Micro-nano structure processing device

Abstract

The invention relates to the technical field, in particular to a micro-nano structure processing device which comprises a sample table used for placing an object to be carved. The quartz biological needle tip is vertical to the sample table and is positioned above the sample table; the movement mechanism is connected with the quartz biological needle tip and used for controlling displacement of the quartz biological needle tip; the liquid inlet pump is connected with the quartz biological needle tip through a liquid inlet pipe and is used for injecting a solution into the quartz biological needle tip; the high-voltage power supply is electrically connected with the quartz biological needle tip and the sample table, and is used for applying pulse high voltage, so that the solution dropped from the quartz biological needle tip is exploded; compared with photoetching, ultraviolet exposure and 3D printing equipment, the method has the advantages that the cost is lower, compared with electric spark machining, the machining precision is higher, machining and manufacturing of micro-nano structures on the surfaces of various materials can be achieved, and the problems that existing micro-nano machining equipment is expensive and lacks universality are solved.

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