A step profiler for characterizing nanoscale morphology of material surfaces

CN118999453BActive Publication Date: 2024-12-31DONGGUAN JOOIN TECH CO LTD +1
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Patent Information

Application Number
CN202411458363.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-10-18
Publication Date
2024-12-31
Estimated Expiration
2044-10-18

AI Technical Summary

Technical Problem

When leveling the detection platform, the existing step instrument has a deviation from the adjustment bolts and screw holes, which leads to inconvenient leveling and cumbersome operation, which reduces the detection accuracy and efficiency.

Method used

The leveling mechanism used in combination with the connector and the drive parts is used to drive the slider to move through the electric push rod to realize the roll or pitch adjustment of the bearing mechanism, and the automatic leveling is achieved in combination with the electronic level and the controller to avoid manually rotating the bolts.

Benefits of technology

It improves detection accuracy, simplifies leveling operations, reduces errors, improves leveling efficiency, and facilitates maintenance and maintenance, with a wider range of applications.

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Abstract

The invention relates to the technical field of step meters, and discloses a step meter for characterizing the nano-scale morphology of a material surface, comprising a supporting mechanism, a detecting mechanism, a bearing mechanism, a displacement mechanism, a leveling mechanism and a shielding mechanism; the invention can drive an upper supporting plate to rotate around an X-axis direction with a convex ball at its bottom as an axis or drive a lower supporting plate to rotate around a Y-axis direction with a convex ball at its bottom as an axis through the coordinated use of a connecting member and a driving member, thereby achieving the purpose of adjusting the level, so that a sample to be inspected on the bearing mechanism is in a horizontal state, and the inconvenience caused by the connection method of a traditional adjusting bolt and a threaded hole is eliminated; through the coordinated use of a driving member, an electronic level and a controller, automatic detection of the horizontality of the bearing mechanism and leveling operations can be realized. On the one hand, manual leveling is not required, which reduces the work difficulty of the staff and improves the leveling efficiency; on the other hand, the leveling operation can be performed in time.
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