一种多层堆叠周期结构的光场注入计算方法及系统
By using an equivalent model and a surface plasmon resonance light field injection method, the problem of deep-level detection in optical detection of multi-layered opaque stacked structures was solved, achieving efficient and rapid light field penetration and simplifying the simulation process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- HUAZHONG UNIV OF SCI & TECH
- Filing Date
- 2024-08-16
- Publication Date
- 2026-07-17
AI Technical Summary
Traditional optical detection methods struggle to achieve deeper feature detection in multi-layered, opaque stacked structures and suffer from low detection efficiency.
By employing an anisotropic and homogeneous dielectric equivalent multilayer stacked structure and utilizing the surface plasmon resonance optical field injection method, electromagnetic simulations are performed by calculating the minimum wavelength and equivalent model to optimize the optical field penetration depth. The dielectric constant is calculated by combining the Lorentz-Drude model and the Maxwell-Garnet approximation theory to achieve deep penetration of the optical field.
It improves optical detection efficiency, breaks the skin limit of metals, realizes non-destructive and non-contact light field penetration, simplifies simulation calculation time, and improves detection efficiency.
Smart Images
Figure CN119132465B_ABST