Comprehensive yield determination method, device, equipment, storage medium and program product

Abstract

Embodiments of the present invention provide a method, device, equipment, storage medium and program product for determining a comprehensive yield. The method includes: filtering abnormal chips to obtain multiple target chips; grouping multiple target chips based on material number, test process number, test stage number and wafer number to obtain multiple first groups; determining the comprehensive yield of each first group corresponding to the BIN mark; grouping each first group corresponding to the BIN mark based on the wafer number and BIN mark to obtain multiple second groups; determining the comprehensive yield of each test stage, each test process and the whole process of each second group according to the order of the test process and the test stage, and based on the corresponding comprehensive yield; grouping multiple second groups based on the BIN mark to obtain multiple third groups; respectively determining the batch, material and product comprehensive yield corresponding to each third group. The disclosed embodiment can improve the accuracy of determining the comprehensive yield.

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