A furnace tube

Abstract

This invention discloses a furnace tube with a reaction chamber for placing a carrier inside. The furnace tube has multiple air inlets at its top or bottom communicating with the reaction chamber. An air inlet device is connected to the end of each air inlet away from the reaction chamber. A flow equalization device is connected to the other end of each air inlet located in the reaction chamber. The flow equalization device includes an annular spray air inlet pipe and / or a spray air inlet pipe, with spray nozzles on the side of the annular spray air inlet pipe and / or the spray air inlet pipe facing the carrier. This invention delivers process gas to the air inlet via the air inlet device, and then sprays it onto the carrier through the annular spray air inlet pipe and / or the spray air inlet pipe's spray nozzles, thereby uniformly diffusing it throughout the entire reaction chamber. This improves the contact efficiency between the solar cells and the process gas, allowing for a more complete reaction and ensuring the uniformity of the coating on the solar cells placed in the reaction chamber.

Description

Technical Field

[0001] This invention relates to the field of metallurgical technology, and more particularly to a furnace tube. Background Technology

[0002] In the field of photovoltaic manufacturing technology, most of the main process equipment is horizontal, such as diffusion, annealing, PECVD (Plasma Enhanced Chemical Vapor Deposition) and LPCVD (Low Pressure Chemical Vapor Deposition). The temperature field and gas field cross-crossing phenomenon is more obvious in conventional horizontal coating equipment, and there is a significant difference in temperature field between the top and bottom of the reaction chamber inside the furnace tube.

[0003] To address the aforementioned issues, existing manufacturers have installed vertical coating equipment. The process gas enters the reaction chamber inside the vertical furnace tube, expands due to heat, and accumulates at the top of the reaction chamber. After the process reaction is completed, the gas is discharged. Furthermore, it is necessary to ensure that the reaction chamber can receive gas evenly during the process reaction to guarantee the uniformity of the coating on the solar cells within the reaction chamber.

[0004] Therefore, in order to ensure that the vertical coating equipment can have uniform air intake, and thus ensure the uniformity of the coating on the battery cells, different manufacturers have proposed different design schemes. Moreover, the design concepts of the different design schemes are different, and the effects produced are also different. Summary of the Invention

[0005] In view of this, the present invention provides a furnace tube to solve the problem that the furnace tube in the prior art cannot guarantee uniform air intake in the reaction chamber and cannot guarantee the uniformity of the battery cell coating in the reaction chamber.

[0006] The technical solution of the present invention is a furnace tube, which has a reaction chamber for placing a carrier inside. The top or bottom of the furnace tube is provided with a plurality of air inlets communicating with the reaction chamber. An air inlet device is connected to the end of the air inlet away from the reaction chamber.

[0007] The air inlet is located at the other end of the reaction chamber and is connected to a flow equalization device. The flow equalization device includes an annular spray air inlet pipe and / or a spray air inlet pipe, and the annular spray air inlet pipe and / or the spray air inlet pipe has a spray port on the side facing the carrier.

[0008] The annular spray inlet pipe and / or the spray inlet pipe are both used to uniformly diffuse the process gas into the reaction chamber.

[0009] Furthermore, the furnace tube is provided with an outer ring area and an inner ring area at the top or bottom, and the outer ring area and / or the inner ring area are provided with multiple air inlets evenly distributed in the circumferential direction.

[0010] Furthermore, the flow equalization device includes an annular spray air inlet pipe, a flow equalization layer, and a spray air inlet pipe;

[0011] The air inlets located in the inner ring region or the outer ring region are connected to the annular spray air inlet pipe. The annular spray air inlet pipe is located between the air inlet and the vehicle. At least one flow equalization layer is also matched between the annular spray air inlet pipe and the vehicle. The flow equalization layer is provided with multiple through holes penetrating the flow equalization layer. The annular spray air inlet pipe is provided with multiple first spray ports on the side facing the flow equalization layer.

[0012] An air inlet located in the outer ring area or the inner ring area is connected to a spray air inlet pipe. The spray air inlet pipe is vertically installed in the reaction chamber, and multiple second spray ports are provided on the side of the spray air inlet pipe facing the vehicle.

[0013] Furthermore, the flow equalization device includes an annular spray air inlet pipe, which is located on the side of the carrier facing the air inlet.

[0014] The air inlets located in the outer ring area and / or the inner ring area are connected to the annular spray air inlet pipe, and the annular spray air inlet pipe has a plurality of first spray ports on the side facing the vehicle.

[0015] Furthermore, the flow equalization device also includes a flow equalization layer that matches the annular spray air inlet pipe;

[0016] At least one flow equalization layer is provided between the annular spray inlet pipe and the carrier, and the flow equalization layer is provided with multiple through holes penetrating the flow equalization layer; the flow equalization layer is used to uniformly distribute the process gas on the cross section of the reaction chamber.

[0017] Furthermore, the flow equalization device includes a spray air inlet pipe; the spray air inlet pipe is vertically arranged inside the reaction chamber;

[0018] Each of the air inlets is connected to a spray air inlet pipe, and the spray air inlet pipe has multiple second spray nozzles on the side facing the vehicle.

[0019] Furthermore, the air intake device includes an air intake pipe, a regulating needle valve, a pneumatic valve, a flow meter, and a shut-off valve;

[0020] Each of the air inlets is connected to an air inlet pipe, and each air inlet pipe is provided with an adjusting needle valve, a pneumatic valve, a flow meter and a shut-off valve in sequence along its extension direction.

[0021] Furthermore, the air intake device includes an air intake pipe, a regulating needle valve, a pneumatic valve, a flow meter, and a shut-off valve;

[0022] Each of the air inlets is connected to an air inlet pipe, and each of the air inlet pipes is equipped with an adjusting needle valve;

[0023] At least two of the air inlet pipes are connected to the pneumatic valve, and the pneumatic valve is also connected to the flow meter and the shut-off valve in sequence through the air inlet pipes.

[0024] Furthermore, the bottom of the furnace tube is provided with a plurality of exhaust ports communicating with the reaction chamber, and one end of the exhaust port extending out of the bottom of the furnace tube is connected to an exhaust device; the exhaust device includes an exhaust pipe, a flow rate detection device, a cooling device, a regulating valve, a filtering device, a control valve and a vacuum pump;

[0025] Each of the exhaust ports is connected to an exhaust pipe, and each of the exhaust pipes is sequentially provided with a flow rate detection device, a cooling device, a regulating valve and a filter device along its extension direction.

[0026] At least one of the filter devices is connected to the control valve via the exhaust pipe, and the control valve is also connected to the vacuum pump via the exhaust pipe.

[0027] Furthermore, the bottom circumferential sidewall of the furnace tube is provided with a plurality of exhaust ports communicating with the reaction chamber, and one end of the exhaust port extending out of the bottom of the furnace tube is connected to an exhaust device; the exhaust device includes an exhaust pipe, a flow rate detection device, a cooling device, a regulating valve, a filtering device, a control valve and a vacuum pump;

[0028] Each of the exhaust ports is connected to an exhaust pipe, and each of the exhaust pipes is sequentially provided with a flow rate detection device, a cooling device, a regulating valve and a filter device along its extension direction.

[0029] At least one of the filter devices is connected to the control valve via the exhaust pipe, and the control valve is also connected to the vacuum pump via the exhaust pipe.

[0030] Compared with the prior art, the present invention has at least the following beneficial effects:

[0031] The present invention delivers process gas to the inlet through an air intake device, and then sprays it onto the carrier through an annular spray inlet pipe and / or the spray nozzle of the spray inlet pipe, thereby uniformly diffusing it into the entire reaction chamber, so as to improve the contact efficiency between the battery cell and the process gas, making the reaction between the two more complete, and ensuring the uniformity of the coating of the battery cell placed in the reaction chamber. Attached Figure Description

[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains; the terminology used herein in the specification is for the purpose of describing particular embodiments only and is not intended to limit the invention; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and foregoing drawings are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or foregoing drawings are used to distinguish different objects and not to describe a particular order.

[0033] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0034] Figure 1 This is a first cross-sectional view of the furnace tube of the present invention;

[0035] Figure 2 for Figure 1 An enlarged view of reference numeral A in the attached diagram;

[0036] Figure 3 for Figure 1 An enlarged view of reference numeral B in the attached diagram;

[0037] Figure 4 This is a schematic diagram of the first structure of the air intake device of the present invention;

[0038] Figure 5 This is a schematic diagram of a second structure of the air intake device of the present invention;

[0039] Figure 6 This is a second cross-sectional view of the furnace tube of the present invention;

[0040] Figure 7 This is a third cross-sectional view of the furnace tube of the present invention;

[0041] Figure 8 This is a schematic diagram of the first structure of the exhaust device of the present invention;

[0042] Figure 9 This is a schematic diagram of a second structure of the exhaust device of the present invention;

[0043] Figure 10 This is a partial structural diagram of the furnace tube of the present invention.

[0044] Figure label:

[0045] 10. Reaction chamber; 101. Limiting collar;

[0046] 20. Vehicles;

[0047] 30. Air intake;

[0048] 40. Air intake device; 401. Air intake pipe; 402. Adjusting needle valve; 403. Pneumatic valve; 404. Flow meter; 405. Shut-off valve;

[0049] 50. Flow equalization device; 501. Annular spray air inlet pipe; 5011. First spray nozzle; 502. Flow equalization layer; 5021. Through hole; 503. Spray air inlet pipe; 5031. Second spray nozzle;

[0050] 60. Outer Ring Road Area;

[0051] 70. Inner Ring Road Area;

[0052] 80. Exhaust port;

[0053] 90. Exhaust device; 901. Exhaust pipe; 902. Flow rate detection device; 903. Cooling device; 904. Regulating valve; 905. Filtering device; 906. Control valve; 907. Vacuum pump; 9071. Air outlet;

[0054] 100. Internal thermocouple;

[0055] 110. Sealing plug. Detailed Implementation

[0056] To make the technical problems, technical solutions, and beneficial effects of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. Therefore, a feature pointed out in this specification is used to illustrate one feature of one embodiment of the invention, and does not imply that every embodiment of the invention must have the described feature. Furthermore, it should be noted that this specification describes many features. Although certain features may be combined to illustrate possible system designs, these features may also be used in other combinations not explicitly stated. Therefore, unless otherwise stated, the described combinations are not intended to be limiting.

[0057] The principles and structure of the present invention will be described in detail below with reference to the accompanying drawings and embodiments.

[0058] In one embodiment, to ensure uniform air intake in the reaction chamber 10, and thus ensure the uniformity of the coating on the battery cells placed in the reaction chamber 10, refer to the attached diagram. Figure 1 and attached Figure 4-5The present invention proposes a furnace tube, which has a reaction chamber 10 for placing a carrier 20 inside. The top or bottom of the furnace tube is provided with a plurality of air inlets 30 communicating with the reaction chamber 10. An air inlet device 40 is connected to one end of the air inlet 30 away from the reaction chamber 10.

[0059] The air inlet 30 is located at the other end of the reaction chamber 10 and is connected to a flow equalization device 50. The flow equalization device 50 includes an annular spray air inlet pipe 501 and / or a spray air inlet pipe 503, and the annular spray air inlet pipe 501 and / or the spray air inlet pipe 503 are provided with spray ports on the side facing the carrier 20.

[0060] The annular spray inlet pipe 501 and / or the spray inlet pipe 503 are both used to uniformly diffuse the process gas flowing into the inlet 30 into the reaction chamber 10.

[0061] In this embodiment, the furnace tube is a component of the vertical coating equipment, and the carrier 20 is used to place the solar cells (also known as silicon wafers). This embodiment is illustrated by having multiple air inlets 30 at the top of the furnace tube that communicate with the reaction chamber 10.

[0062] It should be noted that the furnace tube also includes a control unit (not shown, the same throughout), which is electrically connected to the air intake device 40. Furthermore, the furnace tube is a component of the vertical coating equipment; therefore, the furnace tube in this embodiment is illustrated as a vertical structure.

[0063] In this way, the process gas enters the inlet 30 through the inlet device 40, and then is sprayed onto the carrier 20 through the spray nozzle of the annular spray inlet pipe 501 and / or the spray inlet pipe 503, thereby uniformly diffusing into the entire reaction chamber 10 to improve the contact efficiency between the battery cell and the process gas, so that the reaction between the two is more complete, and to ensure the uniformity of the coating of the battery cell placed in the reaction chamber 10.

[0064] Among them, refer to the appendix Figure 4 The furnace tube is provided with an outer ring region 60 and an inner ring region 70 at the top or bottom. The outer ring region 60 and / or the inner ring region 70 are provided with multiple air inlets 30 evenly in the circumference, thereby increasing the total amount of process gas entering the reaction chamber 10 through the air inlets 30 at the same time.

[0065] Therefore, the top or bottom of the furnace tubes can be arranged in the following ways:

[0066] Firstly, the top or bottom of the furnace tube is provided with multiple air inlets 30 evenly distributed around the outer ring area 60.

[0067] Secondly, the top or bottom of the furnace tube is provided with multiple air inlets 30 evenly distributed around the inner ring area 70.

[0068] Thirdly, the top or bottom of the furnace tube is provided with multiple air inlets 30 evenly distributed circumferentially in both the outer ring region 60 and the inner ring region 70.

[0069] In this embodiment, the top of the furnace tube is provided with an outer ring region 60 and an inner ring region 70, and both the outer ring region 60 and the inner ring region 70 are provided with four air inlets 30 evenly in the circumference.

[0070] Specifically, refer to the appendix Figure 4 The air intake device 40 includes an air intake pipe 401, an adjusting needle valve 402, a pneumatic valve 403, a flow meter 404, and a shut-off valve 405; the control unit is electrically connected to the adjusting needle valve 402, the pneumatic valve 403, the flow meter 404, and the shut-off valve 405 respectively.

[0071] Each of the air inlets 30 is connected to an air inlet pipe 401, and each air inlet pipe 401 is provided with an adjusting needle valve 402, a pneumatic valve 403, a flow meter 404 and a shut-off valve 405 in sequence along its extension direction.

[0072] In this way, each air inlet 30 is equipped with an air intake device 40, so that if one air intake device 40 fails, another air intake device 40 can still supply process gas to the air inlet 30 to ensure the uniformity of the coating of the battery cells placed in the reaction chamber 10.

[0073] Of course, in other embodiments, to save costs, refer to the appendix. Figure 5 The air intake device 40 includes an air intake pipe 401, an adjusting needle valve 402, a pneumatic valve 403, a flow meter 404, and a shut-off valve 405; the control unit is electrically connected to the adjusting needle valve 402, the pneumatic valve 403, the flow meter 404, and the shut-off valve 405 respectively.

[0074] Each of the air inlets 30 is connected to an air inlet pipe 401, and each of the air inlet pipes 401 is provided with an adjusting needle valve 402;

[0075] All of the aforementioned air inlet pipes 401 are connected to the pneumatic valve 403, and the pneumatic valve 403 is also connected to the flow meter 404 and the shut-off valve 405 in sequence through the air inlet pipes 401.

[0076] Of course, both intake pipes 401 can be connected to the pneumatic valve 403, or all three intake pipes 401 can be connected to the pneumatic valve 403; this is not limited here.

[0077] It should be noted that the regulating needle valve 402 is used to receive control signals from the control unit to finely regulate the flow rate of the process gas flowing into the inlet 30, and can achieve continuous regulation from a small flow rate to a fully open state; the pneumatic valve 403 is a device that uses compressed air as a power source to control the valve opening and closing, and is used to receive control signals from the control unit to achieve rapid cut-off or opening of the process gas; the flow meter 404 is used to measure the gas flow rate through the inlet pipe 401 and upload the measurement data to the control unit; the shut-off valve 405 is used to receive control signals from the control unit to completely close or open the gas flow in the inlet pipe 401, and is generally not used to regulate the gas flow rate.

[0078] Among them, refer to the appendix Figure 1-3 The flow equalization device 50 includes an annular spray air inlet pipe 501, a flow equalization layer 502, and a spray air inlet pipe 503.

[0079] The air inlets 30 located in the inner ring region 70 or the outer ring region 60 are all connected to the annular spray air inlet pipe 501. The annular spray air inlet pipe 501 is located between the air inlet 30 and the carrier 20. At least one flow equalization layer 502 is also matched between the annular spray air inlet pipe 501 and the carrier 20. The flow equalization layer 502 is provided with a plurality of through holes 5021 penetrating the flow equalization layer 502. The annular spray air inlet pipe 501 is provided with a plurality of first spray ports 5011 on the side facing the flow equalization layer 502.

[0080] The air inlet 30 located in the outer ring region 60 or the inner ring region 70 is respectively connected to a spray air inlet pipe 503. The spray air inlet pipe 503 is vertically arranged in the reaction chamber 10. The spray air inlet pipe 503 has a plurality of second spray ports 5031 on the side facing the carrier 20.

[0081] It should be noted that this embodiment illustrates the example where the air inlets 30 in the inner ring region 70 are all connected to the annular spray air inlet pipe 501, and the air inlets 30 in the outer ring region 60 are each connected to a spray air inlet pipe 503. Of course, depending on the actual situation, the air inlets 30 in the inner ring region 70 can be connected to a spray air inlet pipe 503, and the air inlets 30 in the outer ring region 60 can all be connected to the annular spray air inlet pipe 501; this is not limited here.

[0082] Furthermore, the annular spray inlet pipe 501 is arranged around the central axis of the reaction chamber 10. The process gas can be annularly sprayed onto the carrier 20 through the first spray port 5011, covering the entire surface of the carrier 20, thereby ensuring the uniformity of the process gas contact with the solar cells and thus ensuring the uniformity of the solar cell coating. The flow equalization layer 502 is also arranged around the central axis of the reaction chamber 10 and is positioned directly opposite the annular spray inlet pipe 501. The process gas annularly sprayed from the first spray port 5011 first passes through the flow equalization layer 502, and then further covers the entire surface of the carrier 20 through the through hole 5021, further ensuring the uniformity of the solar cell coating. The vertically arranged spray inlet pipe 503 can achieve uniform distribution of the process gas along the longitudinal direction of the reaction chamber 10 through the second spray port 5031, ensuring that all solar cells on the carrier 20 can contact the process gas under the same conditions, thereby ensuring the uniformity of the solar cell coating.

[0083] In this way, when the gas inlet device 40 delivers the process gas to the gas inlet 30, a portion of the process gas is sprayed onto the uniform flow layer 502 through the first spray port 5011 of the annular spray inlet pipe 501. Then, the uniform flow layer 502 distributes the process gas evenly across the entire cross-section of the reaction chamber 10 through its through-hole 5021. Another portion of the process gas is sprayed longitudinally and evenly onto the carrier 20 through the second spray port 5031 of the vertically arranged spray inlet pipe 503. This uniform distribution of the process gas can avoid local over-concentration or over-leaning, thereby ensuring the consistency of the reaction or heating process. It also helps to maintain the temperature uniformity within the reaction chamber 10, preventing local overheating or overcooling. Furthermore, it can improve the contact efficiency between reactants, making the reaction more complete, thereby improving the yield and selectivity.

[0084] In other embodiments, refer to the appendix Figure 6 The flow equalization device 50 includes only an annular spray air inlet pipe 501 arranged around the central axis of the reaction chamber 10, and the annular spray air inlet pipe 501 is located on the side of the carrier 20 facing the air inlet 30.

[0085] The air inlets 30 located in the outer ring region 60 and / or the inner ring region 70 are connected to the annular spray air inlet pipe 501. The annular spray air inlet pipe 501 is provided with a plurality of first spray nozzles 5011 on the side facing the vehicle 20.

[0086] In this way, after the air intake device 40 delivers the process gas to the air intake port 30, the process gas will be sprayed annularly onto the carrier 20 through the first spray port 5011 of the annular spray air intake pipe 501, and cover the entire surface of the carrier 20, thereby ensuring the uniformity of the contact between the process gas and the battery cell, and thus ensuring the uniformity of the battery cell coating.

[0087] And at this time, there are several possible arrangements:

[0088] Firstly, the air inlets 30 located in the outer ring region 60 and the inner ring region 70 are respectively connected to an annular spray air inlet pipe 501. At this time, the control unit can control the cut-off or closing of the air intake device 40, supplying process gas only to the air inlet 30 located in the outer ring region 60, that is, only the annular spray air inlet pipe 501 connected to the air inlet 30 located in the outer ring region 60 sprays process gas; of course, the control unit can also control the air intake device 40 to supply process gas only to the air inlet 30 located in the inner ring region 70, that is, only the annular spray air inlet pipe 501 connected to the air inlet 30 located in the inner ring region 70 sprays process gas.

[0089] Secondly, the air inlets 30 located in the outer ring area 60 and the inner ring area 70 are both connected to the same annular spray air inlet pipe 501.

[0090] Third, only the air inlets 30 located in the inner ring area 70 are connected to the same annular spray air inlet pipe 501, while the air inlets 30 located in the outer ring area 60 are not connected to the annular spray air inlet pipe 501.

[0091] Fourth, only the air inlets 30 located in the outer ring area 60 are connected to the same annular spray air inlet pipe 501, while the air inlets 30 located in the inner ring area 70 are not connected to the annular spray air inlet pipe 501.

[0092] To further ensure the uniformity of contact between the process gas and the solar cell, and thus guarantee the uniformity of the solar cell coating, refer to the attached... Figure 6 The flow equalization device 50 also includes a flow equalization layer 502 that matches the annular spray inlet pipe 501. That is, the flow equalization layer 502 is arranged opposite to the annular spray inlet pipe 501, and the process gas injected annularly from the first spray port 5011 will first pass through the flow equalization layer 502.

[0093] At least one flow equalization layer 502 is provided between the annular spray air inlet pipe 501 and the carrier 20. Each flow equalization layer 502 is provided with multiple through holes 5021 penetrating the flow equalization layer 502. The flow equalization layer 502 is used to uniformly distribute the process gas on the cross section of the reaction chamber 10.

[0094] It should be noted that the uniform flow layer 502 in this embodiment is described with a distance between two layers.

[0095] In this way, the uniform flow layer 502 will further distribute the process gas evenly on the reaction chamber 10 through the through hole 5021, that is, cover the entire surface of the carrier 20, and further ensure the uniformity of the cell coating.

[0096] In other embodiments, refer to the appendix Figure 7The flow equalization device 50 includes a spray air inlet pipe 503; the spray air inlet pipe 503 is vertically arranged inside the reaction chamber 10.

[0097] Each of the air inlets 30 is connected to a spray air inlet pipe 503, and the spray air inlet pipe 503 is provided with a plurality of second spray nozzles 5031 on the side facing the vehicle 20.

[0098] In this way, the spray inlet pipe 503 can achieve uniform distribution of process gas along the longitudinal direction of the reaction chamber 10 through the second spray port 5031, ensuring that all battery cells on the carrier 20 can come into contact with process gas under the same conditions, thereby ensuring the uniformity of battery cell coating.

[0099] It should be noted that a limiting collar 101 is provided at the bottom of each spray air inlet pipe 503 in the reaction chamber 10. The bottom of the spray air inlet pipe 503 can be fitted into the limiting collar 101 to prevent the spray air inlet pipe 503 from swinging, which would affect the uniform spraying of the spray air inlet pipe 503 and thus affect the uniformity of the solar cell coating. The limiting collar 101 is made of high temperature resistant material.

[0100] The vehicle 20 is located between the spray air inlet pipe 503 connected to the air inlet 30 in the outer ring area 60 and the spray air inlet pipe 503 connected to the air inlet 30 in the inner ring area 70.

[0101] Among them, refer to the appendix Figure 4-7 Each air inlet 30 in the reaction chamber 10 is vertically equipped with an internal thermocouple 100, or an internal thermocouple 100 is vertically installed between two adjacent air inlets 30. The internal thermocouple 100 is a temperature measuring device. It consists of two different metal wires welded together to form a thermocouple junction. When this junction is heated, due to the different thermoelectric properties of the two metals, a small voltage difference, i.e., thermoelectric potential, will be generated at both ends. This voltage difference is proportional to the temperature, so it can be used to measure the temperature and upload the measured temperature data to the control unit. The control unit can then control the flow rate of the process gas delivered by the air inlet device 40 in real time according to the temperature.

[0102] It should be noted that both the spray air inlet pipe 503 and the internal thermocouple 100 are vertically installed in the reaction chamber 10. Therefore, their arrangement must avoid the carrier 20 and can extend to the bottom of the reaction chamber 10.

[0103] During the coating process of the battery cells in the reaction chamber 10, in order to ensure smooth coating, maintain appropriate reaction conditions, and ensure safety, not only is continuous and uniform air intake necessary, but also exhaust is required to maintain a suitable pressure environment within the reaction chamber 10. Exhausting also prevents gas accumulation, ensuring heat transfer efficiency and reaction uniformity; furthermore, exhausting removes harmful gases, preventing damage to the equipment, reducing safety hazards, and protecting the health of operators. Therefore, refer to the appendix... Figure 8 The bottom of each furnace tube is provided with multiple exhaust ports 80 that communicate with the reaction chamber 10, and one end of each exhaust port 80 extending out of the bottom of the furnace tube is connected to an exhaust device 90.

[0104] The exhaust device 90 includes an exhaust pipe 901, a flow rate detection device 902, a cooling device 903, a regulating valve 904, a filter device 905, a control valve 906, and a vacuum pump 907, which together ensure the efficiency, safety, and environmental friendliness of the exhaust process. The flow rate detection device 902, cooling device 903, regulating valve 904, filter device 905, control valve 906, and vacuum pump 907 are all electrically connected to the control unit.

[0105] Each of the exhaust ports 80 is connected to an exhaust pipe 901. Each exhaust pipe 901 is provided with a flow rate detection device 902, a cooling device 903, a regulating valve 904 and a filter device 905 in sequence along its extension direction. The flow rate detection device 902 can be installed on the cooling device 903 to detect the flow rate of the gas after it has been cooled by the cooling device 903.

[0106] All the filter devices 905 are connected to the control valve 906 through the exhaust pipe 901. The control valve 906 is also connected to the vacuum pump 907 through the exhaust pipe 901. The vacuum pump 907 is also provided with an air outlet 9071. The vacuum pump 907 discharges the extracted gas to the outside or into the collection tank through the air outlet 9071.

[0107] It should be noted that this embodiment uses the example of setting four exhaust ports 80.

[0108] In other embodiments, since the furnace tube is a component of the vertical coating equipment, it is also a vertical structure. To save vertical space of the furnace tube, i.e., not occupying vertical space, refer to the attached drawing. Figure 9 The bottom of the sidewall of the furnace tube is provided with an exhaust port 80 that communicates with the reaction chamber 10. The end of the exhaust port 80 extending out of the bottom of the furnace tube is connected to an exhaust device 90. The exhaust device 90 includes an exhaust pipe 901, a flow rate detection device 902, a cooling device 903, a regulating valve 904, a filter device 905, a control valve 906, and a vacuum pump 907.

[0109] Each of the exhaust ports 80 is connected to an exhaust pipe 901. Each exhaust pipe 901 is provided with a flow rate detection device 902, a cooling device 903, a regulating valve 904 and a filter device 905 in sequence along its extension direction. The flow rate detection device 902 can be installed on the cooling device 903 to detect the flow rate of the gas after it has been cooled by the cooling device 903.

[0110] At least one of the filter devices 905 is connected to the control valve 906 through the exhaust pipe 901, and the control valve 906 is also connected to the vacuum pump 907 through the exhaust pipe 901; and the vacuum pump 907 is also provided with an air outlet 9071, through which the vacuum pump 907 discharges the extracted gas to the outside or into the collection tank.

[0111] In other embodiments (not shown in the figures), each filter device 905 is connected to a vacuum pump 907 via an exhaust pipe 901, and a control valve 906 is provided on the exhaust pipe 901 between each vacuum pump 907 and the filter device 905. This ensures that if one vacuum pump 907 malfunctions and stops operating, other vacuum pumps 907 continue to operate, ensuring that the gas in the reaction chamber 10 is exhausted, maintaining a suitable pressure environment within the reaction chamber 10; preventing gas accumulation; ensuring heat transfer efficiency and reaction uniformity; and removing harmful gases to avoid damage to the equipment, reduce safety hazards, and protect the health of operators.

[0112] It should be noted that the flow rate detection device 902 is used to monitor the flow rate of the gas in the exhaust pipe 901 in order to detect abnormalities in a timely manner, such as blockage or leakage, and make necessary adjustments; the cooling device 903 is used to reduce the temperature of the gas in the exhaust pipe 901; the regulating valve 904 is used to control the flow rate and pressure of the gas in the exhaust pipe 901 to ensure a stable exhaust process; the filtering device 905 is used to filter dust, particulate matter or harmful gases contained in the gas in the exhaust pipe 901 to prevent them from being emitted into the atmosphere, thereby protecting the environment and the health of employees; the vacuum pump 907 is used to extract gas and generate negative pressure to accelerate the discharge of gas or maintain the vacuum degree in the furnace tube reaction chamber 10; and the control valve 906 is used to control the start or stop of the vacuum pump 907.

[0113] In other embodiments, refer to the appendix Figure 10Furthermore, the air inlet 30 and exhaust outlet 80, which communicate with the reaction chamber 10, are both located at the bottom of the furnace tube, and an internal thermocouple 100 is vertically installed inside the reaction chamber 10 corresponding to the air inlet 30. At this time, only one of the air intake device 40 and the exhaust device 90 can be activated at the same time to prevent simultaneous air intake and exhaust from affecting the uniformity of the coating. If it is necessary to reduce the number of air inlets 30 and / or internal thermocouples 100, the air inlets 30 and / or internal thermocouples 100 to be reduced are removed from the reaction chamber 10. Then, a hole (not shown, same throughout the text) will be left at the bottom of the furnace tube after removing the air inlets 30 and / or internal thermocouples 100. Then, the hole is plugged with a sealing plug 110 to prevent air leakage. When it is necessary to add air inlets 30 and / or internal thermocouples 100, the sealing plug 110 is removed and the air inlets 30 and / or internal thermocouples 100 are reinstalled.

[0114] Obviously, the embodiments described above are merely some embodiments of the present invention, not all embodiments. The accompanying drawings show preferred embodiments of the present invention, but do not limit the patent scope of the present invention. The present invention can be implemented in many different forms; rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing specific embodiments, or make equivalent substitutions for some of the technical features. Any equivalent structures made using the content of this specification and drawings, directly or indirectly applied to other related technical fields, are similarly within the patent protection scope of this invention.

Claims

1. A furnace tube having an internal reaction chamber (10) for placing a carrier (20), characterized in that, The furnace tube is provided with multiple air inlets (30) communicating with the reaction chamber (10) at the top or bottom, and an air inlet device (40) is connected to the end of the air inlet (30) away from the reaction chamber (10). The air inlet (30) is located at the other end of the reaction chamber (10) and is connected to a flow equalization device (50), which includes a spray air inlet pipe (503). The furnace tube is provided with an outer ring area (60) and an inner ring area (70) at the top or bottom. Both the outer ring area (60) and the inner ring area (70) are provided with a plurality of air inlets (30) evenly in the circumference. Each air inlet (30) is connected to a vertically arranged spray air inlet pipe (503) in the reaction chamber (10). The spray air inlet pipe (503) is provided with a plurality of second spray ports (5031) on the side facing the carrier (20) for spraying process gas evenly along the longitudinal direction of the second spray ports (5031) onto the carrier (20). The vehicle (20) is located between the spray air inlet pipe (503) that connects the air inlet (30) of the outer ring region (60) and the inner ring region (70).

2. The furnace tube according to claim 1, characterized in that, The flow equalization device (50) includes an annular spray air inlet pipe (501), a flow equalization layer (502), and a spray air inlet pipe (503). The air inlets (30) located in the inner ring region (70) or the outer ring region (60) are connected to the annular spray air inlet pipe (501). The annular spray air inlet pipe (501) is located between the air inlet (30) and the carrier (20). At least one flow equalization layer (502) is also matched between the annular spray air inlet pipe (501) and the carrier (20). The flow equalization layer (502) is provided with multiple through holes (5021) penetrating the flow equalization layer (502). The annular spray air inlet pipe (501) is provided with multiple first spray ports (5011) on the side facing the flow equalization layer (502). The air inlet (30) located in the outer ring region (60) or the inner ring region (70) is connected to a spray air inlet pipe (503), and the spray air inlet pipe (503) is provided with a plurality of second spray ports (5031) on the side facing the vehicle (20).

3. The furnace tube according to claim 1, characterized in that, The flow equalization device (50) includes an annular spray air inlet pipe (501), which is located on the side of the carrier (20) facing the air inlet (30). The air inlets (30) located in the outer ring region (60) and / or the inner ring region (70) are connected to the annular spray air inlet pipe (501), and the annular spray air inlet pipe (501) has a plurality of first spray ports (5011) on the side facing the vehicle (20).

4. The furnace tube according to claim 3, characterized in that, The flow equalization device (50) also includes a flow equalization layer (502) that matches the annular spray air inlet pipe (501). At least one uniform flow layer (502) is provided between the annular spray air inlet pipe (501) and the carrier (20), and the uniform flow layer (502) is provided with multiple through holes (5021) penetrating the uniform flow layer (502); the uniform flow layer (502) is used to uniformly distribute the process gas on the cross section of the reaction chamber (10).

5. The furnace tube according to claim 1, characterized in that, The air intake device (40) includes an air intake pipe (401), a regulating needle valve (402), a pneumatic valve (403), a flow meter (404), and a shut-off valve (405). Each of the air inlets (30) is connected to an air inlet pipe (401), and each air inlet pipe (401) is provided with an adjusting needle valve (402), a pneumatic valve (403), a flow meter (404) and a shut-off valve (405) in sequence along its extension direction.

6. The furnace tube according to claim 1, characterized in that, The air intake device (40) includes an air intake pipe (401), a regulating needle valve (402), a pneumatic valve (403), a flow meter (404), and a shut-off valve (405). Each of the air inlets (30) is connected to an air inlet pipe (401), and each of the air inlet pipes (401) is provided with an adjusting needle valve (402). At least two of the air inlet pipes (401) are connected to the pneumatic valve (403), and the pneumatic valve (403) is also connected to the flow meter (404) and the shut-off valve (405) in sequence through the air inlet pipes (401).

7. The furnace tube according to claim 1, characterized in that, The bottom of the furnace tube is provided with a plurality of exhaust ports (80) communicating with the reaction chamber (10). The exhaust port (80) is connected to an exhaust device (90) at one end extending out of the bottom of the furnace tube. The exhaust device (90) includes an exhaust pipe (901), a flow rate detection device (902), a cooling device (903), a regulating valve (904), a filter device (905), a control valve (906), and a vacuum pump (907). Each of the exhaust ports (80) is connected to an exhaust pipe (901), and each of the exhaust pipes (901) is provided with a flow rate detection device (902), a cooling device (903), a regulating valve (904) and a filter device (905) in sequence along its extension direction. At least one of the filter devices (905) is connected to the control valve (906) via the exhaust pipe (901), and the control valve (906) is also connected to the vacuum pump (907) via the exhaust pipe (901).

8. The furnace tube according to claim 1, characterized in that, The bottom circumferential of the side wall of the furnace tube is provided with a plurality of exhaust ports (80) communicating with the reaction chamber (10). The exhaust port (80) is connected to an exhaust device (90) at one end extending out of the bottom of the furnace tube. The exhaust device (90) includes an exhaust pipe (901), a flow rate detection device (902), a cooling device (903), a regulating valve (904), a filter device (905), a control valve (906), and a vacuum pump (907). Each of the exhaust ports (80) is connected to an exhaust pipe (901), and each of the exhaust pipes (901) is provided with a flow rate detection device (902), a cooling device (903), a regulating valve (904) and a filter device (905) in sequence along its extension direction. At least one of the filter devices (905) is connected to the control valve (906) via the exhaust pipe (901), and the control valve (906) is also connected to the vacuum pump (907) via the exhaust pipe (901).

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