A multi-sensor fusion measurement pneumatic polishing actuator and control method thereof

Abstract

The application discloses a kind of multi-sensor fusion measurement's pneumatic polishing actuator and its control method, it is related to polishing automation processing technical field, it is dangerous to install polishing clamp on force-measuring equipment to the equipment easy to be contaminated due to the existence of polishing liquid or polishing paste of polishing processing, in addition, the actual polishing force of polishing processing calculated by indirect measurement is also influenced by the technical problems of modeling and calculation error, including bottom plate, the top center of the bottom plate is connected with back plate by angle code screw thread, the front surface top of the back plate is provided with polishing mechanism, the top front end of the bottom plate is sequentially provided with fixed mechanism one, a plurality of workpiece end pressure sensors, fixed mechanism two and clamping mechanism, the polishing mechanism is connected with the two gas outlets of gas source.The work of the above mechanism, using multi-sensor fusion measurement, realize multi-dimensional accurate real-time polishing force measurement, change the method of single sensor measurement polishing force, provide accurate measurement results.

Description

Technical Field

[0001] This invention relates to the field of automated polishing technology, specifically to a pneumatic polishing actuator and its control method based on multi-sensor fusion measurement. Background Technology

[0002] In the surface processing of optical components, polishing is the final and most important step to ensure the high precision requirements of the optical component surface. In automated polishing processes, in addition to having the position, posture, and feed control functions of general CNC machine tools, polishing equipment should also have the function of polishing force control in order to maintain or adjust the contact pressure between the polishing tool and the workpiece surface. During polishing, the contact state between the polishing tool and the workpiece may change at any time. Therefore, the control of polishing force has always been a difficult and important point in the polishing process of optical components. The accuracy and real-time performance of polishing force measurement are crucial for ensuring the precision of polishing force control. Currently, common methods for measuring polishing force in pneumatic polishing actuators include: using the gas pressure in the rodless chamber of the cylinder to calculate the system output polishing force; placing a sensor between the piston output end and the polishing tool to measure the cylinder output force to calculate the polishing force; or mounting the polishing fixture on a general force measuring instrument to measure the pressure on the polishing fixture and the workpiece. The presence of polishing slurry or paste during polishing poses a risk of contamination to the equipment when the polishing fixture is mounted on the force measuring device. Furthermore, the actual polishing force calculated indirectly is also affected by modeling and calculation errors. Therefore, achieving accurate and rapid measurement of polishing force during the polishing process is one of the key technologies that urgently needs to be solved in polishing actuators. Summary of the Invention

[0003] The purpose of this invention is to provide a pneumatic polishing actuator and its control method based on multi-sensor fusion measurement. By using multi-sensor system fusion measurement, multi-dimensional real-time accurate polishing force measurement can be achieved, changing the method of measuring polishing force with a single sensor and providing a new way for measuring and controlling polishing force in automated polishing processes.

[0004] The objective of this invention can be achieved through the following technical solution: a pneumatic polishing actuator for multi-sensor fusion measurement, comprising a base plate, a back plate being threadedly connected to the top center of the base plate via a corner bracket, a reinforcing plate being fixedly connected to the back of the back plate, and the outer side of the bottom end of the reinforcing plate being threadedly connected to the rear end of the upper surface of the base plate via a corner bracket, and a polishing mechanism being provided at the top of the front surface of the back plate. The polishing mechanism includes a bracket, a transmission component is provided at the inner front end of the bracket, a moving component is provided at the bottom end of the transmission component, an electric spindle is provided inside the moving component, a polishing tool is provided at the bottom end of the electric spindle, and a support is provided at the bottom end of the moving component. The bracket is bolted to the top of the front surface of the back plate, and the back of the support is bolted to the bottom end of the front surface of the back plate.

[0005] As a further embodiment of the present invention, the transmission component includes a cylinder body, a piston rod is provided at the bottom of the cylinder body, a fixing block is fixedly connected to the bottom of the piston rod, an output pressure sensor is provided at the bottom of the fixing block, the cylinder body is fixedly connected to the front end of the bracket, and the interior of the cylinder body is divided into an upper chamber and a lower chamber by the top of the piston rod.

[0006] As a further embodiment of the present invention, the moving component includes a sleeve, the top end of the sleeve is connected to a hanger by a bolt thread, the back of the sleeve is fixedly connected to a connector, the rear outer wall of the connector is fitted with a slider, the inner side of the slider is slidably connected to a guide rail, the top end of the hanger is set at the bottom end of the output pressure sensor, the back of the guide rail is fixedly connected to the front surface of the back plate, two semi-arc-shaped clamping rings are symmetrically arranged inside the sleeve, and threaded holes are opened on both sides of the sleeve and are at the same height as the two clamping rings. Locking bolts are threaded inside the threaded holes, and the inner side of the locking bolts is attached to the outer side of the outer wall of the clamping rings. The electric spindle is clamped on the inner side of the clamping rings.

[0007] As a further embodiment of the present invention, a fixing mechanism is provided at the top front end of the base plate. The fixing mechanism includes a base, a vertical plate is fixedly connected to the top of the base, a top plate is slidably connected to the outer wall of the vertical plate, and spring telescopic rods are provided at the four corners of the bottom end of the top plate. Multiple slots are evenly provided inside the top plate, and multiple blocks are slidably connected inside the multiple slots. A connecting rod is fixedly connected to the outer side of each of the multiple blocks. A limiting plate is provided at the top of the outer side of each of the multiple connecting rods, and the top of the outer wall of the connecting rod is attached to the bottom end of the inner wall of the limiting plate. A top rod is provided at the bottom end of each of the multiple slots. The base is connected to both sides of the top front end of the base plate by bolts and threads. The bottom ends of the multiple top rods are fixedly connected to the top front end of the base plate, and the top ends of the top rods are inserted into the inner side of the bottom end of the connecting rods. The top ends of the multiple limiting plates are fixedly connected to the top end of the inner wall of the top plate.

[0008] As a further embodiment of the present invention, the spring telescopic rod consists of a sleeve, an insert rod, and a supporting spring. The top end of the insert rod is fixedly connected to the four corners of the bottom end of the top plate. The bottom end of the sleeve is fixedly connected to the front end of the top of the bottom plate. The insert rod is slidably connected inside the top end of the sleeve. The supporting spring is sleeved on the outer wall of the sleeve and the insert rod. The front end and rear end of the outer wall of the vertical plate are both inserted with pads. The bottom end and top end of the pads are respectively attached to the top of the base and the bottom of the top plate. Multiple locking blocks are arranged in a ring array inside the locking slot.

[0009] As a further embodiment of the present invention, the top end of the fixing mechanism one is provided with multiple workpiece end pressure sensors, and the bottom ends of the multiple workpiece end pressure sensors are all inserted into the inside of the slot one, and the bottom outer walls of the multiple workpiece end pressure sensors are clamped by the clamping blocks. The top end of the multiple workpiece end pressure sensors is provided with a fixing mechanism two, the fixing mechanism two including a mounting plate, the inside of the mounting plate is evenly provided with multiple slots two, and the slots two are symmetrical with each other. The inside of each of the multiple slots two is slidably connected with two clamping blocks, and the outer sides of the two clamping blocks are fixed. The device is connected to a second connecting rod. The intersection of the two connecting rods is rotatably connected together by a pin. A pull rod is fixed to the other side of each of the two connecting rods. A return spring is fixed to the inner side of each of the two pull rods. A semi-circular sliding groove is opened on one side of each of the multiple slots. The two pull rods and the return spring are slidably connected inside the semi-circular sliding groove. The upper and lower ends of the pin machined at the intersection of the two connecting rods are fixed to the inner wall of the mounting plate. The top of the outer wall of each of the multiple workpiece end pressure sensors is inserted into the inside of the slot. The clamping block holds the top of the outer wall of each of the multiple workpiece end pressure sensors.

[0010] As a further embodiment of the present invention, a clamping mechanism is provided at the top of the fixing mechanism two. The clamping mechanism includes a clamping seat, a groove plate is fixedly connected to the top of the clamping seat, a lower gear is rotatably connected to the inner center of the groove plate, an upper gear is fixedly connected to the top of the gear one, a lower rack one is meshed with one side of the outer wall of the lower gear, a lower rack two is meshed with the other side of the outer wall of the lower gear, an upper rack one is meshed with one side of the outer wall of the upper gear, and an upper rack two is meshed with the other side of the outer wall of the upper gear. The lower rack one, lower rack two, and upper rack... A fixing plate is fixedly connected to the outer side of both the first and second upper racks. A clamping claw is fixedly connected to the top of the fixing plates. A first telescopic rod is fixedly connected to the other side of the fixing plate located outside the first lower rack. A second telescopic rod is fixedly connected to the other side of the fixing plates located outside the second lower rack, the first upper rack, and the second upper rack. A placement seat is rotatably connected to the top of the upper gear. The clamping seat is connected to the top of the mounting plate by bolts and threads. The first telescopic rod is fixedly connected to the inside of one of the four corners of the slot plate. A plurality of second telescopic rods are respectively fixedly connected to the inside of the other three corners of the four corners of the slot plate.

[0011] As a further embodiment of the present invention, the first telescopic rod is configured as an electric telescopic rod.

[0012] As a further embodiment of the present invention, the air source has two air outlets, one of which is connected to the input of the first processing element. The output of the first processing element is connected to the input of the pneumatic regulating valve. The output of the pneumatic regulating valve is connected to the upper cavity of the cylinder body via a gas pressure sensor. The other air outlet of the air source is connected to the input of the second processing element. The output of the second processing element is connected to the lower cavity of the cylinder body via a quick exhaust valve. The output pressure sensor, multiple workpiece end pressure sensors, the pneumatic regulating valve, and the gas pressure sensor are all electrically connected to a microcontroller. The microcontroller is electrically connected to a host computer, and the host computer is also electrically connected to the polishing mechanism.

[0013] The present invention also provides a control method for a pneumatic polishing actuator based on multi-sensor fusion measurement, comprising the following steps: Step 1: Connect the input terminal of the microcontroller to the output terminal of the host computer; Step 2: The host computer transmits the polishing force requirements of the parts to the microcontroller in real time. Step 3: During the polishing process, the gas pressure sensor, the output pressure sensor, and multiple workpiece end pressure sensors measure the actual polishing force at different locations in the control stage. Combined with the theoretical model, the real-time polishing force in the polishing contact area is accurately determined through a multi-sensor fusion algorithm. Step 4: The microcontroller processes the measured polishing force value and the theoretical polishing force requirement in real time, and adjusts the pneumatic regulating valve according to the preloaded control algorithm to adjust the polishing mechanism in real time so that the measured output polishing pressure value tracks the target value, thereby realizing real-time control of the polishing pressure.

[0014] (1) By setting up a polishing mechanism, the output pressure sensor and the fixed block are coaxial with the piston rod and the polishing tool, ensuring that the output pressure sensor is accurate. When polishing the surface of the optical element, the cylinder body controls the piston rod to extend and retract, so that the moving component can be moved as a whole through the piston rod. Thus, the electric spindle can drive the polishing tool to polish the surface of the optical element. By setting up the output pressure sensor, the output polishing force can be fed back in real time, thereby ensuring that the polishing tool is adjusted and controlled to contact the optical element and the polishing force generated between them. (2) By setting up a fixing mechanism 1 and a fixing mechanism 2, and opening slot 1 and slot 2 in advance, it is convenient to arrange multiple workpiece end pressure sensors in the fixing mechanism 1 and the fixing mechanism 2, so as to arrange multiple workpiece end pressure sensors according to actual use requirements, avoid opening holes on the mounting plate according to the arrangement scheme, and improve the arrangement efficiency of workpiece end pressure sensors. (3) By setting up a clamping mechanism, the optical element that needs to be polished can be clamped to the top of the placement seat. The placement seat, polishing mechanism, fixing mechanism one and fixing mechanism two are all on the same central axis, which facilitates the polishing of the optical element after clamping and fixing, and can improve the accuracy of the workpiece end pressure sensor for measuring values. (4) Through the cooperation of the above-mentioned mechanisms, ultra-precision polishing can be performed. Multi-sensor system fusion measurement is adopted to realize multi-dimensional accurate real-time polishing force measurement, changing the method of single sensor measuring polishing force, providing accurate measurement results for polishing force control system, and providing a new way for polishing force measurement and control in automated polishing processing. Flexible polishing tools are used to ensure high surface quality of components and realize high-precision polishing processing. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the connection structure of the pneumatic polishing actuator for multi-sensor fusion measurement according to the present invention; Figure 2 This is the present invention. Figure 1 Another isometric connection structure diagram; Figure 3 This is the present invention. Figure 1 A side view diagram of the connection structure; Figure 4 This is the present invention. Figure 1 A schematic diagram showing the connection structure of fixing mechanism 1, workpiece end pressure sensor, fixing mechanism 2, and clamping mechanism; Figure 5 This is the present invention. Figure 4 A schematic diagram of the other isometric connection structure of the clamping mechanism with the placement seat hidden; Figure 6 This is the present invention. Figure 4 A front view schematic diagram of the connection structure of the clamping mechanism (without obscuring it). Figure 7 This is the present invention. Figure 4 A bottom-view schematic diagram of the connection structure of the second fixed mechanism; Figure 8 This is the present invention. Figure 7 A bottom-view sectional view of the connection structure of the middle slot 2, connecting rod 2, pull rod and return spring; Figure 9 This is the present invention. Figure 4A schematic diagram of the connection structure of the fixed mechanism 1; Figure 10 This is the present invention. Figure 9 A frontal sectional view of the connection structure of the top plate, slot 1, locking block, connecting rod 1, limiting plate and top rod; Figure 11 This is a control principle diagram of the pneumatic polishing actuator control method based on multi-sensor fusion measurement of the present invention; Figure 12 This is a diagram showing the arrangement of multiple workpiece end pressure sensors in this invention, wherein (a) is arrangement scheme one of multiple workpiece end pressure sensors, (b) is arrangement scheme two of multiple workpiece end pressure sensors, and (c) is arrangement scheme three of multiple workpiece end pressure sensors.

[0016] In the diagram: 1. Base plate; 2. Back plate; 3. Reinforcing plate; 4. Polishing mechanism; 401. Bracket; 402. Transmission component; 4021. Cylinder body; 4022. Piston rod; 4023. Fixing block; 4024. Output pressure sensor; 403. Moving component; 4031. Jacket; 4032. Hanger; 4033. Connector; 4034. Slider; 4035. Guide rail; 404. Electric spindle; 405. Polishing tool; 406. Support; 5. Fixing mechanism one; 501. Base; 502. Vertical plate; 503. Top plate; 504. Spring telescopic rod; 505. Slot one; 506. Locking block; 507. Connecting rod one; 508. Limiting plate; 509. Top rod; 6. Workpiece end pressure sensor 7. Sensor; 701. Fixing Mechanism II; 702. Mounting Plate; 703. Slot II; 704. Clamping Block; 705. Connecting Rod II; 706. Pull Rod; 707. Return Spring; 8. Clamping Mechanism; 801. Clamping Seat; 802. Slot Plate; 803. Lower Gear; 804. Upper Gear; 805. Lower Rack I; 806. Lower Rack II; 807. Upper Rack I; 808. Upper Rack II; 809. Fixing Plate; 810. Gripper; 811. First Telescopic Rod; 812. Second Telescopic Rod; 813. Placement Seat; 9. Air Source; 10. First Processing Component; 11. Pneumatic Regulating Valve; 12. Gas Pressure Sensor; 13. Second Processing Component; 14. Quick Exhaust Valve; 15. Host Computer; 16. Microcontroller. Detailed Implementation

[0017] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0018] Example 1

[0019] Please see Figures 1-3 As shown, this invention is a pneumatic polishing actuator for multi-sensor fusion measurement, including a base plate 1, which is mounted on a moving or fixed worktable of a machine tool or robot. The base plate 1 is used to install a fixed mechanism 5. A back plate 2 is connected to the center of the top of the base plate 1 by a corner bracket thread. The back plate 2 is mounted on the tool end of the machine tool or robot and is used to fix the polishing mechanism 4. A reinforcing plate 3 is fixedly connected to the back of the back plate 2, and the outer side of the bottom end of the reinforcing plate 3 is also connected to the rear end of the upper surface of the base plate 1 by a corner bracket thread. The reinforcing plate 3 is used to enhance the connection strength between the base plate 1 and the back plate 2. The connection and fixation with the back plate 2 shown in the figure is for illustrative purposes. A polishing mechanism 4 is provided at the top of the front surface of the back plate 2. The polishing mechanism 4 is used to polish the surface of optical elements. The polishing mechanism 4 includes a bracket 401 for fixing the cylinder body 4021. A transmission component 402 is located at the inner front end of the bracket 401, driving a moving component 403 to move. The moving component 403 is located at the bottom end of the transmission component 402, mounting an electric spindle 404 and driving it to move, thereby enabling the polishing tool 405 to polish the surface of the optical element. The electric spindle 404, a small air-cooled electric spindle, is located inside the moving component 403. The electric spindle 404 drives the polishing tool 405 to rotate, and the polishing tool 405 is located at the bottom end of the electric spindle 404. The polishing tool 405 is used to polish the surface of the optical element. The bottom end of the moving component 403 is provided with a support 406, which supports the bottom end of the clamp 4031. When the piston rod 4022 approaches the limit of the extension stroke, the bottom end of the clamp 4031 contacts the top front end of the support. In this way, even when the system is not working, the load of the piston rod 4022 can be supported by the support, so that the output pressure sensor 4024 will not be in a state of being stretched by the load for a long time, and the load will not press on the workpiece end pressure sensor 6 for a long time. The bracket 401 is bolted to the top of the front surface of the back plate 2, and the back of the support 406 is bolted to the bottom end of the front surface of the back plate 2.

[0020] In this embodiment, preferably, the transmission component 402 includes a cylinder body 4021. A piston rod 4022 is provided at the bottom of the cylinder body 4021. A fixing block 4023 is fixedly connected to the bottom of the piston rod 4022. The fixing block 4023 is used to connect the top of the output pressure sensor 4024 to the bottom of the piston rod 4022. The bottom of the fixing block 4023 is provided with an output pressure sensor 4024. The output pressure sensor 4024 is used to measure the output pressure of the piston rod 4022, thereby providing real-time feedback on the polishing pressure output by the polishing tool 405 to the surface of the optical element. The cylinder body 4021 is fixedly connected to the front end of the bracket 401. The interior of the cylinder body 4021 is divided into an upper chamber and a lower chamber by the top of the piston rod 4022. By controlling the pressure difference on both sides of the top of the piston rod 4022, the piston rod 4022 reciprocates inside the cylinder body 4021, and the stroke of the piston rod 4022 can be adjusted.

[0021] In this embodiment, preferably, the moving component 403 includes a sleeve 4031, which is used to install the electric spindle 404. A hanger 4032 is threadedly connected to the top of the sleeve 4031 via bolts. The hanger 4032 is inverted U-shaped, allowing the electric spindle 404 to connect to the sleeve 4031. A connector 4033 is fixedly connected to the back of the sleeve 4031, which connects the sleeve 4031 to the slider 4034. The slider 4034 is sleeved on the outer rear wall of the connector 4033. The polishing pressure loading motion is achieved by the linear movement of the slider 4034 on the guide rail 4035. The guide rail 4035 is slidably connected to the inner side of the slider 4034, and the guide rail 4035 is used to limit the movement trajectory of the slider 4034. The top of 32 is set at the bottom of the output pressure sensor 4024. Through the above installation and connection method, the output pressure sensor 4024 is installed in the moving component 403 and arranged at the output end of the piston rod 4022 to measure the output polishing force of the polishing tool 405. The back of the guide rail 4035 is fixedly connected to the front surface of the back plate 2. Two semi-arc clamping rings are symmetrically arranged inside the sleeve 4031. Threaded holes are opened on both sides of the sleeve 4031 and are at the same height as the two clamping rings. Locking bolts are threaded inside the threaded holes, and the inner side of the locking bolts is attached to the outer side of the outer wall of the clamping ring. The electric spindle 404 is clamped on the inner side of the clamping ring. The locking bolts are used to lock the clamping ring, thereby clamping the electric spindle 404 through the clamping ring.

[0022] In summary, to ensure accurate pressure direction, the rotation center of the piston rod 4022 and the polishing tool 405 should remain coaxial. Furthermore, to ensure accurate measurement by the output pressure sensor 4024, the output pressure sensor 4024 and the fixing block 4023 should have high coaxiality with the piston rod 4022 and the polishing tool 405. When polishing the surface of the optical element, the cylinder body 4021 controls the extension and retraction of the piston rod 4022, thereby driving the movement component 403 to move as a whole. Since the electric spindle 404 is clamped and fixed inside the sleeve 4031, the movement of the movement component 403 can simultaneously drive the electric spindle 404 to move. The electric spindle 404 can then drive the polishing tool 405 to start working and polish the surface of the optical element. The output pressure sensor 4024 provides real-time feedback on the output polishing force, thereby ensuring adjustment and control of the contact between the polishing tool 405 and the optical element and the polishing force generated between them.

[0023] Example 2

[0024] Please see Figure 1 , Figures 4-10 and Figure 12As shown, based on Embodiment 1, a fixing mechanism 5 is provided at the top front end of the base plate 1. The fixing mechanism 5 is used to fix the bottom ends of the outer walls of the multiple workpiece end pressure sensors 6 arranged thereon. The fixing mechanism 5 includes a base 501, a vertical plate 502 is fixedly connected to the top end of the base 501, and the base 501 is used to support the vertical plate 502 and the top plate 503. The top plate 503 is slidably connected to the outer wall of the vertical plate 502. The vertical plate 502 is used to support the top plate 503 and allows the top plate 503 to slide up and down on its outer wall. The four corners of the bottom end of the top plate 503 are fixed. Each plate is equipped with a spring telescopic rod 504, which supports the top plate 503 and can reset the top plate 503 after being pressed down. Multiple slots 505 are evenly distributed inside the top plate 503. These slots 505 are used to hold the bottom of the outer wall of the workpiece pressure sensor 6. Multiple locking blocks 506 are slidably connected inside each slot 505. These locking blocks 506 clamp the bottom of the outer wall of the workpiece pressure sensor 6, which is locked inside the slot 505. Connecting rods 5 are fixedly connected to the outer sides of each locking block 506. 07. Connecting rod 507 is used to drive the locking block 506 to move. Limiting plates 508 are provided at the outer top of multiple connecting rods 507. The limiting plates 508 are used to press the outer side of the connecting rods 507. When the connecting rods 507 slide towards the inner side of the limiting plates 508, the bottom end of the limiting plates 508 presses the connecting rods 507 inward, causing the connecting rods 507 to undergo elastic deformation and drive the locking block 506 to slide towards the outer side of the slot 505. This releases the clamping of the bottom end of the outer wall of the workpiece end pressure sensor 6, and the outer wall of the connecting rods 507... The top end is attached to the bottom of the inner wall of the limiting plate 508. The bottom end of each of the multiple slots 505 is provided with a push rod 509. The push rod 509 is used to press the inner side of the connecting rod 507, squeezing the top end of the connecting rod 507 into the inner side of the bottom end of the limiting plate 508. The base 501 is connected to the two sides of the top front end of the base plate 1 by bolts and threads. The bottom ends of the multiple push rods 509 are fixedly connected to the top front end of the base plate 1, and the top end of the push rod 509 is inserted into the inner side of the bottom end of the connecting rod 507. The top ends of the multiple limiting plates 508 are fixed to the top of the inner wall of the top plate 503.

[0025] In this embodiment, preferably, the spring telescopic rod 504 consists of a sleeve, an insert rod, and a support spring. The top end of the insert rod is fixedly connected to the four corners of the bottom end of the top plate 503. The bottom end of the sleeve is fixedly connected to the front end of the top of the bottom plate 1. The insert rod is slidably connected inside the top end of the sleeve, and the support spring is sleeved on the outer wall of the sleeve and the insert rod. When the top plate 503 is pressed down, the top plate 503 drives the insert rod to slide towards the bottom end of the sleeve, thereby causing the support spring to undergo elastic deformation. Therefore, after the pressure on the top plate 503 is released, the rebound force generated when the support spring contracts under force can be used to extend the top plate 503. The vertical plate 502 is reset, and pads are inserted into the front and rear ends of its outer wall. The bottom and top of the pads are respectively attached to the top of the base 501 and the bottom of the top plate 503. The pads are used to support the top plate 503 and prevent the top plate 503 from pressing the spring telescopic rod 504 when the fixing mechanism is in normal operation, which would affect the measurement accuracy of the workpiece end pressure sensor 6. Multiple clamping blocks 506 are arranged in a ring array inside the clamping slot 505. By arranging the clamping blocks 506 array inside the clamping slot 505, the bottom end of the outer wall of the workpiece end pressure sensor 6 can be clamped and fixed evenly.

[0026] In summary, when it is necessary to remove the multiple workpiece end pressure sensors 6 that were originally arranged at the top of the fixed mechanism 5 from the top of the fixed mechanism 5, first pull out the pads inserted into the front and rear ends of the outer wall of the vertical plate 502 from the outer wall of the vertical plate 502, so that the top plate 503 can slide on the outer wall of the vertical plate 502. Then press the top plate 503 down. As the top plate 503 moves down, it will drive the locking block 506 installed inside it. Connecting rod 507 and limiting plate 508 move downwards simultaneously. When connecting rod 507 moves downwards to a certain extent, it touches the top of push rod 509, thereby squeezing connecting rod 507 into the inner side of limiting plate 508 through push rod 509. This causes connecting rod 507 to undergo elastic deformation, which in turn causes the locking block 506 to retract into the inner wall of locking groove 505. This releases the locking block 506 from the bottom of the outer wall of the workpiece end pressure sensor 6, allowing the multiple workpiece end pressure sensors 6 arranged in fixing mechanism 5 to be released from the workpiece end pressure sensor 6. Remove the top plate 503 from the inside. After removal, release the pressure on the top plate 503. The top plate 503 can be reset by the operation of the spring telescopic rod 504, allowing it to slide back to the top of the outer wall of the vertical plate 502. After the top plate 503 is reset, the top of the push rod 509 will also release the pressure on the connecting rod 507, allowing the connecting rod 507 to extend from the inside of the limiting plate 508 through its own rebound force, and drive the locking block 506 back to its original position, making it easy to clamp the workpiece end pressure sensor 6 again.

[0027] In this embodiment, preferably, the top of the fixing mechanism 1 5 is provided with multiple workpiece end pressure sensors 6, and the bottom ends of the multiple workpiece end pressure sensors 6 are all inserted into the inside of the slot 1 505. The bottom outer walls of the multiple workpiece end pressure sensors 6 are clamped by the clamping blocks 506. The polishing force on the workpiece end, i.e., the polishing pressure borne by the optical element, is obtained by different theoretical calculations when different distribution schemes are adopted for the workpiece end pressure sensors 6. The top of the multiple workpiece end pressure sensors 6 is provided with a fixing mechanism 2 7, which is used to clamp the top of the outer wall of the workpiece end pressure sensor 6. The fixing mechanism 2 7 includes a mounting plate 701, and multiple slots 2 702 are evenly opened inside the mounting plate 701. The slots 2 702 are used to clamp the top of the outer wall of the workpiece end pressure sensor 6, and the slots 2 702 are symmetrical with the slot 1 505. Two clamping blocks 703 are slidably connected inside each of the multiple slots 2 702. The clamping blocks 703 are used to clamp the top of the outer wall of the workpiece end pressure sensor 6. Linkage 2 704 is fixedly connected to the outer side of 703. Linkage 2 704 is used to drive the clamping block 703 to move. The intersection of the two linkages 2 704 is rotatably connected together by a pin. Pull rod 705 is fixedly connected to the other side of each of the two linkages 2 704. Pull rod 705 is used to drive the two linkages 2 704 to rotate around the pin. Return spring 706 is fixedly connected to the inner side of the two pull rods 705. Return spring 706 is used to return the pull rod 705 to its original position, that is, it can move the linkage 2 704 and the clamping block 703. The reset mechanism has a semi-circular groove on one side of each of the multiple slots 702. The two pull rods 705 and the reset spring 706 are slidably connected inside the semi-circular groove. The upper and lower ends of the pins machined at the intersection of the two connecting rods 704 are fixed to the inner wall of the mounting plate 701. The top ends of the outer walls of the multiple workpiece end pressure sensors 6 are inserted into the slots 702, and the clamping block 703 is clamped on the top ends of the outer walls of the multiple workpiece end pressure sensors 6. The mounting plate 701 is used to support the connecting rods 704 and the clamping block 703.

[0028] In summary, when it is necessary to remove the workpiece end pressure sensor 6 from the inside of the fixing mechanism 7, pinch the pull rod 705. The pull rod 705 drives the other side of the two connecting rods 704 to expand outward, which allows the clamping block 703 to retract into the mounting plate 701. This removes the clamping block 703 from the top of the outer wall of the workpiece end pressure sensor 6, making it easier to pull it out from the inside of the slot 702. At the same time, after the workpiece end pressure sensor 6 is pulled out from the slot 702, release the pull rod 705. The rebound force generated when the return spring 706 is compressed will reset the pull rod 705. This will drive the other side of the connecting rod 704 and the clamping block 703 back to their original positions, making it easier to clamp and fix the top of the outer wall of the workpiece end pressure sensor 6 again.

[0029] In this embodiment, preferably, a clamping mechanism 8 is provided at the top of the fixing mechanism 2 7. The clamping mechanism 8 is used to clamp and fix the optical element to be polished. The clamping mechanism 8 includes a clamping seat 801, which is used to fix the slot plate 802 and connect the clamping mechanism 8 as a whole to the fixing mechanism 2 7. The top of the clamping seat 801 is fixedly connected to the slot plate 802, which is used to support the lower gear 803 and can fix the first telescopic rod 811 and multiple second telescopic rods 812. The lower gear 803 is rotatably connected to the inner center of the slot plate 802. The lower gear 803 is used to drive the upper gear 804 to rotate. At the same time, when the lower rack 1 805 slides, it will drive the lower gear 803 to rotate. The lower gear 803 drives the lower rack 806, which is meshed with it on the other side, to slide in the direction opposite to the lower rack 805. The top of the gear 803 is fixedly connected to the upper gear 804, which drives the upper rack 807 and the upper rack 808 to slide and supports the mounting base 813. The lower rack 805 is meshed with one side of the outer wall of the lower gear 803, and the lower rack 805 drives the lower gear 803 to rotate. The lower rack 806 is meshed with the other side of the outer wall of the lower gear 803. The upper rack 807 is meshed with one side of the outer wall of the upper gear 804, and the upper rack 808 is meshed with the other side of the outer wall of the upper gear 804. The lower rack 806, the upper rack 807, and the lower rack 806 are meshed with the upper rack 807. The upper rack 808 is meshed with the other side of the outer wall of the upper gear 804. The upper rack 808 is used to move the fixing plate 809 fixedly connected to its outer side. The lower rack 805, lower rack 806, upper rack 807, and upper rack 808 are all fixedly connected to the outer side of the fixing plate 809. The fixing plate 809 is used to fix the gripper 810, and when the fixing plate 809 moves, it will drive the gripper 810 to move together. Grippers 810 are fixedly connected to the top of the multiple fixing plates 809. The grippers 810 are used to clamp the optical element to be polished. A first telescopic rod 811 is fixedly connected to the other side of the fixing plate 809 located outside the lower rack 805. The first telescopic rod 811 is used to move the fixing plate 809 fixed to its inner side, thereby driving the lower rack 805 to move. The movement is achieved by fixing a second telescopic rod 812 on the other side of the fixing plate 809 located outside the lower rack 806, upper rack 807, and upper rack 808. The second telescopic rod 812 is used to limit the movement trajectory of the fixing plate 809 fixed inside it, so that the lower rack 806, upper rack 807, and upper rack 808 maintain linear movement. The top of the upper gear 804 is rotatably connected to a placement seat 813, which is used to place optical components. The clamp seat 801 is connected to the top of the mounting plate 701 by bolts and threads. The first telescopic rod 811 is fixed inside one of the four corners of the slot plate 802, and multiple second telescopic rods 812 are fixed inside the other three corners of the slot plate 802.

[0030] In this embodiment, preferably, the first telescopic rod 811 is an electric telescopic rod, that is, the first telescopic rod 811 itself has telescopic capability, so that the lower rack 805 can be moved by the first telescopic rod 811.

[0031] In summary, when polishing optical components, the component to be polished is placed on the top of the mounting base 813. The operation of the first telescopic rod 811 causes the lower rack 805, located on the inner side, to slide. Since the side of the lower rack 805 meshes with one side of the outer wall of the lower gear 803, the sliding of the lower rack 805 causes the lower gear 803 to rotate. This, in turn, causes the lower rack 806, meshed with the other side of its outer wall, to slide in the direction corresponding to the lower rack 805. Simultaneously, the rotation of the lower gear 803 causes the upper gear 804, fixed to its top, to rotate as well. Thus, the upper gear 804 drives the upper rack 1 807 and upper rack 2 808, which are meshed on both sides of its outer wall, to slide simultaneously in the corresponding directions. This causes the fixing plate 809, which is fixed to the outside of the lower rack 2 806, upper rack 1 807 and upper rack 2 808, to slide simultaneously toward the center of the slot plate 802. With the simultaneous movement of multiple fixing blocks 4023, the gripper 810 can also move toward the center of the slot plate 802, thereby clamping the optical element placed at the top of the placement seat 813 and positioning the clamped optical element at the center of the top of the placement seat 813, which is convenient for subsequent polishing of the optical element.

[0032] Example 3

[0033] Please see Figures 1-4 , Figure 11 and Figure 12As shown, the air source 9 has two outlets. The air source 9 provides compressed air to meet the required working pressure. One outlet of the air source 9 is connected to the input of the first processing element 10. The output of the first processing element 10 is connected to the input of the pneumatic regulating valve 11. The output of the pneumatic regulating valve 11 is connected to the upper cavity of the cylinder body 4021 via a gas pressure sensor 12. The pneumatic regulating valve 11 and the gas pressure sensor 12 are used to regulate the working pressure of the cylinder body 4021. The pneumatic regulating valve 11 is an electrical proportional control valve. The other outlet of the air source 9 is connected to the input of the second processing element 13. The output of the second processing element 13 is connected to the cylinder body 4021 via a quick exhaust valve 14. The lower chamber of cylinder 1 is connected to the pneumatic polishing actuator 4. The quick exhaust valve 14 is used to maintain a constant pressure in the lower chamber of cylinder 4021 to balance the gravity of its load. The output pressure sensor 4024, multiple workpiece end pressure sensors 6, pneumatic regulating valve 11 and gas pressure sensor 12 are all electrically connected to the microcontroller 16. The first processing element 10 and the second processing element 13 are generally pneumatic triplet units, consisting of an air filter, a pressure reducing valve and an oil mist lubricator, used to purify and filter the gas and stabilize the gas pressure generated by the air source 9. The microcontroller 16 is electrically connected to the host computer 15, and the host computer 15 is also electrically connected to the polishing mechanism 4. The microcontroller 16 and the host computer 15 are used to control the pneumatic polishing actuator to work as a whole.

[0034] In summary, by setting up multiple sets of sensors to measure different stages separately, and calculating the accurate real-time polishing force based on the theoretical calculation of the measured values ​​of different stages and the weight of each measurement stage, the theoretical model and the weights are determined through theoretical analysis and experimental measurement analysis to obtain accurate measurement results. The gas pressure sensor 12 is located near the air inlet of the upper cavity of the cylinder body 1. After starting work, it measures the real-time gas pressure entering the upper cavity of the cylinder body 1. The measured value is transmitted to the microcontroller 16 through the signal line. The output pressure sensor is connected to the piston rod 4022 at the top and to the moving component 403 at the bottom. After starting work, it measures the measured output pressure of the bottom of the polishing tool 405 at the output end of the cylinder body 1 against the optical element. The measured value is transmitted to the microcontroller 16 through the signal line. The workpiece end pressure sensor 6 is arranged between the clamping mechanism 8 and the base plate 3, and installed between the fixing mechanism 1 5 and the fixing mechanism 2 7. Figure 12 Alternatively, the polishing tool 405 can be arranged in groups. When it comes into contact with the workpiece and generates a polishing force, the polishing force on the workpiece end is measured from multiple angles, and the measured value is transmitted to the microcontroller 16 through a signal line.

[0035] Example 4

[0036] Please see Figures 1-12As shown, this embodiment combines Embodiment 1, Embodiment 2, and Embodiment 3. Air source 9 provides compressed air at the required working pressure. After being generated from air source 9, the compressed air is divided into two paths, which are purified, filtered, and pressure-stabilized by the first processing element 10 and the second processing element 13, respectively. One path passes through the pneumatic regulating valve 11 and the gas pressure sensor 12 before entering the upper chamber of the cylinder body 4021 to regulate the working pressure of the pneumatic system. The other path enters the lower chamber of the cylinder body 4021 at a constant pressure, and, in conjunction with the quick exhaust valve 14, maintains a constant pressure in the lower chamber of the cylinder body 4021 to balance the system load. The piston rod 4022 is initially positioned at its limit and its working position is when it is in the middle of its stroke. This allows for automatic compensation for positional changes caused by elastic deformation during operation. After operation, the piston rod 4022 should return to its initial position to ensure a constant gas pressure in the lower chamber of the cylinder body 4021, thereby maintaining a constant thrust from the lower chamber of the cylinder body 4021 on the piston rod 4022. This thrust is used to balance the load gravity and overcome the friction between the piston rod 4022 and the inner wall of the cylinder body 4021. When the gas pressure in the upper chamber of the cylinder body 4021 decreases or the gas supply stops, the piston rod 4022 is depressurized. When pressurized gas is applied, the piston rod 4022 tends to return to its original position or returns to its original position. The pneumatic system can adjust the output force of the cylinder piston by changing the gas pressure in the upper chamber of the cylinder body 4021. When the polishing mechanism 4, fixing mechanism 1 5, workpiece end pressure sensor 6, fixing mechanism 2 7, and clamping mechanism 8 move to near the working position along with the machine tool or robot, the pneumatic system starts working. At this time, the pneumatic regulating valve 11 is opened by an electrical signal, so that the compressed air of the expected flow rate is filled into the upper chamber of the cylinder body 4021 through the pneumatic regulating valve 11. After overcoming the remaining thrust and friction in the lower chamber, the piston rod 4022 moves downward until the polishing is complete. Tool 405 contacts the workpiece surface and reaches the preset polishing pressure. At this time, due to the downward movement of piston rod 4022, the compressed gas in the lower chamber is pressurized and the gas pressure increases. The quick exhaust valve 14 is used to quickly exhaust the gas, so that the compressed gas in the lower chamber maintains the preset gas pressure and keeps the thrust in the lower chamber constant. This is to prevent the thrust from increasing after the pressure increases, which would affect the polishing pressure control accuracy. At the same time, an indicator light is set on the output port of the programmable controller or microcontroller 16 to indicate whether the pressure regulation program is running and to monitor the system working status. A buzzer is set on another output port as an over-limit alarm to prevent the pressure from exceeding the measurement limit due to a fault.

[0037] Example 5

[0038] A control method for a pneumatic polishing actuator based on multi-sensor fusion measurement includes the following steps: Step 1: Connect the input terminal of the microcontroller 16 to the output terminal of the host computer 15; Step 2: The host computer 15 transmits the polishing force requirements of the parts to the microcontroller 16 in real time. At the same time, the host computer 15 controls the polishing mechanism 4 to move along a predetermined path on the surface of the optical element. Step 3: During the polishing process, the gas pressure sensor 12, the output pressure sensor 4024, and multiple workpiece end pressure sensors 6 measure the actual polishing force at different positions in the control link. Combined with the theoretical model, the real-time polishing force of the polishing contact area is accurately determined through a multi-sensor fusion algorithm. Step 4: The microcontroller 16 processes the measured polishing force value and the theoretical polishing force requirement in real time, and adjusts the pneumatic regulating valve 11 according to the preloaded control algorithm to adjust the polishing mechanism 4 in real time so that the output polishing pressure measured value tracks the target value, thereby realizing real-time control of the polishing pressure.

[0039] The foregoing has provided a detailed description of one embodiment of the present invention, but this description is merely a preferred embodiment and should not be construed as limiting the scope of the invention. All equivalent variations and modifications made within the scope of the present invention should still fall within the scope of the present invention.

Claims

1. A control method for a pneumatic polishing actuator based on multi-sensor fusion measurement, characterized in that, Includes the following steps: Step 1: Connect the input terminal of the microcontroller to the output terminal of the host computer; Step 2: The host computer transmits the polishing force requirements of the parts to the microcontroller in real time. Step 3: During the polishing process, the gas pressure sensor, the output pressure sensor, and multiple workpiece end pressure sensors measure the actual polishing force at different locations in the control stage. Combined with the theoretical model, the real-time polishing force in the polishing contact area is accurately determined through a multi-sensor fusion algorithm. Step 4: The microcontroller processes the measured polishing force value and the theoretical polishing force requirement in real time, and adjusts the pneumatic regulating valve according to the preloaded control algorithm to adjust the polishing mechanism in real time so that the measured value of the output polishing pressure tracks the target value, thereby realizing real-time control of the polishing pressure. The pneumatic polishing actuator used in the control method, which employs multi-sensor fusion measurement, includes: A base plate, wherein a back plate is threadedly connected to the top center of the base plate via a corner bracket, and a reinforcing plate is fixedly connected to the back of the back plate, and the outer side of the bottom end of the reinforcing plate is also threadedly connected to the rear end of the upper surface of the base plate via a corner bracket, characterized in that a polishing mechanism is provided at the top of the front surface of the back plate. The polishing mechanism includes a bracket, a transmission component is provided at the inner front end of the bracket, a moving component is provided at the bottom end of the transmission component, an electric spindle is provided inside the moving component, a polishing tool is provided at the bottom end of the electric spindle, and a support is provided at the bottom end of the moving component. The bracket is bolted to the top of the front surface of the back plate, and the back of the support is bolted to the bottom end of the front surface of the back plate. The transmission component includes a cylinder body, a piston rod is provided at the bottom of the cylinder body, a fixing block is fixedly connected to the bottom of the piston rod, an output pressure sensor is provided at the bottom of the fixing block, the cylinder body is fixedly connected to the front end of the bracket, and the interior of the cylinder body is divided into an upper chamber and a lower chamber by the top of the piston rod. A fixing mechanism is provided at the top front end of the base plate. The fixing mechanism includes a base, a vertical plate is fixedly connected to the top of the base, a top plate is slidably connected to the outer wall of the vertical plate, and spring telescopic rods are provided at the four corners of the bottom end of the top plate. Multiple slots are evenly opened inside the top plate, and multiple blocks are slidably connected inside the multiple slots. A connecting rod is fixedly connected to the outer side of each of the multiple blocks. A limit plate is provided at the top of the outer side of each of the multiple connecting rods, and the top of the outer wall of the connecting rod is attached to the bottom of the inner wall of the limit plate. A top rod is provided at the bottom end of each of the multiple slots. The base is connected to both sides of the top front end of the base plate by bolts and threads. The bottom ends of the multiple top rods are fixedly connected to the top front end of the base plate, and the top ends of the top rods are inserted into the inner side of the bottom end of the connecting rods. The top ends of the multiple limit plates are fixedly connected to the top of the inner wall of the top plate. The spring telescopic rod consists of a sleeve, an insert rod, and a support spring. The top end of the insert rod is fixed to the four corners of the bottom end of the top plate. The bottom end of the sleeve is fixedly connected to the front end of the top of the bottom plate. The insert rod is slidably connected inside the top end of the sleeve. The support spring is sleeved on the outer wall of the sleeve and the insert rod. The front and rear ends of the outer wall of the vertical plate are both inserted with pads. The bottom and top ends of the pads are respectively attached to the top of the base and the bottom of the top plate. Multiple locking blocks are arranged in a ring array inside the locking slot one. The top of the fixing mechanism one is equipped with multiple workpiece end pressure sensors, and the bottom ends of the multiple workpiece end pressure sensors are all inserted into the interior of the slot one. The bottom outer walls of the multiple workpiece end pressure sensors are clamped by clamping blocks. The top of the multiple workpiece end pressure sensors is equipped with a fixing mechanism two, which includes a mounting plate. The interior of the mounting plate has multiple slots two evenly distributed, and the slots two are symmetrical with the slot one. Two clamping blocks are slidably connected inside each of the multiple slots two, and connecting rods two are fixedly connected to the outer sides of each of the two clamping blocks. The two connecting rods 2 are rotatably connected together by a pin, and a pull rod is fixed to the other side of each of the two connecting rods 2. A return spring is fixed to the inner side of each of the two pull rods. A semi-circular sliding groove is opened on one side of each of the multiple slots 2. The two pull rods and the return spring are slidably connected inside the semi-circular sliding groove. The upper and lower ends of the pin machined at the intersection of the two connecting rods 2 are fixed to the inner wall of the mounting plate. The top of the outer wall of each of the multiple workpiece end pressure sensors is inserted into the inside of the slot 2, and the clamping block is clamped on the top of the outer wall of the multiple workpiece end pressure sensors. The top of the second fixing mechanism is provided with a clamping mechanism, which includes a clamping seat. A groove plate is fixedly connected to the top of the clamping seat. A lower gear is rotatably connected to the center of the groove plate. An upper gear is fixedly connected to the top of the lower gear. A lower rack is meshed with one side of the outer wall of the lower gear, and a lower rack is meshed with the other side of the outer wall of the lower gear. An upper rack is meshed with one side of the outer wall of the upper gear, and an upper rack is meshed with the other side of the outer wall of the upper gear. The lower rack, lower rack, upper rack, and upper rack are... A fixing plate is fixedly attached to the outer side of each of the three plates. A clamping claw is fixedly attached to the top of each fixing plate. A first telescopic rod is fixedly attached to the other side of the fixing plate located outside the first lower rack. A second telescopic rod is fixedly attached to the other side of the fixing plates located outside the second lower rack, the first upper rack, and the second upper rack. A placement seat is rotatably connected to the top of the upper gear. The clamping seat is connected to the top of the mounting plate by bolts and threads. The first telescopic rod is fixedly attached to the inside of one of the four corners of the slot plate. A plurality of second telescopic rods are respectively fixedly attached to the inside of the other three corners of the four corners of the slot plate. It also includes an air source with two outlets. One outlet is connected to the input of a first processing element, and the output of the first processing element is connected to the input of a pneumatic regulating valve. The output of the pneumatic regulating valve is connected to the upper chamber of the cylinder body via a gas pressure sensor. The other outlet of the air source is connected to the input of a second processing element, and the output of the second processing element is connected to the lower chamber of the cylinder body via a quick exhaust valve. The output pressure sensor, multiple workpiece end pressure sensors, the pneumatic regulating valve, and the gas pressure sensor are all electrically connected to a microcontroller. The microcontroller is electrically connected to a host computer, and the host computer is also electrically connected to the polishing mechanism.

2. The control method for the pneumatic polishing actuator based on multi-sensor fusion measurement according to claim 1, characterized in that, The moving component includes a jacket, with a hanger connected to the top of the jacket via bolt threads. A connector is fixed to the back of the jacket, and a slider is fitted on the outer wall of the rear end of the connector. A guide rail is slidably connected to the inner side of the slider. The top of the hanger is located at the bottom of the output pressure sensor. The back of the guide rail is fixedly connected to the front surface of the back plate. Two semi-circular clamping rings are symmetrically arranged inside the jacket, and threaded holes are opened on both sides of the jacket, which are at the same height as the two clamping rings. Locking bolts are threaded inside the threaded holes, and the inner side of the locking bolts is attached to the outer side of the outer wall of the clamping ring. The electric spindle is clamped on the inner side of the clamping ring.

3. The control method for the pneumatic polishing actuator based on multi-sensor fusion measurement according to claim 1, characterized in that, The first telescopic pole is configured as an electric telescopic pole.

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