1. The flexible sleeve 403 is located on the outside of the housing 1, facilitating its maintenance and installation / removal. Simultaneously, since the push rod 402 only pushes against the support plate 2 and is not connected to it, it can be removed from the housing 1. When installing or removing the lifting mechanism 4, it is more independent than the housing 1, facilitating separate storage and transport of the housing 1 and the lifting mechanism 4, and also simplifying the installation, removal, and maintenance of the lifting mechanism 4.

[0084] Reference Figure 2 , Figure 3 and Figure 7 Specifically, the lifting drive assembly 401 includes a sliding frame 4011, multiple mounting seats 4012, and multiple lifting drive components 4013. The multiple mounting seats 4012 are fixed at intervals to the outer bottom surface of the housing 1. The sliding frame 4011 is slidably mounted on the multiple mounting seats 4012 via guide rails, and multiple push rods 402 are all fixed to the sliding frame 4011. The multiple lifting drive components 4013 are respectively mounted on the multiple mounting seats 4012 and synchronously drive the sliding frame 4011 to rise and fall. In this embodiment, the multiple mounting seats 4012 are arranged at intervals along a straight line; preferably, the multiple mounting seats 4012 are arranged at intervals along the length of the housing 1.

[0085] With this configuration, the support plate 2 is relatively large in size and weight because it needs to support a large substrate. Multiple lifting drive components 4013 synchronously drive the sliding frame 4011 to rise and fall, thereby synchronously driving the various positions of the sliding frame 4011 to rise and fall. This ensures that the stroke of the multiple push rods 402 on the sliding frame 4011 is consistent, so as to realize the synchronous push of multiple positions of the support plate 2 at the same time, which improves the lifting stability of the support plate 2. Moreover, since the support plate 2 is supported evenly at multiple points, the flatness of the support plate 2 is easier to ensure, thus ensuring flat and uniform support for the substrate.

[0086] In this embodiment, the lifting drive component 4013 includes a lead screw mechanism or a linear motor.

[0087] Reference Figure 2 , Figure 3 and Figure 7 The mounting base 4012 is fixed to the outer bottom surface of the housing 1 by welding or bolts. By arranging the sliding bracket 4011 and the lifting drive component 4013 on the mounting base 4012 and then installing them together onto the housing 1, it is easier to install large-sized parts and improves the installation flexibility of the lifting mechanism 4. In addition, the mounting base 4012 is installed on the outer bottom surface of the housing 1, which also facilitates the arrangement of more mounting bases 4012 and lifting drive components 4013.

[0088] Reference Figure 3 and Figure 4 The support plate 2 and / or the connector 301 are slidably connected to the inner bottom surface of the housing 1 via a sliding assembly. The sliding direction of the support plate 2 and the connector 301 is set towards the channel opening 1a, and the support plate 2 and the ejector pin assembly 3 are adapted to slide out of the housing 1 together from the channel opening 1a.

[0089] Reference Figure 1 and Figure 2 Furthermore, the passage door 101 is hinged to the housing 1. After the passage door 101 is opened, the inner side of the passage door 101 is flush with the bottom surface of the passage opening 1a. In this embodiment, a limiting block 102 is installed on the side of the housing 1 where the passage opening 1a is located. After the passage door 101 is opened, the outer side of the passage door 101 abuts against the limiting block 102 to maintain the horizontal state of the passage door 101.

[0090] With this configuration, when the ejector assembly 3 and the support plate 2 slide out of the housing 1, the ejector assembly 3 and the support plate 2 can slide on the channel door 101. The channel door 101 supports the part of the ejector assembly 3 and the support plate 2 that slides out of the housing 1. The channel door 101 not only does not interfere with the sliding process of the ejector assembly 3 and the support plate 2, but also assists in supporting the ejector assembly 3 and the support plate 2.

[0091] Reference Figure 3 , Figure 8 and Figure 9 In this embodiment, the support plate 2 is slidably connected to the inner bottom surface of the housing 1 via a sliding assembly. The sliding assembly includes a first sliding module 601, through which the support plate 2 is slidably connected to the housing 1. The first sliding module 601 includes a sliding bar 6011 and a rolling track 6012.

[0092] Reference Figure 3 , Figure 8 and Figure 9 The sliding bar 6011 is mounted on the support plate 2, with its length direction facing the channel opening 1a. In this embodiment, the sliding bar 6011 is mounted on the bottom surface of the support plate 2, and is positioned near the edge of the support plate 2. The area of ​​the support plate 2 is larger than the area of ​​the connector 301. After the ejector pin assembly 3 and the support plate 2 are assembled, the orthographic projection of the connector 301 onto the bottom surface of the support plate 2 is located in the middle of the bottom surface of the support plate 2, leaving installation space at the edge of the bottom surface of the support plate 2 for the installation of the sliding bar 6011. After the sliding bar 6011 is installed, the sliding bar 6011 and the connector 301 are spaced apart in the horizontal direction. Therefore, the arrangement of the sliding bar 6011 makes reasonable use of the space below the support plate 2.

[0093] Reference Figure 3 , Figure 8 and Figure 9The rolling track 6012 is detachably installed on the bottom surface of the box 1. The length direction of the rolling track 6012 is set towards the channel opening 1a, and the sliding bar 6011 slides on the rolling track 6012.

[0094] Understandably, when it is necessary to clean the housing 1 or perform maintenance inside the housing 1, the lifting mechanism 4 drives the support plate 2 to rise, and then the rolling track 6012 is installed on the bottom surface inside the housing 1. The drive end of the lifting mechanism 4 then descends, and the support plate 2 descends until the sliding bar 6011 rests on the rolling track 6012. Then, the support plate 2 and the connector 301 are connected by the connecting structure 5. Subsequently, the support plate 2 and the ejector pin assembly 3 can be slid out of the housing 1 from the channel opening 1a.

[0095] Specifically, a plurality of rolling elements are arranged at the top of the rolling track 6012 along the length of the rolling track 6012. The rolling elements include wheels or rollers. The sliding bar 6011 slides on the rolling elements, making it easier to slide the support plate 2 and the base plate out of the housing 1.

[0096] This configuration allows the ejector assembly 3 and the support plate 2 to enter or exit the housing 1 together, facilitating maintenance of both. If the substrate is too large, it may break during transport, when supported by the ejector module 302, and during vacuum drying. Broken substrate fragments scattered on the support plate 2 are difficult to clean from inside the housing 1. In this embodiment, removing the ejector assembly 3 and the support plate 2 facilitates the cleaning of substrate fragments. Even in the event of substrate breakage, cleaning and maintenance of the vacuum drying equipment can still be completed quickly.

[0097] Furthermore, since multiple ejector modules 302 need to pass through the mounting holes 2a of the support plate 2, when assembling the support plate 2 and the ejector assembly 3, it is necessary to align the multiple ejector modules 302 with the multiple mounting holes 2a on the support plate 2. Therefore, the assembly process of the ejector assembly 3 and the support plate 2 is relatively cumbersome, and each ejector module 302 needs to be inspected individually during subsequent maintenance. By removing the ejector assembly 3 and the support plate 2 together from the housing 1, the assembly and maintenance of the ejector assembly 3 and the support plate 2 are facilitated.

[0098] Reference Figure 11 Furthermore, one of the multiple rolling tracks 6012 is provided with a limiting structure 6012a, which abuts against both sides of the sliding bar 6011 to limit the sliding direction of the sliding bar 6011 relative to the rolling track 6012.

[0099] In this embodiment, two rolling tracks 6012 are arranged, and two corresponding sliding bars 6011 are also arranged. The two sliding bars 6011 are respectively located near the two opposite edges of the bottom surface of the support plate 2. The two rolling tracks 6012 are respectively located near the two opposite sides of the housing 1. One of the rolling tracks 6012 is provided with a limiting structure 6012a.

[0100] Reference Figure 11 Specifically, the limiting structure 6012a includes a limiting groove, which is formed on the rolling surface of each rolling element on the rolling track 6012. When the sliding bar 6011 is supported by the rolling element, part of the sliding bar 6011 is located in the limiting groove on the rolling element, and the sliding direction of the sliding bar 6011 is limited by the groove wall of the limiting groove.

[0101] In other embodiments, the limiting structure 6012a includes two limiting strips. Both limiting strips are installed on the rolling track 6012 along the length direction of the rolling track 6012, and the two limiting strips are spaced apart. The two limiting strips are respectively used to abut against the opposite sides of the sliding strip 6011 to limit the sliding direction of the sliding strip 6011.

[0102] This configuration, by limiting the sliding direction of the slider 6011, ensures that the slider 6011 continues to slide on the rolling track 6012, making it less likely to derail and ensuring that the support plate 2 and the ejector pin assembly 3 can slide smoothly out of the housing 1.

[0103] Reference Figure 10 The flexible vacuum drying equipment also includes a positioning and mounting structure 7, and the rolling track 6012 is connected to the inner bottom surface of the chamber 1 through multiple sets of positioning and mounting structures 7. The positioning and mounting structure 7 includes a positioning block 701 and a positioning groove 702.

[0104] Reference Figure 10 The positioning block 701 and the positioning groove 702 are respectively located on the bottom surface of the rolling track 6012 and the inner bottom surface of the box 1. The positioning block 701 and the positioning groove 702 are inserted and matched. The rolling track 6012 and the box 1 are connected through the matching of the positioning block 701 and the positioning groove 702.

[0105] Reference Figure 10 In this embodiment, the positioning groove 702 is formed on the inner bottom surface of the housing 1, and multiple positioning grooves 702 are arranged at intervals along the length direction towards the channel opening 1a. The positioning block 701 is fixed to the bottom surface of the rolling track 6012.

[0106] This configuration, through the cooperation of the positioning slot 702 and the positioning block 701, facilitates the rapid positioning and installation of the rolling track 6012.

[0107] Reference Figure 8 and Figure 9In this embodiment, the connecting structure 5 includes multiple connecting blocks 501, all of which are connected to the bottom surface of the support plate 2 and are arranged near the four corners of the support plate 2. In this embodiment, the connecting blocks 501 are connected to the bottom surface of the support plate 2 by bolts.

[0108] Reference Figure 8 and Figure 9 The side of the connector 301 is provided with a connecting groove 301a, and the connecting block 501 is adapted to be inserted into the connecting groove 301a. The connecting block 501 is detachably connected to the connector 301 by bolts.

[0109] With this configuration, when the support plate 2 descends, the connecting block 501 is inserted into the connecting groove 301a to position the connecting block 501 and the connecting member 301, facilitating their fixation. By fixing the connecting member 301 to the connecting block 501, the support plate 2 and the connecting member 301 are thus secured. Subsequently, the support plate 2 and the ejector pin assembly 3 can be slid out of the housing 1 together.

[0110] Reference Figure 12 In some embodiments, the connector 301 is slidably connected to the inner bottom surface of the housing 1 via a sliding assembly. The sliding assembly includes a second sliding module 602, and the connector 301 is slidably connected to the inner bottom surface of the housing 1 via multiple sets of second sliding modules 602.

[0111] Reference Figure 12 The second sliding module 602 includes a guide groove 6021 and multiple rollers 6022. The guide grooves 6021 of the multiple slide rail assemblies are arranged side-by-side, and are laid on the inner bottom surface of the housing 1 along the direction towards the channel opening 1a. The multiple rollers 6022 are all mounted on the bottom surface of the connector 301, and are arranged at straight-line intervals along the direction towards the channel opening 1a. The rollers 6022 are slidably disposed within the guide groove 6021. The connector 301 and the multiple ejector pin modules 302 can slide out of the housing 1 from the channel opening 1a by sliding the rollers 6022 on the guide groove 6021.

[0112] Furthermore, when the ejector assembly 3 needs to slide out of the housing 1, the push rod 402 of the lifting mechanism 4 first descends below the connecting member 301. At this time, the support plate 2 descends under the action of gravity until it is supported by the connecting member 301, and the connecting structure 5 connects the support plate 2 to the connecting member 301. By driving the connecting member 301 to slide, the ejector assembly 3 and the support plate 2 leave the housing 1 together from the channel opening 1a.

[0113] This configuration allows the ejector assembly 3 and the support plate 2 to enter or exit the housing 1 together, facilitating maintenance of both. If the substrate is too large, it may break during transport, when supported by the ejector module 302, and during vacuum drying. Broken substrate fragments scattered on the support plate 2 are difficult to clean from inside the housing 1. In this embodiment, removing the ejector assembly 3 and the support plate 2 facilitates the cleaning of substrate fragments. Even in the event of substrate breakage, cleaning and maintenance of the vacuum drying equipment can still be completed quickly.

[0114] Furthermore, since multiple ejector modules 302 need to pass through the mounting holes 2a of the support plate 2, when assembling the support plate 2 and the ejector assembly 3, it is necessary to align the multiple ejector modules 302 with the multiple mounting holes 2a on the support plate 2. Therefore, the assembly process of the ejector assembly 3 and the support plate 2 is relatively cumbersome, and each ejector module 302 needs to be inspected individually during subsequent maintenance. By removing the ejector assembly 3 and the support plate 2 together from the housing 1, the assembly and maintenance of the ejector assembly 3 and the support plate 2 are facilitated.

[0115] Reference Figure 12 In this embodiment, the connector 301 includes a connecting post 502 and a connecting hole 503. The connecting post 502 and the connecting hole 503 are respectively provided on the sides of the connector 301 and the support plate 2 facing each other. The connecting post 502 is adapted to be inserted into the connecting hole 503, and the connector 301 and the support plate 2 form a plug-in fit through the cooperation of the connecting post 502 and the connecting hole 503.

[0116] With this configuration, the support plate 2 and the connector 301 are connected by the connection hole 503 and the connection post 502. When the support plate 2 moves with the connector 301, the relative lateral movement of the support plate 2 and the connector 301 in the horizontal plane is restricted, and the support plate 2 is less likely to collide with or even damage the ejector pin module 302.

[0117] Preferably, the end of the connecting post 502 is tapered to facilitate the insertion of the connecting post 502 into the connecting hole 503.

[0118] In this embodiment, the connecting post 502 is installed on the top surface of the connector 301, and the connecting hole 503 is opened on the bottom surface of the bearing plate 2.

[0119] In some embodiments, the sliding component may include both a first sliding module 601 and a second sliding module 602. The connecting structure 5 may also include a combination of a connecting block 501, a connecting post 502, and a connecting hole 503.

[0120] Reference Figure 13The flexible vacuum drying equipment also includes multiple auxiliary slide rails 8, which are detachably connected to the bottom surface of the chamber 1 or the inner side of the passage door 101. One end of the auxiliary slide rail 8 extends into the chamber 1 and engages with the sliding assembly; specifically, the auxiliary slide rail 8 engages with the guide groove 6021 or the rolling track 6012. The other end of the auxiliary slide rail 8 is located outside the chamber 1, and the support plate 2 and the ejector pin assembly 3 are adapted to slide on the auxiliary slide rail 8 and move away from the chamber 1.

[0121] Reference Figure 13 The length direction of the auxiliary slide rail 8 is consistent with the sliding direction of the support plate 2 and the ejector assembly 3. The sliding bar 6011 slides from the rolling track 6012 to the auxiliary slide rail 8, or the roller 6022 slides from the guide groove 6021 to the auxiliary slide rail 8, which facilitates the movement of the entire ejector assembly 3 and the support plate 2 to the designated position, and the movement path is controllable, which is convenient for subsequent maintenance.

[0122] Preferably, the inner bottom surface of the auxiliary slide rail 8 is provided with multiple wheels or rollers to facilitate the sliding of the sliding bar 6011 or the roller 6022 on the auxiliary slide rail 8.

[0123] Reference Figure 13 The flexible vacuum drying equipment also includes multiple sets of alignment structures 9, and multiple auxiliary slide rails 8 are detachably connected to the housing 1 through multiple alignment structures 9. Each alignment structure 9 includes an alignment groove 902 and an alignment block 901. The alignment groove 902 and the alignment block 901 are interlocked, and are respectively located on the auxiliary slide rails 8 and the housing 1. In this embodiment, the alignment groove 902 is located in the housing 1, while the alignment block 901 is installed on the auxiliary slide rail 8. The auxiliary slide rail 8 and the housing 1 are interlocked through the alignment groove 902 and the alignment block 901. In this embodiment, each auxiliary slide rail 8 is connected to the alignment block 901 through multiple sets of alignment structures 9.

[0124] Specifically, the inner bottom wall of the housing 1 and / or the inner side of the passage door 101 are provided with an alignment groove 902. Preferably, the alignment groove 902 is formed on the inner wall of the passage door 101. This allows the passage door 101 to support the auxiliary slide rail 8, and since the alignment groove 902 is located on the passage door 101, it facilitates the subsequent installation and removal of the auxiliary slide rail 8.

[0125] Reference Figures 14-16 The flexible vacuum drying equipment also includes a condenser plate 10, which is installed inside the housing 1, close to the inner top surface of the housing 1, and with a gap between it and the inner top surface of the housing 1. The condenser plate 10 is located above the support plate 2 and is parallel to the support plate 2. Cooling channels are arranged inside the condenser plate 10 to reduce its temperature by liquid cooling, so that the temperature of the condenser plate 10 is lower than the temperature of the support plate 2.

[0126] With this configuration, since the temperature of the condenser plate 10 is lower than that of the support plate 2, an upward airflow is formed between the support plate 2 and the condenser plate 10. When the functional liquid on the substrate surface dries and forms a film, the volatile solvent rises with the upward airflow. This makes the airflow between the substrate on the support plate 2 and the condenser plate 10 more stable and less prone to turbulence. Therefore, the airflow on the substrate surface is more uniform, the drying consistency is better, and the uniformity of film formation on the substrate surface is improved.

[0127] Reference Figure 14 In this embodiment, the condenser plate 10 is connected to the inner wall of the housing 1 via multiple mounting blocks 11. The mounting blocks 11 are respectively positioned near the corners of the condenser plate 10. One end of each mounting block 11 is bolted to the interior of the housing 1, and the other end is located below the condenser plate 10 and serves to support it. Furthermore, the condenser plate 10 is bolted to a support plate. This achieves a detachable connection between the condenser plate 10 and the housing 1.

[0128] Reference Figure 15 The flexible vacuum drying equipment also includes multiple support blocks 12, all of which are detachably mounted on the top surface of the support plate 2. In this embodiment, the multiple support blocks 12 are all positioned near the edge of the top surface of the support plate 2. When the support blocks 12 are mounted on the top surface of the support plate 2 and the support plate 2 is in its lowest position, the top surface of the support blocks 12 is higher than the top of the ejector pin module 302.

[0129] By disconnecting the condenser plate 10 from the housing 1, the condenser plate 10 is supported by multiple support blocks 12, and the condenser plate 10, ejector pin assembly 3, and support plate 2 slide out of the housing 1 through the channel opening 1a. Specifically, the support plate 2 rises until the support blocks 12 contact the condenser plate 10, then the connection between the condenser plate 10 and the housing 1 is disconnected, allowing the condenser plate 10 to rest on the support blocks 12. Subsequently, the support plate 2 descends until it is supported by the connector 301, and finally the condenser plate 10, ejector pin assembly 3, and support plate 2 can slide out of the housing 1 through the channel opening 1a.

[0130] This design makes it easy to remove the condenser plate 10 from the housing 1, facilitating maintenance of the condenser plate 10.

[0131] Reference Figure 15 Specifically, the support block 12 is detachably connected to the support plate 2 via the mounting support structure 13. The mounting support structure 13 includes a pin hole 1302 and a connecting pin 1301. The pin hole 1302 is formed on the surface of the support plate 2, and the connecting pin 1301 is connected to the support block 12. The support block 12 is inserted and installed onto the support plate 2 through the cooperation of the connecting pin 1301 and the pin hole 1302.

[0132] Reference Figure 16In some embodiments, the flexible vacuum drying equipment also includes multiple mounting rails 14, the condenser plate 10 is slidably connected to the housing 1 via the mounting rails 14, and the condenser plate 10 is adapted to slide out of the housing 1 from the channel opening 1a.

[0133] Specifically, the two opposite sides of the condenser plate 10 are connected to the housing 1 via mounting rails 14. The mounting rails 14 are multi-segmented to ensure both the sliding stroke and the support strength for the condenser plate 10.

[0134] With this configuration, the condenser plate 10 slides out of the housing 1 via the mounting rail 14, making it convenient for maintenance of the condenser plate 10.

[0135] This application provides a flexible vacuum drying device. The substrate is fed into the chamber 1 through the channel opening 1a and supported by multiple ejector pin modules 302 of the ejector pin assembly 3. A lifting mechanism 4 then raises the support plate 2, which uniformly supports the substrate. During vacuum drying, the substrate experiences more uniform support force, reducing the risk of breakage. Furthermore, after the substrate is placed inside the chamber 1, it does not need to move with the ejector pin assembly 3; the assembly remains stationary while supporting the substrate. Therefore, uneven force on the substrate during support also reduces the risk of breakage. This reduces the possibility of substrate breakage within the chamber 1, thereby decreasing the frequency of cleaning the interior of the chamber 1.

[0136] When the substrate breaks or other situations arise requiring cleaning of the interior of the housing 1, since the drive end of the lifting mechanism 4 is not connected to the support plate 2 and the lifting mechanism 4 is located outside the housing 1, the drive end of the lifting mechanism 4 can be lowered below the connector 301. At this time, the support plate 2 falls onto the connector 301 due to gravity and is supported by the connector 301. The support plate 2 is connected to the connector 301 using the connecting structure 5. The housing door is opened, and with the support of the sliding assembly, the support plate 2 and the ejector pin assembly 3 can slide out of the housing 1 from the channel opening 1a together, so as to remove most of the internal structure of the housing 1, making it easier to clean the interior of the housing 1. The removed support plate 2 and ejector pin assembly 3 are also easier to clean, improving cleaning efficiency.

[0137] When maintenance of the vacuum drying equipment is required, the support plate 2 and the ejector assembly 3 can be slid out of the housing 1 together for easy maintenance. Furthermore, since the lifting mechanism 4 is located outside the housing 1, its drive end can be pulled out from inside the housing 1, facilitating maintenance of all parts of the lifting mechanism 4. This improves the convenience of maintaining the vacuum drying equipment, and particularly greatly enhances the efficiency of maintaining the internal structure of the housing 1.

[0138] Another embodiment of this application provides an inkjet printing system including a flexibly arranged vacuum drying device as described above.

[0139] Another embodiment of this application provides an inkjet printing system. Since the inkjet printing system includes the aforementioned flexible vacuum drying equipment, the beneficial effects of the inkjet printing system are the same as those of the aforementioned flexible vacuum drying equipment, and will not be repeated here.

[0140] In the description of this application, it should be noted that the terms "upper," "lower," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0141] It should be noted that in this application, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0142] The above description is merely a specific embodiment of this application, enabling those skilled in the art to understand or implement this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A flexible vacuum drying device, characterized in that, It includes: The box body has a passage opening on its side, and a passage door is provided at the passage opening of the box body; A support plate, located inside the housing, is used to support the substrate; A ejector assembly, comprising a connector and multiple ejector modules, wherein the multiple ejector modules are evenly mounted on the connector on the same horizontal plane, the connector is located below the support plate, and the multiple ejector modules all pass through the support plate; A lifting mechanism is installed on the outer wall of the housing. The driving end of the lifting mechanism extends vertically into the housing and passes through the connector to abut against the support plate. The driving end of the lifting mechanism drives the support plate to move up and down. A connection structure is provided in which the support plate and the connector are detachably connected. Multiple sets of sliding components are provided. The support plate and / or the connector are slidably connected to the bottom surface of the housing through the sliding components, and the sliding direction of the support plate and the connector is set towards the channel opening. The support plate and the ejector pin assembly are adapted to slide out of the housing together from the channel opening. The sliding components include a first sliding module. The support plate is slidably connected to the housing through multiple sets of the first sliding modules. The first sliding module includes: a sliding bar, which is installed on the support plate and whose length direction is set towards the channel opening; and a rolling track, which is detachably installed on the bottom surface of the housing and whose length direction is set towards the channel opening. The sliding bar slides on the rolling track. The ejector pin assembly is connected to the support plate through the connecting structure so as to slide out of the housing together with the support plate from the channel opening. The ejector pin module includes a magnetic base, an adjusting base, and a pin body. The magnetic base is connected to the connector and embedded in the connector. The adjusting base is magnetically connected to the magnetic base and can be translated in the horizontal plane relative to the magnetic base. The pin body is connected to the adjusting base and is vertically inserted into the adjusting base. By adjusting the position of the adjusting base relative to the magnetic base, the pin body can pass through the support plate through the mounting hole. The lifting mechanism includes a lifting drive assembly and multiple push rods. The lifting drive assembly is installed on the outer bottom surface of the housing, and the push rods are the drive ends of the lifting mechanism. The multiple push rods are all installed on the drive ends of the lifting drive assembly for lifting movement. The push rods extend into the housing and are adapted to pass through the connector and abut against the support plate.

2. The flexible vacuum drying equipment according to claim 1, characterized in that, The passage door is hinged to the housing, and when the passage door is open, the inner side of the passage door is flush with the bottom surface of the passage opening.

3. The flexible vacuum drying equipment according to claim 1 or 2, characterized in that, It also includes multiple auxiliary slide rails, which are detachably connected to the bottom surface of the housing or the inner side of the passage door. One end of the auxiliary slide rail extends into the housing and abuts against the sliding assembly, while the other end of the auxiliary slide rail is located outside the housing. The support plate and the ejector pin assembly are adapted to slide on the auxiliary slide rail and move away from the housing.

4. The flexible vacuum drying equipment according to claim 3, characterized in that, It also includes a positioning and mounting structure. The rolling track is connected to the bottom surface of the box body through multiple sets of the positioning and mounting structure. The positioning and mounting structure includes a positioning block and a positioning groove. The positioning block and the positioning groove are respectively located on the bottom surface of the rolling track and the bottom surface of the box body. The positioning block and the positioning groove are inserted and engaged. The rolling track and the box body are connected through the engagement of the positioning block and the positioning groove.

5. The flexible vacuum drying equipment according to claim 3, characterized in that, One of the multiple rolling tracks is provided with a limiting structure, which abuts against both sides of the slider to limit the sliding direction of the slider relative to the rolling track.

6. The flexible vacuum drying equipment according to claim 3, characterized in that, The connection structure includes multiple connecting blocks, all of which are connected to the bottom surface of the support plate and are respectively arranged near the four corners of the support plate; The connector has a connecting groove on its side, the connecting block is adapted to be inserted into the connecting groove, and the connecting block is detachably connected to the connector by bolts.

7. The flexible vacuum drying equipment according to claim 1, characterized in that, The sliding assembly includes a second sliding module, and the connector is slidably connected to the inner bottom surface of the housing through multiple sets of the second sliding modules. The second sliding module includes: The guide channel is laid on the bottom surface of the box body along the direction towards the channel opening, and multiple guide channels are arranged side by side; Multiple rollers are mounted on the bottom surface of the connector and roll within the guide groove; wherein, The support plate is supported by the connector and slides out of the channel opening along with the connector.

8. The flexible vacuum drying equipment according to claim 1 or 7, characterized in that, The connection structure includes a connecting post and a connecting hole. The connecting post and the connecting hole are respectively located on the sides of the connector and the support plate facing each other. The connecting post is adapted to be inserted into the connecting hole, and the connector and the support plate form a plug-in fit through the cooperation of the connecting post and the connecting hole.

9. The flexible vacuum drying equipment according to claim 1, characterized in that, It also includes a condenser plate, which is disposed near the inner top surface of the housing and is located above the support plate.

10. The flexible vacuum drying equipment according to claim 9, characterized in that, It also includes multiple support blocks, which are detachably installed on the top surface of the support plate; The condenser plate is detachably connected to the housing; wherein... The connection between the condenser plate and the housing is disconnected. The condenser plate is supported by multiple support blocks. The condenser plate, the ejector pin assembly, and the carrier plate slide out of the housing from the channel opening.

11. The flexible vacuum drying equipment according to claim 9, characterized in that, It also includes multiple mounting rails, the condenser plate is slidably connected to the housing via the mounting rails, and the condenser plate is adapted to slide out of the housing from the channel opening.

12. An inkjet printing system, characterized in that, Includes a flexible vacuum drying apparatus as described in any one of claims 1 to 11.

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