An automated wafer transport vehicle

Abstract

This invention relates to the field of semiconductor handling and processing equipment technology, and discloses an automated wafer transport vehicle, including a drive mechanism, a first lifting mechanism linked with a second lifting mechanism linked with a third lifting mechanism. The drive mechanism is linked with the first lifting mechanism, allowing the crane to be positioned above the guide rail when moving and below the guide rail when stopped. This enables the moving crane to pass over the top of the stationary crane without collision, improving the crane's working efficiency. The linkage between the drive mechanism and the first lifting mechanism ensures that if one crane malfunctions and is stuck on the guide rail, it will not affect the other cranes in operation, further improving crane operation efficiency. The linkage between the first and second lifting mechanisms controls the crane and the wafer box to remain horizontal, ensuring that the wafers inside the wafer box are always horizontal, and ensuring uniform stress on the entire wafer surface to prevent wafer breakage.

Description

Technical Field

[0001] This invention relates to the field of semiconductor handling and processing equipment technology, specifically to an automated wafer handling vehicle. Background Technology

[0002] A wafer handling overhead crane is a high-precision device used in semiconductor manufacturing plants for the automated handling of wafers. Often referred to as an overhead conveyor or automated material handling system, it consists of several complex components, including hardware and software. The hardware primarily comprises guide rails, cranes, carriers, and a control system. The cranes move along tracks installed on the plant ceiling, responsible for grabbing and placing materials. The carriers are specialized containers used to carry and protect materials such as wafer casks.

[0003] Therefore, in practical applications, wafer handling overhead cranes in wafer companies with large handling volumes often need to operate frequently, but generally only one transport track is designed. This means that when one wafer handling overhead crane is working on this track, the following wafer handling overhead cranes must wait for the preceding wafer handling overhead crane to finish before they can start working, wasting unnecessary time. At the same time, when a wafer handling overhead crane malfunctions and is stranded on the transport track, it will seriously affect the wafer handling overhead crane transportation. In addition, because wafer handling overhead cranes need to wait for the preceding crane to move before they can continue operating, in order to improve the transportation efficiency of wafer handling overhead cranes, it is often necessary to calculate the optimal route for the operating tracks of multiple wafer handling overhead cranes. However, the track operation route program will cause the operating cost to increase sharply, and the optimal route is not necessarily the fastest route. Therefore, we propose an automated wafer handling vehicle. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this invention provides an automated wafer transport vehicle that offers advantages such as high transport efficiency and low cost, thus solving a series of problems related to low wafer transport efficiency and high cost.

[0005] To achieve the above objectives, the present invention provides the following technical solution: an automated wafer transport vehicle, comprising,

[0006] A crane for transporting wafers, the crane including two guide rails fixed in mid-air, a lifting shell sliding inside the two guide rails, a second lifting mechanism inside the lifting shell, the second lifting mechanism including a fixed plate slidably connected to the bottom of the lifting shell, and a wafer box fixedly attached to the bottom of the fixed plate;

[0007] A drive mechanism is provided to drive the hoisting shell to move along the length of the guide rail. The drive mechanism is provided with two sets of drive rollers respectively arranged on both sides of the hoisting shell. The drive mechanism includes two drive rollers rolling on one side of the hoisting shell. The drive rollers rotate frictionally on the top of the adjacent guide rails. A transmission rod is fixedly connected to the side of the drive rollers near the hoisting shell. Two sliding grooves are opened on both sides of the hoisting shell. Sliding blocks are slidably connected inside the sliding grooves. The transmission rod is rotatably connected inside the adjacent sliding block and extends to the other side of the sliding block.

[0008] The first lifting mechanism drives the hoisting shell to rise or fall, thus ensuring that the movement of the crane behind is not affected when the crane in front is working, improving work efficiency and reducing route planning difficulty. Two sets of the first lifting mechanism are arranged symmetrically. Each first lifting mechanism includes a fixed rod fixedly connected to opposite sides of two sliding blocks. A pump housing is fixedly connected to the left side of the fixed rod. A driven pump wheel and a driven pump wheel are rotatably connected inside the pump housing, meshing with each other. A transmission rod is rotatably connected inside the pump housing, and the driven pump wheel is fixedly sleeved on the outside of the transmission rod. An oil tank is fixedly installed at the bottom of the inner wall of the hoisting shell, filled with hydraulic oil. Both sides of the oil tank are connected to… An oil outlet pipe is provided, the output end of which is connected to the input end of a nearby pump housing. The two transmission rods are rotatably connected to the same sliding plate on opposite sides. Four limiting frames are fixedly connected inside the lifting housing. Hydraulic bladders are fixedly installed on the top of the inner walls of each of the four limiting frames. The bottoms of the four hydraulic bladders are fixedly connected to the top of the sliding plate. A connecting pipe connects to opposite sides of every two hydraulic bladders. A pump oil pipe is connected to the output end of the pump housing, and the output end of the pump oil pipe is connected to one side of a nearby hydraulic bladder. Return oil pipes and pressure relief pipes are connected to opposite sides of the two intermediate limiting frames. The output ends of both the return oil pipes and pressure relief pipes are connected to the oil tank. A return oil valve is fixedly installed on the outside of the return oil pipe, and a pressure relief valve is fixedly installed on the outside of the pressure relief pipe.

[0009] Preferably, the drive mechanism further includes a protective shell slidably connected to the top of the guide rail. Two rotating rods are rotatably connected inside the protective shell. One side of each of the two drive rollers inside the two sets of drive mechanisms is fixedly connected to one side of the adjacent rotating rod. A transmission sprocket is fixedly sleeved on the outside of the rotating rod. A mounting base is fixedly connected to one side of the protective shell. A drive motor is fixedly mounted on the top of the mounting base. A drive sprocket is fixedly connected to the output end of the drive motor. The two transmission sprockets inside the same set of drive mechanisms are rotatably sleeved with the same drive chain on the outside of the drive sprocket. Both sides of the lifting shell are fixedly connected to avoidance bridges.

[0010] Preferably, a telescopic rod is fixedly connected to the bottom of the mounting base. Four telescopic rods are arranged symmetrically in pairs. A first rotating block is fixedly connected to the extended end of the telescopic rod. The same first roller is rotatably connected to the opposite side of the two first rotating blocks. The external friction of the first roller rotates on the top of the adjacent guide rail.

[0011] Preferably, the second lifting mechanism further includes a lifting motor fixedly installed on one side inside the suspended housing. There are two lifting motors. The output end of the lifting motor is fixedly connected to a lifting shaft. A lifting rope is fixedly connected to the outside of the lifting shaft. The lifting rope is wound around the outside of the lifting shaft. Four lifting slots are opened at the bottom of the inner wall of the suspended housing.

[0012] Preferably, one end of each of the four lifting ropes passes through a nearby lifting groove and extends to the bottom of the suspended shell, where it is fixedly connected to the top of the fixed plate. Four second rotating blocks are fixedly connected to the bottom of the inner wall of the suspended shell. Each of the four second rotating blocks has a second roller rotatably connected inside it, and the outside of each of the four second rollers abuts against the outside of the nearby lifting rope.

[0013] Preferably, four positioning plates are fixedly connected to the bottom of the inner wall of the hoisting shell, and a telescopic cylinder is fixedly installed inside the positioning plate. A third rotating block is fixedly installed at the extension end of the telescopic cylinder. A third roller is rotatably connected inside the third rotating block, and the outside of the third roller abuts against the outside of the adjacent lifting rope.

[0014] Preferably, an electrical control unit is fixedly connected to the bottom of the inner wall of the hoisting shell, a level sensor is fixedly installed on the top of the hoisting shell, and an angle sensor is fixedly installed inside the fixing plate.

[0015] Preferably, two mounting rods are fixedly connected to the top of the mounting base, and a pressure sensor is fixedly mounted on the top of each of the two mounting rods. The detection ends of the two pressure sensors are adapted to the bottom of the adjacent avoidance bridge.

[0016] Compared with the prior art, the present invention provides an automated wafer transport vehicle, which has the following advantages:

[0017] 1. This invention, through a drive mechanism, enables a crane to move along the length of a guide rail to transport wafers. By linking the drive mechanism with a first lifting mechanism, the crane can be positioned above the guide rail when moving and below the guide rail when stopped. This allows the moving crane to pass over the top of a stationary crane without collision, improving the crane's working efficiency and reducing its operating costs.

[0018] 2. This invention links the drive mechanism with the first lifting mechanism. When one crane malfunctions and is placed on the guide rail, it will not affect the other cranes that are working, thus improving the working efficiency of crane operations. At the same time, it can make the selection of the crane's movement trajectory more simply and reasonably.

[0019] 3. This invention, through the linkage of the first lifting mechanism and the second lifting mechanism, can control the crane and the wafer box to always be in a horizontal state, avoid the crane and the wafer box from tilting, keep the wafer inside the wafer box in a horizontal state, and make the force on the entire force-bearing surface of the wafer uniform to prevent the wafer from breaking. Attached Figure Description

[0020] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0021] Figure 2 This is a partial structural schematic diagram of the driving mechanism of the present invention;

[0022] Figure 3 for Figure 2 Enlarged schematic diagram of part A;

[0023] Figure 4 This is a partial structural schematic diagram of the first lifting mechanism of the present invention;

[0024] Figure 5 for Figure 4 Enlarged schematic diagram of part B;

[0025] Figure 6 This is a schematic diagram of the internal structure of the pump casing of the present invention;

[0026] Figure 7 This is a schematic diagram of the structure of the second lifting mechanism of the present invention;

[0027] Figure 8 This is a schematic diagram of the lifting groove part of the present invention.

[0028] In the diagram: 1. Crane; 2. Drive mechanism; 3. Second lifting mechanism; 4. Guide rail; 5. Lifting housing; 6. Drive roller; 7. Protective housing; 8. Sliding groove; 9. Sliding block; 10. Rotating rod; 11. Transmission sprocket; 12. Mounting base; 13. Drive motor; 14. Drive sprocket; 15. Drive chain; 16. Telescopic rod; 17. First rotating block; 18. First roller; 19. Transmission rod; 20. Fixed rod; 21. Pump housing; 22. Driving pump wheel; 23. Driven pump wheel; 24. Oil tank; 25. Oil outlet pipe; 26. Pump oil pipe; 27. 28. Sliding plate; 29. ​​Limiting frame; 30. Hydraulic bladder; 31. Connecting pipe; 32. Return oil pipe; 33. Pressure relief pipe; 34. Return oil valve; 35. Pressure relief valve; 36. Lifting motor; 37. Lifting shaft; 38. Lifting rope; 39. Lifting groove; 40. Second rotating block; 41. Second roller; 42. Positioning plate; 43. Telescopic cylinder; 44. Third rotating block; 45. Third roller; 46. Electrical control unit; 47. Mounting rod; 48. Pressure sensor; 49. Avoidance bridge; 50. Fixing plate; 51. First lifting mechanism; 52. Horizontal sensor. Detailed Implementation

[0029] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0030] As described in the background section, there are shortcomings in the existing technology. In order to solve the above-mentioned technical problems, this application proposes an automated wafer transport vehicle.

[0031] In one typical implementation of this application, such as Figure 1-8 As shown, an automated wafer transport vehicle includes,

[0032] Crane 1 is used to transport wafers. Crane 1 includes two guide rails 4 fixed in mid-air. A lifting shell 5 slides inside the two guide rails 4. The distance between the two guide rails 4 is equal to the width of the lifting shell 5.

[0033] The above-mentioned structure allows the hoisting shell 5 to move up and down on the opposite side of the two guide rails 4. Specifically, since the distance between the two guide rails 4 is equal to the width of the hoisting shell 5, the hoisting shell 5 will not contact the two guide rails 4 when it slides up and down inside the two guide rails 4. More specifically, the crane 1 can be set in several units according to the company's usage requirements.

[0034] The drive mechanism 2 is used to drive the hanging shell 5 to move along the length of the guide rail 4. The drive mechanism 2 is provided with two sets of drive rollers 6 respectively set on both sides of the hanging shell 5. The drive mechanism 2 includes two drive rollers 6 rolling on one side of the hanging shell 5. The drive rollers 6 rotate frictionally on the top of the adjacent guide rail 4. The drive rollers 6 are fixedly connected to the side of the hanging shell 5 with a transmission rod 19. Two sliding grooves 8 are opened on both sides of the hanging shell 5. Sliding blocks 9 are slidably connected inside the sliding grooves 8. The transmission rod 19 is rotatably connected inside the adjacent sliding block 9 and extends to the other side of the sliding block 9.

[0035] By setting the above structure, the stability of the transmission rod 19 can be improved, and the stability of the lifting shell 5 moving in the length direction of the guide rail 4 can be indirectly improved. Specifically, the sliding block 9 slides inside the sliding groove 8, which limits the movement direction and angle of the sliding block 9. At the same time, the transmission rod 19 is rotatably connected inside the adjacent sliding block 9, so that the sliding block 9 limits the transmission rod 19, thereby improving the stability of the lifting shell 5 moving in the length direction of the guide rail 4.

[0036] The drive mechanism 2 also includes a protective shell 7 slidably connected to the top of the guide rail 4. Two rotating rods 10 are rotatably connected inside the protective shell 7. One side of each of the two drive rollers 6 inside the two sets of drive mechanisms 2 is fixedly connected to one side of the adjacent rotating rod 10. A transmission sprocket 11 is fixedly sleeved on the outside of the rotating rod 10. A mounting base 12 is fixedly connected to one side of the protective shell 7. A drive motor 13 is fixedly mounted on the top of the mounting base 12. A drive sprocket 14 is fixedly connected to the output end of the drive motor 13. The two transmission sprockets 11 inside the same set of drive mechanisms 2 and the drive sprocket 14 are rotatably sleeved with the same drive chain 15.

[0037] The above-described structure enables the four drive rollers 6 to rotate synchronously and in the same direction, improving the stability of the suspended shell 5 moving along the length of the guide rail 4. Specifically, the two drive motors 13 are started, and their output ends rotate, driving the drive sprockets 14 fixedly connected to them to rotate at the same speed. The output ends of the two drive motors 13 rotate in opposite directions. Since the two drive motors 13 are symmetrically arranged, the four drive rollers 6 rotate in the same direction. The rotation of the two drive sprockets 14 drives the corresponding drive chains 15 to rotate. The rotation of the two drive chains 15 drives the two transmission sprockets 11 on the same side to rotate. The rotation of the two transmission sprockets 11 drives the corresponding rotating rods 10 to rotate. The rotation of the four rotating rods 10 drives the corresponding drive rollers 6 to rotate and move on the top of the two guide rails 4. The rotation and movement of the four drive rollers 6 on the top of the two guide rails 4 causes the suspended shell 5 to move along the length of the guide rail 4.

[0038] A rubber pad is fixedly connected to one side of the protective shell 7. One side of the rubber pad is fixedly connected to one side of the mounting base 12. A telescopic rod 16 is fixedly connected to the bottom of the mounting base 12. Four telescopic rods 16 are arranged symmetrically in pairs. A first rotating block 17 is fixedly connected to the extended end of the telescopic rod 16. The same first roller 18 is rotatably connected to the opposite side of the two first rotating blocks 17. The external friction of the first roller 18 rotates on the top of the adjacent guide rail 4.

[0039] The interior of the hanging shell 5 is provided with a second lifting mechanism 3, which includes a fixing plate 49 slidably connected to the bottom of the hanging shell 5, and a wafer box is fixedly attached to the bottom of the fixing plate 49.

[0040] By setting the above structure, the stability of the lifting housing 5 when it suddenly starts moving along the length of the guide rail 4 can be improved, and damage to the wafers inside the wafer box can be avoided by the sudden movement of the lifting housing 5. Specifically, when the drive motor 13 is started, due to inertia, the drive roller 6 will suddenly rotate and drive the lifting housing 5 to move suddenly. The sudden stop or sudden movement of the lifting housing 5 may cause the wafer suspended in the air to be in an unstable state, increasing the risk of falling or breaking. When the wafer inside the wafer box is still in a stationary or moving state, the sudden movement or stationary state of the wafer box will cause the wafer inside the wafer box to squeeze a certain part of the wafer, thereby causing damage to the wafer. However, when the drive motor 13 is started, the rubber pad dilutes part of the starting torque, thereby improving the starting stability of the lifting housing 5.

[0041] The first lifting mechanism 50 is used to drive the hoisting shell 5 to rise or fall, so that the movement of the crane 1 behind it is not affected when the crane 1 in front is working, thus improving work efficiency and reducing the difficulty of route planning. Two sets of the first lifting mechanism 50 are provided, arranged symmetrically. Each first lifting mechanism 50 includes a fixed rod 20 fixedly connected to opposite sides of two sliding blocks 9. A pump housing 21 is fixedly connected to the left side of the fixed rod 20. A driven pump wheel 23 and a driven pump wheel 22 are rotatably connected inside the pump housing 21, meshing with each other. A transmission rod 19 is rotatably connected inside the pump housing 21, and the driven pump wheel 22 is fixedly sleeved on the outside of the transmission rod 19. An oil tank 24 is fixedly installed at the bottom of the inner wall of the hoisting shell 5, filled with hydraulic oil. Oil outlet pipes 2 are connected to both sides of the oil tank 24. 5. The output end of the oil outlet pipe 25 is connected to the input end of the adjacent pump housing 21. The two transmission rods 19 are rotatably connected to the same sliding plate 27 on opposite sides. Four limit brackets 28 are fixedly connected inside the lifting housing 5. Hydraulic bladders 29 are fixedly installed on the top of the inner wall of each of the four limit brackets 28. The bottom of each of the four hydraulic bladders 29 is fixedly connected to the top of the sliding plate 27. A connecting pipe 30 is connected to the opposite sides of each pair of hydraulic bladders 29. The output end of the pump housing 21 is connected to the pump oil pipe 26. The output end of the pump oil pipe 26 is connected to one side of the adjacent hydraulic bladder 29. The opposite sides of the two intermediate limit brackets 28 are connected to the return oil pipe 31 and the pressure relief pipe 32. The output ends of the return oil pipe 31 and the pressure relief pipe 32 are connected to the oil tank 24. A return oil valve 33 is fixedly installed on the outside of the return oil pipe 31. A pressure relief valve 34 is fixedly installed on the outside of the pressure relief pipe 32.

[0042] With the above-described structure, when one crane 1 is working, the cranes 1 behind it do not need to stop and wait, and can continue to perform the preset tasks, improving work efficiency. At the same time, if one crane 1 malfunctions and cannot move, it will not obstruct the other cranes 1, improving work efficiency and reducing work losses. Furthermore, the above-described structure reduces the difficulty of programming the preset motion trajectory of the cranes 1, lowering costs. Specifically, when the four drive rollers 6 rotate, they drive the transmission rod 19 inside the sliding block 9 to rotate. The rotation of the transmission rod 19 drives the active pump wheel 22 inside the pump housing 21 to rotate. The rotation of the active pump wheel 22 drives the driven pump that meshes with the active pump wheel 22. As wheel 23 rotates, a partial vacuum is formed in the tooth gap, drawing some hydraulic oil from inside the oil tank 24 into this gap through the oil outlet pipe 25 from the inlet end of the pump housing 21. As the active pump wheel 22 and the driven pump wheel 23 continue to rotate, the hydraulic oil is trapped between the teeth and is transported along the suction side of the pump housing 21 to the discharge side. When it reaches the discharge side, the hydraulic oil is forcibly pushed out because the teeth of the active pump wheel 22 and the driven pump wheel 23 gradually close, reducing the space trapped by the liquid. This allows the hydraulic oil to be pumped from the pump pipe 26 into the interior of the hydraulic bladder 29. The hydraulic bladder 29 extends, and because the drive roller 6 is located at the top of the guide rail 4, the extension of the hydraulic bladder 29 causes the lifting shell 5 to move upward.

[0043] · More specifically, during the extension of the hydraulic bladder 29, some hydraulic oil will flow back to the inside of the oil tank 24 through the return oil pipe 31 and the return oil valve 33. However, the return flow rate of the hydraulic oil is less than the output flow rate of the hydraulic oil, so that the hydraulic bladder 29 gradually extends when the lifting shell 5 moves. But when the hydraulic bladder 29 cannot extend, the hydraulic oil continuously entering the hydraulic bladder 29 will flow back to the inside of the oil tank 24 through the pressure relief pipe 32 and the pressure relief valve 34 to relieve pressure and reduce the internal pressure of the hydraulic bladder 29.

[0044] · At the same time, when the lifting shell 5 stops moving, the weight of the lifting shell 5 itself will compress the hydraulic bladder 29. At this time, the hydraulic oil inside the hydraulic bladder 29 flows back to the inside of the oil tank 24 through the return oil pipe 31 and the return oil valve 33, which causes the hydraulic bladder 29 to be compressed. The compression of the hydraulic bladder 29 causes the lifting shell 5 to move downward. At the same time, the sliding block 9 slides inside the sliding groove 8, which improves the stability of the lifting shell 5 moving downward.

[0045] Both sides of the suspended shell 5 are fixedly connected to the avoidance bridge 48.

[0046] With the above-mentioned structure, the crane 1 behind the crane 1 that has stopped moving can move normally. Specifically, when a crane 1 stops moving, the hoisting shell 5 is below the guide rail 4, and the moving hoisting shell 5 is above the guide rail 4. When the moving hoisting shell 5 moves forward, the drive roller 6 at the bottom of the moving hoisting shell 5 will continue to move forward through the top of the avoidance bridges 48 on both sides of the stopped hoisting shell 5, thereby avoiding obstacles and preventing the transportation line from being paralyzed.

[0047] It is worth mentioning that the raising and lowering of the hoisting shell 5 is purely mechanical, which minimizes the failure rate and ensures the stable operation of the enterprise.

[0048] The second lifting mechanism 3 also includes a lifting motor 35 fixedly installed on one side inside the suspended housing 5. There are two lifting motors 35. The output end of the lifting motor 35 is fixedly connected to a lifting shaft 36. A lifting rope 37 is fixedly connected to the outside of the lifting shaft 36. The lifting rope 37 is wrapped around the outside of the lifting shaft 36. Four lifting slots 38 are opened at the bottom of the inner wall of the suspended housing 5.

[0049] One end of each of the four lifting ropes 37 passes through a nearby lifting groove 38 and extends to the bottom of the suspended shell 5 and is fixedly connected to the top of the fixed plate 49. Four second rotating blocks 39 are fixedly connected to the bottom of the inner wall of the suspended shell 5. The interior of each of the four second rotating blocks 39 is rotatably connected to a second roller 40. The exterior of each of the four second rollers 40 abuts against the exterior of the nearby lifting ropes 37.

[0050] Four positioning plates 41 are fixedly connected to the bottom of the inner wall of the hoisting shell 5. A telescopic cylinder 42 is fixedly installed inside the positioning plate 41. A third rotating block 43 is fixedly installed at the extension end of the telescopic cylinder 42. A third roller 44 is rotatably connected inside the third rotating block 43. The outside of the third roller 44 abuts against the outside of the nearby lifting rope 37.

[0051] With the above-described structure, the wafer cassette can be picked up stably, reducing the wafer damage rate. Specifically, when the wafer cassette needs to be picked up, two lifting motors 35 are activated, and their output ends rotate in opposite directions. The output ends of the two lifting motors 35 drive the lifting shaft 36 to rotate, causing the output ends of the four lifting ropes 37 to move downwards and drive the fixing plate 49 to move downwards, so that the bottom of the fixing plate 49 is engaged and fixed with the top of the wafer cassette. After the fixing is completed, the two lifting motors 35 are activated in reverse to rewind the four lifting ropes 37 and drive the fixing plate 49 to move upwards, picking up the wafer cassette inside the lifting shell 5 and protecting it.

[0052] Furthermore, in the above scheme, an electronic control unit 45 is fixedly connected to the bottom of the inner wall of the suspended shell 5, a horizontal sensor 51 is fixedly installed on the top of the suspended shell 5, and an angle sensor is fixedly installed inside the fixed plate 49.

[0053] With the above-mentioned structure, the fixed plate 49 and the hanging shell 5 can be leveled in real time, so that the wafer inside the hanging shell 5 is always in a horizontal state, so that the stress is the same everywhere on the wafer, reducing wafer breakage. Specifically, when the level sensor 51 detects that the hanging shell 5 is in a tilted state, the tilt angle of the hanging shell 5 can be leveled by controlling the flow of the pressure relief valve 34. When the angle sensor inside the fixed plate 49 detects that the fixed plate 49 is in a tilted state, the four telescopic cylinders 42 can be controlled so that the extension end of the four telescopic cylinders 42 drives the third rotating block 43 to move. The movement of the third rotating block 43 drives the third roller 44 to move, causing the lifting rope 37 to bend, thereby leveling the fixed plate 49.

[0054] Two mounting rods 46 are fixedly connected to the top of the mounting base 12. Pressure sensors 47 are fixedly mounted on the top of each of the two mounting rods 46. The detection ends of the two pressure sensors 47 are adapted to the bottom of the adjacent avoidance bridge 48.

[0055] By setting the above structure, it can be ensured that the hoisting shell 5 descends to the bottom to avoid collision with the crane 1 that is about to pass. Specifically, the hoisting shell 5 moves downward, causing the two avoidance bridges 48 to move downward. When the hoisting shell 5 moves to the bottom, the bottom of the avoidance bridge 48 contacts the detection end of the pressure sensor 47. After the pressure sensor 47 detects the data value, it means that the hoisting shell 5 has descended to the bottom. At this time, the moving crane 1 can pass freely.

[0056] The working principle of this invention is as follows: When the wafer needs to be transported during factory operation, two drive motors 13 are started. The output ends of the two drive motors 13 rotate and drive the drive sprockets 14 fixedly connected to them to rotate. The rotation directions of the output ends of the two drive motors 13 are opposite. Since the two drive motors 13 are symmetrically arranged, the four drive rollers 6 rotate in the same direction. The rotation of the two drive sprockets 14 drives the corresponding drive chains 15 to rotate. The rotation of the two drive chains 15 drives the two transmission sprockets 11 on the same side to rotate. The rotation of the two transmission sprockets 11 drives the corresponding rotating rods 10 to rotate. The rotation of the four rotating rods 10 drives the corresponding drive rollers 6 to rotate and move on the top of the two guide rails 4. The rotation and movement of the four drive rollers 6 on the top of the two guide rails 4 drives the lifting shell 5 to move along the length of the guide rails 4 for wafer transportation.

[0057] Simultaneously, when the four drive rollers 6 rotate, they drive the transmission rod 19 inside the sliding block 9 to rotate. The rotation of the transmission rod 19 drives the active pump wheel 22 inside the pump housing 21 to rotate. The rotation of the active pump wheel 22 drives the driven pump wheel 23 meshing with the active pump wheel 22 to rotate. At this time, a partial vacuum will be formed in the tooth gap, and some hydraulic oil inside the oil tank 24 will be sucked into this gap through the oil outlet pipe 25 from the liquid inlet end of the pump housing 21. As the active pump wheel 22 and the driven pump wheel 23 continue to rotate, the hydraulic oil is trapped between the teeth and is transported to the discharge side along the suction side of the pump housing 21. When it reaches the discharge side, the hydraulic oil is forced out because the teeth of the active pump wheel 22 and the driven pump wheel 23 gradually close, reducing the space trapped by the liquid, so that the hydraulic oil is pumped into the interior of the hydraulic bladder 29 from the pump oil pipe 26. The hydraulic bladder 29 extends. Since the drive roller 6 is located at the top of the guide rail 4, the extension of the hydraulic bladder 29 causes the lifting shell 5 to move upward.

[0058] At the same time, when the lifting shell 5 stops moving, the weight of the lifting shell 5 itself will compress the hydraulic bladder 29. At this time, the hydraulic oil inside the hydraulic bladder 29 flows back to the inside of the oil tank 24 through the return oil pipe 31 and the return oil valve 33, which causes the hydraulic bladder 29 to be compressed. The compression of the hydraulic bladder 29 causes the lifting shell 5 to move downward. At the same time, the sliding block 9 slides inside the sliding groove 8, which improves the stability of the lifting shell 5 moving downward.

[0059] When a crane 1 stops moving, the hoisting shell 5 is below the guide rail 4 and the moving hoisting shell 5 is above the guide rail 4. When the moving hoisting shell 5 moves forward, the drive roller 6 at the bottom of the moving hoisting shell 5 will continue to move forward through the top of the avoidance bridge 48 on both sides of the stopped hoisting shell 5, thereby avoiding obstacles and preventing the transportation line from being paralyzed.

[0060] When it is necessary to pick up the wafer box, the two lifting motors 35 are activated. The output ends of the two lifting motors 35 rotate in opposite directions, driving the lifting shaft 36 to rotate. This causes the output ends of the four lifting ropes 37 to move downwards, and also causes the fixing plate 49 to move downwards, so that the bottom of the fixing plate 49 is engaged and fixed with the top of the wafer box. After the fixing is completed, the two lifting motors 35 are activated in reverse to cause the four lifting ropes 37 to wind up and drive the fixing plate 49 to move upwards, picking up the wafer box inside the lifting shell 5 and protecting it.

[0061] When the horizontal sensor 51 detects that the hoisting shell 5 is tilted, the tilt angle of the hoisting shell 5 can be leveled by controlling the flow rate of the pressure relief valve 34. When the angle sensor inside the fixed plate 49 detects that the fixed plate 49 is tilted, the four telescopic cylinders 42 can be controlled to move the third rotating block 43. The movement of the third rotating block 43 moves the third roller 44 to bend the lifting rope 37, thereby leveling the fixed plate 49.

[0062] The downward movement of the hoisting shell 5 causes the two clearance bridges 48 to move downward. When the hoisting shell 5 moves to the bottom, the bottom of the clearance bridge 48 contacts the detection end of the pressure sensor 47. After the pressure sensor 47 detects the data value, it means that the hoisting shell 5 has descended to the bottom. At this time, other moving cranes 1 can pass freely.

[0063] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An automated wafer transport vehicle, characterized in that: include, Crane (1), the crane (1) is used to transport wafers, the crane (1) includes two guide rails (4) fixed in mid-air, a lifting shell (5) is slidably inside the two guide rails (4), a second lifting mechanism (3) is provided inside the lifting shell (5), the second lifting mechanism (3) includes a fixing plate (49) slidably connected to the bottom of the lifting shell (5), and a wafer box is fixedly attached to the bottom of the fixing plate (49); The drive mechanism (2) is used to drive the hoisting shell (5) to move along the length of the guide rail (4). The drive mechanism (2) is provided with two sets of two drives respectively set on both sides of the hoisting shell (5). The drive mechanism (2) includes two drive rollers (6) rolling on one side of the hoisting shell (5). The drive rollers (6) rotate rubbing against the top of the corresponding guide rail (4). The drive rollers (6) are fixedly connected to the side of the hoisting shell (5) with a transmission rod (19). Two sliding grooves (8) are opened on both sides of the hoisting shell (5). Sliding blocks (9) are slidably connected inside the sliding grooves (8). The transmission rod (19) is rotatably connected inside the corresponding sliding block (9) and extends to the other side of the sliding block (9). The first lifting mechanism (50) is used to drive the hoisting shell (5) to rise or fall, so that the movement of the crane (1) behind is not affected when the crane (1) in front is working, thereby improving work efficiency and reducing the difficulty of route planning. The first lifting mechanism (50) is provided in two sets, and the two sets of the first lifting mechanism (50) are arranged symmetrically. The first lifting mechanism (50) includes a fixed rod (20) fixedly connected to the opposite side of the two sliding blocks (9). The left side of the fixed rod (20) A pump housing (21) is fixedly connected to the side. A driven pump wheel (23) and a driven pump wheel (22) are rotatably connected inside the pump housing (21). The driven pump wheel (23) meshes with the driven pump wheel (22). A transmission rod (19) is rotatably connected inside the pump housing (21). The driven pump wheel (22) is fixedly sleeved on the outside of the transmission rod (19). An oil tank (24) is fixedly installed at the bottom of the inner wall of the lifting shell (5). The oil tank (24) is filled with hydraulic oil. Oil outlet pipes are connected to both sides of the oil tank (24). 25), the output end of the oil outlet pipe (25) is connected to the input end of the corresponding pump housing (21), the two transmission rods (19) are rotatably connected to the same sliding plate (27) on opposite sides, four limiting brackets (28) are fixedly connected inside the lifting housing (5), hydraulic bladders (29) are fixedly installed on the top of the inner wall of each of the four limiting brackets (28), the bottom of each of the four hydraulic bladders (29) is fixedly connected to the top of the sliding plate (27), and a connecting pipe (3) is connected to the opposite sides of each pair of hydraulic bladders (29). 0), the output end of the pump housing (21) is connected to the pump oil pipe (26), the output end of the pump oil pipe (26) is connected to one side of the corresponding hydraulic bladder (29), the opposite sides of the two intermediate limit frames (28) are connected to the return oil pipe (31) and the pressure relief pipe (32), the output ends of the return oil pipe (31) and the pressure relief pipe (32) are connected to the oil tank (24), the return oil pipe (31) is fixedly installed with the return oil valve (33), and the pressure relief pipe (32) is fixedly installed with the pressure relief valve (34).

2. The automated wafer transport vehicle according to claim 1, characterized in that: The drive mechanism (2) also includes a protective shell (7) slidably connected to the top of the guide rail (4). The protective shell (7) has two rotating rods (10) rotatably connected inside. One side of the two drive rollers (6) inside the two sets of drive mechanisms (2) is fixedly connected to one side of the corresponding rotating rod (10). The rotating rod (10) is fixedly sleeved with a transmission sprocket (11). One side of the protective shell (7) is fixedly connected with a mounting base (12). The top of the mounting base (12) is fixedly installed with a drive motor (13). The output end of the drive motor (13) is fixedly connected with a drive sprocket (14). The two transmission sprockets (11) inside the same set of drive mechanisms (2) and the drive sprockets (14) are rotatably sleeved with the same drive chain (15). Both sides of the hanging shell (5) are fixedly connected with a clearance bridge (48).

3. The automated wafer transport vehicle according to claim 2, characterized in that: The bottom of the mounting base (12) is fixedly connected to a telescopic rod (16). There are four telescopic rods (16) arranged symmetrically in pairs. The extension end of the telescopic rod (16) is fixedly connected to a first rotating block (17). The opposite side of the two first rotating blocks (17) is rotatably connected to the same first roller (18). The external friction of the first roller (18) rotates on the top of the corresponding guide rail (4).

4. The automated wafer transport vehicle according to claim 1, characterized in that: The second lifting mechanism (3) also includes a lifting motor (35) fixedly installed on one side inside the hoisting shell (5). There are two lifting motors (35). The output end of the lifting motor (35) is fixedly connected to a lifting shaft (36). A lifting rope (37) is fixedly connected to the outside of the lifting shaft (36). The lifting rope (37) is wrapped around the outside of the lifting shaft (36). Four lifting slots (38) are opened at the bottom of the inner wall of the hoisting shell (5).

5. The automated wafer transport vehicle according to claim 4, characterized in that: One end of each of the four lifting ropes (37) passes through the corresponding lifting groove (38) and extends to the bottom of the hoisting shell (5) and is fixedly connected to the top of the fixed plate (49). Four second rotating blocks (39) are fixedly connected to the bottom of the inner wall of the hoisting shell (5). The interior of each of the four second rotating blocks (39) is rotatably connected to a second roller (40). The exterior of each of the four second rollers (40) abuts against the exterior of the corresponding lifting rope (37).

6. The automated wafer transport vehicle according to claim 5, characterized in that: Four positioning plates (41) are fixedly connected to the bottom of the inner wall of the hoisting shell (5). A telescopic cylinder (42) is fixedly installed inside the positioning plate (41). A third rotating block (43) is fixedly installed at the extension end of the telescopic cylinder (42). A third roller (44) is rotatably connected inside the third rotating block (43). The outside of the third roller (44) is in contact with the outside of the corresponding lifting rope (37).

7. The automated wafer transport vehicle according to claim 6, characterized in that: An electrical control unit (45) is fixedly connected to the bottom of the inner wall of the hoisting shell (5), a horizontal sensor (51) is fixedly installed on the top of the hoisting shell (5), and an angle sensor is fixedly installed inside the fixing plate (49).

8. The automated wafer transport vehicle according to claim 2, characterized in that: The top of the mounting base (12) is fixedly connected to two mounting rods (46), and pressure sensors (47) are fixedly installed on the top of the two mounting rods (46). The detection ends of the two pressure sensors (47) are adapted to the bottom of the corresponding avoidance bridge (48).

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