基板处理装置
By employing a slot structure with narrow and wide spacing and a drive mechanism in the substrate processing apparatus, the stability problem of substrate posture changes and handover is solved, thereby improving the reliability and efficiency of substrate processing.
CN119108307BActive Publication Date: 2026-07-17SCREEN HOLDINGS CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SCREEN HOLDINGS CO LTD
- Filing Date
- 2024-06-07
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
In existing substrate processing devices, the locking groove of the flip chuck allows the substrate to rise a short distance, making it difficult to stably control the posture changes and handover of the substrate.
Method used
By employing a posture transformation unit, a slot structure with narrow and wide intervals is set on the upper surface of the substrate through a flip chuck. Combined with a drive mechanism and a rotation mechanism, stable posture transformation and handover of multiple substrates can be achieved.
Benefits of technology
It enables stable orientation changes and handover of multiple substrates, reduces particle generation, and improves the reliability and efficiency of substrate processing.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN119108307B_ABST
Abstract
一种处理基板的基板处理装置，具备以下要素：批量式处理部，其以铅垂姿势的状态一并处理多张基板；单张式处理部，其以水平姿势的状态处理一张基板；姿势变换部，其对于在所述批量式处理部结束处理的所述多张基板，从铅垂姿势变换为水平姿势；第一搬运部，其将在所述批量式处理部结束处理的所述多张基板搬运到所述姿势变换部；第二搬运部，其将在所述姿势变换部成为水平姿势的所述多张基板搬运到所述单张式处理部，所述姿势变换部在进行所述多张基板的姿势变换时，以所述多张基板的上表面的上方的间隔狭窄的状态保持所述多张基板，在使所述多张基板成为水平姿势之后进行交接时，以所述多张基板的上表面的上方的间隔宽阔的状态保持所述多张基板。
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