Probe fixing mechanism and polishing device

Abstract

The application discloses a probe fixing mechanism and a grinding device. The probe fixing mechanism comprises a mounting seat, a first mounting part and a second mounting part connected to each other, the first mounting part is used for being connected with a positioning mechanism, and the second mounting part is used for being connected with a grinding mechanism; a first sliding base is slidably connected to the first mounting part of the mounting seat in an X direction; a second sliding base is slidably connected to the first sliding base in a Y direction; a third sliding base is slidably connected to the second sliding base in the Y direction; a fourth sliding base is slidably connected to the third sliding base in the X direction; a rotating seat is rotatably connected to the third sliding base, and the rotating seat is provided with a first bearing table used for fixing a film; and a baffle is connected to the fourth sliding base and used for shielding part of probes on the film. The scheme can reliably clamp the probes, ensures that the probes remain stable during the grinding process, improves the accuracy of a grinding section position of the probes, and thus improves the accuracy of observation of the section of the probes.

Description

Technical Field

[0001] This invention relates to the field of probe card manufacturing technology, specifically a probe fixing mechanism and a grinding device. Background Technology

[0002] Chip manufacturing is a complex and costly process. Therefore, wafer testing is typically performed during the back-end high-frequency probe card testing process to remove defective chips, thereby significantly reducing subsequent manufacturing costs and improving R&D and production efficiency. The probe card, as the interface between the testing machine and the wafer, plays a crucial role in wafer testing.

[0003] Currently, most probe cards used in China are imported, and there are relatively few domestic companies engaged in the research and development and manufacturing of probe cards. Therefore, the research and development of probe cards plays a significant role in promoting the development of my country's chip and semiconductor industries. To ensure the accuracy of probe card test results, it is necessary to observe the cross-section of the probe to ensure the integrity of the probe structure. In view of this, the present invention provides a probe fixing mechanism and a polishing device. Summary of the Invention

[0004] To overcome the shortcomings of the prior art, embodiments of the present invention provide a probe fixing mechanism and a grinding device, which can reliably clamp the probe to ensure that the probe remains stable during the grinding process, improve the accuracy of the position of the probe grinding cross section, and thus improve the accuracy of probe cross section observation.

[0005] This application discloses a probe fixing mechanism for fixing a thin film through which a probe is inserted, comprising:

[0006] The mounting base includes a first mounting part and a second mounting part that are connected to each other. The first mounting part is used to connect with a positioning mechanism, and the second mounting part is used to connect with a grinding mechanism.

[0007] The first slide block is slidably connected to the first mounting portion of the mounting base along the X direction;

[0008] The second slide block is slidably connected to the first slide block along the Y direction;

[0009] The third slide is slidably connected to the second slide along the Y direction;

[0010] The fourth slide is slidably connected to the third slide along the X direction;

[0011] A rotating seat is rotatably connected to the third slide, and the rotating seat is provided with a first support platform for fixing the film;

[0012] A baffle, connected to the fourth slide, is used to block part of the probe on the film.

[0013] Specifically, the first mounting part has a first reference surface connected to the positioning mechanism, and the second mounting part has a second reference surface connected to the grinding mechanism. The first reference surface and the second reference surface are perpendicular, and the second reference surface is located in the Y direction of the first reference surface.

[0014] Specifically, the first mounting part has a first inner cavity, and the first inner cavity has a first sidewall and a second sidewall disposed opposite to each other in the X direction. The first mounting part is provided with a screw that passes through both the first sidewall and the second sidewall. The first slide is threadedly connected to the screw. The first inner cavity is provided with a first guide rail connected to the first slide.

[0015] Specifically, the first slide has a second inner cavity, in which a second guide rail is provided for connecting with the second slide. The second slide has a third inner cavity, in which a third guide rail is provided for connecting with the third slide. A first connecting part is provided on one side of the third inner cavity in the X direction, and a second connecting part is provided on the other side of the third inner cavity in the X direction. An arc connecting part is provided on the side of the third inner cavity in the Y direction away from the second mounting part. The arc connecting part has an arc groove, and the rotating seat is engaged with the arc groove.

[0016] Specifically, the rotating seat is arc-shaped on the side facing the arc connecting part. The arc connecting part is provided with a pair of oppositely arranged waist-shaped through holes. The waist-shaped through holes penetrate the arc groove. An external threaded positioning pin is inserted into each waist-shaped through hole. One end of the external threaded positioning pin is fixed to the rotating seat, and the other end is accommodated in the waist-shaped through hole. The end of the arc connecting part away from the third inner cavity is provided with two threaded holes. The two threaded holes are perpendicularly connected to the two waist-shaped through holes respectively. Each threaded hole is provided with a bolt for abutting against the corresponding external threaded positioning pin.

[0017] Specifically, a fixing block is connected to one end of the first slide near the first connecting part. The fixing block is located on the side of the first connecting part away from the second mounting part. The first connecting part and the fixing block are connected by a first micrometer and a round-headed pin. The first connecting part is provided with a countersunk hole, which includes a connected large-diameter section and a small-diameter section. The first micrometer is fastened to the end of the large-diameter section away from the small-diameter section. The round-headed pin includes a first head and a first rod that are connected. The first head and at least a portion of the first rod are located within the large-diameter section of the countersunk hole. At least a portion of the first rod passes through the small-diameter section of the countersunk hole and is fastened to the fixing block. A spring is sleeved on the outer wall of the portion of the first rod located within the large-diameter section.

[0018] Specifically, a first copper retaining ring is fitted on the outer wall of the connection part between the first micrometer and the large-diameter section of the countersunk hole.

[0019] Specifically, a connecting rod is fixedly connected to the third slide, a bearing is installed on the connecting rod, and a rotating shaft passes through the bearing. The second connecting part is connected to the rotating shaft through a second micrometer head and an adapter. The second connecting part has a through hole, the inner diameter of which is larger than the outer diameter of the adapter. The second micrometer head is fixedly connected to the end of the through hole away from the bearing, and the adapter is fixedly connected to the end of the second micrometer head facing the bearing. The rotating shaft includes a second head and a second rod part that are connected to each other. The second rod part of the rotating shaft is fixedly connected to the adapter, and the second head is located at the end of the bearing away from the adapter.

[0020] Specifically, the positioning mechanism is a microscope, the objective lens of the microscope is provided with scale lines, the grinding mechanism is an ion grinder, the scale lines are used to position the probe, and when the probe fixing mechanism is connected to the ion grinder, the probe positioned by the scale lines is aligned with the ion beam outlet of the ion grinder along the Z direction.

[0021] This application also discloses a probe grinding device, which includes a positioning mechanism, a grinding mechanism, and a probe fixing mechanism as described in this embodiment. The probe fixing mechanism is connected to the positioning mechanism to position the probe to be ground, and then the probe fixing mechanism is connected to the grinding mechanism to perform probe grinding.

[0022] The present invention has at least the following beneficial effects:

[0023] 1. The probe fixing mechanism in this embodiment can reliably clamp the probe to ensure that the probe remains stable during the grinding process and improve the accuracy of the position of the probe's ground cross section.

[0024] 2. The probe fixing mechanism in this embodiment can protect the remaining probes when the designated probe is being ground in cross-section.

[0025] 3. In this embodiment, the second slide is connected to the first slide via the first connecting part, the second connecting part is connected to the second slide via the second connecting part, and the arc connecting part is connected to the rotating seat. The connection method is ingenious, the structure is compact and saves space, and the adjustment accuracy is high.

[0026] 4. In this embodiment, the objective lens of the microscope is provided with a scale line for positioning the probe, and the first and second mounting parts of the mounting base are used to cleverly correspond the horizontal position of the scale line with the vertical position of the ion beam outlet of the grinder, thereby improving the positioning accuracy of the probe to be ground and the ion beam outlet and reducing the positioning difficulty.

[0027] To make the above and other objects, features and advantages of the present invention more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of the probe fixing mechanism in an embodiment of the present invention;

[0030] Figure 2 This is a schematic diagram of the mounting base in an embodiment of the present invention;

[0031] Figure 3 This is a schematic diagram of the connection relationship between the first slide block, the second slide block, the third slide block, and the fourth slide block in one view according to an embodiment of the present invention;

[0032] Figure 4 This is a schematic diagram of the connection relationship between the first slide block, the second slide block, the third slide block, and the fourth slide block in another perspective of an embodiment of the present invention;

[0033] Figure 5 This is a schematic diagram of the structure of the second slide in an embodiment of the present invention;

[0034] Figure 6 This is a cross-sectional schematic diagram of the arc-shaped connecting part and the rotating seat in an embodiment of the present invention, passing through the axis of the external threaded positioning pin.

[0035] Figure 7 This is a cross-sectional schematic diagram of the first connecting part passing through the axis of the round-headed top column when it is connected to the fixing block in an embodiment of the present invention;

[0036] Figure 8 This is a schematic cross-sectional view of the second connecting part passing through the bearing axis when it is connected to the connecting rod in an embodiment of the present invention;

[0037] Figure 9 This is a schematic diagram of the microscope structure in an embodiment of the present invention;

[0038] Figure 10 This is a schematic diagram of the structure of the ion mill in an embodiment of the present invention.

[0039] The reference numerals in the above figures are as follows: 11, First mounting part; 111, First reference surface; 112, First side wall; 113, Second side wall; 114, Screw; 115, First guide rail; 12, Second mounting part; 121, Second reference surface; 2, First slide; 21, Second guide rail; 22, Fixing block; 3, Second slide; 31, First connecting part; 311, Countersunk hole; 32, Second connecting part; 321, Through hole; 33, Arc connecting part; 331, Arc groove; 332, Waist-shaped through hole; 333, External threaded locating pin; 334, Threaded hole; 34, Third guide rail. 4. Rail; 5. Third slide; 6. Connecting rod; 7. Fourth slide; 8. Rotary seat; 9. First bearing stage; 10. Baffle; 11. First micrometer head; 12. First head; 13. First rod; 14. Spring; 15. First copper retaining ring; 26. Second micrometer head; 17. Adapter; 18. Bearing; 19. Second head; 20. Second rod; 21. Thin film; 22. Microscope; 23. Second bearing stage; 24. First positioning post; 25. Ion mill; 26. Third bearing stage; 27. Second positioning post; 28. Ion beam outlet. Detailed Implementation

[0040] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0041] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," "fixing," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art will understand the specific meaning of the above terms in this application based on the specific circumstances.

[0042] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "below," and "over" the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0043] In the description of this embodiment, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this application.

[0044] Furthermore, the terms "first" and "second" are used only to distinguish between different terms in description and do not have any special meaning.

[0045] like Figure 1 As shown, the probe grinding device in this embodiment is used for precise positioning and grinding of the probe. Specifically, the probe to be ground is vertically inserted into the thin film 9. When grinding is required, the thin film 9 is fixed to the probe fixing mechanism, and then the probe fixing mechanism is connected to the positioning mechanism to adjust the position of the probe. Finally, the probe fixing mechanism is connected to the grinding mechanism to grind the probe.

[0046] Specifically, such as Figure 1As shown, the probe fixing mechanism of this embodiment mainly includes: a mounting base, a first slide 2, a second slide 3, a third slide 4, a fourth slide 5, a rotating base 6, and a baffle 7. The mounting base includes a first mounting portion 11 and a second mounting portion 12 connected to each other. The first mounting portion 11 is detachably connected to the positioning mechanism, and the second mounting portion 12 is detachably connected to the grinding mechanism. The first slide 2 is connected to the first mounting portion 11 of the mounting base and can slide relative to the first mounting portion 11 along the X-direction. The second slide 3 is connected to the side of the first slide 2 opposite to the first mounting portion 11, and the second slide 3 can slide relative to the first slide 2 along the Y-direction. The third slide 4 is connected to the side of the second slide 3 opposite to the first slide. On one side of 2, it can slide relative to the second slide 3 along the Y direction; the fourth slide 5 is connected to the third slide 4 and can slide relative to the third slide 4 along the X direction; the rotating seat 6 is connected to the third slide 4 and the two can rotate relative to each other. The rotating seat 6 is provided with a first support platform 61 for fixing the film 9; the baffle 7 is connected to the fourth slide 5 and can move along the X and Y directions with the fourth slide 5, thereby blocking the probe on the film 9 (which does not need to be ground), so that the personnel can selectively grind the probe on the film 9.

[0047] With the above structure, the probe fixing mechanism of this embodiment can reliably clamp the probe to ensure that the probe remains stable during the grinding process and improve the accuracy of the position of the probe grinding cross section.

[0048] Specifically, such as Figure 2 As shown, the first mounting portion 11 of the mounting base in this embodiment has a first reference surface 111 for positioning connection with the positioning mechanism, and the second mounting portion 12 has a second reference surface 121 for positioning connection with the grinding mechanism. The first reference surface 111 and the second reference surface 121 are perpendicular to each other, and the second reference surface 121 is located on one side of the first reference surface 111 in the Y direction.

[0049] Furthermore, such as Figure 2 As shown, the first mounting portion 11 of the mounting base in this embodiment has a first inner cavity. This first inner cavity has a first sidewall 112 and a second sidewall 113 disposed opposite to each other, distributed along the X-direction of the first inner cavity. A screw 114 is provided on the first mounting portion 11, which passes through both the first sidewall 112 and the second sidewall 113 and is threadedly connected to the first slide block 2. A first guide rail 115 is provided in the first inner cavity, connected to the first slide block 2 to guide it. That is, the first slide block 2 is connected to the first mounting portion 11 of the mounting base via the screw 114 (which may also include a nut, which can be installed at the bottom of the first slide block 2). When the screw 114 is rotated, the first slide block 2 can move along the X-direction.

[0050] like Figure 3 and Figure 4 As shown, the first slide 2 in this embodiment has a second inner cavity, in which a second guide rail 21 is provided for connecting with and guiding the second slide 3. The second slide 3 has a third inner cavity, in which a third guide rail 34 is provided for connecting with the third slide 4. A first connecting portion 31 is provided on one side of the third inner cavity in the X direction, and a second connecting portion 32 is provided on the other side of the third inner cavity in the X direction. An arc connecting portion 33 is provided on the side of the third inner cavity in the Y direction away from the second mounting portion 12 of the mounting base. The arc connecting portion 33 refers to the part of it that is arc-shaped when connected with the rotating base 6. The arc connecting portion 33 is provided with an arc groove 331, which is used to engage with the rotating base 6.

[0051] like Figure 5 and Figure 6 As shown, in this embodiment, the rotating seat 6 has an arc shape on the side facing the arc connecting portion 33. The arc connecting portion 33 has a pair of oppositely arranged oblong through holes 332, which penetrate the main body of the arc groove 331. Each oblong through hole 332 contains an externally threaded locating pin 333, one end of which is fixedly connected to the rotating seat 6, and the other end is accommodated within the oblong through hole 332. The end of the arc connecting portion 33 away from the third inner cavity has two threaded holes 334, which are perpendicularly connected to the two oblong through holes 332. Each threaded hole 334 contains a bolt (not shown in the figure), which abuts against the corresponding externally threaded locating pin 333. Using this scheme, when it is necessary to rotate the rotating seat 6 to adjust the probe position, it is only necessary to rotate the two bolts simultaneously in opposite directions. Figure 5 and Figure 6 For example, when the left bolt (hereinafter referred to as the left bolt) rotates clockwise, the left bolt pushes the external threaded pin inward to drive the rotating seat 6 to rotate. At the same time, the right bolt (hereinafter referred to as the right bolt) rotates counterclockwise to loosen the right external threaded pin and make it rotate outward. When the rotating seat 6 rotates to the target position, the rotation of the two bolts stops at the same time, and the rotating seat 6 is tightened.

[0052] like Figure 4 and Figure 7As shown, in this embodiment, a fixing block 22 is connected to one end of the first slide block 2 near the first connecting part 31 of the second slide block 3. The fixing block 22 is located on the side of the first connecting part 31 away from the second mounting part 12 of the mounting base. The first connecting part 31 and the fixing block 22 are connected by a first micrometer head 81 and a round-headed top post. The first connecting part 31 is provided with a countersunk hole 311, which includes a connected large-diameter section and a small-diameter section. The inner diameter of the large-diameter section is larger than the inner diameter of the small-diameter section. The first micrometer head 81 is fastened to the end of the large-diameter section away from the small-diameter section. The round-headed top post includes a first head 821 and a first rod 822 connected to each other. The first head 821 and at least a portion of the first rod 822 are located in the large-diameter section of the countersunk hole 311. At least a portion of the first rod passes through the small-diameter section of the countersunk hole 311 and extends to be fixedly connected to the fixing block 22. A spring 83 is sleeved on the outer wall of the portion of the first rod 822 located in the large-diameter section. Using the above scheme, when the first micrometer head 81 is rotated so that its tail end (towards the round head pin) extends to abut against the first head 821 of the round head pin, the spring 83 is compressed so that the first connecting part 31 drives the second slide 3 to move in the Y direction toward the second mounting part 12 of the mounting base; when the first micrometer head 81 is rotated so that its tail end shortens to release the first head 821 abutted against by the round head, the spring 83 also relaxes and pushes the first connecting part 31. At this time, the first connecting part 31 drives the second slide 3 to move in the Y direction toward the direction away from the second mounting part 12.

[0053] Better, such as Figure 7 As shown, a first copper retaining ring 84 is fitted on the outer wall of the connection between the first micrometer 81 and the large-diameter section of the countersunk hole 311. Specifically, the first micrometer 81 is fitted with the first copper retaining ring 84, and the side wall of the countersunk hole 311 is provided with a positioning pin hole. When the first micrometer 81 and the first copper retaining ring 84 are inserted into the large-diameter section of the countersunk hole 311, the first micrometer 81 can be positioned by embedding a positioning pin in the positioning pin hole, and the first copper retaining ring 84 can replace the first micrometer 81 to contact the positioning pin to prevent the first micrometer 81 from deforming.

[0054] Combination Figure 4 and Figure 8As shown, in this embodiment, a connecting rod 41 is fixedly connected to the third slide 4. A bearing 87 is installed at the end of the connecting rod 41 away from the third slide 4, and a rotating shaft is fixedly inserted inside the bearing 87. The second connecting part 32 of the second slide 3 is connected to the aforementioned rotating shaft through a second micrometer head 85 and an adapter 86. Specifically, the second connecting part 32 is provided with a through hole 321, the inner diameter of which is larger than the outer diameter of the adapter 86 so that the adapter 86 can move within the through hole 321; the second micrometer head 85 is fixedly connected to the end of the through hole 321 away from the bearing 87, and the adapter 86 is fixedly connected to the end of the second micrometer head 85 facing the bearing 87 (or the tail end of the second micrometer head 85); the rotating shaft includes a second head 881 and a second rod 882 connected to each other. When the rotating shaft passes through the bearing 87, the second rod 882 of the rotating shaft passes into the through hole 321 to be fixedly connected with the adapter 86, and the second head 881 of the rotating shaft is located at the end of the bearing 87 away from the adapter 86. Using the above scheme, when the second micrometer head 85 is rotated so that its tail end extends, the adapter 86 drives the rotating shaft and bearing 87 to move in the Y direction away from the second mounting part 12 of the mounting base, and the connecting rod 41 drives the third slide 4 to move away from the second mounting part 12. When the second micrometer head 85 is rotated so that its tail end retracts, the adapter 86 drives the rotating shaft and bearing 87 to move in the Y direction towards the second mounting part 12 of the mounting base, and the connecting rod 41 drives the third slide 4 to move towards the second mounting part 12. During this process, the second slide 3 will not move in the Y direction.

[0055] Better, such as Figure 8 As shown, a second copper retaining ring is fitted on the outer wall of the connection part between the second micrometer 85 and the through hole 321 of the second connecting part 32. The function of the second copper retaining ring is largely the same as that of the first copper retaining ring 84.

[0056] like Figure 9 As shown, the positioning mechanism in this embodiment is a microscope 10, which includes a second support stage 110 and a first positioning post 120 disposed on the second support stage 110. The probe fixing mechanism is positioned on the second support stage 110 via the first positioning post 120. The objective lens of the microscope 10 has graduation lines, which are used to position the probe on the thin film 9. Specifically, the graduation lines are generally straight. During positioning, the positions of the slides and the rotating seat 6 of the probe fixing device are adjusted so that the probe to be ground on the thin film 9 is positioned on the graduation lines.

[0057] like Figure 10As shown, the grinding mechanism in this embodiment is an ion grinder 20, which includes a third support stage 210 and a second positioning post 220 disposed on the third support stage 210. The ion beam outlet 230 of the ion grinder 20 is located on the side of the third support stage 210 and has a preset distance in the Z-direction direction from the third support stage 210. When the probe fixing mechanism is installed on the ion grinder 20, the probe, after being positioned by the above-mentioned scale lines, is aligned with the ion beam outlet 230 in the Z-direction direction to ensure that the probe can be ground by the ion beam.

[0058] In summary, the method of using the probe grinding device in this embodiment is as follows: First, the thin film 9 through which the probe is inserted is attached to the first support stage 61 of the rotating seat 6, so that the probe to be ground is at the edge of the first support stage 61; Second, the probe fixing mechanism is installed as a whole on the second support stage 110 of the microscope 10, and positioning is achieved through the first positioning post 120 and the corresponding holes on the first mounting part 11; Third, the screw 114, the first micrometer 81, and the bolt are rotated respectively to drive the corresponding first slide 2, second slide 3, and rotating seat 6 to move, thereby realizing the position adjustment of the first support stage 61 in the X, Y and C axis directions, so that the probe to be ground is positioned at the edge of the first support stage 61. Align the grinding probe with the graduation lines of the objective lens of the microscope 10; in the fourth step, rotate the second micrometer head 85 to move the third slide 4 and the fourth slide 5 to adjust the position of the baffle 7 in the Y and X directions so that it can block the probe that does not need to be ground on the film 9. Then, tighten the fourth slide 5 to fix the baffle 7; in the fifth step, transfer the probe fixing mechanism from the microscope 10 to the ion polisher 20. Use the second positioning post 220 and the corresponding hole on the second mounting part 12 to achieve positioning and fastening. At this time, the probe to be ground is aligned with the ion beam outlet 230 of the ion polisher 20. Start the ion polisher 20 to grind the cross section of the unblocked probe.

[0059] Specific embodiments have been used to illustrate the principles and implementation methods of this invention. The descriptions of the embodiments above are only for the purpose of helping to understand the method and core ideas of this invention. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this invention. Therefore, the content of this specification should not be construed as a limitation of this invention.

Claims

1. A probe fixing mechanism for fixing a thin film through which a probe is inserted, characterized in that, include: The mounting base includes a first mounting part and a second mounting part that are connected to each other. The first mounting part is used to connect with a positioning mechanism, and the second mounting part is used to connect with a grinding mechanism. The first slide block is slidably connected to the first mounting portion of the mounting base along the X direction; The second slide block is slidably connected to the first slide block along the Y direction; The third slide is slidably connected to the second slide along the Y direction; The fourth slide is slidably connected to the third slide along the X direction; A rotating seat is rotatably connected to the second slide, and the rotating seat is provided with a first support platform for fixing the film; A baffle, connected to the fourth slide, is used to block part of the probe on the film; The first slide has a second inner cavity, in which a second guide rail for connecting with the second slide is provided. The second slide has a third inner cavity, in which a third guide rail for connecting with the third slide is provided. A first connecting portion is provided on one side of the third inner cavity in the X direction, and a second connecting portion is provided on the other side of the third inner cavity in the X direction. An arc-shaped connecting portion is provided on the Y-direction side of the third inner cavity opposite to the second mounting portion. The arc-shaped connecting portion has an arc-shaped groove, and the rotating seat is engaged with the arc-shaped groove. The side facing the arc-shaped connecting part is arc-shaped. The arc-shaped connecting part is provided with a pair of oppositely arranged waist-shaped through holes. The waist-shaped through holes penetrate the arc-shaped groove. An external threaded positioning pin is inserted in each waist-shaped through hole. One end of the external threaded positioning pin is fixed to the rotating seat, and the other end is accommodated in the waist-shaped through hole. The end of the arc-shaped connecting part away from the third inner cavity is provided with two threaded holes. The two threaded holes are perpendicularly connected to the two waist-shaped through holes respectively. Each threaded hole is provided with a bolt for abutting against the corresponding external threaded positioning pin.

2. The probe fixing mechanism according to claim 1, characterized in that, The first mounting part has a first reference surface connected to the positioning mechanism, and the second mounting part has a second reference surface connected to the grinding mechanism. The first reference surface and the second reference surface are perpendicular to each other, and the second reference surface is located in the Y direction of the first reference surface.

3. The probe fixing mechanism according to claim 1, characterized in that, The first mounting part has a first inner cavity, and the first inner cavity has a first sidewall and a second sidewall disposed opposite to each other in the X direction. The first mounting part is provided with a screw that passes through both the first sidewall and the second sidewall. The first slide is threadedly connected to the screw. The first inner cavity is provided with a first guide rail connected to the first slide.

4. The probe fixing mechanism according to claim 1, characterized in that, A fixing block is connected to one end of the first slide near the first connecting part. The fixing block is located on the side of the first connecting part away from the second mounting part. The first connecting part and the fixing block are connected by a first micrometer and a round-headed pin. The first connecting part is provided with a countersunk hole, which includes a connected large-diameter section and a small-diameter section. The first micrometer is fastened to the end of the large-diameter section away from the small-diameter section. The round-headed pin includes a first head and a first rod that are connected. The first head and at least a portion of the first rod are located within the large-diameter section of the countersunk hole. At least a portion of the first rod passes through the small-diameter section of the countersunk hole and is fastened to the fixing block. A spring is sleeved on the outer wall of the portion of the first rod located within the large-diameter section.

5. The probe fixing mechanism according to claim 4, characterized in that, A first copper retaining ring is fitted on the outer wall of the connection part between the first micrometer and the large diameter section of the countersunk hole.

6. The probe fixing mechanism according to claim 1, characterized in that, A connecting rod is fixedly connected to the third slide, and a bearing is installed on the connecting rod. A rotating shaft passes through the bearing. The second connecting part is connected to the rotating shaft through a second micrometer head and an adapter. The second connecting part has a through hole, the inner diameter of which is larger than the outer diameter of the adapter. The second micrometer head is fixed to the end of the through hole away from the bearing, and the adapter is fixed to the end of the second micrometer head facing the bearing. The rotating shaft includes a second head and a second rod part that are connected to each other. The second rod part of the rotating shaft is fixedly connected to the adapter, and the second head is located at the end of the bearing away from the adapter.

7. The probe fixing mechanism according to claim 1, characterized in that, The positioning mechanism is a microscope, and the objective lens of the microscope is provided with graduation lines. The grinding mechanism is an ion mill, and the graduation lines are used to position the probe. When the probe fixing mechanism is connected to the ion mill, the probe, after being positioned by the graduation lines, is aligned with the ion beam outlet of the ion mill along the Z direction.

8. A probe grinding apparatus, characterized in that, It includes a positioning mechanism, a grinding mechanism, and a probe fixing mechanism as described in any one of claims 1 to 7, wherein the probe fixing mechanism is connected to the positioning mechanism to position the probe to be ground, and then the probe fixing mechanism is connected to the grinding mechanism to perform probe grinding.

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