Ultra-high vacuum manipulator

Abstract

The present invention belongs to the technical field of vacuum chamber handover, specifically, it is an ultra-high vacuum manipulator, the lifting drive assembly includes a lifting power source, a lifting transmission assembly and a lifting output end, the lifting power source is a fixed part, the output end of the lifting power source is connected to the lifting output end through the lifting transmission assembly, one end of the welded bellows is sealed and connected to the vacuum chamber, and the other end is connected to the lifting output end; the rotating drive assembly includes a rotating power source, a rotating transmission assembly and a rotating output end, the rotating power source is installed on the lifting output end, the output end of the rotating power source is connected to one end of the rotating output end through the rotating transmission assembly, and the other end of the rotating output end penetrates into the vacuum chamber through the welded bellows and is connected to the telescopic arm assembly. The present invention can be used in various vacuum environments, and is particularly suitable for 10 ‑8 Pa ultra-high vacuum environment, and the present invention can withstand high-temperature baking of 250°C in a vacuum environment.

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