Splash-proof device for single crystal furnace and single crystal furnace

Abstract

The invention discloses a splash-proof device for a single crystal furnace and the single crystal furnace, the single crystal furnace comprises a crucible and a water-cooling screen arranged above the crucible, the water-cooling screen is annular, the splash-proof device for the single crystal furnace comprises a protective part detachably arranged in the water-cooling screen, and the protective part is arranged in the water-cooling screen; the protection piece is annular and at least covers the inner peripheral wall of one end, close to the crucible, of the water cooling screen; the upper end of the feeding cylinder assembly is connected with a seed crystal rope of the single crystal furnace, the feeding cylinder assembly is suitable for being movably arranged in the water cooling screen in a penetrating mode in the vertical direction so as to place the protection piece in the water cooling screen, and the feeding cylinder assembly and the protection piece are detachably connected. According to the splash-proof device for the single crystal furnace, the normal use of the water cooling screen can be ensured, the crystal forming rate and the production quality of single crystals can be improved, the operation steps can be reduced, and the processing efficiency can be improved.

Description

Technical Field

[0001] The present invention relates to the technical field of crystal manufacturing, and more particularly to a splash-proof device for a single crystal furnace and a single crystal furnace. Background Art

[0002] In the related technology, the hydrogen content in the silicon material required for single crystal manufacturing is relatively high. During the heat and melting process of the silicon material, hydrogen jumping phenomenon will occur, which can easily cause the silicon liquid to splash out, causing the silicon liquid to be adsorbed on the water cooling screen, reducing the crystallization rate of single crystal production and affecting the production process.

[0003] Referring to the relevant technical document CN202111642121.2, it is disclosed that a circular sheath is arranged at the lower end of the water-cooling screen, and the circular sheath is connected to the lower end of the water-cooling screen, and is fixed above the quartz crucible through the water-cooling screen and the circular sheath, so as to prevent the water-cooling screen from melting or bursting due to high temperature, and can extend the length of the water-cooling screen, extend the thermal refraction of the water-cooling screen, and effectively ensure a good temperature gradient in the single crystal furnace.

[0004] This single crystal furnace mainly extends the length of the water-cooling screen by means of a circular ring-shaped sheath to prevent the water-cooling screen from melting or bursting due to high temperature. However, this method still causes hydrogen jump of the silicon material, which can easily cause the silicon liquid to be adsorbed on the water-cooling screen, reducing the crystallization rate of crystal production and affecting the production process. Summary of the invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one object of the present invention is to provide a splash-proof device for a single crystal furnace, which can ensure the normal use of a water cooling screen, improve the crystallization rate and production quality of a single crystal, and can reduce the operation steps and improve the processing efficiency.

[0006] Another object of the present invention is to provide a single crystal furnace having the above-mentioned splash-proof device.

[0007] According to an embodiment of the present invention, a splash-proof device for a single crystal furnace includes: the single crystal furnace includes a crucible and a water-cooling screen arranged above the crucible, the water-cooling screen is annular, and the splash-proof device includes: a protective member, the protective member is detachably arranged in the water-cooling screen, the protective member is formed in a ring shape and at least covers the inner circumferential wall of one end of the water-cooling screen close to the crucible; a feeding barrel assembly, the upper end of the feeding barrel assembly is connected to the seed crystal rope of the single crystal furnace, the feeding barrel assembly is suitable for being movably inserted into the water-cooling screen in the up and down directions to place the protective member in the water-cooling screen, and the feeding barrel assembly and the protective member are detachably connected.

[0008] According to the splash-proof device for a single crystal furnace according to an embodiment of the present invention, a protective member is detachably arranged in the water-cooling screen through a protective member, and the protective member is formed in a ring shape and at least covers the inner circumferential wall of one end of the water-cooling screen close to the crucible, so that the protective member can protect the water-cooling screen, avoid the silicon material adhering to the water-cooling screen and affecting the use of the water-cooling screen, and in the single crystal processing process, avoid the silicon liquid adsorbed on the water-cooling screen from falling into the crucible and causing pollution to the silicon liquid, thereby ensuring the crystallization rate of the single crystal and ensuring the production quality of the single crystal; the upper end of the feeding barrel assembly is connected to the seed crystal rope of the single crystal furnace, and the feeding barrel assembly is movably penetrated in the water-cooling screen in the up and down directions, so that the feeding barrel assembly and the protective member can be simultaneously placed in or taken out of the water-cooling screen, thereby reducing the operation steps and being conducive to improving the processing efficiency.

[0009] In addition, the splash protection device for a single crystal furnace according to the above embodiment of the present invention may also have the following additional technical features:

[0010] According to some embodiments of the splash-proof device for a single crystal furnace of the present invention, a connecting portion is provided on the inner circumferential wall of the protective member, and the feeding barrel assembly comprises: a feeding barrel body, the upper end of which is connected to the seed crystal rope; a mating segment, one end of which is connected to the feeding barrel body, and the other end of which extends radially outwardly toward the feeding barrel body, the connecting portions are multiple and are arranged at intervals along the circumferential direction of the protective member, the mating segments are multiple and are arranged at intervals along the circumferential direction of the feeding barrel body, and the multiple mating segments are detachably connected to the multiple connecting portions.

[0011] According to some embodiments of the present invention, the plurality of mating segments are mated with the plurality of connecting parts in a one-to-one correspondence; or, the plurality of connecting parts are divided into a plurality of groups, each group of connecting parts includes a plurality of connecting parts, a plurality of connecting parts in the plurality of groups of connecting parts are alternately arranged along the circumferential direction of the protective member, and the plurality of connecting parts in each group of connecting parts are mated with the plurality of mating segments in a one-to-one correspondence.

[0012] According to some embodiments of the present invention, the feeding barrel assembly further comprises: a clamp, the clamp is sleeved on the feeding barrel body, and one end of the matching section is connected to the clamp.

[0013] According to some embodiments of the present invention, the inner circumferential wall of the water-cooling screen includes an inclined section, which is formed in a ring shape, and in a direction from bottom to top, the inclined section extends obliquely in a direction away from the central axis of the water-cooling screen, and the protective member includes: an abutment portion, which is formed in a ring shape, and in a direction from bottom to top, the abutment portion extends obliquely in a radially outward direction of the water-cooling screen to abut against the inner circumferential wall of the water-cooling screen.

[0014] According to some embodiments of the present invention, the inner circumferential wall of the water-cooling screen also includes a straight tube section, which is formed in a ring shape, the upper end of the straight tube section is connected to the lower end of the inclined section, and the straight tube section has the same inner diameter in the up and down directions. The protective member also includes: a straight tube portion, which is formed in a ring shape, the upper end of the straight tube portion is connected to the lower end of the abutment portion, the straight tube portion has the same outer diameter in the up and down directions, and the straight tube portion is located inside the straight tube section.

[0015] According to some embodiments of the present invention, the splash-proof device also includes a lifting rod, which includes: a joint, the lower end of which is connected to the upper end of the feeding barrel assembly, the upper end of the joint is provided with a limiting portion extending along the circumferential direction of the joint; a chuck, the upper end of the chuck is connected to the seed crystal rope, the chuck has a mounting hole extending along the axial direction, the chuck has a notch on the peripheral wall that is connected to the mounting hole, the width of the notch is larger than the maximum diameter of the joint, the inner wall of the mounting hole has a supporting protrusion, the supporting protrusion extends along the circumferential direction of the mounting hole, the joint is suitable for extending into the mounting hole through the notch, and the lower end of the limiting portion is suitable for abutting against the upper end of the supporting protrusion.

[0016] According to some embodiments of the present invention, a flange extending along the circumferential direction of the chuck is provided on the outer peripheral wall of the chuck, and the lifting rod also includes a sleeve, which is suitable for being sleeved outside the supporting protrusion and the limiting portion, and the lower end of the sleeve is abutted against the upper end of the flange.

[0017] According to some embodiments of the present invention, the protective member is a molybdenum member, a graphite member, a carbon-carbon member, a silicon carbide member, a fiber-reinforced ceramic matrix composite member, silicon nitride or a quartz member.

[0018] The single crystal furnace according to the embodiment of the present invention includes the splash-proof device for the single crystal furnace according to the embodiment of the present invention.

[0019] According to the single crystal furnace of the embodiment of the present invention, the protective part is detachably arranged in the water-cooling screen through the protective part. The protective part is formed in a ring shape and at least covers the inner circumferential wall of the end of the water-cooling screen close to the crucible, so that the protective part can protect the water-cooling screen, avoid the silicon material adhering to the water-cooling screen and affecting the use of the water-cooling screen, and in the single crystal processing process, avoid the silicon liquid adsorbed on the water-cooling screen from falling into the crucible and causing pollution to the silicon liquid, thereby ensuring the crystallization rate of the single crystal and making the production quality of the single crystal good; the upper end of the feeding barrel assembly is connected with the seed crystal rope of the single crystal furnace, and the feeding barrel assembly is movably penetrated in the water-cooling screen in the up and down directions, so that the feeding barrel assembly and the protective part can be put into or taken out of the water-cooling screen at the same time, which reduces the operation steps and is conducive to improving the processing efficiency.

[0020] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0022] Figure 1 is a schematic structural diagram of a single crystal furnace according to an embodiment of the present invention;

[0023] Figure 2 yes Figure 1 The middle circle shows the enlarged structural schematic diagram of A;

[0024] Figure 3 is a schematic structural diagram of a protective member of a splash-proof device according to an embodiment of the present invention;

[0025] Figure 4 is a schematic structural diagram of a feeding barrel assembly according to an embodiment of the present invention;

[0026] Figure 5 yes Figure 4 The middle circle shows the enlarged structural schematic diagram of B;

[0027] Figure 6 is a schematic structural diagram of a lifting rod of a splash-proof device according to an embodiment of the present invention;

[0028] Figure 7 is a schematic structural diagram of a chuck of a splash-proof device according to an embodiment of the present invention;

[0029] Figure 8 is a schematic structural diagram of a joint of a splash-proof device according to an embodiment of the present invention;

[0030] Fig. 9 is a schematic structural diagram of a sleeve of a splash-proof device according to an embodiment of the present invention;

[0031] Fig.10 4 is a flow chart of a control method for a single crystal furnace according to an embodiment of the present invention.

[0032] Reference numerals:

[0033] 200. Single crystal furnace;

[0034] 11. Crucible; 12. Water cooling screen; 13. Main chamber; 121. Inclined section; 122. Straight section;

[0035] 20. Protective member; 21. Straight tube portion; 22. Abutment portion; 23. Connecting portion;

[0036] 30. Feeding barrel assembly;

[0037] 40, lifting rod; 41, joint; 42, chuck; 43, sleeve; 411, limit portion; 421, mounting hole; 422, notch; 423, supporting protrusion; 424, flange;

[0038] 50. Feeding barrel body; 51. Clamp; 52. Fitting section; 511. Fixed body; 512. First locking portion; 513. Second locking portion; 514. Connecting hole. DETAILED DESCRIPTION

[0039] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0040] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0041] In the description of the present invention, "first feature" and "second feature" may include one or more such features, "plurality" means two or more, a first feature "above" or "below" the second feature may include the first and second features being directly in contact, or may include the first and second features not being in direct contact but being in contact through another feature between them, and a first feature "above", "above" and "above" the second feature may include the first feature being directly above or diagonally above the second feature, or may simply mean that the first feature is horizontally higher than the second feature.

[0042] The splash protection device for the single crystal furnace 200 according to an embodiment of the present invention will be described below with reference to the accompanying drawings.

[0043] Reference Figure 1 and Figure 2As shown, the single crystal furnace 200 according to the embodiment of the present invention includes a crucible 11 and a water cooling screen 12. The water cooling screen 12 is arranged above the crucible 11. The water cooling screen 12 is annular. During the single crystal manufacturing process, the water cooling screen 12 can quickly take away the heat at the root of the single crystal, thereby increasing the growth rate of the single crystal and accelerating the growth rate of the single crystal. For example, the single crystal is a silicon crystal used in the solar photovoltaic industry.

[0044] When a single crystal is manufactured by the Czochralski method, silicon material is placed in the crucible 11. Under vacuum conditions and the protection of inert gas, the heater of the single crystal furnace 200 generates heat to melt the silicon material in the single crystal furnace 200 to form silicon liquid. Then, a seed crystal is introduced into the silicon liquid. At a suitable temperature, the silicon atoms in the silicon liquid will form crystals at the solid-liquid interface according to the silicon atom arrangement structure of the seed crystal to form a single crystal. The seed crystal is rotated and lifted to finally crystallize into a single crystal rod. For example, the silicon material can be manufactured by a modified Siemens method or fluidized bed technology.

[0045] In the related art, when adding silicon material into a crucible or melting silicon material in a crucible, silicon material (such as solid silicon material, liquid silicon material or mixed silicon material) may splash onto the water cooling screen, resulting in silicon splashing. For example, when melting silicon material in a crucible, droplets or small particles containing bubbles in the silicon liquid in the crucible jump out of the liquid surface, causing the silicon liquid to splash onto the water cooling screen; or, when adding silicon material into a crucible, the silicon material falls into the silicon liquid and splashes the silicon liquid due to gravity, causing the silicon liquid to splash onto the water cooling screen.

[0046] For example, the silicon material is granular polysilicon produced by fluidized bed technology, that is, granular silicon. Granular silicon has the advantages of low production cost, high bulk density, and good fluidity. However, due to the high hydrogen content of granular silicon, hydrogen hopping phenomenon will occur in the process of melting when granular silicon is heated, making the silicon liquid easily adsorbed on the water-cooled screen. In the subsequent processes (such as seeding, shouldering, equal diameter and finishing), the silicon material adhering to the water-cooled screen will fall into the silicon liquid in the crucible due to factors such as airflow or gravity, which may easily cause the pulled single crystal to break and stop the pulling production, reduce the crystallization rate of single crystal production, and affect the efficiency of single crystal output of single crystal in single crystal furnace. The "hydrogen hopping phenomenon" is that when granular silicon is produced by silane fluidized bed method, the surface of granular silicon is easy to absorb more hydrogen, which may easily cause silicon liquid to splash out and affect the production process.

[0047] Therefore, in the present invention, if Figure 1-Figure 3 As shown, the single crystal furnace 200 further includes a splash-proof device according to an embodiment of the present invention. The splash-proof device according to the embodiment of the present invention may include: a protective member 20 .

[0048] Specifically, the protective member 20 is detachably disposed in the water-cooling shield 12. The protective member 20 is formed in a ring shape, and the protective member 20 at least covers one end of the water-cooling shield 12 close to the crucible 11 (for example, Figure 1The inner peripheral wall of the water cooling shield 12 is formed by the protective member 20 (shown in the figure below), so that the protective member 20 can protect the water cooling shield 12. When hydrogen jump occurs in the silicon material, the silicon material that has hydrogen jump can adhere to the protective member 20, isolating the splashed silicon material from falling on the water cooling shield 12, and avoiding the silicon material from adhering to the water cooling shield 12 and affecting the use of the water cooling shield 12. At the same time, before processing the single crystal, the protective member 20 is removed, so that there is no silicon material adhering to the inner wall of the water cooling shield 12, avoiding the influence of the silicon splashing phenomenon on the subsequent production of the single crystal, ensuring the crystallization rate of the single crystal, and ensuring the production quality of the single crystal.

[0049] In addition, compared with the solution of using small silicon materials as a bottom to reduce silicon splashing, the present invention absorbs splashed silicon materials through the protective part 20, and there is no need to adjust the size and material of the silicon materials. It can use a high proportion of silicon materials that are easy to splash (such as granular silicon), thereby reducing the cost of silicon materials, reducing carbon footprint, meeting production needs, and avoiding the problem of small silicon materials easily absorbing impurities, thereby increasing the minority carrier lifetime of the single crystal, which is beneficial to improving the quality of the single crystal.

[0050] For example, before the single crystal furnace 200 is charged for the second time, the protective member 20 is placed in the water-cooled shield 12. During the silicon material chemical reaction, the hydrogen-jumped silicon material will adhere to the protective member 20. After the chemical reaction is completed and there is no hydrogen jumping phenomenon, the protective member 20 is taken out of the water-cooled shield 12 to perform the crystal pulling operation. This can ensure the normal use of the water-cooled shield 12 and prevent the silicon liquid adsorbed on the water-cooled shield 12 from falling into the crucible 11 and causing pollution to the silicon liquid, thereby ensuring the crystallization rate of the single crystal and improving the production quality of the single crystal.

[0051] At the same time, if Figure 4 and Figure 5 As shown, the splash-proof device also includes a feeding barrel assembly 30, the upper end of which is connected to the seed crystal rope of the single crystal furnace 200. The feeding barrel assembly 30 can be movably arranged in the water-cooled screen 12 in the up and down directions through the seed crystal rope, and the feeding barrel assembly 30 and the protective member 20 are detachably connected.

[0052] Therefore, when the feeding barrel assembly 30 and the protective member 20 are connected, the feeding barrel assembly 30 can be controlled to be movably installed in the water-cooling screen 12 through the seed crystal rope. When the seed crystal rope is controlled to move downward, it is convenient to place the protective member 20 in the water-cooling screen 12, so that the placement of the protective member 20 is realized, and the feeding barrel assembly 30 and the protective member 20 can be placed in the water-cooling screen 12 at the same time, so that the feeding barrel assembly 30 adds silicon material to the crucible 11, which reduces the operation steps and is beneficial to improving production efficiency; when the seed crystal rope is controlled to move upward, it is convenient to take out the protective member 20 from the water-cooling screen 12, so that the taking out of the protective member 20 is realized, and the feeding barrel assembly 30 and the protective member 20 can be taken out of the water-cooling screen 12 at the same time, which reduces the operation steps and is beneficial to improving processing efficiency.

[0053] When the protective part 20 is located in the water-cooling screen 12 and the feeding barrel assembly 30 is disassembled from the protective part 20, the feeding barrel assembly 30 can be inserted into the water-cooling screen 12 multiple times in the up and down directions to meet the quantity requirement of adding silicon material into the crucible 11, and avoid problems such as the silicon material adhering to the water-cooling screen 12 due to the removal of the protective part 20, thereby avoiding the influence of silicon splashing on the subsequent production of single crystals and ensuring the crystallization rate of single crystals.

[0054] In some embodiments, the protective member 20 can be cleaned. After the protective member 20 is at room temperature, the silicon material attached to the surface of the protective member 20 can be cleaned, which facilitates the continued use of the protective member 20 and prevents the silicone liquid from adhering to the water-cooled screen 12 when the protective member 20 is used again, which is beneficial to reducing production costs.

[0055] According to the splash-proof device of the embodiment of the present invention, the protective member 20 is detachably arranged in the water-cooling screen 12, and the protective member 20 is formed in a ring shape and at least covers the inner peripheral wall of one end of the water-cooling screen 12 close to the crucible 11, so that the protective member 20 can protect the water-cooling screen 12, and avoid the silicon material adhering to the water-cooling screen 12 and affecting the use of the water-cooling screen 12. In addition, during the processing of single crystals, the silicon liquid adsorbed on the water-cooling screen 12 is prevented from falling into the crucible 11 and polluting the silicon liquid, thereby ensuring the crystallization rate of the single crystal and achieving good production quality of the single crystal; the upper end of the feeding barrel assembly 30 is connected to the seed crystal rope of the single crystal furnace 200, and the feeding barrel assembly 30 is movably penetrated in the water-cooling screen 12 in the up and down directions, so that the feeding barrel assembly 30 and the protective member 20 can be simultaneously placed in the water-cooling screen 12 or taken out of the water-cooling screen 12, thereby reducing the operation steps and being conducive to improving the processing efficiency.

[0056] Since the splash-proof device according to the embodiment of the present invention has the above-mentioned beneficial technical effects, the single crystal furnace 200 according to the embodiment of the present invention is detachably arranged in the water-cooling screen 12 through the protective member 20, and the protective member 20 is formed in a ring shape and at least covers the inner peripheral wall of one end of the water-cooling screen 12 close to the crucible 11, so that the protective member 20 can protect the water-cooling screen 12, avoid the silicon material adhering to the water-cooling screen 12 and affecting the use of the water-cooling screen 12, and in the single crystal processing process, avoid the silicon liquid adsorbed on the water-cooling screen 12 from falling into the crucible 11 and causing pollution to the silicon liquid, thereby ensuring the crystallization rate of the single crystal and achieving good production quality of the single crystal; the upper end of the feeding barrel assembly 30 is connected to the seed crystal rope of the single crystal furnace 200, and the feeding barrel assembly 30 is movably arranged in the water-cooling screen 12 in the up and down directions, so that the feeding barrel assembly 30 and the protective member 20 can be simultaneously placed in the water-cooling screen 12 or taken out of the water-cooling screen 12, thereby reducing the operation steps and being conducive to improving the processing efficiency.

[0057] In the embodiment of the present invention, the specific structure of the protective member 20 can be flexibly set according to the specific structure of the water-cooling shield 12 .

[0058] In some embodiments of the present invention, Figure 1 and Figure 2 As shown, the inner wall of the water-cooling shield 12 includes an inclined section 121, which is formed in a ring shape. From bottom to top, the inclined section 121 extends obliquely in a direction away from the central axis of the water-cooling shield 12, which is beneficial to improving the heat dissipation effect of the water-cooling shield 12 on the single crystal.

[0059] In addition, if Figure 1-Figure 3 As shown, the protective member 20 includes an abutment portion 22, which is formed in a ring shape. In the direction from bottom to top, the abutment portion 22 extends obliquely in the radial outward direction of the water-cooling screen 12, which can meet the placement requirements of the protective member 20 in the water-cooling screen 12, and the abutment portion 22 can abut against the inner circumferential wall of the water-cooling screen 12 to prevent the protective member 20 from moving downward, so that the protective member 20 can be firmly placed in the water-cooling screen 12, ensuring that the protective member 20 has a good protective effect on the water-cooling screen 12.

[0060] In some embodiments, Figure 1-Figure 3 As shown, the inner wall of the water-cooled shield 12 also includes a straight section 122, which is formed in a ring shape. The upper end of the straight section 122 is connected to the lower end of the inclined section 121, and the straight section 122 has the same inner diameter in the up and down directions. The straight section 122 is used to guide the movement of the single crystal and to cool the single crystal.

[0061] In addition, if Figure 1-Figure 3 As shown, the protective member 20 also includes a straight-cylindrical portion 21, which is formed in a ring shape. The upper end of the straight-cylindrical portion 21 is connected to the lower end of the abutment portion 22. The straight-cylindrical portion 21 has the same outer diameter in the up and down directions. The straight-cylindrical portion 21 is located in the straight-cylindrical section 122, which is convenient for placing the protective member 20 in the water-cooled shield 12 and can meet the placement requirements of the protective member 20 in the water-cooled shield 12. The protective member 20 has a simple structure and is easy to process and manufacture, which is beneficial to reducing production costs.

[0062] In some embodiments of the present invention, Figure 2 and Figure 3 As shown, a connecting portion 23 is provided on the inner circumferential wall of the protective member 20, and the feeding barrel assembly 30 includes a feeding barrel body 50, and the upper end of the feeding barrel body 50 is connected to the seed crystal rope, which can realize the connection between the feeding barrel assembly 30 and the seed crystal rope and ensure that the feeding barrel assembly 30 and the seed crystal rope are reliably connected.

[0063] In addition, if Figure 4 and Figure 5As shown, the feeding barrel assembly 30 also includes a matching segment 52, one end of which is connected to the feeding barrel assembly 30, and the other end of which extends in the radially outward direction of the feeding barrel assembly 30. There are multiple connecting parts 23 and matching segments 52, and multiple connecting parts 23 are arranged at intervals along the circumferential direction of the protective member 20. Multiple matching segments 52 are arranged at intervals along the circumferential direction of the feeding barrel assembly 30, and multiple matching segments 52 are detachably connected to multiple connecting parts 23. Therefore, through the cooperation of multiple matching segments 52 and multiple connecting parts 23, it can ensure that the feeding barrel assembly 30 lifts the protective member 20 more stably, and avoid the protective member 20 from falling off. In addition, the structure of the feeding barrel assembly 30 is simple, which is convenient for processing and manufacturing, and is conducive to reducing production costs.

[0064] In some embodiments, Figure 2 and Figure 3 As shown, the connecting portion 23 is formed as an arc segment, and the middle portion of the arc segment protrudes upward. When the matching segment 52 is matched with the connecting portion 23, the matching segment 52 is not easy to fall out of the connecting portion 23, ensuring that the feeding barrel assembly 30 lifts the protective member 20 more firmly.

[0065] In some embodiments, after the protective member 20 is placed in the water-cooled shield 12, the seed crystal rope is moved downward to drive the feeding barrel body 50 to move downward, so as to meet the height requirement of the feeding barrel body 50 for feeding, and realize the disassembly of the matching section 52 and the connecting portion 23. When it is necessary to take out the feeding barrel body 50 alone, the seed crystal rope is rotated so that the seed crystal rope drives the feeding barrel body 50 to rotate, so that the matching section 52 can be staggered with the connecting portion 23, and then the seed crystal rope is moved upward to drive the feeding barrel body 50 to move upward, so as to realize the separation of the feeding barrel assembly 30 and the protective member 20, so as to realize that the feeding barrel assembly 30 is inserted into the water-cooled shield 12 multiple times in the up-down direction, so as to meet the quantity requirement of adding silicon material into the crucible 11, and avoid the problem that the silicon material is attached to the water-cooled shield 12 due to the removal of the protective member 20.

[0066] When the protective member 20 needs to be removed from the water-cooling shield 12, the seed crystal rope is rotated so that the seed crystal rope drives the feeding barrel body 50 to rotate, so that the matching section 52 is opposite to the connecting part 23, and then the seed crystal rope is moved upward to drive the feeding barrel body 50 to move upward, so as to achieve the matching between the matching section 52 and the connecting part 23, and then the seed crystal rope is further controlled to move upward to drive the feeding barrel body 50 to move upward, so that the matching section 52 drives the connecting part 23 to move upward, so as to achieve the removal of the protective member 20 from the water-cooling shield 12.

[0067] In the embodiment of the present invention, the number of the connecting parts 23 can be flexibly set according to the actual situation. For example, the connecting parts 23 can be as follows: Figure 3 Four are shown, but there may be two, three, five, six or more, all of which are within the protection scope of the present invention.

[0068] In the embodiment of the present invention, the number of the matching segments 52 can be flexibly set according to actual conditions. For example, the matching segments 52 can be as follows: Figure 5 Five are shown, but there may be two, three, four, six or more, all of which are within the protection scope of the present invention.

[0069] In some embodiments, the feeding barrel body 50 and the matching section 52 can be an integral piece, which is easy to manufacture, so that the connection strength between the feeding barrel body 50 and the matching section 52 is high, which is conducive to improving production efficiency.

[0070] According to some embodiments of the present invention, Figure 4 and Figure 5 As shown, the feeding barrel assembly 30 also includes a clamp 51, which is sleeved on the feeding barrel body 50, and one end of the matching section 52 is connected to the clamp 51. The matching section 52 is conveniently connected to the feeding barrel body 50 through the clamp 51, which helps to reduce the processing complexity of the feeding barrel assembly 30 and facilitates the disassembly of the matching section 52, which is convenient for maintenance or replacement, etc., and can meet different usage requirements.

[0071] In some embodiments, Figure 5 As shown, the clamp 51 includes a fixed body 511, a first locking portion 512 and a second locking portion 513. The fixed body 511 is an open ring. One end of the mating section 52 is connected to the fixed body 511. The first locking portion 512 and the second locking portion 513 are arranged opposite to each other, and the first locking portion 512 and the second locking portion 513 are respectively connected to the two ends of the fixed body 511 in the circumferential direction. The first locking portion 512 and the second locking portion 513 are both provided with connecting holes 514. The connecting holes 514 are used for fasteners to pass through. The clamp 51 can be locked by the fasteners to ensure that the clamp 51 is reliably fixed on the feeding barrel body 50. The structure of the clamp 51 is simple and convenient for processing and manufacturing.

[0072] In some embodiments, Figure 5 As shown, there are multiple connecting holes 514 of the first locking portion 512, and the multiple connecting holes 514 are arranged at intervals in the up and down directions on the first locking portion 512. The connecting holes 514 of the second locking portion 513 are multiple and correspond one to one with the connecting holes 514 of the first locking portion 512. By cooperating with the multiple connecting holes 514 of the second locking portions 513 and the multiple connecting holes 514 of the first locking portions 512, it is possible to ensure that the clamp 51 is reliably locked and that the mating section 52 can reliably support the protective member 20.

[0073] In the embodiment of the present invention, the number of the connecting holes 514 of the first locking portion 512 can be flexibly set according to actual conditions. For example, the connecting holes 514 of the first locking portion 512 can be as follows: Figure 5Two are shown, but three, four, five, six or more may also be provided, all of which are within the protection scope of the present invention.

[0074] According to some embodiments of the present invention, Figure 2-Figure 5 As shown, the one-to-one cooperation of the multiple mating segments 52 and the multiple connecting parts 23 makes the cooperation between the mating segments 52 and the connecting parts 23 more reliable, ensuring that the feeding barrel assembly 30 lifts the protective part 20 more firmly, avoiding the protective part 20 from tilting, facilitating the placement of the protective part 20, and avoiding the protective part 20 from colliding with other positions of the water-cooled screen 12 and causing damage.

[0075] Alternatively, the multiple connecting parts 23 can be divided into multiple groups (greater than or equal to two groups), each group of connecting parts 23 includes multiple connecting parts 23, and the multiple connecting parts 23 in the multiple groups of connecting parts 23 are alternately arranged along the circumferential direction of the protective part 20. The multiple connecting parts 23 in each group of connecting parts 23 are matched with the multiple matching sections 52 in a one-to-one correspondence, so that the matching sections 52 and the connecting parts 23 are more convenient to match, and the matching complexity is reduced, which is beneficial to reducing the production cost of the feeding barrel assembly 30. At the same time, it can prevent the protective part 20 from being skewed, facilitate the placement of the protective part 20, and avoid the protective part 20 from colliding with other positions of the water-cooled screen 12 and causing damage.

[0076] In some embodiments, Figure 3 and Figure 5 As shown, there can be four matching sections 52 and four connecting parts 23. The four matching sections 52 and the four connecting parts 23 match one by one, so that the matching sections 52 and the connecting parts 23 match more reliably, ensuring that the feeding barrel assembly 30 lifts the protective part 20 more firmly and avoids the protective part 20 from tilting.

[0077] In some embodiments, there can be two mating segments 52 and four connecting parts 23. The four connecting parts 23 can be divided into two groups, each group of connecting parts 23 includes two connecting parts 23, and the two connecting parts 23 in the two groups of connecting parts 23 are alternately arranged along the circumferential direction of the protective member 20. The two connecting parts 23 of one group of connecting parts 23 in the two groups can be matched with the two mating segments 52 one by one, so that the mating segments 52 and the connecting parts 23 are more convenient to match, reducing the complexity of matching, which is beneficial to reducing the production cost of the feeding barrel assembly 30 and avoiding the protective member 20 from being skewed.

[0078] In some embodiments of the present invention, Figure 6-Figure 9As shown, the splash-proof device also includes a lifting rod 40, which includes a joint 41 and a chuck 42. The upper end of the chuck 42 is connected to the seed crystal rope, so that the lifting rod 40 and the seed crystal rope can be connected. The lower end of the joint 41 is connected to the upper end of the feeding barrel assembly 30, so that the lifting rod 40 and the feeding barrel assembly 30 can be connected. The lifting rod 40 can be controlled to move up and down by moving the seed crystal rope up and down, so that the feeding barrel assembly 30 connected to the lifting rod 40 moves up and down, which is convenient for placing and removing the protective part 20 and the feeding barrel assembly 30.

[0079] The chuck 42 has a mounting hole 421, and the mounting hole 421 is arranged along the axial direction (for example Figure 6 ), the peripheral wall of the chuck 42 is provided with a notch 422, the notch 422 is connected with the mounting hole 421, the width of the notch 422 is greater than the maximum diameter of the joint 41, the inner wall of the mounting hole 421 is provided with a support protrusion 423, the support protrusion 423 extends along the circumferential direction of the mounting hole 421, and the upper end of the joint 41 is provided with a limit portion 411, and the limit portion 411 extends along the circumferential direction of the joint 41. Thus, the joint 41 can extend into the mounting hole 421 through the notch 422, and the lower end of the limit portion 411 abuts against the upper end of the support protrusion 423, so that the chuck 42 can limit the joint 41, and the assembly of the joint 41 and the chuck 42 is realized, and the joint 41 and the chuck 42 are easy to install and disassemble, which is conducive to improving the assembly effect, and at the same time, it is convenient for the chuck 42 to be connected with other structures to meet different connection requirements. The structure of the joint 41 and the chuck 42 is simple, which is conducive to reducing the production cost.

[0080] In some embodiments, the chuck 42 may be a stainless steel chuck. The stainless steel has good high temperature resistance, meets the use requirements of the chuck 42 , and is conducive to extending the service life of the chuck 42 .

[0081] In some embodiments, the connector 41 and the charging barrel assembly 30 may be connected by threads to ensure that the connector 41 and the charging barrel assembly 30 are reliably connected and easy to disassemble.

[0082] According to some embodiments of the present invention, Figure 6 , Figure 7 and Fig. 9 As shown, a flange 424 is provided on the outer peripheral wall of the chuck 42, and the flange 424 extends along the circumferential direction of the chuck 42, which is beneficial to improve the structural strength of the chuck 42. The lifting rod 40 also includes a sleeve 43, which is sleeved outside the supporting protrusion 423 and the limiting portion 411, and the lower end of the sleeve 43 abuts against the upper end of the flange 424. The sleeve 43 can limit the joint 41 to prevent the joint 41 from falling out of the chuck 42, ensuring that the joint 41 is reliably fixed in the chuck 42, and the flange 424 can limit the sleeve 43 to ensure that the sleeve 43 is reliably fixed on the chuck 42 to prevent it from falling off.

[0083] In some embodiments of the present invention, the protective part 20 can be a molybdenum part, a graphite part, a carbon-carbon part, a silicon carbide part, a fiber-reinforced ceramic-based composite material part, silicon nitride or a quartz part, all of which have good high temperature resistance, can meet the required requirements of the protective part 20, and are beneficial to extending the service life of the protective part 20.

[0084] A control method for a single crystal furnace 200 according to a specific embodiment of the present invention is described in detail below with reference to the accompanying drawings. It should be understood that the following description is only an exemplary illustration and should not be construed as a limitation to the invention.

[0085] Reference Figure 1 and Figure 2 As shown, the single crystal furnace 200 includes a crucible 11 , a water-cooled shield 12 and a splash-proof device 100 . The water-cooled shield 12 is disposed above the crucible 11 . The splash-proof device 100 may include a protective member 20 and a feeding barrel assembly 30 .

[0086] like Fig.10 As shown, the control method of the single crystal furnace 200 according to an embodiment of the present invention includes:

[0087] Connect the upper end of the charging barrel assembly 30 to the seed crystal rope of the single crystal furnace 200, and preliminarily match the protective member 20 with the lower end of the charging barrel assembly 30, so that the seed crystal rope can be connected to the protective member 20 through the charging barrel assembly 30, which is convenient for subsequent operations on the protective member 20, for example, manually connect the charging barrel assembly 30 to the seed crystal rope, and manually match the protective member 20 with the lower end of the charging barrel assembly 30;

[0088] The seed crystal rope is controlled to drive the feeding barrel assembly 30 to move downward, and the protective member 20 can be placed in the water-cooling shield 12, that is, the protective member 20 is placed by driving the seed crystal rope, so that the protective member 20 can be placed conveniently and reliably, and the feeding barrel assembly 30 and the protective member 20 can be placed in the water-cooling shield 12 at the same time, which reduces the operation steps and is conducive to improving production efficiency;

[0089] The feeding barrel assembly 30 is controlled to add silicon material into the crucible 11 to meet the feeding demand in the crucible 11, so that the feeding barrel assembly 30 can add silicon material into the crucible 11, and the water-cooling screen 12 can be protected by the protective member 20. When hydrogen jump occurs in the silicon material, the hydrogen-jumped silicon material can adhere to the protective member 20, isolating the splashed silicon material from falling on the water-cooling screen 12, and avoiding the silicon material from adhering to the water-cooling screen 12 and affecting the use of the water-cooling screen 12.

[0090] After the material is oxidized, the seed crystal rope is controlled to drive the feeding barrel assembly 30 to move upward and the protective piece 20 is taken out, which can ensure that there is no silicon material adhering to the inner wall of the water-cooled screen 12, ensure the normal use of the water-cooled screen 12, avoid the influence of silicon splashing on the subsequent production of single crystals, facilitate subsequent crystal pulling and other operations, ensure the crystallization rate of single crystals, and make the production quality of single crystals good. The feeding barrel assembly 30 and the protective piece 20 can be taken out of the water-cooled screen 12 at the same time, which reduces the operation steps and is conducive to improving processing efficiency.

[0091] In some embodiments of the present invention, Figure 1 and Figure 2 As shown, the single crystal furnace 200 includes a main chamber 13 and a sub-chamber, the main chamber 13 and the sub-chamber are interconnected, the sub-chamber is located above the main chamber 13, and the side of the sub-chamber facing the main chamber 13 is open to form an open mouth, the crucible 11 and the water-cooled shield 12 are arranged in the main chamber 13, and the seed crystal rope is connected to the upper end of the sub-chamber. After the single crystal is pulled, it is convenient to move the single crystal from the main chamber 13 to the sub-chamber for placement through the seed crystal rope, thereby meeting the processing requirements of the single crystal.

[0092] In addition, a control valve is provided between the main chamber 13 and the sub-chamber, and the control valve is used to open or close the main chamber 13. When the sub-chamber needs to be opened, closing the main chamber 13 by the control valve can prevent external air from entering the main chamber 13 and affecting the environment inside the main chamber 13, thereby ensuring the normal use of the single crystal furnace 200.

[0093] like Fig.10 As shown, the upper end of the charging barrel assembly 30 is connected to the seed crystal rope of the single crystal furnace 200, and the protective member 20 is preliminarily matched with the lower end of the charging barrel assembly 30, including:

[0094] Control the control valve to close the main chamber 13;

[0095] Unscrewing the auxiliary chamber, that is, opening the auxiliary chamber when the control valve closes the main chamber 13, can prevent external air from entering the main chamber 13 and affecting the environment in the main chamber 13;

[0096] Control the seed crystal rope to move downward, connect the upper end of the feeding barrel assembly 30 with the seed crystal rope, and preliminarily match the protective member 20 with the lower end of the feeding barrel assembly 30, so as to realize the connection between the seed crystal rope and the feeding barrel assembly 30, and the matching of the protective member 20 with the lower end of the feeding barrel assembly 30, for example, by manually connecting the feeding barrel assembly 30 with the seed crystal rope, and manually matching the protective member 20 with the lower end of the feeding barrel assembly 30;

[0097] Control the seed crystal rope to drive the feeding barrel assembly 30 to move upward, so that the protective element 20 and the feeding barrel assembly 30 can be located in the auxiliary chamber, which is convenient for subsequent operations;

[0098] Swing back to the auxiliary chamber;

[0099] The control valve is controlled to open the main chamber 13 so that the main chamber 13 can communicate with the sub-chamber, facilitating the operation of the charging cylinder assembly 30 and the protection member 20 moving downward.

[0100] Therefore, it is convenient to connect the seed crystal rope with the feeding barrel assembly 30 and the feeding barrel assembly 30 with the protective member 20, and the opening and closing of the main chamber 13 can be controlled by the control valve, so as to meet different usage requirements.

[0101] In some embodiments, after controlling the control valve to close the main chamber 13 and before opening the auxiliary chamber, the control method further includes:

[0102] By inflating the auxiliary chamber, the air pressure in the auxiliary chamber can be controlled to be the same as the external air pressure, which facilitates the opening of the auxiliary chamber and avoids problems such as resistance caused by low air pressure in the auxiliary chamber. For example, argon gas can be injected into the auxiliary chamber to achieve the same air pressure in the auxiliary chamber as that outside.

[0103] According to some embodiments of the present invention, after the secondary chamber is swung back and before the control valve is controlled to open the main chamber 13, the control method further includes:

[0104] By evacuating the sub-chamber and opening the main chamber 13 with a control valve, it is possible to prevent external air in the sub-chamber from entering the main chamber 13 and affecting the environment in the main chamber 13 , thereby ensuring normal use of the single crystal furnace 200 .

[0105] In some embodiments, the sub-chamber is evacuated multiple times to ensure that the evacuation of the sub-chamber is more reliable, to prevent other gases from accumulating in the sub-chamber and entering the main chamber 13 to affect the environment in the main chamber 13, and to ensure the normal processing of the single crystal. For example, the sub-chamber is evacuated twice, first evacuating the sub-chamber, then flushing argon gas into the sub-chamber, and finally evacuating the sub-chamber again, which can ensure that no other gas accumulates in the sub-chamber, and to ensure the normal processing of the single crystal.

[0106] In some embodiments of the present invention, when rotating the auxiliary chamber, manually controlling the seed rope to be stable can prevent the seed rope from shaking and affecting subsequent operations, thereby ensuring reliable operation of the seed rope.

[0107] According to some embodiments of the present invention, an observation port is provided on the sub-chamber, through which the inside of the sub-chamber can be observed, and the seed crystal rope in the sub-chamber can be observed, so as to facilitate control of the seed crystal rope.

[0108] In some embodiments of manually controlling the stabilization of the seed rope, the seed rope can be manually stabilized by reaching into the observation port to ensure that the seed rope is stable and reliable, thereby facilitating control.

[0109] According to some embodiments of the present invention, Figure 2-Figure 5As shown, a connecting portion 23 is provided on the inner circumferential wall of the protective member 20, and the feeding barrel assembly 30 includes a feeding barrel body 50, and the upper end of the feeding barrel body 50 is connected to the seed crystal rope, which can realize the connection between the feeding barrel assembly 30 and the seed crystal rope, ensure that the feeding barrel assembly 30 and the seed crystal rope are reliably connected, and facilitate the movement of the feeding barrel assembly 30 through the seed crystal rope.

[0110] In addition, if Figure 3-Figure 5 As shown, the feeding barrel assembly 30 also includes a matching segment 52, one end of which is connected to the feeding barrel body 50, and the other end of which extends in the radially outward direction of the feeding barrel body 50. There are multiple connecting parts 23 and matching segments 52, and multiple connecting parts 23 are arranged at intervals along the circumferential direction of the protective member 20. Multiple matching segments 52 are arranged at intervals along the circumferential direction of the feeding barrel body 50. When the matching segments 52 and the connecting parts 23 are matched, the multiple matching segments 52 are located below the multiple connecting parts 23. Therefore, through the cooperation of multiple matching segments 52 and multiple connecting parts 23, it can be ensured that the feeding barrel assembly 30 lifts the protective member 20 more stably, and the protective member 20 can be prevented from falling off. In addition, the structure of the feeding barrel assembly 30 is simple, which is convenient for processing and manufacturing, and is conducive to reducing production costs.

[0111] like Fig.10 As shown, controlling the feeding cylinder assembly 30 to add silicon material into the crucible 11 includes:

[0112] Controlling the seed crystal rope to drive the feeding barrel assembly 30 to move downward and add silicon material into the crucible 11 can reduce the distance between the feeding barrel assembly 30 and the crucible 11, making it easier for the silicon material to enter the crucible 11 from the feeding barrel assembly 30, ensuring reliable feeding and reducing the problem of silicon material contacting with silicon liquid and causing silicon liquid to splash out.

[0113] After the feeding barrel assembly 30 has finished feeding, the seed crystal rope is controlled to rotate so that the connecting portion 23 and the matching section 52 can be staggered, which is convenient for the subsequent operation of the feeding barrel assembly 30;

[0114] The seed crystal rope is controlled to drive the feeding barrel assembly 30 to move upward, so that the feeding barrel assembly 30 can be moved, which is convenient for subsequent operations. The removal control of the feeding barrel assembly 30 is simple, which is convenient for controlling the single crystal furnace 200, and avoids the problem that the feeding barrel assembly 30 takes out the protective part 20, causing the silicon material to adhere to the water cooling screen 12, and avoids the influence of silicon splashing on the subsequent production of single crystals, thereby ensuring the crystallization rate of single crystals;

[0115] Adding silicon material into the feeding barrel assembly 30;

[0116] The matching section 52 and the connecting portion 23 are controlled to be staggered in the circumferential direction, so as to facilitate the movement of the feeding barrel assembly 30 and avoid interference between the matching section 52 and the connecting portion 23;

[0117] The seed crystal rope is controlled to drive the feeding barrel assembly 30 to move downward to add silicon material into the crucible 11. Thus, by moving the feeding barrel assembly 30 multiple times, the demand for adding silicon material into the crucible 11 can be met, ensuring reliable processing of the single crystal furnace 200.

[0118] In some embodiments where the single crystal furnace 200 includes a main chamber 13 and a sub-chamber that are interconnected, adding silicon material into the feeding cylinder assembly 30 includes:

[0119] Control the control valve to close the main chamber 13;

[0120] Unscrewing the auxiliary chamber, that is, opening the auxiliary chamber when the control valve closes the main chamber 13, can prevent external air from entering the main chamber 13 and affecting the environment in the main chamber 13;

[0121] Control the seed crystal rope to drive the feeding barrel assembly 30 to move downward, and add silicon material into the feeding barrel assembly 30, so as to meet the demand of adding material into the feeding barrel assembly 30;

[0122] Control the seed crystal rope to drive the feeding barrel assembly 30 to move upward, so that the feeding barrel assembly 30 can be located in the auxiliary chamber, which is convenient for subsequent operations;

[0123] Swing back to the auxiliary chamber;

[0124] The control valve is controlled to open the main chamber 13 so that the main chamber 13 can communicate with the auxiliary chamber, which is convenient for the downward movement of the charging barrel assembly 30. Thus, the charging barrel assembly 30 is more convenient to add materials, and the opening and closing of the main chamber 13 can be controlled by the control valve to meet different usage requirements.

[0125] In some embodiments, the above-mentioned control method can realize multiple movements of the feeding barrel assembly 30 in the water-cooled shield 12, meet the quantity requirement of adding silicon material into the crucible 11, and avoid problems such as the silicon material adhering to the water-cooled shield 12 due to the removal of the protective part 20, avoid the influence of silicon splashing on the subsequent production of single crystals, and ensure the crystallization rate of single crystals.

[0126] In some embodiments of the present invention, Fig.10 As shown, after the material to be processed is finished, the seed crystal rope is controlled to drive the feeding barrel assembly 30 to move upward, and the protective member 20 is taken out, including:

[0127] By controlling the rotation of the seed crystal rope, the matching section 52 can be located directly below the connecting portion 23, which is convenient for subsequent operations;

[0128] Controlling the seed crystal rope to drive the feeding barrel assembly 30 to move upward can achieve the cooperation between the protective member 20 and the lower end of the feeding barrel assembly 30, and realize the simultaneous removal of the protective member 20 and the feeding barrel assembly 30, which is convenient for controlling the single crystal furnace 200, reduces the operating steps, and is conducive to improving processing efficiency.

[0129] According to some embodiments of the present invention, before controlling the seed crystal rope to drive the feeding barrel assembly 30 to move downward to place the protective member 20 in the water cooling shield 12, the control method further includes:

[0130] The water-cooling shield 12 is raised from the initial position to the upper limit position. In other words, the position of the water-cooling shield 12 is raised to facilitate the placement of the protective member 20 , ensure that the protective member 20 is placed reliably, and avoid the protective member 20 from contacting the silicon liquid in the crucible 11 and causing damage.

[0131] It should be noted that the “initial position” refers to the position of the water-cooling shield 12 during the single crystal manufacturing process.

[0132] In some embodiments of the present invention, after the material to be processed is finished, the seed crystal rope is controlled to drive the feeding barrel assembly 30 to move upward, and after the protective element 20 is taken out, the control method includes:

[0133] The water-cooling shield 12 is controlled to descend from the upper limit position to the initial position, which is convenient for the subsequent manufacture of the single crystal. When the water-cooling shield 12 is at the initial position, it is convenient to cool the single crystal, which is beneficial to improving production efficiency.

[0134] According to some embodiments of the present invention, during the loading stage of the single crystal furnace 200, the protective member 20 is directly placed in the water-cooling shield 12, so that the water-cooling shield 12 can be assembled in advance, reducing cumbersome operating steps, and when silicon material is re-added through the feeding barrel assembly 30, the protective member 20 can be taken out through the feeding barrel assembly 30, reducing the operating steps and helping to improve processing efficiency.

[0135] In some embodiments, after the single crystal furnace 200 completes processing of the single crystal, when it is necessary to add silicon material to the crucible 11, this can be achieved through the above-mentioned control method to meet the demand for adding silicon material to the crucible 11, and when hydrogen jumping occurs in the silicon material, it is avoided that the silicon material adheres to the water-cooling screen 12 and affects the use of the water-cooling screen 12, thereby ensuring the crystallization rate of the single crystal and improving the production quality of the single crystal.

[0136] The other structures and operations of the splash-proof device and the single crystal furnace 200 according to the embodiment of the present invention are known to those skilled in the art and will not be described in detail here.

[0137] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0138] In the description of this specification, the description with reference to the terms "embodiment", "specific embodiment", "example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0139] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A splash-proof device for a single crystal furnace, It is characterized in that The single crystal furnace comprises a crucible and a water-cooling screen arranged above the crucible, wherein the water-cooling screen is annular, and the splash-proof device comprises: A protective member, the protective member is detachably disposed in the water-cooling shield, the protective member is formed in a ring shape and at least covers an inner peripheral wall of one end of the water-cooling shield close to the crucible; A feeding barrel assembly, the upper end of which is connected to the seed crystal rope of the single crystal furnace, the feeding barrel assembly is suitable for being movably arranged in the water-cooling screen in the up and down directions so as to place the protective element in the water-cooling screen, and the feeding barrel assembly and the protective element are detachably connected.

2. The splash-proof device for a single crystal furnace according to claim 1, It is characterized in that A connecting portion is provided on the inner peripheral wall of the protective member, and the feeding cylinder assembly comprises: A feeding barrel body, the upper end of which is connected to the seed crystal rope; A mating segment, one end of which is connected to the feeding barrel body, and the other end of which extends radially outward from the feeding barrel body, wherein a plurality of connecting portions are spaced apart along the circumferential direction of the protective member, and a plurality of mating segments are spaced apart along the circumferential direction of the feeding barrel body, and a plurality of the mating segments are detachably connected to a plurality of the connecting portions.

3. The splash-proof device for a single crystal furnace according to claim 2, It is characterized in that The plurality of matching sections match the plurality of connecting parts in a one-to-one correspondence; Alternatively, the multiple connecting parts are multiple groups, each group of connecting parts includes multiple connecting parts, the multiple connecting parts in the multiple groups of connecting parts are alternately arranged along the circumferential direction of the protective member, and the multiple connecting parts in each group of connecting parts are matched with the multiple matching sections one by one.

4. The splash-proof device for a single crystal furnace according to claim 2, It is characterized in that The charging cylinder assembly also includes: A clamp is sleeved on the feeding barrel body, and one end of the matching section is connected to the clamp.

5. The splash-proof device for a single crystal furnace according to claim 1, It is characterized in that The inner peripheral wall of the water-cooling panel includes an inclined section, which is formed in a ring shape. In the direction from bottom to top, the inclined section extends obliquely in a direction away from the central axis of the water-cooling panel. The protective member includes: The abutting portion is formed in a ring shape. In a direction from bottom to top, the abutting portion extends obliquely toward the radial outward direction of the water-cooling panel to abut against the inner peripheral wall of the water-cooling panel.

6. The splash-proof device for a single crystal furnace according to claim 5, It is characterized in that The inner peripheral wall of the water-cooling screen further includes a straight section, the straight section is formed in a ring shape, the upper end of the straight section is connected to the lower end of the inclined section, the straight section has the same inner diameter in the upper and lower directions, and the protective member further includes: The straight tube part is formed into a ring shape, the upper end of the straight tube part is connected to the lower end of the abutment part, the straight tube part has the same outer diameter in the up and down directions, and the straight tube part is located in the straight tube section.

7. The splash-proof device for a single crystal furnace according to claim 1, It is characterized in that The splash-proof device further comprises a lifting rod, and the lifting rod comprises: A joint, the lower end of which is connected to the upper end of the feeding barrel assembly, and the upper end of which is provided with a limiting portion extending along the circumferential direction of the joint; A chuck, the upper end of which is connected to the seed crystal rope, the chuck having a mounting hole extending in an axial direction, the chuck having a notch on its peripheral wall which is connected to the mounting hole, the width of the notch being greater than the maximum diameter of the joint, the inner wall of the mounting hole having a supporting protrusion which extends in a circumferential direction of the mounting hole, the joint being suitable for extending into the mounting hole through the notch, and the lower end of the limiting portion being suitable for abutting against the upper end of the supporting protrusion.

8. The splash-proof device for a single crystal furnace according to claim 7, It is characterized in that The outer peripheral wall of the chuck is provided with a flange extending along the circumferential direction of the chuck, and the lifting rod also includes a sleeve, which is suitable for being sleeved outside the supporting protrusion and the limiting portion, and the lower end of the sleeve is against the upper end of the flange.

9. The splash-proof device for a single crystal furnace according to claim 1, It is characterized in that The protective part is a molybdenum part, a graphite part, a carbon-carbon part, a silicon carbide part, a fiber-reinforced ceramic-based composite material part, silicon nitride or a quartz part.

10. A single crystal furnace, It is characterized in that The invention comprises a splash-proof device for a single crystal furnace according to any one of claims 1 to 9.

Images